JPH078134Y2 - Flat polishing machine - Google Patents
Flat polishing machineInfo
- Publication number
- JPH078134Y2 JPH078134Y2 JP1989049214U JP4921489U JPH078134Y2 JP H078134 Y2 JPH078134 Y2 JP H078134Y2 JP 1989049214 U JP1989049214 U JP 1989049214U JP 4921489 U JP4921489 U JP 4921489U JP H078134 Y2 JPH078134 Y2 JP H078134Y2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- polishing
- grindstone
- mounting plate
- bolt insertion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims description 41
- 239000007787 solid Substances 0.000 claims description 42
- 238000003780 insertion Methods 0.000 claims description 20
- 230000037431 insertion Effects 0.000 claims description 20
- 239000007788 liquid Substances 0.000 description 16
- 239000002699 waste material Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 8
- 239000006061 abrasive grain Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Description
【考案の詳細な説明】 （産業上の利用分野） 本考案は、平面研磨装置に係り、更に詳しくは、金属，
ガラス，半導体ウェハー等の表面を平坦に均一且つ効率
よく研磨するに適した形状の固形砥石を搭載した平面研
磨装置に関する。[Detailed Description of the Invention] (Industrial field of application) The present invention relates to a surface polishing apparatus, and more specifically, to a metal,
The present invention relates to a flat surface polishing apparatus equipped with a solid whetstone having a shape suitable for uniformly and efficiently polishing the surface of glass, semiconductor wafer, or the like.
（従来の技術） 従来、金属，ガラス，半導体ウェハー等、極めて平坦な
面を必要とする材料の表面研磨は、研磨用砥粒を含有す
るスラリーを定常的に供給し乍ら、被研磨体（ワーク）
を鋳鉄製定盤上で摺動し研磨する所謂ラッピング式研磨
機で行っていたが、近年、ラッピング定盤として鋳鉄製
定盤に代えて砥粒を含有した固形砥石を用い、水あるい
は少量の界面活性剤を含有した水を定常的に供給し乍ら
研磨する方法が行われるようになった。特に、アルミ合
金等の比較的軟質な金属の研磨加工において、この方法
は一般的になりつつある。(Prior Art) Conventionally, for surface polishing of a material such as a metal, glass, or a semiconductor wafer that requires an extremely flat surface, a slurry containing abrasive grains is constantly supplied to an object to be polished ( work)
It was done by a so-called lapping type polishing machine that slides and polishes on a cast iron surface plate, but in recent years, using a solid grindstone containing abrasive grains instead of the cast iron surface plate as a lapping surface plate, water or a small amount of surface activity A method has been used in which water containing an agent is constantly supplied to perform polishing. In particular, this method is becoming more and more popular in the polishing of relatively soft metals such as aluminum alloys.
上記平面研磨装置は、一般に複数の固形砥石を、直接又
は取付板を介して、その作用面が同一平面を形成するよ
うに定盤に装着したものであり、特に取付板を介して装
着する場合は、通常固形砥石をまず取付板に固着し、該
取付板をボルト等で研磨装置定盤に螺着する方法が行わ
れている。このため、固形砥石の作用面にはボルト挿通
孔が穿孔されている。The above-mentioned surface polishing apparatus is generally a plurality of solid whetstones, which are mounted directly or through a mounting plate on a surface plate so that their working surfaces form the same plane, and particularly when mounted through the mounting plate. Usually, a solid grindstone is first fixed to a mounting plate, and the mounting plate is screwed to a polishing apparatus surface plate with a bolt or the like. For this reason, a bolt insertion hole is formed in the working surface of the solid grindstone.
ところで、上述の固形砥石を用いる方法においても、研
磨作業によって脱落砥粒，研磨屑，砥粒結合材の屑等を
多量に含んだ研磨液からなる廃液が発生し、砥石面の目
づまり等が起り、良好な研磨作用を著しく阻害すること
になる。このため、かかる廃液は、新しい研磨液の供給
にともない速やかに系外に排出しなければならない。By the way, even in the method using the above-mentioned solid whetstone, a waste liquid consisting of a polishing liquid containing a large amount of lost abrasive grains, polishing debris, debris of the abrasive grain binding material, etc. is generated by the polishing work, and the clogging of the whetstone surface etc. Occurs, which significantly hinders a good polishing action. Therefore, such waste liquid must be promptly discharged out of the system with the supply of new polishing liquid.
しかしながら前述のボルト挿通孔は閉鎖孔にため上記廃
液がボルト挿通孔に滞留することになり、就中下定盤に
あるボルト挿通孔は、滞留した廃液の逃げ場がなく、常
時廃液が満たされ、脱落砥粒，研磨屑等が徐々に滞積す
ることになる。この結果、ワーク表面の汚染や目詰まり
現象、更にはそれに伴なう異常な条痕が発生するといっ
た好ましからざる現象が起ることになる。However, since the above-mentioned bolt insertion hole is a closed hole, the above waste liquid will stay in the bolt insertion hole. Abrasive grains and polishing debris will gradually accumulate. As a result, undesirable phenomena such as contamination and clogging of the surface of the work, and abnormal streaks associated therewith occur.
かかる現象を回避するために、上記廃液を速やかにボル
ト挿通孔から排除する方法として、本願出願人は実開昭
61-124370号公報において、砥石に穿設したボトル挿通
孔の深部から略々水平方向に延びて砥石側面に開口する
側孔を穿孔する方法を提案した。この方法は、前述の好
ましからざる現象を十分に予防し、一応所期の目的を達
成し得たものの、研磨作業に伴う固型砥石の磨耗が上記
側孔に達した場合、その側孔が研磨作用面に新たな溝と
して現われ、結果として研磨面の形状が変化し、それま
での研磨速度，表面粗さ，表面光沢等を持続できないも
のであった。従って、この時点でかかる固形砥石は実質
的に使用できないものであり、未使用の部分を残した状
態で新しいものと交換する必要があった。このため、固
形砥石の交換の頻度が高くなり、作業効率が悪くなるだ
けでなく、経済的にも極めて無駄が多いといった欠点を
有するものであった。更に、この固形砥石は、磁石の側
面から、ボルト挿通孔に穿孔加工するものであり、かか
る穿孔加工は極めて煩雑で手間のかかるといった問題点
もあった。In order to avoid such a phenomenon, the applicant of the present application has proposed a method for promptly removing the waste liquid from the bolt insertion hole.
In Japanese Patent Laid-Open No. 61-124370, a method was proposed in which a side hole extending substantially horizontally from a deep portion of a bottle insertion hole formed in a grindstone and opening to a side surface of the grindstone was punched. This method was able to sufficiently prevent the above-mentioned undesirable phenomenon and achieve the intended purpose, but when the wear of the solid grinding stone accompanying the polishing operation reaches the side hole, the side hole is polished. It appeared as a new groove on the working surface, and as a result, the shape of the polishing surface changed, and the polishing speed, surface roughness, surface gloss, etc. up to that point could not be maintained. Therefore, at this point, the solid grindstone cannot be practically used, and it was necessary to replace it with a new grindstone with an unused portion left. For this reason, the solid grindstone has to be replaced more frequently, the work efficiency is deteriorated, and economically, there is a great deal of waste. Further, this solid whetstone is one in which the bolt insertion hole is drilled from the side surface of the magnet, and there is a problem that such drilling is extremely complicated and time-consuming.
（考案が解決しようとする課題） 本考案は、前述の固形砥石を用いた平面研磨装置の持つ
欠点に鑑みなされたものであり、その目的は脱落砥粒，
研磨屑，砥粒結合材等を含んだ廃液をボルト挿通孔から
速やかに排出することにより、良好な研磨作用を長時間
維持し、且つ固形砥石の有効部分を十分に活用し得る平
面研磨装置を提供するにある。(Problems to be Solved by the Invention) The present invention has been made in view of the drawbacks of the above-described flat surface polishing apparatus using a solid grindstone, and its purpose is to provide a falling abrasive grain,
By quickly discharging the waste liquid containing polishing dust, abrasive grain binding material, etc. from the bolt insertion hole, a flat polishing device that can maintain a good polishing action for a long time and fully utilize the effective portion of the solid whetstone To provide.
（課題を解決するための手段） 上述の目的は、ボルト挿通孔（４）を穿設した複数の固
形砥石（３）を、その作用面が同一平面を形成する様に
取付板（２）を介してラッピング定盤に配設してなる平
面研磨装置において、前記固形砥石（３）の取付板
（２）に固着する側の面に、ボルト挿通孔（４）の底部
から砥石側面に連通する溝を刻設し、該溝と取付板
（２）によって形成した側孔（６）を設けたことを特徴
とする平面研磨装置によって達成される。(Means for Solving the Problems) The above-described object is to mount the plurality of solid whetstones (3) having the bolt insertion holes (4) on the mounting plate (2) so that their working surfaces form the same plane. In a flat-surface polishing apparatus arranged on a lapping platen via a lapping plate, the surface of the solid grindstone (3) fixed to the mounting plate (2) communicates with the side surface of the grindstone from the bottom of the bolt insertion hole (4). The present invention is achieved by a flat surface polishing apparatus characterized by forming a groove and providing a side hole (6) formed by the groove and the mounting plate (2).
本考案に係る固形砥石は、接着剤等によって取付板に固
着され、該取付板を介して研磨装置本体の定盤にセグメ
ント状に取り付けられる。又、上記固形砥石は、ボルト
挿通孔の下端から該固形砥石の側面に連通する溝を刻設
し、この溝と取付板とで形成した側孔よりボルト挿通孔
内の廃液が系外へ速やかに排出するため、ボルト挿通孔
に廃液がいつまでも滞留することはないのである。The solid whetstone according to the present invention is fixed to a mounting plate with an adhesive or the like, and is segmentally mounted on the surface plate of the polishing apparatus main body through the mounting plate. Further, the solid whetstone is provided with a groove communicating from the lower end of the bolt insertion hole to the side surface of the solid whetstone, and the waste liquid in the bolt insertion hole is quickly discharged to the outside of the system from the side hole formed by this groove and the mounting plate. Since the liquid is discharged to the end, the waste liquid never stays in the bolt insertion hole.
本考案のおいて、固形砥石に刻設する溝の形状は特に限
定されるものではないが、浅く幅の広い溝が好適であ
る。かかる形状により、固形砥石は出来る限り薄い状態
にまで使用が可能となり、且つ排出溶量を大きくするた
めに必要な断面積も確保できる。又、溝の断面形状も特
に限定されるものではなく、例えば長方形，台形等が挙
げられる。更に溝を刻設する方向は、廃液を排出しやす
くするため、ボルト挿通孔より定盤の回転方向と逆方向
あるいは定盤の回転中心より外側に向う方向が好まし
い。In the present invention, the shape of the groove formed in the solid grindstone is not particularly limited, but a shallow and wide groove is preferable. With such a shape, the solid grindstone can be used as thin as possible, and the cross-sectional area required for increasing the amount of molten metal discharged can be secured. Further, the cross-sectional shape of the groove is not particularly limited, and examples thereof include a rectangle and a trapezoid. Further, the direction in which the groove is formed is preferably in the direction opposite to the rotation direction of the surface plate from the bolt insertion hole or in the direction outward from the rotation center of the surface plate in order to easily discharge the waste liquid.
上述の如く、本考案に係る排出孔は、固形砥石に穿孔加
工するのではなく、表面に溝を刻設する方法で得られる
ものであり、加工が極めて簡単である。As described above, the discharge hole according to the present invention is obtained by a method in which a groove is formed on the surface of the solid grindstone, not by boring, and the processing is extremely simple.
本考案に係る固形砥石は、片面研磨装置及び両面研磨装
置のいずれにも適用できる。The solid whetstone according to the present invention can be applied to both a single-sided polishing device and a double-sided polishing device.
以下、本考案を図面により詳述する。Hereinafter, the present invention will be described in detail with reference to the drawings.
第１図は本考案に係る固形砥石を備えた平面研磨装置の
研磨作用面の１例を示す説明図で、第２図は本考案装置
の要部を説明する垂直断面図である。FIG. 1 is an explanatory view showing an example of a polishing working surface of a flat surface polishing apparatus equipped with a solid grindstone according to the present invention, and FIG. 2 is a vertical sectional view for explaining an essential part of the apparatus of the present invention.
図面の如く、研磨作用面は、回転性能を備えた定盤
（１）に取付板（２）を介して取り付けた所定の形状を
した固形砥石（３）により形成する。固形砥石（３）に
はボルト挿通孔（４）を、取付板（２）にはボルト締付
孔（５）をそれぞれ穿孔している。固形砥石（３）は接
着剤により取付板（２）に固着し、取付板（２）はボル
ト（７）で定盤（１）に螺着している。As shown in the drawing, the polishing action surface is formed by a solid grindstone (3) having a predetermined shape, which is attached to a surface plate (1) having a rotation performance via a mounting plate (2). The solid whetstone (3) has a bolt insertion hole (4), and the mounting plate (2) has a bolt tightening hole (5). The solid whetstone (3) is fixed to the mounting plate (2) with an adhesive, and the mounting plate (2) is screwed to the surface plate (1) with bolts (7).
固形砥石（３）の取付板（２）と固着する側の面には、
ボルト挿通孔（４）から砥石側面へ連通する溝（６）を
設け、この溝（６）と取付板（２）とで、ボルト挿通孔
から廃液を排出するための側孔（６）を形成している。
ここで、側孔（６）は、例えば第５図の如く、隣の固形
砥石との間の隙間に開口してもよく、この場合、定盤の
回転方向の後側に開口することが、廃液の排出を円滑と
するので好ましい。また同様の理由から、第６図の如く
円環状定盤の外側に向って開口する形状に設けてもよ
い。On the surface of the solid whetstone (3) that is fixed to the mounting plate (2),
A groove (6) communicating from the bolt insertion hole (4) to the grindstone side surface is provided, and the groove (6) and the mounting plate (2) form a side hole (6) for discharging the waste liquid from the bolt insertion hole. is doing.
Here, the side hole (6) may be opened in a gap between the adjacent solid grindstones as shown in FIG. 5, and in this case, it may be opened on the rear side in the rotation direction of the surface plate. This is preferable because it facilitates the discharge of the waste liquid. Further, for the same reason, it may be provided in a shape opening toward the outside of the annular surface plate as shown in FIG.
本考案の固形砥石の１例として、例えば厚さが50mmで、
溝の深さが3mmで、溝の幅が8mmのものを挙げることがで
きる。この場合、固形砥石の取付板との固着面から厚さ
3mmまでの部分は接着剤の影響等により実質的にはほと
んど使用できない部分であり、溝の深さをこの程度にす
れば、固形砥石の有効な部分はホトンド使用が可能とな
る。As an example of the solid grindstone of the present invention, for example, the thickness is 50 mm,
The groove depth is 3 mm and the groove width is 8 mm. In this case, the thickness from the surface where the solid grindstone is fixed to the mounting plate
The portion up to 3 mm is practically almost unusable due to the influence of the adhesive agent, etc. If the groove depth is set to this extent, the effective portion of the solid grindstone can be used as a photon.
（考案の効果） 本考案に係る固形砥石を用いれば、ボルト挿通孔に滞留
する研磨廃液を側孔により速やかに系外へ排出すること
が出来、更に固形砥石の有効に使用できる厚さが、側孔
のない通常の固形砥石と略同程度とすることができる。
従って、かかる固形砥石を適用した本考案の平面研磨装
置によれば、良好な研磨作用が長時間接続することとな
り、更に、従来の固形砥石に側孔を穿孔して得たものに
比べ、砥石の無駄が少なく、砥石の耐用時間を延ばすこ
とが出来、作業性が向上することとなる。(Effect of the Invention) With the solid whetstone according to the present invention, the polishing waste liquid staying in the bolt insertion hole can be quickly discharged to the outside of the system through the side hole, and the thickness of the solid whetstone that can be effectively used is It can be about the same as a normal solid grindstone without side holes.
Therefore, according to the flat-polishing device of the present invention to which such a solid grindstone is applied, a good polishing action is connected for a long time, and further, compared with the conventional solid grindstone obtained by boring side holes, the grindstone Is less wasted, the service life of the grindstone can be extended, and workability is improved.
又、本考案に係る側孔を形成するには、固形砥石の表面
に溝を設ければよく、従来行なわれていた固形砥石に注
意深く穿孔する方法に比べ、はるかに簡単に加工するこ
とができるものである。Further, in order to form the side hole according to the present invention, it is sufficient to form a groove on the surface of the solid grindstone, which is much easier to process than the conventional method of carefully punching the solid grindstone. It is a thing.
本考案装置を用いる事により、固型砥石を用いた平面研
磨装置での研磨作業は著しく向上するものである。即ち
廃液の滞留がなくなる事により被研磨体表面の汚染が少
なくなると共に、砥石表面の目づまり現象が回避されド
レッシング回数が減少し、更には滞留した液が一部凝集
し、その小片が研磨面に入り込んで惹き起されるスクラ
ッチ（条痕）等の現象が回避されるという好ましい効果
が得られるものである。By using the device of the present invention, the polishing work in a flat polishing device using a solid grindstone is significantly improved. That is, by eliminating the retention of waste liquid, the surface of the object to be polished is less contaminated, the phenomenon of clogging of the surface of the grindstone is avoided and the number of dressings is reduced, and further, the retained liquid partially agglomerates and its small pieces are polished. It is possible to obtain a preferable effect of avoiding a phenomenon such as a scratch (scratch mark) which is caused by entering.
従って本考案装置を使用すれば研磨作業における不良品
の発生率は減少し且つドレッシング作業の回数が減る事
により作業効率と装置稼働率とが共に向上するものであ
る。Therefore, when the device of the present invention is used, the occurrence rate of defective products in the polishing operation is reduced and the number of dressing operations is reduced, so that both the work efficiency and the operation rate of the apparatus are improved.
第１図は本考案に係る固形砥石を備えた平面研磨装置の
研磨作用面の１例を示す説明図、第２図は本考案装置の
要部を説明する垂直断面図、第３図及び第４図はその組
立説明図、第５図及び第６図は本考案に係る円形砥石の
１例を示す説明図である。 １……定盤、２……取付板、３……固形砥石、４……ボ
ルト挿通孔、５……ボルト締付孔、６……側孔（溝）、
７……ボルト。FIG. 1 is an explanatory view showing an example of a polishing working surface of a flat surface polishing apparatus equipped with a solid grindstone according to the present invention, and FIG. 2 is a vertical sectional view for explaining a main part of the present invention apparatus, FIG. 3 and FIG. FIG. 4 is an assembly explanatory view thereof, and FIGS. 5 and 6 are explanatory views showing an example of a circular grindstone according to the present invention. 1 ... Surface plate, 2 ... Mounting plate, 3 ... Solid whetstone, 4 ... Bolt insertion hole, 5 ... Bolt tightening hole, 6 ... Side hole (groove),
7 ... Bolt.
Claims (1)
砥石（３）を、その作用面が同一平面を形成する様に取
付板（２）を介してラッピング定盤に配設してなる平面
研磨装置において、前記固形砥石（３）の取付板（２）
に固着する側の面に、ボルト挿通孔（４）の底部から砥
石側面に連通する溝を刻設し、該溝と取付板（２）によ
って形成した側孔（６）を設けたことを特徴とする平面
研磨装置。1. A plurality of solid whetstones (3) having bolt insertion holes (4) are arranged on a lapping platen via a mounting plate (2) so that their working surfaces form the same plane. In the surface polishing apparatus, the mounting plate (2) for the solid whetstone (3)
A groove communicating from the bottom of the bolt insertion hole (4) to the side surface of the grindstone is engraved on the surface fixed to the side surface, and a side hole (6) formed by the groove and the mounting plate (2) is provided. Plane polishing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989049214U JPH078134Y2 (en) | 1989-04-25 | 1989-04-25 | Flat polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989049214U JPH078134Y2 (en) | 1989-04-25 | 1989-04-25 | Flat polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02139063U JPH02139063U (en) | 1990-11-20 |
| JPH078134Y2 true JPH078134Y2 (en) | 1995-03-01 |
Family
ID=31566710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989049214U Expired - Lifetime JPH078134Y2 (en) | 1989-04-25 | 1989-04-25 | Flat polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH078134Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998017438A1 (en) * | 1996-10-18 | 1998-04-30 | Kanebo Limited | Surface polishing apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2089040A (en) * | 1935-07-05 | 1937-08-03 | Gardner Machine Co | Grinding machine and method of grinding |
| JPS55120979A (en) * | 1979-02-27 | 1980-09-17 | Tdk Corp | Liquid-cooling type grinding wheel |
| JPH0437718Y2 (en) * | 1985-01-25 | 1992-09-04 | ||
| JPS62107978A (en) * | 1985-11-07 | 1987-05-19 | Noritake Co Ltd | Wet type partial grindstone for grinding and its combined grindstone |
-
1989
- 1989-04-25 JP JP1989049214U patent/JPH078134Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02139063U (en) | 1990-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |