JPH0785418A - Manufacturing method and jig for magnetic head - Google Patents

Manufacturing method and jig for magnetic head

Info

Publication number
JPH0785418A
JPH0785418A JP23266793A JP23266793A JPH0785418A JP H0785418 A JPH0785418 A JP H0785418A JP 23266793 A JP23266793 A JP 23266793A JP 23266793 A JP23266793 A JP 23266793A JP H0785418 A JPH0785418 A JP H0785418A
Authority
JP
Japan
Prior art keywords
keeper
depth
jig
work
magnetic head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23266793A
Other languages
Japanese (ja)
Inventor
Koichiro Minami
浩一郎 南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP23266793A priority Critical patent/JPH0785418A/en
Publication of JPH0785418A publication Critical patent/JPH0785418A/en
Pending legal-status Critical Current

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  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To obtain a manufacturing method for a magnetic head whereby the gap depth of a slider block in the magnetic head is well controlled. CONSTITUTION:It is necessary to grind a magnetic head of a magnetic disk apparatus so that the gap depth becomes a specified value (abbreviated as a depth lap hereinbelow). The end 5 of the depth is aligned and fixed in a state of a bar material with the upper end of an aligning dummy work 2 on a special grinding jig 1 to efficiently execute the depth lap. Accordingly, variation in the gap depth is restricted to be small, and many chips can be processed at one time.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】磁気ヘッドのギャップ深さを規定
の値になるまで研磨する製造方法及び製造治具に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing method and a manufacturing jig for polishing a magnetic head gap depth to a prescribed value.

【0002】[0002]

【従来の技術】磁気ヘッドは磁気ギャップの漏れ磁束で
記録しまた、同様に再生するものであり、ギャップ対向
面積を規定するギャップデプスは、漏れ磁束までコント
ロールする重要なファクターである。特にギャップデプ
スが大となりすぎる場合にはギャップ対向面間で磁束が
短絡するため再生効率が悪化する。通常例えばHDD用
の磁気ヘッドには、0〜5μm程度が最適とされてい
る。
2. Description of the Related Art A magnetic head records and reproduces similarly with a leakage magnetic flux of a magnetic gap, and a gap depth defining a gap facing area is an important factor for controlling the leakage magnetic flux. Particularly, when the gap depth becomes too large, the magnetic flux is short-circuited between the gap facing surfaces, and the reproduction efficiency deteriorates. Usually, for a magnetic head for HDD, for example, about 0 to 5 μm is optimum.

【0003】磁気ヘッドの製造工程中では当初ギャップ
デプスは数十μmあるためこれを所望のギャップデスプ
に至るまで研磨する必要性がある。例えばHDD用磁気
ヘッドの場合にはスライダーのABS(エアーベアリン
グサーフェイス)面と同時に研磨することが望まれる。
研磨前のワークのギャップデプスにはばらつきがあるた
め、これらを層別に一定範囲内のものをチップごとに平
面研磨治具に貼り付けて研磨している。この平面研磨治
具の貼り付けには瞬間接着剤を用いて出来るだけ溶着層
の薄膜化を図っている。なお、研磨は平面研磨治具に貼
り付けたワークの面を下方にして研磨剤を塗布したスズ
盤上に配置し回転させつつ押圧している。
During the manufacturing process of the magnetic head, the gap depth is initially several tens of μm, so it is necessary to polish this until the desired gap depth. For example, in the case of a magnetic head for HDD, it is desired to polish the slider simultaneously with the ABS (air bearing surface) surface.
Since the gap depth of the work before polishing has variations, those within a certain range for each layer are attached to a flat polishing jig for each chip and polished. For the attachment of this flat polishing jig, the adhesive layer is made as thin as possible using an instant adhesive. For polishing, the surface of the work adhered to the flat polishing jig is placed on a tin plate coated with an abrasive with the surface of the work facing downward and pressed while rotating.

【0004】[0004]

【発明が解決しようとする課題】前記従来の方法では、
1チップ毎に平面研磨治具に貼り付ける必要があり、層
別の工程が入るため工数が大かつ品質の安定にも問題が
あった。また、デプスラップの終点を知るために各チッ
プ毎にギャップデプスの測定を行わなければならずこの
点でも工数が大であった。更に最近ではチップの小型化
が進み作業が煩雑化すると共に平面研削治具での1回当
たりの処理数に限界があることも問題であった。
SUMMARY OF THE INVENTION In the above conventional method,
Since it is necessary to attach each chip to a flat polishing jig, and the process for each layer is included, there is a problem in that the number of steps is large and the quality is stable. In addition, the gap depth must be measured for each chip in order to know the end point of the depth wrap, which also requires a large number of steps. Further, recently, there has been a problem that the size of the chip has been reduced and the work has become complicated, and that the number of treatments per surface with the surface grinding jig is limited.

【0005】この問題を解決するためにチップ化せずブ
ロック状態で研磨することが考えられるがブロックの高
さにばらつきがあるため平面研削治具の貼り付け面から
のワーク高さにばらつきが生じ、これにより研磨後にギ
ャップデプスのばらつきが生じるという問題がある。従
って従来はブロック状態で研磨することは実用的でなか
った。
In order to solve this problem, it is possible to polish in a block state without chipping. However, since the block height varies, the work height from the surface to which the surface grinding jig is attached varies. Therefore, there is a problem that the gap depth varies after polishing. Therefore, conventionally, it was not practical to polish in a block state.

【0006】[0006]

【課題を解決するための手段】本発明は、上記課題を解
決するために、複数のワークのデプスエンドを研磨治具
の基準面と合わせることによって、面一にし研磨治具の
基準面と比較することによってワークのデプスを測定し
つつ、複数のブロック状のワークを所望のデプスに至る
まで同時に研磨する磁気ヘッドの製造方法を採用し、キ
ーパー挿入孔と、その両端に配置する基準面とキーパー
挿入孔の底面に配置するキーパー押し上げバネとキーパ
ー治具固定ねじとからなる研磨治具を用い、更に具体的
には、ワークをキーパーに貼付ける工程とキーパーを専
用治具のキーパー挿入孔に挿入する工程とキーパーの両
端部分をマイクロメーターで押圧して両基準面とワーク
のデプスエンドを合わせる工程と該状態においてキーパ
ーをキーパー固定ねじで固定する工程とからなる複数の
ワークのデプスエンドを専用治具の基準面と合わせる方
法、キーパー治具固定ねじをワーク方向に整列して3つ
有するものにおいて、その中央のねじがボールねじであ
ることを特徴とする前記の専用治具を用いる。
In order to solve the above-mentioned problems, the present invention makes the depth ends of a plurality of works flush with the reference surface of the polishing jig so as to be flush with each other and compared with the reference surface of the polishing jig. By adopting a magnetic head manufacturing method that simultaneously grinds a plurality of block-shaped works to the desired depth while measuring the work depth, the keeper insertion hole and the reference surface and the keeper that are placed at both ends of the keeper insertion hole are adopted. A polishing jig consisting of a keeper push-up spring and a keeper jig fixing screw placed on the bottom of the insertion hole is used, and more specifically, the process of attaching the work to the keeper and inserting the keeper into the keeper insertion hole of the dedicated jig. And the step of pressing both ends of the keeper with a micrometer so that both reference surfaces and the depth end of the work are aligned and the keeper is fixed in that state In the method of aligning the depth ends of a plurality of works with the reference surface of the special jig, which has three keeper jig fixing screws aligned in the work direction, the central screw is a ball screw. The dedicated jig described above is used.

【0007】[0007]

【作用】前記手段によれば、複数のブロック状のワーク
のデプスエンドが面一になっているためワークの高さの
ばらつきにかかわらず、研磨後のブロック状のワークの
ギャップデプスのばらつきを生じない。従って、ブロッ
ク状のワークを用いて研磨することが出来従来行ってい
た1チップ毎の作業が不要となる。
According to the above-mentioned means, since the depth ends of a plurality of block-shaped works are flush with each other, the gap depth of the block-shaped works after polishing varies regardless of the height of the works. Absent. Therefore, the block-shaped work can be used for polishing, and the work for each chip, which has been conventionally performed, becomes unnecessary.

【0008】[0008]

【実施例】以下本発明の一実施例を図1〜図4により説
明する。図1はこのデプスラップ治具にキーパー4をセ
ットしたときの拡大斜視図である。図2はワークをキー
パー4に貼り付け固定したときの拡大斜視図、図3は発
明の実施例である研磨治具の要部を示す分解拡大斜視図
である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is an enlarged perspective view of the keeper 4 set on the depth lap jig. FIG. 2 is an enlarged perspective view when a work is stuck and fixed to the keeper 4, and FIG. 3 is an exploded enlarged perspective view showing a main part of a polishing jig which is an embodiment of the invention.

【0009】図1において2は位基準面2aを規定する
位置決め用ダミー、3はワーク、4はキーパー、5はワ
ークのデプスエンドを示すものである。
In FIG. 1, 2 is a positioning dummy for defining the position reference surface 2a, 3 is a work, 4 is a keeper, and 5 is a depth end of the work.

【0010】図2においてワーク3の長手方向をキーパ
ー4のキーパーのワークに対する基準面4aを基準とす
るように基準治具(図略図)によりあらかじめ位置決め
を行いワックスにて貼り付けを行う。その後、ワークを
貼り付けたキーパー4を図3のキーパー挿入孔6に挿入
し、左右のデプス位置決め用ダミー2の基準面2aを高
さ方向の基準として図4に示すような位置決め治具9に
より図4に示すようにワーク3のデプスエンド5と2a
とが同じ位置にくるようにマイクロメータにて調整す
る。調整が終了したら締め付け固定ネジ7、7’、7に
よりキーパー4を固定する。最後に、位置決めダミー2
よりも厚いダミーバーを貼り付けた研削用ダミー治具8
を専用研磨治具1上に固定する。これによりワーク3を
直接研削砥石に接触させることなく正確に研磨すること
ができる。また、キーパー固定ねじのうちまん中のもの
は、仮り止めの必要性から先端がボール状のねじを用い
ることが望ましい。
In FIG. 2, the work 3 is preliminarily positioned by a reference jig (not shown) so that the longitudinal direction of the work 3 is based on the reference surface 4a of the keeper 4 with respect to the work, and the work is adhered with wax. After that, the keeper 4 to which the work is attached is inserted into the keeper insertion hole 6 of FIG. 3, and the reference surface 2a of the left and right depth positioning dummies 2 is used as a reference in the height direction by the positioning jig 9 as shown in FIG. As shown in FIG. 4, the depth ends 5 and 2a of the work 3 are shown.
Adjust with a micrometer so that and are in the same position. When the adjustment is completed, the keeper 4 is fixed with the tightening fixing screws 7, 7 ', 7. Finally, the positioning dummy 2
Dummy jig 8 for grinding with a thicker dummy bar attached
Is fixed on the dedicated polishing jig 1. As a result, the work 3 can be accurately ground without directly contacting the grinding wheel. Further, it is desirable to use a screw having a ball-shaped tip for the middle keeper fixing screw because of the need for temporary fixing.

【0011】このように上記方法を用いると、ワーク3
を切り離しデプスを層別する必要もなく、量産性に優
れ、高精度のデプス研磨が可能である。
By using the above method, the work 3
Since there is no need to separate the layers to separate the depths, mass productivity is excellent and highly accurate depth polishing is possible.

【0012】以上本発明を実施例に基づき具体的に説明
したが、本発明は上記実施例に限定されるものではな
く、内容の要旨を逸脱しない範囲で変更可能である。
Although the present invention has been specifically described above based on the embodiments, the present invention is not limited to the above embodiments and can be modified without departing from the gist of the contents.

【0013】例えば、研磨治具1に取付けることができ
るキーパー挿入孔の位置や個数は貼り付けが不可能でな
い範囲であれば、特に限定されない。
For example, the position and the number of keeper insertion holes that can be attached to the polishing jig 1 are not particularly limited as long as they cannot be attached.

【0014】また、この発明は磁気ディスク装置用の浮
上型磁気ヘッドのデプス研磨に限定されるものではな
く、たとえば、HD−VTR用磁気ヘッド装置用のヘッ
ドなどの各種の磁気ヘッドの研磨に適用できる。
Further, the present invention is not limited to the depth polishing of the floating magnetic head for the magnetic disk device, but is applied to the polishing of various magnetic heads such as the head for the HD-VTR magnetic head device. it can.

【0015】[0015]

【発明の効果】本発明によれば、ワーク3を切り離し、
デプス検査を行った後、層別し接着剤により固定しデプ
スラップを行う必要もなく、位置決め用ダミーにデプス
エンドをセットすることにより複数のワークを同時にデ
プスラップすることができ、量産性に優れ、高精度なデ
プスコントロールが可能である。
According to the present invention, the work 3 is separated,
After performing depth inspection, it is not necessary to layer-separate and fix with adhesive to perform depth wrap, and by setting the depth end on the positioning dummy, multiple workpieces can be depth lapped at the same time, which is excellent in mass productivity. High precision depth control is possible.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の一実施例である研磨治具にキーパー
をセットしたときの要部を示す拡大斜視図、
FIG. 1 is an enlarged perspective view showing a main part when a keeper is set on a polishing jig that is an embodiment of the present invention,

【図2】 ワークをキーパーに貼り付け固定したときの
拡大斜視図、
FIG. 2 is an enlarged perspective view when a work is attached and fixed to a keeper,

【図3】 本発明の実施例である研磨治具の要部を示す
部分拡大斜視図
FIG. 3 is a partially enlarged perspective view showing a main part of a polishing jig that is an embodiment of the present invention.

【図4】 研磨治具にキーパー治具を組み込み位置合わ
せを行う状態を示した斜視図、
FIG. 4 is a perspective view showing a state in which a keeper jig is incorporated in a polishing jig and alignment is performed;

【図5】 切り離し前のワークの一部分を示した斜視
図、図6は従来の実施例を簡素化して表したものであ
る。
FIG. 5 is a perspective view showing a part of the work before separation, and FIG. 6 is a simplified view of a conventional embodiment.

【図6】 従来の実施例を簡素化して表したものFIG. 6 is a simplified representation of a conventional embodiment.

【符号の説明】[Explanation of symbols]

1 研磨治具 2 デプス位置決め用ダミー 2a 基準面 3 磁気ヘッドスライダーブロック 4 キーパー 4a キーパーのワークに対する基準面 5 デプスエンド 6 キーパー挿入孔 7 キーパー固定ねじ 7’ キーパー固定ボールねじ 8 研削用ダミーバーセット治具 9 ワーク位置決め治具 10 磁気ヘッドスライダーブロックのカットライン 11 スライダー 12 デプス長 13 平面研磨治具 1 Polishing jig 2 Depth positioning dummy 2a Reference surface 3 Magnetic head slider block 4 Keeper 4a Reference surface for work of keeper 5 Depth end 6 Keeper insertion hole 7 Keeper fixing screw 7'Keeper fixing ball screw 8 Grinding dummy bar set jig 9 Work positioning jig 10 Cut line of magnetic head slider block 11 Slider 12 Depth length 13 Plane polishing jig

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】複数のワークのデプスエンドを研磨治具の
基準面と合わせることによって面一にし、研磨治具の基
準面と比較することによってワークのデプスを測定しつ
つ、複数のワークを所望のデプスに至るまで同時に研磨
する磁気ヘッドの製造方法。
1. A plurality of workpieces are desired while measuring the depth of the workpieces by aligning the depth ends of the plurality of workpieces with the reference surface of the polishing jig to make them flush with each other and comparing the depth ends of the workpieces with the reference surface of the polishing jig. Method of manufacturing a magnetic head in which polishing is performed up to the same depth.
【請求項2】ワークをキーパーに貼付する工程とキーパ
ーを専用治具のキーパー挿入孔に挿入する工程とキーパ
ーの両端部分をマイクロメーターで押圧して前記両基準
面とワークのデプスエンドを合わせる工程と該状態にお
いてキーパーをキーパー固定ねじで固定する工程とから
なる請求項1記載の複数のワークのデプスエンドを専用
治具の基準面と合わせる方法。
2. A step of attaching a work to a keeper, a step of inserting the keeper into a keeper insertion hole of a dedicated jig, and a step of pressing both ends of the keeper with a micrometer to align the both reference surfaces with the depth end of the work. 2. A method of aligning the depth ends of a plurality of works with a reference surface of a dedicated jig according to claim 1, further comprising the step of fixing the keeper with a keeper fixing screw in this state.
【請求項3】キーパー挿入孔と、その両端に配置する基
準面とキーパー挿入孔の底面に配置するキーパー押し上
げバネとキーパー治具固定ねじとからなる請求項1記載
の製造方法に使用する研磨治具。
3. A polishing jig for use in the manufacturing method according to claim 1, comprising a keeper insertion hole, a reference surface arranged at both ends of the keeper insertion hole, a keeper pushing spring arranged on the bottom surface of the keeper insertion hole, and a keeper jig fixing screw. Ingredient
【請求項4】請求項2記載専用治具でキーパー治具固定
ねじをワーク方向に整列して3つ有するものにおいて、
その中央のねじがボールねじであることを特徴とする請
求項3記載の製造治具。
4. The dedicated jig according to claim 2, which has three keeper jig fixing screws aligned in the work direction,
The manufacturing jig according to claim 3, wherein the central screw is a ball screw.
JP23266793A 1993-09-20 1993-09-20 Manufacturing method and jig for magnetic head Pending JPH0785418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23266793A JPH0785418A (en) 1993-09-20 1993-09-20 Manufacturing method and jig for magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23266793A JPH0785418A (en) 1993-09-20 1993-09-20 Manufacturing method and jig for magnetic head

Publications (1)

Publication Number Publication Date
JPH0785418A true JPH0785418A (en) 1995-03-31

Family

ID=16942910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23266793A Pending JPH0785418A (en) 1993-09-20 1993-09-20 Manufacturing method and jig for magnetic head

Country Status (1)

Country Link
JP (1) JPH0785418A (en)

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