JPH079080Y2 - Oxygen partial pressure gauge - Google Patents
Oxygen partial pressure gaugeInfo
- Publication number
- JPH079080Y2 JPH079080Y2 JP1988153400U JP15340088U JPH079080Y2 JP H079080 Y2 JPH079080 Y2 JP H079080Y2 JP 1988153400 U JP1988153400 U JP 1988153400U JP 15340088 U JP15340088 U JP 15340088U JP H079080 Y2 JPH079080 Y2 JP H079080Y2
- Authority
- JP
- Japan
- Prior art keywords
- partial pressure
- oxygen partial
- electrode
- solid electrolyte
- electrolyte body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052760 oxygen Inorganic materials 0.000 title claims description 44
- 239000001301 oxygen Substances 0.000 title claims description 44
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 42
- 239000007784 solid electrolyte Substances 0.000 claims description 33
- 239000007789 gas Substances 0.000 claims description 32
- 238000005259 measurement Methods 0.000 claims description 25
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 18
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 150000002430 hydrocarbons Chemical class 0.000 description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- 238000000354 decomposition reaction Methods 0.000 description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910001260 Pt alloy Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000005255 carburizing Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000003487 electrochemical reaction Methods 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- -1 oxygen ion Chemical class 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 235000012255 calcium oxide Nutrition 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009628 steelmaking Methods 0.000 description 1
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Description
【考案の詳細な説明】 (技術分野) 本考案は酸素分圧計に係り、特に浸炭炉や焼入れ炉等の
熱処理炉における炉内雰囲気中の酸素分圧測定等に有利
に用いられる酸素分圧計に関するものである。TECHNICAL FIELD The present invention relates to an oxygen partial pressure meter, and more particularly to an oxygen partial pressure meter that is advantageously used for measuring oxygen partial pressure in a furnace atmosphere in a heat treatment furnace such as a carburizing furnace or a quenching furnace. It is a thing.
(背景技術) 従来から、ジルコニア等の高温において酸素イオン伝導
性のある固体電解質体を用いて、電気化学反応を利用し
た酸素濃淡電池の原理により、製鋼における各種の炉、
その他の工業炉等における炉内雰囲気中の酸素濃度(酸
素分圧)を検知し、それらの炉の操炉状態を制御する等
の操作が、実施されている。(Background Art) Conventionally, by using a solid electrolyte body having oxygen ion conductivity at a high temperature such as zirconia, various furnaces in steelmaking by the principle of an oxygen concentration battery utilizing an electrochemical reaction,
Operations such as detecting the oxygen concentration (oxygen partial pressure) in the furnace atmosphere in other industrial furnaces and controlling the operating conditions of those furnaces are being carried out.
そして、この種の操作に用いられる酸素分圧計にあって
は、例えば特開昭55−1595号公報や特開昭60−233542号
公報、オースラリア特許第513552号等に明らかにされて
いるように、一般に、有底円筒形状の固体電解質体の閉
塞端部の内外両面にそれぞれ電極を設け、そしてその内
側の電極を標準比較ガスとしての大気に接触せしめて、
基準酸素分圧の基準電極とする一方、外側の電極を被測
定ガスである炉内雰囲気中に晒して測定電極としてお
り、そしてそれら基準電極と測定電極との間の酸素分圧
の差に基づく起電力を検出することにより、被測定ガス
中の酸素分圧が測定されている。また、このような酸素
分圧計においては、固体電解質体や電極、リード線を熱
衝撃から保護するために、通常、それらを、金属材料や
セラミックス材料等を用いて形成された、被測定ガス導
入口を有する有底円筒形状の外套管内に収容し、且つそ
の測定電極を該外套管の閉端部との間で挟圧せしめてな
る構造が、採用されている。And, in the oxygen partial pressure meter used for this kind of operation, as disclosed in, for example, JP-A-55-1595, JP-A-60-233542, and Australia Patent 513552. , In general, an electrode is provided on each of the inner and outer surfaces of the closed end of the solid electrolyte body having a bottomed cylindrical shape, and the inner electrode is brought into contact with the atmosphere as a standard reference gas,
While the reference electrode for the reference oxygen partial pressure is used, the outer electrode is exposed to the atmosphere in the furnace, which is the gas to be measured, to form the measurement electrode, and based on the difference in the oxygen partial pressure between the reference electrode and the measurement electrode. The oxygen partial pressure in the gas to be measured is measured by detecting the electromotive force. Further, in such an oxygen partial pressure meter, in order to protect the solid electrolyte body, electrodes, and lead wires from thermal shock, they are usually formed using a metal material, a ceramic material, or the like. A structure is adopted in which the measurement electrode is housed in a bottomed cylindrical outer tube, and the measurement electrode is clamped between the outer tube and the closed end of the outer tube.
ところで、このような構造の酸素分圧計において、固体
電解質体表面に配置されて被測定ガスに接触せしめられ
る測定電極としては、前記公報等にも示されているよう
に、従来から、白金を主体とした基金属系の材料にて形
成されてなり、且つネット状等の多孔構造とされたもの
や渦巻状に巻かれたリード線構造のものなど、何れも、
被測定ガスに対して大きな接触面積が確保される形状の
ものが、用いられてきている。By the way, in the oxygen partial pressure meter having such a structure, as the measurement electrode placed on the surface of the solid electrolyte body and brought into contact with the gas to be measured, as shown in the above-mentioned publications or the like, conventionally, platinum is mainly used. Which is made of a base metal-based material and has a porous structure such as a net or a spirally wound lead wire structure,
A shape that ensures a large contact area with the gas to be measured has been used.
しかしながら、本考案者らが検討したところによると、
かかる測定電極を構成する白金等の貴金属系材料は、特
に高温域で触媒能が高くなり、炉内に未分解状態で残存
するハイドロカーボン(CmHn)、例えばメタン(CH4)
等を分解してしまうために、酸素分圧計の出力特性が影
響を受け、またその触媒能変化によって出力ドリフトを
生じることとなり、特に、上述の如き、従来から用いら
れている測定電極にあっては、被測定ガスに対する接触
面積が大きいために、かかる残存ハイドロカーボンの分
解による影響も大きく、更に該測定電極の劣化(脆化)
に伴って、その表面積がより増大することとなるため
に、ハイドロカーボンの分解が促進されて、酸素分圧計
の出力に一層大きなドリフトが惹起せしめられるといっ
た、大きな問題を内在していることが明らかとなったの
である。However, according to a study by the present inventors,
The noble metal-based material such as platinum that constitutes the measurement electrode has a high catalytic activity especially in a high temperature range, and is a hydrocarbon (CmHn) that remains in the furnace in an undecomposed state, for example, methane (CH 4 ).
Etc., the output characteristics of the oxygen partial pressure meter are affected, and output drift occurs due to the change in the catalytic ability. Has a large contact area with the gas to be measured, and is greatly affected by the decomposition of such residual hydrocarbons, and further deterioration (embrittlement) of the measurement electrode
As the surface area increases, the decomposition of hydrocarbons is promoted, which causes a larger drift in the output of the oxygen partial pressure meter, which is obviously a major problem. It became.
(解決課題) ここにおいて、本考案は、上述の如き事情を背景として
為されたものであって、その解決すべき課題とするとこ
ろは、白金等の貴金属系材料から成る測定電極を備えた
酸素分圧計において、かかる測定電極による残存メタン
等のハイドロカーボンの分解を抑制することによって、
その出力特性を改善し、出力のドリフトを可及的に低減
せしめることにある。(Problems to be Solved) Here, the present invention has been made in view of the above circumstances, and the problem to be solved is that oxygen provided with a measurement electrode made of a noble metal-based material such as platinum. In the partial pressure gauge, by suppressing the decomposition of hydrocarbons such as residual methane by such measuring electrodes,
It is to improve the output characteristics and reduce the output drift as much as possible.
(解決手段) そして、かかる課題を解決するために、本考案にあって
は、有底円筒形状の固体電解質体の閉端部の内面を基準
電極を、またその外面に測定電極を、それぞれ配すると
共に、被測定ガス導入口を有する有底円筒形状の外套管
内に、該固体電解質体を収容して、前記測定電極を該外
套管の閉端部との間において挟圧するようにした酸素分
圧計において、前記測定電極を、前記固体電解質体の閉
端部外面に対して、その周縁部からはみ出すことなく接
触せしめられ得る平面形状を有する板状体にて構成し、
前記外套管の閉端部内面との間で挟圧保持せしめるよう
にしたことを、その特徴とするものである。(Solution) In order to solve such a problem, in the present invention, a reference electrode is arranged on the inner surface of the closed end of the solid electrolyte body having a bottomed cylindrical shape, and a measurement electrode is arranged on the outer surface thereof. In addition, the solid electrolyte body is housed in a jacketed tube having a bottomed cylindrical shape having a gas inlet to be measured, and the oxygen content is such that the measurement electrode is pinched between the measurement electrode and the closed end of the jacketed tube. In the pressure gauge, the measurement electrode, with respect to the outer surface of the closed end of the solid electrolyte body, a plate-shaped body having a planar shape that can be contacted without protruding from the peripheral portion,
The feature is that the outer tube is clamped and held with the inner surface of the closed end portion.
(作用・効果) すなわち、このような本考案に従う構造とされた酸素分
圧計にあっては、固体電解質体表面に設置されて被測定
ガスに接触せしめられる測定電極が、板状体(プレー
ト)形状にて形成され、固体電解質体の閉端部外面と外
套管の閉端部内面との間で、その両側面をそれら固体電
解質体および外套管に対してそれぞれ面接触させた状態
で、挟圧、保持せしめられているところから、該測定電
極における被測定ガスに対する接触面が、実質上、その
外周端面のみによって構成されることとなるのである。(Operation / Effect) That is, in the oxygen partial pressure meter having the structure according to the present invention, the measuring electrode placed on the surface of the solid electrolyte body and brought into contact with the gas to be measured is a plate-shaped body (plate). Between the outer surface of the closed end portion of the solid electrolyte body and the inner surface of the closed end portion of the outer tube, with both side surfaces in surface contact with the solid electrolyte body and the outer tube, respectively. Since it is held under pressure, the contact surface of the measurement electrode with respect to the gas to be measured is substantially constituted by only the outer peripheral end surface thereof.
そして、それ故、かかる酸素分圧計においては、測定電
極の被測定ガスに対する接触面の面積が小さく設定され
得ることから、該測定電極による炉内に残存するメタン
等のハイドロカーボンの分解が有利に抑制され得ると共
に、かかる接触面が測定電極の外周端面にて構成されて
いるところから、該測定電極における劣化が進行した場
合にも、被測定ガスに対する接触面積の増加が良好に回
避され得るのであり、それによってその出力特性が効果
的に改善され、残存ハイドロカーボンの分解による出力
のドリフトが可及的に低減され得るのである。And, therefore, in such an oxygen partial pressure meter, since the area of the contact surface of the measurement electrode with respect to the gas to be measured can be set small, decomposition of hydrocarbons such as methane remaining in the furnace by the measurement electrode is advantageous. In addition to being suppressed, since the contact surface is constituted by the outer peripheral end surface of the measurement electrode, an increase in the contact area for the gas to be measured can be satisfactorily avoided even when deterioration of the measurement electrode progresses. Therefore, the output characteristic can be effectively improved, and the output drift due to the decomposition of the residual hydrocarbon can be reduced as much as possible.
(実施例) 以下、本考案を更に具体的に明らかにするために、本考
案の実施例について、図面を参照しつつ、詳細に説明す
ることとする。(Embodiment) Hereinafter, in order to more specifically clarify the present invention, an embodiment of the present invention will be described in detail with reference to the drawings.
先ず、第1図において、2は、酸素分圧計の主体を為す
有底円筒形状の固体電解質体であって、高温において酸
素イオン伝導性のあるものである。なお、この固体電解
質体2には、従来からの電気化学反応を利用した酸素分
圧計において用いられている固体電解質の何れもが使用
可能であり、例えば、ジルコニアにカルシア、イットリ
ア等を固溶させたもの、トリアにイットリアを固溶させ
たもの、酸化セリウムに酸化ランタンを固溶させたもの
等がある。First, in FIG. 1, 2 is a bottomed cylindrical solid electrolyte body that mainly constitutes an oxygen partial pressure gauge, and has oxygen ion conductivity at a high temperature. The solid electrolyte body 2 may be any of the solid electrolytes conventionally used in oxygen partial pressure gauges that utilize electrochemical reactions. For example, zirconia may be solid-dissolved with calcia, yttria, or the like. There is a solid solution of yttria in thoria, and a solid solution of lanthanum oxide in cerium oxide.
また、かかる固体電解質体2の閉鎖端部の内面には、基
準電極としての内側電極6が設けられており、更に固体
電解質体2の内部には、該内側電極6に対して先端開口
部が当接する状態で、円筒形状のエアー送入管8が、挿
入、配置せしめられている。そして、内側電極6に接続
されて、該内側電極6の信号(起電力)を取り出すリー
ド線(+側)10が、かかるエアー送入管8内を通って外
部に導かれていると共に、かかるエアー送入管8の基部
側に装着された空気導入パイプ36を通じて、基準ガスと
しての空気が該エアー送入管8内に導かれて、その先端
に位置する内側電極6に接触せしめられるようになって
いる。Further, an inner electrode 6 as a reference electrode is provided on the inner surface of the closed end portion of the solid electrolyte body 2, and a tip opening portion is provided inside the solid electrolyte body 2 with respect to the inner electrode 6. In the abutting state, the cylindrical air feeding pipe 8 is inserted and arranged. A lead wire (+ side) 10 that is connected to the inner electrode 6 and takes out a signal (electromotive force) from the inner electrode 6 is guided to the outside through the inside of the air inlet pipe 8 and Air as a reference gas is introduced into the air inlet pipe 8 through the air inlet pipe 36 attached to the base side of the air inlet pipe 8 so that it can be brought into contact with the inner electrode 6 located at the tip thereof. Has become.
なお、かかる内側電極6としては、従来からの酸素分圧
計に用いられているものと同様な電極構成がそのまま採
用され得、例えばかかる閉塞端部の内面に対して、メッ
キ、スパッタリング、サーメット等の手法乃至は形態に
おいて密着、一体化せしめられたり、メッシュ等の形態
において接触状態に配されることとなる。また、かかる
内側電極6の材料としては、一般に白金が好適に用いら
れるが、その他、白金・ロジウム合金、白金・パラジウ
ム合金、金、銀、白金・銀合金等の材料も適宜に選択さ
れる。As the inner electrode 6, the same electrode configuration as that used in the conventional oxygen partial pressure gauge can be directly adopted, and for example, plating, sputtering, cermet, etc. can be applied to the inner surface of the closed end. In the method or form, they are brought into close contact with each other or integrated, or in the form of mesh or the like, they are placed in contact with each other. In addition, platinum is generally preferably used as the material of the inner electrode 6, but other materials such as platinum / rhodium alloy, platinum / palladium alloy, gold, silver, platinum / silver alloy, etc. are appropriately selected.
一方、かかる固体電解質体2における閉端部の外側面上
には、測定電極としての外側電極4が配されており、更
に該固体電解質体2の外側には、それよりも径の大きな
有底円筒形状を呈する外套管としての金属管12が、該固
体電解質体2の閉鎖側端部から、その外表面を覆うよう
にして外挿せしめられている。なお、かかる金属管12に
あっては、高温の炉内に挿入され、また脆弱な固体電解
質体2の保護管としても機能させられるものであるとこ
ろから、インコネル等の耐熱鋼や耐熱合金より作製され
たものが好適に用いられることとなる。On the other hand, an outer electrode 4 as a measurement electrode is arranged on the outer surface of the closed end portion of the solid electrolyte body 2, and further, on the outer side of the solid electrolyte body 2, there is a bottomed surface having a larger diameter than that. A metal tube 12 as an outer tube having a cylindrical shape is externally inserted from the closed end of the solid electrolyte body 2 so as to cover the outer surface thereof. Since the metal tube 12 is inserted into a high-temperature furnace and can also function as a protective tube for the fragile solid electrolyte body 2, it is made of heat-resistant steel or heat-resistant alloy such as Inconel. The obtained product is preferably used.
ところで、かかる固体電解質体2の外面に接して配され
る外側電極4は、上記内側電極6と同様、白金の他、白
金を主体とした合金やその他の貴金属系材料を用いて形
成されたものであるが、ここでは、本考案に従って、前
記固体電解質体2とは別部材として、単体構造にて構成
されており、該固体電解質体2の閉鎖端部の外面周縁部
から外方にはみ出さない平面形状を有する薄肉の円板
(プレート)形状をもって形成されている。そして、該
外側電極4は、固体電解質体2と金属管12との間におい
て、それらの底壁部(閉鎖端部)間に介装せしめられ、
その両側面が、それら固体電解質体2の底壁部外面と金
属管12の底壁部内面とに対して接触した状態で、それら
両部材間で挟圧保持されているのである。なお、かかる
外側電極4の厚さは、特に限定されるものではないが、
通常、コスト等との関係から、1mm以下の厚さのものが
好適に用いられることとなる。By the way, the outer electrode 4 arranged in contact with the outer surface of the solid electrolyte body 2 is formed of platinum, an alloy containing platinum as a main component, or other noble metal-based material, in the same manner as the inner electrode 6. However, here, according to the present invention, the solid electrolyte body 2 is configured as a separate member and has a unitary structure, and the solid electrolyte body 2 protrudes outward from the outer peripheral edge portion of the closed end portion. It is formed in the shape of a thin-walled disc (plate) having a non-planar shape. Then, the outer electrode 4 is interposed between the solid electrolyte body 2 and the metal tube 12 between their bottom wall portions (closed end portions),
The both side surfaces are sandwiched and held between the two members in a state of being in contact with the outer surface of the bottom wall portion of the solid electrolyte body 2 and the inner surface of the bottom wall portion of the metal tube 12. Although the thickness of the outer electrode 4 is not particularly limited,
Usually, a thickness of 1 mm or less is preferably used in consideration of cost and the like.
また、上記固体電解質体2の外側には、金属管12との間
に、所定間隙の空間が画成されており、そして金属管12
の基部(開口部)側に近接した内周面上に配されたOリ
ング24にて、かかる空間の基部側開口が外部に対してシ
ールされることにより、ガス流通空間14が形成せしめら
れている。そしてまた、かかる金属管12には、その閉塞
された先端部位に近接する筒壁部において、第2図から
も明らかなように、二つの被測定ガス導入口16、16が相
対向して設けられており、これらの被測定ガス導入口16
を通じて、被測定ガスが外部からガス流通空間14内に導
き入れられることによって、かかる被測定ガスが、金属
管12と固体撮像素子2との底壁部間に配設された外側電
極4に接触せしめられ得るようになっている。Further, a space having a predetermined gap is defined between the metal electrolyte tube 12 and the outside of the solid electrolyte body 2, and
The O-ring 24 arranged on the inner peripheral surface close to the base (opening) side of the above seals the base side opening of the space to the outside, thereby forming the gas circulation space 14. There is. In addition, the metal pipe 12 is provided with two measured gas introduction ports 16, 16 facing each other at the cylindrical wall portion near the closed tip portion, as is apparent from FIG. These measured gas inlets 16
The gas to be measured is introduced into the gas flow space 14 from outside through the gas to be contacted with the outer electrode 4 disposed between the bottom walls of the metal tube 12 and the solid-state imaging device 2. It can be punished.
すなわち、かかる外側電極4にあっては、固体撮像素子
2の底壁部外面からはみ出さない大きさの薄肉のプレー
ト形状にて形成されており、その両側面が、それぞれ固
体撮像素子2の底壁部外面および金属管12の底壁部内面
に対して接触した状態で配設されているところから、被
測定ガス導入口16内に導かれた被測定ガスに対しては、
その外周面のみにおいて接触せしめられることとなるの
である。That is, the outer electrode 4 is formed in a thin plate shape having a size that does not protrude from the outer surface of the bottom wall portion of the solid-state image sensor 2, and both side surfaces of the outer electrode 4 are the bottom of the solid-state image sensor 2. From the location where the outer surface of the wall portion and the inner surface of the bottom wall portion of the metal tube 12 are arranged in contact with each other, with respect to the measured gas introduced into the measured gas introduction port 16,
The contact is made only on the outer peripheral surface.
更にまた、上記金属管12の基部側端部(開口側端部)に
は、取付金具26が螺着されている。そして、該取付金具
26との間に配されたスプリング28にて、固体電解質体2
が、その底壁部外面が金属管12の底壁部に向かって押し
付けられる方向に付勢されているのであり、それによっ
て、それら固体電解質体2と金属管12との間における、
前記外側電極4に対する挟圧力(保持力)が付与せしめ
られている。また、かかる取付金具26とエアー送入管8
の基部に設けられたフランジ部32との間にも、スプリン
グ34が介装されており、そしてこのスプリング34の付勢
力によって、かかるエアー送入管8が、前述の如き、内
側電極6に対する当接状態下に保持せしめられているの
である。Furthermore, a mounting metal fitting 26 is screwed to the end portion on the base portion side (end portion on the opening side) of the metal tube 12. And the mounting bracket
With the spring 28 arranged between the solid electrolyte body 2 and
However, the outer surface of the bottom wall portion is urged in the direction in which it is pressed toward the bottom wall portion of the metal tube 12, whereby between the solid electrolyte body 2 and the metal tube 12,
A clamping force (holding force) is applied to the outer electrode 4. In addition, such a mounting bracket 26 and the air inlet pipe 8
A spring 34 is also interposed between the spring portion 34 and the flange portion 32 provided on the base portion, and the biasing force of the spring 34 causes the air inlet tube 8 to contact the inner electrode 6 as described above. They are kept in contact with each other.
なお、かかる取付金具26の外周面には、リード線(−
側)30が接続されており、外側電極4に対して電気的に
接続せしめられた金属管12、取付金具26を通じて、かか
る外側電極4の信号(起電力)が外部に取り出されるよ
うになっている。In addition, the lead wire (-
Side) 30 is connected, and the signal (electromotive force) of the outer electrode 4 is taken out to the outside through the metal tube 12 and the fitting 26 that are electrically connected to the outer electrode 4. There is.
そして、このような構造とされた酸素分圧計にあって
は、金属管12の基部(開口部)側に近接した外周面に形
成されたフランジ部18において、熱処理炉の炉壁等の取
付壁20に設けられた取付座22に対して固定されることに
よって、熱処理炉に装着されることとなる。Then, in the oxygen partial pressure gauge having such a structure, in the flange portion 18 formed on the outer peripheral surface near the base portion (opening portion) side of the metal tube 12, a mounting wall such as a furnace wall of a heat treatment furnace is attached. By being fixed to the mounting seat 22 provided on the 20, it is mounted in the heat treatment furnace.
すなわち、上述の如き構造とされた酸素分圧計にあって
は、金属管12に設けられた被測定ガス導入口16を通じて
炉内ガス(被測定ガス)がガス流通空間14内に導き入れ
られ、固体電解質体2と金属管12との間に介装されてい
る外側電極4に接触せしめられることによって、基準ガ
スとしての空気に接触せしめられている内側電極6との
間において、それらの酸素分圧の差に基づく起電力が発
生することとなり、これによって、従来と同様にして被
測定ガスとしての炉内ガス中の酸素分圧を求めることが
できるのであり、そして、このようにして得られた酸素
分圧をもとに、公知の手法に従い、カーボン・ポテンシ
ャル値を算出することができ、以てかかるカーボン・ポ
テンシャル値に基づいて、炉内雰囲気の制御が行なわれ
ることとなるのである。That is, in the oxygen partial pressure gauge having the structure as described above, the in-furnace gas (measurement gas) is introduced into the gas distribution space 14 through the measurement gas introduction port 16 provided in the metal tube 12. By contacting the outer electrode 4 which is interposed between the solid electrolyte body 2 and the metal tube 12, the oxygen content between the solid electrolyte body 2 and the inner electrode 6 which is contacted with air as a reference gas. An electromotive force is generated based on the difference in pressure, which allows the oxygen partial pressure in the gas in the furnace as the gas to be measured to be obtained in the same manner as in the past, and is obtained in this way. Based on the oxygen partial pressure, the carbon potential value can be calculated according to a known method, and the atmosphere in the furnace is controlled based on the carbon potential value. .
そして、そのような酸素分圧の測定に際して、かかる酸
素分圧計にあっては、外側電極4における被測定ガスに
対する接触面が、その外周面のみによって形成されてい
るところから、かかる被測定ガスに対する接触面が充分
に小さな面積をもって形成され得て、該外側電極4によ
る炉内に残存するメタン等のハイドロカーボンの分解が
有利に抑制され得るのであり、以てそのような分解され
たハイドロカーボンによるセンサ出力への影響が良好に
抑制され得て、出力のドリフトが可及的に防止され得る
こととなるのである。When measuring such an oxygen partial pressure, in such an oxygen partial pressure meter, since the contact surface of the outer electrode 4 for the measured gas is formed only by the outer peripheral surface thereof, Since the contact surface can be formed with a sufficiently small area, the decomposition of hydrocarbons such as methane remaining in the furnace by the outer electrode 4 can be advantageously suppressed, and thus such decomposed hydrocarbons can be used. The influence on the sensor output can be suppressed well, and the output drift can be prevented as much as possible.
また、かかる酸素分圧計にあっては、その外側電極4の
劣化(脆化)に起因する、該外側電極4の被測定ガスに
対する接触面積の増加も、有利に回避され得るところか
ら、かかる電極の劣化に伴う出力のドリフトの増加も有
効に解消され得るのである。Further, in such an oxygen partial pressure meter, an increase in the contact area of the outer electrode 4 with the gas to be measured due to deterioration (embrittlement) of the outer electrode 4 can be advantageously avoided. It is possible to effectively eliminate the increase in the drift of the output due to the deterioration.
因みに、第3図には、浸炭炉におけるカーボン・ポテン
シャル(CP)値に関して、従来の酸素分圧計を用いた場
合と本考案に従う構造とされた酸素分圧計を用いた場合
における比較が為されている。Incidentally, Fig. 3 shows a comparison of the carbon potential (CP) value in a carburizing furnace between the case of using a conventional oxygen partial pressure meter and the case of using an oxygen partial pressure meter having a structure according to the present invention. There is.
そこにおいて、縦軸には、酸素分圧計にて検出される検
出値から換算されるCP値が示され、一方横軸には、浸炭
炉内に載置された鋼箔を分析して、実際に鋼箔が浸炭さ
れているCP値を求めた値が示されている。理論値は、実
際の鋼箔分析CP値と酸素分圧計換算CP値が等しい場合を
示すものであるが、この理論値に対して、従来の酸素分
圧計を用いた場合には、その差が大きく、これに対し
て、本考案に従う構造とされた酸素分圧計を用いた場合
には、理論値に近い値が求められており、この結果から
しても、本考案に係る酸素分圧計においては、その出力
特性の著しい改善が実現されることが明らかである。Here, the vertical axis shows the CP value converted from the detection value detected by the oxygen partial pressure meter, while the horizontal axis analyzes the steel foil placed in the carburizing furnace to show the actual value. The value obtained by obtaining the CP value in which the steel foil is carburized is shown in. The theoretical value shows the case where the actual steel foil analysis CP value and the oxygen partial pressure gauge converted CP value are equal, but when using a conventional oxygen partial pressure meter, the difference is On the other hand, in the case of using the oxygen partial pressure gauge having the structure according to the present invention, a value close to the theoretical value is required. It is clear that a significant improvement in its output characteristics is realized.
以上、本考案の一実施例について詳述してきたが、これ
は文字通りの例示であって、本考案はかかる具体例にの
み限定して解釈されるものではない。Although one embodiment of the present invention has been described in detail above, this is a literal example, and the present invention should not be construed as being limited to such a specific example.
例えば、外套管には、必ずしも、金属管(12)を用いる
必要はなく、外側電極4のリード線を別途設けること等
によって、アルミナ等のセラミックス材料等にて形成す
ることも可能である。For example, the outer tube does not necessarily need to use the metal tube (12), and may be formed of a ceramic material such as alumina by providing a lead wire for the outer electrode 4 separately.
その他、一々列挙はしないが、本考案は当業者の知識に
基づいて種々なる変更、修正、改良等を加えた態様で実
施され得るものであり、またそのような実施態様が、本
考案の趣旨を逸脱しない限り、何れも本考案の範囲内に
含まれるものであることは、言うまでもないところであ
る。In addition, although not listed one by one, the present invention can be implemented in a mode in which various changes, modifications and improvements are made based on the knowledge of those skilled in the art, and such an embodiment is the gist of the present invention. It goes without saying that all of them are included in the scope of the present invention unless deviating from the above.
第1図は、本考案に係る酸素分圧計の一具体例を示す縦
断面説明図であり、第2図は、かかる酸素分圧計の先端
部を示す斜視説明図である。また、第3図は、従来の酸
素分圧計と本考案に従う酸素分圧計とにおける換算CP値
と鋼箔分析CP値との関係を示すグラフである。 2:固体電解質体、4:外側電極 6:内側電極、8:エアー送入管 10:内側電極リード線 12:金属管、14:ガス流通空間 16:被測定ガス導入口 20:炉壁、24:Oリング 26:取付金具、28,34:スプリング 30:外側電極リード線 36:空気導入パイプFIG. 1 is a vertical cross-sectional explanatory view showing a specific example of the oxygen partial pressure gauge according to the present invention, and FIG. 2 is a perspective explanatory view showing a tip portion of the oxygen partial pressure gauge. FIG. 3 is a graph showing the relationship between the converted CP value and the steel foil analysis CP value in the conventional oxygen partial pressure meter and the oxygen partial pressure meter according to the present invention. 2: Solid electrolyte body, 4: Outer electrode 6: Inner electrode, 8: Air inlet tube 10: Inner electrode lead wire 12: Metal tube, 14: Gas distribution space 16: Gas inlet for measurement 20: Furnace wall, 24 : O-ring 26: Mounting bracket, 28, 34: Spring 30: Outer electrode lead wire 36: Air introduction pipe
Claims (1)
面に基準電極を、またその外面に測定電極を、それぞれ
配すると共に、被測定ガス導入口を有する有底円筒形状
の外套管内に、該固体電解質体を収容して、前記測定電
極を該外套管の閉端部との間において挟圧するようにし
た酸素分圧計において、 前記測定電極を、前記固体電解質体の閉端部外面に対し
て、その周縁部からはみ出すことなく接触せしめられ得
る平面形状を有する板状体にて構成し、前記外套管の閉
端部内面との間で挟圧保持せしめたことを特徴とする酸
素分圧計。1. A bottomed cylindrical mantle having a reference electrode on the inner surface of a closed end of a solid electrolyte body having a bottomed cylindrical shape and a measurement electrode on the outer surface thereof, and having a gas inlet to be measured. An oxygen partial pressure meter in which the solid electrolyte body is housed in a tube so that the measurement electrode is clamped between the measurement electrode and the closed end section of the mantle tube, wherein the measurement electrode is the closed end section of the solid electrolyte body. It is characterized in that it is constituted by a plate-like body having a planar shape that can be brought into contact with the outer surface without protruding from the peripheral edge thereof, and is held by being clamped between the outer surface and the inner surface of the closed end portion. Oxygen partial pressure gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988153400U JPH079080Y2 (en) | 1988-11-25 | 1988-11-25 | Oxygen partial pressure gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988153400U JPH079080Y2 (en) | 1988-11-25 | 1988-11-25 | Oxygen partial pressure gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0272967U JPH0272967U (en) | 1990-06-04 |
| JPH079080Y2 true JPH079080Y2 (en) | 1995-03-06 |
Family
ID=31429205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988153400U Expired - Lifetime JPH079080Y2 (en) | 1988-11-25 | 1988-11-25 | Oxygen partial pressure gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079080Y2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6131960A (en) * | 1984-07-25 | 1986-02-14 | Ngk Insulators Ltd | Instrument for measuring oxygen partial pressure |
-
1988
- 1988-11-25 JP JP1988153400U patent/JPH079080Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0272967U (en) | 1990-06-04 |
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