JPH079306A - Device for detecting irregularity near surface of work - Google Patents

Abstract

PURPOSE: To directly inspect or test the irregularity near the surface of a workpiece, especially the surface roughness, desirably in a working operation position between the working steps or after the step. CONSTITUTION: This inspection tool 11 has an inspection probe 17 manufactured as an eddy current probe in a probe carrier 16 equipped elastically and expansibly in a probe receptacle 14, and the probe receptacle 14 is capable of freely moving in the cross direction in a probe guide cylinder 12 and fixed in a position by a fixing means 15. A MOS's type internal taper 13 is formed in the probe guide cylinder 12, thereby receiving the probe guide cylinder 12 in the spindle of the machine tool 33.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test or inspection device for testing or inspecting surface irregularities, in particular surface roughness of a workpiece, preferably directly during or after the machining process. More specifically, the present invention provides a method of machining a surface roughness created during machining of a workpiece, for example using a cutting tool or a machine tool, while the surface roughness of the workpiece is attached to the machine tool after each machining step. Extensive undesired, allowing direct inspection in position and optionally changing the machining parameters or replacing worn cutting tools at the right time, so that the quality of the surface after each machining step can be quantified The present invention relates to a technique for preventing unevenness.

[0002]

2. Description of the Related Art In addition to the form of final inspection, performing inspection of a work piece as close as possible to the machining process enables reasonable and high-yield manufacturing, and control of the work piece in a machine tool. It also leads to shortening of the circuit in terms of space and time. Therefore, and more particularly, the purpose is to enable a quick and quantitative assessment of the condition of the machined workpiece, from which conclusions can be drawn regarding advantageous changes in machining parameters and / or tool wear. It is to be. For this purpose, inspection or test equipment is used that can operate in the spatial vicinity of the machine tool.

German Patent DE 3,942,805 to an evaluation unit which has a feeler or probe insertable into the hole and which is guided along the inner surface of the hole to produce a surface roughness value. Disclosed is a surface measuring unit which is adapted to transmit a signal and which is mounted on a work table toward a conveyance surface of a machine tool and which is vibration-proof. When the range of predetermined values is exceeded, the evaluation unit can generate a control signal or an error signal for changing the working parameters (eg feed pressure). The workpiece to be inspected is moved from the working position to the measuring section for inspection purposes, and as a result of the vibration prevention of the measuring section with respect to the machine tool, further machining of the workpiece is possible during the measurement.

If appropriate measures are taken, such a surface roughness measuring unit can be adapted to operate relatively close to the process or working position, and can have different measuring principles, especially mechanoelectric, It can function on the basis of opto-electrical or aerodynamic principles. German Patent DE
As is known from 2,707,023A1, in order to make a quantitative measurement of the surface roughness of an electrical conductor, an electromagnetic measuring method, for example the eddy widely used at present for the purpose of surface area analysis. It is also possible to use a current method or the like.

German Patent DE 3,723,609A1
The publication discloses an eddy current inspection table with a fixed eddy current probe, and a machined work piece must be mounted on the inspection table for inspection. The work piece is moved by a motor in a direction perpendicular to the eddy current probe, and when the motor is properly adjusted, the flat work piece surface can be scanned by the eddy current probe.

[0006]

SUMMARY OF THE INVENTION It is an object of the present invention to perform surface inspection of a workpiece directly at the machining location, preferably directly during or after the machining process.
An object of the present invention is to provide an inspection device for inspecting surface roughness, particularly surface roughness of a workpiece. More specifically, it allows the machine tool to be used as an inspection device.

[0007]

In order to solve the above-mentioned problems, the first invention of the present application aims at inspecting unevenness in the vicinity of the surface of a work piece, and a physical quantity that greatly changes depending on the characteristics of the surface. At least one inspection probe that is movable with respect to the test object to generate the object, a detector that changes the physical quantity by relative movement between the inspection probe and the workpiece, and the probe. A device for supplying electric power and a device for receiving a signal supplied from the probe, the probe being arranged on an inspection tool lockable at a position of the machine tool on a machine tool, The machine tool has a movable part and a fixed part, and the power supply of the probe and the probe are provided between the inspection probe and at least one fixed part of the machine tool. And gist inspection apparatus is provided with at least one rotatable transmitter for transmitting the signal supplied.

The second invention of the present application, in order to inspect unevenness in the vicinity of the surface of the workpiece, at least movable with respect to the test object for generating a physical quantity that greatly changes depending on the characteristics of the surface. One inspection probe, a detector for changing the physical quantity by relative movement between the inspection probe and the workpiece, a signal for supplying power to the probe and a signal supplied from the probe. An inspection device having a device for receiving, and the probe is arranged on an inspection tool which can be locked at a position of a machine tool on a machine tool.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT In the present invention, a rotatable transmission device is provided between the inspection probe and the fixed part of the machine tool for the purpose described above. The transmitter is preferably manufactured as a rotatable transmission device which operates in a contactless manner, the transmission of an alternating voltage across the air gap and on both sides of it being carried out by means of an alternating electromagnetic field induced by said alternating voltage. , The alternating voltage will further excite the alternating electric field.

The inspection tool can be arranged at the position of the machine tool. Therefore, the machine tool can be used as an inspection device. Therefore, the present invention allows the manufacturing and machining quality inspection or control of the work piece to be directly integrated into the work sequence of the work piece, eliminating the need to move the work piece from the work position for control. Especially in the case of numerically controlled machining, the result is that the workpiece to be inspected can be predisposed without further adjustment and before control, especially in the form of a data set, the surface to be inspected into the machine tool. Can have a sequence of Therefore, the processing apparatus "knows" exactly the position and direction of the surface to be inspected and, if properly set, can directly move the inspection probe of the inspection tool by the processing apparatus to that position. A further important advantage of such an inspection tool is that the processing device can be used as a manipulator for an inspection probe. This eliminates the need to provide a dedicated housing, drive device, etc. for the inspection device, which is very advantageous for economic reasons.

In other words, eliminating the time for transportation and installation,
Furthermore, by minimizing the machining time, the inspection or testing of the workpiece directly at the machining position will greatly reduce the control circuitry in mechanical machining. Therefore, with quick and accurate control and inspection between individual machining steps, early failures during the machining steps can be detected early and corrective measures can be taken at appropriate times (for example, by changing machining parameters or Change tools, etc.).
Especially when high quality is required for the work surface, for example in the production of high precision holes in ball bearing seats,
It is also possible to reduce or avoid quality problems.

In the preferred embodiment of the present invention, the integrability of the inspection tool into the machining process allows the inspection tool to be replaced manually and automatically at the tool receptacle of the machine tool and can be removed in the same manner. Is simplified. The automatic integration of the inspection device into the machining process is particularly facilitated in that the inspection tool has a standardized receiving means, for example a Mohs type internal or a clamping taper, with the aid of this. In the same way as a machining tool, a movable inspection tool part equipped with a probe can be chucked to a tool receptacle of a machine tool quickly, fixedly, and in a positionally fixed manner. The mounting of the inspection tool between the individual inspection steps, for example in the case of working tools in a tool magazine, is also simplified by such standardized receiving means. In other words, the production of an inspection tool with a standardized receiving means, for example a Mohs internal taper, allows the inspection tool to be used universally in combination with many different machine tools without any design changes.

In order to connect the supply / signal processing device externally arranged on or near the machine tool to the movable region of the inspection tool, the fixed part of the machine tool is connected to the inspection tool. It is advantageous that the inspection tool is provided as a part of the inspection tool and can be replaced together with the inspection tool, and the portion having the movable probe mounted thereon is movably mounted. With such a structure, for example, it is possible to make all external connections to the inspection tool by a simple plug connection with a fixed connection means locked so as not to rotate on the machine tool. This will increase versatility.

The connecting means may be made, for example, in the form of a sleeve which mates with the probe guiding means having all necessary supply and signal connections and anti-rotation devices and which is rotationally mounted to the probe guiding means. . The sleeve can be fitted to an anti-rotation device on the machine tool when the inspection tool is inserted. At the same time as making the automatic closure between the connecting means and the machine tool, all the necessary supply and signal connections can preferably be made, for example by plug connections. When the inspection tool is removed, the inserted anti-rotation device and the plug connection can be automatically opened again. With proper design, supply and / or signal connections can be used as anti-rotation means.

The technically required part of the problem of setting up the connection between the high speed rotating inspection probe and the external supply and evaluation device is that in the preferred embodiment it is not between the inspection tool and the machine tool but inside the inspection tool. Is solved in. For this purpose, in the vicinity of the mounting portion of the probe guide cylinder in the connecting means, for transmitting the power supply of the inspection probe, a rotatable transmitter that operates in a non-contact manner and does not wear is provided,
It provides a signal which is supplied from the test probe to the electronic circuitry of the test device and which, in a manner known per se, makes a reliable and non-rotational rotary test probe electrical connection.

In the connecting means and the probe guiding means, the rotatable transmitters have transmitting contact shoes which are separated from each other by an air gap and face each other but have the same structure, and the air gap is induced by induction of an alternating electromagnetic field. The AC voltage is adapted to bridge the AC voltage therein or vice versa.

Near the rotatable transmitter, the probe guides from a quickly removable compression gas connection that is properly sealed to the peripheral area of the transmitter to operate independent of rotation. A squeeze gas transmission mechanism is suitably provided for transmitting the squeeze gas to the means for connecting the cylinder and the probe receptacle to the squeeze gas channel system. Near the test probe, the compressed gas channel system has an outlet to the outside. Plug connection for compressed gas supply, connection means, probe guide cylinder, probe receptacle,
The squeezed gas channel system of the probe carrier and the squeezed gas transmission system, which operates independently of rotation, form part of the cleaning means of the measuring area of the inspection probe provided on the inspection tool. That is, it is possible to exclude cutting chips, especially metal pieces that may hinder the operation of the probe, in the measurement area of the inspection probe during the inspection measurement. In particular, in the case of the eddy current probe, it is extremely tough as compared with other methods and is less susceptible to environmental influences such as a coolant, but a metal piece in the measurement area may lead to an error in the measurement result. By constantly supplying the compressed gas to the measuring area during the measurement, this risk is avoided and the measuring result represents the measuring result of the actual unevenness of the test surface.

The eddy current method used in the preferred embodiment is more difficult than other methods such as mechano-electrical or opto-electrical methods in difficult working conditions, ie in rough and dusty conditions, for example during workpiece control. It is particularly suitable when it occurs directly at the processing point. The active components of an eddy current probe typically consist of an electric field winding, a measurement winding, and a space winding, and because they are completely sealed within the inspection probe, they provide extensive protection from dirt and damage. The high frequency AC electromagnetic field (usually 3 to 10 kHz) generated by the electric field coil of the inspection probe penetrates into the region near the surface of the test material located at a certain distance (usually about 1 mm) from the probe during measurement, and the AC current flows there. And the excitation frequency as well as the current strength as a function of the conductivity and permeability of the material under test sharply decreases in a hyperbolic fashion from the surface of the material under test to the interior. Therefore, the eddy current acting on the "skin" near the surface of the test object also acts as mutual induction to the probe coil. The mutual induction caused by the eddy current causes a tuning shift in the signal processing circuit surrounding the measuring coil as a result of impedance changes, and is essentially and characteristically dependent on the distance between the probe and the surface.

Therefore, the evaluation of the misalignment characteristic of the distance can be used for the purpose of controlling the distance, for example, for the eccentricity control of the perforation and the lumen. To separate tuning deviations specific to the intervals or to compensate with electrical signal compensation, for example,
The information superimposed on the distance information can be analyzed particularly easily. When the eddy current probe moves on an ideally smooth and uniform surface with a constant interval,
The interference level due to the roughness is not superimposed on the stationary interval information. Surface roughness and cracks or other non-uniformities near the surface cause characteristic and significant changes to the Eddy current propagation in the sense of increased electrical resistance or decreased conductivity, resulting in characteristic measurement signals. To do. The value of the "electrical" roughness obtained from this measured signal is used directly for quality control or, if necessary, is constituted by the "electrical" roughness of a comparative test object, for example with a known roughness level. Can be converted into an actual surface roughness.

A characteristic advantage of eddy current technology is the high achievable inspection speed, especially when compared to mechanical methods performed using a probe. That is, using a modern eddy current probe, it is possible to achieve a linear inspection speed of several meters per second, generally about 3 m per second. The inspection tool according to the present invention, for example, if the diameter of the hole to be inspected is 100 mm, 600 revolutions per minute (60
It can be easily rotated up to 0 rpm) or higher. Especially in the case of an embodiment intended for high speed,
The eccentricity of the inspection tool can be optimized by the corresponding mass compensation means, and it is desirable to match the center of gravity of the inspection tool with the setting of each probe receptacle to the axis of rotation of the tool.

In another embodiment, the machine tool has a turret head to which several tools are mounted, which is rotated by rotating it and more particularly relative to the position of the rotating workpiece. Various tools can be brought to the cutting position. The turret head can be made, for example, as a drum, a horizontal, a disc, or a flat turret. The probe can operate according to various principles and can optionally provide a means for converting the test signal into a signal that can be transmitted by inductively and electrically.

By arranging between the turret head and at least one stationary member of the machine tool at least one rotatable transmitter, which is preferably capable of transmitting an AC voltage by induction, A test probe can be connected to the supply and signal evaluation unit. Transmission takes place across and across an air gap between a rotatable transmitter and a rotatable cooperating member opposite. The part of the rotatable transmitter on the turret side can be arranged close to the shaft holding it, and the cooperating member can be arranged on the fixed side close to the outer circumference of the shaft.

The above and other features of the present invention can be gathered from the claims, the description and the drawings, and the individual features can be used alone or in combination in the embodiments of the present invention and other fields. And can represent an advantageous independently protectable structure that is claimed herein. Embodiments of the present invention will be described in detail in the following description with reference to the drawings.

[0024] Example of the inspection or testing device illustrated in illustrated example Figure 1 comprises several assembled moiety movably connected to each other, constitute the inspection tool 11 Together these. The core part of the inspection tool is the probe guide means 12, and for receiving the inspection tool 11 on the chuck of a machine tool such as a drilling machine, a receiving means 13 made in the form of a standardized Morse internal taper is provided at the upper end. . The cylindrical axis of the probe guide means 12 connected to the Mohs internal taper is provided with a guide channel at the lower, partially beveled end, which is inclined at 45 degrees to the axis of the cylindrical section, which is elongated. It surrounds the probe receptacle 14. The probe receptacle is adapted for movement within the guide channel in the direction of the longitudinal axis, the longitudinal position of which within the guide channel is fixed by a clamping screw 15 which can be locked at right angles to the adjusting direction. You are free. At the lower end of the probe receptacle 14, the probe carrier 16 is telescopically movable within the receptacle along its longitudinal axis and is mounted on the receptacle in a resilient manner.
Inspection probe 17 created as an eddy current probe
Is located in the hemispherically rounded end region of the carrier 16.
The longitudinal axis of the probe 17 is inclined by 45 degrees with respect to the longitudinal axis of the probe receptacle 14 and is arranged radially with respect to the cylinder axis of the probe guide cylinder 12. Therefore, while the probe guide cylinder 12 is rotating with respect to its cylinder axis, the test probe 17 will describe an annular test path, the diameter of which is determined by moving the probe receptacle within the guide channel. It can be adjusted freely.

A probe receptacle having one or more probe carriers and a probe can be manufactured in the shape of a lever and rotated about an axis parallel to the axis of rotation of the inspection tool in the lower region of the probe guide means. Also included within the scope of the invention is a preferred embodiment in which the probe, mounted as such and placed in the end region of the lever as a function of the rotational position of the lever, can be placed near or far from the axis of rotation of the inspection tool. It is what is done. If you make the lever properly,
In the case of, for example, a parallelogram carrier, it is also possible to direct the probe to an optimum working area approximately in the radial direction with respect to the axis of rotation of the inspection tool, regardless of the carrier position. In another embodiment, the elongated probe receptacle having one or more probe carriers and probes can be oriented radially relative to the axis of rotation of the inspection tool and is movable in said direction.

The electrical connections from the test probe 17 to the power supply and the evaluation unit (not shown) are made in part by the probe cable 18, which terminates inside the probe guide cylinder 12 at the probe-side contact 19.
The probe-side contact 19 is a non-contact and non-abrasive transmission contact, which provides an AC electromagnetic field to the connecting contact 20 having a similar structure to connect to the connecting plug 22 by using a connecting cable 21 of an electric conductor, 22 using the probe 17 of the inspection tool 11
Can be connected to the power supply and evaluation unit. The spigot 22 is arranged on the connection means 23 in the vicinity of the compressed gas connection 24, which quickly connects the compressed gas channel system of the inspection tool 11 with an external compressed gas supply, not shown. It is designed to be cut.

In the compressed gas channel system of the inspection tool 11, a connecting channel 25 is provided in the connecting means 23. In the immediate vicinity of the probe guide cylinder 12, the channel communicates with a circular groove 27 provided in the connecting means 23, which is partially sealed with a squeeze gas seal 26. The groove 27 is in contact with the open end of the guide cylinder channel 28 at the side surface of the probe guide cylinder 12, and the guide cylinder channel is in the vicinity of the probe receptacle 14 and communicates with the compressed gas guide groove 29 formed therein to seal the groove. It is sealed to the outside by a stopper 30 and is open to the outside air near the probe 17.

The probe guide cylinder 12 has a connecting means 23.
It is rotatably mounted around the cylinder axis by the two bearings 31. The connecting means 23 is configured to be firmly and detachably connectable to a fixed portion of the machine tool 33 by using the rotation preventing device 32.

During machining of the workpiece 34 of the machine tool, for example during cutting of the ball bearing seat, the inspection tool 11
Is stored in the tool magazine of the machine tool. When the machining is completed, the gripper grips the tensioned cutting tool and returns it to the tool magazine, grips the inspection tool 11 and attaches it to the drill press chuck. At this point, the Mohs type internal taper 13 of the inspection tool 11 is inserted and fixed. Desirably, simultaneously with the movement of inserting the taper portion, the rotation preventing device 32 of the connecting means 23 is fixed to the machine tool 33, and the locking means (not shown) is unlocked. This is to prevent the probe guide cylinder 12 from rotating with respect to the connecting means 23 when the inspection tool 11 is not fixed. That is, by mounting the inspection tool, the probe guide cylinder 1
2 and the drilling machine spindle are slidably connected, and the connecting means 23 and the main body of the machine tool 33 are interlockingly connected.

The axial position of the probe receptacle 14 in the guide channel is determined by the machining operation of the workpiece 3 produced.
Probe 17 at a distance of 1 mm from surface 35 of
Choose in a way that will come. Setting the diameter of the probe inspection path is the simplest because the absolute value of the spacing is not very important for inspecting surface irregularities and the influence on the measurand can be compensated for by any compensation of the electrical signal. Can be done manually, and the position of the probe receptacle 14 in the probe guide cylinder 12 can be fixed using a tightening screw 15. Further, several inspection tools 11 having probe receptacles 14 having different settings, that is, different inspection diameters are prepared in the tool magazine, and the workpieces of different diameters and the workpieces having different diameters can be obtained without performing any operation on the operator side. It is also possible to be able to inspect one workpiece over several cutting cycles. Also, an automatically actuating adjusting device, for example a device controlled by the distance measuring compensation signal, can be used for positioning the probe receptacle 14 in the probe guiding cylinder 12, so that at any time from the operator side It is possible to set different inspection diameters with the tool inserted without performing the operation.

By inserting cables for power supply and inspection signals into the connection plug 22, and connecting the compressed gas supply cable to the compressed gas plug 24, the inspection tool 11 is provided with an external supply and evaluation unit or an external compression unit. Reliable and quick connection to the gas unit. The connection with the external means may be automated so that the rotation prevention device 32 and the cutting tool 33 can be fitted and at the same time the connection for compressed gas supply or power supply and signal evaluation can be performed.

When the compressed gas supply is started, the compressed gas goes from the connecting means 23, the probe guide cylinder 12, the probe receptacle 14 to the vicinity of the probe 17 through the compressed gas channel system, where the shape of the channel in the discharge region is determined. Properly configured, does the part of the probe 17 facing the surface 35 and the area on the surface surrounding the measuring area of the probe constantly exclude dust or dirt, especially cuttings such as metal flakes? Or these states are kept. This regular cleaning of the inspection area will always inspect only the actual surface of the work piece 34.

When the probe guide cylinder 12 is rotated by rotating the spindle and the feeding of the table on which the workpiece 34 is placed is stopped, the measurement area of the inspection probe is circular on the machining surface 35 of the workpiece 34. Draw a route. The scan width of the inspection path is between 2 and 7 millimeters as a function of the design of the probe 17. In order to realize continuous inspection of the entire processing surface, for example, each time the probe guide cylinder 12 rotates, the workpiece is stepped up or down stepwise with the maximum distance of the scanning width of the inspection path in the axial direction of the probe guide cylinder. This is possible, or with each revolution of the probe guide cylinder 12 a continuous advance of the spindle by a distance up to the scan width will result in a spiral inspection path being created on the surface 35. In order to prevent the probe and the inspection tool from being damaged or destroyed when contact is made between the probe 17 or the probe carrier 16 and the work piece 34 as a result of tampering, or in contact with an object that has entered the inspection area,
If the probe carrier 16 is attached to the probe receptacle 14 by an elastically elastic method so as to be movable in the axial direction, the probe carrier 1
The position of 6 is pushed by the stress generated during the contact, and it is possible to cut off the advancement of the tool and / or the drive of the inspection tool by using a safety cutoff means.

In the embodiment of the inspection tool 11 shown in FIG. 1, a non-contact, non-abrasive actuated modified rotary transmitter 19 or 20 is a high frequency alternating voltage from a movable probe to a fixed connection means. It forms an ideal transmission means suitable for the Eddy current probe 17 which operates at. FIG. 2 shows the structure of the rotatable transmitters 19, 20 in detail. Each of the rotatable transmitters arranged facing in the probe guiding means 12 or in the connecting means 23 has a copper wire winding 36 and a ferrite core of U-shaped cross section connected thereto. Ferrite is particularly suitable as a core material for a transformer, because ferrite is magnetizable but is almost electrically non-conductive, resulting in almost no eddy current loss. Therefore, the signal transmission is carried out with a rotatable transmitter with almost no loss and with very little distortion. Since the transformer core is made of ferrite, the copper wire windings 36 are coupled as a transformer with the air gap 38 interposed therebetween, and the AC electromagnetic field bridges the air gap.

Other measuring principles, eg optoelectrical, mechanoelectrical or aerodynamical operating test devices are also included in the invention, the advantage of the rotatable transmitter is eg the test of a particular test probe. The signal can be converted into a voltage in the probe guide cylinder 12 and used to modulate the voltage into a high frequency alternating voltage.

[0036]

According to the invention, an electrically actuated test probe is arranged on or in a machine tool on a machine tool such that a random angle of rotation with respect to a fixed part of the machine tool is provided. In such a way that the test probe can be rotated particularly freely, while maintaining the electrical supply to it and the signal transmission between the test probe and preferably also the fixed supply and signal evaluation unit. It is possible to

[Brief description of drawings]

FIG. 1 is a schematic side view of a partial cross section of a preferred embodiment of an inspection device.

2 is a detailed view of the non-contact actuable rotatable transmitter of part II of FIG. 1;

[Explanation of symbols]

 11 Inspection Tool 12 Probe Guide Means 13 Receiving Means 14 Probe Receptacle 15 Tightening Screw 16 Probe Carrier 17 Probe 18 Probe Cable 19 Probe Side Contact 20 Connection Contact 21 Connection Cable 22 Connection Plug 23 Connection Means 24 Compressed Gas Coupling 25 Connection channel 26 Compressed gas seal 27 Groove 28 Guide cylinder channel 29 Compressed gas guide groove 30 Seal 31 Bearing 32 Anti-rotation device 33 Machine tool 34 Workpiece 35 Surface 36 Copper wire winding 37 Ferrite core 38 Air gap

Claims (11)

[Claims] 1. An at least one inspection probe that is movable with respect to a test object to generate a physical quantity that greatly changes depending on the characteristics of the surface for the purpose of inspecting irregularities near the surface of a workpiece. A detector for changing the physical quantity according to relative movement between the inspection probe and the workpiece, and a device for supplying power to the probe and receiving a signal supplied from the probe. And the probe is disposed on an inspection tool that can be locked at the position of the machine tool on the machine tool, the machine tool has a movable portion and a fixed portion, and the inspection probe and the Between at least one fixed part of the machine tool there is at least one rotatable transmitter for the power supply of the probe and the transmission of signals supplied by the probe. Inspection device provided. 2. The rotatable transmitter is a rotatable transmitter which operates in a non-contact manner, and transmission of an AC voltage is performed across an air gap by an AC electromagnetic field induced by the AC voltage. 2. The alternating electromagnetic field is further configured to induce an alternating voltage.
Inspection device described in. 3. The inspection tool has at least one receiving means for receiving the inspection tool in the machine tool, and a connection connectable to at least one fixed part of the machine tool in a non-rotatable manner. 2. An inspection apparatus according to claim 1, comprising means and at least one probe guide means movable with respect to the connecting means and connectable to at least one movable part of the machine tool. 4. The inspection according to claim 3, wherein the inspection tool is provided with at least one wiring means and at least one rotatable transmitter between the inspection probe and the connecting means. apparatus. 5. The inspection tool is provided with a partially non-rigid transmission means which is sealed in the outer circumferential direction for transmission of a fluid cleaning medium between the inspection probe and the connection means. The inspection apparatus according to claim 3, characterized in that 6. The probe guide means includes at least one probe receptacle movable relative thereto.
Having at least one probe carrier;
The probe is arranged on the probe carrier, and the probe carrier is elastically and elastically attached to the probe receptacle by a method of being movable so as to expand and contract in the axial direction. Claim 3
Inspection device described in. 7. The inspection apparatus according to claim 1, wherein the inspection probe is an eddy current probe. 8. The inspection apparatus according to claim 1, wherein the inspection tool includes the inspection probe and at least one cleaning medium for cleaning the test object. 9. The machine tool has a turret head, the inspection tool being located on the turret head, and between the turret head and at least one fixed part of the machine tool. 2. At least one rotatable transmitter is provided.
Inspection device described in. 10. The machine tool has a turret head and the inspection tool is located on the turret head, and there is at least 1 between the turret head and at least one fixed portion of the machine tool. There are two contactless type rotatable transmitters, so that the transmission of the AC voltage is performed across the air gap by the AC electromagnetic field induced by the AC voltage, and the AC electromagnetic field induces the AC voltage. The inspection apparatus according to claim 1, wherein the inspection apparatus is formed. 11. At least one inspection probe movable relative to a test object to generate a physical quantity that varies significantly depending on the characteristics of the surface for inspecting irregularities near the surface of a workpiece, and A detector for changing the physical quantity according to relative movement between an inspection probe and the workpiece, and a device for supplying power to the probe and receiving a signal supplied from the probe. An inspection apparatus, wherein the probe is arranged on an inspection tool which can be locked at a position of the machine tool on the machine tool.