JPH07936Y2 - Acceleration sensor - Google Patents
Acceleration sensorInfo
- Publication number
- JPH07936Y2 JPH07936Y2 JP1988046088U JP4608888U JPH07936Y2 JP H07936 Y2 JPH07936 Y2 JP H07936Y2 JP 1988046088 U JP1988046088 U JP 1988046088U JP 4608888 U JP4608888 U JP 4608888U JP H07936 Y2 JPH07936 Y2 JP H07936Y2
- Authority
- JP
- Japan
- Prior art keywords
- acceleration sensor
- base member
- sensor element
- stainless steel
- element portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title claims description 42
- 229910001220 stainless steel Inorganic materials 0.000 claims description 15
- 239000010935 stainless steel Substances 0.000 claims description 15
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 7
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 5
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
【考案の詳細な説明】 ［産業上の利用分野］ 本考案は、ボルト締めランジュバン形振動子構造をなす
加速度センサに関し、更に詳しくは、加速度センサ素子
部をその中心軸上の一点のみにて取付け用ベース部材に
固定することにより温度特性を向上させた加速度センサ
に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to an acceleration sensor having a bolted Langevin type vibrator structure. More specifically, the acceleration sensor element part is attached at only one point on its central axis. The present invention relates to an acceleration sensor having improved temperature characteristics by being fixed to a vehicle base member.
［従来の技術］ 一般機械設備などでの振動検出用として加速度センサが
使用されている。従来技術では加速度センサは、第４図
に示すように、ボルト締めランジュバン形振動子構造を
なす加速度センサ素子部10の下面ほぼ全体に接着剤13を
塗布し、取付け用ベース部材12に接着することによって
組み立てていた。[Prior Art] An acceleration sensor is used for vibration detection in general mechanical equipment. In the prior art, as shown in FIG. 4, in the acceleration sensor, the adhesive 13 is applied to almost the entire lower surface of the acceleration sensor element portion 10 having the bolted Langevin type vibrator structure, and is adhered to the mounting base member 12. Was assembled by.
加速度センサ素子部10は２枚のPZT（チタン酸ジルコン
酸鉛）等からなる圧電体14a,14bを重ね、両面からステ
ンレス鋼ブロック16a,16bで挾み込み、それらの中心の
ボルト穴を利用して締付けボルト18で締め付けた構造を
なす。ステンレス鋼を使用するのは、その熱膨張係数が
PZT等の熱膨張係数とほぼ一致することと、所定の重量
を小体積で担わせることができるからである。取付け用
ベース部材12としては、一般にこの種の加速度センサが
取り付けられる測定対象20はアルミニウムからなるもの
が多く、それとの整合をとるためアルミニウム材が用い
られる。ベース部材12は測定対象20に取付けネジ22によ
り固定される。The acceleration sensor element part 10 is made by stacking two piezoelectric bodies 14a, 14b made of PZT (lead zirconate titanate), etc., and sandwiching them with stainless steel blocks 16a, 16b from both sides, and using the bolt holes at the center of them. The structure is tightened with the tightening bolts 18. The coefficient of thermal expansion of stainless steel is
This is because the coefficient of thermal expansion substantially matches that of PZT and the like, and a predetermined weight can be carried in a small volume. As the mounting base member 12, generally, the measurement target 20 to which this type of acceleration sensor is mounted is often made of aluminum, and an aluminum material is used to match it. The base member 12 is fixed to the measurement target 20 with a mounting screw 22.
［考案が解決しようとする課題］ このような構造の加速度センサは、使用する周波数範囲
からその共振点を外すことができるため周波数特性は向
上するが、温度特性上の問題が生じる。つまり温度特性
（温度変化に対する検出感度の変化）を測定すると温度
係数が大きく且つヒステリシスが生じる傾向があり、使
用の際に支障をきたす。[Problems to be Solved by the Invention] In the acceleration sensor having such a structure, its resonance point can be removed from the frequency range used, so that the frequency characteristic is improved, but there is a problem in temperature characteristic. That is, when the temperature characteristic (change in detection sensitivity with respect to temperature change) is measured, the temperature coefficient tends to be large and hysteresis tends to occur, which causes trouble in use.
本考案の目的は、上記のような従来技術の欠点を解消
し、温度特性上のヒステリシスを無くし且つ温度係数を
小さくでき、センサの検出出力への温度による影響を極
力減らすことができるような加速度センサを提供するこ
とにある。The object of the present invention is to eliminate the above-mentioned drawbacks of the prior art, eliminate hysteresis in temperature characteristics, reduce the temperature coefficient, and reduce the influence of temperature on the detection output of the sensor as much as possible. To provide a sensor.
［課題を解決するための手段］ 上記の目的を達成できる本考案は、ボルト締めランジュ
バン形振動子構造をなす加速度センサ素子部を、その中
心軸上の一点のみにて取付け用ベース部材に固定した加
速度センサである。[Means for Solving the Problems] In the present invention capable of achieving the above object, an acceleration sensor element portion having a bolted Langevin type vibrator structure is fixed to a mounting base member at only one point on its central axis. It is an acceleration sensor.
ここで「一点のみ」とは、純粋に数学的な意味での点を
いうのではなく、固定可能な強度を持ちうる範囲内で且
つ全接触面積に比して極めて小さな面積であるという意
味での点のことである。Here, "only one point" does not mean a point in a purely mathematical sense, but means that the area is within a range that can have a fixed strength and is extremely small compared to the total contact area. Is the point.
加速度センサ素子部は２枚重ね合わせたPZT等からなる
圧電体を両面からステンレス鋼ブロックで挾みボルト締
めした構造とし、アルミニウムからなる取付け用ベース
部材を貫通する組立てボルトで前記ステンレス鋼ブロッ
クの一方の中心のボルト穴に螺着する構成が望ましい。
その場合、加速度センサ素子部とベース部材との間に薄
い耐熱性硬質フィルムを介在させるとよい。The acceleration sensor element has a structure in which two piezoelectric bodies made of PZT, etc. are stacked and clamped with stainless steel blocks from both sides and bolted together. One of the stainless steel blocks is assembled with an assembly bolt that penetrates the mounting base member made of aluminum. It is desirable that the bolt is screwed into the center bolt hole.
In that case, a thin heat resistant hard film may be interposed between the acceleration sensor element portion and the base member.
［作用］ 圧電体を使用する加速度センサの検出原理は、加速度を
受けたとき発生する歪によって生じる電荷を検出するも
のである。[Operation] The principle of detection of the acceleration sensor using the piezoelectric body is to detect the electric charge generated by the strain generated when the acceleration is applied.
加速度センサ素子部と取付け用ベース部材とは機能的な
要求あるいは相手方部材との整合性をとるため異なる材
質とならざるを得ない。従来技術のように加速度センサ
素子部を構成するステンレス鋼と、ベース部材となるア
ルミニウムとが広い範囲にわたって接着されていると、
両者の熱膨張の差によって歪が生じ、そのため温度特性
が悪化してしまう。The acceleration sensor element portion and the mounting base member are inevitably made of different materials in order to meet the functional requirements or the matching with the counterpart member. As in the prior art, when the stainless steel forming the acceleration sensor element portion and the aluminum serving as the base member are bonded over a wide range,
Distortion occurs due to the difference in thermal expansion between the two, which deteriorates the temperature characteristics.
しかし本考案のように両者をその中心軸上の一点のみに
て固定すると、中心部のみでは固定されているが、周辺
部は密接しているものの相対的な径方向の変位（ずれ）
が許容されるため、周囲温度が変化し熱膨張係数の違い
により相対的な変位が生じたとき境界面で滑りが生じ過
渡の熱応力が生じることはない。そのため加速度センサ
素子部の圧電体に熱歪が加わり難いし、またベース部材
が変形することも少なくベース部材と測定対象との密着
度が変化し難く、それらの効果が相俟て温度特性が向上
することになる。However, if both are fixed at only one point on the central axis as in the present invention, only the central part is fixed, but the peripheral part is in close contact but the relative radial displacement (shift).
Therefore, when the ambient temperature changes and relative displacement occurs due to the difference in thermal expansion coefficient, slippage does not occur at the boundary surface and transient thermal stress does not occur. Therefore, it is difficult for thermal strain to be applied to the piezoelectric body of the acceleration sensor element, and because the base member is less likely to deform, the degree of adhesion between the base member and the measurement target does not change easily. Will be done.
特に加速度センサ素子部とベース部材との間にポリエス
テルフィルムのような耐熱性硬質フィルムを介在させる
と、加速度センサ素子部とベース部材との間の滑り性が
良好になり、両者の熱変形が自由に行われるため温度特
性は更に向上する。In particular, if a heat-resistant hard film such as a polyester film is interposed between the acceleration sensor element section and the base member, the slipperiness between the acceleration sensor element section and the base member will be good, and thermal deformation of both will be free. Therefore, the temperature characteristics are further improved.
［実施例］ 第１図は本考案に係る加速度センサの一実施例を示す分
解斜視図であり、第２図はその組み立て後の縦断面図で
ある。[Embodiment] FIG. 1 is an exploded perspective view showing an embodiment of an acceleration sensor according to the present invention, and FIG. 2 is a longitudinal sectional view after assembly thereof.
加速度センサ素子部10は、従来同様、ボルト締めランジ
ュバン形振動子構造となしている。つまり２枚のPZT等
からなる円板状の圧電体14a,14bを積層し、両面からス
テンレス鋼ブロック16a,16bで挾み、締付けボルト18で
締め付けた構造である。両圧電体14a,14bはそれぞれ両
面に電極が形成され、図示されていないが一方のステン
レス鋼ブロックと圧電体との間、及び圧電体同士の間に
薄い金属板を挾み込み、それにリード線が接続されて外
部に引き出される。ベース部材12はアルミニウムからな
り、中央にボルト挿通孔24が設けられると共に端部に取
付け穴26が形成されている。The acceleration sensor element unit 10 has a bolted Langevin type vibrator structure as in the conventional case. That is, it is a structure in which two disk-shaped piezoelectric bodies 14a and 14b made of PZT or the like are laminated, sandwiched from both sides by stainless steel blocks 16a and 16b, and tightened by tightening bolts 18. Electrodes are formed on both sides of both piezoelectric bodies 14a and 14b, and although not shown, a thin metal plate is sandwiched between one stainless steel block and the piezoelectric body and between the piezoelectric bodies, and lead wires Is connected and pulled out. The base member 12 is made of aluminum and has a bolt insertion hole 24 at the center and a mounting hole 26 at the end.
本考案が従来技術と顕著に相違する点は、加速度センサ
素子部10とベース部材12との結合構造である。本考案で
は加速度センサ素子部10はその中心軸上の一点のみで取
付け用ベース部材12に固定されている。The significant difference between the present invention and the prior art is the coupling structure of the acceleration sensor element portion 10 and the base member 12. In the present invention, the acceleration sensor element portion 10 is fixed to the mounting base member 12 at only one point on its central axis.
本実施例では、前記のようにベース部材12の中央にボル
ト挿通孔24が形成され、組立てボルト28を下方から挿通
し、加速度センサ素子部10の一方のステンレス鋼ブロッ
ク16bの中心ボルト穴に螺着することによって固定して
いる。In this embodiment, as described above, the bolt insertion hole 24 is formed in the center of the base member 12, the assembly bolt 28 is inserted from below, and the bolt is inserted into the center bolt hole of one of the stainless steel blocks 16b of the acceleration sensor element portion 10. It is fixed by wearing it.
加速度センサ素子部10とベース部材12とが接触する部分
は、一方はステンレス鋼であるのに対して他方はアルミ
ニウムであり材質が異なる。加速度センサ素子部10でス
テンレス鋼を用いるのは、前記のようにその熱膨張係数
が圧電体の熱膨張係数とほぼ等しく且つ所定の重量を担
わせ易いからである。またベース部材12をアルミニウム
としたのは、一般にこの種の加速度センサが取り付けら
れる部分（測定対象）は機器の筐体等でありアルミニウ
ムのダイカスト品が多いからである。The contact portion between the acceleration sensor element portion 10 and the base member 12 is made of stainless steel on one side and aluminum on the other side, and is made of different materials. The reason why the acceleration sensor element portion 10 is made of stainless steel is that the thermal expansion coefficient thereof is substantially equal to the thermal expansion coefficient of the piezoelectric body and it is easy to bear a predetermined weight as described above. Further, the reason why the base member 12 is made of aluminum is that the portion (measurement target) to which the acceleration sensor of this type is attached is generally the casing of the equipment and is often die cast from aluminum.
本考案では加速度センサ素子部10とベース部材12とが中
心の一点のみで固定されているため、周辺部は密接して
いるものの相対的にフリーとなり、周囲温度が変化して
熱膨張に差が生じても、相対的に滑るように変形でき熱
膨張の差を逃がすことができる。このため圧電体14a,14
bに熱歪が加わったり、ベース部材12が変形して測定対
象との密着度が変化する等といったトラブルが生じず、
検出感度の温度係数が小さくまたヒステリシスが生じな
くなる。In the present invention, since the acceleration sensor element part 10 and the base member 12 are fixed at only one point in the center, the peripheral part is closely contacted but relatively free, and the ambient temperature changes to cause a difference in thermal expansion. Even if it occurs, it can be relatively slidably deformed and the difference in thermal expansion can be released. Therefore, the piezoelectric bodies 14a, 14
Thermal strain is added to b, and trouble such as the degree of adhesion with the measurement target changing due to deformation of the base member 12 does not occur,
The temperature coefficient of detection sensitivity is small and hysteresis does not occur.
第３図は本考案の他の実施例を示す縦断面図である。こ
の実施例が前記第１図及び第２図に示す実施例と相達す
る点は、加速度センサ素子部10とベース部材12との間に
耐熱性硬質フィルム30を介在させた点である。このフィ
ルムの材質としては、例えばポリエステル等が好適であ
り、厚さは100μｍ程度の極く薄いものであってよい。
間にこのような耐熱性硬質フィルム30が介在すると、周
囲温度が変化しステンレス鋼ブロック16bとベース部材1
2との間で熱膨張の差が大きくなったときに、フィルム
面で滑り易くなり、温度特性はより一層改善される。FIG. 3 is a vertical sectional view showing another embodiment of the present invention. This embodiment is similar to the embodiment shown in FIGS. 1 and 2 in that the heat resistant hard film 30 is interposed between the acceleration sensor element portion 10 and the base member 12. Polyester or the like is suitable as the material of the film, and the film may have an extremely thin thickness of about 100 μm.
When such a heat-resistant hard film 30 is interposed between them, the ambient temperature changes and the stainless steel block 16b and the base member 1
When the difference in thermal expansion between No. 2 and 2 becomes large, the film surface becomes slippery and the temperature characteristics are further improved.
以上本考案の好ましい実施例について詳述したが、本考
案はこのような構成のみに限定されるものではない。上
記の各実施例では何れも組立てボルト28により加速度セ
ンサ素子部10とベース部材12とを固定している。このよ
うな構造は後で分解できる点で好ましいが、それ以外の
構成でもよい。例えば加速度センサ素子部の下側のステ
ンレス鋼ブロックを下面中央に突起を持つ形状とし、そ
の突起に合わせた穴をベース部材側に形成して、その突
起を穴に圧入して固定したり、あるいは突起と穴との嵌
合部を接着又は溶接することによって中央部一点のみに
て固定するような構造としてもよい。The preferred embodiment of the present invention has been described in detail above, but the present invention is not limited to such a configuration. In each of the above-described embodiments, the acceleration sensor element portion 10 and the base member 12 are fixed by the assembly bolt 28. Such a structure is preferable because it can be decomposed later, but other structures may be used. For example, a stainless steel block on the lower side of the acceleration sensor element part is shaped to have a protrusion in the center of the lower surface, a hole matching the protrusion is formed on the base member side, and the protrusion is press-fit into the hole to be fixed, or A structure may be adopted in which the fitting portion between the projection and the hole is fixed at only one point in the central portion by adhering or welding.
［考案の効果］ 本考案は上記のように加速度センサ素子部をその中心軸
上の一点のみにて取付け用ベース部材に固定したから、
温度特性上での検出感度の温度係数が極めて小さくなり
又ヒステリシスが発生することもなくなり、センサの検
出出力への温度による影響が低減し何ら支障なく使用す
ることが可能となる。[Advantage of the Invention] Since the present invention fixes the acceleration sensor element portion to the mounting base member at only one point on the central axis as described above,
The temperature coefficient of the detection sensitivity in the temperature characteristics becomes extremely small, and the hysteresis does not occur. The influence of the temperature on the detection output of the sensor is reduced, and the sensor can be used without any trouble.
特に加速度センサ素子部とベース部材との間に耐熱性硬
質フィルムを介在させると、より優れた温度特性が得ら
れる。In particular, if a heat resistant hard film is interposed between the acceleration sensor element portion and the base member, more excellent temperature characteristics can be obtained.
第１図は本考案に係る加速度センサの一実施例を示す分
解斜視図、第２図はその組み立て後の縦断面図、第３図
は本考案の他の実施例を示す縦断面図である。 また第４図は従来技術の一例を示す縦断面図である。 10……加速度センサ素子部、12……ベース部材、14a,14
b……圧電体、16a,16b……ステンレス鋼ブロック、18…
…締付けボルト、24……ボルト挿通孔、26……取付け
穴、28……組立てボルト、30……耐熱性硬質フィルム。FIG. 1 is an exploded perspective view showing an embodiment of an acceleration sensor according to the present invention, FIG. 2 is a vertical sectional view after assembly thereof, and FIG. 3 is a vertical sectional view showing another embodiment of the present invention. . FIG. 4 is a vertical sectional view showing an example of the prior art. 10 ... Acceleration sensor element part, 12 ... Base member, 14a, 14
b ... Piezoelectric material, 16a, 16b ... Stainless steel block, 18 ...
… Tightening bolts, 24… Bolt insertion holes, 26… Mounting holes, 28… Assembly bolts, 30… Heat resistant hard film.
Claims (2)
す加速度センサ素子部を、その中心軸上の一点のみで取
付け用ベース部材に固定したものであって、 加速度センサ素子部は、２枚重ねた圧電体を両面からス
テンレス鋼ブロックで挾み、それらの中心穴を通してボ
ルトで締め付けた構造をなし、 取付け用ベース部材は、アルミニウムからなり、該ベー
ス部材を貫通する組立てボルトによって前記ステンレス
鋼ブロックの一方の中心穴に螺着されている 加速度センサ。1. An acceleration sensor element having a bolted Langevin type oscillator structure is fixed to a mounting base member at only one point on its central axis, and two acceleration sensor elements are stacked. The piezoelectric body is sandwiched by stainless steel blocks from both sides, and the structure is such that bolts are tightened through their center holes. The mounting base member is made of aluminum, and one of the stainless steel blocks is assembled by an assembly bolt penetrating the base member. An acceleration sensor that is screwed into the center hole of the.
耐熱性硬質フィルムを介在させた請求項１記載の加速度
センサ。2. The acceleration sensor according to claim 1, wherein a heat resistant hard film is interposed between the acceleration sensor element portion and the base member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988046088U JPH07936Y2 (en) | 1988-04-04 | 1988-04-04 | Acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988046088U JPH07936Y2 (en) | 1988-04-04 | 1988-04-04 | Acceleration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01148865U JPH01148865U (en) | 1989-10-16 |
| JPH07936Y2 true JPH07936Y2 (en) | 1995-01-11 |
Family
ID=31272372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988046088U Expired - Lifetime JPH07936Y2 (en) | 1988-04-04 | 1988-04-04 | Acceleration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07936Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6365824B2 (en) * | 2014-05-27 | 2018-08-01 | 村田機械株式会社 | Magnetic displacement sensor and displacement detection method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5014541U (en) * | 1973-06-04 | 1975-02-15 | ||
| JPS58162058U (en) * | 1982-04-22 | 1983-10-28 | 三菱電機株式会社 | acceleration detector |
| JPS60111273U (en) * | 1983-12-28 | 1985-07-27 | 三菱電機株式会社 | acceleration detector |
-
1988
- 1988-04-04 JP JP1988046088U patent/JPH07936Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01148865U (en) | 1989-10-16 |
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