JPH079403Y2 - Ion laser tube - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a gas laser tube, and more specifically, to an ion laser tube using a gas such as argon or krypton that emits a high output laser output by a large current. Regarding the structure.

[Prior Art] As is well known, an ion laser that oscillates by energy transition of an ionized gas such as argon or krypton needs to have a high ion density in order to achieve a high output. It is necessary to pass a large current exceeding 10 amps. There are various restrictions on the material and structure of the thin tube that can withstand such a large current in terms of heat resistance and thermal radiation.

The structure of a conventional gas laser tube will be described with reference to FIG. 2 which is a sectional view in the tube axis direction. The ion laser tube includes a vacuum envelope 1 forming an outer periphery, an anode 2 and a cathode 3 located substantially at both ends inside the vacuum envelope 1, and a laser thin tube located between the anode 2 and the cathode 3. Mainly composed of 5 and 5.

The vacuum envelope 1 has a hollow pipe 4 and a disk 6 having a through hole 5 for a laser thin tube in the center thereof airtightly joined together by using a low melting point sealing glass, and the hollow pipes 4 are joined and arranged on both sides thereof. Composed. Around the central through hole of the disk 6, a plurality of through holes 7 for gas return paths are provided.

Further, sealing plates 8 and 9 are provided at both ends of the envelope 1, and metal cylindrical members 10 and 11 are provided on the sealing plates 8 and 9 so as to project outward. A Brewster window 12 made of, for example, quartz is hermetically sealed to the ends of the cylindrical members 10 and 11 with a certain inclination with respect to the tube axis. Further, the sealing plate 8 is airtightly provided with an exhaust pipe 13 for exhausting and filling the gas inside the laser tube. A cathode introducing rod 14 made of metal is taken out from the cathode 3.

The anode 2 has a through hole in the center, is closely fitted in the hollow pipe 4, and holds the anode introducing rods 15 and 16 at different positions. A disk 17 is provided.

In the ion laser tube having such a structure, a plasma is generated inside the laser tube by a DC voltage applied between the anode 2 and the cathode 3, and a laser action is brought about.

At this time, the anode 2 tightly fits tightly into the hollow pipe 4 and does not move in the tube axis direction. Therefore, the damage of the laser tube is prevented by using the stress absorption disk 17 for absorbing the stress due to the difference in thermal expansion between the hollow pipe 4 and the anode introduction rods 15, 16.

[Problems to be solved by the invention]

In the above-described anode structure of the conventional ion laser tube, as shown in FIG. 2, since the anode introducing rods 15 and 16 and the stress absorbing disk 17 are joined by brazing, the plasma due to the discharge penetrates the anode 2. As a result, there is a disadvantage that the anode introducing rod and the brazed portion that is particularly susceptible to sputtering are sputtered around. Due to the spattering of the introducing rod and the brazing material, an abnormal discharge occurs, the output becomes unstable, and the discharge cannot be maintained at last.

Therefore, an object of the present invention is to solve the above problems and provide an ion laser tube capable of preventing the sputtering of the anode introducing rod portion.

In contrast to the conventional ion laser tube described above, in the ion laser tube of the present invention, since the tip of the anode reaches the outside of the joint between the anode introducing rod and the stress absorption disk, the sputtering of the anode introducing rod portion is prevented. It has an original content that can be prevented.

[Means for solving problems]

The ion laser tube of the present invention has a brazed portion as shown in FIG. 1 in order to prevent discharge plasma from hitting the brazed portion of the joint between the anode introduction rod and the stress absorption disk and the anode introduction rod. It has an anode shape in which the tip of the anode reaches the outside of the portion.

With such an anode structure, plasma penetrating the anode can be used as an anode introduction rod or an anode introduction rod.
An ion laser tube with stable discharge and stable output is provided to prevent the spattering of brazing material by preventing it from hitting the brazed part where spattering is particularly likely to occur at the joint between 16 and the stress absorbing disk 17. .

〔Example〕

Hereinafter, an embodiment of the present invention will be described in detail with reference to the attached FIG.

FIG. 1 is a schematic sectional view of the ion laser tube according to the present invention in the tube axis direction.

The ion laser tube includes a vacuum envelope 1 forming an outer circumference, an anode 2 and a cathode 3 provided so as to face substantially both ends of the vacuum envelope 1, an anode 2 and a cathode 3.
It is mainly composed of a laser thin tube 5 located between.

The vacuum envelope 1 is composed of a hollow pipe 4 and a disk 6 having a through hole 5 for a laser thin tube in the center. Further, the hollow pipe 4 is arranged at both ends of the vacuum envelope 1 to form a disk 6.
The hollow pipe 4 and the hollow pipe 4 are hermetically connected to each other by using a low melting point sealing glass.

Further, the disk 6 is provided with a plurality of through holes 7 for gas return paths around the laser thin tube 5.

Sealing plates 8 and 9 are provided at both ends of the envelope 1,
Cylindrical members 10 and 11 made of metal project from the sealing plates 8 and 9 in the direction opposite to the laser thin tube 5.

At the ends of the cylindrical members 10 and 11 are, for example, quartz Brewster windows.
12 is hermetically sealed with a certain inclination to the tube axis. The sealing plate 9 is airtightly provided with an exhaust pipe 13 for exhausting the inside of the laser tube to fill the gas. Cathode 3
From, the cathode introducing rod 14 made of metal is taken out to the outside through the sealing plate 8.

The stress absorbing disk 17 is brazed to the anode 2, and the anode introducing rod 16 brazed to the stress absorbing disk 17 is taken out to the outside via the sealing plate 9.

The tip of the anode 2 has a stress absorbing disk 17 and an anode introducing rod 16
Because it protrudes longer than the brazed part of and,
It is possible to prevent the discharge plasma from wrapping around the outside of the anode 2 and to prevent the plasma from hitting the anode introducing rod or the brazed portion, thereby preventing the introducing rod and the brazing material from being sputtered and stabilizing the discharge.

The anode 2 is in close contact with the inner surface of the hollow pipe 4, and the heat generated in the anode 2 is transferred to the hollow pipe 4 and cooled by water cooling the outer circumference of the laser tube.

[Effect of device]

As described above, the ion laser tube of the present invention has an anode shape in which the tip of the anode reaches the outside of the joint between the anode introducing rod and the stress absorption disk, so that It is possible to prevent the plasma of discharge from hitting the joint, to prevent the spattering of the introducing rod and the brazing material, to stabilize the discharge, and to prevent the output from becoming unstable. The reliability of can be improved.

[Brief description of drawings]

FIG. 1 is a sectional view in the tube axis direction showing an embodiment of the ion laser tube of the present invention, and FIG. 2 is a sectional view in the tube axis direction of a conventional ion laser tube. (Main reference numbers) 1 ... Vacuum envelope, 2 ... Anode, 3 ... Cathode,
4 ... Hollow pipe, 5 ... Electrical passage for laser thin tube, 6 ...
Disk, 7 ... Gas return passage through hole, 8, 9 ... Sealing plate, 10, 11 ... Cylindrical member, 12 ... Brewster window, 13 ...
Exhaust pipe, 14 …… Cathode introduction rod, 15,16 …… Anode introduction rod, 17 …… Stress absorption disk.

Claims (1)

[Scope of utility model registration request] 1. An ion laser tube comprising a vacuum envelope, an anode and a cathode provided to face substantially both ends of the envelope, and a laser thin tube arranged between the anode and the cathode. Then, in an ion laser tube having a stress absorbing member between the anode and the anode introduction rod,
An ion laser tube, wherein a tip of the anode reaches an outer side in a tube axis direction with respect to a joint portion between the anode introducing rod and the stress absorbing member.