JPH0796473B2 - Oxidation resistance treatment method for carbon fiber reinforced carbon material - Google Patents
Oxidation resistance treatment method for carbon fiber reinforced carbon materialInfo
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- JPH0796473B2 JPH0796473B2 JP2150640A JP15064090A JPH0796473B2 JP H0796473 B2 JPH0796473 B2 JP H0796473B2 JP 2150640 A JP2150640 A JP 2150640A JP 15064090 A JP15064090 A JP 15064090A JP H0796473 B2 JPH0796473 B2 JP H0796473B2
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、高温酸化雰囲気下において優れた酸化抵抗性
を付与することができる炭素繊維強化炭素材(以下「C/
C材」という。)の耐酸化処理法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a carbon fiber reinforced carbon material (hereinafter referred to as “C / C”) capable of imparting excellent oxidation resistance in a high temperature oxidizing atmosphere.
It is called "C material". ) Related to the oxidation resistance treatment method.
C/C材は、卓越した比強度、比弾性率を有するうえに優
れた耐熱性、耐食性を備えるため、航空宇宙用をはじめ
多分野の構造材料として脚光を浴びている。C / C materials have excellent specific strength and specific elastic modulus, and also have excellent heat resistance and corrosion resistance, and are therefore in the spotlight as structural materials for various fields including aerospace applications.
該C/C材は、通常、炭素繊維の織布、フエルト、トウな
どを強化材とし、これに炭化残留率の高いマトリックス
樹脂液を含浸または塗布して積層成形したのち、硬化お
よび焼成炭化処理することにより製造されるが、この材
料は易酸化性という炭素材固有の材質的な欠点をそのま
ま引き継いでおり、これが汎用性を阻害する最大のネッ
クになっている。このため、C/C材の表面に耐酸化性の
被覆を施して改質化する試みが従来からなされており、
例えばZrO2、Al2O3、SiCなどのセラミックス系物質によ
り被覆処理する方法が提案されている。しかし、SiC以
外の被覆層では使用時における熱サイクルで被覆界面に
層間剥離や亀裂を生じ、酸化の進行を充分に阻止する機
能が発揮されない。The C / C material is generally made of carbon fiber woven fabric, felt, tow, etc. as a reinforcing material, and is impregnated or coated with a matrix resin liquid having a high carbonization residual rate, and then laminated and molded, followed by curing and firing carbonization treatment. However, this material inherits the material defect inherent to carbon materials such as oxidizability as it is, and this is the biggest bottleneck to impede versatility. For this reason, it has been attempted to modify the surface of the C / C material by applying an oxidation resistant coating,
For example, a method of coating with a ceramic material such as ZrO 2 , Al 2 O 3 and SiC has been proposed. However, a coating layer other than SiC does not exhibit the function of sufficiently preventing the progress of oxidation due to delamination or cracking at the coating interface due to the thermal cycle during use.
SiCの被覆層においても、被膜形成の方法によって層間
剥離が多く発生する場合がある。すなわち、C/C基材の
表面にSiCの被覆を施す方法としては、基材の炭素を反
応源に利用してSiCに転化させるコンバージョン法と、
気相反応により析出したSiCを直接沈着させるCVD(化学
的気相蒸着)法とがある。このうち前者の方法は基材面
に例えばSiCl4のようなハロゲン化珪素化合物の水素還
元によりSi層を形成したり、基材にポリカルボシランな
どの有機珪素化合物を溶融状態で強制含浸したり、もし
くは基材面にSiO2とSi、C等を反応させて生成したSiO
ガスを接触させ、これらの珪素成分と基材の炭素組織と
加熱反応させてSiCに転化させる機構によるもので、基
材表面が連続組成としてSiC層を形成する傾斜機能材料
となるため被覆界面がなく、層間剥離が生じ難い被膜特
性を示す。一方、後者のCVD法はSiCl4などの珪素化合物
と炭化水素類(例えばC3H8)との加熱反応、あるいはト
リクロロメチルシラン(CH3SiCl3)のような炭化水素を
含むハロゲン化有機化合物の還元熱分解などにより気相
析出したSiCを基材表面に析出沈着させるもので、この
場合には被覆界面が明確に分れているため熱衝撃を与え
ると相互の熱膨張差によって層間剥離現象が多発し易
い。Even in the SiC coating layer, delamination often occurs depending on the method of film formation. That is, as a method for coating the surface of the C / C substrate with SiC, a conversion method in which carbon of the substrate is used as a reaction source to be converted into SiC,
There is a CVD (Chemical Vapor Deposition) method in which SiC deposited by a vapor phase reaction is directly deposited. Of these, the former method forms a Si layer on the surface of the substrate by hydrogen reduction of a silicon halide compound such as SiCl 4 , or forcibly impregnates the substrate with an organosilicon compound such as polycarbosilane in a molten state. , Or SiO produced by reacting SiO 2 , Si, C, etc. on the surface of the substrate
This is due to the mechanism in which gas is brought into contact with these silicon components and the carbon structure of the base material is heated and reacted to be converted into SiC. Since the base material surface becomes a functionally gradient material that forms a SiC layer as a continuous composition, the coating interface is In other words, it exhibits coating characteristics in which delamination hardly occurs. On the other hand, the latter CVD method is a heating reaction between a silicon compound such as SiCl 4 and a hydrocarbon (for example, C 3 H 8 ) or a halogenated organic compound containing a hydrocarbon such as trichloromethylsilane (CH 3 SiCl 3 ). This method deposits and deposits SiC vapor-deposited by reductive thermal decomposition on the surface of the substrate. In this case, the coating interface is clearly separated. Is easy to occur.
したがって、C/C材にSiC被覆による耐酸化被膜を形成す
る方法としてはコンバージョン法、とりわけ緻密質なSi
C層に転化するSiOガスを接触させる方法を適用すること
が望ましい。Therefore, the conversion method, especially the dense Si
It is desirable to apply the method of contacting the converted SiO gas with the C layer.
ところが、コンバージョン法においては被覆工程の反応
段階で加熱されたC/C基材の組織面からSiO中の酸素と結
合した炭素成分がCOとなってガス離脱する現象が起り、
これが原因でSiC粒子間に微小な空隙(ピンホール)が
形成される事態が発生する。また、コンバージョン法に
よるSiC被膜であっても、層厚その他の条件によっては
反応時に微小なクラックを生じることがあり、前記の微
小空隙と併せて耐酸化性を減退される要因となる。However, in the conversion method, the carbon component bonded to oxygen in SiO from the textured surface of the C / C substrate heated in the reaction step of the coating process becomes CO and gas is released,
Due to this, minute voids (pinholes) are formed between the SiC particles. Even in the case of the SiC film formed by the conversion method, minute cracks may occur during the reaction depending on the layer thickness and other conditions, and this causes a decrease in the oxidation resistance together with the minute voids.
このような微小な空隙、クラック等をなくす手段とし
て、SiC被覆面に更にCVD法によるSiCの被膜を形成する
ことが考えられるが、通常のCVD法により析出する結晶
質のSiCは生成粒子が大きいため前記した微小な空隙、
クラックなどの内部に円滑に充填されず、充分な補填効
果は得られない。As a means to eliminate such minute voids, cracks, etc., it is possible to further form a SiC film by the CVD method on the SiC coated surface, but crystalline SiC precipitated by the ordinary CVD method has large generated particles. Because of the minute void,
The inside of cracks is not filled smoothly and a sufficient filling effect cannot be obtained.
本発明者は上記のような問題の解決を図るため先にC/C
基材面にSiO接触によるコンバージョン法で第1のSiC被
膜を形成し、さらにその表面をアモルファスSiCが析出
するような条件でCVD法による第2のSiC被膜層を形成す
ることにより微小な空隙、クラック等を封止するC/C材
の耐酸化処理法を開発提案した(特願平2−114872
号)。The present inventor has previously used C / C to solve the above problems.
The first SiC film is formed on the surface of the substrate by the conversion method by contacting with SiO, and then the second SiC film layer is formed by the CVD method under the condition that amorphous SiC is deposited on the surface of the first SiC film. We have developed and proposed an oxidation resistance treatment method for C / C materials that seals cracks, etc. (Japanese Patent Application No. 2-114872).
issue).
しかし、この方法による場合にはCVD反応が拡散律速と
なるため生成SiCは基材表面における拡散行程の短かい
部位に先行して析出し、クラック内部のような拡散行程
の長い部位への析出は緩慢になる現象が生じる。この結
果、クラック内部に対するアモルファスSiCの充填が不
完全になるという改良の余地が残されていた。However, in the case of this method, the CVD reaction becomes diffusion-controlled, so that the generated SiC deposits prior to the site with a short diffusion path on the surface of the substrate, and does not deposit on the site with a long diffusion path such as inside a crack. The phenomenon of becoming slow occurs. As a result, there is room for improvement in that the filling of the amorphous SiC into the cracks becomes incomplete.
本発明の目的は、前記先願発明の改良を図ることにより
アモルファス質または微細多結晶質SiCを微小な空隙、
クラック等に確実に充填し、よって高温酸化雰囲気にお
いて一層優れた酸化抵抗性を付与することができるC/C
材の耐酸化処理法を提供するところにある。The object of the present invention is to improve the above-mentioned prior invention by making amorphous or fine polycrystalline SiC minute voids,
C / C that reliably fills cracks, etc., and can therefore provide even better oxidation resistance in a high temperature oxidizing atmosphere
The present invention is to provide a method of oxidation-proofing the material.
上記の目的を達成するための本発明によるC/C材の耐酸
化処理法は、炭素繊維をマトリックス樹脂とともに複合
成形し硬化および焼成炭化処理して得られる炭素繊維強
化炭素体を基材とし、前記基材の表面にSiOガスを接触
させてコンバージョン法により第1のSiC被膜層を形成
する第1被覆工程と、ついで基材を減圧系内に保持し90
0〜1100℃の温度範囲に加熱しながらハロゲン化有機珪
素化合物を間欠的に充填して還元熱分解反応させるパル
スCVI法によりアモルファス質または微細多結晶質のSiC
を第1のSiCの被膜層の表面に析出沈着して第2のSiC被
膜層を形成する第2被覆工程を順次に施すことを構成上
の特徴とする。Oxidation resistance treatment method of the C / C material according to the present invention to achieve the above objects, a carbon fiber reinforced carbon body obtained by complex molding carbon fiber with matrix resin, curing and firing carbonization, as a base material, A first coating step in which SiO gas is brought into contact with the surface of the base material to form a first SiC coating layer by a conversion method, and then the base material is held in a reduced pressure system.
Amorphous or fine polycrystalline SiC by pulse CVI method in which halogenated organosilicon compounds are intermittently charged while being heated in the temperature range of 0 to 1100 ℃ to carry out reductive thermal decomposition reaction.
Is characterized in that the second coating step of depositing and depositing on the surface of the first SiC coating layer to form the second SiC coating layer is sequentially performed.
強化材となる炭素繊維には、ポリアクリロニトリル系、
レーヨン系、ピッチ系など各種原料から製造された平
織、綾織などの織布、フエルト、トウが使用され、マト
リックス樹脂としてはフェノール系、フラン系その他炭
化性の良好な液状熱硬化性樹脂が用いられる。炭素繊維
は、浸漬、含浸、塗布などの手段を用いてマトリックス
樹脂で十分に濡らしたのち半硬化してプリプレグを形成
し、ついで積層加圧成形する。成形体は加熱して樹脂成
分を完全に硬化し、引き続き常法に従って焼成炭化処理
または更に黒鉛化してC/C基材を得る。Carbon fiber, which is a reinforcing material, includes polyacrylonitrile-based,
Woven fabric such as plain weave and twill weave manufactured from various raw materials such as rayon type and pitch type, felt and tow are used, and as the matrix resin, phenol type, furan type and other liquid thermosetting resin with good carbonization property are used. . The carbon fiber is sufficiently wetted with the matrix resin by means of dipping, impregnation, coating or the like, and then semi-cured to form a prepreg, and then laminated and pressure-molded. The molded body is heated to completely cure the resin component, and subsequently subjected to firing carbonization treatment or further graphitization according to a conventional method to obtain a C / C base material.
得られたC/C基材は、必要に応じてマトリックス樹脂を
含浸、硬化、炭化する処理を反復して組織の緻密化を図
ることもある。The obtained C / C base material may be subjected to a treatment of impregnating with a matrix resin, curing, and carbonization, if necessary, to densify the structure.
このようにして得られたC/C基材には、コンバージョン
法により第1のSiC被膜層を形成するための第1被覆工
程が施される。該第1被覆工程は、SiO2粉末をSiもしく
はC粉末と混合して密閉加熱系に収縮し、系内にC/C基
材をセットして加熱することによっておこなわれる。加
熱によりSiO2がSiまたはC成分で還元され、反応生成し
たSiOガスがC/C基材を構成する炭素組織と反応して表層
部をSiCに転化する。The C / C substrate thus obtained is subjected to the first coating step for forming the first SiC coating layer by the conversion method. The first coating step is performed by mixing SiO 2 powder with Si or C powder, shrinking the mixture into a closed heating system, setting a C / C substrate in the system and heating. By heating, SiO 2 is reduced by Si or C component, and the SiO gas generated by the reaction reacts with the carbon structure of the C / C base material to convert the surface layer portion into SiC.
この際、前記成分の反応により生成するSiOガスの濃
度、反応温度、反応時間等を制御することによって基材
のC層と被覆層のSiCが界面で連続に変化する傾斜機能
を備える組織状態が形成される。最も好ましい条件は、
SiO2:SiまたはCのモル比を2:1とし、加熱温度を1850〜
2000℃の範囲に設定することである。At this time, by controlling the concentration of SiO gas generated by the reaction of the components, the reaction temperature, the reaction time, etc., a tissue state having a gradient function in which the C layer of the base material and the SiC of the coating layer continuously change at the interface It is formed. The most preferable conditions are
The molar ratio of SiO 2 : Si or C is 2: 1 and the heating temperature is 1850-
It is to set in the range of 2000 ℃.
ついで、第1のSiC被膜層が形成されたC/C基材の表面に
パルスCVI法による第2のSiC被膜層を析出沈着するため
の第2被覆工程が施される。Then, a second coating step for depositing and depositing a second SiC coating layer by the pulse CVI method is performed on the surface of the C / C substrate on which the first SiC coating layer is formed.
第2被覆工程で使用されるハロゲン化有機珪素化合物と
しては、トリクロロメチルシラン(CH3SiCl3)、トリク
ロロフェニルシラン(C6H5SiCl3)、ジクロロメチルシ
ラン(CH3SiHCl2)、ジクロロジメチルシラン((CH3)
2SiCl2)、クロロトリメチルシラン((CH3)3SiCl)等
を挙げることができる。本発明のパルスCVI法は、これ
らのハロゲン化有機珪素化合物をH2ガスに同伴させなが
ら石英反応室にセットされ加熱されたC/C基材にガス状
態で接触させる操作を短周期で間欠的に反復する方法に
よっておこなわれる。この工程においては、反応室系内
を減圧状態に保ち、C/C基材の加熱温度を900〜1100℃の
範囲に調整した条件でパルスCVIをおこなうことが重要
な要件になる。この範囲を外れる条件では緻密でアモル
ファス質または微細多結晶質の微細なSiCを第1被覆層
の微小な空隙、クラック等の内部に確実に浸透充填する
ことができず、高度の不透過性を備える第2のSiC被覆
層を形成することが困難となる。最も好ましい第2被覆
工程の条件は、反応系をトリクロロメチルシラン(CH3S
iCl3)と水素ガスのモル比が1:20〜100の範囲になるよ
うに混合し、反応室内を10-1Torr以下の減圧にした状態
で秒間隔で間欠的な導入・停止を繰り返すことである。Examples of the halogenated organosilicon compound used in the second coating step include trichloromethylsilane (CH 3 SiCl 3 ), trichlorophenylsilane (C 6 H 5 SiCl 3 ), dichloromethylsilane (CH 3 SiHCl 2 ), dichlorodimethyl. Silane ((CH 3 )
2 SiCl 2 ) and chlorotrimethylsilane ((CH 3 ) 3 SiCl). In the pulse CVI method of the present invention, the operation of bringing these halogenated organosilicon compounds into contact with a heated C / C substrate set in a quartz reaction chamber in a gas state while entraining it in H 2 gas is intermittent in a short cycle. It is performed by repeating the method. In this step, it is an important requirement to carry out the pulse CVI under the condition that the inside of the reaction chamber system is kept under reduced pressure and the heating temperature of the C / C substrate is adjusted in the range of 900 to 1100 ° C. Under conditions out of this range, it is not possible to reliably infiltrate dense, amorphous or fine polycrystalline fine SiC into the minute voids, cracks, etc. of the first coating layer, resulting in high impermeability. It becomes difficult to form the second SiC coating layer provided. The most preferable condition of the second coating step is that the reaction system is trichloromethylsilane (CH 3 S
iCl 3 ) and hydrogen gas are mixed so that the molar ratio is in the range of 1:20 to 100, and intermittent introduction / stopping is repeated at intervals of a second under a reduced pressure of 10 -1 Torr or less in the reaction chamber. Is.
該第2被覆工程を施すことにより、第1のSiC被膜層の
表面は第2のアモルファス質または微細多結晶質SiC被
膜を介してピンホールのない一体の被覆層として形成さ
れる。By performing the second coating step, the surface of the first SiC coating layer is formed as an integral coating layer without pinholes via the second amorphous or fine polycrystalline SiC coating.
本発明によれば、まず第1被覆工程のSiO接触機構によ
るコンバージョン法でC/C基材の表面層を緻密で強固な
傾斜機能を備える第1のSiC被覆層に転化し、引き続く
第2被覆工程のパルスCVI法による微細なアモルファス
質または微細多結晶質SiCの浸透析出作用を介して第1
被覆層の微小な空隙(ピンホール)やクラック等は確実
に充填封止されるとともに、全表面が緻密な第2のSiC
被覆層で一体強固に被覆される。According to the present invention, the surface layer of the C / C substrate is first converted into the first SiC coating layer having a dense and strong gradient function by the conversion method using the SiO contact mechanism in the first coating step, and the subsequent second coating is performed. Through permeation precipitation of fine amorphous or fine polycrystalline SiC by pulse CVI method
Small voids (pinholes) and cracks in the coating layer are reliably filled and sealed, and the entire surface of the second SiC is dense.
It is integrally and firmly coated with the coating layer.
このような2段被覆工程の作用によってC/C基材の全表
面にガス不透過性の高耐酸化性被膜が形成される。Due to the action of the two-step coating process, a gas impermeable and highly oxidation resistant coating is formed on the entire surface of the C / C substrate.
以下、本発明の実施例を比較例と対比して説明する。 Hereinafter, examples of the present invention will be described in comparison with comparative examples.
実施例1〜2 (1)C/C基材の作製 ポリアクリロニトリル系高弾性タイプの平織炭素繊維布
をフェノール樹脂初期縮合物からなるマトリックス樹脂
液に浸漬して含浸処理した。これを14枚積層してモール
ドに入れ、加熱温度110℃、適用圧力20kg/cm2の条件で
複合成形した。Examples 1 to 2 (1) Preparation of C / C base material A polyacrylonitrile-based high-elasticity type plain woven carbon fiber cloth was immersed in a matrix resin solution containing a phenol resin initial condensation product for impregnation treatment. Fourteen of these were laminated and placed in a mold, and composite molding was performed under the conditions of a heating temperature of 110 ° C. and an applied pressure of 20 kg / cm 2 .
成形物を250℃の温度に加熱して完全に硬化したのち、
窒素雰囲気に保持された焼成炉に移し、5℃/hrの昇温
速度で1000℃まで上昇し5時間保持して焼成炭化した。After heating the molded product to a temperature of 250 ° C to completely cure it,
It was transferred to a firing furnace maintained in a nitrogen atmosphere, heated to 1000 ° C. at a temperature rising rate of 5 ° C./hr, and held for 5 hours for firing and carbonization.
得られたC/C材にフェノール樹脂液を真空加圧下に含浸
し、上記と同様に1000℃焼成する処理を3回反復して緻
密組織のC/C基材を作製した。The obtained C / C material was impregnated with a phenol resin solution under vacuum pressure, and the treatment of baking at 1000 ° C. was repeated three times in the same manner as above to prepare a C / C base material having a dense structure.
(2)第1被覆工程 SiO2粉末とSi粉末をモル比2:1の配合比率となるように
混合し、混合粉末を黒鉛製ルツボに入れ上部にC/C基材
をセットして黒鉛蓋を被せた。(2) First coating step SiO 2 powder and Si powder are mixed at a mixing ratio of 2: 1 and the mixed powder is put in a graphite crucible and a C / C base material is set on the upper part of the graphite lid. Covered.
ついで、黒鉛ルツボを電気炉に移し、ルツボの内部をAr
ガスで十分に置換したのち50℃/hrの速度で1850℃まで
昇温させ、この温度に2時間保持して反応させ、C/C材
の表層部を傾斜機能を有する第1のSiC被覆層に転化さ
せた。Next, the graphite crucible was transferred to an electric furnace, and the inside of the crucible was replaced with Ar.
After sufficiently substituting with a gas, the temperature is raised to 1850 ° C at a rate of 50 ° C / hr, and the temperature is maintained for 2 hours for reaction to cause the surface layer of the C / C material to have a first SiC coating layer having a gradient function. Converted to.
形成されたSiC被覆層の厚さは約200μmであったが、そ
の表面には幅10μm程度のクラックが所々に発生してい
ることが認められた。The thickness of the formed SiC coating layer was about 200 μm, but it was confirmed that cracks with a width of about 10 μm were generated in places on the surface.
(3)第2被覆工程 第1被覆工程で第1のSiC被覆層を形成したC/C基材をパ
ルスCVI装置の石英反応管(容量500ml)にセットし、管
内をArガスで十分に置換したのち高周波誘導加熱により
C/C基材の温度を上昇した(950℃、1100℃)。(3) Second coating step The C / C substrate on which the first SiC coating layer was formed in the first coating step was set in the quartz reaction tube (capacity 500 ml) of the pulse CVI device, and the inside of the tube was sufficiently replaced with Ar gas. After that, by high frequency induction heating
Raised the temperature of C / C substrate (950 ℃, 1100 ℃).
引き続き、反応管内を1.5秒で10-1Torrに減圧し、直ち
にトリクロロメチルシラン(CH3SiCl3)とH2からなる混
合反応ガス(モル比1:20)を1秒間で40Torrの管内圧力
になるように導入し1秒間保持した。この管内減圧、反
応ガス導入および保持の操作を5000回に亘たり反復して
パルスCVI法により第2のSiC被覆層を形成した。Subsequently, the pressure inside the reaction tube was reduced to 10 -1 Torr in 1.5 seconds, and immediately the mixed reaction gas consisting of trichloromethylsilane (CH 3 SiCl 3 ) and H 2 (molar ratio 1:20) was brought to a pressure of 40 Torr in 1 second. And introduced for 3 seconds and held for 1 second. The operation of depressurizing the inside of the tube, introducing the reaction gas and holding the same was repeated 5000 times to form a second SiC coating layer by the pulse CVI method.
該第2SiC被覆層の平均膜厚は30μmであった。The average film thickness of the second SiC coating layer was 30 μm.
(4)耐酸化性の評価 上記の2段被覆工程によりSiC被膜層を形成したC/C材を
電気炉に入れ、大気中で10℃/minの速度で1300℃まで昇
温して2時間保持したのち自然冷却させる加熱・冷却サ
イクルを5回繰り返した。このようにして処理された材
料につき、酸化による重量減少率を測定し、その結果を
被覆条件と対比させて表1に示した。(4) Evaluation of oxidation resistance The C / C material on which the SiC coating layer was formed by the above two-step coating process was put in an electric furnace and heated to 1300 ° C at a rate of 10 ° C / min in the air for 2 hours. A heating / cooling cycle of holding and then naturally cooling was repeated 5 times. The weight loss due to oxidation was measured for the materials treated in this way and the results are shown in Table 1 in comparison with the coating conditions.
比較例1 第2被覆工程の反応温度を1200℃にしたほかは実施例と
同一条件により2段階のSiC被覆層を形成した。この材
料につき実施例と同一方法により酸化重量減少率を測定
し、その結果を表1に併載した。Comparative Example 1 A two-step SiC coating layer was formed under the same conditions as in Example except that the reaction temperature in the second coating step was 1200 ° C. The oxidation weight reduction rate of this material was measured by the same method as in the example, and the results are also shown in Table 1.
比較例2 実施例と同一条件で第1のSiC被覆層を形成したC/C基材
に、トリクロロメチルシラン(CH3SiCl3)とH2の混合反
応ガス(モル比1:20)を反応温度950℃、圧力400Torrの
条件で接触させCVD法により膜厚30μmの第2Sic被覆層
を形成した。Comparative Example 2 A C / C substrate on which a first SiC coating layer was formed under the same conditions as in Example was reacted with a mixed reaction gas of trichloromethylsilane (CH 3 SiCl 3 ) and H 2 (molar ratio 1:20). The second Sic coating layer having a film thickness of 30 μm was formed by the CVD method by bringing them into contact with each other at a temperature of 950 ° C. and a pressure of 400 Torr.
処理後の材料につき実施例と同一方法により酸化重量減
少率を測定し、その結果を表1に併載した。The oxidized weight reduction rate of the treated material was measured by the same method as in Example, and the results are also shown in Table 1.
比較例3 実施例ど同一条件で第1のSiC被覆層を形成したC/C基材
に、SiCl4、CH4およびH2の混合反応ガス(モル比1:1:
7)を1500℃の反応温度で接触させ、CVD法により膜厚30
μmの第2SiC被覆層を形成した。Comparative Example 3 A mixed reaction gas of SiCl 4 , CH 4 and H 2 (molar ratio 1: 1: to a C / C substrate on which a first SiC coating layer was formed under the same conditions as in Example).
7) is contacted at a reaction temperature of 1500 ° C, and a film thickness of 30 is obtained by the CVD method.
A 2 μm second SiC coating layer was formed.
処理後の材料につき実施例と同一方法により酸化重量減
少率を測定し、その結果を表1に併載した。The oxidized weight reduction rate of the treated material was measured by the same method as in Example, and the results are also shown in Table 1.
比較例4 実施例と同一のC/C基材の表面に、直接比較例2と同一
条件のCVD法によりSiC被覆層を形成した。この材料につ
き実施例と同一方法により酸化重量減少率を測定し、そ
の結果を表1に併載した。Comparative Example 4 A SiC coating layer was directly formed on the surface of the same C / C substrate as in Example by the CVD method under the same conditions as in Comparative Example 2. The oxidation weight reduction rate of this material was measured by the same method as in the example, and the results are also shown in Table 1.
比較例5 実施例と同一のC/C基材の表面に、直接比較例3と同一
条件のCVD法によりSiC被覆層を形成した。この材料につ
き実施例と同一方法により酸化重量減少率を測定し、そ
の結果を表1に併載した。Comparative Example 5 A SiC coating layer was directly formed on the surface of the same C / C substrate as in Example by the CVD method under the same conditions as in Comparative Example 3. The oxidation weight reduction rate of this material was measured by the same method as in the example, and the results are also shown in Table 1.
比較例6 実施例の被覆工程のうち第1被覆工程のみを施して第1
のSiC被覆層を形成した材料につき、同一方法による酸
化重量減少率を測定した。その結果を表1に併載した。Comparative Example 6 Of the coating steps of the example, only the first coating step was performed to obtain the first
With respect to the material on which the SiC coating layer was formed, the reduction rate of oxidized weight was measured by the same method. The results are also shown in Table 1.
表1の結果から、パルスCVI法を適用して第2のSiC被覆
層を形成した実施例1、2のC/C材は酸化による重量減
少率がすこぶる少ないことが判明する。しかし、第2被
覆工程の反応温度を1200℃にした比較例1では、第2SiC
被覆層の結晶化が進行して結晶粒界も明確に現れてくる
ため、実施例に比べて酸化消耗が多くなる。また比較例
2、3のように第2被覆工程としてCVD法を適用した材
料は、第1SiC被覆層のクラック内部に第2SiC被覆層が十
分に浸透充填されないため耐酸化性が減退する。比較例
4、5の材料はCVD法によるSiC被覆層のみの形成である
ため、密着性が弱く酸化試験の途中でSiC被膜の一部が
剥離する現象が発生した。From the results in Table 1, it is clear that the C / C materials of Examples 1 and 2 in which the second SiC coating layer was formed by applying the pulse CVI method had a very small weight reduction rate due to oxidation. However, in Comparative Example 1 in which the reaction temperature in the second coating step was 1200 ° C., the second SiC
Since the crystallization of the coating layer progresses and the crystal grain boundaries also appear clearly, the oxidative consumption increases as compared with the examples. In addition, the materials to which the CVD method is applied as the second coating step as in Comparative Examples 2 and 3 have poor oxidation resistance because the second SiC coating layer is not sufficiently permeated and filled inside the cracks of the first SiC coating layer. Since the materials of Comparative Examples 4 and 5 were formed only by the SiC coating layer by the CVD method, the adhesion was weak and the phenomenon that part of the SiC coating peeled off during the oxidation test occurred.
〔発明の効果〕 以上のとおり、本発明によればC/C材の表面にSiO接触機
構によるコンバージョン法で第1SiC被膜層を形成する第
1被覆工程とその上面に特定条件によるパルスCVI法で
アモルファス質または微細多結晶質SiC被膜層を形成す
る第2被覆工程を組み合わせて順次に処理することによ
り、高度の耐酸化性を付与することが可能となる。 [Effects of the Invention] As described above, according to the present invention, the first coating step of forming the first SiC coating layer on the surface of the C / C material by the conversion method by the SiO contact mechanism and the pulse CVI method under the specific conditions on the upper surface thereof are performed. A high degree of oxidation resistance can be imparted by combining the second coating steps for forming the amorphous or fine polycrystalline SiC coating layer and sequentially performing the treatment.
したがって、高温酸化雰囲気下の苛酷な条件に晒される
構造部材用途に適用して安定性能の確保、耐用寿命の延
長化などの効果がもたらされる。Therefore, when applied to structural member applications exposed to severe conditions under a high temperature oxidizing atmosphere, effects such as securing stable performance and extending the useful life are brought about.
Claims (2)
成形し硬化および焼成炭化処理して得られる炭素繊維強
化炭素体を基材とし、前記基材の表面にSiOガスを接触
させてコンバージョン法により第1のSiC被膜層を形成
する第1被覆工程と、ついで基材を減圧系内に保持し90
0〜1100℃の温度範囲に加熱しながらハロゲン化有機珪
素化合物を間欠的に充填して還元熱分解反応させるパル
スCVI法によりアモルファス質または微細多結晶質のSiC
を第1のSiCの被膜層の表面に析出沈着して第2のSiC被
膜層を形成する第2被覆工程を順次に施すことを特徴と
する炭素繊維強化炭素材の耐酸化処理法。1. A carbon fiber reinforced carbon body obtained by subjecting a carbon fiber to a composite molding together with a matrix resin, curing and firing carbonization as a base material, and contacting SiO 2 gas on the surface of the base material. The first coating step for forming the SiC coating layer of
Amorphous or fine polycrystalline SiC by pulse CVI method in which halogenated organosilicon compounds are intermittently charged while being heated in the temperature range of 0 to 1100 ℃ to carry out reductive thermal decomposition reaction.
Is sequentially deposited on the surface of the first SiC coating layer to form a second SiC coating layer, which is successively subjected to a second coating step.
は微細多結晶質SiCの析出をトリクロロメチルシラン(C
H3SiCl3)ガスの水素還元によりおこない、トリクロロ
メチルシランに対する水素のモル比を1:20〜100の範囲
に設定する請求項1記載の炭素繊維強化炭素材の耐酸化
処理法。2. The deposition of amorphous or fine polycrystalline SiC in the second coating step is performed by trichloromethylsilane (C
The oxidation resistance treatment method for a carbon fiber reinforced carbon material according to claim 1, wherein the H 3 SiCl 3 ) gas is reduced by hydrogen to set the molar ratio of hydrogen to trichloromethylsilane in the range of 1:20 to 100.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2150640A JPH0796473B2 (en) | 1990-06-08 | 1990-06-08 | Oxidation resistance treatment method for carbon fiber reinforced carbon material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2150640A JPH0796473B2 (en) | 1990-06-08 | 1990-06-08 | Oxidation resistance treatment method for carbon fiber reinforced carbon material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0442878A JPH0442878A (en) | 1992-02-13 |
| JPH0796473B2 true JPH0796473B2 (en) | 1995-10-18 |
Family
ID=15501271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2150640A Expired - Fee Related JPH0796473B2 (en) | 1990-06-08 | 1990-06-08 | Oxidation resistance treatment method for carbon fiber reinforced carbon material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0796473B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0781739B1 (en) * | 1995-12-26 | 1999-10-27 | Asahi Glass Company Ltd. | Jig for heat treatment and process for fabricating the jig |
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1990
- 1990-06-08 JP JP2150640A patent/JPH0796473B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0442878A (en) | 1992-02-13 |
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