JPH0810001B2 - Pneumatic cylinder device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to a device for controlling the stroke of a piston rod by a pneumatic cylinder and a rotary electric motor.

[Prior Art] As an actuator mechanism for performing various mechanical operations, there is a cylinder device in which a rod is driven by gas pressure such as air.

This is to control the stroke amount of a rod connected to the piston by moving the piston by providing a pressure difference of gas on both sides of the piston in the cylinder. In order to accurately control the piston position of the cylinder device or its speed, a sensor for detecting the stroke amount is provided and the gas pressure is not feedback-controlled so that the stroke amount or stroke speed is in a desired state. Don't

[Problems to be Solved by the Invention] However, in a cylinder device using such a gas as a working fluid, even if an attempt is made to stop at a desired position due to the compressibility of the gas, the pressure in the gas in the cylinder is reduced. If they remain, over-control of the rod position may occur, or the inertial force associated with the mass of the cylinder and rod, etc. may interact with the compressibility of the gas, causing vibration of the rod.
It was extremely difficult to realize accurate speed control and intermediate position stop control. Especially when ultra-low speed control is required at the final stage of rod positioning, with gas pressure only control,
At the orifice on the gas discharge side, the differential pressure before and after that becomes small, and the fluctuation of the differential pressure becomes large due to slight dust and the like.
As a result, the speed of the piston varies, and in extreme cases, the piston may stop. With such inaccurate speed control, it is also very difficult to accurately and quickly reach a desired position.

In order to solve this, it is possible to use an air-hydro converter using non-compressible oil, a hydro check cylinder, or the like together. However, these mechanisms have a problem of oil leakage, and the repair is more troublesome than the gas cylinder device, and it cannot be said to be an efficient device.

The present invention is intended to solve these problems, and can be used for precise position control, which enables quick and accurate stroke speed control of the piston rod without the use of oil. The object is to realize a pneumatic cylinder device that can be used.

[Means for Solving the Problems] As means for solving the above problems, a gas pressure cylinder device of the present invention is a gas pressure cylinder having a piston rod that moves linearly, and gas supply and discharge to and from the gas pressure cylinder. By means of a driving mode for driving the piston rod and a non-driving mode for not driving the piston rod to adjust the moving speed of the piston rod, and a linear motion adjusting means, and a linear motion and a rotary motion connected to the piston rod. A gas pressure cylinder device comprising a motion conversion means for mutually converting and a rotary encoder for detecting the rotational speed of the rotary motion, the rotary motor rotating, and the rotary motion of the rotary motor being decelerated. A speed reducing mechanism, and a rotary motion from the speed reducing mechanism to the motion converting means interposed between the speed reducing mechanism and the motion converting means. And a clutch mechanism that switches between a transmission mode for transmitting the rotation motion and a disconnection mode for shutting off the transmission of the rotary motion, adjusting the amount of electric power to the rotary electric motor, and setting the clutch mechanism in the transmission mode according to the detection value of the rotary encoder. And a control circuit for setting the linear motion adjusting means in the non-driving mode and setting the clutch mechanism in the disengagement mode for setting the linear motion adjusting means in the drive mode.

[Operation] The linear movement adjusting means drives the piston rod by supplying / discharging gas to / from the gas pressure cylinder in the drive mode, and does not drive the piston rod in the non-drive mode. Therefore, by switching between the driving mode and the non-driving mode, it is possible to accelerate and decelerate the piston rod and adjust its moving speed.
The adjustment of the speed of the piston rod by the linear motion adjusting means uses a compressible gas as the working fluid,
It is used in operations such as fast-forward and fast-reverse rather than precise control.

The rotary electric motor makes a rotary motion. The deceleration mechanism decelerates the rotational movement of the rotary electric motor to provide low-speed and high-torque rotational movement.

The clutch mechanism interposed between the speed reducing mechanism and the motion converting means switches between the transmission mode and the disengagement mode,
In the transmission mode, the rotational movement is transmitted from the speed reduction mechanism to the motion converting means, and in the cutoff mode, the transmission of the rotational movement is cut off.

Therefore, when the rotary electric motor is operated with the clutch mechanism in the transmission mode, the rotary motion generated by the rotary electric motor and made into the low speed and high torque by the speed reduction mechanism is converted into the linear motion by the motion conversion means and transmitted to the piston rod. The piston rod can be driven straight ahead. The moving speed of the piston rod driven by this system is very low.

When the piston rod is driven by the rectilinear motion adjusting means to make a rectilinear motion, the rectilinear motion is transmitted to the motion converting means and converted into the rotational motion by the motion converting means. The rotary encoder detects the number of rotations of this rotary movement. Further, the rotary motion transmitted from the rotary electric motor side to the motion conversion means is converted into a linear motion to drive the piston rod, and the rotary encoder also detects the rotational speed of this rotary motion.

That is, the rotary encoder detects the position and speed of the piston rod through the rotation speed of the rotary motion of the motion conversion means.

The control circuit regulates the amount of power to the rotary motor. Examples of the method of adjusting the amount of electric power include on / off of current and stepwise or continuous increase / decrease. By adjusting the amount of electric power in this way, the rotational speed of the rotary motor can be controlled extremely accurately.

The control circuit sets the linear motion adjusting means to the non-driving mode when the clutch mechanism is in the transmission mode according to the detection value of the rotary encoder, and the clutch mechanism when the linear motion adjusting means is in the drive mode. Set the cutoff mode.

Therefore, first, the linear motion adjusting means is set to the drive mode, the clutch mechanism is set to the disengagement mode to drive the piston rod for a predetermined stroke, and then the linear motion adjusting means is set to the non-drive mode to decelerate the piston rod, or At the same time, if the clutch mechanism is set to the transmission mode, the piston rod can be moved at a very low speed by the rotational movement generated by the rotary electric motor. Furthermore, if the rotary encoder detects that the piston rod has moved at a very low speed, for example, to the set position or just before the set position, the rotary motor is stopped or the clutch mechanism is set to the disengagement mode. Can be stopped accurately. For example, when the piston rod is stopped by stopping the rotation of the rotary electric motor, the piston rod can be stopped precisely in accordance with the reduction ratio of the reduction mechanism. For example, if the above reduction ratio is 100: 1, the accuracy of the piston rod stop position is 1
It becomes / 100.

In this way, quick movement and rough speed adjustment are performed by the linear motion adjusting means, and the rotary motion generated by the rotary motor is converted into the linear motion to drive the piston rod to perform precise speed adjustment. In this case, the piston rod can be moved quickly and stopped accurately. That is, the stroke speed control of the piston rod can be performed quickly and accurately, and precise position control can be performed.

[Embodiment] FIG. 1 shows a first embodiment of the pneumatic cylinder device of the present invention. This figure shows a schematic system diagram. This device mainly includes a straight driving force output unit (gas pressure cylinder) 1, an induction motor (rotary electric motor) 3, a rotation / straight conversion unit (motion conversion unit) 5, an air pressure circuit (straight motion adjustment unit) 7, and control. It is composed of a circuit 11. In addition to this, the present device includes a speed reducer (speed reduction mechanism) 13, an electromagnetic clutch (clutch mechanism) 15, a rotary encoder 17, and the like.

Of these, the linear drive force output unit 1, the induction motor 3, the rotation / straight line conversion unit 5, the speed reducer 13, the electromagnetic clutch 15, and the rotary encoder 17 are integrally configured as shown in FIG.

The straight driving force output unit 1 is mainly composed of a cylinder 21 and a piston.
It is composed of 23 and rod 25. The rod 25 slidably penetrates a rod cover 27 and an intermediate cover 29 that seal both ends of the cylinder 21. Air pressure is supplied and discharged through ports 31 and 33 provided in both covers 27 and 29 in the cylinder 21. By positively executing this supply / discharge by adjusting the pressure, the piston 23 moves to the cylinder 21
Move along the axial glands of. Along with this, the operating end portion 25a of the rod 25 protruding from the rod cover 27 can be moved forward and backward to cause another mechanism (not shown) connected to the operating end portion 25a to perform a predetermined work. I can.

The rod 25 penetrates through the intermediate cover 29 and is connected to the linear piston 37 in the cylinder 35 of the rotary-straight translation unit 5. A nut 39 whose axis is in the same direction as the rod 25 is press-fitted into the linear piston 37 and fixed by welding. A feed screw 41 is screwed into the nut 39. The lead angle between the nut 39 and the feed screw 41 is set sufficiently larger than the friction angle. Therefore, when the rod 25 moves forward and backward due to the supply and discharge of air pressure to perform a rectilinear motion, the rectilinear driving force is transmitted to the feed screw 41 via the nut 39 of the rectilinear piston 37, and the feed screw 41
It is converted into a rotational motion of 41. On the contrary, when the feed screw 41 rotates as described later, the rotational movement is transmitted to the linear piston 37 via the nut 39 and converted into the linear movement of the rod 25. For further precise control, a ball screw model may be used instead of the nut 39 and the feed screw 41.

A feed screw bearing 47 is sandwiched between the feed screw cover 43 of the cylinder 35 and the clutch housing cover 45 to support the feed screw 41. Left end of feed screw 41
41a is rotatably supported by the intermediate cover 29, and is shown at the right end 4 in the figure.
1b penetrates the inside of the clutch housing 49 and reaches the rotary encoder 17 at the right end in the drawing. Therefore, the rotation state of the feed screw 41 can be accurately detected by the rotary encoder 17.

The feed screw 41 is connected to the electromagnetic clutch 15 in the clutch housing 49. The electromagnetic clutch 15 is a commonly used clutch and is a well-known clutch, and thus its details are omitted. This electromagnetic clutch 15
Intermittent control is performed by the output of the drive signal from the control circuit 11. When the electromagnetic clutch 15 is engaged (transmission mode), the feed screw 41 rotates together with the gear 15a of the electromagnetic clutch 15, and when the electromagnetic clutch 15 is disengaged (disengagement mode), the feed screw 41 The rotation is independent of the rotation of the gear 15a of the electromagnetic clutch 15. Gear 1 of electromagnetic clutch 15
5a meshes with the output gear 13a of the speed reducer 13. Therefore, the rotational driving force from the induction motor 3 is decelerated in its rotational speed via the speed reducer 13 to rotate the gear 15a of the electromagnetic clutch 15 with high torque.

With the above configuration, when the electromagnetic clutch 15 is connected and the induction motor 3 is rotated in the normal / reverse direction, the feed screw 41 is rotated in the normal / reverse direction via the speed reducer 13 and the electromagnetic clutch 15.
The forward / reverse movement is transmitted to the rod 25 via the nut 39 as forward / backward movement, and the rod 25 moves at a very low speed. At this time, the rotation state of the feed screw 41 is detected by the rotary encoder 17. The rotation by the induction motor 3 is stable and smooth, and is transmitted at low rotation and high torque via the speed reducer 13. Therefore, the rod 25 moves forward and backward at a very low speed, and the movement is extremely smooth. Precise and stable operation.

On the other hand, when the electromagnetic clutch 15 is disengaged and compressed air supply / discharge control is performed on the ports 31 and 33, the rod 25 moves forward / backward as the piston 23 moves straight. This advance
The backward movement is transmitted to the feed screw 41 through the nut 39 as forward / reverse rotation movement. The rotation of the feed screw 41 is detected by the rotary encoder 17. Since the motive force is given by the pressure difference of the gas, it is not a stable motion like the induction motor 3, but it can be moved very quickly.

Since the rotation of the feed screw 41 is proportional to the amount of advance / retreat of the rod 25, that is, the change in stroke amount, the rotary encoder 17 detects the stroke amount of the rod 25. Therefore, whether the rod 25 is driven by the difference in air pressure before and after the piston 23 or by the induction motor 3, the stroke amount can always be accurately detected by the rotary encoder 17.

Next, the pneumatic circuit 7 that controls the supply and discharge of compressed air to and from the ports 31 and 33 of the cylinder 21 will be described. The pneumatic circuit 7 is mainly composed of a pressure source 51, a pressure reducing valve 53,55 for air pressure relief (hereinafter also referred to as a pressure reducing valve), and a 3-port two-position switching valve 57,59 (hereinafter also referred to as a switching valve). It is configured.

First, the pressure reducing valve 53 shown in the sectional view of FIG. 3 will be described. Since the other pressure reducing valve 55 has the same structure, its explanation is omitted. As shown in the figure, the pressure reducing valve 53 includes an adjusting body 6
1, Pressure reducing valve body 67 consisting of diaphragm 63 and valve body 65
And a 3-port 2-position switching valve 53a used in the switching mechanism.

The adjusting body 61 includes a hollow adjusting screw 7 having a wide portion 71a.
1 includes a bonnet 73 screwed to one end thereof, and a back pressure chamber 75 is provided on the other end of the bonnet 73 on the diaphragm 63 side. Inside this back pressure chamber 75, a hollow piston 77
Is slidably inserted, and the piston 77 is formed with a hollow piston rod 79 which is inserted into the adjusting screw 71 and has an abutting portion 79a at its end. A bleed hole 75a for releasing the pressure of the back pressure chamber 75 to the atmosphere is provided at the end of the piston rod 79 on the adjusting portion 79a side, and a spring adjusting screw 83 provided with a handle 81 is screwed into the bleed hole 75a. Spring adjustment screw
The spring 83 is in contact with the adjusting spring 87 provided in the hollow portions of the piston 77 and the piston rod 79 via the spring retainer 85. As a result, the biasing force of the adjusting spring 87 toward the diaphragm can be adjusted. Piston 77 piston rod
An adjusting chamber 89 and an adjusting chamber port 91 communicating from the adjusting chamber 89 to the outside of the pressure reducing valve main body 67 are provided on the 79 side, and are connected to the 3-port 2-position switching valve 53a. The 3-port / 2-position switching valve 53a will be described later.

The diaphragm 63 provided between the adjusting body 61 and the valve body 65 described above has a relief hole 93 at the center thereof.
A relief valve 95 having a valve is provided and is biased toward the valve body 65 by an adjusting spring 87.

The valve main body 65 is provided with a primary pressure chamber 97, a secondary pressure chamber 99, and a pressure receiving chamber 101 located on the diaphragm 63 side and connected to each other via the secondary pressure chamber 99 and the orifice 99a. A valve body 103 is slidably provided in a valve body chamber 105 between the primary pressure chamber 97 and the secondary pressure chamber 99, and the valve body 103 is a valve spring on the valve body chamber 105 side.
While being urged in the direction of diaphragm 63 by 107,
The valve head 103a is in contact with the valve seat 109. Also, valve head 103a
Is in contact with the stem 111, and the other end of this stem 111 is in contact with the relief valve 95 of the diaphragm 63. Therefore, the stem 111 transmits the downward movement of the relief valve 95 to the valve body 103 to slide the valve body 103 downward, and also serves as an opening / closing valve body of the relief hole 93 of the relief valve 95. On the other hand, the primary pressure chamber 97 is provided with a primary pressure port 97a and is connected to the 3-port 2-position switching valve 53a.

Adjustment chamber port 91 communicating with the adjustment chamber 89 in the adjustment body 61
And a primary pressure port communicating with the primary pressure chamber 97 in the valve body 65.
The 3-port 2-position switching valve 53a connected to 97a is in an off (normal) state in which the solenoid 53b is not energized.
The air in the adjusting chamber 89 is opened to the atmosphere via the adjusting chamber port 91, and the primary pressure port 97a is closed.

When the 3-port 2-position switching valve 53a is operated by turning on (energizing) the solenoid 53b, the adjustment chamber port 91 and the primary pressure port 97a are communicated with each other, and the pressure in the primary pressure chamber 97 is supplied to the adjustment chamber 89.

The pressure reducing valve 53 with a pneumatic relief having the above configuration,
In the pneumatic circuit 7, the secondary pressure is reduced to a constant pressure lower than the primary pressure. When the handle 81 is turned to increase the urging force of the adjusting spring 87 in a state where the air in the adjusting chamber 89 is exhausted to the atmosphere by the 3-port 2-position switching valve 53a in the off state, the valve element is inserted through the relief valve 95 and the stem 111. 103 slides toward the valve body chamber 105, and air from the primary pressure chamber 97 passes through the valve to the secondary pressure chamber.
Pour into 99. At this time, a part of the air in the secondary pressure chamber 99 flows into the pressure receiving chamber 101 through the orifice 99a, and the diaphragm
The relief valve 95 of 63 is moved and the adjustment spring 87 is pushed up. In response to this, the stem 111 moves upward, and in response to this, the valve body 103, which is biased upward by the valve spring 107, moves upward, causing the valve to begin to close, and the secondary pressure and the adjusting spring
When the valve element 103 moves to a position where the biasing force with the 87 is balanced, the valve is closed and the secondary pressure is set to a constant pressure. further,
When the secondary pressure becomes equal to or higher than the set pressure, the diaphragm 63 and the relief valve 95 are pushed away from the stem 111 by the pressure increase in the pressure receiving chamber 101, the relief hole 93 is opened, and the air in the pressure receiving chamber 101 is bleed hole 75a. Is released into the atmosphere through. As a result, the secondary pressure is always kept within a certain range regardless of the direction of air flow.

The valve body 103 is provided with a valve body hole 103b that connects the secondary pressure chamber 99 and the valve body chamber 105 to each other, and transmits the influence of the fluctuation in pressure on the primary pressure chamber 97 side to the secondary pressure chamber 99 side. It is supposed not to.

Next, the solenoid 53b is turned on to operate the 3-port 2-position switching valve 53a to move the air on the primary pressure chamber 97 side to the control chamber 89.
Flow into the piston, due to the air pressure in the adjustment chamber 89
The 77 and the piston rod 79 slide toward the diaphragm 63 over the distance L for the contact portion 79a of the piston rod 79 to contact the wide portion 71a of the adjusting screw 71. This increases the biasing force of the adjusting spring 87, so that the secondary pressure is
The secondary pressure characteristic with respect to the flow rate is changed by changing from the set pressure by.

FIG. 4 shows the characteristics before and after the switching when the pressure is applied. The pressurizing side refers to the side on which air is sent out from the cylinder 21 when the piston 23 moves. On the contrary, the term “exhaust pressure side” means the side from which air is discharged from the cylinder 21.

Here, the secondary pressure characteristic with respect to the flow rate when the adjustment chamber 89 is opened to the atmosphere is represented by the characteristic (A), and the secondary pressure with respect to the flow rate when the pressure on the primary pressure chamber 97 side is introduced into the adjustment chamber 89. The characteristic is represented by the characteristic (B).

In the case of characteristic (A), the secondary pressure when the flow rate is 0 (l / min) is PO (kg f / cm ² G), but when the flow rate is F1 (l / min), the secondary pressure is P1. (Kg f / cm ² G). If the flow rate changes from 0 (l / min) to F1 (l / min) and at the same time the 3-port 2-position switching valve 53a is operated to switch to the characteristic (B), the pneumatic relief of the present embodiment is obtained. The flow rate / secondary pressure characteristic of the attached pressure reducing valve 53 has the same characteristic as the characteristic (C), and the secondary pressure maintains a substantially constant pressure PO (kg f / cm ² G).
This is because if the adjusting screw 71 is moved to adjust the sliding distance L of the piston 77, when the air is introduced into the adjusting chamber 89 by the 3-port 2-position switching valve 53a, the characteristic (B ) Can be switched.

On the other hand, the exhaust pressure side is opened to the atmosphere by the exhaust switching valve 59 via the exhaust throttle valve 59a.

Next, the control circuit 11 will be described. The control circuit 11 is
Mainly, a setting unit 11a having an input unit for inputting an operator's instruction and a display unit for displaying predetermined data, and the setting unit 11a.
The control signal from the arithmetic unit 11b, which sends a control signal for instructing a predetermined process based on the instruction received from the rotary encoder 17 and the detection signal received from the rotary encoder 17, and which performs a predetermined display on the setting unit 11a. Accordingly, the induction motor 3, the electromagnetic clutch 15, the pressure reducing valves 53 and 55, and the control unit 11c that drives the switching valves 57 and 59 to turn on and off. The functions of these control circuits 11 can be implemented by an ordinary sequencer or computer.

Next, the processing contents of the control circuit 11 will be described based on the flowchart of FIG. The flowchart of FIG. 5 shows an example of processing of the part related to the present invention in the processing performed by the control circuit 11.

When this process is started, initial settings are first made (step 200). In the initial setting, the pneumatic circuit 7 is operated to determine whether or not the rotary encoder 17 normally outputs a detection signal, and further, the induction motor 3 is driven to move the rod 25 to a predetermined position. Then, the induction motor 3 is checked for any abnormality, and the positioning process for the next operation is executed. A method of operating the pneumatic circuit 7 will be described later. Rotary encoder for positioning
In addition to the detection signal of 17, a limit switch (not shown) may be provided to determine the existence of the rod 25 at a predetermined position.

Next, it is determined whether or not the instruction is completed (step 21).
0). If the instruction has not been completed or if the instruction has not been issued, instruction input processing is performed (step 220), and based on the input signal from the setting unit 11a, the calculation unit 11b sets the processing procedure and the RAM
Etc., and display it on the setting unit 11a. If there is further input or correction, a negative determination is made in step 210, and the instruction input process (step 220) is executed again.

When the instruction work is completed, the rod is
25 stroke controls are made (step 230).

Here, with respect to the stroke control of the rod 25, the movements of the pneumatic circuit 7, the induction motor 3, and the electromagnetic clutch 15 will be described based on FIGS. 4 and 1.

As shown in FIG. 1, the pneumatic circuit 7 includes a pressure source 51
And the above-described pressure reducing valves 53, 55 for air pressure relief (hereinafter also referred to as pressure reducing valves) and the 3-port two-position switching valves 57, 59 (hereinafter also referred to as switching valves). Also, the fourth
As shown in the figure, the pressure reducing valves 53 and 55 have already been adjusted by the handle 81 and the adjusting screw 71 so that the secondary pressure characteristic with respect to each flow rate is switched between the characteristic (A) and the characteristic (B). I shall. Incidentally, the pressure reducing valve in the pneumatic circuit 7
The secondary pressure characteristics of 53 and the pressure reducing valve 55 may be the same or different, and may be variously selected and adjusted depending on the application state of the linear drive force output unit 1. However, since the principle of switching the characteristics is the same, the characteristics will be described hereinafter without particular distinction by the characteristics (A) and (B) in the graph of FIG.

The drive signal output by the calculation unit 11b via the control unit 11c is
When the rod 25 of the straight driving force output unit 1 is to be moved in the forward direction (left side in the figure), the air pressure supply / exhaust operation to the ports 31 and 33 is performed as follows. Hereinafter, the driving operation of the solenoids 53b, 55b, 57b, 59b of the valves 53a, 55a, 57, 59 is automatically performed by the control circuit 11.

With the initial settings already made (step 200), all valves 53
a, 55a, 57, 59 are off, and piston 2 of cylinder 21
It is assumed that the forces applied to the rod 25 including the pressures on both sides of 3 are in a balanced state and stopped.

First, the switching valve 59 is turned on, the port 31 is opened and the switching valve of the pressure reducing valve 53 is opened so that the air in the cylinder 21 is discharged through the exhaust throttle valve 59a for speed adjustment.
53a is simultaneously switched on, and the secondary pressure characteristic of the pressure reducing valve 53 is switched from the characteristic (A) to the characteristic (B) in FIG. In this way, a constant secondary pressure is maintained even if the flow rate changes. Therefore,
In the figure, a constant air pressure is applied to the right side of the piston 23 regardless of the flow rate, and the left side is open to the atmosphere, so the rod 25 moves to the left side, that is, advances. During this time, the control circuit 11 checks the stroke amount of the rod 25 from the rotation amount of the rotary encoder 17 (proportional to the straight advance amount). When it is determined that the stroke is approaching the predetermined stroke amount, deceleration processing for stopping the rod 25 is performed.

The deceleration process of the rod 25 is performed as follows. That is, the switching valve 59 is turned off, and at the same time, the switching valve 53a of the pressure reducing valve 53 is turned off.
Switch off. As a result, the secondary pressure characteristic of the pressure reducing valve 53 is switched again to the characteristic (A) shown in FIG. Therefore, the same pressure is applied to both sides of the piston 23 and the piston 23 and the rod.
25 becomes a non-driving state. This causes the piston 23 and rod 25 to slow down and eventually stop. Of course, in the case of a device in which a constant load is always applied to the rod 25, a differential pressure corresponding to the load must be present on both sides of the piston 23, and in that case, the secondary pressure provided by the pressure reducing valves 53, 55 is required. The pressure characteristic is different from the above, and there is a predetermined differential pressure.

In order to actually balance the pressures on both sides of the piston 23 and to stop the piston 23, air must be discharged to the pressure reducing valve 53, so a certain delay time from the time when the switching signal is output to the switching valve 53a. It is necessary to pass. Therefore, the piston 23 decelerates during this delay time. Therefore, on the control circuit 11 side, the piston during the delay time is
The switching signal of OFF is output in consideration of the movement of 23. That is, the output timing of the OFF switching signal is determined from the detection value of the rotary encoder 17 so that the rod 25 is decelerated and stops or almost stops just before the predetermined stroke amount.

Next, processing for precisely positioning and stopping the decelerated piston 23 is performed.

That is, the electromagnetic clutch 15 is engaged, and the induction motor 3 is driven according to the detection signal of the rotary encoder 17.
The drive timing of the induction motor 3 is the speed of the rod 25 detected by the rotary encoder 17 or the rod 25.
It is determined by the stroke amount of 25. Note that the rod 25 may be stopped before the predetermined stroke amount at the time of driving the induction motor 3.

Since the output of the induction motor 3 is transmitted to the feed screw 41 through the reduction gear 13 as high torque and low speed rotation, it is possible to move the rod 25 at a fine speed and precision. Therefore, accurate stroke control is possible. The induction motor 3 may be rotated in advance and the electromagnetic clutch 15 may be used to control the torque output on / off. At this time, the air pressure on the forward side of the moving piston 23 tries to rise and the air pressure on the opposite side tries to drop, but since the pressure reducing valves 53 and 55 are adjusted so as to always be the set pressure, the movement of the piston 23 There is no problem.

As described above, it is difficult to precisely adjust the stroke speed and stroke amount of the rod 25 by balancing the air pressure due to the compressibility of air. However, the electric motor such as the induction motor 3 originally has a very stable rotation torque, and is further stabilized because it is decelerated by the speed reducer 13 to have a high torque and a low speed rotation, and is much more stable than a gas pressure cylinder. Shows the stability of. Therefore, it is possible to stably move at a desired rotational speed at a very low speed. In addition, the rotary encoder 17
It can be stopped accurately according to the detected value of. Moreover, since the rotation speed is reduced by the speed reducer 13, the error in the rotation stop position of the feed screw 41 becomes extremely small. For this reason, the stroke speed and stroke amount can be adjusted much more accurately than the movement / stop operation by air pressure.

The rotary encoder 17
It may be performed by feedback control while observing the detection value of. Further, since the movement is performed by the induction motor 3 via the speed reducer 13, stable slow movement / stop movement is always performed. Therefore, considering the inertial force of the moving part, open loop control is sufficient without using feedback control. This is also more economical and easier to control. That is, at a precisely determined position immediately before the predetermined stroke amount, the drive of the induction motor 3 is turned off or the electromagnetic clutch 15 is turned off, and only the inertial force that is predicted or measured in advance up to the predetermined stroke amount It is also possible to move by and stop accurately at a predetermined stroke amount.

When the rod 25 reaches this predetermined stroke amount, a grip device for the rod 25 may be separately provided to grip the rod 25 in order to keep the position fixed. As the grip device, a known device such as a pneumatically driven or electromagnetically driven grip device can be used. Also completely rod
25 now rod instead of gripping after stopping
Rotary encoder 17 when 25 is moving by inertial force
The rod 25 may be fixed by gripping at the moment when it is detected that the stroke amount is a predetermined amount. By doing this, the cause of instability of the movement amount due to inertial force (change over time, etc.)
Can be suppressed as much as possible, and more precise positioning control becomes possible.

In addition to the grip device, a known electromagnetic brake that stops the rotation of the feed screw 41 may be used as a device useful for maintaining and fixing the position.

In any case, since the moving speed of the rod 25 is very low, the variation in the rod stop position is extremely small.

In this way, when it is confirmed that the rod 25 has reached the predetermined stroke amount based on the detection value of the rotary encoder 17, another process is started next (step 240). For example, when a cutting tool is attached to the working end 25a of the rod 25, an operation such as rotating the work piece is performed.

Next, it is judged whether or not the processing is completed (step 25).
0). If you still have the indicated process,
Returning to the processing of step 230. The processes of steps 230 and 240 are repeated until the process is completed, and when all the processes are completed, the process returns to steps 210 and 220 again to execute the instruction input process.

Although the above processing example is for the case where the rod 25 moves forward, when the rod 25 moves backward, the operations of the switching valves 53a, 55a, 57, 59 and the induction motor 3 may be reversed.

In this way, by operating the switching valves 53a, 55a, 57, 59, the pressure on one side of the cylinder 23 is made higher than the other side (atmosphere opening side) (driving mode), and the piston 23 and the rod 25
Drive and move quickly. Rotary encoder 17
When it is detected that the rod 25 has reached the stop processing start position, the pressure on both sides of the cylinder 23 is balanced by operating the switching valves 53a, 55a, 57, 59 (non-driving mode).
The piston 23 and the rod 25 are brought into a non-driving state. As a result, the rod 25 is decelerated.

Next, the induction motor 3 is driven according to the detection value of the rotary encoder 17. The rotational force of the induction motor 3 is the speed reducer 13
And transmitted to the feed screw 41 via the electromagnetic clutch 15,
Further, the rod 25 is converted into linear motion through the nut 39.
Move at a slow speed. Further, when the rotary encoder 17 detects that the rod has reached the set stop position or a predetermined position immediately before that, the induction motor 3 is turned off and the rod 25 is stopped. In the stroke region immediately before the stop, the rod 25 is precisely moved at a fine speed, and the rotational motion of the induction motor 3 is decelerated by the speed reducer 13 to be high torque and low speed rotation. Even if there is an error in stopping, the stopping position of the rod 25 will be extremely accurate.

Since this embodiment is constructed as described above, the pneumatic circuit 7 can be used to move the rod 25 quickly, and the stroke amount and speed of the rod 25 can be precisely adjusted. , The induction motor 3 can be used.

6 to 8 as another embodiment of the configuration of the straight driving force output unit 1, the induction motor 3, the rotation / straight conversion unit 5, the speed reducer 13, the clutch 15 and the rotary encoder 17 shown in FIG. It can be configured as shown.

In the second embodiment of FIG. 6, the induction motor 301 is a reduction gear 303,
It is almost the same as that of the first embodiment in that it is connected to the rotary encoder 307 and the rotation / straight translation mechanism via the electromagnetic clutch 305. The difference from the first embodiment is that the rectilinear driving force output unit 309 is internally provided with a rotation-straight rectilinear conversion mechanism. That is, the piston 313 and the rod 31 inside the cylinder 311
A feed screw 319 is arranged so as to be housed inside a sliding hole 317 provided in the central portion of 5. The tip end 319a of the feed screw 319 is supported by the slide rotation metal 321, and the feed screw 319 is movable in the forward and backward directions while rotating in the sliding hole 317. Further, a nut 323 screwed onto the feed screw 319 is fixed to the opening portion of the sliding hole 317. As a result, when the induction motor 301 rotates the feed screw 319 by the rotational force, the piston 313 slides and moves in the cylinder 311 via the nut 323. Therefore, the rod 315 also moves forward or backward. Since the cylinder 311 has a cylindrical shape, a mechanism for preventing the rotation of the rod 315 when the feed screw 319 is rotated by the induction motor 301 is adopted. That is, the rod 315
An arm 325 is projectingly provided in the vicinity of the working end 315a of the cylinder 315, and a rotation stop bar 327 is provided in parallel therewith to the rod 315.
A rotation stop bar 327 is slidably inserted into a guide hole 329 provided in a portion where the outer wall of 1 projects. The guide hole 329 is metalized to prevent wear.

Further, the cylinder 311 is provided with two ports 331 and 333 connected to the pneumatic circuit 7 with the piston 313 interposed therebetween.

Since the second embodiment is configured in this way, it has the same functions as those of the first embodiment, but is also compact, so that it contributes to the miniaturization of the device even when applied to various devices. You can

Next, FIG. 7 shows a third embodiment. Induction motor here 40
The configurations and relationships of 1, the speed reducer 403, the electromagnetic clutch 405, and the rotary encoder 407 are almost the same as those in the second embodiment, and thus the description thereof will be omitted.

This embodiment is similar to the first embodiment in that the straight driving force output unit 411 is used.
And a rotation-straight translation unit 413, the difference from the first embodiment is that the feed screw 415 is inserted into the rod 417a on one side as in the second embodiment, and the nut 418 at the inlet thereof is provided. In order to prevent the rod 417 from rotating, the rotation straight-to-straight conversion unit 4 is provided.
A rotation stop bar 423 axially provided inside the rotation straight / straight conversion unit 413 is slidably inserted into a guide hole 421 formed in a part of the rotation stop piston 419 and metalized. That is the point. The rod 417 controls the air pressure to the ports 425 and 427 of the straight driving force output unit 411 by controlling the air pressure circuit 7 as described above, thereby causing the piston 429 to move.
You can control the movement by sliding. Further, the movement control of the rod 417 by the induction motor 403 can be carried out by connecting the electromagnetic clutch 405 in the same manner as in the second embodiment.

Next, FIG. 8 shows a fourth embodiment. Induction motor here 50
The configurations and relationships of 1, the speed reducer 503, the electromagnetic clutch 505, and the rotary encoder 507 are almost the same as those in the second and third embodiments, and thus the description thereof will be omitted.

The difference from the first to third embodiments is that two rectangular frame plates 509 and 511 are assembled as a frame by two guide bars 513 and 515 and a connecting bar (not shown). 517 is a pivotally supported shaft, and a cylinder 519 is fixed to one frame plate 509. Further, a slide member which is slidably held by two guide bars 513 and 515 and is movable in parallel. That is, 525 is provided. Since the slide member 525 is provided with the nut 527 and the feed screw 517 is screwed, the movement of the straight movement of the slide member 525 and the rotation of the feed screw 517 can be converted. Therefore, if the ports 529 and 531 of the cylinder 519 are connected to the pneumatic circuit 7, the piston 52 can be operated by the same operation as in the first embodiment.
The position of the operating end 525a can be adjusted by moving the rod 523 integrated with 1. Further, when the electromagnetic clutch 505 is connected, the feed screw 517 can be rotated by the rotation of the induction motor 501, and the slide member 525 can be precisely moved forward and backward. A part of the slide member 525 has an operating end 525a
If it is provided, it can be applied as a driving device for other devices.

In each embodiment, when the rod is stopped, the electromagnetic clutch and the induction motor are simultaneously driven in order to securely fix the position, and the reverse torque is controlled to maintain the position. May be. In addition, even without providing a special pressure reducing valve as described above, the stability of the induction motor is simultaneously driven and the stability of the induction motor is added to the movement of the rod, so that the rapid movement of the rod due to the compressibility of the working air or You may control so that abnormal movement may be suppressed.

Although an induction motor is used as the rotary motor in the above embodiment, other well-known motors such as a synchronous motor, a DC motor, a commutator motor, a servo motor, and a stepping motor may be used. Of these, generally used induction motors, synchronous motors, DC motors, and commutator motors are inexpensive, have a simple structure, and require only on / off control, so the overall structure is simple and inexpensive. It is possible to realize a pneumatic cylinder device.

In the above-described embodiment, the pressure control in the cylinder 21 controls the pressurizing side to the characteristic (B) shown in FIG. 4 to maintain the same pressure when the rod 25 moves, and controls the exhaust pressure side to open to the atmosphere. When the rod 25 is stopped, both are (A)
Although the characteristics are controlled, as another embodiment, different pressure control may be performed by the following pressure reducing valve.

That is, a case will be described in which control is performed using a pressure reducing valve with air pressure relief as shown in the sectional view of FIG. As shown in the figure, the pressure reducing valve 600 with air pressure relief includes a pressure reducing valve body 605 including an adjusting body 602, a diaphragm 603, and a valve body 604, similarly to the pressure reducing valve 53 with air pressure relief.
And a 3-port 2-position switching valve 607 used in the switching mechanism.
Compared with 53, the configuration differs in the following points.

The hollow piston 623 of the adjusting body 602 has a recess 623a formed in the lower end surface thereof, and a return spring 633 is provided between the recess 623a and the spring seat 621a at the end of the bonnet 621 facing the recess 623a.
Is provided. The return spring 633 has a low secondary pressure set by the adjusting spring 628 (0k in some cases.
In the case of gf / cm ² G), it is provided in order to maintain good response when the piston 623 returns.

The relief valve 632 assembled to the diaphragm 603 is formed with a sliding shaft portion 634 extending to the valve body portion 604 side, and the second valve body 636 is slidable on the sliding shaft portion 634. It is fitted over. The second valve body 636 connects and disconnects the exhaust port 638 provided in the pressure reducing valve main body 605 and the secondary pressure chamber 642, and is biased by the spring 643 toward the valve seat 644. . The second valve body 636 is provided with a valve body hole 636b to balance the pressure.

A threaded portion is formed at the tip of the sliding shaft portion 634 of the relief valve 632, and the stem 649 is fixed thereto. The stem 649 is in contact with the valve head 645a at the upper end of the first valve body 645, and drives the first and second valve bodies 645 and 636 in accordance with the movement of the diaphragm 603 that moves by receiving the secondary pressure.

Pressure reducing valve with air pressure relief 60 constructed as described above
0 indicates that the flow rate / secondary pressure characteristic is switched by the operation of the switching valve 607, like the pressure reducing valve 53 with relief for air pressure.
When the secondary pressure further fluctuates, it operates as follows.

When the secondary pressure becomes lower than the set pressure, the balance between the sum of the force received by the diaphragm 603 and the biasing force of the spring 647 of the first valve body 645 and the biasing force of the spring 628 is lost, so the relief valve 632 is pushed down. As a result, the first
The valve body 645 is pushed down, and the primary pressure chamber 641 to the secondary pressure chamber 642
High pressure air is flown into, the secondary pressure immediately rises and is adjusted to the set pressure.

On the other hand, when the secondary pressure becomes higher than the set pressure, the balance of the force acting on the relief valve 632 is reversed, and the relief valve 632 moves upward. As a result, the second valve body 636 is pushed up, and a large amount of high-pressure air in the secondary pressure chamber is discharged from the exhaust port.
Exhausted to the 638 side, the pressure in the secondary pressure chamber 642 immediately drops and is adjusted to the set pressure. Pressure reducing valve 53 with air pressure relief
In the case where the secondary pressure becomes higher than the set pressure, the air that has passed through the relief valve 32 from the orifice 42a further escapes to the atmosphere through the bleed hole 22a. Thus, the pressure adjustment by the pressure reducing valve 600 of this embodiment is extremely quick.

Based on FIG. 10, this pressure reducing valve with pneumatic relief 60
The pneumatic circuit using 0 will be further described. FIG. 10 is a pneumatic circuit diagram showing a pneumatic cylinder operating circuit using the pressure reducing valve 600 (600a, 600b) with the pneumatic relief. As shown in the figure, this pneumatic cylinder operating circuit has a pressure source 650, source pressure valves 600a and 600b with reliefs for pneumatic pressure, and three-port two-position switching valves 607a and 60, similar to the configuration shown in FIG.
7b, and the pneumatic cylinder 660 further has a piston rod grip mechanism 660a. Also, the ones corresponding to the 3-port 2-position switching valves 57 and 59 are not provided. Since the other parts are the same, they are omitted.

Fig. 11 (A) shows the flow rate / secondary pressure characteristics when air flows from the primary pressure side to the secondary pressure side through the pressure reducing valves 600a and 600b, and the characteristics when air flows from the secondary pressure side to the exhaust side. First
Each is shown in FIG. 11 (B). As shown, the switching valve 607
When a or 607b is switched, characteristic line PA or PB, characteristic line
It is assumed that the handle 625 and the adjusting screw 620 are adjusted so as to switch to QA or QB. The pressure reducing valve 600a and the pressure reducing valve 600b are, to be precise, their secondary values in consideration of the weight W applied to the piston rod 661 and the force difference (thrust force difference) due to the difference in the pressure receiving areas on both sides of the piston rod 661. The pressure is adjusted.

In the pneumatic circuit configured as above, the switching valve
Both 607a and 607b are switched to the normal position DW, and the flow rate / secondary pressure characteristics are set to the low pressure side (characteristic P of FIG. 11 (A), (B)).
(A, QA side), it is assumed that the forces acting on the piston rod 661 of the pneumatic cylinder 660 are balanced and the piston rod 661 is stationary by the piston rod grip mechanism 660a.

When the rod 661 is moved by the pneumatic cylinder 660 from this state, it is performed as follows.

That is, the grip mechanism 660 is released and the switching valve 607 is released.
When a is switched to the position UP side, the pressure reducing valve 600a becomes the pressurizing side and the pressure reducing valve 600b becomes the back pressure side, and the flow rate / secondary pressure characteristic of the pressure reducing valve 600a switches to the characteristic PB side in FIG. As a result, the piston rod 661 starts descending. As the piston rod 661 descends, air begins to flow into the upper chamber of the piston rod 661 via the pressure reducing valve 600a, so the pressure is point AO in FIG.
Changes to the point PBt. On the other hand, the air in the lower chamber of the piston rod 661 flows through the pressure reducing valve 600b, and its pressure on the back pressure side changes from point AO in FIG. 11 (B) to point QAt. As a result, the piston rod 661 of the pneumatic cylinder 660 is
It is lowered at a speed corresponding to the difference between t and QAt (more accurately, the thrust force and the weight W which are the products of each pressure and its pressure receiving area). In this case, it will descend rapidly.

On the other hand, with the switching valve 607a held at the position DW, the switching valve 60
When 7b is switched to the position UP side, the pressure reducing valve 600b side becomes the pressurizing side, and the flow rate / secondary pressure characteristic is switched to the characteristic PB in FIG. 11 (A). Further, the pressure reducing valve 600a is on the back pressure side, and its flow rate / secondary pressure characteristic is switched to the characteristic QA shown in FIG. 11 (B). As a result, the piston rod 661 is quickly raised.

As described above, the pressure reducing valve with pneumatic relief 600
According to the pneumatic circuit using a and b, the cylinder rod 661 of the pneumatic cylinder 660 can be smoothly moved / stopped / restarted. This is because the pressure reducing valve 600a, b for air pressure relief adjusts the secondary pressure very sensitively regardless of the amount of air flow, and the secondary pressure is set by the handle (set pressure). ), And by switching the switching valve 607, the flow rate / secondary pressure characteristic is switched, and the secondary pressure when the pressure reducing valve 600 is changed from a state in which no air is flowing to a predetermined flow rate to This is because it can be adjusted to a predetermined pressure.

Further, since the pressure control is adopted in this configuration example, the piston rod 661 can be moved smoothly as compared with the back pressure control type pneumatic circuit (FIG. 1) using the exhaust throttle valve for speed adjustment. There is an advantage that That is, in the system using the exhaust throttle valves 57 and 59, if the descent is performed at a relatively slow speed (intermediate speed), the throttle of the exhaust throttle valves 57 and 59 for speed control must be reduced. Therefore, the start of the descending movement tends to be relatively late. On the other hand, in this configuration example, since the pressure control is adopted, the descent is started with good responsiveness, and such a problem does not occur.

In addition, the descending speed depends on the flow rate on the high pressure side of the pressure reducing valve 600a.
Depending on the secondary pressure characteristic, the speed of one-side increase can be adjusted separately by the flow rate on the high pressure side of the pressure reducing valve 600b and the secondary pressure characteristic. Further, in the case of an intermediate stop, the back pressure control method exhausts the gas, whereas the pressure in both chambers of the piston rod is maintained, so that the control can be simplified and energy saving can be achieved.

In the pneumatic circuit using the pressure reducing valve 600 of this configuration example,
Both pressure reducing valves 600a and 600b were configured to balance the air in the cylinder 660 when the low pressure side flow rate / secondary pressure characteristics were used.However, both valves are configured to balance the air pressure when the high pressure side is selected. Good. In this case, it is necessary to adjust the biasing force of the spring 633 at the time of switching to the low-pressure side characteristic to a desired value, so as shown in the pressure reducing valve 700 for air pressure relief in FIG. Provide the piston 623
This can be achieved by adjusting the retreat distance LB of. When balancing at high pressure, one of the switching valves 607a (or b) is switched to the position DW, and the flow rate / secondary pressure characteristics of the pressure reducing valve 600a (or b) are changed from the characteristics QB to QA in FIG. 11 (B). Switch to. Since air starts to flow through the pressure reducing valves 600a and 600b, the pressure on the back pressure side changes from point BO to point QA.
The pressure on the pressurizing side changes from point BO to point PBt.
As a result, the relationship between the pressures on both sides of the piston rod 661 (PBt>
QAt) causes the piston rod 661 of the cylinder 660 to move to the low pressure side. If the high pressure side is balanced in this way, the responsiveness of stop and operation will be high, and
It also contributes to energy saving.

Next, another example of the configuration of the pressure reducing valve with a relief for air pressure will be described. FIG. 13 and FIG. 14 are cross-sectional views showing an example of the structure of the pressure reducing valve with air pressure relief. This pressure reducing valve
800 is a relief valve 83 mounted on diaphragm 803
2 and the valve body 830 abutted on the lower end of the relief valve 832.
With. As understood from the figure, when the secondary pressure falls below the set pressure, the valve body 830 is pushed down by the relief valve 832, and the secondary pressure rapidly rises. On the other hand, when the secondary pressure exceeds the set pressure, the relief valve 832 moves upward and separates from the valve body 830, and the secondary pressure rapidly decreases. Further, the piston 823 is moved by the distance L and the flow rate / secondary pressure characteristic is switched by switching the 3-port 2-position switching valve 807, as in the other configuration examples described above.

Further, as shown in FIG. 14, two valve seats 922 and 924, which are biased in opposite directions by a spring 910, can be slid on the tip of the relief valve 932 as the valve body of the pneumatic pressure reducing valve 900 with relief. It may be configured to be attached to. This pressure reducing valve 900
However, it operates in the same manner as the configuration example described above.

Although some examples of the pressure reducing valve with a relief for pneumatic pressure have been described above, the pressure reducing valve with a pneumatic pressure relief used in the present invention is not limited to such a configuration example. For example, hydraulic pressure is used as a switching mechanism. Needless to say, the present invention can be implemented in various modes such as a configuration or a configuration in which the piston of the pressure reducing valve with air pressure relief is directly slid by an actuator such as a motor or a solenoid.

The following control is possible using the pressure reducing valve and the pneumatic circuit shown in FIGS. 9 to 14.

That is, as described above, as the first control example, the switching valve
The pressure side characteristic change due to the switching of 607 (807,907) is adjusted as described above by adjusting the pressure reducing valve 600 (700,800,900) and set as the PA characteristic and the PB characteristic as shown in FIG. 11 (A). The pressure on the pressurizing side may be increased when the 661 is moved. That is, AO may be changed to PBt (AO <PBt) when the assumed pressurized air flow rate t is supplied. By doing so, it is possible to quickly start the movement of the rod 661.

As a second control example, both may be set to the high pressure side when the rod 661 is stopped, and the back pressure side may be switched to the low pressure side when moving.

That is, the characteristic diagram on the exhaust pressure side corresponding to FIG.
As shown in the figure (B), when the rod 661 is stopped (or when the induction motor 3 moves at a very low speed), both characteristics PB
Set to (QB) the pressure is the same for BO. However, when moving by air pressure, switch the characteristic of the exhaust pressure side to QA,
Change the pressure from BO to QAt (BO> QAt). On the contrary, when stopped (or when moving at a very low speed by the induction motor 3), the exhaust pressure side is switched from QAt to BO. This way,
Since the pressure change from low pressure to high pressure is generally rapid,
A more responsive stop (or a transition to the slow speed movement by the induction motor 3) becomes possible.

As a third control example, switching valves 57 and 59 may be combined with the configuration of the second control example to switch the moving speed by air pressure in two stages. That is, when the rod 661 is rapidly moved by the air pressure, the switching valves 57 and 59 are switched to the atmosphere open to perform a rapid movement, approach a predetermined stroke to some extent, and immediately before switching to the fine speed drive of the induction motor 3. In addition, as the intermediary operation, the air pressure may be used for the slow movement in the second method.

In addition, as a fourth control example, even when the rods 25 and 661 including the pressure reducing valves 53 and 55 of FIG. 3 are stopped (or when the induction motor 3 is moving at a very low speed), the piston side is applied to the pressurizing side in consideration of frictional force. The pressure may be set higher than that on the exhaust pressure side so that the 23,661 do not move.

In addition, pressure reducing valve with relief for air pressure 53,55,600,700,800,90
0 adjustment screw 71,620,720,820,920, handle 81,625,725,
825 and 925 are rotationally driven by a known means by the control circuit 11,
It is possible to realize a control that is automatically adjusted as necessary and is combined with the above-described control.

EFFECTS OF THE INVENTION In the pneumatic cylinder device of the present invention, the piston rod is rapidly moved by the linear movement adjusting means, and the rotational movement generated by the rotary electric motor is decelerated to be converted into the linear movement to move the piston rod at a fine speed. Can be stopped. Therefore, if the speed is adjusted roughly by the linear motion adjusting means, and if the speed is moved or stopped by the precise speed adjustment using the rotary motor as the drive source, the piston rod can be moved quickly and stopped accurately. Moreover,
Since I am using a rotary electric motor without using oil,
Repairs are easy and efficient.

[Brief description of drawings]

FIG. 1 is a schematic system diagram of a gas pressure cylinder device showing an embodiment of the present invention, FIG. 2 is a partial sectional view showing details of a part of a main part thereof, and FIG. 3 is a pressure reducing valve with a relief for pneumatic pressure. FIG. 4 is a cross-sectional view, FIG. 4 is a graph showing the relationship between the flow rate and the secondary pressure characteristic in the embodiment, FIG. 5 is a flowchart of the processing executed by the control circuit, and FIG. 6 is a schematic system diagram of the second embodiment. FIG. 7 is a schematic system diagram of the third embodiment, FIG. 8 is a schematic system diagram of the third embodiment, and FIGS. 9, 12, 13, and 14 are cross-sectional views of another configuration example of a pressure reducing valve with a pneumatic relief, FIG. 10 is an air circuit diagram in which the pressure reducing valve with air pressure relief is applied, and FIGS. 11A and 11B show the relationship between the flow rate and the secondary pressure characteristic in one adjustment example of the pressure reducing valve with air pressure relief. It is a graph showing. 1,411 …… Linear driving force output section 3,301,401,501 …… Induction motor (rotational driving force output section) 5,413 …… Rotation / straight line conversion section 7 …… Pneumatic circuit, 11 …… Control circuit 17,307,407,507 …… Rotary encoder 21,311,519,660 …… Pneumatic cylinder 23,313,429,521 ...... Piston 25,315,417,523,661 …… Rod 41,319,415,517 …… Feed screw 39,323,418,527 …… Nut

Claims (1)

[Claims] 1. A pneumatic cylinder having a linearly moving piston rod, and switching between a driving mode for driving the piston rod and a non-driving mode for not driving the piston rod by supplying and discharging gas to and from the pneumatic cylinder. A linear motion adjusting means for adjusting the moving speed of the piston rod, a motion converting means connected to the piston rod for mutually converting a linear motion and a rotary motion, and a rotary encoder for detecting the rotational speed of the rotary motion. A pneumatic cylinder device comprising: a rotary electric motor that makes a rotary motion; a speed reduction mechanism that reduces the rotary motion of the rotary electric motor; and the speed reduction mechanism that is interposed between the speed reduction mechanism and the motion conversion means. Clutch mode for switching from a transmission mode for transmitting rotary motion to the motion converting means and a cutoff mode for interrupting transmission of the rotary motion And adjusting the amount of electric power to the rotary motor, and when the clutch mechanism is set to the transmission mode according to the detection value of the rotary encoder, the linear motion adjusting means is set to the non-drive mode to adjust the linear motion. And a control circuit for setting the clutch mechanism in the disengagement mode when the means is set in the drive mode.