JPH0810765A - Dissolved oxygen reduction device - Google Patents
Dissolved oxygen reduction deviceInfo
- Publication number
- JPH0810765A JPH0810765A JP15199894A JP15199894A JPH0810765A JP H0810765 A JPH0810765 A JP H0810765A JP 15199894 A JP15199894 A JP 15199894A JP 15199894 A JP15199894 A JP 15199894A JP H0810765 A JPH0810765 A JP H0810765A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- dissolved oxygen
- fiber membrane
- hollow fiber
- outer cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Removal Of Specific Substances (AREA)
Abstract
(57)【要約】
【目的】 中空糸膜分離法により水中の溶存酸素濃度を
１０ｐｐｂ以下にまで低減することができる溶存酸素低
減装置を提供する。
【構成】 中空糸膜モジュール２を、パーフルオロアル
コキシ樹脂、四フッ化エチレン樹脂又はフッ化プロピレ
ン樹脂のいずれかで形成する。中空糸膜モジュール２を
収納する外筒１を、ポリビニリデンフルオライド樹脂、
ポリエーテルエーテルケトン樹脂、ポリフェニレンサル
ファイド樹脂又は金属若しくは表面に金属を被覆した合
成樹脂のいずれかで形成する。
(57) [Summary] [PROBLEMS] To provide a dissolved oxygen reduction device capable of reducing dissolved oxygen concentration in water to 10 ppb or less by a hollow fiber membrane separation method. [Structure] The hollow fiber membrane module 2 is formed of either a perfluoroalkoxy resin, a tetrafluoroethylene resin, or a propylene fluoride resin. The outer cylinder 1 for accommodating the hollow fiber membrane module 2 is made of polyvinylidene fluoride resin,
It is formed of either a polyether ether ketone resin, a polyphenylene sulfide resin, or a metal or a synthetic resin whose surface is coated with a metal.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、溶存酸素低減装置に関
し、詳しくは、中空糸膜分離法により水中の溶存酸素を
低減する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for reducing dissolved oxygen, and more particularly to a device for reducing dissolved oxygen in water by a hollow fiber membrane separation method.
【０００２】[0002]
【従来の技術】水は、多くの産業分野で使用されるが、
通常、水中には、大気から容易に溶け込む酸素が溶解し
ている。水中の溶存酸素は、原子炉や各種機器の冷却水
あるいはボイラー用水等では、配管等の錆の発生の原因
となり、また、半導体分野においては、最近の半導体素
子の集積度の急速な向上に伴って微量の溶存酸素もシリ
コンウェハ表面の自然酸化膜の形成の原因となるため、
微量の溶存酸素でも有害な不純物とされている。このた
め、溶存酸素の除去低減を目的とした種々の水処理が行
われている。Water is used in many industrial fields,
Usually, oxygen which is easily dissolved from the atmosphere is dissolved in water. Dissolved oxygen in water is a cause of rust in piping etc. in cooling water of reactors and various equipment or water for boilers, etc., and in the semiconductor field, with the recent rapid increase in the degree of integration of semiconductor elements. And a small amount of dissolved oxygen also causes the formation of a natural oxide film on the surface of the silicon wafer,
Even trace amounts of dissolved oxygen are considered to be harmful impurities. For this reason, various water treatments have been performed for the purpose of reducing the removal of dissolved oxygen.
【０００３】水中の溶存酸素を低減する一手段として、
膜分離法が知られている。この方法は、水相と減圧気相
との間に分離膜を介して酸素分圧差により水相中の溶存
酸素のみを減圧気相中に拡散透過させて排気除去する方
法であり、膜面積を広くするために、一般には中空糸膜
モジュールを用いている。As one means for reducing dissolved oxygen in water,
Membrane separation methods are known. This method is a method in which only the dissolved oxygen in the water phase is diffused and permeated into the depressurized gas phase due to the oxygen partial pressure difference between the water phase and the depressurized gas phase, and the exhaust gas is removed. Generally, a hollow fiber membrane module is used to make it wider.
【０００４】図１は、上記膜分離法を実施するための中
空糸膜モジュールを用いた溶存酸素低減装置の一般的な
構成を示すものである。この溶存酸素低減装置は、外筒
１と、該外筒１内に配設した中空糸膜モジュール２と、
外筒１内を排気する排気ポンプ３と、外筒１内に不活性
ガスを導入する不活性ガス導入口４とを備えており、原
水を中空糸膜モジュール２内に導入するとともに、排気
ポンプ３で中空糸膜モジュール２外の外筒内空間５を減
圧することにより、原水中の溶存酸素を低減するように
構成されている。FIG. 1 shows a general structure of a dissolved oxygen reduction device using a hollow fiber membrane module for carrying out the above-mentioned membrane separation method. This dissolved oxygen reduction device comprises an outer cylinder 1, a hollow fiber membrane module 2 arranged in the outer cylinder 1,
An exhaust pump 3 for exhausting the inside of the outer cylinder 1 and an inert gas inlet 4 for introducing an inert gas into the outer cylinder 1 are provided, and raw water is introduced into the hollow fiber membrane module 2 and an exhaust pump. It is configured to reduce the dissolved oxygen in the raw water by decompressing the outer cylinder inner space 5 outside the hollow fiber membrane module 2 at 3.
【０００５】なお、上記処理中に、不活性ガス導入口４
から窒素等の不活性ガスを外筒内空間５に導入すること
により、排気ポンプ３からの汚染物質の逆拡散を阻止す
ることができるとともに、気相側膜面近傍にガスの流れ
を発生させることができ、膜を拡散透過してくる酸素ガ
スが気相側膜面近傍に停滞して液相からの酸素ガスの拡
散透過を阻害することを防止し、酸素の拡散透過を促進
することができる。During the above processing, the inert gas inlet 4
By introducing an inert gas such as nitrogen into the outer cylinder inner space 5 from the above, it is possible to prevent the back diffusion of pollutants from the exhaust pump 3 and to generate a gas flow in the vicinity of the gas phase side film surface. It is possible to prevent the oxygen gas that diffuses and permeates through the membrane from stagnation in the vicinity of the gas-phase side membrane surface and hinders the diffusion and permeation of oxygen gas from the liquid phase, and promotes the diffusion and permeation of oxygen. it can.
【０００６】このような溶存酸素低減装置において、従
来の装置では、前記外筒１をポリ塩化ビニルで形成し、
前記中空糸膜モジュール２の分離膜をポリカーボネート
で形成するのが一般的であった。In such a dissolved oxygen reducing device, in the conventional device, the outer cylinder 1 is made of polyvinyl chloride,
It was common to form the separation membrane of the hollow fiber membrane module 2 from polycarbonate.
【０００７】[0007]
【発明が解決しようとする課題】上記中空糸膜分離法
は、装置が小型で、不活性ガス導入等の処置を講ずれ
ば、水中の溶存酸素を２０〜３０ｐｐｂ程度まで低減で
きる優れた方法であるが、半導体分野におけるウェハ洗
浄工程等の特定の工程で要求されている溶存酸素濃度１
０ｐｐｂ以下の超純水には十分に対応できなかった。The above-mentioned hollow fiber membrane separation method is an excellent method in which the apparatus is small and the dissolved oxygen in water can be reduced to about 20 to 30 ppb if measures such as introduction of an inert gas are taken. However, the dissolved oxygen concentration required in specific processes such as wafer cleaning processes in the semiconductor field 1
It could not sufficiently cope with ultrapure water of 0 ppb or less.
【０００８】また、水の純度の面でも、分離膜に用いて
いるポリカーボネート膜から不純物が溶出し、処理水中
の例えば全有機性炭素濃度が５０ｐｐｂ程度上昇する問
題もあった。そのため、溶存酸素を低減した後、ポリカ
ーボネートから溶出した不純物を除去するため、限外濾
過装置等を設置しなければならず、システムの複雑化と
経済的損失を招くなどの不都合があった。Further, in terms of water purity, there is also a problem that impurities are eluted from the polycarbonate membrane used for the separation membrane and the concentration of, for example, total organic carbon in the treated water rises by about 50 ppb. Therefore, in order to remove the impurities eluted from the polycarbonate after reducing the dissolved oxygen, an ultrafiltration device or the like must be installed, which causes inconveniences such as system complexity and economic loss.
【０００９】そこで、本発明は、中空糸膜分離法により
水中の溶存酸素濃度を１０ｐｐｂ以下にまで低減するこ
とができる溶存酸素低減装置を提供することを目的とし
ている。Therefore, an object of the present invention is to provide a dissolved oxygen reduction device capable of reducing the dissolved oxygen concentration in water to 10 ppb or less by the hollow fiber membrane separation method.
【００１０】[0010]
【課題を解決するための手段】上記した目的を達成する
ため、本発明の中空糸膜分離法による溶存酸素低減装置
は、第１の構成として、中空糸膜モジュールの分離膜
に、パーフルオロアルコキシ樹脂、四フッ化エチレン樹
脂又はフッ化プロピレン樹脂のいずれかで形成したこと
を特徴としている。In order to achieve the above-mentioned object, the first embodiment of the apparatus for reducing dissolved oxygen by the hollow fiber membrane separation method of the present invention is to use perfluoroalkoxy in the separation membrane of the hollow fiber membrane module. It is characterized in that it is formed of resin, tetrafluoroethylene resin or propylene fluoride resin.
【００１１】また、本発明の第２の構成は、前記中空糸
膜モジュールを包む外筒を、ポリビニリデンフルオライ
ド樹脂、ポリエーテルエーテルケトン樹脂、ポリフェニ
レンサルファイド樹脂又は金属若しくは表面に金属を被
覆した合成樹脂のいずれかで形成したことを特徴として
いる。A second structure of the present invention is that the outer cylinder enclosing the hollow fiber membrane module is made of polyvinylidene fluoride resin, polyetheretherketone resin, polyphenylene sulfide resin, or a metal or a surface-coated metal. It is characterized by being formed of either resin.
【００１２】[0012]
【作 用】膜分離法による溶存酸素低減装置は、水相／
膜／減圧気相の構成において、水相に溶存している酸素
ガスを、分離膜を介して減圧気相に拡散透過させるもの
である。一般に、分離膜の両面が共に気相の場合に分子
が分離膜中を拡散するとき、該分子の拡散速度Ｆは、分
離膜両面の酸素分圧差をＰ、拡散係数をＰｍ、膜面積を
Ａ、膜厚をｄとすると、Ｆ＝Ａ・Ｐｍ・Ｐ／ｄで表され
る。上記のように分離膜の片方が液相の場合にも、定性
的には、この関係から類推できる。上記の溶存酸素の除
去速度、すなわち、拡散速度Ｆを大きくするためには、
分離膜の面積を大きくし、拡散係数が大きい膜を使い、
分圧差を大きくし、そして、膜厚を薄くすればよいこと
が判る。[Operation] Dissolved oxygen reduction device using membrane separation method
In the membrane / reduced pressure gas phase configuration, the oxygen gas dissolved in the water phase is diffused and permeated into the reduced pressure gas phase through the separation membrane. Generally, when a molecule diffuses in the separation membrane when both sides of the separation membrane are in a gas phase, the diffusion rate F of the molecule is such that the oxygen partial pressure difference between both sides of the separation membrane is P, the diffusion coefficient is Pm, and the membrane area is A. , And the film thickness is d, F = A · Pm · P / d. Even when one of the separation membranes is in the liquid phase as described above, it can be qualitatively inferred from this relationship. In order to increase the above-mentioned removal rate of dissolved oxygen, that is, the diffusion rate F,
Increase the area of the separation membrane, use a membrane with a large diffusion coefficient,
It is understood that the partial pressure difference should be increased and the film thickness should be reduced.
【００１３】面積を大きくするためには、中空糸膜を使
用ればよいが、膜厚については、強度を保つために限界
があるし、分圧差についても、水相の圧力を高くして減
圧気相の圧力を低くするのに限界がある。そこで、拡散
係数の大きい膜の選定が重要となる。In order to increase the area, a hollow fiber membrane may be used. However, the membrane thickness has a limit in order to maintain strength, and the partial pressure difference is reduced by increasing the pressure of the aqueous phase. There is a limit to lowering the gas phase pressure. Therefore, it is important to select a film having a large diffusion coefficient.
【００１４】特に、半導体分野で用いる純水中の酸素を
除去する場合は、上記拡散係数に加えて、膜からの汚染
のない材料を選択することが、より一層重要である。In particular, when removing oxygen in pure water used in the field of semiconductors, in addition to the above diffusion coefficient, it is even more important to select a material that does not cause contamination from the film.
【００１５】上述のパーフルオロアルコキシ樹脂、四フ
ッ化エチレン樹脂及びフッ化プロピレン樹脂は、それぞ
れ拡散係数が大きく、かつ、分離膜からの汚染のない材
料である。例えば、パーフルオロアルコキシ樹脂は、拡
散係数が６×１０-8ｃｃ・ｃｍ／ｃｍ2 ・ｓｅｃ・ａｔ
ｍであり、ポリカーボネートの１×１０-8ｃｃ・ｃｍ／
ｃｍ2 ・ｓｅｃ・ａｔｍの６倍であり、さらに不純物の
溶出もほとんど無い。四フッ化エチレン樹脂及びフッ化
プロピレン樹脂も同様である。The above-mentioned perfluoroalkoxy resin, tetrafluoroethylene resin and propylene fluoride resin are materials having a large diffusion coefficient and free from contamination from the separation membrane. For example, perfluoroalkoxy resin has a diffusion coefficient of 6 × 10 −8 cc · cm / cm 2 · sec · at.
m, 1 × 10 −8 cc · cm / of polycarbonate
It is 6 times cm 2 · sec · atm, and there is almost no elution of impurities. The same applies to tetrafluoroethylene resin and propylene fluoride resin.
【００１６】また、従来の膜分離法においては、外筒内
の減圧気相をポンプで排気しているため、外気中の酸素
が外筒材料を透過して外筒内に侵入することを考慮して
いなかったので、外筒材料として、通常、経済性や入手
の容易さから塩化ビニルを用いていた。しかし、微量の
溶存酸素を除去する場合、外気からの酸素の透過が溶存
酸素除去能力に影響することを本発明者は知見した。こ
のことから、上述のように、外筒を形成する材料とし
て、ポリビニリデンフルオライド樹脂、ポリエーテルエ
ーテルケトン樹脂、ポリフェニレンサルファイド樹脂又
は金属若しくは表面に金属を被覆した合成樹脂のいずれ
か、すなわち、拡散係数の小さな材料を採用することに
より、外気からの酸素の透過による影響をほとんど無く
すことができ、溶存酸素を極微量にまで低減することが
可能になる。Further, in the conventional membrane separation method, since the depressurized gas phase in the outer cylinder is exhausted by the pump, it is considered that oxygen in the outer air permeates the outer cylinder material and enters the outer cylinder. Therefore, vinyl chloride was usually used as the material for the outer cylinder because of its economical efficiency and availability. However, when removing a small amount of dissolved oxygen, the present inventors have found that the permeation of oxygen from the outside air affects the dissolved oxygen removing ability. From this, as described above, as the material forming the outer cylinder, any one of polyvinylidene fluoride resin, polyetheretherketone resin, polyphenylene sulfide resin or a metal or a synthetic resin coated with a metal on the surface, that is, diffusion. By adopting a material having a small coefficient, it is possible to almost eliminate the influence of permeation of oxygen from the outside air, and it is possible to reduce dissolved oxygen to an extremely small amount.
【００１７】例えば、塩化ビニルの拡散係数は１０-8ｃ
ｃ・ｃｍ／ｃｍ2 ・ｓｅｃ・ａｔｍのオ−ダ−であるの
に対して、上記の各種樹脂材料の拡散係数は、それぞれ
１０-10 ｃｃ・ｃｍ／ｃｍ2 ・ｓｅｃ・ａｔｍのオーダ
ー以下である。また、金属は、酸素をほとんど透過しな
いので、各種のものを用いることができるが、ステンレ
ス鋼等の一般的なものを用いればよく、金属を被覆した
合成樹脂としては、塩化ビニル等の汎用性の材料の表面
に金属メッキを施したものなどを用いればよい。For example, the diffusion coefficient of vinyl chloride is 10 -8 c
While the order is c · cm / cm 2 · sec · atm, the diffusion coefficient of each of the above resin materials is less than the order of 10 −10 cc · cm / cm 2 · sec · atm. is there. Further, since the metal hardly permeates oxygen, various materials can be used, but a general material such as stainless steel may be used, and the synthetic resin coated with the metal is versatile such as vinyl chloride. A material obtained by plating the surface of the material with a metal may be used.
【００１８】なお、分離膜及び外筒のいずれかを上記材
料で形成することにより、従来よりも溶存酸素の除去効
率を向上させることができるが、分離膜を上記材料で形
成することにより、全有機性炭素濃度の増加も抑えるこ
とができ、さらに、両者を併用することにより、全有機
性炭素濃度の増加を抑えながら、存酸素の除去効率を大
幅に向上させることができる。By forming either the separation membrane or the outer cylinder with the above-mentioned material, the efficiency of removing dissolved oxygen can be improved as compared with the conventional case, but by forming the separation membrane with the above-mentioned material, It is also possible to suppress an increase in the concentration of organic carbon, and by using both of them together, it is possible to greatly improve the efficiency of removing existing oxygen while suppressing the increase in the concentration of total organic carbon.
【００１９】[0019]
【実施例】以下、本発明の実施例及び比較例を説明す
る。 実施例１ 図１に示す構造の溶存酸素低減装置において、内径１５
０ｍｍの塩化ビニル製の外筒中に、６００本のパーフル
オロアルコキシ樹脂製の中空糸膜を配置した。膜総面積
は、２３，０００ｃｍ2 である。排気ポンプ３により外
筒内空間５を約１Ｔｏｒｒに保ち、溶存酸素濃度５０ｐ
ｐｂ、全有機性炭素濃度１ｐｐｂの原水を毎時５００リ
ットルで供給した。その結果、処理水中の溶存酸素濃度
は５ｐｐｂに低減し、全有機性炭素濃度は２ｐｐｂにな
った。EXAMPLES Examples and comparative examples of the present invention will be described below. Example 1 In the dissolved oxygen reduction device having the structure shown in FIG.
600 hollow fiber membranes made of perfluoroalkoxy resin were placed in a 0 mm vinyl chloride outer cylinder. The total area of the film is 23,000 cm 2 . Exhaust pump 3 keeps outer cylinder space 5 at about 1 Torr, and dissolved oxygen concentration 50p
Raw water of pb and total organic carbon concentration of 1 ppb was supplied at 500 liters per hour. As a result, the dissolved oxygen concentration in the treated water was reduced to 5 ppb and the total organic carbon concentration was 2 ppb.
【００２０】実施例２ 実施例１において、外筒をポリビニリデンフルオライド
樹脂製とした以外は、実施例１と同様にして試験を行っ
た。その結果、処理水の溶存酸素濃度は２ｐｐｂとな
り、全有機性炭素濃度は２ｐｐｂであった。Example 2 A test was conducted in the same manner as in Example 1 except that the outer cylinder was made of polyvinylidene fluoride resin. As a result, the dissolved oxygen concentration of the treated water was 2 ppb and the total organic carbon concentration was 2 ppb.
【００２１】実施例３ 実施例２において、中空糸膜をポリカーボネート製と
し、原水の供給量を毎時１００リットルとした以外は、
実施例２と同様にして試験を行った。その結果、全有機
性炭素濃度は５０ｐｐｂに増加したが、処理水の溶存酸
素濃度は１０ｐｐｂに低減することができた。Example 3 In Example 2, except that the hollow fiber membrane was made of polycarbonate and the amount of raw water supplied was 100 liters per hour.
The test was conducted in the same manner as in Example 2. As a result, the total organic carbon concentration increased to 50 ppb, but the dissolved oxygen concentration of the treated water could be reduced to 10 ppb.
【００２２】比較例１ 図１に示す構造の溶存酸素低減装置において、塩化ビニ
ル製の外筒と、ポリカーボネート製の中空糸膜とを用い
た以外は実施例３と同様の条件で試験を行った。その結
果、処理水の溶存酸素濃度は２０ｐｐｂまでしか低減で
きず、全有機性炭素濃度は５０ｐｐｂに増加した。Comparative Example 1 A test was conducted under the same conditions as in Example 3 except that a vinyl chloride outer cylinder and a polycarbonate hollow fiber membrane were used in the dissolved oxygen reduction device having the structure shown in FIG. . As a result, the dissolved oxygen concentration of the treated water could be reduced only to 20 ppb, and the total organic carbon concentration increased to 50 ppb.
【００２３】[0023]
【発明の効果】以上説明したように、本発明の溶存酸素
低減装置は、中空糸膜モジュールを、パーフルオロアル
コキシ樹脂、四フッ化エチレン樹脂又はフッ化プロピレ
ン樹脂のいずれかで、中空糸膜モジュールを収納する外
筒を、ポリビニリデンフルオライド樹脂、ポリエーテル
エーテルケトン樹脂、ポリフェニレンサルファイド樹脂
又は金属若しくは表面に金属を被覆した合成樹脂のいず
れかで、それぞれ形成したので、水中の溶存酸素濃度を
１０ｐｐｂ以下にまで低減することができるとともに、
全有機性炭素濃度の上昇も抑えることができ、例えば、
半導体分野で用いられる超純水の溶存酸素低減手段とし
て、特に好適である。As described above, in the dissolved oxygen reduction device of the present invention, the hollow fiber membrane module is made of a perfluoroalkoxy resin, a tetrafluoroethylene resin or a propylene fluoride resin. Since the outer cylinders for storing are formed by either polyvinylidene fluoride resin, polyetheretherketone resin, polyphenylene sulfide resin, or a metal or a synthetic resin whose surface is coated with a metal, the dissolved oxygen concentration in water is 10 ppb. It can be reduced to
An increase in the total organic carbon concentration can also be suppressed, for example,
It is particularly suitable as a means for reducing dissolved oxygen in ultrapure water used in the semiconductor field.
【図１】 中空糸膜モジュールを用いた溶存酸素低減装
置の一般的な構成を示す概略図である。FIG. 1 is a schematic diagram showing a general configuration of a dissolved oxygen reduction device using a hollow fiber membrane module.
【符号の説明】 １…外筒、２…中空糸膜モジュール、３…排気ポンプ、
４…不活性ガス導入口、５…外筒内空間[Explanation of reference numerals] 1 ... Outer cylinder, 2 ... Hollow fiber membrane module, 3 ... Exhaust pump,
4 ... Inert gas inlet, 5 ... Space in outer cylinder
Claims (2)
ジュールと、前記外筒内を排気する排気ポンプとを備え
た中空糸膜分離法による溶存酸素低減装置において、前
記中空糸膜モジュールを、パーフルオロアルコキシ樹
脂、四フッ化エチレン樹脂又はフッ化プロピレン樹脂の
いずれかで形成したことを特徴とする溶存酸素低減装
置。1. A dissolved oxygen reduction device by a hollow fiber membrane separation method comprising an outer cylinder, a hollow fiber membrane module arranged in the outer cylinder, and an exhaust pump for exhausting the inside of the outer cylinder, wherein A dissolved oxygen reduction device characterized in that the fiber membrane module is formed of either a perfluoroalkoxy resin, a tetrafluoroethylene resin or a propylene fluoride resin.
ジュールと、前記外筒内を排気する排気ポンプとを備え
た中空糸膜分離法による溶存酸素低減装置において、前
記外筒を、ポリビニリデンフルオライド樹脂、ポリエー
テルエーテルケトン樹脂、ポリフェニレンサルファイド
樹脂又は金属若しくは表面に金属を被覆した合成樹脂の
いずれかで形成したことを特徴とする溶存酸素低減装
置。2. A dissolved oxygen reduction device by a hollow fiber membrane separation method, comprising: an outer cylinder, a hollow fiber membrane module arranged in the outer cylinder, and an exhaust pump for exhausting the inside of the outer cylinder, An apparatus for reducing dissolved oxygen, characterized in that the cylinder is formed of either a polyvinylidene fluoride resin, a polyether ether ketone resin, a polyphenylene sulfide resin, or a metal or a synthetic resin whose surface is coated with a metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15199894A JPH0810765A (en) | 1994-07-04 | 1994-07-04 | Dissolved oxygen reduction device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15199894A JPH0810765A (en) | 1994-07-04 | 1994-07-04 | Dissolved oxygen reduction device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0810765A true JPH0810765A (en) | 1996-01-16 |
Family
ID=15530837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15199894A Pending JPH0810765A (en) | 1994-07-04 | 1994-07-04 | Dissolved oxygen reduction device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0810765A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0941758A1 (en) * | 1998-03-13 | 1999-09-15 | Celgard Llc | Contactor comprising a shell made of fiber-reinforced, composite body having a fluoropolymer inner surface, and method of making such contactor |
| US10641500B2 (en) | 2017-01-09 | 2020-05-05 | Lg Electronics Inc. | Shelf supporting apparatus and cooking appliance including a shelf supporting apparatus |
-
1994
- 1994-07-04 JP JP15199894A patent/JPH0810765A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0941758A1 (en) * | 1998-03-13 | 1999-09-15 | Celgard Llc | Contactor comprising a shell made of fiber-reinforced, composite body having a fluoropolymer inner surface, and method of making such contactor |
| JPH11319509A (en) * | 1998-03-13 | 1999-11-24 | Celgard Llc | Fiber-reinforced composite body contact device |
| US10641500B2 (en) | 2017-01-09 | 2020-05-05 | Lg Electronics Inc. | Shelf supporting apparatus and cooking appliance including a shelf supporting apparatus |
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