JPH0815250A - Air polluting substance measuring apparatus - Google Patents
Air polluting substance measuring apparatusInfo
- Publication number
- JPH0815250A JPH0815250A JP14770394A JP14770394A JPH0815250A JP H0815250 A JPH0815250 A JP H0815250A JP 14770394 A JP14770394 A JP 14770394A JP 14770394 A JP14770394 A JP 14770394A JP H0815250 A JPH0815250 A JP H0815250A
- Authority
- JP
- Japan
- Prior art keywords
- polluted air
- air
- steam
- water
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000126 substance Substances 0.000 title abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 54
- 238000005070 sampling Methods 0.000 claims abstract description 16
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 239000003344 environmental pollutant Substances 0.000 claims description 16
- 231100000719 pollutant Toxicity 0.000 claims description 16
- 239000000809 air pollutant Substances 0.000 claims description 8
- 231100001243 air pollutant Toxicity 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 3
- 239000010419 fine particle Substances 0.000 abstract description 9
- 238000005259 measurement Methods 0.000 abstract description 6
- 241000894006 Bacteria Species 0.000 abstract description 5
- 239000007787 solid Substances 0.000 abstract description 5
- 241001274961 Rubus repens Species 0.000 abstract 4
- 239000007789 gas Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 10
- 239000002245 particle Substances 0.000 description 7
- 238000009833 condensation Methods 0.000 description 4
- 230000005494 condensation Effects 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 1
- LUJULUIUNNBXKV-UHFFFAOYSA-N [Cl].CCO Chemical compound [Cl].CCO LUJULUIUNNBXKV-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、大気環境汚染、衛生、
医療、半導体関連のクリーンルームに取込まれる大気、
又は各種産業、工業等から排出される排ガスを含む大気
等の大気汚染質計測装置に関する。BACKGROUND OF THE INVENTION The present invention relates to air pollution, hygiene,
Atmosphere taken into clean rooms related to medical treatment and semiconductors,
Also, the present invention relates to a device for measuring air pollutants such as air containing exhaust gas emitted from various industries and industries.
【０００２】[0002]
【従来の技術】従来、大気汚染質の計測方法としては以
下のものがある。 １．大気中の浮遊微粒子の個数濃度をレーザ光線等で光
学的に計測する方法 ２．大気中の浮遊粒子（塵埃）をフィルタ等で捕集し、
これを計測・分析する方法 ３．大気中のガス成分については、大気を溶液等の中を
バブリングさせてガス成分を溶液に溶かし、この溶液を
分析する方法2. Description of the Related Art Conventionally, there are the following methods for measuring air pollutants. 1. A method for optically measuring the number concentration of airborne particles in the atmosphere with a laser beam or the like. Collect airborne particles (dust) with a filter etc.,
Method to measure and analyze this 3. Regarding gas components in the atmosphere, a method in which the atmosphere is bubbled through a solution to dissolve the gas components in the solution and the solution is analyzed.
【０００３】[0003]
【発明が解決しようとする課題】前記の従来の計測方法
において、 １．大気中の微粒子を光学的に計測する方法では、粒子
個数は計測することができるが、粒子の成分は分析する
ことができない。 ２．光学的計測法又はフィルタ等を使う方法では、０．
１μｍ以下のサイズの粒子は検知又は捕集が難しいた
め、０．１μｍ以下の汚染質の定量的計測が不可能であ
る。 ３．大気中のガス成分分析のバブリング法では、大気と
溶液の接触面積が小さいため、定量的計測を行うにはサ
ンプリング時間が長時間となる。 などの問題がある。In the conventional measuring method described above, In the method of optically measuring fine particles in the atmosphere, the number of particles can be measured, but the component of particles cannot be analyzed. 2. In the optical measurement method or the method using a filter or the like, 0.
Since particles with a size of 1 μm or less are difficult to detect or collect, it is impossible to quantitatively measure contaminants with a size of 0.1 μm or less. 3. In the bubbling method for the analysis of gas components in the atmosphere, the contact area between the atmosphere and the solution is small, and therefore the sampling time is long for quantitative measurement. There are problems such as.
【０００４】本発明は、前記の問題点を解決することが
できる大気汚染質計測装置を提供しようとするものであ
る。The present invention is intended to provide an air pollutant measuring device capable of solving the above problems.
【０００５】[0005]
【課題を解決するための手段】本発明の大気汚染質計測
装置は、次の手段を講じた。 （１）汚染大気を連続的に吸引するサンプリング装置、
前記サンプリング装置でサンプリングした汚染大気を冷
却して温度を下げる温度調節器、純水の水蒸気を発生さ
せる水蒸気発生装置、前記水蒸気発生装置で発生した水
蒸気と前記温度調節器で温度調節された汚染大気を混合
する混合器、前記混合器における水蒸気と汚染大気の混
合によって発生した水滴を捕集する捕集装置、及び捕集
装置で捕集した水滴中の成分を分析する分析装置から構
成されることを特徴とする。 （２）汚染大気を連続的に吸引するサンプリング装置、
前記サンプリング装置でサンプリングした汚染大気を冷
却して温度を下げる温度調節器、汚染大気中の汚染成分
を吸収する溶液の蒸気を発生させる蒸気発生装置、前記
蒸気発生装置で発生した蒸気と前記温度調節器で温度調
節された汚染大気を混合する混合器、前記混合器におけ
る汚染大気と蒸気の混合によって発生した液滴を捕集す
る捕集装置、及び捕集装置で捕集した液滴中の成分を分
析する分析装置から構成されることを特徴とする。The air pollutant measuring device of the present invention has the following means. (1) A sampling device that continuously sucks polluted air,
A temperature controller that cools the polluted air sampled by the sampling device to lower the temperature, a steam generator that generates pure water vapor, steam generated by the steam generator, and polluted air whose temperature is controlled by the temperature controller A mixing device that mixes water, a collecting device that collects water droplets generated by mixing water vapor and contaminated air in the mixing device, and an analyzing device that analyzes components in the water droplets collected by the collecting device. Is characterized by. (2) Sampling device that continuously sucks polluted air,
A temperature controller that cools the polluted air sampled by the sampling device to lower the temperature, a steam generator that generates a vapor of a solution that absorbs a pollutant component in the polluted atmosphere, a steam generated by the vapor generator, and the temperature control Mixer for mixing polluted air whose temperature is controlled by a mixer, a collector for collecting droplets generated by mixing of polluted air and vapor in the mixer, and components in the droplets collected by the collector It is characterized by comprising an analysis device for analyzing.
【０００６】[0006]
【作用】前記本発明（１）においては、サンプリング装
置によって汚染大気をサンプリングし、サンプリングし
た汚染空気を温度調節器において低温になるように冷却
して温度調節する。一方、水蒸気発生装置により純水か
ら水蒸気を発生させ、前記低温の汚染大気と前記水蒸
気、望しくは１００℃程度の水蒸気（乾き状態）を混合
器において混合させ、大気中に汚染質として含まれる微
粒子を凝縮核として水蒸気を凝縮させ、水滴を発生させ
る。発生した水滴を遠心分離法や静電分離法などを用い
た捕集装置によって捕集し、捕集した水滴中の成分を分
析装置で分析する。In the present invention (1), the polluted air is sampled by the sampling device, and the polluted air thus sampled is cooled to a low temperature in the temperature controller to adjust the temperature. On the other hand, steam is generated from pure water by a steam generator, and the low temperature polluted atmosphere and the steam, preferably about 100 ° C. steam (dry state) are mixed in a mixer to be contained in the atmosphere as pollutants. Water vapor is condensed by using fine particles as condensation nuclei to generate water droplets. The generated water droplets are collected by a collector using a centrifugal separation method or an electrostatic separation method, and the components in the collected water droplets are analyzed by an analyzer.
【０００７】以上のように、本発明（１）では、サンプ
リングされ温度が下げられた汚染大気中の微粒子を凝縮
核として水蒸気を凝縮させて水滴とするために、大きさ
が０．１μｍ以下の汚染大気中の浮遊微粒子も水滴中に
取り込まれ、また汚染大気中の水溶性ガスも水滴中に溶
け込むことになる。従って、水滴には汚染大気中の微粒
子（固体、液体、バクテリア等）と水溶性ガス等が効率
よく取り込まれる。この水滴を分析装置で分析すること
によって、汚染大気中の粒子状汚染質の個数濃度、成分
及びガス状汚染質の成分等を同時に正確に計測すること
ができる。As described above, in the present invention (1), in order to condense water vapor by using fine particles in the polluted air sampled and lowered in temperature as condensation nuclei to form water droplets, the size is 0.1 μm or less. The suspended particles in the polluted air are also taken into the water droplets, and the water-soluble gas in the polluted air is also dissolved in the water droplets. Therefore, fine particles (solid, liquid, bacteria, etc.) and water-soluble gas in the polluted air are efficiently taken in the water droplets. By analyzing the water droplets with an analyzer, the number concentration of particulate pollutants in the polluted atmosphere, components, components of gaseous pollutants, and the like can be accurately measured at the same time.
【０００８】前記本発明（２）は、前記本発明（１）に
おける水蒸気を汚染大気中の汚染ガス等の成分を吸収す
る溶液の蒸気に置換したものに相当し、汚染大気中のガ
ス状等の汚染質が水溶性でない場合においてもこれを吸
収して分析することができる。The present invention (2) corresponds to the one in which the water vapor in the present invention (1) is replaced with the vapor of a solution that absorbs a component such as a pollutant gas in the polluted air. Even if the pollutant is not water-soluble, it can be absorbed and analyzed.
【０００９】[0009]
【実施例】本発明の一実施例を、図１によって説明す
る。２は汚染大気１を連続的にサンプリングするサンプ
リング装置、３は前記サンプリング装置２でサンプリン
グされた汚染大気を冷却して温度を下げる温度調節器、
５は純水タンク４内の純水が供給され連続的に水蒸気７
を発生する水蒸気発生装置、６は温度調節器３からの汚
染大気と水蒸気発生装置からの水蒸気７を混合する混合
器、８は混合器６で混合された汚染大気と水蒸気が導入
され前記混合によって発生した水滴を捕集する液滴捕集
装置である。液滴捕集装置８からは水滴を分離した気体
が大気放出１２され、捕集された水滴は、凝縮水９とし
て凝縮水タンク１０に貯えられ、分析装置１１へ送られ
るようになっている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described with reference to FIG. 2 is a sampling device for continuously sampling the polluted air 1; 3 is a temperature controller for cooling the polluted air sampled by the sampling device 2 to lower the temperature;
5 is pure water in the pure water tank 4 and is continuously supplied with water vapor 7
Is a mixer for mixing the polluted air from the temperature controller 3 and the steam 7 from the steam generator, 8 is the polluted atmosphere and steam mixed in the mixer 6 and is introduced by the mixing. It is a droplet collecting device that collects generated water droplets. The gas from which the water droplets have been separated is released into the atmosphere 12 from the droplet collecting device 8, and the collected water droplets are stored in the condensed water tank 10 as condensed water 9 and sent to the analysis device 11.
【００１０】本実施例では、汚染大気１を、サンプリン
グ装置２で連続的に吸込み温度調節器３で冷却して温度
調節を行って約１０℃の低温とする。一方、水蒸気発生
装置５により純水から１００℃程度の乾き水蒸気７を発
生させ、低温の汚染大気と水蒸気を混合器６で混合さ
せ、汚染大気中の浮遊微粒子を凝縮核として、水蒸気を
凝縮させ水滴を発生させる。更に、汚染大気中の水溶性
ガスも発生した水滴へ溶け込ませる。このように水滴が
発生した汚染大気と水蒸気の混合物は、液滴捕集装置８
により水滴を気体より分離して、凝縮水９として、凝縮
水タンク１０へ溜める。水滴を分離した気体は大気放出
１２される。前記の捕集された凝縮水を分析装置１１で
分析して大気汚染質成分を調べる。In this embodiment, the polluted air 1 is continuously sucked by the sampling device 2 and cooled by the temperature controller 3 to adjust the temperature to a low temperature of about 10 ° C. On the other hand, the steam generator 5 generates dry steam 7 of about 100 ° C. from pure water, and the low temperature polluted atmosphere and steam are mixed in the mixer 6, and the steam is condensed by using the suspended fine particles in the polluted air as condensation nuclei. Generate water droplets. Further, the water-soluble gas in the polluted air is also dissolved in the generated water droplets. The mixture of polluted air and water vapor in which the water droplets are generated in this way is collected by the droplet collecting device 8
Thus, the water droplets are separated from the gas and stored as condensed water 9 in the condensed water tank 10. The gas from which the water droplets have been separated is released into the atmosphere 12. The collected condensed water is analyzed by the analyzer 11 to examine air pollutant components.
【００１１】本実施例では、サンプリングされ温度が下
げられた汚染大気中の微粒子を凝縮核として混合器６に
おいて水蒸気を凝縮させて水滴としているために、大き
さが０．１μｍ以下の汚染大気中の浮遊微粒子も効果的
に水滴中に取り込まれ、また、汚染大気中の水溶性ガス
も水滴中に溶け込むことになる。In the present embodiment, since fine particles in the polluted air sampled and lowered in temperature are used as condensation nuclei to condense water vapor in the mixer 6 into water droplets, the size of the polluted air in the polluted atmosphere is 0.1 μm or less. The suspended fine particles are effectively taken into the water droplets, and the water-soluble gas in the contaminated atmosphere is also dissolved into the water droplets.
【００１２】従って、前記水滴中には汚染大気中の微粒
子（固体、液体、バクテリヤ等）と水溶性ガス等が効率
よく取り込まれ、これを分析装置で分析することによっ
て、汚染大気中の粒子状汚染質（固体、液体、バクテリ
ア等）の個数濃度、成分及び液状、ガス状汚染質の成分
等を同時に正確に計測することができる。Therefore, fine particles (solids, liquids, bacteria, etc.) in the polluted air, water-soluble gas, etc. are efficiently taken into the water droplets, and by analyzing this with an analyzer, the particulate matter in the polluted air is analyzed. It is possible to accurately measure the number concentration of pollutants (solids, liquids, bacteria, etc.), components and liquids, components of gaseous pollutants, etc. at the same time.
【００１３】なお、前記実施例では、水蒸気発生装置５
で純水より水蒸気を発生させるようにしているが、汚染
大気中の汚染ガス等の汚染質を吸収する溶液の蒸気を発
生させてこれを混合器に導入した上、液滴捕集装置で液
滴を捕集するようにすることによって、水溶性でない汚
染質の計測を行うようにすることもできる。例えば、汚
染大気中に水溶性でない下記のような物質が汚染質とし
て含まれている場合には、溶液として下記のものを用
い、その蒸気より発生した液滴に吸収するようにする。In the above embodiment, the steam generator 5
Although water vapor is generated from pure water with the above method, the vapor of a solution that absorbs pollutants such as pollutant gas in polluted air is generated and introduced into the mixer, and then the liquid is collected by the droplet collecting device. By collecting the droplets, it is possible to measure the contaminants that are not water-soluble. For example, when the following substances that are not water-soluble are contained as pollutants in the contaminated air, the following are used as a solution and are absorbed by the droplets generated from the vapor.
【００１４】 汚染質 溶液 ＮＯ エタノール 塩素ガス（Ｃｌ2 ） アルカリ液 塩酸 （ＨＣｌ） 〃 硫化水素（Ｈ2 Ｓ） 〃 亜硫酸ガス（ＳＯ2 ） 〃 硫酸ガス（ＳＯ3 ） 〃Contaminant solution NO Ethanol Chlorine gas (Cl 2 ) Alkaline liquid Hydrochloric acid (HCl) 〃 Hydrogen sulfide (H 2 S) 〃 Sulfurous acid gas (SO 2 ) 〃 Sulfuric acid gas (SO 3 ) 〃
【００１５】[0015]
【発明の効果】従来の計測方法では、大気中の粒子状汚
染質の個数濃度、成分、又はガス状汚染質成分の計測分
析は、それぞれ個別の計測が行われていた。しかし、本
発明に係る大気汚染質計測装置では、特許請求の範囲の
請求項１及び２の構成を具備することによって、汚染大
気中の粒子状汚染質（固体、液体、バクテリア等）とガ
ス状汚染質の同時計測・分析を行うことができる。According to the conventional measuring method, the individual measurement is carried out for the measurement analysis of the number concentration, component, or gaseous pollutant component of the particulate pollutants in the atmosphere. However, the air pollutant measuring device according to the present invention is provided with the configurations of claims 1 and 2 of the claims, so that particulate pollutants (solid, liquid, bacteria, etc.) and gaseous substances in polluted air can be obtained. Simultaneous measurement and analysis of pollutants can be performed.
【００１６】また、本発明では、水蒸気又は溶液の蒸気
を低温のサンプリングした汚染大気と混合して、水滴又
は液滴を発生させてこれを捕集するようにしているため
に、微細な浮遊粒子をも水滴又は液滴中に取り込むこと
が可能であり、正確な計測・分析を行うことができる。Further, in the present invention, since the water vapor or the vapor of the solution is mixed with the low temperature sampled contaminated atmosphere to generate water droplets or liquid droplets and collect them, fine suspended particles are generated. Can also be incorporated into a water droplet or a droplet, and accurate measurement / analysis can be performed.
【図１】本発明の一実施例の系統図である。FIG. 1 is a system diagram of an embodiment of the present invention.
１ 汚染大気 ２ サンプリング装置 ３ 温度調節器 ４ 純水タンク ５ 水蒸気発生装置 ６ 混合器 ７ 水蒸気 ８ 液滴捕集装置 ９ 凝縮水 １０ 凝縮水タンク １１ 分析装置 １２ 大気排出 1 Contaminated Air 2 Sampling Device 3 Temperature Controller 4 Pure Water Tank 5 Steam Generator 6 Mixer 7 Steam 8 Droplet Capture Device 9 Condensed Water 10 Condensed Water Tank 11 Analytical Device 12 Atmospheric Discharge
Claims (2)
グ装置、前記サンプリング装置でサンプリングした汚染
大気を冷却して温度を下げる温度調節器、純水の水蒸気
を発生させる水蒸気発生装置、前記水蒸気発生装置で発
生した水蒸気と前記温度調節器で温度調節された汚染大
気を混合する混合器、前記混合器における水蒸気と汚染
大気の混合によって発生した水滴を捕集する捕集装置、
及び捕集装置で捕集した水滴中の成分を分析する分析装
置から構成されることを特徴とする大気汚染質計測装
置。1. A sampling device for continuously sucking polluted air, a temperature controller for cooling polluted air sampled by the sampling device to lower the temperature, a steam generator for generating pure water vapor, and the steam generator. A mixer that mixes the water vapor generated in step 1 with the polluted air whose temperature is controlled by the temperature controller, a collection device that collects water droplets generated by mixing the water vapor and the polluted air in the mixer,
And an air pollutant measuring device comprising an analyzer for analyzing components in water droplets collected by the collector.
グ装置、前記サンプリング装置でサンプリングした汚染
大気を冷却して温度を下げる温度調節器、汚染大気中の
汚染成分を吸収する溶液の蒸気を発生させる蒸気発生装
置、前記蒸気発生装置で発生した蒸気と前記温度調節器
で温度調節された汚染大気を混合する混合器、前記混合
器における汚染大気と蒸気の混合によって発生した液滴
を捕集する捕集装置、及び捕集装置で捕集した液滴中の
成分を分析する分析装置から構成されることを特徴とす
る大気汚染質計測装置。2. A sampling device for continuously sucking polluted air, a temperature controller for cooling the polluted air sampled by the sampling device to lower the temperature, and generating a vapor of a solution for absorbing pollutant components in the polluted air. A steam generator, a mixer for mixing the steam generated by the steam generator with the polluted air whose temperature is controlled by the temperature controller, and a catcher for collecting droplets generated by mixing the polluted air with the steam in the mixer An air pollutant measuring device comprising a collecting device and an analyzing device for analyzing the components in the liquid droplets collected by the collecting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14770394A JPH0815250A (en) | 1994-06-29 | 1994-06-29 | Air polluting substance measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14770394A JPH0815250A (en) | 1994-06-29 | 1994-06-29 | Air polluting substance measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0815250A true JPH0815250A (en) | 1996-01-19 |
Family
ID=15436340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14770394A Withdrawn JPH0815250A (en) | 1994-06-29 | 1994-06-29 | Air polluting substance measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0815250A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6033459A (en) * | 1997-07-15 | 2000-03-07 | Nec Corporation | Gas collection apparatus, gas analyzing apparatus using the same and gas analyzing method |
-
1994
- 1994-06-29 JP JP14770394A patent/JPH0815250A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6033459A (en) * | 1997-07-15 | 2000-03-07 | Nec Corporation | Gas collection apparatus, gas analyzing apparatus using the same and gas analyzing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20010904 |