JPH08187586A - INKJET RECORDING HEAD, ITS MANUFACTURING METHOD, AND ITS MANUFACTURING APPARATUS - Google Patents

Abstract

(57) [Abstract] [Purpose] An object of the present invention is to provide a method for manufacturing an ink jet recording head in which carbon is not attached to an orifice plate and is not damaged by laser light. [Structure] Oxygen gas is blown (30) and sucked and removed (31) from both sides of the orifice plate (11) on the same surface side with an excimer laser light (22) irradiation site sandwiched therebetween.
Further, an orifice plate is placed on a stage (26) having a hollow inside and a plurality of vent holes communicating with the cavity provided on the surface, and the inside of the cavity is sucked to make the orifice plate a stage. A method for manufacturing a fixed inkjet recording head.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording apparatus for recording by ejecting ink from an orifice, and more particularly to an ink jet recording head manufacturing method and apparatus and an ink jet recording head manufactured by the manufacturing method. Regarding

[0002]

2. Description of the Related Art In recent years, in order to meet the high printing quality required for an on-demand type ink jet recording apparatus, a method of using an excimer laser has been generally used in order to process an orifice serving as an ink ejection port with high accuracy. Is coming. The processing of the orifice by the excimer laser is performed by irradiating with an excimer laser beam after bonding the resin film to be the orifice plate to the opening surface provided with the opening communicating with the ink path, or by bonding with the head substrate. Then, there has been proposed a method of forming an orifice by irradiating an excimer laser beam after forming a top plate having a concave portion for forming an ink path and an orifice plate as an integral resin.

FIG. 9 shows an example of the above-mentioned conventional technique.
It is a figure which shows the structural member of the head described in JP-A-279357, and shows a top plate (205) integrally formed with an orifice (207), a flow channel (208) and an orifice plate (206).

FIG. 10 shows how the orifice is processed.

In FIG. 10, an excimer laser oscillating device
(201), excimer laser light (202), condenser lens (203),
The orifice pattern mask (204) is arranged as shown in the figure, and the orifice plate (206) is subjected to orifice processing.

At this time, in order to prevent the object removed by the laser from adhering to the surface of the object to be processed, helium gas or ionized air is sprayed from the gas spray nozzle (210) for processing.

Here, when the resin material is processed by the excimer laser, the foreign matter that adheres to the periphery of the orifice generated during the processing includes fragments of the workpiece, but most of them are carbon (soot, carbon). Is.

However, in the conventional method of spraying helium gas or ionized air, it was possible to remove solids, but it was very difficult to prevent carbon from adhering.

On the other hand, it is generally said that the surface of an orifice plate is preferably water repellent with respect to the ink used. This is because when it is hydrophilic, ink droplets that are generated when ejecting ink easily adhere to the surface of the orifice plate, and as a result, the ejection direction of the ink is bent, causing ejection failure. Because it will be. Therefore, as the material of the orifice plate, a resin material which is relatively easy to process and has water repellency is often used, avoiding a hydrophilic material such as glass.

However, when an orifice is processed in this material, if the generated carbon adheres to the periphery of the orifice, that portion becomes hydrophilic, which causes ejection failure as described above. Therefore, conventionally, after processing, cleaning was performed to remove carbon adhering to the periphery of the orifice.

Further, since the adhesion of carbon to the resin material is fairly strong, the cleaning cannot be sufficiently performed by the usual ultrasonic cleaning, and the cloth is impregnated with alcohol. At that time, the surface of the orifice plate was often scratched. in this case,
Even if the material itself is a water-repellent material, if many minute scratches are made on the surface of the material, that part will be pseudo-hydrophilic, and it is extremely dangerous to perform such wiping. It was

Further, in general, when processing is performed by using an excimer laser processing machine, it is most common to place a work on a table whose movement can be controlled and fix it with a jig or the like.

However, when a workpiece is placed on a table for machining, non-penetrating machining such as grooving may be used, but in the machining for forming a through hole like the present orifice machining, a hole is formed. After passing through, the laser beam passes to the back side of the work piece, is reflected by the surface of the table and is irradiated to the back side of the work piece, which may damage the back surface or the inner surface of the hole.

This will be described below with reference to the drawings. Figure 5
(A) shows a state in which a workpiece (orifice plate) (11) fixed on the stage (26) is irradiated with excimer laser light (22) to perform processing. When the processing progresses and the hole penetrates, the laser beam (22) is reflected on the surface of the stage (26) and hits the wall surface of the penetrated hole as shown in FIG. . As a method of avoiding this, it is sufficient to stop the irradiation of the laser light at the same time when the hole penetrates as the processing by the excimer laser light progresses, but in this case, it is not easy to detect the moment when the hole penetrates. Absent.

Further, in the conventional orifice processing method, after the orifice plate is joined to the recording head base material or the top plate material of the flow path, or as described in JP-A-4-279357. After being integrally formed, the excimer laser beam is irradiated to form the orifice. However, in these cases, since the shape of the work piece is not simple, it is difficult to fix the work piece when irradiating the excimer laser light, and it is necessary to prepare a dedicated fixing jig or the like for processing. . Such a dedicated jig may damage the orifice plate.

Further, even when only the orifice plate is fixed, fixing it with a jig may damage the orifice plate.

According to the conventional method, it is difficult to completely remove the carbon adhering around the orifice and the scratches at the time of processing the orifice plate, so that the area around the orifice becomes hydrophilic as described above. . When a recording head is constructed using such an orifice plate, the ink ejection direction is not stable and good printing cannot be obtained.

[0018]

Therefore, according to the present invention, when the orifice plate on the stage is processed by excimer laser light, carbon adheres to the orifice plate,
Solved the problem that the laser beam reflected on the stage would damage the orifice plate, and did not attach carbon to the orifice plate and did not scratch the laser beam. Including a flawless orifice plate,
An object of the present invention is to provide an apparatus for manufacturing an ink jet recording head that does not disturb the ink ejection direction and that enables stable ejection, and an orifice plate that is free from stains and scratches due to carbon adhesion.

[0019]

The method according to the present invention is characterized in that the orifice is formed by blowing oxygen gas while irradiating an excimer laser beam.

The method of the present invention according to claim 2 is characterized in that the oxygen gas accumulated on the surface of the orifice plate is removed by suction.

The method according to the third aspect of the invention is characterized in that the oxygen gas is sprayed and removed from both sides of the orifice plate on the same surface side with the excimer laser light irradiation site sandwiched therebetween.

According to a fourth aspect of the present invention, an orifice plate is placed on a stage which is constituted by closely adhering a glass substrate on a metal plate, and the orifice plate is irradiated with excimer laser light to form the orifice. It is characterized by forming.

A fifth aspect of the method of the present invention is characterized in that an orifice plate is placed on a quartz glass stage and the orifice plate is irradiated with excimer laser light to form the orifice.

In the method of the present invention as set forth in claim 6, an orifice plate is placed on a mounting table constituted by closely adhering a glass substrate on a resin base, and the orifice plate is irradiated with excimer laser light to form the orifice. It is characterized by forming.

The method of the present invention according to claim 7 is characterized in that the orifice is formed in the orifice plate before being bonded to the head substrate.

In the method of the present invention as defined in claim 8, the inside is hollow, and an orifice plate is placed on a stage having a surface provided with a plurality of vent holes communicating with the cavity, and the inside of the cavity is sucked. The orifice plate is fixed to the stage by doing so.

An ink jet recording head according to a ninth aspect of the present invention uses an orifice plate which is manufactured by the method according to any one of the first to eighth aspects and has no stain or scratch around the orifice. It is configured.

An apparatus according to a tenth aspect of the present invention is a stage for fixing an orifice plate, having a cavity inside, and a plurality of vent holes communicating with the cavity on a surface in contact with the orifice plate. A mounting table provided, a pump for suction for fixing the orifice plate to the platform by lowering the pressure inside the cavity, and a tube connecting the cavity of the platform and the pump And an on-off valve provided in the middle of the tube for controlling suction, a gas injection nozzle for blowing oxygen gas to the orifice plate, and a gas suction nozzle.

[0029]

According to the method of the invention described in claim 1, when the orifice is processed, the carbon generated by the irradiation of the excimer laser light is processed while the oxygen gas is being sprayed, so that the physical operation is achieved by simply spraying the gas. Not only the removal but also the removal is performed by utilizing the high reactivity of carbon (carbon) with oxygen, so that the adhesion of carbon to the orifice plate can be avoided.

According to the method of the second aspect of the present invention, when the orifice is processed, carbon generated by the irradiation of the excimer laser light is blown with the oxygen gas, and the gas is sucked from another place. Thus, it becomes possible to suppress the retention of gas on the orifice plate and efficiently react carbon with oxygen.

According to the method of the third aspect of the present invention, a steady gas flow is generated from the portion where the oxygen gas is blown to the portion where the oxygen gas is sucked and removed, and the portion where the excimer laser light is irradiated is formed on the way. Due to its location, the carbon produced during processing is always mixed with flowing fresh oxygen gas,
Since it is removed, it is possible to reliably avoid adhesion to the orifice plate.

According to the method of the invention as set forth in claim 4, in the step of irradiating the excimer laser beam to form the orifice, a glass table is closely adhered to a resin table is used as a mounting table. Since the processing is performed, it is possible to prevent the laser light from penetrating the object to be processed and damaging the back side of the object to be processed due to subsequent reflection when the through hole is processed.

According to the method of the fifth aspect of the present invention, in the step of irradiating the excimer laser beam to form the orifice, the processing is performed by using the quartz glass table as the mounting table. When performing, it is possible to prevent the laser beam from penetrating the object to be processed and damaging the back side of the object to be processed due to subsequent reflection.

According to the method of the sixth aspect of the invention, in the step of irradiating the excimer laser beam to form the orifice, a glass table is closely adhered to a resin table is used as a mounting table. Since the processing is performed, it is possible to prevent the laser light from penetrating the object to be processed and damaging the back side of the object to be processed due to subsequent reflection when the through hole is processed.

According to the seventh aspect of the present invention, when the excimer laser is used for processing, the orifice plate is first processed in the state of the resin film to be the orifice plate, and then the head is formed by joining with another member. By adopting such a procedure as described above, since a single film state is processed during laser processing, it is possible to relatively easily fix the workpiece.

According to the method of the invention described in claim 8, since the orifice plate is fixed to the stage by suction, there is no risk of scratching the orifice plate with a jig or the like.

According to the recording head of the invention described in claim 9, it is constituted by an orifice plate which is manufactured by the method of the invention described in claims 1 to 8 and has no stain or scratch around the orifice. Therefore, good ink ejection can be obtained.

According to the device of the invention described in claim 10,
The stage used for processing using the excimer laser,
A plurality of ventilation holes are provided that communicate with the inside of the stage from the surface that fixes the workpiece, and each ventilation hole is a tube that communicates with the inside of the stage and an on-off valve provided in the middle of the tube. And the suction pump provided at the other end of the tube communicate with each other, so that the workpiece can be suction-fixed on the stage. By irradiating the excimer laser hole in this state to form the orifice, it is possible not only to fix the workpiece easily but also to prevent the periphery of the orifice from being scratched by a mounting jig or the like.

[0039]

Embodiments of the present invention will be described below.

FIG. 1 is a schematic overall perspective view of a recording apparatus using the ink jet recording head of the present invention. In this figure, the recording paper is wrapped around the platen (4) and recording is performed by scanning the carriage (3). More specifically, the carriage (3) is reciprocally scanned in a direction parallel to the rotation axis of the platen (4), and the carriage (3) communicates with the recording head (1) and the recording head (1). The ink containing portion (2) for supplying the recording ink in this state is constituted. The recording head (1) is provided at a position facing the platen (4), and performs recording while reciprocating as the carriage (3) scans.

FIG. 2 is an assembly diagram of the recording head. Here, the recording head is provided with an ink flow channel (15) for distributing the ink supplied from the ink containing section to each ejection port, and the energy used for ejecting the ink on a part of its wall surface. Substrate (13) having energy generating element (14) for generating
And an orifice plate (11) having an orifice (12) for ejecting ink corresponding to the location of the energy generating element (14).

FIG. 3 shows a state in which the resin film is irradiated with excimer laser light to perform orifice processing in order to manufacture an orifice plate. A laser beam (22) oscillated from a laser emission port (21) that oscillates an excimer laser beam has a pattern mask (23) in which a plurality of orifice patterns are arranged at a constant pitch, and a condenser lens (24).
Then, the orifice shape is imaged on the orifice plate (11). At this time, the orifice plate (11) is fixed on a stage (26) provided on a movable stage (25) movable in various directions, and the stage (26) is fixed by a tube (29). It is connected to the on-off valve (27) and the suction pump (28).
Further, a gas injection nozzle (30) for blowing oxygen gas to the laser light irradiation position on the orifice plate (11), and a gas for sucking and removing the gas on the same surface as the gas injection nozzle and on the opposite side across the laser light irradiation position. Install the aspirator (31). With this configuration, it is possible to irradiate laser light while uniformly flowing oxygen gas on the orifice plate (11).

Next, the structure of the stage (26) will be described. FIG. 4 is a diagram showing a structure of a stage for realizing the method of the invention described in claim 8 of the present invention. The tube (29) is connected to a stainless steel stage base (26b), and a multi-hole plate (26a) having a plurality of through holes on one surface.
The stage is constructed by being joined with. By adopting such a structure, the suction pump (28) and the opening / closing valve of FIG.
By the action of (27), it becomes possible to suck and fix the orifice plate which is the work piece on the multi-hole plate.

Further, in the method of the invention described in claims 4 to 6, the multi-hole plate (26a) and the stage base (26b) in FIG. With such a configuration and material, the orifice plate, which is a workpiece, can be suction-fixed onto the multi-hole plate.

FIG. 6 is a diagram showing the structure of a stage for realizing the method of the invention described in claim 4. When the orifice is formed by the excimer laser light (22), a part of the laser light after penetrating is absorbed by the glass substrate (32), a part of the laser light passes through the glass substrate (32), and the laser light on the surface of the metal table (33). reflect.
The reflected laser light is then transferred to the orifice plate (1
Although it hits the back surface of 1), energy is dispersed during transmission and reflection of the laser light at this point, and the laser light becomes weak. Further, in the case of such laser processing, normally, the position where the shape of the mask pattern is imaged is the front surface of the work piece, and the position where the back surface of the work piece is reflected by the metal table and is out of focus. It will be. Therefore, due to such reflection, the energy of the laser light is very weak and the orifice plate which is the workpiece is not damaged.

FIG. 7 is a view showing the structure of a stage for realizing the method of the invention described in claim 5. When the orifice is formed by the excimer laser light (22), the laser light that has penetrated passes through the quartz glass substrate (34) that transmits about 90% of the excimer laser light, and then is dispersed in the atmosphere. About 10
% Of the reflected laser light hits the back surface of the orifice plate (11), etc., but at this point the laser light is very weak and the work piece is not damaged.

FIG. 8 is a view showing the structure of a stage for realizing the method of the invention described in claim 6. When the orifice is formed by the excimer laser light (22), a part of the laser light after passing through passes through the glass substrate (35) and the resin table (3
6) absorbed in. At this time, general resins absorb almost 100% of this laser light, so the laser light has passed through the glass substrate (35) and its energy is slightly weakened. 36) will be processed. However, by processing this resin base (36), all the laser light that has passed through the orifice plate (11) is consumed, and it is possible to completely prevent the influence on other parts due to subsequent reflection and scattering. It is possible to process without damaging the work piece. Further, in the case of this configuration, since the surface of the table on which the workpiece is placed is glass and this portion is not processed, the surface of the table can be maintained,
Moreover, as compared with the glass substrate (32) of FIG. 6 described above, the glass substrate (35) in this case has only a role of transmitting the laser beam, and therefore a very thin material can be used.

Next, the result of the actual processing experiment will be described.

The excimer laser light used in the experiment has a wavelength
The energy density of the 248 nm KrF excimer laser was set to about 2 [J / cm2] on the surface to be processed.

As a work piece, a polyether sulfone having a thickness of 200 μm was used, and through holes having a diameter of 35 μm were processed at a constant pitch. Experiments were carried out when neither oxygen gas nor nitrogen gas was sprayed, when nitrogen gas was sprayed, and when oxygen gas was sprayed.

FIG. 11 is a view of the orifice as seen from the laser light incident side after the processing is performed only by irradiating the excimer laser light without spraying oxygen gas and nitrogen gas. A lot of carbon is attached concentrically with the orifice.

FIG. 12 is a view of the orifice as seen from the incident side of the laser beam after irradiating the excimer laser beam for processing while blowing nitrogen gas. Due to the blowing of nitrogen gas, the adhesion of carbon is slightly reduced, but since this is due to the physical action as described above, the generated carbon is accompanied by the flow of gas,
It is washed away and adheres to the downstream side.

Therefore, according to such a conventional method,
It was not possible to completely prevent carbon from adhering.

On the other hand, in FIG. 13, according to the contents described in claim 3, the blowing of oxygen gas and the removal by suction are performed as shown in FIG.
FIG. 3 is a view of the orifice as seen from the laser light incident side after performing the configuration shown in FIG. Very little carbon was attached to the vicinity of the orifice, and very good results were obtained.

As described above, according to the manufacturing method of the present invention, since the surface condition is very good and a highly accurate and uniform orifice shape can be obtained, recording using this orifice plate is performed. The head has less variation in the ink ejection direction than a conventional recording head, and a good recording result can be obtained.

[0056]

According to the method of the invention described in claim 1,
During orifice processing, carbon generated by irradiation of excimer laser light is processed while blowing oxygen gas, so that not only physical removal by blowing gas but also reactivity of carbon (carbon) and oxygen Since the removal is performed by utilizing the high price, it is possible to avoid the carbon from adhering to the orifice plate. Therefore,
Since foreign matter generated during laser processing does not adhere to the peripheral area of the orifice, when the recording head is configured, an ink jet recording head that does not stick unnecessary ink around the ejection port during recording and that can eject ink without direction variation It can be manufactured.

According to the method of the invention as set forth in claim 2, when the orifice is processed, carbon generated by the irradiation of the excimer laser light is blown with the oxygen gas, and the gas is sucked from another place. Thus, it becomes possible to suppress the retention of gas on the orifice plate and efficiently react carbon with oxygen. As a result, it is possible to prevent foreign matter generated during laser processing from adhering to the peripheral portion of the orifice more effectively, and it is possible to obtain a recording head capable of ejecting ink with no variation in direction. In addition, cleaning after processing the orifice plate becomes very easy.

According to the method of the third aspect of the present invention, a steady gas flow is generated from the portion where the oxygen gas is blown to the portion where the oxygen gas is sucked and removed, and the portion where the excimer laser light is irradiated is formed on the way. Due to its location, the carbon produced during processing is always mixed with flowing fresh oxygen gas,
To be removed. Therefore, it is possible to prevent foreign matter generated during laser processing from adhering to the peripheral portion of the orifice with certainty, and cleaning after processing is also unnecessary. as a result,
It is possible to very easily obtain a recording head capable of stable ink ejection without variation in direction.

According to the method of the present invention as defined in claim 4, in the step of irradiating the excimer laser beam to form the orifice, a glass table is closely adhered to a resin table is used as a mounting table. Since the processing is performed, it is possible to prevent the laser light from penetrating the object to be processed and damaging the back side of the object to be processed due to subsequent reflection when the through hole is processed. Therefore, when the recording head is constructed using the orifice plate by this processing method,
It is possible to eject the ink without variation in direction during recording.

According to the method of the fifth aspect of the present invention, in the step of irradiating the excimer laser beam to form the orifice, the processing is performed by using the quartz glass table as the mounting table. When performing, it is possible to prevent the laser beam from penetrating the object to be processed and damaging the back side of the object to be processed due to subsequent reflection. Therefore, when the recording head is configured by using the orifice plate according to this processing method, it is possible to eject the ink without variations in direction during recording.

According to the method of the sixth aspect of the present invention, in the step of irradiating the excimer laser light to form the orifice, a glass table is closely adhered to a resin table is used as a mounting table. Since the processing is performed, it is possible to prevent the laser light from penetrating the object to be processed and damaging the back side of the object to be processed due to subsequent reflection when the through hole is processed. Therefore, when the recording head is constructed using the orifice plate by this processing method,
It is possible to eject the ink without variation in direction during recording.

According to the invention described in claim 7, when machining using an excimer laser, the orifice hole is first machined in the state of the resin film to be the orifice plate, and then the head is formed by joining with another member. By adopting such a procedure as described above, since a single film state is processed during laser processing, it is possible to relatively easily fix the workpiece. Also, by this method,
Even if the surface of the orifice plate is modified after laser processing, it has been difficult to process only a part of the orifice plate because it has already been integrated with the top plate and head substrate. In the case of the present invention, that point is easy. Further, even if a defective product such as a non-through hole is produced during laser processing, only a good product needs to be sent to the subsequent assembling process, that is, the head manufacturing yield is improved.

According to the method of the eighth aspect of the present invention, since the orifice plate is fixed to the stage by suction, there is no risk of scratching the orifice plate with a jig or the like. Therefore, since there is no scratch around the orifice, unnecessary ink does not adhere to the periphery of the ejection port during recording, and it is possible to manufacture an inkjet recording head capable of ejecting ink with no direction variation.

According to the recording head of the ninth aspect of the invention, the recording head is constituted by the orifice plate which is manufactured by the method of the first aspect of the invention and has no stain or scratch around the orifice. Therefore, good ink ejection can be obtained.

According to the apparatus of the invention described in claim 10,
By irradiating the excimer laser light with the orifice plate fixed to the stage by suction to form the orifice, not only the work can be fixed easily, but also the mounting jig etc. scratches the periphery of the orifice. You can prevent that. Therefore, it is possible to easily manufacture a recording head having an orifice that does not have scratches or foreign matter attached around the orifice, and even in an inkjet recording head having a plurality of orifices, there is no variation in shape or surface state. Thus, it is possible to obtain a recording head with a stable ink ejection direction.

[Brief description of drawings]

FIG. 1 is a schematic overall perspective view of a recording apparatus equipped with a recording head of the present invention.

FIG. 2 is a schematic perspective view of an assembly of the recording head of the present invention.

FIG. 3 is a schematic configuration diagram of a processing apparatus showing an embodiment when processing an orifice plate by the processing method of the present invention.

FIG. 4 is a structural diagram of a stage used in the processing method of the present invention.

FIG. 5 is a diagram showing that when a through hole is processed by a conventional processing method, a chip or a scratch is generated on the back side of the workpiece.

FIG. 6 is a view showing the function of the stage according to claim 4 of the present invention.

FIG. 7 is a diagram showing an operation of a stage according to claim 5 of the present invention.

FIG. 8 is a diagram showing an operation of a stage according to claim 6 of the present invention.

FIG. 9 is a schematic diagram of a top plate that is included in a recording head of a conventional example and that includes an ink passage integrally formed with an orifice plate.

FIG. 10 is a configuration diagram when orifice processing is performed in a conventional processing method.

FIG. 11 is a diagram showing how carbon adheres in the vicinity of the orifice when gas is not sprayed.

FIG. 12 is a diagram showing how carbon adheres in the vicinity of an orifice when nitrogen gas is sprayed.

FIG. 13 is a diagram showing a state in the vicinity of an orifice when oxygen gas is sprayed and suction removal is performed.

[Explanation of symbols]

 1 Recording Head 2 Ink Storage Section 3 Carriage 4 Platen 11 Orifice Plate 12 Orifice 13 Head Substrate 14 Energy Generation Element 15 Ink Flow Path 21 Laser Emission Port 22 Laser Light 23 Pattern Mask 24 Condenser Lens 25 Movable Stage 26 Stage Table 26a Multi-hole plate 26b Mount base 27 Open / close valve 28 Suction pump 29 Tube 30 Gas injection nozzle 31 Gas suction device 32 Glass substrate 33 Metal base 34 Quartz glass substrate 35 Glass substrate 36 Resin base 37 Adhesive carbon

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Yoshio Kanayama 22-22 Nagaike-cho, Abeno-ku, Osaka-shi, Osaka Within Sharp Corporation (72) Inventor ▲ Hisashi Mura 22-22 Nagaike-cho, Abeno-ku, Osaka-shi, Osaka No. Sharp Corporation (72) Inventor Shinichi Irihara 22-22 Nagaike-cho, Abeno-ku, Osaka City, Osaka Prefecture

Claims (10)

[Claims] 1. A method of manufacturing an ink jet recording head obtained by joining an orifice plate having an orifice for ejecting ink and a head substrate having an element for ejecting ink from the orifice. A method for manufacturing an ink jet recording head, characterized in that the orifice is formed by blowing oxygen gas while irradiating an excimer laser beam. 2. The method for manufacturing an ink jet recording head according to claim 1, wherein oxygen gas accumulated on the surface of the orifice plate is removed by suction. 3. The method for manufacturing an ink jet recording head according to claim 2, wherein oxygen gas is blown and sucked off from both sides of the same face of the orifice plate with the excimer laser light irradiation site interposed therebetween. . 4. A method for manufacturing an ink jet recording head obtained by joining an orifice plate having an orifice for ejecting ink and a head substrate having an element for ejecting ink from the orifice. An ink jet recording head characterized in that an orifice plate is placed on a mounting table constituted by closely adhering a glass substrate on a metal plate, and the orifice plate is irradiated with excimer laser light to form an orifice. Manufacturing method. 5. A method of manufacturing an ink jet recording head obtained by joining an orifice plate having an orifice for ejecting ink and a head substrate having an element for ejecting ink from the orifice. A method for manufacturing an ink jet recording head, characterized in that an orifice plate is placed on a stage made of quartz glass, and the orifice plate is irradiated with excimer laser light to form an orifice. 6. A method of manufacturing an ink jet recording head obtained by joining an orifice plate having an orifice for ejecting ink and a head substrate having an element for ejecting ink from the orifice. An ink jet recording head characterized in that an orifice plate is placed on a mounting table constituted by closely adhering a glass substrate on a resin table, and the orifice plate is irradiated with excimer laser light to form an orifice. Manufacturing method. 7. The method for manufacturing an ink jet recording head according to claim 1, wherein an orifice is formed in the orifice plate before being joined to the head substrate. 8. An orifice plate is placed on a stage which has a hollow inside and a plurality of ventilation holes communicating with the cavity are provided on the surface, and the inside of the cavity is sucked to place the orifice plate on the stage. The method for manufacturing an inkjet head according to claim 1, wherein the method is applied to the inkjet head. 9. An ink jet recording head manufactured by the method according to claim 1. 10. A stage for fixing an orifice plate, the stage having a cavity inside, and a plurality of vent holes communicating with the cavity formed on a surface in contact with the orifice plate, A suction pump for fixing the orifice plate to the bed by lowering the pressure inside the cavity, a tube connecting the cavity of the bed and the pump, and for controlling suction An apparatus for manufacturing an ink jet recording head, comprising an opening / closing valve provided in the middle of the tube, a gas injection nozzle for blowing oxygen gas onto the orifice plate, and a gas suction nozzle.