JPH0819765A - Supersonic cleaning tank - Google Patents
Supersonic cleaning tankInfo
- Publication number
- JPH0819765A JPH0819765A JP17958194A JP17958194A JPH0819765A JP H0819765 A JPH0819765 A JP H0819765A JP 17958194 A JP17958194 A JP 17958194A JP 17958194 A JP17958194 A JP 17958194A JP H0819765 A JPH0819765 A JP H0819765A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning tank
- side wall
- lateral wall
- ultrasonic
- reinforcing members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 27
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 24
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 19
- 230000002787 reinforcement Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、医療器具や食器等の洗
浄、あるいは半導体製造プロセス中の洗浄処理やに利用
される超音波洗浄機の洗浄槽に関するものであり、特
に、側壁の外面に補強部材を付加することによって騒音
を低減した超音波洗浄槽に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning tank of an ultrasonic cleaning machine used for cleaning medical instruments, dishes and the like, or cleaning treatment during a semiconductor manufacturing process, and particularly to the outer surface of a side wall. The present invention relates to an ultrasonic cleaning tank in which noise is reduced by adding a reinforcing member.
【0002】[0002]
【従来の技術】医療器具や眼鏡の洗浄などに広く利用さ
れている超音波洗浄機は、図3に示すように、ほぼ一様
な肉厚の洗浄槽11の底面に適宜な個数の超音波振動子
12を接着固定し、袴などと称される置き台13上に載
置した構造となっている。洗浄液を満たした洗浄槽11
内に洗浄対象物を浸し、図示しない電源部から超音波振
動子に超音波周波数帯の交流電力を供給することによっ
て超音波振動子12を駆動する。超音波振動子12が発
生した超音波振動は、洗浄槽11の底面を介して洗浄液
中に伝達され、洗浄液中の対象物が洗浄される。2. Description of the Related Art As shown in FIG. 3, an ultrasonic cleaner widely used for cleaning medical instruments and eyeglasses has an appropriate number of ultrasonic waves on the bottom surface of a cleaning tank 11 having a substantially uniform wall thickness. The vibrator 12 is adhered and fixed, and is mounted on a stand 13 called a hakama or the like. Cleaning tank 11 filled with cleaning liquid
The ultrasonic transducer 12 is driven by immersing the object to be cleaned therein and supplying alternating-current power in the ultrasonic frequency band to the ultrasonic transducer from a power source (not shown). The ultrasonic vibration generated by the ultrasonic vibrator 12 is transmitted into the cleaning liquid via the bottom surface of the cleaning tank 11, and the object in the cleaning liquid is cleaned.
【0003】[0003]
【発明が解決しようとする課題】上述した超音波洗浄機
は、可聴周波数帯よりも遙かに高周波の数十KHz程度
の超音波を発生させているため原理的には騒音が発生し
ない筈であるが、実際には、かなりのレベルの耳障りな
騒音が発生する。この騒音に対する嫌悪感には個人差が
あるものの、この騒音の発生が超音波洗浄機の普及を妨
げる原因の一つとなっていることは否めない。このた
め、従来から騒音レベルを低減するために種々の工夫が
試みられてきたが、それほどの効果が奏されていない。The above-mentioned ultrasonic cleaning machine, in principle, should generate no noise because it generates ultrasonic waves of several tens of KHz, which is much higher than the audible frequency band. However, in reality, a considerable level of annoying noise is generated. Although the dislike of this noise varies from person to person, it cannot be denied that the occurrence of this noise is one of the factors that hinder the spread of ultrasonic cleaners. Therefore, various attempts have been made in the past to reduce the noise level, but not so much effect has been achieved.
【0004】本発明者は、発生する騒音のレベルは洗浄
槽が大型になるほど大きくなることなどから、動作中に
発生する騒音は洗浄槽の側壁の振動に起因するものと推
察した。なぜならば、洗浄槽が大型になるほど各側壁の
撓みや捩じれなどに対する剛性が低下し、側壁の変形量
が増加して高レベルの可聴音を発生させると推察される
からである。さらに、本発明者は、側壁の厚みを通常の
2〜3mmから10mm程度まで増加すると騒音のレベ
ルがかなり低下することからも、騒音が洗浄槽の側壁の
振動に起因して発生するとの確証を得た。しかしなが
ら、騒音のレベルを下げようとして側壁の厚みを増加さ
せると、洗浄槽の重量が増加し、堅固な置き台が必要に
なったり、配置替えが困難になるなどの問題がある。The inventor of the present invention speculates that the noise level generated increases as the size of the cleaning tank increases, so that the noise generated during operation is caused by the vibration of the side wall of the cleaning tank. This is because it is assumed that the larger the size of the cleaning tank, the lower the rigidity of each side wall against bending and twisting, the more the side wall deformation increases, and the more audible sound is generated. Further, the present inventor confirms that the noise is generated due to the vibration of the side wall of the cleaning tank because the noise level considerably decreases when the thickness of the side wall is increased from the normal 2-3 mm to about 10 mm. Obtained. However, when the thickness of the side wall is increased in order to reduce the noise level, the weight of the cleaning tank increases, which requires a solid stand, and it becomes difficult to rearrange.
【0005】[0005]
【課題を解決するための手段】本発明の超音波洗浄槽
は、側壁の外面に複数の補強部材を離散的に付加するこ
とにより、洗浄槽の重量の増加を抑制しながらその側壁
の剛性を高めて騒音レベルを下げるように構成されてい
る。In the ultrasonic cleaning tank of the present invention, a plurality of reinforcing members are discretely added to the outer surface of the side wall to suppress the increase in the weight of the cleaning tank while increasing the rigidity of the side wall. It is configured to raise and lower the noise level.
【0006】[0006]
【作用】側壁の剛性を高めることにより、一定量の振動
エネルギーを側壁の小さな変位量のもとで吸収できる。
側壁の変位量の減少に伴い発生する可聴周波数帯の音波
のレベルが低下する。発明の好適な実施例によれば、複
数の補強部材が各側壁の外面上において閉じた枠体を形
成することにより、一層高い剛性が実現される。本発明
の更に好適な実施例によれば、各補強部材は、断面形状
がL字状を呈することにより、より小さな重量のもとで
より高い剛性が実現される。以下、本発明を実施例と共
にさらに詳細に説明する。By increasing the rigidity of the side wall, a certain amount of vibration energy can be absorbed with a small amount of displacement of the side wall.
As the displacement of the side wall decreases, the level of sound waves in the audible frequency band decreases. According to the preferred embodiment of the invention, the plurality of reinforcing members form a closed frame on the outer surface of each side wall, whereby higher rigidity is realized. According to a further preferred embodiment of the present invention, each reinforcing member has an L-shaped cross section, so that higher rigidity is realized under a smaller weight. Hereinafter, the present invention will be described in more detail with reference to Examples.
【0007】[0007]
【実施例】図1は、本発明の一実施例の超音波洗浄槽の
構成を示す斜視図である。この超音波洗浄槽は、3mm
程度の一様な肉厚の薄肉の矩形状のステンレス製の洗浄
容器1の各側壁面の外面上に、断面がL字形状の金属製
の補強部材2a,2b,2c・・・2fを田の字形状を
呈するように組合せ、溶接により固定した構造となって
いる。このように、補強部材を組合せて閉じた枠体を各
側面上に形成することにより、開いた構造とする場合に
比べて、各側面の撓みや捩じれ、あるいは隣接側面間の
開きなどの変形に対する剛性が著しく高まり、小さな変
形量のもとで一定量の振動を吸収することができる。ま
た、個々の補強部材の断面形状をL字状にすることで、
重量の増加を抑制しつつ補強部材の撓み、捩じれなどに
対する剛性を決定する断面二次モーメントを一層高める
ことができる。1 is a perspective view showing the structure of an ultrasonic cleaning tank according to an embodiment of the present invention. This ultrasonic cleaning tank is 3mm
On the outer surface of each side wall surface of the cleaning container 1 made of a thin rectangular stainless steel having a uniform thickness, metal reinforcing members 2a, 2b, 2c ... 2f having an L-shaped cross section are formed on the outer surface. The structure is such that they are combined so as to have a V shape and are fixed by welding. As described above, by forming a closed frame body on each side surface by combining reinforcing members, it is possible to prevent deformation such as bending or twisting of each side surface or opening between adjacent side surfaces, as compared with the case where the structure is opened. The rigidity is remarkably increased, and a certain amount of vibration can be absorbed with a small amount of deformation. In addition, by making the cross-sectional shape of each reinforcing member L-shaped,
It is possible to further increase the second moment of area that determines the rigidity of the reinforcing member against bending and twisting while suppressing an increase in weight.
【0008】従来の超音波洗浄機と同様に、図1の超音
波洗浄槽は、その底面に適宜な個数の超音波振動子が接
着・固定された状態で、置き台上に載置され、交流電源
からの給電を受けて動作する。本発明者の実験結果によ
れば、騒音レベルが大幅に低下することが確認された。Similar to the conventional ultrasonic cleaning machine, the ultrasonic cleaning tank of FIG. 1 is placed on a stand with an appropriate number of ultrasonic transducers adhered and fixed to the bottom surface thereof. It operates by receiving power from an AC power supply. According to the experimental results of the present inventor, it was confirmed that the noise level was significantly reduced.
【0009】図2は、本発明の他の実施例の超音波洗浄
槽の構成を示す斜視図である。この超音波洗浄槽は、厚
肉の金属製の超音波洗浄槽11の各側面を、田の字形状
の閉じた枠型の肉厚部分12a,12b,12c・・・
2fを残して削り取ることにより、その厚みを減少させ
た構造となっている。FIG. 2 is a perspective view showing the construction of an ultrasonic cleaning tank according to another embodiment of the present invention. This ultrasonic cleaning tank has a frame-shaped thick portion 12a, 12b, 12c ...
The thickness is reduced by scraping away 2f.
【0010】以上、補強部材を各壁面の外面上に田の字
状に組合せる構成を例示したが、必要に応じて斜めの補
強部材を追加したり、平行な部材を追加してもよい。あ
るいはまた、口の字内の横向きの補強部材や縦向きの補
強部材を省略したり、縦横の一方を省略するかわりに、
省略しない側を2本にするなどの構成を採用することも
できる。Although the configuration in which the reinforcing members are combined in the shape of a square on the outer surface of each wall surface has been described above, diagonal reinforcing members or parallel members may be added if necessary. Alternatively, instead of omitting the horizontal reinforcing member and the vertical reinforcing member in the square character, or omitting one of the vertical and horizontal,
It is also possible to adopt a configuration in which the side not omitted is two.
【0011】また、金属製の洗浄容器の各壁面の外面上
に金属製の補強部材を溶接によって固定する構成を例示
した。しかしながら、樹脂製の洗浄槽を使用する場合な
どには、金属や樹脂製の補強部材を側壁面に接着固定し
たり、あるいは、薄肉容器と補強部材とを一体として射
出成形することにより、図2のような構造を実現するこ
ともできる。すなわち、各補強部材は各側壁上の厚肉部
分として補強対象の各側壁の薄肉部分と一体に形成され
る。In addition, the construction in which the metal reinforcing member is fixed to the outer surface of each wall surface of the metal cleaning container by welding has been illustrated. However, when a resin cleaning tank is used, a metal or resin reinforcing member is bonded and fixed to the side wall surface, or the thin container and the reinforcing member are integrally formed by injection molding. It is also possible to realize a structure like this. That is, each reinforcing member is integrally formed as a thick portion on each side wall with a thin portion on each side wall to be reinforced.
【0012】[0012]
【発明の効果】以上詳細に説明したように、本発明の超
音波洗浄槽は、側壁の外面に複数の補強部材を離散的に
付加する構成であるから、洗浄槽の重量の増加を抑制し
ながらその側壁の剛性が高めることができる。この剛性
の増大に伴い、側壁面の小さな変形量のもとで一定量の
振動エネルギーを吸収でき、騒音レベルが低減される。As described above in detail, since the ultrasonic cleaning tank of the present invention has a structure in which a plurality of reinforcing members are discretely added to the outer surface of the side wall, an increase in the weight of the cleaning tank is suppressed. However, the rigidity of the side wall can be increased. With this increase in rigidity, a certain amount of vibration energy can be absorbed with a small amount of deformation of the side wall surface, and the noise level is reduced.
【図1】本発明の一実施例の超音波洗浄槽の構成を示す
斜視図である。FIG. 1 is a perspective view showing a configuration of an ultrasonic cleaning tank according to an embodiment of the present invention.
【図2】本発明の他の実施例の超音波洗浄槽の構成を示
す斜視図である。FIG. 2 is a perspective view showing the configuration of an ultrasonic cleaning tank according to another embodiment of the present invention.
【図3】従来の超音波洗浄槽を含む超音波洗浄機の要部
の構成を示す斜視図である。FIG. 3 is a perspective view showing a configuration of a main part of an ultrasonic cleaning machine including a conventional ultrasonic cleaning tank.
1 一様肉厚の薄肉洗浄容器 2a〜2f 断面がL字形状の補強部材 11 圧肉の洗浄容器 11a 〜11f 田の字形状の厚肉部分 1 Thin-walled cleaning container with uniform thickness 2a to 2f Reinforcing member with an L-shaped cross section 11 Washing container with compressed wall 11a to 11f Thick wall-shaped part
Claims (4)
に付加されたことを特徴とする超音波洗浄槽。1. An ultrasonic cleaning tank, wherein a plurality of reinforcing members are discretely added on the outer surface of each side wall.
面上において閉じた枠体を形成していることを特徴とす
る超音波洗浄槽。2. The ultrasonic cleaning tank according to claim 1, wherein the plurality of reinforcing members form a closed frame on the outer surface of each side wall of the thin wall cleaning container.
ることを特徴とする超音波洗浄槽。3. The ultrasonic cleaning tank according to claim 1, wherein each of the reinforcing members has an L-axis cross section.
補強対象の前記各側壁の薄肉部分と一体に形成されたこ
とを特徴とする超音波洗浄槽。4. The reinforcement member according to claim 1, wherein each of the reinforcing members is integrally formed with a thin portion of each of the side walls to be reinforced as a thick portion of each of the side walls. Ultrasonic cleaning tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17958194A JPH0819765A (en) | 1994-07-07 | 1994-07-07 | Supersonic cleaning tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17958194A JPH0819765A (en) | 1994-07-07 | 1994-07-07 | Supersonic cleaning tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0819765A true JPH0819765A (en) | 1996-01-23 |
Family
ID=16068235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17958194A Pending JPH0819765A (en) | 1994-07-07 | 1994-07-07 | Supersonic cleaning tank |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0819765A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006283096A (en) * | 2005-03-31 | 2006-10-19 | Tokyo Electron Ltd | Processing chamber and processing apparatus |
| KR20200126719A (en) * | 2019-04-30 | 2020-11-09 | 정우섭 | Ultrasonic wave washer apparatus |
-
1994
- 1994-07-07 JP JP17958194A patent/JPH0819765A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006283096A (en) * | 2005-03-31 | 2006-10-19 | Tokyo Electron Ltd | Processing chamber and processing apparatus |
| TWI391724B (en) * | 2005-03-31 | 2013-04-01 | 東京威力科創股份有限公司 | Processing chamber and processing device |
| KR20200126719A (en) * | 2019-04-30 | 2020-11-09 | 정우섭 | Ultrasonic wave washer apparatus |
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