JPH08200951A - Draining drying method for article and device therefor - Google Patents

Draining drying method for article and device therefor

Info

Publication number
JPH08200951A
JPH08200951A JP1008795A JP1008795A JPH08200951A JP H08200951 A JPH08200951 A JP H08200951A JP 1008795 A JP1008795 A JP 1008795A JP 1008795 A JP1008795 A JP 1008795A JP H08200951 A JPH08200951 A JP H08200951A
Authority
JP
Japan
Prior art keywords
article
solvent
draining
zone
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP1008795A
Other languages
Japanese (ja)
Inventor
Toshio Hattori
敏夫 服部
Yoshio Miyairi
嘉夫 宮入
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP1008795A priority Critical patent/JPH08200951A/en
Publication of JPH08200951A publication Critical patent/JPH08200951A/en
Withdrawn legal-status Critical Current

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Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To reliably recover perfluoro organic compound steam and to substantially prevent leakage of a solvent to the atmosphere by a method wherein exhaust gas from a drying device is caused to pass through a solvent recovery device incorporating such an adsorbent as activated charcoal. CONSTITUTION: An article 20a, such as an electronic part, after washing is moved in a partition chamber at an input and output zone 6. By rotating a turn table 21, the article is moved to a draining zone 1 and immersed in a solvent in a draining tank and moisture is removed through ultrasonic treatment. A draining article 20b is moved to a rinse zone and rinsed by a interfacial active agent in the solvent by rinsing by means of perfluoro organic compound steam heated and vaporized in a liquid reservoir arranged on the bottom of a rinse tank 13 and thereafter, the article is moved to a dry zone 8. At the dry zone 8, the rinse liquid of an article 20d is dried for removal. Exhaust gas from the partition chamber is fed to a solvent recovery device 9 and adsorbed to activated charcoal 10 to recover a perfluoroorganic compound. The dried article 20d is returned to the input and output zone 6 and taken out from a hatch 7.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、水洗浄を施した電子部
品、機械部品等の物品から水分を除去し、乾燥する方法
及びその装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for removing water from articles such as electronic parts and mechanical parts that have been washed with water to dry them.

【0002】[0002]

【従来の技術】従来は、電子部品や機械部品の洗浄に
は、フロン113や1.1.1−トリクロロエタン等が
用いられてきたが、成層圏のオゾン層破壊の問題から、
これらの溶剤の使用が禁止されたため、水洗浄化に切り
換える研究が盛んに行われている。この水洗浄化法で
は、水切りと乾燥が必要になる。
2. Description of the Related Art Conventionally, CFC 113, 1.1.1-trichloroethane, etc. have been used for cleaning electronic parts and mechanical parts, but due to the problem of ozone layer depletion in the stratosphere,
Since the use of these solvents has been banned, active research has been conducted on switching to water washing. This water washing method requires draining and drying.

【0003】そこで、フロン113の代替品としてパー
フルオロ有機化合物を使用した物品の水切り乾燥方法及
びその装置が提案されている(特開平5─114594
号公報)。パーフルオロ有機化合物は、有機化合物の水
素原子が全てフッ素原子に置換され、オゾン層破壊の原
因とされる塩素原子を含まない化合物であり、オゾン層
を破壊しないばかりでなく、人体に無害で且つ不燃不活
性な液体であるため、各種の部材に悪影響を与えること
がない。さらに、その物性がフロン113と類似してお
り、特に表面張力、比重、蒸発熱等が水切り乾燥用の溶
剤に適している。
Therefore, as a substitute for the Freon 113, a method of draining and drying an article using a perfluoroorganic compound and an apparatus therefor have been proposed (JP-A-5-114594).
Issue). A perfluoro organic compound is a compound in which all the hydrogen atoms of the organic compound are replaced with fluorine atoms and does not contain a chlorine atom which is a cause of ozone layer depletion. Not only does it not destroy the ozone layer, it is harmless to the human body and Since it is an incombustible and inert liquid, it does not adversely affect various members. Further, its physical properties are similar to those of CFC 113, and in particular, surface tension, specific gravity, heat of vaporization and the like are suitable as a solvent for draining and drying.

【0004】図4は、上記の水切り乾燥装置の説明図で
ある。この装置は、水分離槽5、パーフルオロ有機化合
物を収容し、超音波装置1aを備えた水切り槽1、パー
フルオロ有機化合物の沸騰槽2、及び、パーフルオロ有
機化合物蒸気のリンス槽3を備え、水分を付着した部品
は水切り槽1から沸騰槽2、リンス槽3と順次移動して
水切り乾燥する装置である。水分離槽5は水切り槽1か
ら溢流した溶剤から水分を除去して水切り槽1に戻す構
成になっている。この装置は、オープン方式であるた
め、槽上部に冷却コイルを設けて溶剤蒸気を凝縮して回
収する構造になっているが、確実に回収することはでき
ない。
FIG. 4 is an explanatory view of the above-mentioned draining and drying device. This apparatus is provided with a water separation tank 5, a perfluoroorganic compound, and a draining tank 1 equipped with an ultrasonic device 1a, a perfluoroorganic compound boiling tank 2, and a perfluoroorganic compound vapor rinsing tank 3. The device to which water has adhered is an apparatus for sequentially moving from the water draining tank 1 to the boiling tank 2 and the rinse tank 3 to drain water and dry it. The water separation tank 5 is configured to remove water from the solvent overflowing from the water draining tank 1 and return it to the water draining tank 1. Since this device is an open system, it has a structure in which a cooling coil is provided in the upper part of the tank to condense and collect the solvent vapor, but it cannot reliably collect it.

【0005】[0005]

【発明が解決しようとする課題】そこで、本発明は、上
記の欠点を解消し、部品の水切り乾燥を行うとともにパ
ーフルオロ有機化合物蒸気を確実に回収し、大気への溶
剤の漏出を実質的に防止できる部品の水切り乾燥方法及
びその装置を提供しようとするものである。
SUMMARY OF THE INVENTION Therefore, the present invention solves the above-mentioned drawbacks, drains and dries the parts, and surely recovers the perfluoroorganic compound vapor to substantially prevent the leakage of the solvent into the atmosphere. An object of the present invention is to provide a method for draining and drying a component that can be prevented and an apparatus therefor.

【0006】[0006]

【課題を解決するための手段】本発明は、(1) 水洗後の
物品を、パーフルオロ有機化合物を主成分とし、界面活
性剤を添加した溶剤中に浸漬し、超音波又は噴流で処理
した後、前記物品をパーフルオロ有機化合物蒸気中で蒸
気洗浄して界面活性剤をリンスし、さらに、乾燥室に移
し、乾燥室の排ガスを吸着剤で回収して再利用すること
を特徴とする物品の水切り乾燥方法、及び、(2) パーフ
ルオロ有機化合物を主成分とし、界面活性剤を添加した
溶剤を収容し、超音波又は噴流手段を備えた水切り槽
と、パーフルオロ有機化合物蒸気で界面活性剤を除去す
るリンス槽と、排ガスから溶剤を回収する装置を付設し
た乾燥槽を環状に配置し、槽上部にターンテーブル方式
の移動機構を設けて各槽間の物品の移動を可能にしたこ
とを特徴とする物品の密閉式水切り乾燥装置である。
According to the present invention, (1) an article after being washed with water is immersed in a solvent containing a perfluoroorganic compound as a main component and a surfactant and treated with ultrasonic waves or a jet stream. Then, the article is characterized in that the article is steam-cleaned in a vapor of a perfluoroorganic compound to rinse the surface active agent, further transferred to a drying chamber, and exhaust gas in the drying chamber is recovered by an adsorbent and reused. Draining method, and (2) Perfluoro organic compound as a main component, containing a solvent with a surfactant added, a draining tank equipped with ultrasonic waves or jet means, and a surface active with perfluoro organic compound vapor A rinse tank that removes the agent and a drying tank that is equipped with a device that recovers the solvent from the exhaust gas are arranged in an annular shape, and a turntable type moving mechanism is provided at the top of the tank to enable the movement of articles between the tanks. Of articles characterized by Closed type is a draining drying apparatus.

【0007】[0007]

【作用】本発明では、水切り乾燥装置に密閉方式を採用
し、特に、乾燥装置からの排ガスを活性炭等の吸着剤を
内蔵した溶剤回収装置を付設することにより、水切り剤
である溶剤をほぼ完全に回収、再利用することを可能と
し、大気を汚染することなく、溶剤ロスの大幅な低減に
よりランニングコストの低減を可能にした。なお、本発
明で使用するパーフルオロ有機化合物としては、パーフ
ルオロカーボン、パーフルオロヘキサン、パーフルオロ
シクロヘキサン、パーフルオロノナン等を挙げることが
できる。
In the present invention, a closed system is adopted for the draining / drying device, and in particular, the exhaust gas from the drying device is attached to the solvent recovery device having a built-in adsorbent such as activated carbon, so that the solvent as the draining agent is almost completely removed. It is possible to collect and reuse it, and it is possible to reduce the running cost by greatly reducing the solvent loss without polluting the air. Examples of the perfluoro organic compound used in the present invention include perfluorocarbon, perfluorohexane, perfluorocyclohexane and perfluorononane.

【0008】[0008]

【実施例】図1は、本発明の水切り乾燥方法を説明する
ための構成図である。図2は、ターンテーブルを採用し
た水切り乾燥装置の斜視図であり、図3はターンテーブ
ルの各処理ゾーンを説明するための平面図である。この
装置は、水切り槽11及びリンス槽13の上方に、間仕
切り16a〜c等により分割された4区画室からなるタ
ーンテーブル21を配置し、水切り槽11及びリンス槽
13の上方に位置する前記区画室を水切りゾーン1及び
リンスゾーン3とし、水切りゾーン1の手前に位置する
区画室を物品の搬入出ゾーン6とし、リンスゾーン3の
後方に位置する区画室を乾燥ゾーン8とした。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram for explaining the draining and drying method of the present invention. FIG. 2 is a perspective view of a draining / drying device that employs a turntable, and FIG. 3 is a plan view for explaining each processing zone of the turntable. In this device, a turntable 21 composed of four compartments divided by partitions 16a to 16c and the like is arranged above the draining tank 11 and the rinse tank 13, and the partition located above the draining tank 11 and the rinse tank 13 is arranged. The chambers were a draining zone 1 and a rinsing zone 3, a compartment located in front of the draining zone 1 was an article loading / unloading zone 6, and a compartment located behind the rinsing zone 3 was a drying zone 8.

【0009】水切り槽11の底部には超音波装置12が
設けられ、槽内にはパーフルオロ有機化合物を主成分と
し、界面活性剤を添加した溶剤が収容されている。物品
20bから分離された水分を含有する溶剤は水分離器1
8に移され、比重の重い溶剤を底部から溶剤補充タンク
19に回収し、水切り剤を補充した後、ポンプで水切り
槽11中に噴出させ、水切り槽11の溶剤を攪拌して洗
浄力を向上させた。
An ultrasonic device 12 is provided at the bottom of the draining tank 11, and a solvent containing a perfluoroorganic compound as a main component and a surfactant is contained in the tank. The water-containing solvent separated from the article 20b is the water separator 1
8), the solvent having a high specific gravity is collected from the bottom into the solvent replenishing tank 19, and after replenishing the draining agent, it is jetted into the draining tank 11 by a pump, and the solvent in the draining tank 11 is stirred to improve the cleaning power. Let

【0010】リンス槽13は、底部の液溜14の溶剤を
ヒータ等により加熱沸騰させ、槽内にパーフルオロ有機
化合物蒸気を保持して物品20cを蒸気洗浄し、界面活
性剤を濯ぐ。リンス槽13の上部には冷却コイル15が
配置され、パーフルオロ有機化合物を凝縮し、ポンプ1
6で槽内に噴霧する。また、リンス槽13の底部から取
り出した蒸気を冷却器22で凝縮して前記溶剤槽19に
戻す。
In the rinse tank 13, the solvent in the liquid reservoir 14 at the bottom is heated and boiled by a heater or the like, and the perfluoro organic compound vapor is held in the tank to wash the article 20c with steam and rinse the surface active agent. A cooling coil 15 is arranged above the rinse tank 13 to condense the perfluoro organic compound and
Spray into the bath at 6. Further, the vapor taken out from the bottom of the rinse tank 13 is condensed by the cooler 22 and returned to the solvent tank 19.

【0011】ターンテーブル21の4つの区画室には、
物品20を昇降するための吊る具及び物品を搬入出する
ためのハッチ7を備え、水切り槽11とリンス槽13の
上部に位置する区画室は各槽内に物品20を降下可能に
接続され、外の系に対しては密閉系を保持するようにな
っている。また、乾燥ゾーン8に位置する区画室には、
活性炭を充填した溶剤回収装置9を接続可能とし、乾燥
ゾーン8の区画室から溶剤回収装置9に排ガスを回収し
て溶剤を活性炭に吸着させる。溶剤は、吸着剤に熱風を
送って脱着させ回収する。
In the four compartments of the turntable 21,
A compartment for lifting and lowering the article 20 and a hatch 7 for loading and unloading the article 20 are provided. The compartments located above the drainer tank 11 and the rinse tank 13 are connected to each tank so that the article 20 can be lowered. It is designed to hold a closed system to the outside system. In addition, in the compartment located in the drying zone 8,
A solvent recovery device 9 filled with activated carbon can be connected, and exhaust gas is recovered from the compartment of the drying zone 8 to the solvent recovery device 9 to adsorb the solvent on the activated carbon. The solvent is collected by sending hot air to the adsorbent to desorb it.

【0012】以下、ターンテーブル方式による水切り乾
燥の手順を説明する。電子部品や機械部品などの水洗浄
後の物品20aは、搬入出ゾーン6に位置する区画室の
ハッチ7を開けて、水切り乾燥処理を終了した物品20
dを取り出した後、前記物品20aを前記区画室に入れ
てハッチ7を閉じ、ターンテーブル21を回転して水切
りゾーン1に移動する。
The procedure of draining and drying by the turntable method will be described below. The article 20a after being washed with water, such as an electronic component or a mechanical component, is the article 20 that has been drained and dried by opening the hatch 7 of the compartment located in the loading / unloading zone 6.
After removing d, the article 20a is placed in the compartment, the hatch 7 is closed, and the turntable 21 is rotated to move to the draining zone 1.

【0013】次に、水切りゾーン1に移動された物品2
0bは、水切り槽11に降下し、溶剤中に浸漬して超音
波装置12から放射される超音波で処理し、物品20b
に付着する水分を除去する。水分の量が増加した比較的
軽い溶剤は、水切り槽11の壁を溢流して水分離器18
に移され、比重差で水を分離した後、溶剤補充タンク1
9に移され、水切り剤を補充した後、ポンプで水切り槽
11に戻される。そして、水切りされた物品20bは水
切り槽11から区画室内に引き上げ、ターンテーブル2
1を回転してリンスゾーン3に移動される。
Next, the article 2 moved to the draining zone 1
0b drops into the draining tank 11, is immersed in a solvent and is treated with ultrasonic waves emitted from the ultrasonic device 12,
Remove the water that adheres to. The relatively light solvent with the increased amount of water overflows the wall of the draining tank 11 and overflows the water separator 18
And water is separated by the difference in specific gravity, and then the solvent replenishment tank 1
After being moved to 9 and supplemented with a draining agent, it is returned to the draining tank 11 by a pump. Then, the drained article 20b is pulled up from the drainage tank 11 into the compartment, and the turntable 2
1 is rotated and moved to the rinse zone 3.

【0014】リンスゾーン3に移動された物品20c
は、リンス槽13に降下され、該槽の底部に設けた液溜
で加熱され蒸発したパーフルオロ有機化合物蒸気でリン
スして溶剤中の界面活性剤をすすぎ洗う。リンスされた
物品20cは、再び、ターンテーブル21の回転により
乾燥ゾーン8に移動される。
Article 20c moved to rinse zone 3
Is dropped into the rinse tank 13 and rinsed with the perfluoroorganic compound vapor that has been heated and evaporated in the liquid reservoir provided at the bottom of the tank to rinse the surfactant in the solvent. The rinsed article 20c is again moved to the drying zone 8 by the rotation of the turntable 21.

【0015】乾燥ゾーン8に移動された物品20dは、
前記のパーフルオロ有機化合物のリンス液を乾燥除去
し、該区画室からの排ガスは溶剤回収装置9に送られて
活性炭10に吸着され、乾燥空気は乾燥ゾーン8の区画
室に戻される。活性炭10に吸着されたパーフルオロ有
機化合物は、熱風で脱着して回収される。乾燥された物
品20dは、ターンテーブル21を回転して搬入出ゾー
ン6に戻され、ハッチ7から取り出される。
The articles 20d transferred to the drying zone 8 are
The rinse liquid of the perfluoroorganic compound is dried and removed, the exhaust gas from the compartment is sent to the solvent recovery device 9 and adsorbed by the activated carbon 10, and the dry air is returned to the compartment of the drying zone 8. The perfluoro organic compound adsorbed on the activated carbon 10 is desorbed and collected with hot air. The dried article 20d is returned to the loading / unloading zone 6 by rotating the turntable 21 and taken out from the hatch 7.

【0016】本発明では、パーフルオロ有機化合物に界
面活性剤を添加することにより、水洗浄後の物品に付着
する水分の除去性能を高めることができ、かつ、水切り
乾燥装置を閉鎖系に保持することにより、溶剤をほぼ完
全に回収して再利用することができるため、ランニング
コストを大幅に低減することができる。
In the present invention, by adding a surfactant to the perfluoroorganic compound, the performance of removing water adhering to the article after washing with water can be enhanced, and the draining and drying device is kept in a closed system. As a result, the solvent can be almost completely recovered and reused, so that the running cost can be significantly reduced.

【0017】上記実施例で使用したパーフルオロ有機化
合物(旭化成社製、アクアドライNS10)と、従来使
用していたフロン113の物性を対比すると下記表1の
とおりである。
Table 1 below shows the comparison of the physical properties of the perfluoro organic compound (Aqua Dry NS10, manufactured by Asahi Kasei Co., Ltd.) used in the above examples with that of CFC 113 used conventionally.

【0018】[0018]

【表1】 [Table 1]

【0019】[0019]

【発明の効果】本発明は、上記の構成を採用することに
より、水切り性能の優れた溶剤を使用し、水切り槽、リ
ンス槽及び乾燥室からなるクローズド化装置で水切り乾
燥を行うことができるので、大気を汚染することがで
く、溶剤をほぼ完全に回収して再利用することができる
ので、溶剤の消費を大幅に押さえることができ、ランニ
ングコストの低減を可能にした。
According to the present invention, by adopting the above-mentioned constitution, a solvent having an excellent draining performance can be used, and the draining and drying can be carried out by a closed apparatus comprising a draining tank, a rinse tank and a drying chamber. Since the air is not polluted and the solvent can be almost completely recovered and reused, the consumption of the solvent can be significantly reduced and the running cost can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の1実施例である密閉式水切り乾燥装置
の構成図である。
FIG. 1 is a configuration diagram of a closed drainer according to an embodiment of the present invention.

【図2】ターンテーブルを採用した本発明の密閉式水切
り乾燥装置の斜視図である。
FIG. 2 is a perspective view of a closed type draining / drying device of the present invention which employs a turntable.

【図3】図2のターンテーブルの各処理ゾーンを説明す
るための平面図である。
FIG. 3 is a plan view for explaining each processing zone of the turntable of FIG.

【図4】従来の水切り乾燥装置の構成図である。FIG. 4 is a configuration diagram of a conventional drainer / dryer.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 水洗後の物品を、パーフルオロ有機化合
物を主成分とし、界面活性剤を添加した溶剤中に浸漬
し、超音波又は噴流で処理した後、前記物品をパーフル
オロ有機化合物蒸気中で蒸気洗浄して界面活性剤をリン
スし、さらに、乾燥室に移し、乾燥室の排ガスを吸着剤
で回収して再利用することを特徴とする物品の水切り乾
燥方法。
1. An article after being washed with water is immersed in a solvent containing a perfluoroorganic compound as a main component and a surfactant and treated with ultrasonic waves or a jet stream, and then the article is exposed to perfluoroorganic compound vapor. A method for draining and drying an article, which comprises: rinsing with a steam to rinse the surface-active agent, further moving to a drying chamber, and collecting exhaust gas in the drying chamber with an adsorbent for reuse.
【請求項2】 パーフルオロ有機化合物を主成分とし、
界面活性剤を添加した溶剤を収容し、超音波又は噴流手
段を備えた水切り槽と、パーフルオロ有機化合物蒸気で
界面活性剤を除去するリンス槽と、排ガスから溶剤を回
収する装置を付設した乾燥槽を環状に配置し、槽上部に
ターンテーブル方式の移動機構を設けて各槽間の物品の
移動を可能にしたことを特徴とする物品の密閉式水切り
乾燥装置。
2. A perfluoro organic compound as a main component,
Drainage tank containing a solvent with a surfactant added, equipped with ultrasonic waves or jetting means, a rinse tank for removing the surfactant with perfluoroorganic compound vapor, and a drying device equipped with a device for recovering the solvent from the exhaust gas. A closed drainer for articles, characterized in that the tanks are arranged in an annular shape, and a turntable-type moving mechanism is provided on the upper part of the tanks to enable movement of articles between the tanks.
JP1008795A 1995-01-25 1995-01-25 Draining drying method for article and device therefor Withdrawn JPH08200951A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1008795A JPH08200951A (en) 1995-01-25 1995-01-25 Draining drying method for article and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1008795A JPH08200951A (en) 1995-01-25 1995-01-25 Draining drying method for article and device therefor

Publications (1)

Publication Number Publication Date
JPH08200951A true JPH08200951A (en) 1996-08-09

Family

ID=11740564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1008795A Withdrawn JPH08200951A (en) 1995-01-25 1995-01-25 Draining drying method for article and device therefor

Country Status (1)

Country Link
JP (1) JPH08200951A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002370001A (en) * 2001-06-13 2002-12-24 Shin Ootsuka Kk Solvent separator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002370001A (en) * 2001-06-13 2002-12-24 Shin Ootsuka Kk Solvent separator

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