JPH0821722A - Method and equipment for measuring shape - Google Patents

Abstract

PURPOSE:To position an article to be measured easily, and to enable the accurate and quick measurement of a shape by computing the quantity of relative displacement, automatically moving a measuring means and the article to be measured and detecting the measuring part of the article to be measured on a measuring device. CONSTITUTION:A flow 94 is directed upwards and an article to be measured 93 is placed on a stage 92, and the stage 92 is moved to below a CCD camera 18 so that the flaw 94 is monitored 104 by using a console panel 99. The measuring part of the starting point of measurement is assigned at a desired place on a screen 106 by a mouth 27, and a processing starting signal is input by a keyboard 105. An arithmetic processing means receives the signal, and computes the quantity of relative displacement between a probe 98A and the measuring part. The quantity is converted by the movement signals of each of the base plate 92 and the probe 98A by a position control means, and output to a driving control circuit 100B. Accordingly, the stage 92 and the probe 98A automatically start their relative displacement so that the measuring part is positioned just under the probe 98A, and the measuring part is positioned. The probe 98A automatically falls by the command of a sequence controller 100A, and measurement is started.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shape measuring method and apparatus, and when a surface measuring instrument such as a surface roughness measuring machine or a contour measuring machine analyzes the surface of an object to be measured, its stylus is not covered. It can be used for positioning the measurement object at the measurement site.

[0002]

BACKGROUND ART Conventionally, a shape measuring device such as a surface roughness measuring device or a contour measuring device has been used to analyze the surface properties of an object to be measured such as scratches and wear states of machine parts, or surface shape. There is. The positioning of the object to be measured in these shape measuring devices is performed by the operator checking the measurement site of the object to be measured with a microscope or the like installed separately, placing the object to be measured on the shape measuring device, and visually observing the stylus. It is performed according to the measurement site.

FIG. 7 shows a conventional surface roughness measuring machine 90. The surface roughness measuring device 90 has a base 9 on the lower side.
1, and a mounting table 92 is provided on the upper surface of the base 91. The stage 92 has a motor (not shown) inside and is movable in the X and Y directions indicated by the arrows in the figure. An object to be measured 93 is placed on the upper surface of the table 92, and the surface of the object to be measured 93 has scratches 9 to be analyzed.
There are four.

A pillar 95 is provided on a part of the base 91, and a drive box 96 is installed on the pillar 95. The drive box 96 can be moved in the Z direction indicated by the arrow in the figure by a motor (not shown) built in the column 95. The arm 9 is provided below the drive box 96.
7 is supported. The arm 97 can be moved in the X direction in the figure by a motor (not shown) built in the drive box 96. A detector 98 is attached to the arm 97, and a probe 9 is attached to the tip of the detector 98.
8A is attached. The stylus 98A swings when it comes into contact with the object to be measured 93, and the swing width at that time is detected by a differential transformer (not shown) incorporated in the detector 98 and converted into an electric quantity. The electric quantity is processed into an analog signal by a signal processing unit (not shown) and further converted into a digital signal by an A / D unit (not shown).

An operation panel 99 is provided on another part of the base 91. By operating the operation panel 99, an operation command signal for individually operating each of the above-described motors is output, and the stylus 98A attached to the tip of the detector 98 is arbitrarily attached to the stage 92. It is possible to move to the three-dimensional position.

Further, a personal computer 103 is arranged near the base 91. The personal computer 103 is internally provided with an analysis processing unit (not shown) for performing analysis processing of the swing width of the stylus 98A detected by the differential transformer. And the personal computer 10
3 includes a CRT monitor 104 and a keyboard 105, and the CRT monitor 104 includes a screen 106.

The control unit 100 is provided near the base 91.
Is installed. A sequence controller 100A and a drive control circuit 100B are provided inside the control unit 100. The sequence controller 100A is
Sequence commands such as the movement amount, movement direction, and movement order of the stylus 98A are output to the drive control circuit 100B so that the measurement operation is automatically performed based on a predetermined program. The drive control circuit 100B is the sequence controller 100.
Each motor is individually operated based on the sequence command from A or the like. A printer 102 is installed above the control unit 100. The printer 102 can record the measurement data processed by the analysis processing unit in the personal computer 103.

The surface roughness measuring machine 90 as described above performs the measuring operation as follows. The measurement work is performed in two stages, the stylus positioning operation and the contact measurement operation. First,
In the stylus positioning operation, the position of the scratch 94 is searched by a microscope or the like (not shown) installed separately, the measurement site is confirmed, and then the measured object 93 is placed on the stage 92. Then, the operation panel 99 is operated to move the stylus 98A through the arm 97 in the X direction by a length equal to or longer than the length of the measurement site. Further, the stage 92 is moved in the X-axis direction and the Y-axis direction to move the stylus 98.
A is positioned immediately above the measurement starting point in front of the measurement site including the scratch 94 confirmed earlier. At this time, the drive box 96 is lowered to confirm that the stylus 98A surely contacts the measurement start point, and the position of the stage 92 is finely adjusted as necessary. Then, the drive box 96 is returned to the upper position and put in the standby state.

Next, the contact measurement step is automatically performed by pressing the measurement start button arranged on the operation panel 99 to operate the sequence controller 100A.
The sequence controller 100A first lowers the drive box 96, and the stylus 98A comes into contact with the measurement start site accordingly. Then, after the differential transformer detects the contact by sensing the shake of the stylus 98A, the arm 97 is started to move in the X direction, and the stylus 98A traces the surface of the DUT 93.

As a result, the stylus 98A swings in accordance with the irregularities on the surface of the object to be measured 93, and the amount of this swing is converted into an electrical quantity by the differential transformer incorporated in the detector 98, and the signal processing unit and A / Personal computer 1 via D section
The data is output to the analysis processing unit built in 03 to be analyzed by various calculations. At the same time, the shape of the surface of the object to be measured 93 is enlarged and displayed on the screen 106 of the CRT monitor 104. Further, the measurement data is output to the printer 102 as needed. When the arm 96 reaches a predetermined movement amount, the drive box 96 is raised and the stylus 98A is separated from the measuring member 93. This ends the measurement operation.

[0011]

However, in such a measuring operation, when the scratch 94 or the like of the object to be measured 93 is very small, the measurement site is measured by using a microscope or the like installed separately during the positioning operation. Must be confirmed, and after confirmation, it is necessary to transfer the object to be measured to the shape measuring device, which causes a problem of troublesome work. Further, on the shape measuring device, the positioning operation of the object to be measured is performed by the eye registration of the operator, and the operation panel 99 is operated to repeat the forward and backward movements in the respective axial directions. There is a problem in that it is not easy to accurately adjust the to the desired measurement position.

Since it is not easy to perform visual positioning, there is a problem in that it takes time to position an object to be measured and measurement efficiency cannot be improved. In addition, there is a problem that an expert must be relied on to ensure that the stylus is aligned with the desired measurement site. Furthermore, when repeatedly measuring the same measurement point, such as remeasurement,
Since the positioning process is carried out by visual examination every time measurement is performed, the data obtained by them contain a lot of measurement errors due to non-uniform positioning, resulting in a problem of low accuracy. There was a strong demand for a solution.

An object of the present invention is to provide a shape measuring method and a device capable of easily, quickly and accurately measuring the shape of an object to be measured at an arbitrary measurement position, even by an unskilled person.

[0014]

SUMMARY OF THE INVENTION According to the present invention, a measuring position of an object to be measured can be detected on a shape measuring apparatus, so that the object to be measured is not replaced and a measuring touch to a specified position is made. The movement of the needle or the like can be calculated not visually but by calculation, thereby facilitating the aforementioned difficult positioning, improving the measurement efficiency, and suppressing the occurrence of measurement error.

Specifically, the shape measuring method of the present invention uses the aiming means capable of detecting the position of the measurement site of the object to be measured and the measuring means capable of measuring the shape of the measurement site. While detecting the position of the measurement site with, to obtain the amount of coordinate displacement between the designated coordinate system of the aiming means and the moving coordinate system of the measuring means, the amount of coordinate displacement and the measurement site designated by the aiming means. The relative displacement amount between the measurement site and the position of the measuring means in the moving coordinate system is calculated from the position, and the measuring means and the object to be measured are relatively moved based on the relative displacement amount, and the measurement is performed. It is characterized in that the shape of the measurement site is measured by means.

Further, the shape measuring apparatus of the present invention comprises an aiming means capable of detecting the position of the measurement site of the object to be measured, a measuring means capable of measuring the shape of the measurement site, the object to be measured and the measuring means. And a moving means for relatively moving, and a coordinate displacement amount between the designated coordinate system of the aiming means and the moving coordinate system of the measuring means to obtain the coordinate displacement amount and the position of the measurement site detected by the aiming means. From the calculation means for calculating the relative displacement amount between the measurement site and the position of the measurement means in the moving coordinate system, and the measurement means by controlling the movement means based on the relative displacement amount calculated by the calculation means. And position control means for moving the object to be measured relative to each other. Further, the shape measuring apparatus of the present invention is characterized in that the calculation means includes a standby control unit for starting calculation of the relative displacement amount when a predetermined signal is received.

[0017]

In such a shape measuring method and apparatus of the present invention, since the aiming means can detect the position of the measuring portion of the object to be measured, it is necessary to confirm the measuring position separately using an external microscope or the like. There is no need to transfer the DUT. Further, since the calculating means for calculating the relative displacement amount between the measurement site and the measuring means is provided, the object to be measured and the measuring means may be moved relative to each other according to the relative displacement amount. There is no need to examine the eyes or align the stylus by a skilled person. Thereby, the above-mentioned object is achieved.

Further, in the shape measuring apparatus of the present invention, the calculation means includes a standby control section for starting the calculation of the relative displacement amount between the measurement site and the measurement means when the predetermined signal is received. The calculation of the relative displacement amount is started after the measurer accurately specifies the measurement site using the aiming means, so that unnecessary calculation processing is eliminated while the measurement site is specified. This will prevent measurement at the wrong position.

[0019]

An embodiment of the present invention will be described below with reference to the drawings. Note that the shape measuring apparatus 10 of the present embodiment has substantially the same constituent parts as the shape measuring apparatus 90 of the conventional example of FIG. 7 described above, and the constituent parts that are the same as those of the conventional example are the same for simplification. The individual description will be omitted by using the reference numerals.

1 and 2, the surface roughness measuring machine 10
Has a base 91, and a moving coordinate system 10A that is a predetermined three-dimensional coordinate is set. Base 91
A platform 92 is arranged on the upper surface of the platform 9.
2 is a loading means 11. The stage table 92 has a stage drive unit 12 and a stage position detection unit 13 (not shown) inside. An object to be measured 93 is placed on the upper surface of the stage 92, and a surface of the object to be measured 93 has a scratch 94.

A column 95 is arranged on a part of the base 91, and a drive box 96 is installed on the column 95. An arm 97 is supported below the drive box 96. A detector 98 is attached to the arm 97. A probe 98A is attached to the tip of the detector 98. The detector 98 has a built-in differential transformer 96A. Further, the drive box 96 moves the stylus 98A in the X-axis direction via the detector 98, and at the same time, the object to be measured 9
3 is provided with a scanning drive unit 14 and a stylus position detection unit 15 for the purpose of scanning and detecting the surface.

A support base 16 is provided on the other part of the base 91, and a support member 17 projecting forward is attached to the support base 16. A CCD camera 18 is installed on the tip side of the support member 17. A knob 19 is provided on the side surface of the support member 17, and the knob 1
By manually operating 9, the support member 17 moves along with the CCD camera 18 along the support base 16 in the Z of the coordinate system 10A.
It can be moved up and down in the axial direction.

An operation panel 99 is provided on another part of the base 91. The control unit 100 is installed near the base 91. Inside the control unit 100, a sequence controller 100A, a drive control circuit 100B, a position output unit 20 and a controller 21 are provided. Sequence controller 10
0A is the same as the conventional one. Further, a printer 102 is installed above the control unit 100. The drive control circuit 100B includes the stage drive unit 12 and the scan drive unit 14 to form the moving unit 22.

The stage drive unit 12 is a drive mechanism or the like built in a base 91 or a stage 92 which is the stage means 11, and the stage 92 moves with respect to the base 91.
It is possible to move the OA in the X-axis direction and the Y-axis direction. The scan drive unit 14 is a drive mechanism or the like built in the drive box 96, and can move the arm 97 in the X-axis direction. Further, the scan driving unit 14
It is possible to move up and down in the Z-axis direction by a drive mechanism or the like built in the column 95. As a result, the stylus 98A becomes X
It is movable in the axial and Z-axis directions.

The drive control circuit 100B includes an operation panel 99.
And sequence controller 100A and controller 21
Drive signals are output to the stage drive unit 12 and the scan drive unit 14 based on the signals from and, and the stage base 92 and the stylus 98A are output.
And to move respectively.

The stylus 98A constitutes the measuring means 23 together with the differential transformer 96A, the signal processing section 96B and the A / D section 93C in the detector 98. Since each component of the measuring means 23 is the same as that of the conventional example, the description thereof is omitted here.

The object position detecting section 13 constitutes a position detecting means 24 together with the stylus position detecting section 15. The stage position detection unit 13 is configured by using an existing orthogonal encoder or the like built in the stage 92, and the stage 9 is used.
The position 2 is detected, and this is output to the position output unit 20 as stage table coordinate data. The stylus position detection unit 15 is configured by using an existing orthogonal encoder or the like built in the drive box 96 and the column 95, detects the position of the stylus 98A, and uses this as stylus coordinate data. Output to the output unit 20.

The position output unit 20 uses the stage table coordinate data (X
a, Ya) and the stylus coordinate data (Xb, Zb), and the relative position (Xb− of the stylus 98A with respect to the stage 92.
Xa, Ya, Zb) is output to the controller 21 as a three-dimensional coordinate value (x2, y2, z2) of the moving coordinate system 10A. Here, Xa in the stage table coordinate data is a moving position in the X axis direction with respect to the base 91 of the stage 92 as shown in FIG. 3, and Ya is also a moving position in the Y axis direction. Further, Xb of the stylus coordinate data is the stylus 98A (that is, the arm 97).
Is a moving position in the X-axis direction with respect to the drive box 96 (that is, the base 91), and Zb is a moving position in the Z-axis direction with respect to the support column 95 (that is, the base 91) of the stylus 98A. Therefore, the movement position of each of the X, Y, and Z axes of the stylus 98A with respect to the stage 92 is x2 = Xb−Xa, y2 = −Ya, z2 =.
It is represented by Zb. The relative position coordinate system 10B, which is the three-dimensional coordinate system here, is set so that the value of the Y axis of the stylus 98A becomes zero. The table coordinate data (Xa, Ya) is the coordinate value of the center position of the table 92, and the stylus coordinate data (Xb, Zb) is the coordinate value of the tip of the stylus 98.

A personal computer 103 is arranged near the base 91. The personal computer 103 has an image processing unit 25, a position designation unit 26, and an analysis processing unit 103A inside, and further includes a CRT monitor 104, a keyboard 105, and a mouse 27. The CRT monitor 104 includes a screen 106. A cursor 28 is displayed on the screen 106, and the cursor 28 can specify an arbitrary position on the screen 106 by operating the mouse 27. These image processing means 25, position designation means 26 and mouse 2
7 and CCD camera 18 and CRT monitor 104
Aiming means 29 is configured to include and.

The image processing means 25 is constructed by using an existing image processing circuit or the like, receives an image signal of a predetermined region of the object to be measured 93 photographed by the CCD camera 18, processes the image signal, and displays it on the CRT monitor at a predetermined magnification. Enlarge and display.

The position designation means 26 CRs the cursor signal.
It is possible to output to the T monitor 104 to display the cursor 28, and to provide the mouse 27, and to move the cursor 28 according to the operation of the mouse.

Here, the function of the aiming means 29 is shown in FIGS.
It will be described in detail based on. In FIG. 4, an object to be measured 93 is further placed on the stage table 92. DUT 93
A part of the image includes a scratch 94 and is photographed by the CCD camera 18, and this part is a photographing region 35. Further, the image processing means 25 has an image reference point 37 in the photographing area 35. At this time, the image reference point 37 is the moving coordinate system 10
The coordinate value (x3, y3) is provided by detecting the position of the photographing region 35 in A and performing calibration or the like, and is stored in the image processing unit 25 as coordinate displacement amount data.

FIG. 5 schematically shows an image of the photographing area 35 displayed on the screen 106. On the screen 106, the photographing area 35 including the scratch 94 is displayed, and at the same time, there is an image reference point 37 that is not actually displayed. Also, the cursor 2 is displayed on the screen 106.
8 is displayed. However, although the positional relationship between the scratch 94 and the cursor 28 and the like is three-dimensionally shown in FIG. 5,
Actually, the scratch 94 and the cursor 28 are displayed on the same screen of the screen 106.

At this time, the position designating means 26 has a designated coordinate system 38 which is not actually displayed and can detect the position of the cursor 28. Then, the detected coordinate values (x4, y4) are output to the controller 21 as designated position coordinate data. Further, the position designated by the cursor 28 is a position where measurement is started and is a measurement site 39.

Further, the image processing means 25 detects the position of the image reference point 37 in the designated coordinate system 38, and the coordinate values (x5, y5) are stored in the storage means 25 in advance as correction value data. . Then, the image processing means 25
The aforementioned coordinate displacement amount data (x3, y3) and this correction data (x5, y5) are output to the controller 21. As a result, the aiming means 29 can magnify and display an arbitrary position of the DUT 93 and select and designate a point at that position. The selected position data (x4, y4) is output to the controller 21 together with the coordinate displacement amount data (x3, y3) and the correction value data (x5, y5).

Returning to FIGS. 1 and 2, the controller 21
Includes a calculation unit 30, a storage unit 31, and a position control unit 32. The calculation means 30 is composed of a standby control means 33 and an arithmetic processing means 34, and the relative displacement amount between the measurement site designated by the cursor 28 and the stylus 98A, and the stage 92 that moves based on the relative displacement amount. The coordinate value of the moving destination of the stylus 98A is calculated.

The standby control means 33 causes the arithmetic processing means 34 to start arithmetic processing after receiving a processing start signal from the keyboard 105. The arithmetic processing means 34 receives the instruction to start the arithmetic operation from the standby control means 33, and receives the stylus coordinate data (x from the position output portion 20 from the position output portion 20, the image processing means 25, and the position designation means 26.
2, y2, z2), designated position coordinate data (x4, y
4), the coordinate variable data (x3, y3, z3) is read, and the relative displacement amount (ΔX, ΔY, ΔZ) and the destination coordinate value (x6, y6, z6) are calculated. Here, the relative displacement amount (ΔX, ΔY, ΔZ) is ΔX = x3−
x2 + x4-x5 and ΔY = y3-y2 + y4-y5. Also, since the movement in the Z-axis direction is performed by automatic descent,
ΔZ = 0. Therefore, the destination coordinate value (x6, y6,
z6) is x6 = x2 + ΔX, y6 = y2 + ΔY, z6 =
It is calculated by z2 + ΔZ = z2.

The storage means 31 is an existing semiconductor memory device or the like, and the coordinate values (x6, y6, z) of the moving positions of the stage 92 and the stylus 98A calculated by the arithmetic processing means 33.
6) are sequentially stored. The position control means 32 designates the movement amount and movement direction of the stage 92 and the stylus 98A based on the relative displacement amount calculated by the arithmetic processing means 34, and designates these as the stage movement signal. And a stylus movement signal, respectively, and output to the drive control circuit 100B.

Next, the surface roughness measuring device 1 having such a configuration
A procedure for performing measurement at 0 will be described based on the flowchart shown in FIG.

First, the operator places the object to be measured 93 on the upper surface of the table 92 so that the scratch 94 faces upward (step S1). Next, using the operation panel 99, the scratch 94 is C
The stage 92 is moved to a position below the CCD camera 18 so that it is displayed on the RT monitor 104. At this time, a movement operation of the stylus 98A in the Z-axis direction (see reference numeral 10A in FIG. 1) is performed, and when the stage 92 and the stylus 98A are relatively moved,
The stylus 98A is prevented from interfering with the DUT 93 and the CCD camera 18 (step S2).

Then, on the screen 106 of the CRT monitor 104, the operator uses the mouse 27 to move the cursor 28 to a desired position where the measurement is to be started, and designates the measurement site 39 which is the measurement start point (step S).
3). Furthermore, after designating the measurement site 39, the operator operates the keyboard 105 to input a process start signal in order to cause the standby control means 33 to start the arithmetic process (step S4).

Further, the arithmetic processing means 34 receives the processing start signal via the personal computer 103, and the relative displacement amount between the stylus 98A and the measurement site and the stage 92.
And the coordinate values of the moving destination of the stylus 98A are calculated (step S5).

Subsequently, the coordinate values of the moving destinations of the stage 92 and the stylus 98A calculated by the calculating means 19 are stored in the storing means 3.
1 is stored (step S6). Then, the position control unit 32 receives the relative displacement amount from the arithmetic processing unit 34, converts the relative displacement amount into a stage movement signal and a stylus movement signal, and outputs them to the drive control circuit 100B (step S7).

As a result, the stage 92 and the stylus 98A automatically start relative movement so that the measurement site 39 is located directly below the stylus 98A and positioning is performed (step S8). Further, similarly to the conventional case, the stylus 98A is automatically lowered by the command of the sequence controller 100A to start the measurement (step S9). When a new measurement site is designated on the same DUT 93 to perform measurement, the process returns to step S2 and is repeated (step S1).
0).

According to this embodiment, the measurement site 3
9 can be specified with the object to be measured 93 placed on the table 92, and the object to be measured 93 can be positioned by specifying the measurement site 39 with the cursor 28 on the screen 106. As a result, the time required for the stylus positioning process can be significantly reduced, and the efficiency of the measurement operation can be dramatically improved. Further, since the portion photographed by the CCD camera is enlarged and displayed at a predetermined magnification, the measurement site 39 can be accurately designated without relying on eye examination by a skilled person.

The calculation means 30 has a standby control means 3
3 is provided, it is possible to prevent useless movement such that the stylus 98A and the stage 92 always follow the movement of the cursor 28. Further, since the measurement can be executed after the measurement site 39 is specified with certainty, it is possible to prevent problems such as measurement at an incorrect position and careless contact with another portion.

Further, the surface roughness measuring machine 10 is provided with the stage 9
2 and the coordinates of the moving destination of the stylus 98A (x6, y6, z
6) is provided, so that the stored coordinate values are displayed on the screen 106 in a predetermined display form.
If this is displayed, the coordinate value can be specified by using the mouse 27, and the stage 92 and the stylus 98A automatically move based on the coordinate value. Even in the case of, it can be performed accurately and in a short time. Further, since the positioning is not performed by the register, the measurement error due to the positioning can be suppressed to be small and the measurement accuracy can be improved.

The present invention is not limited to the above-described embodiments, but includes modifications and the like within a range in which the object of the present invention can be achieved. For example, in the above-described embodiment, the calculation means 30 includes the standby means 33, but even if the calculation means 30 does not include the standby means 33, it is included in the present invention. However, by providing the standby means 33, it is possible to avoid unnecessary operation and prevent erroneous designation of the measurement position.

In the above embodiment, the surface roughness measuring machine 10 is provided with the storage means 31, but this storage means 31 is used.
May not be provided. However, the storage means 31
It is desirable to provide the above because it is possible to perform re-measurement with a small measurement error in a short time.

In the above embodiment, the aiming means 29 is C
The CD camera 18 is provided, and the measurement site 39 is designated by the image displayed on the screen 106.
In addition to the CD camera 13, a microscope having a reticle in the field of view may be attached to the support 16.

At this time, if the aiming point of the reticle is designed to be a predetermined position from the origin of the three-dimensional coordinate system 10A,
Since the CRT monitor 104, the image processing means 25, etc. are unnecessary, it is economical and the displacement amount can be easily calculated. However, when using a microscope or the like, positioning is performed using the operation panel 9
Since it is necessary to move the stage 92 so that the measurement site 39 matches the aiming point of the reticle using 9, the aiming means 29 is preferably equipped with the CCD camera 18 from the viewpoint of measurement efficiency.

In the above embodiment, the stage 92 is moved in the X-axis and Y-axis directions, and the stylus 98A is moved in the Z-axis and X-axis directions, so that the XYZ three-dimensional relative movement is performed. However, one of the stage 92 and the stylus 98A may move in the XYZ triaxial directions with respect to the other. In short, if the measurement site 39 is located directly below the stylus 98A by the relative movement of each. Good.

Although the CCD camera 18 can be manually moved up and down by using the knob 19, it may be automatically moved up and down by a motor or the like, and it can be moved in a multidimensional manner and equipped with an encoder or the like. The coordinate data may be output to the arithmetic processing means 34. By doing so,
The scratch 94 can also be caught by moving the CCD camera 18, which further improves the measurement efficiency.

Although the cursor 28 has a cross shape in the above embodiment, the shape is not limited to the cross shape, and may be, for example, a circle or an arrow, as long as it can be designated. Good. Further, the cursor 28 does not have to be moved by the mouse 27, but may be moved by, for example, a joystick or an arrow key arranged on the keyboard 105.

The surface roughness measuring device 10 is a stylus 98A.
However, a non-contact type surface roughness measuring device for analyzing the property of the surface of the object to be measured 93 by a laser beam or the like may be used. Further, in the above-mentioned embodiment, the surface roughness measuring machine 10 for analyzing the surface roughness is shown, but in addition, a shape measuring device such as a contour measuring machine may be used.

Further, in the above embodiment, the screen 10
6, the object to be measured 93 is displayed in a state of being photographed by the CCD camera 18, but the display form may be a contour map or a bird's eye view type, and may be arbitrarily determined depending on the shape of the object to be measured 93 and the like. .

Further, in the above-mentioned embodiment, the measurement site 39 which is the measurement start point is designated as only one place, but the CNC three-dimensional measurement may be performed by designating the measurement start points at a plurality of places by the combination or by designating the areas. Good.

As described above, according to the shape measuring method and apparatus of the present invention, the measurement site of the object to be measured can be detected on the shape measuring apparatus. In addition, the measurement operation can be performed accurately and quickly, and thus the measurement efficiency can be dramatically improved, and the measurement error is small and the measurement can be performed with high accuracy. Further, since the shape measuring apparatus of the present invention is provided with the standby means, it is possible to omit useless calculation processing and prevent erroneous designation of the measurement site.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a block diagram showing a main part of the embodiment.

FIG. 3 is a schematic diagram showing coordinate data of the embodiment.

FIG. 4 is a schematic diagram showing the relationship of the coordinate systems of the above-described embodiment.

FIG. 5 is a schematic diagram showing an aiming operation of a measurement site in the above-mentioned embodiment.

FIG. 6 is a flow chart showing the measurement procedure of the above embodiment.

FIG. 7 is a perspective view showing a conventional example.

[Explanation of symbols]

 10 Surface Roughness Measuring Machine 10A Moving Coordinate System 11 Placement Means 22 Moving Means 23 Measuring Means 29 Aiming Means 30 Calculating Means 32 Position Control Means 33 Standby Means 38 Specified Coordinate System 39 Measuring Sites 92 Mounting Platform 93 Measured Objects 98A Touch needle

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Takao Ishitoya 1-20-1 Sakado, Takatsu-ku, Kawasaki-shi, Kanagawa Mitsutoyo Co., Ltd.

Claims (3)

[Claims] 1. Using a sighting means capable of detecting the position of a measurement site of an object to be measured and a measurement means capable of measuring the shape of the measurement site, and detecting the position of the measurement site by the aiming means, The amount of coordinate displacement between the designated coordinate system of the aiming means and the moving coordinate system of the measuring means is acquired, and the measurement in the moving coordinate system is performed based on the amount of coordinate displacement and the position of the measurement site detected by the aiming means. Calculating a relative displacement amount between the portion and the position of the measuring means, moving the measuring means and the object to be measured relative to each other based on the relative displacement amount, and measuring the shape of the measuring portion by the measuring means. A shape measuring method characterized by. 2. A sighting means capable of detecting the position of a measurement site of an object to be measured, a measurement means capable of measuring the shape of the measurement site, and a moving means for relatively moving the object to be measured and the measurement means. The coordinate displacement amount between the designated coordinate system of the aiming means and the moving coordinate system of the measuring means is acquired, and the coordinate displacement amount and the position of the measurement site detected by the aiming means are used for the movement coordinate system. Calculation means for calculating the relative displacement amount between the measurement site and the position of the measurement means, and the moving means is controlled based on the relative displacement amount calculated by the calculation means so that the measurement means and the object to be measured are relative to each other. A shape measuring device comprising: a position control unit for moving the position measuring unit. 3. The shape measuring apparatus according to claim 2, wherein the calculation means includes a standby control unit that starts calculation of the relative displacement amount when a predetermined signal is received. Shape measuring device.