JPH08241921A - Tray cassette for ic carrying device and tray cassette mount stand - Google Patents

Abstract

PURPOSE: To allow using only by mounting a cassette loaded with trays on a stand by providing a recording/reading means of trays on a tray cassette mount stand, monitoring the presence or absence of trays, and successively exchanging an empty tray with a next tray. CONSTITUTION: With a tray cassette mount stand 200 where a tray cassette 100 is fitted and positioned by positioning nibs 145 and 146, the recording of trays is read from a cassette memory 90 by a cassette memory reader 130. Then, a sensor passage hole 80 of the tray cassette 100 and a sensor 181 provided at the stand 200 monitor to prevent the trays from becoming empty. When a semiconductor IC to be tested loaded into the uppermost cassette of the tray cassette 100 disappears, a tray transfer 110 and a tray gripping nib 112 provided at the stand 200 grip and move the empty tray. Then, a next tray is pushed toward the uppermost stage by an elevator 121, an elevator shaft 122, and a drive motor 120 for elevator and the IC for test continues to be supplied.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a semiconductor IC to be tested.
A tray cassette for an IC transport device (hereinafter referred to as a tray cassette), which is used when the DUT is housed in a tray to carry the tray when performing a test (hereinafter referred to as DUT),
The present invention relates to a tray cassette mounting table used when placing a tray cassette on a C transport device.

[0002]

2. Description of the Related Art When conducting a test with a semiconductor test equipment, the DUT
Were stored in a tray, transported by a tray cassette, and the trays were arranged one by one in the IC transport device because there was no tray cassette mounting table.

FIG. 3 shows an embodiment of a tray cassette for a semiconductor testing device according to the prior art. FIG. 3 will be described.
(A) is a plan view of the tray cassette 99, (B) is a bottom view of the tray cassette 99, and (C) is a tray cassette 9
9 is a side view of FIG. 9, and (D) is a perspective view of the tray cassette 99. The tray 70 accommodating the DUT 60 is placed in the tray cassette 99, and the handle 10 is integrally provided on the upper portion 20 of the tray cassette so that a person can carry the tray 70, and a plurality of trays 70 accommodating the DUT 60 are operated by the hook 50. The tray 70 is taken in and out from below.

(C) is a side view of the tray cassette 99.
It is surrounded by 0 and constitutes an integral body.

(D) is a perspective view of the tray cassette 99.
A plurality of trays 70 in which the DUT 60 is housed can be operated by operating the hooks 50, and the trays 70 can be taken in and out.
Carry with 0.

Since the tray cassette 99 moves the tray 70 in and out from one direction below, it cannot be used in the conventional type tray cassette 99 when the IC transfer device is changed. That is, the tray cassette 99 is placed on the IC transfer device, the tray 70 is operated from the tray cassette by operating the hooks 50, and the trays 70 are taken out and used one by one.
It was a C transport device.

[0007]

If the tray cassette containing the tray is placed in the IC transport device, the tray cassette is placed in a new tray cassette and the IC transport device that can continue the work without taking out the tray from the tray cassette. Needed a stand. It is possible to provide a tray cassette and a tray cassette mounting base that can be transported while being placed in a tray cassette and that can be used by simply placing the tray cassette with the tray in the IC transport device without ejecting the tray from the tray cassette. Intended.

[0008]

In order to achieve the above object, the tray cassette and the tray cassette mounting base of the present invention are provided with means for improving operability. In order to facilitate the transportation of the tray cassette, the tray cassette acts as a handle only when it is transported, and when it is not transported, a means for fitting it in the sheath is provided, and a means for grasping the tray cassette with both hands is also provided. When inserting a tray into a tray cassette, a means is provided that allows the tray cassette to be inserted and removed from above and below, a means for reading the records of the tray placed in the tray cassette is provided, and the tray cassette can be placed on the tray cassette mounting table. The presence or absence of a tray is monitored by, and when the DUT in the tray becomes empty, a means for moving the empty tray and pushing up the next tray is provided.

[0009]

1 is a plan view of the tray cassette, (B) is a bottom view of the tray cassette, and (C) is a side view of the tray cassette. , (D) are perspective views of the tray cassette. FIG. 2 shows an embodiment of the tray cassette mounting base of the present invention, and FIG. 2A is a plan view in which a part of the tray cassette mounting base is cut away.
(B) is a front view in which a part of the tray cassette mounting base is cut away, and (C) is a side view in which a part of the tray cassette mounting base is cut out.

Referring to FIG. (A) and (B) are a plan view and a side view of the tray cassette 100.
Handles 12 and 13 are provided on 0, and handle storage cases 14 and 15
Is provided to store the handles 12 and 13. Tray cassette 10
A handle 17 that can hold 0 with both hands is provided. Four tray cassette columns 34 on the tray cassette base 43,
35, 36, 37 are provided, from the column 34 to the column 37,
An outer wall 38 surrounds the tray cassette 100 from the columns 35 to 36. A sensor passage hole 80 capable of monitoring the presence / absence of the tray 70 in the tray cassette 100 and a cassette memory 90 for reading the record of the tray 70
Was provided. A hook 51 is provided so that the tray 70 can be taken in and out from the lower part of the tray cassette 100. Positioning point holes 45 and 46 are provided for positioning the tray cassette 100 on the tray cassette mounting table 200. (C) is a front view of the tray cassette 100, and the periphery of the tray cassette 100 is surrounded by the outer wall 38 on the tray cassette base 43 to form an integrated body.

FIG. 2 will be described. Positioning claws 145 and 146 are provided on the tray cassette mounting base 200 for fitting with the position designation point holes 45 and 46 of the tray cassette 100. The tray cassette mounting table 200 fitted with the tray cassette 100 stores the data on the tray 70 in the cassette memory 90.
A cassette memory reader 130 for more reading is provided. Tray cassette 1 for monitoring so that the tray 70 does not become empty
00 sensor passage hole 80 to the tray cassette mounting table 200
The sensor 181 provided in the monitor monitors. Tray cassette 10
When the tray 70 containing the DUT 60 at the top of 0 becomes empty, the tray transfer 110 and the tray grasping claw 112 provided on the tray cassette mount 200 grab and move the empty tray 70, and push the next tray 70 to the top. An elevator 121, an elevator shaft 122, and an elevator drive motor 120 are provided. A fixing table 180 used when fixing the tray cassette mounting table 200 to the casters 190 for fine adjustment of the position is provided.

[0012]

Since the tray can be inserted into the tray cassette from above, the workability is improved, and the tray cassette can be carried easily because it has a handle and can be held with both hands. If the tray cassette is placed on the tray cassette mounting base, the handle will be stored in the handle storage case, which will not hinder the work. It is no longer necessary to carry the tray cassette and take out the tray from the tray cassette as in the past. DUT of tray of tray cassette
The status of is always monitored, and when the tray DUT becomes empty, the empty tray is moved by the tray transfer and tray grasping claws, and the next tray is pushed up by the elevator. Monitored by sensors.

[Brief description of drawings]

FIG. 1 is an embodiment of a tray cassette according to the present invention, (A) is a plan view of the tray cassette, (B) is a bottom view of the tray cassette, (C) is a side view of the tray cassette, and (D). 8) is a perspective view of the tray cassette.

FIG. 2 is an embodiment of a tray cassette mounting table according to the present invention, in which (A) is a plan view in which a part of the tray cassette mounting table is cut away, and (B) is a partial view of the tray cassette mounting table. FIG. 3C is a front view with a part cut away, and FIG.

FIG. 3A is a plan view of a tray cassette, FIG. 3B is a bottom view of the tray cassette, FIG. 3C is a side view of the tray cassette, and FIG. 8) is a perspective view of the tray cassette.

[Explanation of symbols]

10, 12, 13, 17 Handles 14, 15 Handle storage case 20 Tray cassette upper part 30 Tray cassette outer circumference 34, 35, 36, 37 Strut 38 Outer wall 40, 43 Tray cassette stand 45, 46 Position designation point hole 50, 51 Hook 60 DUT (semiconductor IC for test) 70 tray 80 sensor passage hole 90 cassette memory 99, 100 tray cassette (tray cassette for IC transport device) 110 tray transfer 112 tray grasping claw 120 elevator drive motor 121 elevator 122 elevator shaft 130 cassette memory Readers 145, 146 Positioning claws 180 Fixing stand 181 Sensors 190 Casters 200 Tray cassette mounting stand

Claims (6)

[Claims] 1. A tray (7) accommodating a DUT (60).
0), the tray cassette support (43), which is a skeleton of the tray cassette (100) that transports a plurality of trays (70) collectively, is supported by the tray cassette columns (34), (35). ,
(36) and (37) are provided, the columns (34) to (37) and the columns (35) to (36) surround the outer wall (38) of the tray cassette, and the tray cassette (100) holds the handle. The handle storage cases (14) and (15) for storing the handles (12) and (13) and the handle (17) that can be held by both hands are provided, and the position designation point hole (45) that determines the position of the tray cassette (100). , 46) and the tray (70) are provided with hooks (51) so that the trays (70) can also be taken out from the lower part, and the tray cassette for an IC transporting device is provided. 2. In addition to the constituent means according to claim 1, a sensor passage hole (80) for monitoring the presence or absence of the tray (70) of the tray cassette (100) is provided, and the above configuration is provided. Tray cassette for IC carrier. 3. A cassette memory (90) for recording on a tray (70) is provided in a tray cassette (100) in addition to the constituent means according to claim 1 or 2, and the above configuration is provided. Tray cassette for IC carrier. 4. A tray (70) containing a DUT (60).
In an IC carrier device having a tray cassette (100) containing a tray (70) and a tray cassette (100), a tray cassette mounting table (200) with positioning claws (145, 146) for accurately placing the tray cassette (100) is provided. The DUT (6) of the uppermost tray (70) of the tray cassette (100) mounted on the tray cassette mounting base (200) is provided.
0) becomes empty, a tray transfer (110) for moving the empty tray (70) and a tray grasping claw (112) for grasping the empty tray (70) are provided, and when the empty tray (70) is moved, the next tray is moved. An elevator (121) that pushes up (70) to the uppermost stage, an elevator shaft (122) that supports the elevator (121), and an elevator drive motor (120) that drives the elevator shaft (122) are installed, and a tray cassette mount (200) is installed. A tray cassette mounting table comprising casters (190) for fine adjustment of the position and a fixing table (180) for fixing the position, and having the above configuration. 5. A sensor (181) for monitoring through a sensor passage hole (80) for monitoring whether or not the tray (70) of the tray cassette (100) is empty, in addition to the constituent means according to claim 4. ) Is provided, and the tray cassette mounting base is provided with the above configuration. 6. A tray (70) contained in a tray cassette (100) in addition to the constituent means according to claims 4 and 5.
A tray cassette mounting table comprising a cassette memory reader (130) for reading a record of a cassette memory (90) that holds the record of, and having the above configuration.