JPH08247510A - Clean room - Google Patents

Abstract

PURPOSE: To prevent occurrence of a phenomenon of convection due to a hot air flow generated on the upper side of a production machine or the like by a method wherein the velocity of flow from a filter unit located in an area of arrangement of the production machine is made larger than that from the filter unit in the other area and the velocity of flow by a sucking device on the rear side of a floor is made larger than that in the other area. CONSTITUTION: Clean air from air conditioning equipment is supplied into a room 20 from inside a ceiling space 35 through a filter unit 30 at a flow velocity of 0.3m/s, for instance, and returned to the air conditioning equipment 70 again through air flow holes 51 in a floor 50. From the filter unit 30 equipped with a fan 32 and located in an area A wherein an apparatus 40 is arranged, the clean air is supplied toward the apparatus 40 at a relatively high speed, e.g. at a flow velocity of about 0.5m/s. At a fan 60 provided on the lower side of the apparatus 40, the air is sucked at a higher speed than the velocity of flow from the filter unit 30 in the other area B. Even when a phenomenon of convection is to be caused by a hot air flow in the area A, according to this constitution, it is broken down by an air flow in the area A.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room applied to a dust-free room or a sterile room such as a semiconductor factory, a precision machine factory, a chemical manufacturing factory.

[0002]

2. Description of the Related Art Conventionally, as a clean room of this type, for example, the full-surface laminar flow method and model shown in FIG. 3 of Japanese Utility Model Publication No. 5-38821 are different, but they are also shown in FIG. The conventional method is known. FIG. 3 shows a conventional clean room. In this clean room, a filter 2 is laid on the ceiling of the room 1 to form a ceiling space 3, an air circulation hole 5 is formed in a floor 4 of the room 1, and an underfloor space 6 is formed below the floor 4. ing.

A production apparatus or equipment 10 is arranged on the floor 5. Then, after guiding the air in the underfloor space 6 to the air conditioner 7 equipped with the hot and cold water coil 8 and the fan 9, the conditioned air is supplied to the ceiling space 3 and the filter 2 to the room 1
The air in the chamber 1 is air-conditioned and purified by being blown out into the room. Therefore, in the working area of the production apparatus or the equipment 10, clean air is, for example, 0.3 m / s.
It is sent at a flow rate of a certain degree so that dust or the like does not adhere to the work.

[0004]

However, in such a conventional clean room, since clean air is supplied to the chamber 1 from the filter 2 at a uniform flow rate, the heat generated by the production apparatus or the equipment 10 is used for the production. Device or equipment 1
When the convection phenomenon due to the hot air flow occurs on the upper side of 0, the cleanliness of the upper side of the production apparatus or the device 10 deteriorates.

Therefore, a fan is provided in the filter 2 on the upper side of the production apparatus or device 10, and the flow velocity from the filter 2 in the region where the production machine or device 10 is arranged is determined in the region where the production machine or device 10 is not arranged. Although it is possible to forcibly send clean air to the production apparatus or device 10 by making it faster than the flow rate from the filter 2 of FIG. Could not be prevented.

The present invention has been made in order to solve such a conventional problem, and an object thereof is to surely prevent a convection phenomenon due to a hot air flow generated on the upper side of a production apparatus or equipment. To provide a clean room.

[0007]

According to a first aspect of the present invention, there is provided a chamber and a filter unit disposed on an upper side of the chamber.
A floor having an air circulation hole for partitioning the lower side of the chamber and arranging a production device or equipment on the upper surface, and supplying clean air to the room through a filter unit and sucking indoor air through the air circulation hole In a clean room having an air conditioner, a fan is arranged in an upper filter unit in which a production machine or device is arranged, and a suction device is arranged in a back side of a floor in which the production machine or device is arranged. The flow velocity from the filter unit in the area where the production machine or device is arranged is faster than the flow velocity from the filter unit in the area where the production machine or device is not arranged, and the flow rate by the suction device on the back side of the floor is It is characterized in that the flow velocity is set higher than the flow velocity in a region where no production machine or equipment is installed.

According to a second aspect of the present invention, a floor is provided with a chamber, a filter unit disposed on the upper side of the chamber, and an air circulation hole for partitioning the lower side of the chamber and arranging a production apparatus or equipment on the upper surface. And a clean room having an air conditioner that supplies clean air to the room through the filter unit and sucks the air in the room through the air circulation holes, in the filter unit on the upper side where the production machine or equipment is arranged. , A fan is arranged, a suction device is arranged on the back side around the floor where the production machine or equipment is arranged, and the flow velocity from the filter unit in the area where the production machine or equipment is arranged is Alternatively, the flow velocity of the suction device on the back side of the floor that is faster than the flow velocity from the filter unit in the region where the equipment is not installed is the flow in the region where the production machine or equipment is not installed. And it is characterized in that it is faster.

[0009]

In the first and second aspects of the invention, the clean air sent from the air conditioner is supplied to the room through the filter unit and returned to the air conditioner through the air circulation holes on the floor. It flows through the circulation path. On the other hand, some production apparatuses or devices are accompanied by heat by their nature, but a fan filter unit equipped with a fan is installed on the upper side of such production apparatuses or devices, and the floor side A suction device is arranged on the back side of the.

The flow velocity from the filter unit in the area where the production machine or equipment is arranged is faster than the flow velocity from the filter unit in the area where the production machine or equipment is not arranged, and the suction device on the back side of the floor is used. The flow velocity due to
It is faster than the flow velocity in the area where no production machine or equipment is installed. Therefore, in the area where the production apparatus or equipment is arranged, the flow velocity is faster than in other areas, and suction is performed from the floor side.

Therefore, even if the convection phenomenon due to the hot air flow occurs in the upper side of the production apparatus or device due to the heat generated from the production apparatus or device, the air flow in the region where the production apparatus or device is arranged is forced to the floor side. The forced air flow can destroy the convection phenomenon.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the embodiments shown in the drawings.

FIG. 1 shows an embodiment of a clean room according to claim 1, and 20 is a room. Reference numeral 30 denotes a filter unit arranged on the upper side of the chamber 20. The filter unit 30 is configured by laying a high-performance filter 31 such as a ULPA filter or a HEPA filter on the ceiling side. This filter unit 30
Is the same as that used in the known full-surface laminar flow system.

The filter unit 30 is provided with a fan 32 such as an axial flow type fan on the upper side of the production apparatus or device 40. The production device or device 40 is
It is arranged on the floor 50 having the air circulation holes 51. The floor 50 partitions the lower side of the chamber 20 to form an underfloor space 55 as in a known clean room.

A fan 60 serving as a suction device such as an axial flow type fan is attached to the back side of the air circulation hole 51 of the floor 50 on which the production apparatus or equipment 40 is arranged. The ceiling space 35 and the underfloor space 55 are connected to the ducts 71, 7
It communicates with the air conditioner 70 via 2. The air conditioner 70 has the same structure as that used in a known clean room.

Next, the operation of this embodiment will be described. First,
The clean air sent from the air conditioner 70 is the ceiling space 3
5 is supplied into the chamber 1 through the filter unit 30 at a flow rate of 0.3 m / s, for example, and flows through the circulation path that is returned to the air conditioner 70 through the air circulation hole 51 of the floor 50. On the other hand, the filter unit 30 including the fan 32 in the area A in which the production machine or device 40 is arranged supplies the flow toward the production machine or device 40 at a flow rate of about 0.5 m / s.

In the fan 60 installed on the lower surface side of the production apparatus or device 40, suction is performed at a speed of about 0.5 m / s faster than the flow velocity from the filter unit 30 in the region B where the production apparatus or device 40 is not arranged. are doing. Therefore, in the area A where the production apparatus or the equipment 40 is arranged, the flow velocity is faster than in the other areas B, and suction is performed from the floor 50 side.

In terms of the nature of the production device or equipment 40,
For example, there are those with heat such as 70 ° C and 100 ° C. In that case, even if the convection phenomenon due to the hot air flow occurs on the upper side of the production apparatus or device 40 due to the heat generated from the production apparatus or device 40, the air flow in the area A in which the production apparatus or device 40 is arranged is Since it is forcibly guided to the side, the convection phenomenon can be destroyed by the forced air flow.

Thus, in the above-mentioned clean room, the clean air having a flow velocity higher than that of the region B in which the production apparatus or device 40 is not arranged is supplied to the region A in which the production apparatus or device 40 is arranged. Since the suction is carried out from the floor 50 side of the lower surface side of the apparatus or device 40 at a flow velocity equivalent to that in the region B where the production apparatus or device 40 is not arranged, the hot airflow generated in the production apparatus or device 40 is forced to the underfloor space 55.
It is possible to prevent the cleanliness from being disturbed by the hot air flow.

In the above embodiment, the production device or equipment 4
The case where the fan 32 such as an axial flow type fan is attached to the filter unit 30 on the upper side of 0 has been described, but that portion may be replaced with a known fan filter unit integrated with the fan. Further, the case where the fan 60 is provided as a suction device on the back surface side of the floor 50 on the lower surface side of the production apparatus or device 40 has been described.
In the case of a type in which the air flow cannot pass through the inside, a fan 60 may be provided as a suction device on the back side of the floor 50 located near the lower part of the production apparatus or device 40 as shown in FIG. Item 2).

[0021]

As described above, in the clean room according to the first and second aspects, it is possible to surely prevent the cleanliness from being deteriorated by the hot air flow generated on the upper side of the production apparatus or the equipment.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing an example of a clean room according to claim 1.

FIG. 2 is an explanatory diagram showing an embodiment of a clean room according to claim 2;

FIG. 3 is an explanatory diagram showing a conventional clean room.

[Explanation of symbols]

 20 room 30 filter unit 31 high performance filter 32 fan 35 ceiling space 40 production equipment or equipment 50 floor 51 air circulation hole 55 underfloor space 60 fan 70 air conditioner A area where production equipment or equipment 40 is arranged B production equipment or equipment Area where 40 is not placed

Claims (2)

[Claims] 1. A chamber, a filter unit disposed on the upper side of the chamber, a floor having an air circulation hole for partitioning the lower side of the chamber and disposing a production apparatus or equipment on the upper surface, and a filter unit. In a clean room having an air conditioner that supplies clean air to the room through the air circulation hole and sucks the indoor air through the air circulation hole, a fan is installed in the filter unit on the upper side where the production machine or equipment is arranged. The suction device is placed on the back side of the floor where the production machine or equipment is placed, and the flow velocity from the filter unit in the area where the production machine or equipment is placed is the area where the production machine or equipment is not placed. The flow velocity from the filter unit of the above and the flow velocity by the suction device on the back side of the floor must be faster than the flow velocity in the area where the production machine or equipment is not installed. A clean room characterized by. 2. A chamber, a filter unit arranged on the upper side of the chamber, a floor having an air circulation hole for partitioning the lower side of the chamber and for arranging a production apparatus or equipment on the upper surface, and a filter unit. In a clean room having an air conditioner that supplies clean air to the room through the air circulation hole and sucks the indoor air through the air circulation hole, a fan is installed in the filter unit on the upper side where the production machine or equipment is arranged. The suction device is arranged on the back side around the floor where the production machine or equipment is arranged, and the flow velocity from the filter unit in the area where the production machine or equipment is arranged is The flow velocity from the filter unit in the area where the production machine or equipment is not installed is faster than the flow rate from the filter unit in the area where the production machine or equipment is not installed. A clean room characterized by