JPH0827268B2 - Spatial scanning ultrasonic flaw detector - Google Patents
Spatial scanning ultrasonic flaw detectorInfo
- Publication number
- JPH0827268B2 JPH0827268B2 JP61294880A JP29488086A JPH0827268B2 JP H0827268 B2 JPH0827268 B2 JP H0827268B2 JP 61294880 A JP61294880 A JP 61294880A JP 29488086 A JP29488086 A JP 29488086A JP H0827268 B2 JPH0827268 B2 JP H0827268B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- deflection angle
- transmission
- circuit
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、超音波探触装置に係り、特に、被検体内の
欠陥を高感度で検出し、欠陥の位置を正確に測定するの
に好適な超音波探触装置に関する。Description: TECHNICAL FIELD The present invention relates to an ultrasonic probe apparatus, and particularly to detecting a defect in a subject with high sensitivity and accurately measuring the position of the defect. The present invention relates to a suitable ultrasonic probe device.
本願発明の先行技術として、同一出願人による特願昭
60-184604号がある。これはアレイ探触子で所定間隔で
選択した素子には正位相のパルス、選択素子の中間に位
置する素子には逆位相のパルスを印加し、送信波同士の
干渉によつて斜角超音波ビームを発生させるものであつ
た。第5図にこの装置で偏向角を変えたとき送信方法に
ついて示す。ここで、+,−はそれぞれ正位相,逆位相
パルスを示す。アレイ探触子9の送信パターンは偏向角
によつて変わり、超音波を送信している探触子の長さD
(以下、実効的開口という)は偏向角がθ1の場合はD1
であり、偏向角がθ2の場合はD2と大きさが異なる。こ
の送信パターンで超音波を送信すると、それぞれの超音
波強度分布は10,10′となり、偏向角がθ1の場合のビー
ム幅Δr1はθ2の場合のビーム幅Δr2より拡くなる。こ
のように、偏向角によつてビーム幅は変わつてしまう。As a prior art of the present invention, Japanese Patent Application No.
There is No. 60-184604. This is because positive phase pulses are applied to the elements selected at a predetermined interval with the array probe, and reverse phase pulses are applied to the elements located in the middle of the selected elements, and the oblique-angle ultrasonic waves are generated by the interference between the transmitted waves. It was to generate a beam. FIG. 5 shows a transmission method when the deflection angle is changed by this device. Here, + and-indicate positive-phase and anti-phase pulses, respectively. The transmission pattern of the array probe 9 changes depending on the deflection angle, and the length D of the probe transmitting ultrasonic waves is
(Hereinafter, referred to as the effective aperture) of the case of the deflection angle theta 1 D 1
When the deflection angle is θ 2 , the magnitude is different from D 2 . When ultrasonic waves are transmitted with this transmission pattern, the respective ultrasonic intensity distributions are 10, 10 ', and the beam width Δ r1 when the deflection angle is θ 1 is wider than the beam width Δ r2 when the deflection angle is θ 2 . In this way, the beam width changes depending on the deflection angle.
ところで、超音波探傷では被検体内の欠陥を高感度で
検出し、欠陥の位置を正確に測定する必要がある。この
能力の指標は、探触子からみて横方向に近接する欠陥を
いかによく分離して検出できるかという方位分解能があ
る。これは、送信された超音波ビームの幅によつて決ま
る。By the way, in ultrasonic flaw detection, it is necessary to detect a defect in a subject with high sensitivity and accurately measure the position of the defect. An index of this capability is the lateral resolution of how well the defects that are laterally close to the probe can be separated and detected. This depends on the width of the transmitted ultrasonic beam.
従つて、先行技術では超音波ビームの偏向角によつて
は正確に欠陥位置を測定できないという問題があつた。Therefore, the prior art has a problem that the defect position cannot be accurately measured depending on the deflection angle of the ultrasonic beam.
上記先行技術では、超音波ビームの偏向角によつて超
音波ビームの幅が変わるため、偏向角にかかわらず被検
体内の欠陥の位置を正確に測定することができないとい
う問題があつた。In the above-mentioned prior art, since the width of the ultrasonic beam changes depending on the deflection angle of the ultrasonic beam, there is a problem that the position of the defect in the subject cannot be accurately measured regardless of the deflection angle.
本発明の目的は、偏向角にかかわらず送信された超音
波ビームの幅を等しくすることにより、方位分解能を一
定にして被検体内の欠陥の位置を正確に測定できる空間
走査式超音波探傷装置を提供することにある。An object of the present invention is to provide a spatial scanning ultrasonic flaw detector capable of accurately measuring the position of a defect in a subject with a constant azimuth resolution by equalizing the widths of transmitted ultrasonic beams regardless of the deflection angle. To provide.
空間走査式超音波探傷装置では、超音波ビームの偏向
角は送信素子の間隔で決まる。偏向角が小さい場合、間
隔は大きくなり、偏向角が大きい場合、間隔は小さくな
る。このとき、超音波を送信している探触子の長さ(以
下実効的開口という)は、偏向角が小さい場合が大き
く、偏向角が大きい場合は小さい。この結果、偏向角が
小さい場合、ビーム幅は細くなり、偏向角が大きい場
合、ビーム幅は拡くなる。そこで、送信素子数を変えて
偏向角にかかわらず実効的開口を等しくなるパターンで
超音波を送信する。In the spatial scanning ultrasonic flaw detector, the deflection angle of the ultrasonic beam is determined by the distance between the transmitting elements. When the deflection angle is small, the interval is large, and when the deflection angle is large, the interval is small. At this time, the length of the probe transmitting ultrasonic waves (hereinafter referred to as the effective aperture) is large when the deflection angle is small, and is small when the deflection angle is large. As a result, when the deflection angle is small, the beam width becomes thin, and when the deflection angle is large, the beam width becomes wide. Therefore, the number of transmitting elements is changed to transmit ultrasonic waves in a pattern in which the effective apertures are equal regardless of the deflection angle.
入力回路で超音波ビームの偏向角の設定値を入力す
る。入力された第一の偏向角の設定値から演算回路で実
効的開口D1を求める。更に、ここで求めた実効的開口D1
と開口を等しくするような第二の偏向角での送信素子数
n2を求める。切替制御回路に第一,第二の偏向角の送信
パターンを設定する。送信回路からそれぞれの送信パタ
ーンで超音波を送信する。このようにして各々の偏向角
における実効的開口を等しくし、超音波を送信すること
ができる。The input value of the deflection angle of the ultrasonic beam is input by the input circuit. The effective aperture D 1 is obtained by the arithmetic circuit from the input set value of the first deflection angle. Furthermore, the effective aperture D 1 obtained here
And the number of transmitting elements at the second deflection angle that makes the aperture equal
Find n 2 . The transmission patterns of the first and second deflection angles are set in the switching control circuit. The transmission circuit transmits ultrasonic waves in each transmission pattern. In this way, the effective apertures at the respective deflection angles can be made equal and ultrasonic waves can be transmitted.
以下、本発明の一実施例を第1図ないし第3図により
説明する。以下では、簡単のためビームの偏向角が
θ1,θ2と二種の場合について示す。第3図は本発明の
概要を示す図である。偏向角がθ1と大きな場合のアレ
イ探触子9の実効的開口D1を偏向角がθ2と小さな場合
の実効的開口D2と等しくするよう送信素子数nを選択す
る。偏向角θ2の場合の送信素子数二個に比べ、偏向角
θ1の場合の送信素子数は五個と多く必要となる。この
θ1,θ2の送信パターンで超音波を送信する。この結
果、偏向角θ1,θ2で送信された超音波の強度分布10,1
0′は等しくなり、そのビーム幅Δr1,Δr2も等しくす
ることができる。An embodiment of the present invention will be described below with reference to FIGS. In the following, for simplification, there are two types of beam deflection angles, θ 1 and θ 2 . FIG. 3 is a diagram showing an outline of the present invention. The number n of transmitting elements is selected so that the effective aperture D 1 of the array probe 9 when the deflection angle is large as θ 1 is equal to the effective aperture D 2 when the deflection angle is small as θ 2 . Compared with the case where the deflection angle θ 2 is two transmitting elements, the case where the deflection angle θ 1 is 5 requires a large number of transmitting elements. Ultrasonic waves are transmitted according to the transmission patterns of θ 1 and θ 2 . As a result, the intensity distribution 10,1 of the ultrasonic waves transmitted at the deflection angles θ 1 and θ 2
0'becomes equal, and their beam widths Δr 1 and Δr 2 can be made equal.
第2図は本発明の処理概要を示すフローチヤートであ
る。超音波ビームの偏向角の設定値θ1,θ2を入力す
る。この第一の偏向角の設定値θ1より、送信素子数
n1,素子間隔d1を決定する。更に、偏向角θ1の実効的
開口D1を次式(1)から求める。FIG. 2 is a flow chart showing an outline of processing of the present invention. Enter the set values θ 1 and θ 2 of the deflection angle of the ultrasonic beam. From this first deflection angle setting value θ 1 , the number of transmitting elements
Determine n 1 and element spacing d 1 . Furthermore, determining the effective aperture D 1 of the deflection angle theta 1 from the following equation (1).
ここで、aは素子ピツチである。 Here, a is an element pitch.
次に、このようにして求めた実効的開口D1から次式
(2)を満足する偏向角θ2での送信素子数n2を求め
る。Next, from the effective aperture D 1 thus obtained, the number n 2 of transmitting elements at the deflection angle θ 2 that satisfies the following equation (2) is obtained.
ただし、d2はθ2での送信間隔である。また、ここで求
める送信素子数n2は正の整数である。 However, d 2 is the transmission interval at θ 2 . The number of transmitting elements n 2 obtained here is a positive integer.
このようにして求めた偏向角θ1,θ2の送信パターン
で超音波を送信する。Ultrasonic waves are transmitted in the transmission pattern of the deflection angles θ 1 and θ 2 thus obtained.
第1図は本発明の空間走査式探傷装置のブロツク図で
ある。超音波ビームの偏向角の設定値θ1,θ2での素子
数設定値n1は入力回路8から入力され、メモリーされ
る。設定値信号Sとなる演算回路7では設定値信号Sよ
りθ1の実効的開D1,θ2での送子素子数n2を演算し、こ
の演算データAを切替制御回路6に出力する。切替制御
回路6では演算データAにより切替回路5の切替パター
ン信号Cを出力する。切替回路5では切替パターン信号
Cによりアレイ探触子9の各素子を切替える。送信回路
1から出力された高電圧パルスPは切替回路5を介して
アレイ探触子9へ印加される。アレイ探触子9で受信し
た信号u1〜unは受信回路2で加算及び増幅され超音波音
号Uとなる。信号処理回路3では超音波信号Uにおい
て、送信波と欠陥反射波との間の伝播時間を測定し欠陥
位置の測定を行う。この測定値に基づいて波形表示器4
へ表示信号Dを出力する。波形表示器4では表示信号D
に基づいて欠陥位置を表示する。FIG. 1 is a block diagram of the spatial scanning flaw detector of the present invention. The element number set value n 1 at the set values θ 1 and θ 2 of the deflection angle of the ultrasonic beam is input from the input circuit 8 and stored. The arithmetic circuit 7 which becomes the set value signal S calculates the number n 2 of child elements at the effective opening D 1 and θ 2 of θ 1 from the set value signal S, and outputs the arithmetic data A to the switching control circuit 6. . The switching control circuit 6 outputs the switching pattern signal C of the switching circuit 5 according to the operation data A. The switching circuit 5 switches each element of the array probe 9 by the switching pattern signal C. The high voltage pulse P output from the transmission circuit 1 is applied to the array probe 9 via the switching circuit 5. The signals u 1 to u n received by the array probe 9 are added and amplified by the receiving circuit 2 to become an ultrasonic tone U. The signal processing circuit 3 measures the propagation time between the transmission wave and the defect reflected wave in the ultrasonic signal U to measure the defect position. Waveform display 4 based on this measurement
The display signal D is output to. In the waveform display 4, the display signal D
The defect position is displayed based on.
第4図は、アレイ探触子の全素子数Nが設定されてい
る場合の一実施例の処理概要を示すフロチヤートであ
る。偏向角θ1,θ2の設定値アレイ探触子の全素子数N
の設定値を入力する。この全素子数Nから次式(3)を
満足する最大の素子数n2を求める。FIG. 4 is a flowchart showing an outline of processing of an embodiment when the total number N of elements of the array probe is set. Setting values of deflection angles θ 1 and θ 2 Number of all elements of array probe N
Enter the setting value of. From this total number N of elements, the maximum number n 2 of elements satisfying the following expression (3) is obtained.
ただし、d2はθ2での素子間隔、aは素子ピツチ、n2は
正の整数である。 However, d 2 is the element spacing at θ 2 , a is the element pitch, and n 2 is a positive integer.
ここで求めた素子数n2により、偏向角θ2の実効的開口D
2を次式(4)より演算する。Based on the number of elements n 2 obtained here, the effective aperture D of the deflection angle θ 2
2 is calculated from the following equation (4).
この実効的開口D2から次式(5)を満足する最大の素子
数n1を求める。 From this effective aperture D 2, the maximum number of elements n 1 that satisfies the following equation (5) is obtained.
ただし、d1はθ1での素子間隔、n1は正の整数である。 However, d 1 is an element interval at θ 1 , and n 1 is a positive integer.
このようにして求めた偏向角θ1,θ2での送信パター
ンで超音波を被検出体内へ送信する。The ultrasonic waves are transmitted to the inside of the body to be detected in the transmission pattern with the deflection angles θ 1 and θ 2 thus obtained.
以上のようにして、偏向角にかかわらず実効的開口を
等しくした送信パターンで超音波を送信し、超音波ビー
ム幅を一定値とすることにより被検体内の位置を精度よ
く測定することができる。As described above, it is possible to accurately measure the position inside the subject by transmitting the ultrasonic waves with a transmission pattern having the same effective aperture regardless of the deflection angle and setting the ultrasonic beam width to a constant value. .
遅延時間制御無しに超音波を送受信して超音波ビーム
を偏向する空間走査式超音波探傷装置において、ビーム
偏向角が大きい場合の方位分解能の低下を防止してどの
ビーム偏向角でも欠陥位置を精度良く測定することが出
来る。In a spatial scanning ultrasonic flaw detector that transmits and receives ultrasonic waves without controlling the delay time and deflects the ultrasonic beam, it is possible to prevent the deterioration of the lateral resolution when the beam deflection angle is large and to accurately detect the defect position at any beam deflection angle. It can measure well.
第1図は本発明の一実施例の空間走査式探傷装置のブロ
ツク図、第2図は本発明の処理概要を示すフローチヤー
ト、第3図は本発明の概要を示す図、第4図は本発明の
変形例の処理概要を示すフローチヤート、第5図は先行
技術による装置の概要を示す図である。 1……送信回路、2……受信回路、5……切替回路、6
……切替制御回路、7……演算回路、8……入力回路、
9……アレイ探触子、10……超音波強度分布。FIG. 1 is a block diagram of a spatial scanning flaw detector according to an embodiment of the present invention, FIG. 2 is a flow chart showing an outline of processing of the present invention, FIG. 3 is an outline of the present invention, and FIG. FIG. 5 is a flow chart showing an outline of processing of a modified example of the present invention, and FIG. 5 is a view showing an outline of an apparatus according to the prior art. 1 ... Transmission circuit, 2 ... Reception circuit, 5 ... Switching circuit, 6
...... Switching control circuit, 7 ... Calculation circuit, 8 ... Input circuit,
9 ... Array probe, 10 ... Ultrasonic intensity distribution.
Claims (1)
と、その送信回路から遅延させること無く信号を受けて
超音波ビームを検査対象に偏向角を付けて送信する複数
の超音波送受信素子から成るアレイ探触子と、各々の超
音波受信信号を遅延させること無く加算して増幅する受
信回路と、を備えた空間走査式超音波探傷装置におい
て、 一つの超音波ビーム偏向角の設定値から実効的開口を求
め、その実効的開口と等しくなる実効開口であって他の
超音波ビーム偏向角を呈するに必要な超音波送受信素子
間隔を満足する超音波送受信素子数を演算する演算回路
と、 前記演算回路からの信号を受けて前記必要な超音波送受
信素子間隔を満足する超音波送受信素子数の各超音波送
受信素子に前記送信回路からの信号を入力させる切替制
御回路と、 を備えていることを特徴とした空間走査式超音波探傷装
置。1. A transmission circuit for transmitting a pulsed sine wave signal, and a plurality of ultrasonic transmission / reception elements for transmitting an ultrasonic beam to an inspection object with a deflection angle by receiving the signal from the transmission circuit without delay. In a spatial scanning ultrasonic flaw detector equipped with an array probe and a receiving circuit that adds and amplifies each ultrasonic received signal without delay, from one ultrasonic beam deflection angle set value An arithmetic circuit that calculates the effective aperture, calculates the number of ultrasonic transmission / reception elements that satisfies the ultrasonic transmission / reception element spacing required to exhibit another ultrasonic beam deflection angle, and is an effective opening that is equal to the effective aperture, A switching control circuit for receiving a signal from the arithmetic circuit and inputting a signal from the transmission circuit to each ultrasonic transmission / reception element of the number of ultrasonic transmission / reception elements that satisfies the required ultrasonic transmission / reception element interval, It has spatial scanning ultrasonic flaw detection apparatus characterized by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61294880A JPH0827268B2 (en) | 1986-12-12 | 1986-12-12 | Spatial scanning ultrasonic flaw detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61294880A JPH0827268B2 (en) | 1986-12-12 | 1986-12-12 | Spatial scanning ultrasonic flaw detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63149558A JPS63149558A (en) | 1988-06-22 |
| JPH0827268B2 true JPH0827268B2 (en) | 1996-03-21 |
Family
ID=17813445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61294880A Expired - Lifetime JPH0827268B2 (en) | 1986-12-12 | 1986-12-12 | Spatial scanning ultrasonic flaw detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0827268B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9808668D0 (en) * | 1998-04-24 | 1998-06-24 | Smiths Industries Plc | Monitoring |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57101776A (en) * | 1980-12-17 | 1982-06-24 | Toshiba Corp | Ultrasonic video signal device |
| JPS58113746A (en) * | 1981-12-26 | 1983-07-06 | Toshiba Corp | Electronic scanning type ultrasonic test equipment |
-
1986
- 1986-12-12 JP JP61294880A patent/JPH0827268B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63149558A (en) | 1988-06-22 |
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