JPH08325029A - Method for manufacturing porous glass preform for optical fiber - Google Patents

Method for manufacturing porous glass preform for optical fiber

Info

Publication number
JPH08325029A
JPH08325029A JP12768395A JP12768395A JPH08325029A JP H08325029 A JPH08325029 A JP H08325029A JP 12768395 A JP12768395 A JP 12768395A JP 12768395 A JP12768395 A JP 12768395A JP H08325029 A JPH08325029 A JP H08325029A
Authority
JP
Japan
Prior art keywords
porous glass
core member
burners
glass
starting core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12768395A
Other languages
Japanese (ja)
Other versions
JP3290559B2 (en
Inventor
Masami Terajima
正美 寺嶋
Osamu Kuriyama
収 栗山
Hideo Hirasawa
秀夫 平沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP12768395A priority Critical patent/JP3290559B2/en
Publication of JPH08325029A publication Critical patent/JPH08325029A/en
Application granted granted Critical
Publication of JP3290559B2 publication Critical patent/JP3290559B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413Reactant delivery systems
    • C03B37/0142Reactant deposition burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/50Multiple burner arrangements
    • C03B2207/52Linear array of like burners
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/60Relationship between burner and deposit, e.g. position
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00Glass deposition burners
    • C03B2207/70Control measures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

(57)【要約】 (修正有) 【目的】 出発コア部材に原料ガスの火炎加水分解で発
生したガラス微粒子を、外付け法で効率よく、高速度で
堆積させる、光ファイバ用多孔質ガラス母材の製造方法
を提供する。 【構成】 本発明による光ファイバ用多孔質ガラス母材
の製造方法は、ガラス棒からなる出発コア部材の外周
に、酸水素火炎バーナーに原料ガスを導入し、その火炎
加水分解によりガラス微粒子を発生させ堆積させる光フ
ァイバ用多孔質ガラス母材の製造方法において、出発コ
ア部材の長手方向に往復運動する機構を取り付けた複数
のバーナーを、被堆積体の径の増大に伴なって径方向に
移動させるようにしてなることを特徴とするものであ
る。
(57) [Summary] (Modified) [Purpose] Porous glass matrix for optical fiber that efficiently deposits glass particles generated by flame hydrolysis of raw material gas on the starting core member by an external attachment method at high speed. A method for manufacturing a material is provided. According to the method for producing a porous glass preform for optical fibers according to the present invention, a raw material gas is introduced into an oxyhydrogen flame burner around the outer periphery of a starting core member made of a glass rod, and glass particles are generated by flame hydrolysis. In the method for producing a porous glass preform for optical fibers to be deposited, a plurality of burners equipped with a mechanism that reciprocates in the longitudinal direction of the starting core member are moved in the radial direction as the diameter of the deposited object increases. It is characterized in that it is made to be performed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光ファイバ用多孔質ガラ
ス母材の製造方法、特には出発コア部材にガラス微粒子
を外付け法により、効率よく、高速度で堆積させる光フ
ァイバ用多孔質ガラス母材の製造方法に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a porous glass preform for an optical fiber, and more particularly to a porous glass for an optical fiber which is efficiently and rapidly deposited by a method of externally attaching glass particles to a starting core member. The present invention relates to a method for manufacturing a base material.

【0002】[0002]

【従来の技術】光ファイバ用多孔質ガラス母材は従来か
ら図8に示したように、石英ガラス棒などの出発コア部
材21の外周に、複数の酸水素火炎バーナー22、23、24を
このコア部材の長手方向に平行に一列に配置し、このバ
ーナーに四塩化けい素などの原料ガスを供給し、その火
炎加水分解で発生したガラス微粒子をこの出発コア部材
21の上に堆積させ、図9に示したように多孔質ガラス母
材26を製造するのであるが、この場合、バーナーに供給
される原料ガス量は初期においては出発コア部材21の径
が小さいので少量とされ、これはここに堆積される多孔
質ガラス母材26の径の増大に伴なって増加されるので、
このバーナーの火炎の範囲25も図8から図9に示したよ
うに次第に大きくなるが、これらのバーナー22、23、24
は図10に示したように多孔質ガラス母材26の径の増大に
したがって適宜の位置まで移動させるという方法で行な
われている。
2. Description of the Related Art As shown in FIG. 8, a porous glass preform for optical fibers is conventionally provided with a plurality of oxyhydrogen flame burners 22, 23, 24 on the outer periphery of a starting core member 21 such as a quartz glass rod. The core members are arranged in a row parallel to the longitudinal direction, and a raw material gas such as silicon tetrachloride is supplied to this burner, and glass fine particles generated by flame hydrolysis of the raw material gases are used as the starting core member.
The porous glass base material 26 is manufactured by depositing it on 21 as shown in FIG. 9, but in this case, the amount of raw material gas supplied to the burner is small at the initial stage when the diameter of the starting core member 21 is small. Therefore, the amount is small, and since it increases with an increase in the diameter of the porous glass base material 26 deposited here,
The range 25 of the flame of this burner also gradually increases as shown in FIGS. 8 to 9, but these burners 22, 23, 24
Is performed by moving the porous glass base material 26 to an appropriate position as the diameter of the porous glass base material 26 increases, as shown in FIG.

【0003】[0003]

【発明が解決しようとする課題】しかし、この場合にお
いて多孔質ガラス母材の生産量を増加させるために、こ
の酸水素火炎バーナーの数を増加してバーナーを多数本
化すると、最大ガス量になったときに火炎の干渉によっ
て効率が低下するので、これについてはシリカ微粉末を
効率よく発生するようにバーナーの間隔を適当な範囲に
設定する必要があり、このときにはバーナーを往復運動
させるときに発生する多孔質ガラス母材両端の不良部が
増大するおそれがある。
However, in this case, if the number of oxyhydrogen flame burners is increased to increase the number of burners in order to increase the production amount of the porous glass preform, the maximum gas amount is reached. When this happens, the efficiency will decrease due to the interference of flames.Therefore, it is necessary to set the burner interval to an appropriate range so that silica fine powder can be generated efficiently. There is a possibility that defective portions on both ends of the porous glass base material that are generated may increase.

【0004】また、これについてはこれらの酸水素火炎
バーナーの径を大きくした大口径バーナーを用いるとい
うことも考えられているが、このものはこのバーナーに
供給される酸素、水素などの原料ガスが多量に必要とさ
れるし、このバーナーでは堆積初期の効率が極めて悪
く、ガス流量が少ないと火炎線速が小さくなって火炎が
乱れ、ガラス微粒子の付着効率が悪くなるという欠点が
あり、このバーナーについてはバーナーを特殊な構造を
もつものとするということも提案されている(特開平4-
193729号公報参照)が、このものは構造が複雑で同一性
能のものが作り難く、それぞれの噴射ノズルのガス量調
整が難しいという問題点がある。
It is also considered to use a large-diameter burner in which the diameter of these oxyhydrogen flame burners is increased, but this one uses the source gas such as oxygen and hydrogen supplied to this burner. This burner requires a large amount, and the efficiency at the initial stage of deposition is extremely low. When the gas flow rate is low, the linear velocity of the flame becomes small and the flame is disturbed, and the efficiency of adhering fine glass particles deteriorates. With respect to, it has been proposed that the burner has a special structure (JP-A-4-
However, there is a problem in that the structure is complicated and it is difficult to produce the same performance, and it is difficult to adjust the gas amount of each injection nozzle.

【0005】[0005]

【課題を解決するための手段】本発明はこのような不
利、問題点を解決した光ファイバ用多孔質ガラス母材の
製造方法に関するもので、これはガラス棒からなる出発
コア部材の外周に、酸水素火炎バーナーに原料を導入
し、その火炎加水分解によりガラス微粒子を発生させ堆
積させる光ファイバ用多孔質ガラス母材の製造方法にお
いて、出発コア部材の長手方向に往復運動する機構を取
り付けた複数のバーナーを、被堆積体の径の増大に伴な
って径方向に移動させるようにしてなることを特徴とす
るものである。
SUMMARY OF THE INVENTION The present invention relates to a method for producing a porous glass preform for an optical fiber which solves the above disadvantages and problems, and it relates to the outer periphery of a starting core member made of a glass rod. In a method for producing a porous glass preform for optical fibers in which a raw material is introduced into an oxyhydrogen flame burner and glass particles are generated and deposited by flame hydrolysis, a plurality of mechanisms that reciprocate in the longitudinal direction of the starting core member are attached. The burner is moved in the radial direction as the diameter of the deposited body increases.

【0006】すなわち、本発明者らは従来法による光フ
ァイバ用多孔質ガラス母材製造法の不利、欠点を解決す
る方法について種々検討した結果、この酸水素火炎バー
ナーにより発生したガラス微粒子を堆積させるとき、こ
の堆積初期では出発コア部材の径も小さく、原料ガス量
も少ないので、複数のガスバーナー相互の火炎の干渉は
起りにくく、したがってバーナー間隔が小さくても問題
が生ずることがない。しかし、ガラス微粒子の堆積で多
孔質ガラス母材の径が増大し、原料ガスが増加すると複
数のバーナーの火炎の干渉によってガラス微粒子の堆積
効率が悪くなり、多孔質ガラス母材両端不良部が増大す
るという不利が生ずるが、この多孔質ガラス母材の径が
増大したときに、この径の増大にしたがってバーナーの
位置を多孔質ガラス母材の径方向に移動させると、原料
ガスが増加してもバーナー間の火炎の干渉が起りにくく
なるので、ガラス微粒子の堆積効率が悪くなることがな
くなるということを見出し、この場合にはここに使用す
るバーナーも従来使用されているものと同様のものが使
用できるので原料ガスのコントロールが容易であり、さ
らに多孔質ガラス母材両端部の不良部が増加することも
なくなるということを確認して本発明を完成させた。以
下にこれをさらに詳述する。
That is, the inventors of the present invention have conducted various studies on methods for solving the disadvantages and drawbacks of the conventional method for producing a porous glass preform for optical fibers, and as a result, deposit glass fine particles generated by this oxyhydrogen flame burner. At this time, since the diameter of the starting core member is small and the amount of the raw material gas is small at the initial stage of the deposition, flame interference between the gas burners is unlikely to occur, and therefore, even if the burner interval is small, no problem occurs. However, the deposition of glass particles increases the diameter of the porous glass base material, and when the raw material gas increases, the flame efficiency of multiple burners interferes with the deposition efficiency of the glass particles, resulting in increased defects at both ends of the porous glass base material. However, when the diameter of the porous glass base material increases, if the burner position is moved in the radial direction of the porous glass base material as the diameter increases, the raw material gas increases. Also found that the flame interference between the burners is less likely to occur, so that the deposition efficiency of the glass fine particles will not deteriorate, and in this case, the burner used here is the same as that conventionally used. The present invention was confirmed by confirming that the raw material gas can be easily controlled because it can be used, and that the defective portions at both ends of the porous glass base material will not increase. It was made. This will be described in more detail below.

【0007】[0007]

【作用】本発明は光ファイバ用多孔質ガラス母材の製造
方法に関するものであり、これは前記したようにガラス
棒からなる出発コア部材に原料ガスを導入した酸水素火
炎バーナーから発生したガラス微粒子を堆積させ、この
ガラス微粒子の堆積で製造された多孔質ガラス母材の径
が増大したときに、バーナーをその径方向に移動させる
ことを特徴とするものである。
The present invention relates to a method for producing a porous glass preform for optical fibers, which is glass fine particles generated from an oxyhydrogen flame burner in which a raw material gas is introduced into a starting core member made of a glass rod as described above. And the burner is moved in the radial direction when the diameter of the porous glass preform produced by the deposition of the glass fine particles increases.

【0008】これは例えばガラス微粒子を出発コア部材
に堆積させる堆積初期の酸水素火炎バーナーの配列状態
は図1に示したようにされる。酸水素火炎バーナー2、
3、4、5、6は出発コア部材1の長手方向に平行に一
列に配列されており、このバーナー2、3、4、5、6
からは図2に示したように火炎が出発コア部材1に向け
られており、ここに発生したガラス微粒子が出発コア部
材1に堆積されるようにされているが、このときはバー
ナー2、3、4、5、6に供給されるガス量が少なく、
出発コア部材1の径が小さいので、出発コア部材1に対
するガラス微粒子の付着効率もよく、火炎の広がり8も
小さく、したがってバーナー2、3、4、5、6間の炎
の干渉も少ない。
For example, the arrangement state of the oxyhydrogen flame burner at the initial stage of deposition for depositing glass fine particles on the starting core member is as shown in FIG. Oxyhydrogen flame burner 2,
The burners 2, 3, 4, 5, 6 are arranged in a line parallel to the longitudinal direction of the starting core member 1.
As shown in FIG. 2, the flame is directed to the starting core member 1, and the glass particles generated there are deposited on the starting core member 1. At this time, the burners 2, 3 are used. The amount of gas supplied to 4, 5, 6 is small,
Since the diameter of the starting core member 1 is small, the adhesion efficiency of the glass particles to the starting core member 1 is good, the spread 8 of the flame is small, and therefore the interference of the flames between the burners 2, 3, 4, 5, 6 is small.

【0009】ガラス微粒子の堆積が進むにつれてこの堆
積により得られる多孔質ガラス母材11の径が増加してく
ると、バーナー2、3、4、5、6は例えば図3、4に
示したようにバーナー2、4、6とバーナー3、5と
が、出発コア部材1の径方向に移動されて2列に配列さ
れ、これによりバーナー間の火炎が干渉するおそれがな
くなり、ガラス微粒子の堆積効率が低下するおそれがな
くなる。
When the diameter of the porous glass base material 11 obtained by this deposition increases as the deposition of the glass fine particles progresses, the burners 2, 3, 4, 5, 6 are, for example, as shown in FIGS. The burners 2, 4 and 6 and the burners 3 and 5 are moved in the radial direction of the starting core member 1 and arranged in two rows, whereby the flame between the burners is prevented from interfering with each other, and the deposition efficiency of the glass particles is improved. Is less likely to decrease.

【0010】本発明でのこのバーナー2、4、6および
バーナー3、5の多孔質ガラス母材の径方向への移動方
法は、例えば図5に示した方法で行えばよい。すなわ
ち、これは図5に示したように、バーナー2、4、6お
よびバーナー3、5及び排気フード13を備けた装置にお
いて、この装置内で図1、2のように1列に配置された
バーナー2、4、6およびバーナー3、5で発生したガ
ラス微粒子の堆積により製造された多孔質ガラス母材11
の重量をロードセル15で測定し、演算装置(CPU)16
によりこの多孔質ガラス母材11の径を算出し、この径が
所定の値に達した時点でバーナー駆動部14により多孔質
ガラス母材11の径に最適なバーナー間隔まで例えば図
3、4に示す配置にバーナー2、4、6およびバーナー
3、5を多孔質ガラス母材11の径方向に移動させ、この
ときの原料ガス量は演算装置16により算出された最適量
にコントロールするようにすればよい。
The method of moving the burners 2, 4, 6 and the burners 3, 5 in the present invention in the radial direction of the porous glass preform may be performed, for example, by the method shown in FIG. That is, this is an apparatus equipped with burners 2, 4, 6 and burners 3, 5 and an exhaust hood 13 as shown in FIG. 5, and is arranged in a row in this apparatus as shown in FIGS. Porous glass base material 11 produced by depositing glass particles generated in burners 2, 4, 6 and burners 3, 5.
The weight of the load cell 15 and the arithmetic unit (CPU) 16
The diameter of the porous glass preform 11 is calculated by the following equation, and when the diameter reaches a predetermined value, the burner drive unit 14 gives the optimum burner interval for the diameter of the porous glass preform 11 as shown in FIGS. The burners 2, 4, 6 and the burners 3, 5 are moved in the radial direction of the porous glass preform 11 in the arrangement shown, and the raw material gas amount at this time is controlled to the optimum amount calculated by the arithmetic unit 16. Good.

【0011】これによれば、ガス供給装置19から火炎の
干渉が小さく、かつガラス微粒子の付着効率の高い最適
なガス量が供給され、これらの操作はガラス微粒子の堆
積が終了するまで自動的に継続されるので、目的とする
光ファイバ用多孔質ガラス母材を容易に、かつ堆積効率
よく取得することができ、多孔質ガラス母材の有効成分
率も向上するという有利性が与えられる。
According to this, the gas supply device 19 supplies the optimum amount of gas in which the flame interference is small and the adhesion efficiency of the glass particles is high, and these operations are automatically performed until the deposition of the glass particles is completed. Since the process is continued, it is possible to obtain the desired porous glass preform for optical fibers easily and with high deposition efficiency, and there is an advantage that the effective component ratio of the porous glass preform is also improved.

【0012】[0012]

【実施例】つぎに本発明の実施例、比較例をあげる。 実施例 図5、6に示したように、密閉型反応炉20の中に、外径
23mmφ、長さ 1,050mmの出発コア部材1としての石英ガ
ラス棒を回転させる駆動部18と、駆動部17により往復運
動する酸水素火炎バーナー2、3、4、5、6を設け、
上部に酸水素火炎バーナーから発生する排気ガスを排気
する排気フード13を設けた光ファイバ用多孔質ガラス母
材製造装置を用いて光ファイバ用多孔質ガラス母材を製
造した。
EXAMPLES Next, examples and comparative examples of the present invention will be described. Example As shown in FIGS. 5 and 6, the outer diameter was set in a closed reactor 20.
A driving unit 18 for rotating a quartz glass rod as a starting core member 1 having a length of 23 mm and a length of 1,050 mm and an oxyhydrogen flame burner 2, 3, 4, 5, 6 reciprocating by the driving unit 17 are provided.
A porous glass preform for optical fibers was manufactured using an apparatus for manufacturing a porous glass preform for optical fibers, which was provided with an exhaust hood 13 for exhausting exhaust gas generated from an oxyhydrogen flame burner.

【0013】この場合、バーナー2、4、6と3、5は
それぞれ同時に出発コア部材の径方向に移動するように
固定されており、各バーナーは5重管構造の外径が45mm
φのものとしたが、これらは出発コア部材1と同軸方向
に図1、2に示したように1列に配してあり、バーナー
2、4、6とバーナー3、5のバーナー中心軸間隔は15
0mmとした。この出発コア部材1は駆動部18により 40rp
mで回転させると共に、この酸水素火炎バーナー2、
4、6およびバーナー3、5は図5に示した原料供給装
置から酸素ガス50リットル/分、水素ガス 100リットル
/分、キャリーガスとしての酸素ガス6リットル/分お
よび四塩化けい素 25g/分を導入したが、このバーナー
は駆動部17により 150mm/分の速度で 1,600mmの範囲で
往復運動させ、このバーナーで発生したガラス微粒子は
出発コア部材1の上に堆積させた。
In this case, the burners 2, 4, 6 and 3, 5 are simultaneously fixed so as to move in the radial direction of the starting core member, and each burner has an outer diameter of a quintuple pipe structure of 45 mm.
φ, but these are arranged in a line in the same direction as the starting core member 1 as shown in FIGS. 1 and 2, and the burner center axis intervals of the burners 2, 4, 6 and the burners 3, 5 are arranged. Is 15
It was set to 0 mm. This starting core member 1 is driven by the drive unit 40 to 40 rp.
While rotating at m, this oxyhydrogen flame burner 2,
Nos. 4, 6 and burners 3, 5 are 50 liters / min of oxygen gas, 100 liters / min of hydrogen gas, 6 liters / min of oxygen gas as a carry gas and 25 g / min of silicon tetrachloride from the raw material supply device shown in FIG. The burner was reciprocated by the driving unit 17 at a speed of 150 mm / min in the range of 1,600 mm, and the glass fine particles generated by the burner were deposited on the starting core member 1.

【0014】この出発コア部材1へのガラス微粒子の堆
積により、この出発コア部材の上には多孔質ガラス母材
11が作られ、この多孔質ガラス部材の径が増大されたと
きには図5に示した重量検出機15によりその重量を計測
し、演算装置16により外径を算出し、これに基づいてバ
ーナー駆動部14により酸水素火炎バーナー2、4、6と
バーナー3、5をそれぞれ多孔質ガラス母材の径方向に
移動させ、このガス量も火炎が干渉しないようにコント
ロールしながら増量して、多孔質ガラス母材の生産を続
行した。
Due to the deposition of glass particles on the starting core member 1, a porous glass preform is formed on the starting core member 1.
11 is made, and when the diameter of this porous glass member is increased, its weight is measured by the weight detector 15 shown in FIG. 5, the outer diameter is calculated by the arithmetic unit 16, and the burner drive unit is based on this. The oxyhydrogen flame burners 2, 4 and 6 and the burners 3 and 5 are respectively moved by 14 in the radial direction of the porous glass base material, and the amount of this gas is also increased while controlling it so that the flame does not interfere with the porous glass. Continued production of base metal.

【0015】なお、この堆積終了直前における原料供給
装置19からの原料ガス供給量は酸素ガス 125リットル/
分、水素ガス 250リットル/分、キャリヤーガスとして
の酸素ガス12リットル/分、四塩化けい素 60g/分とさ
れており、酸水素火炎バーナー2、4、6とバーナー
3、5の多孔質ガラス母材への径方向への原点からの移
動はそれぞれ上下に40mmとされ、バーナー中心軸の上下
間隔は80cmとなっていたが、この反応を36時間継続した
のちには外径が 200mmφの多孔質ガラス母材が得られ、
このものの有効成分は79%で、堆積時間と堆積重量につ
いては図7に示したとおりの結果が得られた。
The amount of raw material gas supplied from the raw material supply device 19 immediately before the end of the deposition is 125 liters of oxygen gas /
Min., Hydrogen gas 250 liters / min, oxygen gas 12 liters / min as carrier gas, and silicon tetrachloride 60 g / min. Porous glass of oxyhydrogen flame burners 2, 4, 6 and burners 3, 5. The movement from the origin in the radial direction to the base metal was 40 mm vertically, and the vertical interval of the burner center axis was 80 cm.However, after continuing this reaction for 36 hours, the outer diameter of 200 mmφ Quality glass base material is obtained,
The effective component of this product was 79%, and the results shown in FIG. 7 were obtained for the deposition time and the deposition weight.

【0016】比較例1 実施例と同一の光ファイバ用多孔質ガラス母材製造装置
を用いたが、この場合には酸水素火炎バーナーの配置を
図8に示したようにバーナー22、23、24をバーナー中心
軸間隔 150mmで出発コア部材21の長手方向に平行に一列
に配置し、これらのバーナーに酸素ガス60リットル/
分、水素ガス 120リットル/分、キャリヤーガスとして
の酸素ガス8リットル/分および四塩化けい素 30g/分
を導入し、これらのガスの火炎加水分解で発生したガラ
ス微粒子を出発コア部材21上に堆積させた。
Comparative Example 1 The same apparatus for producing a porous glass preform for an optical fiber as in Example 1 was used, but in this case, the oxyhydrogen flame burners were arranged as shown in FIG. Are arranged in a line parallel to the longitudinal direction of the starting core member 21 with a center axis interval of the burners of 150 mm, and 60 liters of oxygen gas /
Of hydrogen gas, 120 liters / minute of hydrogen gas, 8 liters / minute of oxygen gas as a carrier gas, and 30 g / minute of silicon tetrachloride are introduced, and glass fine particles generated by flame hydrolysis of these gases are introduced onto the starting core member 21. Deposited.

【0017】堆積終了直前のバーナー22、23、24の位置
と多孔質ガラス母材26の表面に当る火炎の範囲25は図9
に示したとおりであったが、この場合、ガラス微粒子の
堆積速度を上げるために原料ガス量を増加させたとこ
ろ、火炎の干渉が起こり、また火炎に乱れが発して堆積
速度が低下する結果となっているので、火炎の干渉が発
生しないようにガス量をコントロールしたところ、52時
間後に外径 200mmφの多孔質ガラス母材が得られたけれ
ども、このものの堆積時間と堆積重量については図7に
示したとおりの結果となった。
The position of the burners 22, 23, 24 immediately before the end of the deposition and the range 25 of the flame hitting the surface of the porous glass base material 26 are shown in FIG.
However, in this case, when the amount of raw material gas was increased in order to increase the deposition rate of the glass particles, flame interference occurred, and as a result, the flame was disturbed and the deposition rate decreased. Since the amount of gas was controlled so that flame interference did not occur, a porous glass base material with an outer diameter of 200 mmφ was obtained after 52 hours, but the deposition time and weight of this product are shown in Fig. 7. The result was as shown.

【0018】比較例2 実施例と同一の光ファイバ用多孔質ガラス母材製造装置
を使用し、ここに使用する酸水素火炎バーナーは出発コ
ア部材21の長手方向に平行に一列に配置し、バーナー中
心軸間隔は比較例1と同様の 150mmとしたが、この数を
5本とし、比較例1と同一の条件でガラス微粒子の堆積
を行ない、原料ガス量も火炎の干渉が発生しないように
コントロールしたところ、堆積速度は若干向上し、47時
間後には外径 200mmの多孔質ガラス母材が得られ、この
ものの堆積時間と堆積重量については図7に示した結果
が得られたが、この場合には図5に示した多孔質ガラス
母材両端部の不良堆積部12が増加してしまい、得られた
多孔質ガラス母材の有効成分が68%に低下した。
Comparative Example 2 The same apparatus for producing a porous glass preform for optical fibers as in Example was used, and the oxyhydrogen flame burners used here were arranged in a line parallel to the longitudinal direction of the starting core member 21 and the burner was used. The distance between the central axes was 150 mm, which was the same as in Comparative Example 1, but this number was set to 5, and glass particles were deposited under the same conditions as in Comparative Example 1, and the amount of raw material gas was controlled to prevent flame interference. As a result, the deposition rate was slightly improved, and after 47 hours, a porous glass base material with an outer diameter of 200 mm was obtained. Regarding the deposition time and the deposition weight of this, the results shown in Fig. 7 were obtained. 5, the defective deposition parts 12 at both ends of the porous glass base material shown in FIG. 5 increased, and the effective component of the obtained porous glass base material decreased to 68%.

【0019】[0019]

【発明の効果】本発明は光ファイバ用多孔質ガラス母材
の製造方法に関するものであるが、これによればガラス
微粒子の堆積によって多孔質ガラス母材の径が増大し、
原料ガス量が増大しても火炎の干渉が起りにくいので、
ガラス微粒子の堆積効率が悪くなることがなくなるし、
この場合にはここに使用するバーナーも従来使用されて
いるものと同様のものが使用できるので原料ガスのコン
トロールが容易であり、さらに多孔質ガラス母材両端部
の不良堆積部が減少し、光ファイバ用多孔質ガラス母材
を容易に、かつ効率よく製造することができるという有
利性が与えられる。
The present invention relates to a method for producing a porous glass preform for optical fibers, according to which the diameter of the porous glass preform increases due to the deposition of glass particles.
Even if the amount of raw material gas increases, flame interference is less likely to occur, so
The deposition efficiency of fine glass particles does not deteriorate,
In this case, the burner used here can be the same as that used conventionally, so that the control of the raw material gas is easy, and the defective deposition parts at both ends of the porous glass base material are reduced, and The advantage that the porous glass preform for fibers can be manufactured easily and efficiently is provided.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明で使用される光ファイバ用多孔質ガラス
母材製造装置における、ガラス微粒子堆積初期の酸水素
火炎バーナーの配列状態の縦断面図を示したものであ
る。
FIG. 1 is a vertical cross-sectional view of an arrangement state of oxyhydrogen flame burners at the initial stage of glass particle deposition in an apparatus for producing a porous glass preform for optical fibers used in the present invention.

【図2】図1で示される酸水素火炎バーナー配列状態の
A方向よりの側面図を示したものである。
FIG. 2 is a side view of the oxyhydrogen flame burner arrangement shown in FIG. 1 taken in the direction A.

【図3】本発明で使用される光ファイバ用多孔質ガラス
母材製造装置における、ガラス微粒子堆積途中の酸水素
火炎バーナーの配列状態の縦断面図を示したものであ
る。
FIG. 3 is a vertical cross-sectional view showing an arrangement state of oxyhydrogen flame burners during deposition of glass particles in the apparatus for producing a porous glass preform for optical fibers used in the present invention.

【図4】図3で示される酸水素火炎バーナー配列状態の
B方向よりの側面図を示したものである。
FIG. 4 is a side view of the oxyhydrogen flame burner arrangement state shown in FIG. 3 as seen from the direction B.

【図5】本発明で使用される光ファイバ用多孔質ガラス
母材製造装置の側断面図を示したものである。
FIG. 5 is a side sectional view of an optical fiber porous glass preform manufacturing apparatus used in the present invention.

【図6】図5で示される光ファイバ用多孔質ガラス母材
製造装置における機材の配置図を示したものである。
FIG. 6 is a layout view of equipment in the optical glass porous glass preform manufacturing apparatus shown in FIG.

【図7】本発明の実施例、比較例1、2により得られた
光ファイバ用多孔質ガラス母材の堆積時間と堆積重量と
の関係図を示したものである。
FIG. 7 is a diagram showing the relationship between the deposition time and the deposition weight of the porous glass preforms for optical fibers obtained in Examples of the present invention and Comparative Examples 1 and 2.

【図8】従来法による光ファイバ用多孔質ガラス母材製
造装置における、ガラス微粒子堆積初期の酸水素火炎バ
ーナーの配列状態の縦断面図を示したものである。
FIG. 8 is a vertical cross-sectional view of an arrangement state of oxyhydrogen flame burners at the early stage of glass particle deposition in a conventional apparatus for producing a porous glass preform for optical fibers.

【図9】従来法による光ファイバ用多孔質ガラス母材製
造装置における、ガラス微粒子堆積途中の酸水素火炎バ
ーナーの配列状態の縦断面図を示したものである。
FIG. 9 is a vertical cross-sectional view showing an array state of oxyhydrogen flame burners during deposition of glass particles in a conventional apparatus for producing a porous glass preform for optical fibers.

【図10】図9で示される酸水素火炎バーナー配列状態
のC方向よりの側面図を示したものである。
FIG. 10 is a side view of the oxyhydrogen flame burner arrangement shown in FIG. 9 taken in the direction C.

【符号の説明】[Explanation of symbols]

1,21…出発コア部材 2,3,4,5,6,22,23,24…酸水素火炎バーナー 8,9,25…火炎の範囲 11,26…多孔質ガラス母材 12…ガラス微粒子不良堆積部 13…排気フード 14…バーナー駆動部 15…重量検出機 16…演算装置(CPU) 17…バーナー台往復駆動部 18…出発コア部材回転駆動部 19…原料供給装置 20…密閉型反応炉 1,21 ... Starting core member 2,3,4,5,6,22,23,24 ... oxyhydrogen flame burner 8,9,25 ... flame range 11,26 ... porous glass base material 12 ... poor glass particles Accumulation part 13 ... Exhaust hood 14 ... Burner drive part 15 ... Weight detector 16 ... Calculation unit (CPU) 17 ... Burner stand reciprocating drive part 18 ... Starting core member rotation drive part 19 ... Raw material supply device 20 ... Closed reactor

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 ガラス棒からなる出発コア部材の外周
に、酸水素火炎バーナーに原料ガスを導入し、その火炎
加水分解によりガラス微粒子を発生させ堆積させる光フ
ァイバ用多孔質ガラス母材の製造方法において、出発コ
ア部材の長手方向に往復運動する機構を取り付けた複数
のバーナーを、被堆積体の径の増大に伴なって径方向に
移動させるようにしてなることを特徴とする光ファイバ
用多孔質ガラス母材の製造方法。
1. A method for producing a porous glass preform for optical fibers, in which a raw material gas is introduced into an oxyhydrogen flame burner around the outer periphery of a starting core member made of a glass rod, and the glass particles are generated and deposited by flame hydrolysis. In the above method, a plurality of burners having a mechanism for reciprocating in the longitudinal direction of the starting core member are moved in the radial direction as the diameter of the deposition object increases, Of manufacturing high quality glass base material.
JP12768395A 1995-05-26 1995-05-26 Method for producing porous glass preform for optical fiber Expired - Fee Related JP3290559B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12768395A JP3290559B2 (en) 1995-05-26 1995-05-26 Method for producing porous glass preform for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12768395A JP3290559B2 (en) 1995-05-26 1995-05-26 Method for producing porous glass preform for optical fiber

Publications (2)

Publication Number Publication Date
JPH08325029A true JPH08325029A (en) 1996-12-10
JP3290559B2 JP3290559B2 (en) 2002-06-10

Family

ID=14966132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12768395A Expired - Fee Related JP3290559B2 (en) 1995-05-26 1995-05-26 Method for producing porous glass preform for optical fiber

Country Status (1)

Country Link
JP (1) JP3290559B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100314493B1 (en) * 1998-12-31 2001-12-28 김진찬 Fiber optic substrate heater
WO2002018284A1 (en) * 2000-09-01 2002-03-07 Heraeus Tenevo Ag Method for producing an sio2 preform
WO2002070415A1 (en) * 2001-03-06 2002-09-12 Sumitomo Electric Industries, Ltd. Method and system for producing deposit of fine glass particles
KR100507622B1 (en) * 2002-10-17 2005-08-10 엘에스전선 주식회사 Method and apparatus for fabricating an optical fiber preform in OVD

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100314493B1 (en) * 1998-12-31 2001-12-28 김진찬 Fiber optic substrate heater
WO2002018284A1 (en) * 2000-09-01 2002-03-07 Heraeus Tenevo Ag Method for producing an sio2 preform
WO2002070415A1 (en) * 2001-03-06 2002-09-12 Sumitomo Electric Industries, Ltd. Method and system for producing deposit of fine glass particles
KR100507622B1 (en) * 2002-10-17 2005-08-10 엘에스전선 주식회사 Method and apparatus for fabricating an optical fiber preform in OVD

Also Published As

Publication number Publication date
JP3290559B2 (en) 2002-06-10

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