JPH0841628A - Metal film manufacturing equipment - Google Patents

Abstract

(57) [Abstract] [Purpose] To provide a manufacturing technique of a metal film body in which variations in the formed metal film are less likely to occur, the film formation is less wasteful, and contamination is less likely to occur. A closed-type container main body portion containing a metal material that is a source of a metal film formed on a support, a guide cylinder portion provided in the container main body portion, and an outer container into which the container main body portion is placed. A molten metal source filled in the outer container and heating means for melting the molten metal source. The melting of the molten metal source by the heating means heats and melts the metal material in the container body, and evaporates. An apparatus for producing a metal film body, wherein metal particles are guided to the guide tube portion and adhere to a support in the direction of the guide tube portion.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for manufacturing, for example, a metal thin film type magnetic recording medium.

[0002]

BACKGROUND OF THE INVENTION In a magnetic recording medium such as a magnetic tape, due to a demand for high density recording, a binder resin is not used as a magnetic layer provided on a non-magnetic support, instead of a coating type using a binder resin. A metal thin film type that is not used has been proposed. That is, it is well known that a magnetic recording medium having a magnetic layer formed by a dry plating means such as vacuum deposition, sputtering or ion plating has been proposed. Since the magnetic recording medium of this type has a high packing density of magnetic material, it is suitable for high-density recording.

An apparatus for manufacturing a magnetic recording medium by such dry plating means is generally constructed as shown in FIG. In FIG. 4, 31 is a cooling can roll,
32a is a polyethylene terephthalate (PET) film 33 supply side roll, 32b is a PET film 33 winding side roll, 34 is an adhesion preventive material, 35 is a crucible, 36 is a magnetic metal, and 37 is a vacuum container. And the vacuum container 37
After the inside is evacuated to a predetermined vacuum degree, the electron gun 38 is operated to heat and melt the magnetic metal 36 in the crucible 35 to evaporate the magnetic metal 36 with respect to the PET film 33.
A magnetic recording medium is manufactured by depositing (evaporating) the evaporated particles of.

By the way, among the magnetic particles that evaporate in this way, there are some that are not deposited on the PET film 33 but are scattered around and adhered / deposited, which causes contamination of the apparatus and is by no means preferable. is not. For this reason, the anti-adhesive material 34 is provided to prevent the contamination of the device by positively adhering the magnetic particles scattered in directions other than the intended PET film 33.

However, even the one provided with the deposition preventive material 34 is not sufficient. That is, the deposition preventive material 34
Since it is itself contaminated (attached / deposited) with magnetic particles, it must be frequently cleaned or replaced. Furthermore, if the evaporation magnetic particles are deposited too much on the deposition-inhibitory material 34 and become too heavy, they will collapse, and the impact of the particles will cause the powder of the magnetic particles to fly up and contaminate the interior of the device over a wide area.

Moreover, the falling magnetic particles also fall into the crucible 35, and the temperature and other conditions inside the crucible 35 temporarily change greatly. For example, splash (bumping) occurs and the evaporation state changes greatly. It has been also said that the degree of vapor deposition on the PET film 33 temporarily changes greatly, a uniform magnetic film is not formed, and a defective product is formed.
Moreover, the magnetic particles attached to the deposition preventive material 34 are wasted.

[0007]

DISCLOSURE OF THE INVENTION Studies on the above problems have been earnestly pursued. That is, the proposition of how to reduce the amount of adhesion to the deposition preventive material 34 as much as possible was pushed forward. As a result, since the crucible 35 has a wide opening in the conventional ones, the molten magnetic particles may scatter in all directions, which may result in unnecessary use of the deposition preventive material. I got the knowledge.

Further, since the PET film 33 is located only at a specific position, if the magnetic particles are prevented from scattering only in that direction, the anti-adhesive material will be small and it will be wasted. It was found that the amount of magnetic material is reduced, and further, the contamination (adhesion / deposition) of the anti-adhesion material itself by the magnetic particles is reduced, and the problems caused by the contamination of the anti-adhesion material will be improved.

The present invention has been achieved based on such knowledge, and the present invention is less likely to cause variations in the metal film to be formed, has less waste in film formation, and is not contaminated. It is to provide a manufacturing technique of a metal film body that is hard to occur.
An object of the present invention is to close a container body part of a closed type in which a metal material serving as a source of a metal film formed on a support is placed, a guide cylinder part provided in the container body part, and the container body part. An outer container, a molten metal source filled in the outer container, and heating means for melting the molten metal source. The melting of the molten metal source by the heating means heats and melts the metal material in the container body. The vaporized metal particles are guided to the guide cylinder and are configured to adhere to the support in the direction of the guide cylinder.

In particular, a vacuum tank, a cooling can roll arranged in the vacuum tank, a support running along the cooling can roll, a supply side roll and a winding side roll of the support, A closed type container main body portion provided below the cooling can roll and containing a metal material serving as a source of a metal film formed on the support, and a support that runs along the cooling can roll. And a guide tube part that is vertically installed in the container main body in an oblique direction and is connected to the inside of the vacuum chamber, an outer container in which the container main body is placed, a molten metal source filled in the outer container, and the molten metal. A heating means for melting the heat source, the metal material in the container body is heated and melted by the melting of the molten metal source by the heating means, and the evaporated metal particles are guided to the induction cylinder portion, and the induction cylinder portion. Support in the direction of Is achieved by apparatus for producing a metal film structure characterized by comprising configured to adhere to.

Then, when the metal material is vaporized and deposited on the support by the apparatus configured as described above, even if the metal particles are vaporized on the entire surface, this is regulated by the guide tube portion and is directed in a specific direction. Will only fly to. Therefore, oblique vapor deposition can be efficiently performed on the support. Then, the metal particles are evaporated on the entire surface at the time of evaporation, but the metal particles that fly in a direction other than the direction of the guiding cylinder part are attached to the inner wall of the closed type container main body part. By the way, the particles attached to this inner wall are heated from the surroundings,
Since melting and evaporation are repeated and this is repeated, the ratio of metal materials being wasted is extremely small. At the same time, a splash is less likely to occur, the stability of evaporation is excellent, and a uniform magnetic film is formed.

Further, the amount of metal particles scattered around the inside of the vacuum chamber is small because it is regulated by the guide cylinder, so that a small amount of deposition preventive material is required. In addition, the closed container main body part and the guide cylinder part in which the metal material serving as the source of the metal film formed on the support is put must have heat resistance capable of withstanding the metal material and the molten metal described later. Examples of such a material include a metal material having an extremely high melting point such as tungsten. Although ceramics and the like can be used only from the viewpoint of heat resistance, a metal material is preferable in consideration of thermal conductivity and purity given to the metal material.

As the outer container in which the container body is placed,
Not only metal materials but also ceramics can be mentioned. The molten metal source filled in the outer container may be any as long as it can secure the temperature for melting the metal material filled in the closed container body. If the metal material with which the container body is filled is Al or the like, Co can be used as a molten metal source. In addition, the heat resistant temperature of the container body and the outer container, and the melting point and boiling point of the metal material or the molten metal source may be comprehensively determined and selected.

As the heating means for melting the molten metal source, electron beam irradiation means, resistance heating means, dielectric heating means, etc.
What is adopted for the thin film forming apparatus can be appropriately used. Hereinafter, specific examples will be described.

[0015]

1 and 2 show an apparatus for producing a metal film body (for example, an apparatus for producing a magnetic recording medium) according to the present invention. FIG. 1 is an overall schematic view, and FIG. 2 is an outline of essential parts. It is a figure.
In this example, a case of forming a back coat film in a magnetic recording medium will be described.

In the figure, 1 is a cooling can roll, 2a is a supply side roll of the support 3, 2b is a winding side roll of the support 3, 4 is a protection plate, and 5 is a vacuum chamber. The support 3 is non-magnetic, and the support 3 is made of polyester such as PET, polyamide, polyimide, polysulfone, polycarbonate, olefin resin such as polypropylene, cellulose resin, vinyl chloride resin. Such a polymer material is used.

Reference numeral 6 is a crucible. This crucible 6 is made of a closed type tungsten container body 6a, a tungsten guide cylinder 6b obliquely erected on the top plate of the container body 6a, and a tungsten body containing the container body 6a. It is composed of an outer container 6c and a tungsten lid 6d that covers the opening of the outer container 6c. The container body 6a is filled with a metal material (Al as a material for forming the back coat film in this embodiment) 7, and the outer container 6c is filled with a metal material (Co having a higher melting point than Al) 8. ing.

Reference numeral 9 denotes a heater. The heat of the heater 9 melts the metallic material 8 and the heat of the molten Co melts Al7 in the container body 6a. In the apparatus configured as described above, after the vacuum chamber 5 is evacuated to a vacuum degree of about 10 ⁻⁴ to 10 ⁻⁶ Torr, the heater 8 melts Co 8 in the outer container 6 c, and thus the container body The Al 7 in the portion 6 a is melted and evaporated, the evaporated Al particles are discharged from the guide cylinder portion 6 b, and 100 to 1 is applied to the support 3 running along the cooling can roll 1.
A back coat film is formed by vapor deposition with a thickness of 0000Å. During the formation of the back coat film, oxygen may be supplied to the vapor deposition portion to forcibly oxidize the surface layer portion of the back coat film to roughen the surface and form a protective layer of an oxide film. preferable.

By the way, when the back coat film is formed, even if the Al particles evaporate over the entire surface, this is caused by the guide tube portion 6.
It is regulated by b and flies only in a specific direction. Therefore, oblique vapor deposition can be efficiently performed on the support 3. The Al particles evaporate over the entire surface during evaporation, but the Al particles that fly in directions other than the direction of the guide cylinder 6b adhere to the inner wall of the container body 6a. Since the Al particles attached to the inner wall are heated from the surroundings, they are melted and evaporated, and this is repeated, so that the ratio of the Al material being wasted is extremely small.
Moreover, it is difficult for splash to occur, and the evaporation is stable,
A uniform Al film is formed.

Further, A scattered around the inside of the vacuum chamber 5
Since the l particles are regulated by the guide cylinder, the vacuum chamber 5 is less contaminated, and the number of times the vacuum chamber 5 is cleaned is reduced accordingly. In the above embodiment, the back coat film is formed. However, if the material of the crucible 6 and the metal material 8 filled in the outer container 6c are taken into consideration, it can be applied to the formation of a metal magnetic film. . That is,
As a metal material with which the container body 6a is filled, for example, F
In addition to metals such as e, Co, and Ni, Co-Ni alloys and Co
-Pt alloy, Co-Ni-Pt alloy, Fe-Co alloy,
Fe-Ni alloy, Fe-Co-Ni alloy, Fe-Co-
B alloy, Co-Ni-Fe-B alloy, Co-Cr alloy,
Alternatively, a magnetic metal in which a metal such as Al is contained may be used.

FIG. 3 is a schematic view of the essential parts of a second embodiment of the apparatus for manufacturing a metal film body according to the present invention. In the embodiment, the heating is by resistance heating, whereas in the present embodiment, only the electron beam is used, and other basic technical ideas are the same. , Detailed description is omitted.

[0022]

According to the present invention, a uniform metal film can be formed efficiently on a support. In particular, a splash is unlikely to occur, the stability of evaporation is excellent, and a uniform metal film is formed. Moreover, the ratio of waste of the metal material is extremely small. Furthermore, the metal particles scattered around the inside of the vacuum chamber are
Since it is regulated by the guide tube portion, the number is small, so that the vacuum chamber is unlikely to be contaminated and the number of cleanings is reduced.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view of an entire magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 2 is a schematic explanatory view of a main part of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 3 is a schematic explanatory view of a main part of a second embodiment of a magnetic recording medium manufacturing apparatus according to the present invention.

FIG. 4 is a schematic explanatory view of a conventional magnetic recording medium manufacturing apparatus.

[Explanation of symbols]

 1 Cooling Can Roll 2a Supply Side Roll 2b Winding Side Roll 3 Support 5 Vacuum Tank 6 Crucible 6a Closed Container Body 6b Induction Tube 6c Outer Container 6d Lid 7 Al 8 Co 9 Heater

Front page continuation (72) Inventor Shigemi Wakabayashi 2606 Akabane, Kai Co., Ltd., Kaigamachi, Haga-gun, Tochigi Prefecture Inside Kao Co., Ltd. Information Science Laboratory In the laboratory

Claims (1)

[Claims] 1. A closed-type container main body part in which a metal material serving as a source of a metal film formed on a support is put, a guide cylinder part provided in the container main body part, and an outer part in which the container main body part is put. A container, a molten metal source filled in the outer container, and a heating means for melting the molten metal source are provided, and the metal material in the container body is heated and melted by the melting of the molten metal source by the heating means, An apparatus for manufacturing a metal film body, characterized in that the evaporated metal particles are guided to the guide cylinder and adhere to a support in the direction of the guide cylinder.