JPH0846247A - Thermoelectric element - Google Patents
Thermoelectric elementInfo
- Publication number
- JPH0846247A JPH0846247A JP6178989A JP17898994A JPH0846247A JP H0846247 A JPH0846247 A JP H0846247A JP 6178989 A JP6178989 A JP 6178989A JP 17898994 A JP17898994 A JP 17898994A JP H0846247 A JPH0846247 A JP H0846247A
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- Prior art keywords
- thermoelectric material
- type
- layer
- type thermoelectric
- substrate
- Prior art date
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
(57)【要約】
【目的】 本発明は冷却装置や温度差による発電に用い
られる熱電素子の構造に関するものであり、その製造性
やコスト面などにおいて優れた素子を提供する。
【構成】 チップ状熱電材料と基板を接合するための層
がP型熱電材料とN型熱電材料とでその構成が異なるよ
うにする。とくにチップ状熱電材料と基板状の電極を接
合するために熱電材料表面にめっき等の表面処理により
金属等の導電性物質からなる層を形成するが、この層を
構成する物質の色調または元素をP型熱電材料とN型熱
電材料とで変えるようにする。
【効果】 この層を構成する物質の色調または元素をP
型熱電材料とN型熱電材料とで変えることにより、製造
中に生じる恐れのあるP型熱電材料とN型熱電材料の混
合や間違えを防ぐことが出来ると同時に製造時に生じる
不良を直す場合にP型とN型の区別ができるので簡単に
直すことができる。
(57) [Summary] [Object] The present invention relates to a structure of a cooling device or a thermoelectric element used for power generation by a temperature difference, and provides an element excellent in terms of manufacturability and cost. [Structure] The layer for joining the chip-shaped thermoelectric material and the substrate is made different in structure between the P-type thermoelectric material and the N-type thermoelectric material. In particular, in order to join the chip-shaped thermoelectric material and the substrate-shaped electrode, a layer made of a conductive substance such as metal is formed on the surface of the thermoelectric material by surface treatment such as plating. The P-type thermoelectric material and the N-type thermoelectric material are changed. [Effect] The color tone or element of the material forming this layer is set to P
By changing between the N-type thermoelectric material and the N-type thermoelectric material, it is possible to prevent mixing and mistake of the P-type thermoelectric material and the N-type thermoelectric material that may occur during manufacturing, and at the same time, to correct a defect that occurs during manufacturing. It can be easily corrected because the type and N type can be distinguished.
Description
【0001】[0001]
【産業上の利用分野】本発明は温度差による発電、ある
いは電流を流すことにより冷却、発熱を起こすことがで
き、それそれに応じた用途を有する熱電素子に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermoelectric element which can generate heat due to a temperature difference, or can be cooled and generate heat by passing an electric current, and has a corresponding application.
【0002】[0002]
【従来の技術】熱電素子は金属等の導電性電極を介して
P型熱電材料とN型熱電材料とを接合し、PN接合対を
形成することにより作製される。この熱電素子は接合対
間に温度差を与えることによりゼーベック効果に基づく
起電力を発生することから温度差を利用した発電装置と
して、また、逆に素子に電流を流すことにより接合の一
方で冷却、他方の接合部で発熱が起こるいわゆるペルチ
ェ効果を利用した冷却装置、加熱装置や精密温度制御装
置などとしての用途がある。2. Description of the Related Art A thermoelectric element is manufactured by joining a P-type thermoelectric material and an N-type thermoelectric material via a conductive electrode such as metal to form a PN junction pair. This thermoelectric element generates an electromotive force based on the Seebeck effect by applying a temperature difference between the pair of junctions, so it can be used as a power generator that utilizes the temperature difference. There is a use as a cooling device, a heating device, a precision temperature control device, etc., which utilizes the so-called Peltier effect in which heat is generated at the other joint.
【0003】熱電素子はその性能を向上するために複数
個の素子が直列に繋がれた熱電モジュールとして用いら
れる。この熱電モジュールの構造は一辺が数百μmから
数mmの直方体の形状をしたP型及びN型熱電材料チッ
プが2枚のアルミナや窒化アルミニウムなどの電気絶縁
性の基板で挟み込まれており、P型熱電材料チップとN
型熱電材料チップが基板上で金属等の導電性物質からな
る電極で接合されると同時に、この接合により熱電材料
チップが直列に繋がれている。A thermoelectric element is used as a thermoelectric module in which a plurality of elements are connected in series in order to improve its performance. The structure of this thermoelectric module is such that P-type and N-type thermoelectric material chips in the shape of a rectangular parallelepiped having a side of several hundred μm to several mm are sandwiched between two electrically insulating substrates such as alumina and aluminum nitride. Type thermoelectric material chip and N
At the same time that the die thermoelectric material chips are joined on the substrate by electrodes made of a conductive material such as metal, the thermoelectric material chips are connected in series by this joining.
【0004】このように複数個の熱電素子が直列に配列
されている熱電モジュールを製作する方法として、P型
及びN型熱電材料の各々を温度差を保つのに必要な厚さ
を有する板状に切断した後、基板に形成された金属等の
電極と接合するために、はんだ付けができるように、そ
の両面にニッケルめっき等の表面処理を施す。この後、
この熱電材料を所望とする大きさのチップ状に切断し、
予め接合用のはんだが配線パターンとして印刷されてい
る2枚のアルミナ等の絶縁性基板に治具等を用いて配列
し、挟み込んだ後、加熱によりはんだ付けを行い接合す
る方法がとられていた。As a method for manufacturing a thermoelectric module in which a plurality of thermoelectric elements are arranged in series as described above, a P-type and N-type thermoelectric material having a plate shape having a thickness necessary to maintain a temperature difference is formed. After cutting, the both surfaces are subjected to surface treatment such as nickel plating so that they can be soldered in order to be joined to the electrodes made of metal or the like formed on the substrate. After this,
Cut this thermoelectric material into chips of the desired size,
A method has been used in which solder for bonding is previously arranged as a wiring pattern on two insulating substrates such as alumina, which are arranged by using a jig or the like, sandwiched, and then soldered by heating to bond them. .
【0005】[0005]
【発明が解決しようとする課題】しかしながら、熱電材
料はBi−Te系材料やFe−Si系材料にみられるよ
うにP型とN型で組成の差に大きな違いがなく、色調や
外観においても大きな違いがない。このため、P型とN
型熱電材料を区別するためには電気的な物性を測定する
か、大量に添加物質を加えている場合以外は精密な組成
分析を行わなければならない。また、大量に添加物質を
加えている場合においても、加工時に行うめっき等の表
面処理により形成する層の厚みが厚いため、蛍光X線分
析のように普及し、非破壊で比較的容易に元素分析を行
うことが出来る分析方法が適用しずらかった。However, the thermoelectric material has no significant difference in composition between the P-type and N-type as seen in Bi-Te-based materials and Fe-Si-based materials, and also in terms of color tone and appearance. There is no big difference. Therefore, P type and N
In order to distinguish between the thermoelectric materials, electrical properties must be measured or precise compositional analysis must be carried out unless a large amount of additive is added. In addition, even when a large amount of additive substance is added, the thickness of the layer formed by the surface treatment such as plating performed at the time of processing is wide, so that it is widely used like fluorescent X-ray analysis, and it is nondestructive and relatively easy to use the element. It was difficult to apply the analysis method that can perform the analysis.
【0006】このため、熱電素子の製造において、P型
熱電材料とN型熱電材料が混ざったりすると素子製造に
大きな問題を来す。とくに熱電材料をチップ状に切断し
た後においては、基板との接合や組み立てにおいてP型
熱電材料チップとN型熱電材料チップが混在してしまう
機会が多くあり、これらが混ざった場合、分離するてだ
てがほとんどない。また、接合や組み立て時に不良チッ
プがあり、チップを交換するような場合、交換すべきチ
ップがP型であるか、N型であるかを判定することが困
難であった。Therefore, in the production of the thermoelectric element, if the P-type thermoelectric material and the N-type thermoelectric material are mixed with each other, a great problem occurs in the production of the element. In particular, after cutting the thermoelectric material into chips, there are many occasions when the P-type thermoelectric material chips and the N-type thermoelectric material chips are mixed in joining and assembling with the substrate, and when they are mixed, they are separated. There are few people. In addition, when there is a defective chip at the time of joining or assembling and the chip is to be replaced, it is difficult to determine whether the chip to be replaced is the P type or the N type.
【0007】[0007]
【課題を解決するための手段】そこで、本発明は熱電材
料と基板上に形成された電極とを接合するために、必要
な厚さの板状に加工された熱電材料(以下、板状の熱電
材料のことを熱電材料ウェハーと呼ぶ。)の両面または
片面に湿式めっき、気相めっき、印刷等の表面処理で形
成する層を構成する物質をP型熱電材料とN型熱電材料
で異なった物質を用いることにより、この工程以降の工
程におけるP型とN型熱電材料の判別を容易に行えるよ
うにし、熱電素子(以下、熱電モジュールも熱電素子と
呼ぶ。)の製造性の向上を図る。Therefore, in the present invention, in order to bond the thermoelectric material and the electrode formed on the substrate, the thermoelectric material processed into a plate shape having a necessary thickness (hereinafter, referred to as a plate-shaped material). The thermoelectric material is referred to as a thermoelectric material wafer.) P-type thermoelectric material and N-type thermoelectric material are different from each other in the substance forming the layer formed by the surface treatment such as wet plating, vapor phase plating or printing on both sides or one side. By using the substance, it is possible to easily distinguish the P-type and N-type thermoelectric materials in the steps after this step, and improve the manufacturability of the thermoelectric element (hereinafter, the thermoelectric module is also referred to as the thermoelectric element).
【0008】判別方法としては色調の違いによる判別が
最も簡単で実用的であるが、近年、比較的安価で普及が
著しい蛍光X線を用いた分析装置などを利用した方法が
考えられる。色調の違いを用いる方法として、P型熱電
材料とN型熱電材料で最表面のめっき層等による層の色
調を変える。たとえば、湿式めっきや乾式めっきにより
金属層を形成する場合、一方の型の熱電半導体材料の最
表面に銅や金あるいはこれらの合金をはじめとする有色
金属の層を形成することにより、P型とN型の区別がで
きるように出来る。また、印刷法などで導電層を形成す
る場合、有色の導電性インク、例えば含有する金属粒子
の全部または一部を銅や金のような有色金属としたり、
顔料や染料のようなものを含有することも有効である。
蛍光X線分析などの元素分析を利用する場合において
は、表面処理により形成する層にP型とN型で異なった
物質を分析装置の感度以上に含有させておけば簡単に判
別できる。As the discrimination method, the discrimination based on the difference in color tone is the simplest and most practical, but in recent years, a method using an analyzer using fluorescent X-rays, which is relatively inexpensive and has become very popular, can be considered. As a method of using the difference in color tone, the color tone of a layer such as the outermost plating layer is changed between the P-type thermoelectric material and the N-type thermoelectric material. For example, when a metal layer is formed by wet plating or dry plating, a layer of a colored metal such as copper or gold or an alloy thereof is formed on the outermost surface of one type of thermoelectric semiconductor material to obtain a P type. It is possible to distinguish N type. When the conductive layer is formed by a printing method or the like, a colored conductive ink, for example, all or part of the contained metal particles is a colored metal such as copper or gold,
It is also effective to contain such things as pigments and dyes.
In the case of utilizing elemental analysis such as fluorescent X-ray analysis, it is possible to easily discriminate by including substances different in P-type and N-type in a layer formed by surface treatment at a level higher than the sensitivity of the analyzer.
【0009】[0009]
【作用】熱電材料と基板上に形成された電極とを接合す
るために、熱電材料ウェハーの両面または片面に湿式め
っき、気相めっき、印刷等の表面処理で形成する層を構
成する物質をP型熱電材料とN型熱電材料で異なった物
質を用いることにより、この工程以降の工程におけるP
型とN型熱電材料の判別を容易に行えるようにし、熱電
素子の製造性の向上を図ることができる。[Function] In order to bond the thermoelectric material and the electrode formed on the substrate, the substance constituting the layer formed by the surface treatment such as wet plating, vapor phase plating or printing is formed on both sides or one side of the thermoelectric material wafer. By using different substances for the N-type thermoelectric material and the N-type thermoelectric material, P
The mold and the N-type thermoelectric material can be easily discriminated, and the productivity of the thermoelectric element can be improved.
【0010】すなわち、本発明のP型とN型熱電材料の
表面処理による層形成において、その最上層を色調の異
なった物質の層にするか、または最上層を構成する物質
中に色調を変えるような物質を添加することにより、熱
電材料ウェハーの判別だけでなく、チップ状になり、熱
電素子として組み立てている間においてもその判別が簡
単に出来る。また、表面処理により形成される層を構成
する物質のうち、P型とN型熱電材料で少なくとも一種
類の元素に違いを持たせることにより、蛍光X線のよう
な比較的容易な非破壊分析法により、P型とN型の判別
ができるのである。That is, in the layer formation by the surface treatment of the P-type and N-type thermoelectric materials of the present invention, the uppermost layer is made of a substance having a different color tone, or the color tone is changed in the substance constituting the uppermost layer. By adding such a substance, not only can the thermoelectric material wafer be discriminated, but also the thermoelectric material wafer can be discriminated easily even during assembly as a thermoelectric element. Further, among the substances forming the layer formed by the surface treatment, at least one kind of element is made different between the P-type and N-type thermoelectric materials, so that a relatively easy nondestructive analysis such as fluorescent X-ray analysis. According to the method, it is possible to distinguish between P type and N type.
【0011】[0011]
【実施例】以下、熱電材料として最も広く使われている
Bi−Te系材料の焼結体を用いて本発明の熱電素子を
作製した例を図面に基づいてついて説明する。実施例と
して熱電材料ウェハーに湿式めっきにより、はんだによ
り基板上の電極と接合するためのめっき層を形成して、
熱電素子を作製する方法において、P型熱電材料とN型
熱電材料でこのめっき層の最上層が異なった色調のめっ
き層からなっている例について記す。EXAMPLES An example in which a thermoelectric element of the present invention is manufactured using a sintered body of a Bi—Te based material which is most widely used as a thermoelectric material will be described below with reference to the drawings. As an example, by wet plating on a thermoelectric material wafer, to form a plating layer for joining to the electrode on the substrate by solder,
In the method for producing a thermoelectric element, an example will be described in which the uppermost layer of the P-type thermoelectric material and the N-type thermoelectric material is a plating layer having a different color tone.
【0012】図1は本発明の熱電素子を作製するための
製造工程の概要を記した図である。まず、熱電素子を構
成する熱電材料部の厚さとなるべき寸法に熱電材料を切
断したウェハー状P型熱電材料1及びウェハー状N型熱
電材料2に、湿式めっきによりその両面にニッケルめっ
き層3を10μm形成する。FIG. 1 is a diagram outlining a manufacturing process for manufacturing the thermoelectric element of the present invention. First, a wafer-shaped P-type thermoelectric material 1 and a wafer-shaped N-type thermoelectric material 2 obtained by cutting the thermoelectric material to a size that should be the thickness of the thermoelectric material portion that constitutes the thermoelectric element are coated with nickel plating layers 3 on both surfaces thereof by wet plating. 10 μm is formed.
【0013】次に、ニッケルめっき層3が形成されてい
るP型熱電半導体材料1のみにの1μm銅めっき層4を
湿式めっき法により形成する。これにより、P型熱電材
料の表面は銅色となり、N型熱電材料の表面はニッケル
めっきによる金属色となり、目視ではっきりと区別でき
るようになる。Next, a 1 μm copper plating layer 4 is formed only on the P-type thermoelectric semiconductor material 1 on which the nickel plating layer 3 is formed by a wet plating method. As a result, the surface of the P-type thermoelectric material becomes copper-colored, and the surface of the N-type thermoelectric material becomes metallic-colored by nickel plating, so that they can be clearly distinguished visually.
【0014】次に、このウェハー状のP型熱電材料1と
N型熱電材料2を素子一個の大きさのチップ5とチップ
6に切断する。この場合チップ5及び6は直方体の形状
であり、向かい合う1組の2面上にめっき層が形成され
ていることになる。すなわち、P型では、これらの最表
面が銅めっき層4で覆われており、N型ではニッケルめ
っき層3が現れている。したがって、この工程において
もP型とN型の区別は目視で簡単にわかる。ちなみに、
このチップの大きさは、めっき層が形成されている面の
一辺の長さが1mmであり、その他の辺の長さ(厚さに
なる)は0.8mmとした。Next, the wafer-shaped P-type thermoelectric material 1 and N-type thermoelectric material 2 are cut into chips 5 and 6 each having the size of one element. In this case, the chips 5 and 6 have a rectangular parallelepiped shape, and a plating layer is formed on a pair of two surfaces facing each other. That is, in the P type, these outermost surfaces are covered with the copper plating layer 4, and in the N type, the nickel plating layer 3 appears. Therefore, even in this step, the distinction between the P type and the N type can be easily visually recognized. By the way,
Regarding the size of this chip, one side of the surface on which the plating layer is formed has a length of 1 mm, and the other sides have a length (thickness) of 0.8 mm.
【0015】次に、あらかじめアルミナ製の絶縁性基板
7上に配線パターンとなるように貼り合わされた厚み
0.1mmの銅板とその上にペースト状のはんだを印刷
することにより形成された電極8に、このチップ5及び
6を治具を用いて配列し、加熱することにより、基板電
極8とチップ5及び6を接合するが、この接合をP型熱
電材料とN型熱電材料で別々の基板について行う。この
時点においても、接合の反対側がそれぞれのめっき層の
色調を有しており、区別が簡単にできた。最後に、P型
とN型熱電材料チップがのっているそれぞれの基板を向
かいあわせて、チップの先端と相手方の基板配線とが一
致するようにして、加熱し、はんだの溶融を行いP型と
N型の接合を完了し、ついで入出力用電極にリード線を
取り付けて熱電素子を完成させた。Next, a copper plate having a thickness of 0.1 mm is laminated in advance on the insulating substrate 7 made of alumina so as to form a wiring pattern, and an electrode 8 formed by printing paste solder on the copper plate. By arranging the chips 5 and 6 with a jig and heating them, the substrate electrode 8 and the chips 5 and 6 are joined, and this joining is carried out for different substrates with P-type thermoelectric material and N-type thermoelectric material. To do. Even at this time, the opposite side of the joint had the color tone of each plating layer, and the distinction was easy. Finally, the substrates on which the P-type and N-type thermoelectric material chips are mounted are faced to each other, and the tip of the chips and the wiring of the other substrate are aligned and heated to melt the solder and perform P-type And N-type bonding were completed, and then lead wires were attached to the input / output electrodes to complete the thermoelectric element.
【0016】この熱電素子の作製プロセスを通じて、め
っき前の状態のウェハー状の熱電材料を除いて、めっき
以降は最終の接合・組み立てまでP型熱電材料とN型熱
電材料の区別を簡単に行うことができた。Through the manufacturing process of this thermoelectric element, the P-type thermoelectric material and the N-type thermoelectric material can be easily distinguished from each other until the final joining and assembly after plating, except for the wafer-shaped thermoelectric material in the state before plating. I was able to.
【0017】[0017]
【発明の効果】本発明によれば、熱電素子の製造中にお
いて、P型熱電材料とN型熱電材料の区別、判別が容易
に行えるので、生産性を向上することが出来ると同時
に、製造時における不良熱電材料チップの交換を簡単に
行うことが出来るので製品歩留まりやコスト面において
絶大なる効果を奏する。According to the present invention, since the P-type thermoelectric material and the N-type thermoelectric material can be easily distinguished and discriminated during the production of the thermoelectric element, the productivity can be improved and at the same time during the production. Since defective thermoelectric material chips can be easily replaced in (1), a great effect is achieved in terms of product yield and cost.
【0018】なお、実施例では銅の有する色調を利用し
たが、これは製造工程における容易さやコスト面から考
えたもので、必ずしも銅である必要性はない。また実施
例ではニッケルめっきを施した後に銅めっきを行った
が、ニッケルめっきを行わず、直接銅めっきを施しても
良い。また、膜厚を変えることにより色調が変わる導電
性物質を用いることもできる。さらに上記の実施例では
もっとも判別が簡単な目視による方法を上げたが、蛍光
X線分析装置など設備的な余裕があれば、実施例に挙げ
たような有色物質だけでなく、P型とN型で表面処理に
用いる物質中の元素を変えれば簡単に判別が出来る。Although the color tone of copper was used in the examples, this is because of consideration of easiness and cost in the manufacturing process and is not necessarily copper. Further, in the embodiment, the copper plating is performed after the nickel plating is performed, but the copper plating may be directly performed without performing the nickel plating. Alternatively, a conductive substance whose color tone changes by changing the film thickness can be used. Further, in the above-mentioned embodiment, the visual method, which is the easiest to discriminate, has been introduced. It can be easily identified by changing the element in the substance used for the surface treatment with the mold.
【図1】本発明の熱電素子を作製するために実施例で用
いた熱電素子の製造工程の概略を示す図である。FIG. 1 is a diagram showing an outline of a manufacturing process of a thermoelectric element used in an example for manufacturing a thermoelectric element of the present invention.
1 P型熱電材料 2 N型熱電材料 3 ニッケルめっき層 4 銅めっき層 5 P型熱電材料チップ 6 N型熱電材料チップ 7 絶縁性基板 8 電極 1 P-type thermoelectric material 2 N-type thermoelectric material 3 Nickel plating layer 4 Copper plating layer 5 P-type thermoelectric material chip 6 N-type thermoelectric material chip 7 Insulating substrate 8 Electrode
Claims (3)
熱電材料を接合するための金属等の導電性物質からなる
電極とこれらを保持・固定するための基板からなる熱電
素子において、P型熱電材料と基板との間にこれらを接
合するために設けられた層(これを総称してア層と称
す)を構成する物質とN型熱電材料と基板との間でこれ
らを接合するために設けられた層(これを総称してイ層
と称す)を構成する物質で、ア層とイ層の少なくとも一
方の層を構成する物質が他方の層を構成する物質とは異
なった種類の物質を含んでいることを特徴とする熱電素
子。1. A thermoelectric element comprising a P-type thermoelectric material, an N-type thermoelectric material, an electrode made of a conductive substance such as a metal for joining these thermoelectric materials, and a substrate for holding and fixing them. To bond these substances between the N-type thermoelectric material and the substrate, and the substance forming the layer (collectively referred to as “A layer”) provided for bonding these between the N-type thermoelectric material and the substrate Which is a substance constituting a layer (collectively referred to as an a layer) provided in a layer, and a substance constituting at least one of the a layer and the a layer is different from the substance constituting the other layer. A thermoelectric element containing a substance.
られる層のうち、熱電材料の表面に湿式めっき、気相め
っき、印刷等の表面処理により形成される層を構成する
物質がP型熱電材料とN型熱電材料とで少なくとも1種
類は異なった物質を含んでいることを特徴とする熱電素
子。2. Of the layers provided for joining the thermoelectric material and the substrate, the substance constituting the layer formed on the surface of the thermoelectric material by surface treatment such as wet plating, vapor phase plating, printing is P-type. A thermoelectric element, wherein at least one kind of the thermoelectric material and the N-type thermoelectric material contain different substances.
られる層のうち、熱電材料の表面に湿式めっき、気相め
っき、印刷等の表面処理により形成される層において、
P型熱電材料の最表面に形成する層を構成する物質とN
型熱電材料の最表面に形成する層を構成する物質の色調
が異なることを特徴とする熱電材料。3. Among layers provided for joining a thermoelectric material and a substrate, in a layer formed on the surface of the thermoelectric material by surface treatment such as wet plating, vapor phase plating or printing,
The substance forming the layer formed on the outermost surface of the P-type thermoelectric material and N
A thermoelectric material, characterized in that substances forming a layer formed on the outermost surface of the mold thermoelectric material have different color tones.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6178989A JP2909612B2 (en) | 1994-07-29 | 1994-07-29 | Thermoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6178989A JP2909612B2 (en) | 1994-07-29 | 1994-07-29 | Thermoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0846247A true JPH0846247A (en) | 1996-02-16 |
| JP2909612B2 JP2909612B2 (en) | 1999-06-23 |
Family
ID=16058174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6178989A Expired - Fee Related JP2909612B2 (en) | 1994-07-29 | 1994-07-29 | Thermoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2909612B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0802416A3 (en) * | 1996-04-19 | 1999-01-27 | Seiko Instruments R&D Center Inc. | Manufacturing method of semiconductor acceleration sensor |
| JP2007150035A (en) * | 2005-11-29 | 2007-06-14 | Kyocera Corp | Thermoelectric module |
| JP2009099864A (en) * | 2007-10-18 | 2009-05-07 | Sumitomo Chemical Co Ltd | Thermoelectric conversion element, thermoelectric conversion module using thermoelectric conversion element, and manufacturing method of thermoelectric conversion module |
| EP2617761A1 (en) | 2003-11-10 | 2013-07-24 | Gore Enterprise Holdings, Inc. | Aerogel/PTFE composite insulating material |
-
1994
- 1994-07-29 JP JP6178989A patent/JP2909612B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0802416A3 (en) * | 1996-04-19 | 1999-01-27 | Seiko Instruments R&D Center Inc. | Manufacturing method of semiconductor acceleration sensor |
| EP2617761A1 (en) | 2003-11-10 | 2013-07-24 | Gore Enterprise Holdings, Inc. | Aerogel/PTFE composite insulating material |
| JP2007150035A (en) * | 2005-11-29 | 2007-06-14 | Kyocera Corp | Thermoelectric module |
| JP2009099864A (en) * | 2007-10-18 | 2009-05-07 | Sumitomo Chemical Co Ltd | Thermoelectric conversion element, thermoelectric conversion module using thermoelectric conversion element, and manufacturing method of thermoelectric conversion module |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2909612B2 (en) | 1999-06-23 |
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