JPH0851193A - 電気経路、フラッシュｅｐｒｏｍメモリセルのアレイ、メモリセルのアレイおよび電気経路を製造する方法 - Google Patents

電気経路、フラッシュｅｐｒｏｍメモリセルのアレイ、メモリセルのアレイおよび電気経路を製造する方法

Info

Publication number: JPH0851193A
Authority: JP; Japan
Prior art keywords: well; channel; type; array; substrate
Prior art date: 1994-07-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP7163415A

Other languages

English (en)

Japanese (ja)

Inventor

David K Y Liu

デイビッド・ケイ・ワイ・リウ

Jian Chen

ジアン・チェン

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Advanced Micro Devices Inc

Original Assignee

Advanced Micro Devices Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-07-01

Filing date

1995-06-29

Publication date

1996-02-20

1995-06-29 Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc

1996-02-20 Publication of JPH0851193A publication Critical patent/JPH0851193A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims 5
239000000758 substrate Substances 0.000 claims abstract description 36
238000000034 method Methods 0.000 claims description 9
229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
229920005591 polysilicon Polymers 0.000 claims description 5
239000000463 material Substances 0.000 claims description 4
239000004020 conductor Substances 0.000 claims description 3
238000000151 deposition Methods 0.000 claims 1
230000037361 pathway Effects 0.000 claims 1
238000009792 diffusion process Methods 0.000 abstract 1
238000002513 implantation Methods 0.000 abstract 1
239000007943 implant Substances 0.000 description 6
239000003989 dielectric material Substances 0.000 description 5
238000003491 array Methods 0.000 description 3
239000002019 doping agent Substances 0.000 description 3
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
230000015556 catabolic process Effects 0.000 description 2
238000010586 diagram Methods 0.000 description 2
230000004888 barrier function Effects 0.000 description 1
238000002347 injection Methods 0.000 description 1
239000007924 injection Substances 0.000 description 1
238000002955 isolation Methods 0.000 description 1
239000002184 metal Substances 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
238000000926 separation method Methods 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
230000005641 tunneling Effects 0.000 description 1

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices

Landscapes

Semiconductor Memories (AREA)
Non-Volatile Memory (AREA)

JP7163415A 1994-07-01 1995-06-29 電気経路、フラッシュｅｐｒｏｍメモリセルのアレイ、メモリセルのアレイおよび電気経路を製造する方法 Pending JPH0851193A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US08/269,478 US5541875A (en)	1994-07-01	1994-07-01	High energy buried layer implant to provide a low resistance p-well in a flash EPROM array
US08/269478		1994-07-01

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2008170899A Division JP5185710B2 (ja)	1994-07-01	2008-06-30	電気経路およびメモリセルのフローティングゲートから電荷を消去する方法

Publications (1)

Publication Number	Publication Date
JPH0851193A true JPH0851193A (ja)	1996-02-20

Family

ID=23027428

Family Applications (2)

Application Number	Title	Priority Date	Filing Date
JP7163415A Pending JPH0851193A (ja)	1994-07-01	1995-06-29	電気経路、フラッシュｅｐｒｏｍメモリセルのアレイ、メモリセルのアレイおよび電気経路を製造する方法
JP2008170899A Expired - Lifetime JP5185710B2 (ja)	1994-07-01	2008-06-30	電気経路およびメモリセルのフローティングゲートから電荷を消去する方法

Family Applications After (1)

Application Number	Title	Priority Date	Filing Date
JP2008170899A Expired - Lifetime JP5185710B2 (ja)	1994-07-01	2008-06-30	電気経路およびメモリセルのフローティングゲートから電荷を消去する方法

Country Status (6)

Country	Link
US (1)	US5541875A (de)
EP (1)	EP0690508B1 (de)
JP (2)	JPH0851193A (de)
KR (1)	KR100366599B1 (de)
AT (1)	ATE224102T1 (de)
DE (1)	DE69528118T2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2003068894A (ja) *	2001-08-29	2003-03-07	Sharp Corp	半導体記憶装置およびその形成方法
JP2006054435A (ja) *	2004-08-13	2006-02-23	Infineon Technologies Ag	集積メモリデバイスおよびその製造方法
JP2006165451A (ja) *	2004-12-10	2006-06-22	Renesas Technology Corp	半導体装置及びその製造方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6330190B1 (en) *	1996-05-30	2001-12-11	Hyundai Electronics America	Semiconductor structure for flash memory enabling low operating potentials
KR100486205B1 (ko) *	1997-08-22	2006-04-21	삼성전자주식회사	반도체기억소자및그제조방법
US5973374A (en) *	1997-09-25	1999-10-26	Integrated Silicon Solution, Inc.	Flash memory array having well contact structures
US6492675B1 (en)	1998-01-16	2002-12-10	Advanced Micro Devices, Inc.	Flash memory array with dual function control lines and asymmetrical source and drain junctions
US6529410B1 (en) *	2000-09-20	2003-03-04	Advanced Micro Devices, Inc.	NAND array structure and method with buried layer
US7027316B2 (en) *	2003-12-29	2006-04-11	Micron Technology, Inc.	Access circuit and method for allowing external test voltage to be applied to isolated wells
CN103887336B (zh) *	2012-12-19	2016-06-15	旺宏电子股份有限公司	半导体结构及其制造方法
US9035386B2 (en) *	2012-12-21	2015-05-19	Macronix International Co., Ltd.	Semiconductor structure and method for manufacturing the same
TWI682388B (zh) *	2018-01-17	2020-01-11	旺宏電子股份有限公司	半導體元件
CN109037225B (zh) *	2018-09-19	2023-09-12	长江存储科技有限责任公司	存储器结构
US11416666B1 (en) *	2021-03-04	2022-08-16	Taiwan Semiconductor Manufacturing Co., Ltd.	Integrated circuit and method for forming the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4429326A (en) *	1978-11-29	1984-01-31	Hitachi, Ltd.	I2 L Memory with nonvolatile storage
DE3483765D1 (de) *	1983-09-28	1991-01-31	Toshiba Kawasaki Kk	Elektrisch loeschbare und programmierbare nichtfluechtige halbleiterspeicheranordnung mit zwei gate-elektroden.
JPH073811B2 (ja) *	1985-04-12	1995-01-18	株式会社日立製作所	半導体記憶装置
JPH02295171A (ja) *	1989-05-09	1990-12-06	Fujitsu Ltd	半導体装置及びその製造方法
JPH03105971A (ja) *	1989-09-20	1991-05-02	Hitachi Ltd	半導体集積回路装置
JPH07123145B2 (ja) *	1990-06-27	1995-12-25	株式会社東芝	半導体集積回路
JP3068291B2 (ja) *	1990-12-12	2000-07-24	新日本製鐵株式会社	半導体記憶装置
JP3152762B2 (ja) *	1992-10-06	2001-04-03	富士通株式会社	不揮発性半導体記憶装置
JPH06318684A (ja) *	1993-05-10	1994-11-15	Kobe Steel Ltd	不揮発性半導体メモリ装置

1994
- 1994-07-01 US US08/269,478 patent/US5541875A/en not_active Expired - Lifetime
1995
- 1995-06-20 EP EP95304289A patent/EP0690508B1/de not_active Expired - Lifetime
- 1995-06-20 AT AT95304289T patent/ATE224102T1/de not_active IP Right Cessation
- 1995-06-20 DE DE69528118T patent/DE69528118T2/de not_active Expired - Lifetime
- 1995-06-24 KR KR1019950017345A patent/KR100366599B1/ko not_active Expired - Lifetime
- 1995-06-29 JP JP7163415A patent/JPH0851193A/ja active Pending
2008
- 2008-06-30 JP JP2008170899A patent/JP5185710B2/ja not_active Expired - Lifetime

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2003068894A (ja) *	2001-08-29	2003-03-07	Sharp Corp	半導体記憶装置およびその形成方法
JP2006054435A (ja) *	2004-08-13	2006-02-23	Infineon Technologies Ag	集積メモリデバイスおよびその製造方法
US8288813B2 (en)	2004-08-13	2012-10-16	Infineon Technologies Ag	Integrated memory device having columns having multiple bit lines
JP2006165451A (ja) *	2004-12-10	2006-06-22	Renesas Technology Corp	半導体装置及びその製造方法

Also Published As

Publication number	Publication date
KR100366599B1 (ko)	2003-04-26
ATE224102T1 (de)	2002-09-15
JP5185710B2 (ja)	2013-04-17
US5541875A (en)	1996-07-30
DE69528118D1 (de)	2002-10-17
JP2008270838A (ja)	2008-11-06
KR960006053A (ko)	1996-02-23
EP0690508B1 (de)	2002-09-11
DE69528118T2 (de)	2003-04-30
EP0690508A2 (de)	1996-01-03
EP0690508A3 (de)	1997-09-10

Legal Events

Date	Code	Title	Description
2005-02-14	A977	Report on retrieval	Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050214
2006-05-24	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060523
2006-08-23	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20060822
2006-08-28	A602	Written permission of extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20060825
2006-11-03	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061102
2007-11-16	A711	Notification of change in applicant	Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20071115
2008-03-19	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20080318
2008-06-18	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20080617
2008-06-23	A602	Written permission of extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20080620
2009-01-14	A02	Decision of refusal	Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090113

Publication	Publication Date	Title
JP5185710B2 (ja)	2013-04-17	電気経路およびメモリセルのフローティングゲートから電荷を消去する方法
US6873004B1 (en)	2005-03-29	Virtual ground single transistor memory cell, memory array incorporating same, and method of operation thereof
US6211011B1 (en)	2001-04-03	Method for fabricating asymmetric virtual ground P-channel flash cell
US20200051990A1 (en)	2020-02-13	Device Structure for a 3-Dimensional NOR Memory Array and Methods for Improved Erase Operations Applied Thereto
US5646060A (en)	1997-07-08	Method for making an EEPROM cell with isolation transistor
US6881626B2 (en)	2005-04-19	Method of fabricating a non-volatile memory device with a string select gate
EP0656663B1 (de)	1999-03-31	Verfahren zum Löschen einer nichtflüssigen Halbleiterspeicheranordnung
US6232182B1 (en)	2001-05-15	Non-volatile semiconductor memory device including memory transistor with a composite gate structure and method of manufacturing the same
CN1327526C (zh)	2007-07-18	电可擦除可编程只读存储器阵列的编程方法
US5615152A (en)	1997-03-25	Method of erasing a high density contactless flash EPROM array
US20040213048A1 (en)	2004-10-28	Nonvolatile memory having bit line discharge, and method of operation thereof
US5675161A (en)	1997-10-07	Channel accelerated tunneling electron cell, with a select region incorporated, for high density low power applications
US6570212B1 (en)	2003-05-27	Complementary avalanche injection EEPROM cell
EP0443515B1 (de)	1995-12-06	Nichtflüchtige Halbleitervorrichtung
JP2005197750A (ja)	2005-07-21	２トランジスタｐｍｏｓメモリセル及びその製造方法
US6252275B1 (en)	2001-06-26	Silicon-on-insulator non-volatile random access memory device
US20050184332A1 (en)	2005-08-25	Nonvolatile semiconductor memory device, method for driving the same, and method for fabricating the same
KR100273705B1 (ko)	2000-12-15	불휘발성반도체메모리장치의웰구조및그에따른제조방법
EP0642172B1 (de)	1998-11-04	Halbleiteranordnung mit einem nichtflüchtigen Speicher und Herstellungsmethode
US5677876A (en)	1997-10-14	Flash EEPROM with impurity diffused layer in channel area and process of production of same
KR100196577B1 (ko)	1999-06-15	비휘발성 반도체 메모리 장치와 그 제조 공정
JP4061985B2 (ja)	2008-03-19	不揮発性半導体記憶装置
US20020064921A1 (en)	2002-05-30	Semiconductor integrated circuit device and a method of manufacturing the same
KR100319617B1 (ko)	2002-01-05	반도체 소자 및 그 제조방법
JPH07183410A (ja)	1995-07-21	不揮発性半導体記憶装置