JPH0865075A - Piezoelectric resonator - Google Patents

Piezoelectric resonator

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Publication number
JPH0865075A
JPH0865075A JP19559094A JP19559094A JPH0865075A JP H0865075 A JPH0865075 A JP H0865075A JP 19559094 A JP19559094 A JP 19559094A JP 19559094 A JP19559094 A JP 19559094A JP H0865075 A JPH0865075 A JP H0865075A
Authority
JP
Japan
Prior art keywords
electrode
electrodes
piezoelectric
piezoelectric resonator
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19559094A
Other languages
Japanese (ja)
Other versions
JP3395861B2 (en
Inventor
Yasuhiro Tanaka
康▲廣▼ 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP19559094A priority Critical patent/JP3395861B2/en
Publication of JPH0865075A publication Critical patent/JPH0865075A/en
Application granted granted Critical
Publication of JP3395861B2 publication Critical patent/JP3395861B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: To obtain a piezoelectric resonator where the space between an input/ output leading out electrode and a ground leading out electrode is wide and productivity is excellent. CONSTITUTION: On the front and back surfaces of a piezoelectric body mother board, band-shaped vibration electrodes 2 to 4 extending in the long side direction of a board 1 are provided and leading out electrodes 5 to 7b extending from these vibration electrodes 2 to 4 in the short side direction of the board 1 are provided. The electrode width of each of the leading out electrodes 5 to 7b formed on the board 1 is set to the value of the summation of the dimension which is twice as large as the electrode width of the leading out electrode of a piezoelectric resonator and the blade thickness dimension of a cutting cutter. Piezoelectric resonators 111 and 112 are segmented by cutting the board 1 along the center line of the leading out electrodes 5 to 7b, that is along an alternate long and short dash line 10 by the cutting cutter at a leading out pitch P1 .

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、圧電共振子、特にトラ
ップ回路やフィルタ回路等に使用される圧電共振子に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric resonator, and more particularly to a piezoelectric resonator used in trap circuits, filter circuits and the like.

【0002】[0002]

【従来の技術と課題】従来の圧電共振子としては、例え
ば図5に示すように、圧電体基板31の表面に振動電極
32,33と引出し電極35,36とを設け、裏面に振
動電極34と引出し電極37a,37bとを設けたもの
が知られている。引出し電極35,36,37a,37
bは圧電体基板31の中央寄りに配設されており、圧電
体マザーボードから圧電共振子を切り出す際に引出し電
極35〜37bが切断されにくいように工夫されてい
る。
2. Description of the Related Art As a conventional piezoelectric resonator, for example, as shown in FIG. 5, vibrating electrodes 32 and 33 and lead electrodes 35 and 36 are provided on the surface of a piezoelectric substrate 31, and vibrating electrode 34 is provided on the back surface. There is known one provided with the extraction electrodes 37a and 37b. Extraction electrodes 35, 36, 37a, 37
b is arranged near the center of the piezoelectric substrate 31, and is designed so that the extraction electrodes 35 to 37b are not easily cut when the piezoelectric resonator is cut out from the piezoelectric mother board.

【0003】ところが、この圧電共振子において、引出
し電極35を入力電極、引出し電極36を出力電極、引
出し電極37a,37bをグランド電極とすると、入力
引出し電極35とグランド引出し電極37aの接近、あ
るいは出力引出し電極36とグランド引出し電極37b
の接近は不要振動の発生を招き、共振周波数特性を劣化
させる。このため、引出し電極の導体幅を細くしている
が、細い導体幅は欠けや断線等の加工不良が生じ易く、
生産性の向上を阻害していた。
In this piezoelectric resonator, however, if the extraction electrode 35 is the input electrode, the extraction electrode 36 is the output electrode, and the extraction electrodes 37a and 37b are the ground electrodes, the input extraction electrode 35 and the ground extraction electrode 37a are close to each other or output. Extraction electrode 36 and ground extraction electrode 37b
Approaching causes the generation of unnecessary vibration and deteriorates the resonance frequency characteristic. Therefore, although the conductor width of the extraction electrode is narrowed, a thin conductor width easily causes processing defects such as chipping and disconnection,
It hindered the improvement of productivity.

【0004】そこで、本発明の課題は、入出力引出し電
極とグランド引出し電極の間隔が広く、かつ生産性に優
れた圧電共振子を提供することにある。
Therefore, an object of the present invention is to provide a piezoelectric resonator having a wide interval between the input / output extraction electrode and the ground extraction electrode and excellent productivity.

【0005】[0005]

【課題を解決するための手段と作用】以上の課題を解決
するため、本発明に係る圧電共振子は、長尺形状の圧電
体マザーボードの表裏中央部にマザーボードの長辺方向
に延びる帯状の振動電極を設けると共に、前記振動電極
からマザーボードの短辺方向に延びた引出し電極を所定
の引出しピッチで設け、前記マザーボードから前記引出
しピッチで前記引出し電極を2分割するように短辺方向
に切り出し、前記2分割された引出し電極の一方の引出
し電極を圧電体基板の側縁に有したことを特徴とする。
In order to solve the above problems, the piezoelectric resonator according to the present invention has a strip-shaped vibration extending in the long side direction of the motherboard at the center of the front and back sides of the elongated piezoelectric mother board. Electrodes are provided, extraction electrodes extending from the vibrating electrode in the short side direction of the motherboard are provided at a predetermined extraction pitch, and the extraction electrodes are cut out in the short side direction so as to divide the extraction electrode into two at the extraction pitch. One of the lead electrodes divided into two is provided at the side edge of the piezoelectric substrate.

【0006】以上の構成により、切り出された圧電共振
子は、常に圧電体基板の側縁に沿って引出し電極が設け
られる。従って、入出力引出し電極とグランド引出し電
極の間隔が従来の圧電共振子と比較して広くなる。しか
も、マザーボードの表裏面に形成される引出し電極の電
極幅は、圧電共振子の引出し電極の電極幅の少なくとも
2倍の寸法となるため、引出し電極の形成がし易く、欠
けや断線等の加工不良が低減する。
With the above structure, the cut-out piezoelectric resonator is always provided with the extraction electrode along the side edge of the piezoelectric substrate. Therefore, the distance between the input / output extraction electrode and the ground extraction electrode becomes wider than that of the conventional piezoelectric resonator. Moreover, since the electrode width of the extraction electrode formed on the front and back surfaces of the mother board is at least twice the electrode width of the extraction electrode of the piezoelectric resonator, it is easy to form the extraction electrode, and processing such as chipping or disconnection is performed. Defects are reduced.

【0007】[0007]

【実施例】以下、本発明に係る圧電共振子の一実施例に
ついて添付図面を参照して説明する。本実施例は3端子
の圧電共振子の場合について説明する。図1に示すよう
に、圧電体マザーボード1は長尺形状をしており、表面
中央部にはボード1の長辺方向に延びる帯状の振動電極
2,3が対置して設けられ、この振動電極2,3からボ
ード1の短辺方向に引き出された引出し電極5,6がボ
ード1の縁部にまで延設されている。同様に、ボード1
の裏面中央部にはボード1の長辺方向に延びる帯状の振
動電極4が設けられ、この振動電極4からボード1の短
辺方向に引き出された引出し電極7a,7bがボード1
の縁部にまで延設されている。圧電体マザーボード1の
材料としては、例えばチタン酸バリウムやPZT等のセ
ラミックスが使用される。この圧電体マザーボード1の
材料としては、セラミックス以外に水晶やLiTaO3
等でもよい。各電極2〜7bはCu,Ag,Ag−Pd
等の導電性材料からなり、印刷乾燥、スパッタリングあ
るいは蒸着等の手段にて形成される。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the piezoelectric resonator according to the present invention will be described below with reference to the accompanying drawings. In this example, a case of a three-terminal piezoelectric resonator will be described. As shown in FIG. 1, the piezoelectric mother board 1 has an elongated shape, and strip-shaped vibrating electrodes 2 and 3 extending in the long side direction of the board 1 are provided opposite to each other at the center of the surface. Extraction electrodes 5 and 6 drawn out from the boards 2 and 3 in the short side direction of the board 1 are extended to the edge of the board 1. Similarly, board 1
A strip-shaped vibrating electrode 4 extending in the long side direction of the board 1 is provided in the center of the back surface of the board 1.
Has been extended to the edge. As the material of the piezoelectric mother board 1, ceramics such as barium titanate or PZT is used. As the material of the piezoelectric mother board 1, besides ceramics, quartz or LiTaO 3 is used.
And so on. Each of the electrodes 2 to 7b is made of Cu, Ag, Ag-Pd
It is made of a conductive material such as, and is formed by means such as print drying, sputtering or vapor deposition.

【0008】ここに、引出し電極5,6,7a,7bの
引出しピッチをP1とする。ボード1に形成される引出
し電極5〜7bの電極幅は、後述の圧電共振子111
112の引出し電極5〜7bの電極幅の2倍の寸法と切
出しカッターの刃厚寸法とを合計した値に設定される。
従って、ボード1の表裏面に形成される引出し電極5〜
7bの電極幅は従来の圧電共振子と比較して著しく大き
くなり、欠けや断線等の加工不良が低減される。
Here, the lead-out pitch of the lead-out electrodes 5, 6, 7a and 7b is P 1 . The electrode widths of the extraction electrodes 5 to 7b formed on the board 1 are the same as those of the piezoelectric resonator 11 1 , which will be described later.
It is set to 11 2 value which is the sum of the blade thickness dimension of 2 times the dimension and cut cutter electrode width of the lead electrode 5~7B.
Therefore, the extraction electrodes 5 formed on the front and back surfaces of the board 1
The electrode width of 7b becomes remarkably larger than that of the conventional piezoelectric resonator, and processing defects such as chipping and disconnection are reduced.

【0009】次に、ボード1が図示しない切出しカッタ
ーによって引出しピッチP1で引出し電極5〜7bの中
央線、すなわち、一点鎖線10に沿って切断される。こ
のとき、切り出しカッターの基準位置出しは、引出し電
極4〜7bを利用して行われるが、引出し電極5〜7b
の導体幅が大きいので精度の良い基準位置出しができ、
また作業性もよい。
Next, the board 1 is cut by a cutting cutter (not shown) at a drawing pitch P 1 along the center line of the drawing electrodes 5 to 7b, that is, the alternate long and short dash line 10. At this time, the reference position of the cutting cutter is performed using the extraction electrodes 4 to 7b, but the extraction electrodes 5 to 7b.
Since the conductor width of is large, accurate reference positioning can be performed,
Workability is also good.

【0010】切り出された圧電共振子111は、図2に
示すように、圧電体基板12の表面中央部に振動電極
2,3が対置し、この振動電極2,3からそれぞれ圧電
体基板12の右側縁及び左側縁に沿って引出し電極5,
6が圧電体基板12の端部にまで延設されている。同様
に、圧電体基板12の裏面中央部に振動電極4が設けら
れ、この振動電極4から圧電体基板12の左側縁及び右
側縁に沿って引出し電極7a,7bが圧電体基板12の
端部に延設されている。
As shown in FIG. 2, the piezo-resonator 11 1 cut out has vibrating electrodes 2 and 3 placed at the center of the surface of a piezoelectric substrate 12, and the vibrating electrodes 2 and 3 form the piezoelectric substrate 12 respectively. Along the right and left edges of the extraction electrode 5,
6 extends to the end of the piezoelectric substrate 12. Similarly, the vibrating electrode 4 is provided at the center of the back surface of the piezoelectric substrate 12, and the extraction electrodes 7 a and 7 b are formed along the left side edge and the right side edge of the piezoelectric substrate 12 from the vibrating electrode 4 and the end portions of the piezoelectric substrate 12 are formed. Has been extended to.

【0011】また、圧電共振子111と伴に切り出され
た圧電共振子112は、図3に示すように、引出し電極
5〜7bの配置が圧電共振子111に対して左右対称に
なっている。マザーボード1の状態で、圧電共振子11
1と112は隣接しており、圧電共振子112の入力引出
し電極5は圧電共振子111の入力引出し電極5と一体
化している。同様に、圧電共振子112の出力引出し電
極6は圧電共振子111の出力引出し電極6と一体化
し、圧電共振子112のグランド引出し電極7a,7b
はそれぞれ圧電共振子111のグランド引出し電極7
a,7bと一体化している。
Further, in the piezoelectric resonator 11 2 cut out together with the piezoelectric resonator 11 1 , as shown in FIG. 3, the arrangement of the extraction electrodes 5 to 7b is symmetrical with respect to the piezoelectric resonator 11 1 . ing. In the state of the motherboard 1, the piezoelectric resonator 11
1 and 11 2 are adjacent, an input lead-out electrode 5 of the piezoelectric resonator 11 2 is integral with the input lead-out electrode 5 of the piezoelectric resonator 11 1. Similarly, the output lead-out electrode 6 of the piezoelectric resonator 11 2 is integrated with the output lead-out electrode 6 of the piezoelectric resonator 11 1, the piezoelectric resonator 11 second ground lead electrode 7a, 7b
Are the ground extraction electrodes 7 of the piezoelectric resonator 11 1.
It is integrated with a and 7b.

【0012】この圧電共振子111,112において、引
出し電極5を入力電極、引出し電極6を出力電極、引出
し電極7a,7bをグランド電極とすると、入力引出し
電極5とグランド引出し電極7aの間隔、あるいは出力
引出し電極6とグランド引出し電極7bの間隔は、従来
の圧電共振子と比較して広いので、不要振動が発生しに
くく、共振周波数特性が向上する。図4はこうして得ら
れた圧電共振子111、112の電気等価回路図である。
In the piezoelectric resonators 11 1 and 11 2 , when the extraction electrode 5 is an input electrode, the extraction electrode 6 is an output electrode, and the extraction electrodes 7a and 7b are ground electrodes, the distance between the input extraction electrode 5 and the ground extraction electrode 7a is large. Alternatively, since the distance between the output extraction electrode 6 and the ground extraction electrode 7b is wider than that of the conventional piezoelectric resonator, unnecessary vibration is less likely to occur and the resonance frequency characteristic is improved. FIG. 4 is an electrical equivalent circuit diagram of the piezoelectric resonators 11 1 and 11 2 thus obtained.

【0013】なお、本発明に係る圧電共振子は前記実施
例に限定するものではなく、その要旨の範囲内で種々に
変形することができる。特に、振動電極の形状等につい
ては任意である。
The piezoelectric resonator according to the present invention is not limited to the above embodiment, but can be variously modified within the scope of the invention. In particular, the shape of the vibrating electrode is arbitrary.

【0014】[0014]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、圧電体マザーボードの表裏面に形成する引出し
電極の電極幅が圧電共振子の引出し電極の電極幅の少な
くとも2倍の寸法になるので、引出し電極の形成が容易
となり、欠けや断線等の加工不良を低減することができ
る。
As is apparent from the above description, according to the present invention, the electrode width of the extraction electrode formed on the front and back surfaces of the piezoelectric mother board is at least twice the electrode width of the extraction electrode of the piezoelectric resonator. Therefore, the extraction electrode can be easily formed, and processing defects such as chipping and disconnection can be reduced.

【0015】さらに、引出し電極の導体幅が大きいの
で、圧電体マザーボードから圧電共振子を切り出す際の
切出し基準位置出しが精度良くでき、また作業性もよく
なる。また、常に圧電体基板の側縁に沿って引出し電極
が設けられるので、入出力引出し電極とグランド引出し
電極の間隔を従来の圧電共振子と比較して広くすること
ができ、共振周波数特性を向上させることができる。
Further, since the lead electrode has a large conductor width, the cutout reference position can be accurately set when cutting out the piezoelectric resonator from the piezoelectric mother board, and the workability is also improved. Further, since the extraction electrode is always provided along the side edge of the piezoelectric substrate, the distance between the input / output extraction electrode and the ground extraction electrode can be made wider than that of the conventional piezoelectric resonator, and the resonance frequency characteristic is improved. Can be made.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る圧電共振子の圧電体マザーボード
を示す平面図。
FIG. 1 is a plan view showing a piezoelectric mother board of a piezoelectric resonator according to the present invention.

【図2】図1に示した圧電体マザーボードから切り出さ
れた圧電共振子を示す平面図。
FIG. 2 is a plan view showing a piezoelectric resonator cut out from the piezoelectric mother board shown in FIG.

【図3】図1に示した圧電体マザーボードから切り出さ
れた別の圧電共振子を示す平面図。
FIG. 3 is a plan view showing another piezoelectric resonator cut out from the piezoelectric mother board shown in FIG.

【図4】圧電共振子の電気等価回路図。FIG. 4 is an electrical equivalent circuit diagram of a piezoelectric resonator.

【図5】従来の圧電共振子を示す平面図。FIG. 5 is a plan view showing a conventional piezoelectric resonator.

【符号の説明】[Explanation of symbols]

1…圧電体マザーボード 2,3,4…振動電極 5,6,7a,7b…引出し電極 111,112…圧電共振子 12…圧電体基板 P1…引出しピッチDESCRIPTION OF SYMBOLS 1 ... Piezoelectric mother board 2, 3, 4 ... Vibration electrode 5, 6, 7a, 7b ... Extraction electrode 11 1 , 11 2 ... Piezoelectric resonator 12 ... Piezoelectric substrate P 1 ... Extraction pitch

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 長尺形状の圧電体マザーボードの表裏中
央部にマザーボードの長辺方向に延びる帯状の振動電極
を設けると共に、前記振動電極からマザーボードの短辺
方向に延びた引出し電極を所定の引出しピッチで設け、
前記マザーボードから前記引出しピッチで前記引出し電
極を2分割するように短辺方向に切り出し、前記2分割
された引出し電極の一方の引出し電極を圧電体基板の側
縁に有したことを特徴とする圧電共振子。
1. A strip-shaped vibrating electrode extending in the long side direction of the mother board is provided at the center of the front and back of a long piezoelectric substrate, and a lead electrode extending in the short side direction of the mother board is drawn out from the vibrating electrode in a predetermined manner. Set up on the pitch,
The piezoelectric element is characterized in that the lead-out electrode is cut out in the short side direction from the motherboard at the lead-out pitch so as to be divided into two, and one lead-out electrode of the two lead-out electrodes is provided on a side edge of the piezoelectric substrate. Resonator.
JP19559094A 1994-08-19 1994-08-19 Manufacturing method of piezoelectric resonator Expired - Fee Related JP3395861B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19559094A JP3395861B2 (en) 1994-08-19 1994-08-19 Manufacturing method of piezoelectric resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19559094A JP3395861B2 (en) 1994-08-19 1994-08-19 Manufacturing method of piezoelectric resonator

Publications (2)

Publication Number Publication Date
JPH0865075A true JPH0865075A (en) 1996-03-08
JP3395861B2 JP3395861B2 (en) 2003-04-14

Family

ID=16343683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19559094A Expired - Fee Related JP3395861B2 (en) 1994-08-19 1994-08-19 Manufacturing method of piezoelectric resonator

Country Status (1)

Country Link
JP (1) JP3395861B2 (en)

Also Published As

Publication number Publication date
JP3395861B2 (en) 2003-04-14

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