JPH0870232A - Surface acoustic wave element and oscillat0r - Google Patents
Surface acoustic wave element and oscillat0rInfo
- Publication number
- JPH0870232A JPH0870232A JP20264894A JP20264894A JPH0870232A JP H0870232 A JPH0870232 A JP H0870232A JP 20264894 A JP20264894 A JP 20264894A JP 20264894 A JP20264894 A JP 20264894A JP H0870232 A JPH0870232 A JP H0870232A
- Authority
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- Prior art keywords
- resonators
- pair
- acoustic wave
- surface acoustic
- oscillation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 39
- 230000010355 oscillation Effects 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 239000013078 crystal Substances 0.000 description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
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- Networks Using Active Elements (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、弾性表面波素子及びこ
れを共振子とする発振器に係り、特に温度補償した発振
を得るための弾性表面波素子及び発振器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface acoustic wave device and an oscillator having the same as a resonator, and more particularly to a surface acoustic wave device and an oscillator for obtaining temperature-compensated oscillation.
【０００２】[0002]
【従来の技術】弾性表面波素子は、圧電基板上にアルミ
ニウム等の電極材料によりすだれ状電極を形成し、この
すだれ状電極を信号源で励起し、電気機械結合により基
板上に弾性表面波を発生させ、この励振された弾性表面
波を利用して共振子やフィルタ、センサ等の信号処理素
子を得ることができる。2. Description of the Related Art A surface acoustic wave device has a comb-shaped electrode formed of an electrode material such as aluminum on a piezoelectric substrate. The comb-shaped electrode is excited by a signal source and electro-mechanically coupled to generate a surface acoustic wave on the substrate. A signal processing element such as a resonator, a filter, or a sensor can be obtained by using the surface acoustic wave that is generated and excited.
【０００３】弾性表面波素子を用いた発振器は、共振動
作を利用して従来の水晶発振器と同様な発振回路を構成
するものと、弾性表面波遅延線フィルタを利用するもの
がある。Oscillators using surface acoustic wave elements include those that use resonance operation to form an oscillation circuit similar to a conventional crystal oscillator, and those that use surface acoustic wave delay line filters.
【０００４】従来の発振器の温度補償について説明す
る。従来、水晶発振器で用いられる水晶振動子（例え
ば、ＡＴ−カット水晶）は、図３に示すような周波数−
温度特性を持っている。この振動子を用いて水晶発振器
を構成した場合、その発振周波数の温度特性は同図と同
様に大きな温度変動を起こす。The temperature compensation of the conventional oscillator will be described. Conventionally, a crystal oscillator (for example, AT-cut crystal) used in a crystal oscillator has a frequency-value as shown in FIG.
Has temperature characteristics. When a crystal oscillator is constructed using this oscillator, the temperature characteristics of its oscillation frequency cause large temperature fluctuations as in the case of FIG.
【０００５】しかし、近年の移動通信システムなどにお
いては、より高い周波数安定度が要求され、そのために
感温素子としてサーミスタを用いた温度補償型水晶発振
器が使用され、使用温度範囲で周波数変動が±２.５ｐ
ｐｍという特性を得ている。However, in recent mobile communication systems and the like, higher frequency stability is required, and for this reason, a temperature-compensated crystal oscillator using a thermistor as a temperature sensitive element is used, and the frequency fluctuation within the operating temperature range is ±. 2.5p
It has a characteristic of pm.
【０００６】弾性表面波素子を用いた発振器にも水晶発
振器と同様の温度補償型に構成することで、温度−周波
数特性を向上させることが考えられる。It is conceivable that the oscillator using the surface acoustic wave element may be improved in temperature-frequency characteristic by forming it in the same temperature compensation type as the crystal oscillator.
【０００７】[0007]
【発明が解決しようとする課題】従来の温度補償型水晶
発振器は、水晶振動子の温度特性を補償するが、その安
定度には限界がある。また、サーミスタ等の部品を必要
とし、コストの点でも問題がある。The conventional temperature-compensated crystal oscillator compensates for the temperature characteristic of the crystal unit, but its stability is limited. In addition, the thermistor and other parts are required, which is problematic in terms of cost.
【０００８】最近では、周波数変動が±２ｐｐｍという
特性のディジタル型の温度補償型水晶発振器があるが、
この発振器構成にはＡ／Ｄ変換器とＤ／Ａ変換器、さら
にはメモリを必要とし、コストの問題が残る。Recently, there is a digital temperature-compensated crystal oscillator having a frequency variation of ± 2 ppm.
This oscillator configuration requires an A / D converter, a D / A converter, and a memory, and the cost problem remains.
【０００９】本発明の目的は、高い周波数安定度かつ低
コストになる発振器を得るための弾性表面波素子を提供
することにある。An object of the present invention is to provide a surface acoustic wave device for obtaining an oscillator having high frequency stability and low cost.
【００１０】本発明の他の目的は、弾性表面波素子を共
振子とし、高い周波数安定度かつ低コストになる発振器
を提供することにある。Another object of the present invention is to provide an oscillator using a surface acoustic wave element as a resonator and having high frequency stability and low cost.
【００１１】[0011]
【課題を解決するための手段】本発明は、前記課題の解
決を図るため、１つの圧電性基板の表面に互いに異なる
共振周波数を持つ電極パターンにした一対の共振子を設
けかつ該一対の共振子の電極は互いに異なる温度−共振
周波数特性になる膜厚にした構造を特徴とする。In order to solve the above problems, the present invention provides a pair of resonators having electrode patterns having resonance frequencies different from each other on the surface of one piezoelectric substrate, and the pair of resonances. The child electrodes are characterized by a structure in which the film thicknesses have different temperature-resonance frequency characteristics.
【００１２】また、本発明は、１つの圧電性基板の表面
に互いに異なる共振周波数を持つ電極パターンにした一
対の共振子を設けかつ該一対の共振子の電極は互いに異
なる温度−共振周波数特性になる膜厚にした構造の弾性
表面波素子と、前記弾性表面波素子の一対の共振子をそ
れぞれ共振子として互いに異なる周波数の発振を得る一
対の発振回路と、前記一対の発振回路の発振周波数差を
発振出力として得る発振出力回路とを備えたことを特徴
とする。Further, according to the present invention, a pair of resonators having electrode patterns having mutually different resonance frequencies are provided on the surface of one piezoelectric substrate, and the electrodes of the pair of resonators have different temperature-resonance frequency characteristics. Surface acoustic wave element having a structure having a different film thickness, a pair of oscillation circuits that obtain oscillations of different frequencies by using a pair of resonators of the surface acoustic wave element as resonators, and an oscillation frequency difference between the pair of oscillation circuits. Is provided as an oscillation output.
【００１３】また、本発明は、互いに異なる温度特性を
持つ一対の圧電性基板の表面に互いに異なる共振周波数
を持つ電極パターンにした共振子をそれぞれ設けた一対
の弾性表面波素子と、前記一対の弾性表面波素子をそれ
ぞれ共振子として互いに異なる周波数の発振を得る一対
の発振回路と、前記一対の発振回路の発振周波数差を発
振出力として得る発振出力回路とを備えたことを特徴と
する。Further, according to the present invention, a pair of surface acoustic wave elements each having a pair of piezoelectric substrates having different temperature characteristics, each having a resonator formed into an electrode pattern having a resonance frequency different from each other, and the pair of surface acoustic wave elements. The present invention is characterized by comprising a pair of oscillation circuits that use the surface acoustic wave elements as resonators to obtain oscillations of different frequencies, and an oscillation output circuit that obtains the oscillation frequency difference between the pair of oscillation circuits as an oscillation output.
【００１４】[0014]
【作用】発振器の構成法として、図４に示すように、互
いに異なる発振周波数ｆ1，ｆ2を持つ２つの発振回路
１、２を用い、両発振回路１、２の発振周波数の差ｆ1
−ｆ2を発振出力回路３の出力周波数ｆ3とする発振器が
ある。As a method of constructing an oscillator, as shown in FIG. 4, two oscillation circuits 1 and 2 having different oscillation frequencies f 1 and f 2 are used, and a difference f 1 between the oscillation frequencies of the oscillation circuits 1 and 2 is used.
There is an oscillator in which -f 2 is the output frequency f 3 of the oscillation output circuit 3.
【００１５】この場合、発振回路１、２で用いる２つの
振動子はそれぞれ固有の温度−周波数特性を持ち、出力
される発振周波数ｆ3はそのときの温度における周波数
の差となる。この周波数の差について、具体的な数値を
使って以下に説明する。In this case, the two oscillators used in the oscillating circuits 1 and 2 each have a unique temperature-frequency characteristic, and the oscillating frequency f 3 output is the frequency difference at that temperature. This difference in frequency will be described below using specific numerical values.
【００１６】０℃において周波数差１２.６ＭＨZ（ｆ1
＝１００ＭＨZ，ｆ2＝１１２．６ＭＨZ）の発振器を構
成したとする。この発振器に用いた振動子（これは水晶
振動子でも良いし、弾性表面波共振子でも良い）の温度
特性は、理解を容易にするため、温度に対して直線的に
変化する−２０ｐｐｍ／℃とする。At 0 ° C., the frequency difference is 12.6 MH Z (f 1
= 100 MH Z , f 2 = 112.6 MH Z ). The temperature characteristic of the oscillator (this may be a crystal oscillator or a surface acoustic wave resonator) used in this oscillator changes linearly with respect to temperature for easy understanding, −20 ppm / ° C. And
【００１７】このように、温度係数が同じで異なる発振
周波数の発振回路を組み合わせて発振器を構成し、−３
０℃〜８０℃で使用したとき、下記表に示すように、１
６０ｐｐｍもの周波数変動を生じる。As described above, an oscillator is constructed by combining oscillator circuits having the same temperature coefficient but different oscillation frequencies.
When used at 0 ° C to 80 ° C, as shown in the table below, 1
A frequency variation of 60 ppm occurs.
【００１８】[0018]
【表１】 [Table 1]
【００１９】ここで、両発振器の温度特性が互いに異な
るものを用いた場合、例えば、上記の例では１１２.６
ＭＨZの発振器の温度特性を−１７.７５ｐｐｍ／℃のも
のとする。この場合の周波数変動は、下記表に示すよう
に、最大で０.９ｐｐｍ／℃となり、非常に良好な値が
得られる。Here, when the two oscillators having different temperature characteristics are used, for example, 112.6 in the above example.
The temperature characteristics of the oscillator MH Z assumed to -17.75ppm / ℃. In this case, the frequency variation is 0.9 ppm / ° C. at the maximum, as shown in the table below, and a very good value is obtained.
【００２０】[0020]
【表２】 [Table 2]
【００２１】したがって、温度特性が互いに異なる振動
子を２つ用い、その周波数差をとる発振器を構成する
と、良好な温度−周波数特性が得られることがわかる。
しかし、２種類の温度特性をもつ発振回路又は共振子を
得るのに、従来の回路では必要とする回路素子が多くな
って高価な発振器になる。Therefore, it is understood that excellent temperature-frequency characteristics can be obtained by using two oscillators having different temperature characteristics and constructing an oscillator that takes the frequency difference.
However, in order to obtain an oscillating circuit or resonator having two kinds of temperature characteristics, the conventional circuit requires many circuit elements, resulting in an expensive oscillator.
【００２２】本発明では、２種類の温度特性を得るため
の弾性表面波素子及びこれを用いた発振器を以下の構成
とする。In the present invention, a surface acoustic wave device for obtaining two types of temperature characteristics and an oscillator using the same are constructed as follows.
【００２３】請求項１の弾性表面波素子は、１つの圧電
性基板面に互いに異なる共振周波数及び膜厚になる一対
の電極を設けて一対の共振子を構成する。これにより、
一対の共振子は温度変動による共振周波数の変化を互い
に補償する温度−共振周波数特性を得る。According to another aspect of the surface acoustic wave device of the present invention, a pair of electrodes having a resonance frequency and a film thickness different from each other are provided on one piezoelectric substrate surface to form a pair of resonators. This allows
The pair of resonators obtain a temperature-resonance frequency characteristic that mutually compensates a change in the resonance frequency due to a temperature change.
【００２４】請求項２の発振器は、請求項１記載の弾性
表面波素子を一対の共振子とする一対の発振回路を設け
ることにより互いに異なる周波数かつ温度変動に対して
互いに補償した周波数変化になる発振出力を得、両発振
周波数の差には温度による周波数変動を少なくした出力
を得る。The oscillator of claim 2 is provided with a pair of oscillating circuits having the surface acoustic wave element of claim 1 as a pair of resonators, so that the oscillators have different frequencies and frequency changes compensated for temperature variations. The oscillation output is obtained, and the difference between the two oscillation frequencies is obtained by reducing the frequency variation due to temperature.
【００２５】請求項３の発振器は、互いに異なる温度特
性の圧電性基板を用いて互いに異なる共振周波数を持つ
一対の弾性表面波素子を設け、両弾性表面波素子をそれ
ぞれ一対の発振回路の共振子とすることにより互いに異
なる周波数かつ温度変動に対して互いに補償した周波数
変化になる発振出力を得、両発振周波数の差には温度に
よる周波数変動を少なくした出力を得る。According to another aspect of the oscillator of the present invention, a pair of surface acoustic wave elements having different resonance frequencies are provided by using piezoelectric substrates having different temperature characteristics, and both surface acoustic wave elements are resonators of a pair of oscillation circuits. As a result, an oscillating output having different frequencies and frequency changes compensated for temperature fluctuations is obtained, and an output in which the frequency fluctuation due to temperature is reduced is obtained in the difference between the two oscillating frequencies.
【００２６】[0026]
【実施例】図１は、本発明の一実施例を示す弾性表面波
素子の斜視図である。同図は共振子構造の場合を示し、
圧電性基板１１の表面に一対の共振子が構成される。FIG. 1 is a perspective view of a surface acoustic wave device showing an embodiment of the present invention. The figure shows the case of the resonator structure,
A pair of resonators is formed on the surface of the piezoelectric substrate 11.
【００２７】第１の共振子は、基板中央部のすだれ状電
極１２とその両側に反射電極１３Ａ，１３Ｂを有して形
成される。同様に、第２の共振子は、すだれ状電極１４
とその両側に反射電極１５Ａ，１５Ｂを有して形成され
る。The first resonator is formed by having the interdigital electrode 12 in the central portion of the substrate and the reflective electrodes 13A and 13B on both sides thereof. Similarly, the second resonator has a comb-shaped electrode 14
And the reflective electrodes 15A and 15B on both sides thereof.
【００２８】両共振子は、互いに異なる共振周波数を持
つパターン構成、すなわちすだれ状電極等の電極指の間
隔（ピッチ）等が異なるものにされる。The two resonators have different pattern configurations having different resonance frequencies, that is, different intervals (pitch) between electrode fingers such as interdigital electrodes.
【００２９】また、両共振子は、互いに異なる温度−共
振周波数特性を持つ膜厚にされる。すなわち、弾性表面
波共振子の温度特性は、基板自体の温度特性及び電極膜
の温度特性が合わさったものになり、同じ基板１１面に
設けられる電極１２と１４等の膜厚を互いに異なるもの
とすることで、互いに異なる温度−周波数特性を持たせ
ることができる。なお、電極の膜厚調整は、両共振子を
同じ膜厚に形成し、その後に一方をエッチング等で薄く
することで実現される。Further, both resonators have a film thickness having different temperature-resonance frequency characteristics. That is, the temperature characteristic of the surface acoustic wave resonator is a combination of the temperature characteristic of the substrate itself and the temperature characteristic of the electrode film, and the film thicknesses of the electrodes 12 and 14 and the like provided on the same substrate 11 surface are different from each other. By doing so, different temperature-frequency characteristics can be provided. The adjustment of the electrode film thickness is realized by forming both resonators to the same film thickness and then thinning one of them by etching or the like.
【００３０】本実施例によれば、弾性表面波素子は、互
いに異なる共振周波数及び温度−共振周波数特性を持つ
１つの素子として構成され、素子自体が２種類の温度特
性を持つ共振子を構成できる。According to this embodiment, the surface acoustic wave element is constructed as one element having different resonance frequency and temperature-resonance frequency characteristics, and the element itself can form a resonator having two kinds of temperature characteristics. .
【００３１】しかも、同一の基板に形成されることか
ら、両共振子の温度差をほぼ同じにすることができ、温
度変動による周波数変化の度合いを常に同じにすること
ができる。これにより、使用温度範囲によって両共振子
の周波数変化量に差が発生するのを少なくすることがで
きる。Moreover, since they are formed on the same substrate, the temperature difference between both resonators can be made substantially the same, and the degree of frequency change due to temperature fluctuation can always be made the same. As a result, it is possible to reduce the occurrence of a difference in the frequency change amount of both resonators depending on the operating temperature range.
【００３２】上記構成の弾性表面波素子は、両共振子を
図４の発振回路１、２のそれぞれの共振子とする発振器
に用いて温度補償した発振出力を得ることができる。The surface acoustic wave device having the above-mentioned structure can obtain a temperature-compensated oscillation output by using both resonators as an oscillator using the resonators 1 and 2 of FIG.
【００３３】例えば、第１の共振子及び第２の共振子の
周波数及び温度係数が前記表２で示す値になる構成とす
ることにより、従来の温度補償型水晶発振器やディジタ
ル形のものと同等、又はそれ以上の安定度を持つ発振器
を構成できる。For example, when the frequency and temperature coefficient of the first resonator and the second resonator have the values shown in Table 2 above, it is equivalent to the conventional temperature-compensated crystal oscillator or digital type. It is possible to construct an oscillator having a stability of, or higher.
【００３４】しかも、従来の構成に必要とするサーミス
タやディジタル回路素子を不要にした低コストの発振器
を構成できる。Moreover, it is possible to construct a low-cost oscillator which does not require the thermistor and digital circuit elements required for the conventional construction.
【００３５】図２は、本発明の他の実施例を示す。同図
の（ａ）、（ｂ）に示す２つの共振子は、互いに異なる
温度特性を持つ一対の圧電性基板１６、１７に形成され
る。両共振子は、基板１６、１７面に互いに異なる共振
周波数を持つ共振子パターン構成にしたすだれ状電極１
８、１９と、その両側に設けた反射電極２０Ａ，２０
Ｂ，２１Ａ，２１Ｂで構成される。FIG. 2 shows another embodiment of the present invention. The two resonators shown in FIGS. 9A and 9B are formed on a pair of piezoelectric substrates 16 and 17 having different temperature characteristics. Both the resonators are interdigital electrodes 1 having a resonator pattern configuration having resonance frequencies different from each other on the surfaces of the substrates 16 and 17.
8 and 19, and reflective electrodes 20A and 20 provided on both sides thereof
B, 21A, 21B.
【００３６】圧電性基板１６、１７は、その温度特性が
異なるものを得るには、基板の種類、カット角、弾性表
面波の伝搬方向などが異なるものにして実現される。In order to obtain the piezoelectric substrates 16 and 17 having different temperature characteristics, different types of substrates, cut angles, surface acoustic wave propagation directions, etc. are used.
【００３７】本実施例の両弾性表面波共振子は、前記の
実施例と同様に、両共振子を図４の発振回路１、２のそ
れぞれの共振子とする発振器に適用して同等の作用効果
を得ることができる。The two surface acoustic wave resonators of this embodiment are applied to the oscillators having the two resonators as the resonators of the oscillation circuits 1 and 2 of FIG. The effect can be obtained.
【００３８】[0038]
【発明の効果】以上のとおり、本発明によれば、１つの
圧電性基板に互いに異なる共振周波数及び膜厚になる一
対の電極を設けて一対の共振子を構成した弾性表面波素
子とするため、温度補償のための感温素子等を不要にし
た低コストにしながら、温度補償するための２種類の温
度特性を得ることができる。As described above, according to the present invention, a surface acoustic wave device having a pair of resonators by providing a pair of electrodes having different resonance frequencies and film thicknesses on one piezoelectric substrate is provided. It is possible to obtain two types of temperature characteristics for temperature compensation while reducing the cost by eliminating the temperature sensitive element for temperature compensation.
【００３９】また、この弾性表面波素子を一対の発振回
路の共振子とすることにより互いに異なる周波数かつ温
度変動に対して互いに補償した周波数変化になる発振出
力を得、両発振周波数の差には温度による周波数変動を
少なくした出力を得ることができ、従来の温度補償のた
めの回路素子を不要にした低コストで、しかも従来と同
等以上の安定した発振周波数になる発振器を得ることが
できる。Further, by using this surface acoustic wave element as a resonator of a pair of oscillation circuits, an oscillation output having different frequencies and frequency changes compensated for temperature fluctuations is obtained. It is possible to obtain an output with less frequency fluctuation due to temperature, to obtain a low-cost oscillator that does not require a circuit element for temperature compensation of the related art, and to have a stable oscillation frequency equal to or higher than that of the related art.
【００４０】また、本発明は、互いに異なる温度特性の
圧電性基板を用いて互いに異なる共振周波数を持つ一対
の弾性表面波素子を設け、両弾性表面波素子をそれぞれ
一対の発振回路の共振子とすることにより低コストで従
来と同等以上の安定した発振周波数になる発振器を得る
ことができる。Further, according to the present invention, a pair of surface acoustic wave elements having mutually different resonance frequencies are provided by using piezoelectric substrates having different temperature characteristics, and both surface acoustic wave elements serve as a resonator of a pair of oscillation circuits. By doing so, it is possible to obtain a low-cost oscillator having a stable oscillation frequency equal to or higher than the conventional one.
【図１】本発明の一実施例を示す弾性表面波素子の斜視
図。FIG. 1 is a perspective view of a surface acoustic wave device showing an embodiment of the present invention.
【図２】他の実施例の斜視図。FIG. 2 is a perspective view of another embodiment.
【図３】水晶振動子の温度−周波数特性例。FIG. 3 is an example of temperature-frequency characteristics of a crystal unit.
【図４】周波数差を出力する発振器の構成図。FIG. 4 is a configuration diagram of an oscillator that outputs a frequency difference.
１１、１６、１７…圧電性基板 １２、１４、１８、１９…すだれ状電極 １３Ａ、１３Ｂ、２０Ａ、２０Ｂ…反射電極 11, 16, 17 ... Piezoelectric substrate 12, 14, 18, 19 ... Interdigital electrode 13A, 13B, 20A, 20B ... Reflective electrode
Claims (3)
共振周波数を持つ電極パターンにした一対の共振子を設
けかつ該一対の共振子の電極は互いに異なる温度−共振
周波数特性になる膜厚にした構造を特徴とする弾性表面
波素子。1. A piezoelectric substrate is provided with a pair of resonators each having an electrode pattern having a resonance frequency different from each other, and electrodes of the pair of resonators have film thicknesses having different temperature-resonance frequency characteristics. Surface acoustic wave device characterized by the above structure.
共振周波数を持つ電極パターンにした一対の共振子を設
けかつ該一対の共振子の電極は互いに異なる温度−共振
周波数特性になる膜厚にした構造の弾性表面波素子と、
前記弾性表面波素子の一対の共振子をそれぞれ共振子と
して互いに異なる周波数の発振を得る一対の発振回路
と、前記一対の発振回路の発振周波数差を発振出力とし
て得る発振出力回路とを備えたことを特徴とする発振
器。2. A pair of resonators having electrode patterns having mutually different resonance frequencies are provided on the surface of one piezoelectric substrate, and the electrodes of the pair of resonators have film thicknesses having different temperature-resonance frequency characteristics. A surface acoustic wave device having the above structure,
A pair of oscillation circuits that obtain oscillations of mutually different frequencies by using a pair of resonators of the surface acoustic wave element as resonators, respectively, and an oscillation output circuit that obtains an oscillation frequency difference of the pair of oscillation circuits as an oscillation output. An oscillator characterized by.
性基板の表面に互いに異なる共振周波数を持つ電極パタ
ーンにした共振子をそれぞれ設けた一対の弾性表面波素
子と、前記一対の弾性表面波素子をそれぞれ共振子とし
て互いに異なる周波数の発振を得る一対の発振回路と、
前記一対の発振回路の発振周波数差を発振出力として得
る発振出力回路とを備えたことを特徴とする発振器。3. A pair of surface acoustic wave elements each having a pair of piezoelectric substrates having different temperature characteristics, and a pair of surface acoustic wave elements provided with resonators each having an electrode pattern having a different resonance frequency. A pair of oscillation circuits that obtain oscillations of different frequencies with each as a resonator,
An oscillation output circuit that obtains an oscillation frequency difference between the pair of oscillation circuits as an oscillation output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20264894A JPH0870232A (en) | 1994-08-29 | 1994-08-29 | Surface acoustic wave element and oscillat0r |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20264894A JPH0870232A (en) | 1994-08-29 | 1994-08-29 | Surface acoustic wave element and oscillat0r |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0870232A true JPH0870232A (en) | 1996-03-12 |
Family
ID=16460834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20264894A Pending JPH0870232A (en) | 1994-08-29 | 1994-08-29 | Surface acoustic wave element and oscillat0r |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0870232A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5912602A (en) * | 1995-10-20 | 1999-06-15 | Seiko Epson Corporation | Surface acoustic wave device and method for designing same using resonators having different frequency-temperature characteristics |
| EP0936734A4 (en) * | 1997-07-28 | 2000-10-25 | Toshiba Kk | SURFACE ACOUSTIC WAVE PROCESSING DEVICE AND MANUFACTURING METHOD THEREOF |
| JP2006318478A (en) * | 2005-05-13 | 2006-11-24 | Avago Technologies General Ip (Singapore) Private Ltd | Generation of low-frequency clock |
| US8058933B2 (en) | 2005-09-21 | 2011-11-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Low frequency clock generation |
| JP2020043442A (en) * | 2018-09-10 | 2020-03-19 | 太陽誘電株式会社 | Acoustic wave device |
| CN112964384A (en) * | 2021-03-16 | 2021-06-15 | 山东深思智能科技有限公司 | Resonator type wireless passive temperature sensor and working method |
-
1994
- 1994-08-29 JP JP20264894A patent/JPH0870232A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5912602A (en) * | 1995-10-20 | 1999-06-15 | Seiko Epson Corporation | Surface acoustic wave device and method for designing same using resonators having different frequency-temperature characteristics |
| EP0936734A4 (en) * | 1997-07-28 | 2000-10-25 | Toshiba Kk | SURFACE ACOUSTIC WAVE PROCESSING DEVICE AND MANUFACTURING METHOD THEREOF |
| JP2006318478A (en) * | 2005-05-13 | 2006-11-24 | Avago Technologies General Ip (Singapore) Private Ltd | Generation of low-frequency clock |
| US8058933B2 (en) | 2005-09-21 | 2011-11-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Low frequency clock generation |
| JP2020043442A (en) * | 2018-09-10 | 2020-03-19 | 太陽誘電株式会社 | Acoustic wave device |
| CN112964384A (en) * | 2021-03-16 | 2021-06-15 | 山东深思智能科技有限公司 | Resonator type wireless passive temperature sensor and working method |
| CN112964384B (en) * | 2021-03-16 | 2022-08-30 | 山东深思智能科技有限公司 | Resonator type wireless passive temperature sensor and working method |
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