JPH08703B2 - Magnetic head slider material - Google Patents
Magnetic head slider materialInfo
- Publication number
- JPH08703B2 JPH08703B2 JP1172981A JP17298189A JPH08703B2 JP H08703 B2 JPH08703 B2 JP H08703B2 JP 1172981 A JP1172981 A JP 1172981A JP 17298189 A JP17298189 A JP 17298189A JP H08703 B2 JPH08703 B2 JP H08703B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- head slider
- slider material
- magnetic
- cao
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Description
【発明の詳細な説明】 発明の技術分野 本発明は、磁気ヘッドスライダー材料に関する。特
に、記録媒体とのなじみ、金属性磁性膜との熱整合性等
に優れ、薄膜磁気ヘッド装着に適した磁気ヘッドスライ
ダー材料に関するものである。TECHNICAL FIELD OF THE INVENTION The present invention relates to magnetic head slider materials. In particular, the present invention relates to a magnetic head slider material suitable for mounting a thin film magnetic head, which is excellent in compatibility with a recording medium, thermal compatibility with a metallic magnetic film, and the like.
従来技術 一般に、磁気ヘッドスライダー材料は、非磁性材料で
あるが、耐摩耗性を始め精密加工性、加工能率、高強
度、組織の緻密性、さらには記録媒体とのなじみ、潤滑
性、金属性磁性膜との熱的整合性や被着強度などの諸特
性が要求されている。Conventional technology Generally, magnetic head slider materials are non-magnetic materials, but wear resistance, precision machinability, machining efficiency, high strength, denseness of texture, and compatibility with recording media, lubricity, and metallic properties. Various properties such as thermal compatibility with the magnetic film and adhesion strength are required.
従来、コンピューター用をはじめオーディオ用、VTR
用の記録再生用磁気ヘッドにはフェライト、パーマロイ
が用いられ、スライダー材料としては、Al2O3−TiC系
（特開昭55−163665号）が、最適な材料の一つとされて
いた。Conventionally, for computers, audio, VTR
Ferrite and permalloy were used for the recording / reproducing magnetic head, and Al 2 O 3 —TiC system (Japanese Patent Laid-Open No. 163665) was regarded as one of the optimum materials for the slider.
しかしながら、この材料は、記録媒体とのなじみ、潤
滑性の点で必ずしも安定な材料とはいえず、Al2O3−TiC
系の熱膨張係数も、75〜80×10-7/℃であり、これら材
料表面に金属性磁性膜等を形成させた場合、機能部材と
薄膜との熱膨張係数の差が大きく、熱整合性及び被着強
度の面で問題があった。また、ヘッド材料のフェライト
は磁性を持つため、スライダー材料に適さず、Al2O3−T
iC系材料を使用せざるを得なかった。However, this material is not necessarily a stable material in terms of compatibility with recording media and lubricity, and Al 2 O 3 -TiC
The coefficient of thermal expansion of the system is also 75-80 × 10 -7 / ° C. When a metallic magnetic film is formed on the surface of these materials, the difference in the coefficient of thermal expansion between the functional member and the thin film is large and the thermal matching There was a problem in terms of adhesion and adhesion strength. Moreover, since the ferrite of the head material has magnetism, it is not suitable for the slider material, and Al 2 O 3 -T
I had no choice but to use iC materials.
今日、磁気記録の高密度化、高速化に伴い、薄膜磁気
ヘッド化が進められている。記録再生のための磁気回路
部材としては高周波域の磁気特性がすぐれたセンダスト
あるいはアモルファス薄膜が使用されており、この材料
に適したスライダー材料が必要となってきた。Nowadays, thin film magnetic heads are being developed along with higher density and higher speed of magnetic recording. As a magnetic circuit member for recording / reproducing, sendust or an amorphous thin film having excellent magnetic characteristics in a high frequency range is used, and a slider material suitable for this material has been required.
本発明者等は、上記欠点を解決すべく鋭意検討した結
果、以下の発明をなした。The present inventors have made the following inventions as a result of extensive studies to solve the above-mentioned drawbacks.
発明の構成 即ち、本発明は、（１）CoxNi2_xO2（ただし0.2≦ｘ
≦1.8）で表わされることを特徴とする磁気ヘッドスラ
イダー材料、（２）CoO、NiOを基本組成として、MnO、T
iO2、Al2O3、CaOの中から選ばれた少なくとも１種を0.1
〜5wt％添加した上記（１）記載の磁気ヘッドスライダ
ー材料、（３）CoO、NiOを基本組成として、１〜5wt％
のY2O3、あるいは0.1〜1wt％のTiN、または0.3〜2wt％
のB2O3のうち、少なくとも１種を添加した上記（１）記
載の磁気ヘッドスライダー材料、（４）MgO、CaO、Co
O、NiOから成る組成の混合セラミックスにおいて、Mg
O、CaOそれぞれが30モル％以下含有し、かつ残部がCoxN
i2_xO2（ただし0.2≦ｘ≦1.8）から成り、岩塩型構造を
有する上記（１）記載の磁気ヘッドスライダー材料に関
する。Structure of the Invention That is, the present invention provides (1) CoxNi 2 _xO 2 (where 0.2 ≦ x
≦ 1.8), magnetic head slider material, (2) CoO, NiO as basic composition, MnO, T
0.1 at least one selected from iO 2 , Al 2 O 3 and CaO
1 to 5 wt% based on the magnetic head slider material described in (1) above, which has been added up to 5 wt%, and (3) CoO and NiO
Y 2 O 3 , or 0.1 to 1 wt% TiN, or 0.3 to 2 wt%
Magnetic head slider material according to (1) above, wherein at least one of B 2 O 3 is added, (4) MgO, CaO, Co
In mixed ceramics composed of O and NiO, Mg
O and CaO content of 30 mol% or less, and the balance CoxN
The magnetic head slider material according to (1) above, which is composed of i 2 _xO 2 (where 0.2 ≦ x ≦ 1.8) and has a rock salt structure.
発明の具体的説明 本発明は、上記の欠点を解決したもので、金属性磁性
膜との熱整合性や被着強度にすぐれ、耐摩耗性、精密加
工性、高強度、組織の緻密性、さらには記録媒体とのな
じみ、潤滑性等の諸特性を満足する磁気ヘッドスライダ
ー材料を提供することが目的である。Detailed Description of the Invention The present invention solves the above-mentioned drawbacks, and is excellent in thermal compatibility and adherence strength with a metallic magnetic film, wear resistance, precision workability, high strength, denseness of structure, Another object is to provide a magnetic head slider material that satisfies various characteristics such as compatibility with a recording medium and lubricity.
磁気ヘッドスライダーの一例を第１図に示す。金属磁
性体膜（１）をボンディングガラス（２）により接着
し、非磁性基板（３）で保護したもの（コア）を装備し
た部材がスライダーである。An example of the magnetic head slider is shown in FIG. A slider is a member equipped with a metal magnetic film (1) adhered by a bonding glass (2) and protected by a non-magnetic substrate (3) (core).
本発明者等は、かかる観点から多くの材料を検討し、
CoxNi2_xO2（ただし0.2≦ｘ≦1.8）なる組成の酸化物が
有効であることを見い出した。本組成範囲内では、熱膨
張係数は128〜150×10-7/℃に容易に調整できる。また
硬度（ビッカース硬度）は550〜600でセンダストの物性
値に近いものである。The present inventors have examined many materials from such a viewpoint,
It has been found that an oxide having a composition of CoxNi 2 _xO 2 (where 0.2 ≦ x ≦ 1.8) is effective. Within this composition range, the coefficient of thermal expansion can be easily adjusted to 128 to 150 × 10 -7 / ℃. The hardness (Vickers hardness) is 550 to 600, which is close to the physical properties of Sendust.
また、添加材についても検討を続け、上記組成を基本
組成として、MnO、TiO2、Al2O3、CaOの中から選ばれた
少なくとも１種を0.1〜5wt％添加した場合は、MnOは焼
結性が促進し、TiO2、CaOは硬度の増加をもたらし、Al2
O3は粒成長の抑制に効果を有する。あるいは１〜5wt％
をY2O3添加した場合は、粒成長の抑制に効果がある。ま
た0.1〜1wt％のTiN添加の場合は、硬度の増加をもたら
す。または0.3〜2wt％のB2O3添加の場合は、焼結性の促
進をもたらす これらの添加材により硬度は600〜700となり、センダ
ストの値により近い値となるため均質性の点で好まし
い。Further, the additive material is also continuously investigated, and when 0.1 to 5 wt% of at least one selected from MnO, TiO 2 , Al 2 O 3 and CaO is added with the above composition as a basic composition, MnO is burned. The binding property is promoted, TiO 2 and CaO bring about an increase in hardness, and Al 2
O 3 has an effect of suppressing grain growth. Or 1-5wt%
Addition of Y 2 O 3 is effective in suppressing grain growth. Further, when 0.1 to 1 wt% of TiN is added, hardness is increased. Alternatively, in the case of adding 0.3 to 2 wt% of B 2 O 3, the hardness becomes 600 to 700 due to these additives that promote the sinterability, and the hardness becomes closer to the value of sendust, which is preferable in terms of homogeneity.
さらにCoxNi2_xO2（ただし0.2≦ｘ≦1.8）と他の酸化
物との混合セラミックスについても検討し、MgO、CaO、
CoO、NiOから成る組成の混合セラミックスにおいて、Mg
O、CaOそれぞれが30モル％以下含有し、かつ残部がCoxN
i2_xO2（ただし0.2≦ｘ≦1.8）から成り、岩塩型構造を
有する場合でも上記目的を達成することを見出した。Furthermore, mixed ceramics of CoxNi 2 _xO 2 (however 0.2 ≦ x ≦ 1.8) and other oxides were also investigated, and MgO, CaO,
In mixed ceramics composed of CoO and NiO, Mg
O and CaO content of 30 mol% or less, and the balance CoxN
It has been found that the above object can be achieved even if it has a rock-salt type structure, which is composed of i 2 _xO 2 (however, 0.2 ≦ x ≦ 1.8).
MgO、CaOは焼結促進の効果があり硬度が増加し、また
熱膨張率もCoO、NiOと比べて大きな差がないことから有
効である。範囲外では熱膨張率の低下が著しく、偏析が
生じ密度が低下するので望ましくない。MgO and CaO are effective because they have the effect of promoting sintering and increase the hardness, and the coefficient of thermal expansion is not so different from that of CoO and NiO. Outside the range, the coefficient of thermal expansion remarkably decreases, segregation occurs, and the density decreases, which is not desirable.
さらに詳述すれば、例えば、市販の酸化物を原料とし
て、所望組成になるよう秤量し、ボールミルにより混合
する。混合は例えばエタノール中湿式ボールミルで10〜
30時間行なう。More specifically, for example, commercially available oxides are used as raw materials, weighed to have a desired composition, and mixed by a ball mill. Mixing is performed with a wet ball mill in ethanol for 10 to 10
Do it for 30 hours.
乾燥後、CIP成形し、例えばN2中850〜1100℃で仮焼
し、次いで粗砕機を用いて粉砕し、100〜200μｍの篩で
篩分けを行なう。After drying, it is CIP molded, calcined in N 2 at 850 to 1100 ° C., then crushed using a coarse crusher, and sieved with a 100 to 200 μm sieve.
仮焼粉はさらに例えばエタノール中湿式ボールミルで
20〜72時間処理し、１μｍ以下に微粉砕する。The calcined powder may be further wet-milled in ethanol, for example.
Treat for 20 to 72 hours and pulverize to 1 μm or less.
これを造粒後、CIP成形し、例えばO2中1230〜1400℃
で焼結し、その後、HIP処理を行なう。HIP処理条件は、
800〜1200kg/cm2、1200〜1350℃、１〜２時間が望まし
い。After granulating this, CIP molding, for example 1230 ~ 1400 ℃ in O 2
Sintered, and then HIPed. HIP processing conditions are
800 to 1200 kg / cm 2 , 1200 to 1350 ° C., 1 to 2 hours are desirable.
このようにして得られた焼結体は、研削及び切削によ
り磁気ヘッドスライダーに加工される。The sintered body thus obtained is processed into a magnetic head slider by grinding and cutting.
加工されたスライダーは要求される諸特性、すなわち
耐摩耗性、精密加工性、高強度、組織の緻密性、さらに
は記録媒体とのなじみ、潤滑性等を満足し、特に被着す
る金属性磁性膜に近い熱膨張係数を有し、金属性磁性膜
との熱整合性や被着強度に、従来にないすぐれた性能を
示す。The processed slider satisfies the required characteristics such as wear resistance, precision workability, high strength, denseness of structure, compatibility with recording medium, lubricity, etc. It has a coefficient of thermal expansion close to that of a film, and exhibits unprecedented performance in terms of thermal compatibility with metallic magnetic films and adhesion strength.
特に、本材料はセンダストとほぼ同様の熱膨張係数を
有することから、磁気ヘッドと同じ材料であるため、均
質性にも優れ、より好ましい。In particular, since this material has a coefficient of thermal expansion substantially similar to that of sendust, it is the same material as the magnetic head, so that it is also excellent in homogeneity and is more preferable.
［実施例］ CoO、NiOを原料にCoNiO2組成となるように調整し混合
した。これをN2中1000℃で仮焼後、エタノールの湿式ボ
ールミルで22時間粉砕した。この粉砕粉をCIP成形後O2
中1350℃で焼結した。[Examples] CoO and NiO were used as raw materials and adjusted to have a CoNiO 2 composition and mixed. This was calcined in N 2 at 1000 ° C., and then pulverized with an ethanol wet ball mill for 22 hours. The pulverized powder CIP molding after O 2
Sintered at 1350 ° C in the middle.
HIP処理は、1280℃、1000kg/cm2、１時間行なった。The HIP treatment was performed at 1280 ° C. and 1000 kg / cm 2 for 1 hour.
この実施例による焼結体の物性値は以下のとおりであ
る。The physical properties of the sintered body according to this example are as follows.
密度 6.5g/cm3 硬度 Hv 700 抗折力 30kg/mm2 平均結晶粒径 6.8μｍ 熱膨張率 136×10-7/℃ なお、熱膨張係数は材料の組成によりその値が決定さ
れ、表１に示すように128〜150×10-7/℃の特性を示
す。Density 6.5g / cm 3 Hardness Hv 700 Flexural strength 30kg / mm 2 Average crystal grain size 6.8μm Thermal expansion coefficient 136 × 10 -7 / ℃ The coefficient of thermal expansion is determined according to the composition of the material, and Table 1 As shown in, the characteristics of 128 to 150 × 10 -7 / ℃ are exhibited.
表１には、比較例としてAl2O3−TiC系、チタン酸カル
シウムおよびセンダストの熱膨張係数を併記する。Table 1 also shows the thermal expansion coefficients of Al 2 O 3 —TiC, calcium titanate, and sendust as comparative examples.
この焼結体を研削及び切削により加工したところ、精
密加工性も良好で、磁気ヘッドスライダーとして充分機
能した。 When this sintered body was machined by grinding and cutting, it had good precision machinability and worked sufficiently as a magnetic head slider.
発明の効果 以上説明したように、（１）本組成の材料は、熱膨張
率、硬度とも磁性膜構造体とほぼ同等の特性を得ること
ができる。EFFECTS OF THE INVENTION As described above, (1) the material having the composition of the present invention can obtain substantially the same thermal expansion coefficient and hardness as those of the magnetic film structure.
このため、耐摩耗性、精密加工性、高強度、組織の緻
密性、さらには記録媒体とのなじみ、潤滑性等の諸特性
を満足できる。Therefore, it is possible to satisfy various characteristics such as wear resistance, precision workability, high strength, denseness of structure, compatibility with recording medium, and lubricity.
（２）特に金属性磁性薄膜との熱整合性や被着強度
に、従来材料にないすぐれた性能を有するため、薄膜磁
気ヘッド装着に最適である。(2) In particular, it has excellent performance that conventional materials do not have, in terms of thermal compatibility with metallic magnetic thin films and adhesion strength, and is therefore most suitable for mounting thin film magnetic heads.
図１は、磁気ヘッドスライダー概観図の一例である。 FIG. 1 is an example of a schematic view of a magnetic head slider.
Claims (4)
されることを特徴とする磁気ヘッドスライダー材料1. A magnetic head slider material characterized by being represented by CoxNi 2 _xO 2 (where 0.2 ≦ x ≦ 1.8).
l2O3、CaOの中から選ばれた少なくとも１種を0.1〜5wt
％添加したことを特徴とする特許請求の範囲第１項記載
の磁気ヘッドスライダー材料 2. A basic composition of CoO and NiO, MnO, TiO 2 and A
At least one selected from l 2 O 3 and CaO is 0.1 to 5 wt.
% Addition of the magnetic head slider material according to claim 1.
2O3、あるいは0.1〜1wt％のTiN、または0.3〜2wt％のB2
O3のうち、少なくとも１種を添加したことを特徴とする
特許請求の範囲第１項記載の磁気ヘッドスライダー材料3. The basic composition of CoO and NiO is 1 to 5 wt% of Y.
2 O 3 , or 0.1 to 1 wt% TiN, or 0.3 to 2 wt% B 2
The magnetic head slider material according to claim 1, wherein at least one of O 3 is added.
ラミックスにおいて、MgO、CaOそれぞれが30モル％以下
含有し、かつ残部がCoxNi2_xO2（ただし0.2≦ｘ≦1.8）
から成り、岩塩型構造を有することを特徴とする特許請
求の範囲第１項記載の磁気ヘッドスライダー材料4. A mixed ceramic having a composition of MgO, CaO, CoO, and NiO, each containing MgO and CaO in an amount of 30 mol% or less and the balance CoxNi 2 _xO 2 (however, 0.2 ≦ x ≦ 1.8)
The magnetic head slider material according to claim 1, wherein the magnetic head slider material has a rock salt structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1172981A JPH08703B2 (en) | 1989-07-06 | 1989-07-06 | Magnetic head slider material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1172981A JPH08703B2 (en) | 1989-07-06 | 1989-07-06 | Magnetic head slider material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0340925A JPH0340925A (en) | 1991-02-21 |
| JPH08703B2 true JPH08703B2 (en) | 1996-01-10 |
Family
ID=15951956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1172981A Expired - Lifetime JPH08703B2 (en) | 1989-07-06 | 1989-07-06 | Magnetic head slider material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08703B2 (en) |
-
1989
- 1989-07-06 JP JP1172981A patent/JPH08703B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0340925A (en) | 1991-02-21 |
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