JPH0874036A - Hard ceramic coated member excellent in wear resistance - Google Patents
Hard ceramic coated member excellent in wear resistanceInfo
- Publication number
- JPH0874036A JPH0874036A JP20743894A JP20743894A JPH0874036A JP H0874036 A JPH0874036 A JP H0874036A JP 20743894 A JP20743894 A JP 20743894A JP 20743894 A JP20743894 A JP 20743894A JP H0874036 A JPH0874036 A JP H0874036A
- Authority
- JP
- Japan
- Prior art keywords
- hard
- hard ceramic
- film
- ion
- wear resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 54
- 238000005524 ceramic coating Methods 0.000 claims abstract description 14
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000010410 layer Substances 0.000 claims abstract description 10
- 150000004767 nitrides Chemical class 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 229910052783 alkali metal Inorganic materials 0.000 claims abstract description 5
- 229910052747 lanthanoid Inorganic materials 0.000 claims abstract description 5
- 150000002602 lanthanoids Chemical class 0.000 claims abstract description 5
- 239000002344 surface layer Substances 0.000 claims abstract description 5
- 150000001340 alkali metals Chemical class 0.000 claims abstract description 4
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 4
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 3
- 230000003647 oxidation Effects 0.000 abstract description 24
- 238000007254 oxidation reaction Methods 0.000 abstract description 24
- 239000011248 coating agent Substances 0.000 abstract description 10
- 238000000576 coating method Methods 0.000 abstract description 10
- 150000002500 ions Chemical class 0.000 abstract description 8
- 229910004349 Ti-Al Inorganic materials 0.000 abstract 1
- 229910004692 Ti—Al Inorganic materials 0.000 abstract 1
- 239000000463 material Substances 0.000 description 13
- 238000005520 cutting process Methods 0.000 description 12
- 238000005468 ion implantation Methods 0.000 description 12
- 239000002585 base Substances 0.000 description 9
- 238000012360 testing method Methods 0.000 description 9
- 241000894007 species Species 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 206010040844 Skin exfoliation Diseases 0.000 description 2
- 229910001315 Tool steel Inorganic materials 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 241000283080 Proboscidea <mammal> Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- 239000010962 carbon steel Substances 0.000 description 1
- 239000002131 composite material Chemical class 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 102200082816 rs34868397 Human genes 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002335 surface treatment layer Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は耐摩耗性に優れた硬質セ
ラミックス被覆部材に関し、詳細にはフライス加工，切
削加工，穿孔加工等の加工に使用される切削工具や、金
型，軸受け，ダイスやローラなど高硬度が要求される部
材に適用できる硬質セラミックス被覆部材に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard ceramics coated member having excellent wear resistance, and more particularly to a cutting tool used for milling, cutting, punching, etc., a die, a bearing, a die. The present invention relates to a hard ceramics coated member that can be applied to a member requiring high hardness such as a roller and a roller.
【０００２】[0002]
【従来の技術】高速度工具鋼や超硬合金工具鋼などを用
いて耐摩耗性部材を作製する場合には、耐摩耗性の向上
を目的として、上記耐摩耗性部材の基材表面にＴｉ等の
ホウ化物、窒化物、炭化物などよりなる硬質セラミック
ス皮膜を形成することが行われている。2. Description of the Related Art When a wear-resistant member is made of high-speed tool steel, cemented carbide tool steel, or the like, Ti is applied to the surface of the base material of the wear-resistant member in order to improve wear resistance. A hard ceramic film made of a boride, a nitride, a carbide, or the like is formed.
【０００３】耐摩耗性部材の代表例である切削工具につ
いて述べると、切削工具の摩耗には、工具すくい面に発
生するクレータ摩耗と工具逃げ面に発生するフランク摩
耗がある。上記クレータ摩耗は切り屑生成時に工具すく
い面が昇温して酸化される熱的脆化に由来する摩耗であ
るから、クレータ摩耗を低減する上で必要な特性は耐熱
性（高温耐酸化性）である。一方フランク摩耗は被削材
との機械的な擦り摩擦によって生じる摩耗であるから、
フランク摩耗を低減する上で必要な特性は高硬度であ
る。従って、切削工具の耐摩耗性を向上するには、高温
耐酸化性に優れ且つ高硬度な硬質セラミックス皮膜を工
具基材表面に被覆することが極めて有効である。A cutting tool, which is a typical example of the wear-resistant member, will be described. The cutting tool wear includes crater wear on the tool rake face and flank wear on the tool flank face. The above crater wear is caused by thermal embrittlement that is caused by the temperature rise of the tool rake surface during chip formation and oxidation, so the characteristic required to reduce crater wear is heat resistance (high temperature oxidation resistance). Is. On the other hand, flank wear is wear caused by mechanical rubbing friction with the work material,
High hardness is a necessary property for reducing flank wear. Therefore, in order to improve the wear resistance of the cutting tool, it is extremely effective to coat the surface of the tool base material with a hard ceramic film having excellent high temperature oxidation resistance and high hardness.
【０００４】上記硬質セラミックス皮膜としては、Ｔｉ
Ｎ，ＴｉＣ，ＴｉＣＮ，（Ｔｉ，Ａｌ）Ｎ，（Ｔｉ，Ａ
ｌ）ＣＮ，（Ｔｉ，Ａｌ）ＢＮ等のＴｉ系硬質セラミッ
クス皮膜が汎用されており、化学的蒸着法（ＣＶＤ）や
物理的蒸着法（ＰＶＤ）によって、耐摩耗性が要求され
る部材の表面に被覆されている。As the hard ceramic film, Ti is used.
N, TiC, TiCN, (Ti, Al) N, (Ti, A
l) Ti-based hard ceramic coatings such as CN and (Ti, Al) BN are widely used, and the surface of a member that requires abrasion resistance by chemical vapor deposition (CVD) or physical vapor deposition (PVD). Is covered with.
【０００５】例えば、ＴｉＮはビッカース硬度（Ｈｖ）
が２０００程度であり、ＴｉＣやＴｉＣＮに比べると硬
度は低い。しかしながらＴｉＣやＴｉＣＮよりも高温耐
酸化性に優れているのでクレーター摩耗から基材を保護
する機能を発揮する。しかもＴｉＮからなる硬質セラミ
ックス皮膜（以下ＴｉＮ皮膜という）は基材に対する密
着性にも優れており、基材の種類にかかわらず被覆しや
すいという長所を有していることから、ＴｉＮ皮膜を基
材表面に被覆した切削工具が多用されている。また、金
型においても同様な理由からＴｉＮ皮膜を被覆した金型
が多く用いられている。但し、上記ＴｉＮ皮膜が優れた
高温耐酸化性を発揮するのは６００℃までの温度範囲に
限定されており、６００℃を超えると分解して保護性の
ないＴｉ酸化物となってしまう。For example, TiN has a Vickers hardness (Hv).
Is about 2000, which is lower in hardness than TiC and TiCN. However, since it has higher high-temperature oxidation resistance than TiC and TiCN, it exerts a function of protecting the base material from crater abrasion. In addition, the hard ceramic film made of TiN (hereinafter referred to as TiN film) has excellent adhesion to the base material and has the advantage that it can be easily coated regardless of the type of base material. Cutting tools coated on the surface are often used. Also, for the mold, a mold coated with a TiN film is often used for the same reason. However, the TiN film exhibits excellent high-temperature oxidation resistance only in the temperature range up to 600 ° C, and if it exceeds 600 ° C, it decomposes into a Ti oxide having no protective property.
【０００６】これに対して特公平４−５３６４２号公報
に開示されている（Ｔｉ，Ａｌ）Ｎ皮膜は、ＴｉＮの高
温耐酸化性や硬度を、Ａｌを含有させることによって向
上させたＴｉ系硬質セラミックス皮膜であり、大気中で
昇温すると８００℃程度までは表面に保護性を有するＡ
ｌ酸化物皮膜（Ａｌ2 Ｏ3 ）を形成して、この酸化物皮
膜が酸化抑制に作用する。しかもビッカース硬度（Ｈ
ｖ）は２５００程度までが可能である。On the other hand, the (Ti, Al) N coating disclosed in Japanese Examined Patent Publication No. 4-53642 is a Ti-based hard coating which improves the high temperature oxidation resistance and hardness of TiN by containing Al. A ceramic film that has surface protection up to about 800 ° C when heated in the atmosphere.
An oxide film (Al 2 O 3 ) is formed, and this oxide film acts to suppress oxidation. Moreover, Vickers hardness (H
v) can be up to about 2500.
【０００７】しかしながら、上記の様なＴｉ系硬質セラ
ミックス皮膜であっても、切削速度の高速度化や難切削
材への対応が要求される現状ではその耐摩耗性は十分で
はなく、より一層耐摩耗性を向上させた硬質セラミック
ス皮膜の開発が急務となっている。However, even with the Ti-based hard ceramics coating as described above, the wear resistance is not sufficient under the present circumstances where it is required to increase the cutting speed and to cope with difficult-to-cut materials. There is an urgent need to develop hard ceramic coatings with improved wear resistance.
【０００８】[0008]
【発明が解決しようとする課題】本発明はこうした事情
に着目してなされたものであって、その目的は上記の様
な従来汎用されてきた硬質セラミックス皮膜の特徴を活
かしつつ、その高温耐酸化性及び硬度を高めて耐摩耗性
をより一層向上させた硬質セラミックス被覆部材を提供
することにある。SUMMARY OF THE INVENTION The present invention has been made in view of these circumstances, and its purpose is to make use of the characteristics of the hard ceramic coatings that have been widely used in the past as described above, while at the same time, to improve the high temperature oxidation resistance thereof. The object is to provide a hard ceramics coated member having improved wear resistance and further improved hardness and hardness.
【０００９】[0009]
【課題を解決するための手段】上記目的を達成した本発
明に係る硬質セラミックス被覆部材とは、基材上に硬質
セラミックス皮膜を被覆した硬質セラミックス被覆部材
であって、上記硬質セラミックス皮膜の表面に、アルカ
リ金属，アルカリ土類金属，ランタノイドよりなる群か
ら選ばれる１種以上の元素をイオン注入し、前記硬質セ
ラミックス皮膜の表層部に濃度富化層を形成したもので
あることを要旨とするものである。Means for Solving the Problems A hard ceramics coated member according to the present invention which achieves the above object is a hard ceramics coated member obtained by coating a hard ceramics film on a substrate, One or more elements selected from the group consisting of alkali metal, alkaline earth metal, and lanthanoid are ion-implanted to form a concentration-enriched layer on the surface of the hard ceramic film. Is.
【００１０】尚本発明において上記硬質セラミックス皮
膜としては、ＴｉまたはＴｉ及びＡｌの窒化物，炭化
物，ホウ化物，炭窒化物などのＴｉ系硬質セラミックス
が望ましく、中でもＴｉＮ，ＴｉＣＮ，（Ｔｉ，Ａｌ）
Ｎのいずれかであれば基材との密着性に優れていて好ま
しい。In the present invention, Ti-based hard ceramics such as Ti, Ti and Al nitrides, carbides, borides and carbonitrides are desirable as the hard ceramics film, and among them TiN, TiCN, (Ti, Al).
Any of N is preferable because it has excellent adhesion to the substrate.
【００１１】[0011]
【作用】本発明者らは、硬質セラミックス皮膜の耐摩耗
性を改善すべく鋭意研究を重ねた結果、Ｔｉ系硬質セラ
ミックス皮膜に特定の金属元素をイオン注入した場合、
上記Ｔｉ系硬質セラミックス皮膜の高温耐酸化性および
硬度を高めて耐摩耗性を向上できることを見出した。The present inventors have conducted extensive studies to improve the wear resistance of the hard ceramic film, and as a result, when a specific metal element is ion-implanted into the Ti-based hard ceramic film,
It was found that the high temperature oxidation resistance and hardness of the Ti-based hard ceramic coating can be increased to improve wear resistance.
【００１２】尚イオン注入法は、加速されて高エネルギ
ーを有するイオンを、目的とする部材の表面に打ち込ん
で部材表面の改質を行うものであるが、本発明に係る硬
質セラミックス皮膜にどのようなイオン種を注入しても
耐摩耗性が改善できるというものではなく、イオン種に
よっては却って耐摩耗性を損なう場合がある。そこで、
本発明者らが、種々の元素のイオン種を用いてイオン注
入実験を重ねた結果、硬質セラミックス皮膜の耐摩耗性
を著しく改善するためには、Ｒｂ，Ｃｓに代表されるア
ルカリ金属元素、Ｃａ，Ｓｒ，Ｂａ等のアルカリ土類金
属元素及びＬａ，Ｃｅ，Ｐｒ等のランタノイドよりなる
群から選ばれる１種または２種以上の金属元素をイオン
種としてイオン注入処理することが必要であるとの知見
を得た。尚、金属やセラミックスの耐酸化性を改善する
元素として従来から知られているＡｌやＹ等を硬質セラ
ミックス皮膜にイオン注入した場合、ある程度は耐摩耗
性改善効果が見られる。しかしながら該耐摩耗性改善効
果は十分ではなく、本発明で特定する上記金属元素を用
いてイオン注入し、硬質セラミックス皮膜の表層部に上
記金属元素を含有する濃度富化層を形成することによっ
て、硬質セラミックス皮膜の耐摩耗性は著しく改善でき
る。The ion implantation method is a method of implanting accelerated ions having a high energy to the surface of a target member to modify the surface of the member. How is the hard ceramic film according to the present invention applied? It is not possible to improve the wear resistance by injecting such a ionic species, and depending on the ionic species, the wear resistance may be impaired. Therefore,
As a result of repeated ion implantation experiments using the ion species of various elements, the present inventors have found that in order to significantly improve the wear resistance of the hard ceramic coating, alkali metal elements represented by Rb and Cs, Ca , Sr, Ba and other alkaline earth metal elements and La, Ce, Pr and other lanthanoids, it is necessary to perform ion implantation treatment with one or more metal elements selected from the group consisting of lanthanoids. I got the knowledge. Incidentally, when Al or Y, which has been conventionally known as an element for improving the oxidation resistance of metals or ceramics, is ion-implanted into the hard ceramics film, the effect of improving the wear resistance is observed to some extent. However, the wear resistance improving effect is not sufficient, by ion implantation using the metal element specified in the present invention, by forming a concentration-enriched layer containing the metal element in the surface layer portion of the hard ceramic film, The wear resistance of the hard ceramic coating can be significantly improved.
【００１３】本発明に係る耐摩耗部材が、優れた耐摩耗
性を発揮する理由は十分解明された訳ではないが、以下
の様に考えられる。即ち、従来行なわれてきた熱処理プ
ロセスを伴う合金化法や表面処理で形成される表面層
は、熱的平衡状態にある合金層または表面皮膜からなる
熱平衡物質層であるが故にその物性改善にも自ずから限
度があった。これに対して本発明ではイオン注入によっ
て皮膜表層部に非熱平衡物質層を形成することにより、
非熱平衡状態に基づいて従来方法からでは予測されない
特性を得ることができたものと考えられる。換言すれ
ば、前記アルカリ金属等を例えばＴｉやＮと共に、例え
ばイオンプレーティング法によって基材表面に被覆して
も、本発明に係る硬質セラミックス被覆部材ほどの優れ
た耐摩耗性を得ることはできないのである。The reason why the wear resistant member according to the present invention exhibits excellent wear resistance has not been fully clarified, but it is considered as follows. That is, since the surface layer formed by the alloying method or the surface treatment which has been conventionally performed with the heat treatment process is the alloy layer in the thermal equilibrium state or the thermal equilibrium substance layer composed of the surface coating, the physical properties can be improved. There was a limit naturally. On the other hand, in the present invention, by forming a non-thermal equilibrium material layer on the surface layer of the film by ion implantation,
Based on the non-thermal equilibrium state, it is considered possible to obtain properties that were not predicted by conventional methods. In other words, even if the surface of the base material is coated with the alkali metal or the like together with, for example, Ti or N by, for example, the ion plating method, it is not possible to obtain the excellent wear resistance as that of the hard ceramics coated member according to the present invention. Of.
【００１４】また、めっきやコーティング等の表面処理
方法では、硬質セラミックス皮膜と表面処理層の密着性
が十分ではなく剥離する恐れがあるが、本発明の耐摩耗
性部材では硬質セラミックス皮膜のマトリックス中にイ
オン注入層が形成される為、イオン注入層と硬質セラミ
ックス皮膜母材との一体性は極めて良好である。従っ
て、本発明に係る硬質セラミックス被覆部材において
は、上記表面処理方法とは異なり、イオン注入層と硬質
セラミックス皮膜母材との界面における剥離の問題は発
生しない。Further, in a surface treatment method such as plating or coating, the adhesion between the hard ceramic film and the surface treatment layer is not sufficient, and there is a risk of peeling. However, in the wear resistant member of the present invention, the hard ceramic film is contained in the matrix of the hard ceramic film. Since the ion-implanted layer is formed on the substrate, the integrity of the ion-implanted layer and the hard ceramics film base material is very good. Therefore, in the hard ceramics coated member according to the present invention, unlike the above-mentioned surface treatment method, the problem of peeling at the interface between the ion-implanted layer and the hard ceramics film base material does not occur.
【００１５】本発明に係る硬質セラミックス被覆部材は
イオン注入量を限定するものではないが、十分な耐摩耗
性を発揮する上で、イオン注入量は５×１０15イオン／
ｃｍ 2 以上であることが望ましく、１×１０16イオン／
ｃｍ2 以上がより望ましい。尚、イオン注入量が多過ぎ
ると、耐摩耗性向上効果が飽和すると共に、スパッタ現
象が顕著になって表面が粗くなる。上記スパッタ現象
は、注入エネルギーにも左右されるが、通常イオン注入
に用いるエネルギー範囲では、１×１０18イオン／ｃｍ
2 以下が望ましく、１×１０15イオン／ｃｍ2 以下であ
ればより望ましい。The hard ceramics coated member according to the present invention is
Sufficient wear resistance, but not limited to the amount of ion implantation
Ion implantation amount is 5 × 1015ion/
cm 2 It is desirable that it is not less than 1 × 1016ion/
cm2 The above is more desirable. The amount of ion implantation is too large
Then, the effect of improving wear resistance is saturated and the spatter
Elephants become noticeable and the surface becomes rough. The spatter phenomenon
Depends on implantation energy, but usually ion implantation
1 × 10 in the energy range used for18Ion / cm
2 The following is desirable, 1 × 1015Ion / cm2 Below
More desirable.
【００１６】また、本発明において複数のイオン種を注
入する場合、本発明はその注入するイオン種の順序を限
定するものではないが、注入エネルギーが同じ場合では
注入する元素の質量に応じてスパッタ効果が異なること
から、質量の大きい元素を先にイオン注入することが望
ましい。In the case of implanting a plurality of ion species in the present invention, the present invention does not limit the order of the ion species to be implanted, but if the implantation energy is the same, sputtering is performed according to the mass of the implanted element. Since the effect is different, it is desirable to ion-implant the element having a large mass first.
【００１７】また、本発明は硬質セラミックス皮膜の種
類を限定するものでもなく、各種Ｔｉ系窒化物、炭化物
及びこれらの複合化合物が好ましい例として挙げられる
が、他の硬質セラミックス（例えば、Ａｌ，Ｓｉ，Ｂ等
を成分元素とする窒化物、炭化物、ホウ化物、ケイ化物
等）であってもよい。Further, the present invention does not limit the kind of the hard ceramics film, and various Ti-based nitrides, carbides and composite compounds thereof can be mentioned as preferable examples, but other hard ceramics (for example, Al, Si , B and the like as component elements, nitrides, carbides, borides, silicides, etc.).
【００１８】更に、上記硬質セラミックス皮膜を形成す
る手段としては、アーク放電型イオンプレーティングを
代表例として、ＰＶＤ，ＣＶＤ，ゾルーゲル法等の公知
の方法を採用すれば良い。Further, as a means for forming the above-mentioned hard ceramics film, a well-known method such as PVD, CVD, sol-gel method, etc. may be adopted as a representative example of arc discharge type ion plating.
【００１９】[0019]
【実施例】実施例１ 超硬チップをイオンプレーティング装置に装入して、４
００℃に予備加熱した後、蒸発源よりＴｉを蒸発させる
と共に、Ｎ2 ガスを導入して５×１０-5〜４×１０-6Ｔ
ｏｒｒの雰囲気とし、且つ基材に−７０Ｖの電圧を印加
し、膜厚 μｍのＴｉＮ皮膜を形成して、従来の硬質セ
ラミックス被覆部材（Ｎｏ．１）とした。EXAMPLES Example 1 A cemented carbide chip was loaded into an ion plating device, and 4
After preheating to 00 ° C., Ti is evaporated from the evaporation source, and N 2 gas is introduced to 5 × 10 −5 to 4 × 10 −6 T
An atmosphere of orr was applied, and a voltage of -70 V was applied to the base material to form a TiN film having a film thickness of μm to obtain a conventional hard ceramics coating member (No. 1).
【００２０】上記硬質セラミックス被覆部材（Ｎｏ．
１）に、表１に示すイオン種を、表１に併記するイオン
注入条件によりイオン注入して、Ｎｏ．２〜４３の試験
片を作製した。上記試験片を用いて、下記の酸化条件で
酸化試験を行い酸化開始温度を測定すると共に、下記の
切削試験条件で切削を行った後に、逃げ面の摩耗量（フ
ランク摩耗）とすくい面の摩耗深さ（クレータ摩耗）を
測定した。結果は表１に示す。 （酸化条件） 温度範囲：室温〜１４００℃ 昇温速度：５℃／分 雰囲気：大気 ガス流量：１５０ｍｌ／分 （切削試験条件） 被削材：Ｓ４５Ｃ（炭素鋼） 切削速度：２００ｍ／分 送り速度：０．３ｍｍ／ｒｅｖ 切り込み：２ｍｍ 切削時間：５０分The hard ceramics coated member (No.
No. 1) was ion-implanted with the ion species shown in Table 1 under the ion-implantation conditions shown in Table 1. 2-43 test pieces were produced. Using the above test piece, an oxidation test is performed under the following oxidation conditions to measure the oxidation start temperature, and after performing cutting under the following cutting test conditions, the wear amount of the flank (flank wear) and the wear of the rake face The depth (crater wear) was measured. The results are shown in Table 1. (Oxidation conditions) Temperature range: room temperature to 1400 ° C Temperature rising rate: 5 ° C / min Atmosphere: Air Gas flow rate: 150 ml / min (Cutting test conditions) Work material: S45C (carbon steel) Cutting speed: 200 m / min Feed rate : 0.3mm / rev Depth of cut: 2mm Cutting time: 50 minutes
【００２１】[0021]
【表１】 [Table 1]
【００２２】Ｎｏ．８〜４３は本発明に係る硬質セラミ
ックス被覆部材であって、いずれの本発明例も従来の硬
質セラミックス被覆部材（Ｎｏ．１）より、酸化開始温
度が高く、摩耗量も少ない。尚、Ｎｏ．２〜７は、本発
明に係るイオン注入元素以外の元素を注入した比較例で
あって、酸化開始温度または摩耗量のいずれかが従来例
（Ｎｏ．１）よりも劣る。No. Nos. 8 to 43 are hard ceramics coated members according to the present invention, and all of the present invention examples have a higher oxidation start temperature and less wear amount than the conventional hard ceramics coated member (No. 1). Incidentally, No. 2 to 7 are comparative examples in which an element other than the ion-implanted element according to the present invention is implanted, and either the oxidation start temperature or the wear amount is inferior to the conventional example (No. 1).
【００２３】実施例２ 蒸発源に、Ｔｉ及びＡｌを用いた以外は実施例１と同様
にして（Ｔｉ，Ａｌ）Ｎ皮膜を形成し、従来の硬質セラ
ミックス被覆部材（Ｎｏ．１）とした。上記硬質セラミ
ックス被覆部材（Ｎｏ．１）に、表２に示すイオン種
を、表２に併記するイオン注入条件によりイオン注入し
て、Ｎｏ．２〜４３の試験片を作製した。上記試験片を
用い、実施例１と同様にして酸化開始温度を測定すると
共に、摩耗量を測定した。結果は表２に示す。 Example 2 A (Ti, Al) N film was formed in the same manner as in Example 1 except that Ti and Al were used as the evaporation source, to obtain a conventional hard ceramics coated member (No. 1). The hard ceramic coating member (No. 1) was ion-implanted with the ion species shown in Table 2 under the ion-implantation conditions also shown in Table 2, and No. 2-43 test pieces were produced. Using the above test piece, the oxidation start temperature and the amount of wear were measured in the same manner as in Example 1. The results are shown in Table 2.
【００２４】[0024]
【表２】 [Table 2]
【００２５】Ｎｏ．８〜４３は本発明に係る硬質セラミ
ックス被覆部材であって、いずれの本発明例も従来の硬
質セラミックス被覆部材（Ｎｏ．１）より、酸化開始温
度が高く、摩耗量も少ない。尚、Ｎｏ．２〜７は、本発
明に係るイオン注入元素以外の元素を注入した比較例で
あって、酸化開始温度または摩耗量のいずれかが従来例
（Ｎｏ．１）よりも劣る。No. Nos. 8 to 43 are hard ceramics coated members according to the present invention, and all of the present invention examples have a higher oxidation start temperature and less wear amount than the conventional hard ceramics coated member (No. 1). Incidentally, No. 2 to 7 are comparative examples in which an element other than the ion-implanted element according to the present invention is implanted, and either the oxidation start temperature or the wear amount is inferior to the conventional example (No. 1).
【００２６】実施例３ イオンプレーティング装置に導入するガスとして、Ｎ2
ガスとＣＨ4 ガスを用いた以外は実施例１と同様にして
ＴｉＣＮ皮膜を形成し、従来の硬質セラミックス被覆部
材（Ｎｏ．１）とした。 Example 3 N 2 was used as a gas to be introduced into the ion plating apparatus.
A TiCN film was formed in the same manner as in Example 1 except that gas and CH 4 gas were used to obtain a conventional hard ceramics coated member (No. 1).
【００２７】上記硬質セラミックス被覆部材（Ｎｏ．
１）に、表３に示すイオン種を、表３に併記するイオン
注入条件によりイオン注入して、Ｎｏ．２〜４３の試験
片を作製した。上記試験片を用い、実施例１と同様にし
て酸化開始温度を測定すると共に、摩耗量を測定した。
結果は表３に示す。The hard ceramic coating member (No.
No. 1) was ion-implanted with the ion species shown in Table 3 under the ion-implantation conditions also shown in Table 3. 2-43 test pieces were produced. Using the above test piece, the oxidation start temperature and the amount of wear were measured in the same manner as in Example 1.
The results are shown in Table 3.
【００２８】[0028]
【表３】 [Table 3]
【００２９】Ｎｏ．８〜４３は本発明に係る硬質セラミ
ックス被覆部材であって、いずれの本発明例も従来の硬
質セラミックス被覆部材（Ｎｏ．１）より、酸化開始温
度が高く、摩耗量も少ない。尚、Ｎｏ．２〜７は、本発
明に係るイオン注入元素以外の元素を注入した比較例で
あって、酸化開始温度または摩耗量のいずれかが従来例
（Ｎｏ．１）よりも劣る。No. Nos. 8 to 43 are hard ceramics coated members according to the present invention, and all of the present invention examples have a higher oxidation start temperature and less wear amount than the conventional hard ceramics coated member (No. 1). Incidentally, No. 2 to 7 are comparative examples in which an element other than the ion-implanted element according to the present invention is implanted, and either the oxidation start temperature or the wear amount is inferior to the conventional example (No. 1).
【００３０】[0030]
【発明の効果】本発明は以上の様に構成されているの
で、従来汎用されてきた硬質セラミックス皮膜の特徴を
活かしつつ、その高温耐酸化性及び硬度を高めて耐摩耗
性をより一層向上させた硬質セラミックス被覆部材を提
供することができることとなった。EFFECTS OF THE INVENTION Since the present invention is constituted as described above, the high temperature oxidation resistance and the hardness thereof can be enhanced to further improve the wear resistance while taking advantage of the characteristics of the hard ceramic coating which has been widely used in the past. It has become possible to provide a hard ceramics coated member.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 蔡 政憲 兵庫県神戸市西区高塚台１丁目５番５号 株式会社神戸製鋼所神戸総合技術研究所内 (72)発明者 河田 和久 兵庫県神戸市西区高塚台１丁目５番５号 株式会社神戸製鋼所神戸総合技術研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masanori Cai 1-5-5 Takatsukadai, Nishi-ku, Kobe-shi, Hyogo Prefecture Kobe Steel Co., Ltd. Kobe Research Institute (72) Inventor Kazuhisa Kawada Takatsuka, Nishi-ku, Kobe-shi, Hyogo Prefecture 1-5-5 stand Kobe Steel Co., Ltd. Kobe Research Institute
Claims (3)
た硬質セラミックス被覆部材であって、上記硬質セラミ
ックス皮膜の表面に、アルカリ金属，アルカリ土類金
属，ランタノイドよりなる群から選ばれる１種以上の元
素をイオン注入し、前記硬質セラミックス皮膜の表層部
に濃度富化層を形成したものであることを特徴とする耐
摩耗性に優れた硬質セラミックス被覆部材。1. A hard ceramics coated member comprising a substrate and a hard ceramics film coated on the surface thereof, the hard ceramics film having at least one member selected from the group consisting of alkali metals, alkaline earth metals and lanthanoids. A hard ceramics coated member having excellent wear resistance, characterized in that a concentration-enriched layer is formed on a surface layer portion of the hard ceramics film by ion-implanting an element.
Ｔｉ及びＡｌの窒化物，炭化物，ホウ化物または炭窒化
物である請求項１に記載の硬質セラミックス被覆部材。2. The hard ceramic coating member according to claim 1, wherein the hard ceramic coating is a nitride, a carbide, a boride or a carbonitride of Ti or Ti and Al.
ｉＣＮ，（Ｔｉ，Ａｌ）Ｎのいずれかである請求項１ま
たは２に記載の硬質セラミックス被覆部材。3. The hard ceramic film is made of TiN, T
The hard ceramics coated member according to claim 1 or 2, which is either iCN or (Ti, Al) N.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20743894A JPH0874036A (en) | 1994-08-31 | 1994-08-31 | Hard ceramic coated member excellent in wear resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20743894A JPH0874036A (en) | 1994-08-31 | 1994-08-31 | Hard ceramic coated member excellent in wear resistance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0874036A true JPH0874036A (en) | 1996-03-19 |
Family
ID=16539775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20743894A Withdrawn JPH0874036A (en) | 1994-08-31 | 1994-08-31 | Hard ceramic coated member excellent in wear resistance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0874036A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001068935A1 (en) * | 2000-03-10 | 2001-09-20 | Hauzer Techno Coating Europe B.V. | Method for producing hard material layers |
| US6432256B1 (en) * | 1999-02-25 | 2002-08-13 | Applied Materials, Inc. | Implanatation process for improving ceramic resistance to corrosion |
| KR100541322B1 (en) * | 2002-12-10 | 2006-01-11 | 공주대학교 산학협력단 | Hard thin film having high temperature oxidation resistance and manufacturing method thereof |
| US20120171514A1 (en) * | 2011-01-05 | 2012-07-05 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
| US20120183803A1 (en) * | 2011-01-19 | 2012-07-19 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
| US20120196145A1 (en) * | 2011-01-28 | 2012-08-02 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
| US20120219820A1 (en) * | 2011-02-28 | 2012-08-30 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
-
1994
- 1994-08-31 JP JP20743894A patent/JPH0874036A/en not_active Withdrawn
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6432256B1 (en) * | 1999-02-25 | 2002-08-13 | Applied Materials, Inc. | Implanatation process for improving ceramic resistance to corrosion |
| WO2001068935A1 (en) * | 2000-03-10 | 2001-09-20 | Hauzer Techno Coating Europe B.V. | Method for producing hard material layers |
| KR100541322B1 (en) * | 2002-12-10 | 2006-01-11 | 공주대학교 산학협력단 | Hard thin film having high temperature oxidation resistance and manufacturing method thereof |
| US20120171514A1 (en) * | 2011-01-05 | 2012-07-05 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
| US8568906B2 (en) * | 2011-01-05 | 2013-10-29 | Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. | Housing and method for making the same |
| US20120183803A1 (en) * | 2011-01-19 | 2012-07-19 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
| US8568905B2 (en) * | 2011-01-19 | 2013-10-29 | Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. | Housing and method for making the same |
| US20120196145A1 (en) * | 2011-01-28 | 2012-08-02 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
| US8597804B2 (en) * | 2011-01-28 | 2013-12-03 | Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. | Housing and method for making the same |
| US20120219820A1 (en) * | 2011-02-28 | 2012-08-30 | Hon Hai Precision Industry Co., Ltd. | Housing and method for making the same |
| US8568907B2 (en) * | 2011-02-28 | 2013-10-29 | Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. | Housing and method for making the same |
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