JPH0886759A - How to identify surface defects - Google Patents

How to identify surface defects

Info

Publication number
JPH0886759A
JPH0886759A JP6223644A JP22364494A JPH0886759A JP H0886759 A JPH0886759 A JP H0886759A JP 6223644 A JP6223644 A JP 6223644A JP 22364494 A JP22364494 A JP 22364494A JP H0886759 A JPH0886759 A JP H0886759A
Authority
JP
Japan
Prior art keywords
defect
inspected
determining
feature
feature amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6223644A
Other languages
Japanese (ja)
Inventor
Osamu Sonobe
治 園部
Makoto Okuno
眞 奥野
Susumu Moriya
進 守屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP6223644A priority Critical patent/JPH0886759A/en
Publication of JPH0886759A publication Critical patent/JPH0886759A/en
Withdrawn legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE: To attain the discrimination of the kind of an irregularity defect with high accuracy by calculating a feature amount showing the feature of the defect, and discriminating the defect according to the feature amount. CONSTITUTION: An image signal is obtained by photographing the illuminated surface of a subject to be inspected. In accordance with the image signal, a defective region corresponding to a defect in the surface of the subject to be inspected is extracted from within an image showing the surface of the subject to be inspected, and average values of image signals corresponding to the overlapping portions of the defective region with a plurality of partial regions obtained by the dividing of the inside of the rectangular region into plural (three) parts by one side of the contour of the rectangular region, e.g. a line parallel to the Y axis, are calculated. The plurality of average values are digitized by comparison of the plurality of average values with one or plural thresholds. A feature amount showing the feature of the defect is calculated on the basis of a pattern of arrangement of the plurality of these numerical values, and the defect is identified according to the feature amount.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、例えば鋼板などの高速
移動する帯状の被検査材の表面をCCDカメラなどの撮
像装置によって撮像して撮像信号を得、この撮像信号に
基づいて被検査材の表面欠陥を判別する表面欠陥の判別
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention provides an image pickup signal by picking up an image of the surface of a strip-shaped member to be inspected, which moves at high speed, such as a steel plate, by an image pickup device such as a CCD camera. The present invention relates to a surface defect discriminating method for discriminating the surface defect.

【0002】[0002]

【従来の技術】従来、上記のような表面欠陥判別方法を
採用した疵種判定用の画像処理装置の1つとして、例え
ば米国ISYS社製表面欠陥判別用画像処理装置が知ら
れている。この画像処理装置は、欠陥抽出回路によって
抽出された欠陥部分に対して数十種類の特徴量演算が行
なわれて特徴量が求められ、予め登録しておいた欠陥判
別用テーブルの特徴量の値の範囲と、抽出された欠陥に
ついての演算によって求められた特徴量とが比較され、
欠陥判別用テーブルに登録しておいた特徴量の値の範囲
の条件に、抽出された欠陥部分の特徴量が適合した場合
に、その欠陥をテーブル中に登録しておいた疵種である
と判断するものである。
2. Description of the Related Art Conventionally, as one of image processing apparatuses for defect type determination which employs the above-described surface defect determination method, for example, an image processing apparatus for surface defect determination manufactured by ISYS, Inc. in the United States is known. In this image processing device, dozens of types of feature amount calculations are performed on the defect portion extracted by the defect extraction circuit to obtain the feature amount, and the value of the feature amount of the defect discrimination table registered in advance is calculated. And the feature amount obtained by the calculation of the extracted defects are compared,
When the feature amount of the extracted defect portion matches the condition of the value range of the feature amount registered in the defect determination table, the defect is the defect type registered in the table. It is a judgment.

【0003】このときに参照される特徴量を例示する
と、例えば、抽出された欠陥の形状が円形に近いか、縦
(y方向)に細長いか、横(x方向)に細長いか、とい
った形状を表す特徴量、抽出された欠陥の長さ、幅、周
長、面積といった欠陥の寸法を表す特徴量、抽出された
欠陥部分のグレースケール画像の最大値、最小値、平均
値といった明るさを表す特徴量などがある。
To exemplify the feature amount referred to at this time, for example, the shape of the extracted defect is close to a circle, elongated in the vertical direction (y direction), or elongated in the horizontal direction (x direction). Represents the feature amount, which represents the defect size such as the length, width, perimeter, and area of the extracted defect, and the brightness such as the maximum value, the minimum value, and the average value of the grayscale image of the extracted defect portion. There are characteristic quantities.

【0004】また東芝(株)の鉄鋼ラインの表面欠種類
判別に用いられている画像処理装置であるCAT−BO
Xは、検出した欠陥の特徴量を、予め構築しておいた木
構造の判定ロジックにかけ、そのロジックに従って欠陥
種類の判別を行うものである。この東芝のCAT−BO
Xにおいて参照される特徴量も、上述したISYSと同
様の種類のものである。
Further, CAT-BO, which is an image processing apparatus used for determining the type of surface defect of a steel line of Toshiba Corporation.
X applies the detected defect feature amount to a tree-structure determination logic that is built in advance, and determines the defect type according to the logic. This Toshiba CAT-BO
The feature amount referred to by X is also of the same type as ISYS described above.

【0005】[0005]

【発明が解決しようとする課題】上記のように、従来種
々の特徴量が求められそれらの特徴量に基づいて欠陥の
判別が行われているが、例えば鋼板の表面の凹凸性の欠
陥は、その発生原因の相違によらず極めて近似した特徴
量が求められることが多く、凹凸性の欠陥の種類の判別
を誤ることが多いという問題がある。
As described above, various characteristic amounts have been conventionally obtained and defects are discriminated based on these characteristic amounts. For example, a defect of unevenness on the surface of a steel sheet is There is a problem that extremely close feature amounts are often required regardless of the difference in the cause of the occurrence, and the type of the uneven defect is often erroneously determined.

【0006】本発明は、上記事情に鑑み、従来と比べ、
凹凸性の欠陥の種類を高精度に判別することのできる表
面欠陥の判別方法を提供することを目的とする。
In view of the above circumstances, the present invention is
It is an object of the present invention to provide a surface defect discriminating method capable of discriminating types of irregularities with high accuracy.

【0007】[0007]

【課題を解決するための手段】上記目的を達成する本発
明の第1の判別方法は、照明された被検査体表面を撮像
して撮像信号を得、撮像信号に基づいて被検査体表面の
欠陥を判別する表面欠陥の判別方法において、上記撮像
信号に基づいて、被検査体表面を表わす画像中の、被検
査体表面の欠陥に対応する欠陥領域を抽出し、欠陥領域
内部が複数に分割されてなる複数の部分領域それぞれに
対応する撮像信号の各平均的な値を求め、これら複数の
平均的な値に基づいて欠陥の特徴を表わす特徴量を求
め、この特徴量に基づいて欠陥を判別することを特徴と
するものである。
According to a first discrimination method of the present invention for achieving the above object, an image of an illuminated surface of an object to be inspected is obtained to obtain an image pickup signal, and the surface of the object to be inspected is imaged based on the image pickup signal. In the surface defect determining method for determining a defect, a defect area corresponding to a defect on the surface of the object to be inspected is extracted from an image representing the surface of the object to be inspected based on the image pickup signal, and the inside of the defect area is divided into a plurality of areas. The average value of the image pickup signal corresponding to each of the plurality of partial areas is obtained, the feature amount representing the feature of the defect is obtained based on these average values, and the defect is identified based on the feature amount. It is characterized by making a distinction.

【0008】上記本発明の第1の判別方法は、上記要件
を満足する限り具体的にどのように構成されてもよい
が、例えば1つの実施態様として、以下のように構成し
てもよい。即ち、本発明の第1の判別方法の一態様とし
ての表面欠陥の判別方法は、照明された被検査体表面を
撮像して撮像信号を得、撮像信号に基づいて被検査体表
面の欠陥を判別する表面欠陥の判別方法において、上記
撮像信号に基づいて、被検査体表面を表わす画像中の、
被検査体表面の欠陥に対応する欠陥領域を抽出し、この
欠陥領域に外接する長方形領域を求め、この長方形領域
の輪郭の一辺に平行な線分によりこの長方形領域内部が
複数に分割されてなる複数の部分領域それぞれと、上記
欠陥領域との各重畳部分それぞれに対応する撮像信号の
各平均的な値を求め、これら複数の平均的な値それぞれ
と1つもしくは複数のしきい値とを比較することによ
り、これら複数の平均的な値それぞれを数値化し、これ
ら複数の数値の配列パターンに基づいて欠陥の特徴を表
わす特徴量を求め、この特徴量に基づいて欠陥を判別す
ることを特徴とするものである。
The first discriminating method of the present invention may be configured concretely as long as the above requirements are satisfied. For example, as one embodiment, it may be constructed as follows. That is, a surface defect discriminating method as one aspect of the first discriminating method of the present invention captures an image of an illuminated surface of an inspected object to obtain an imaging signal, and detects a defect on the surface of the inspected object based on the imaging signal. In the method of determining the surface defect to be determined, based on the image pickup signal, in the image representing the surface of the inspection object,
A defect area corresponding to a defect on the surface of the object to be inspected is extracted, a rectangular area circumscribing the defect area is obtained, and the inside of the rectangular area is divided into a plurality of lines by a line segment parallel to one side of the outline of the rectangular area. Obtaining each average value of the image pickup signal corresponding to each overlapping portion of each of the plurality of partial areas and the defect area, and comparing each of these plurality of average values with one or more threshold values In this way, each of the plurality of average values is digitized, the feature amount representing the feature of the defect is obtained based on the array pattern of the plurality of numbers, and the defect is discriminated based on the feature amount. To do.

【0009】また、上記目的を達成する本発明の第2の
判別方法は、照明された被検査体表面を撮像して撮像信
号を得、撮像信号に基づいて被検査体表面の欠陥を判別
する表面欠陥の判別方法において、上記撮像信号に基づ
いて、被検査体表面を表わす画像中の、被検査体表面の
欠陥に対応する欠陥領域を抽出し、その欠陥領域を通過
する所定の直線上の撮像信号のプロファイルを求め、こ
のプロファイルに基づいて欠陥の特徴を表わす特徴量を
求め、この特徴量に基づいて欠陥を判別することを特徴
とするものである。
Further, the second judging method of the present invention for achieving the above object obtains an image pickup signal by picking up an image of the illuminated surface of the object to be inspected, and judges a defect on the surface of the object to be inspected based on the image pickup signal. In the method of discriminating a surface defect, a defect area corresponding to a defect on the surface of the object to be inspected in an image representing the surface of the object to be inspected is extracted based on the image pickup signal, and on a predetermined straight line passing through the defect area. The feature is that a profile of an image pickup signal is obtained, a feature amount representing a feature of a defect is obtained based on this profile, and a defect is discriminated based on this feature amount.

【0010】上記本発明の第2の判別方法についても、
上記第1の判別方法と同様、上記要件を満足する限り具
体的にどのように構成されてもよいが、例えば1つの実
施態様として、以下のように構成してもよい。即ち、本
発明の第2の欠陥判別方法の一実施態様としての表面欠
陥の判別方法は、照明された被検査体表面を撮像して撮
像信号を得、撮像信号に基づいて被検査体表面の表面欠
陥の判別する表面欠陥の判別方法において、上記撮像信
号に基づいて、被検査体表面を表わす画像中の、被検査
体表面の欠陥に対応する欠陥領域を抽出し、その欠陥領
域内部の代表点を求め、その代表点を通過する直線上の
撮像信号のプロファイルを求め、そのプロファイルが所
定のしきい値レベルと交差する回数、および、そのプロ
ファイルとそのしきい値レベルとの差分を上記直線に沿
って順次求めたときの初期の差分の符号に基づいて欠陥
の特徴を表わす特徴量を求め、この特徴量に基づいて欠
陥を判別することを特徴とするものである。
Regarding the above-mentioned second discrimination method of the present invention,
Similar to the first determination method, any specific configuration may be used as long as the above requirements are satisfied. For example, the configuration may be as follows in one embodiment. That is, a surface defect discriminating method as one embodiment of the second defect discriminating method of the present invention is to capture an imaged signal of an illuminated surface of an inspected object and obtain an image pickup signal based on the imaged signal. In the method of determining a surface defect, a defect area corresponding to a defect on the surface of the object to be inspected in an image representing the surface of the object to be inspected is extracted based on the image pickup signal, and a representative inside the defect area is extracted. The point is obtained, the profile of the image pickup signal on a straight line passing through the representative point is obtained, the number of times the profile intersects a predetermined threshold level, and the difference between the profile and the threshold level are calculated by the straight line. It is characterized in that the feature amount representing the feature of the defect is obtained based on the sign of the initial difference when sequentially obtained along with, and the defect is discriminated based on the feature amount.

【0011】[0011]

【作用】例えばCCDカメラを検出ヘッドに用いて、正
反射方向または乱反射方向から撮像し、画像処理装置に
よって抽出された鋼板の表面欠陥部分のグレースケール
画像について説明する。図1にカキ疵のカキ玉の部分
や、エッジがある程度急峻な押し込み疵欠陥部分等の凹
凸欠陥の光反射パターンの概念図を示す。実線は、凹凸
欠陥が存在する場合の反射光強度分布、破線は、欠陥が
存在しない正常な表面の反射光強度分布を表わす。以下
に参照する図4についても同様である。
The gray scale image of the surface defect portion of the steel sheet, which is picked up by the image processing apparatus by picking up an image from the regular reflection direction or the irregular reflection direction using a CCD camera as the detection head, will be described. FIG. 1 is a conceptual diagram of a light reflection pattern of an uneven defect such as an oyster ball portion of an oyster defect or an indentation defect defect portion in which an edge is steep to some extent. The solid line represents the reflected light intensity distribution in the presence of the uneven defect, and the broken line represents the reflected light intensity distribution of a normal surface in which no defect exists. The same applies to FIG. 4 referred to below.

【0012】これらの凹凸欠陥では、正反射方向から撮
像した欠陥部分のグレースケール画像は、図2に示され
るように、欠陥のない部分に比較して欠陥部分が全体的
に暗くなる。ところが図1中の乱反射方向から撮像した
欠陥部分のグレースケール画像は、図3に示されるよう
に、欠陥のない部分に比して入射光側と反対側の、欠陥
のエッジ部分が明るくなり、その他の部分が暗くなる傾
向がある。
In these concave and convex defects, the grayscale image of the defective portion taken from the direction of specular reflection is darker as a whole, as shown in FIG. However, as shown in FIG. 3, the grayscale image of the defect portion imaged from the irregular reflection direction in FIG. 1 shows that the edge portion of the defect on the side opposite to the incident light side is brighter than the defect-free portion, Other parts tend to be dark.

【0013】一方、エッジがなだらかに変化しており、
欠陥部分全体にわたって正常部分より粗い表面を有する
凹凸欠陥、例えばヘゲ欠陥の光反射パターンの概念図
は、図4に示すようになる。この凹凸欠陥を正反射方向
から撮像したグレースケール画像は、図5に示されるよ
うに、欠陥のない正常部分に比較して欠陥部分が全体的
に暗く、図2の場合のグレースケール画像に近似したパ
ターンを示す。これに対して図4中の乱反射方向から撮
像した欠陥部分のグレースケール画像は、図6に示され
るように、欠陥のない部分に比して全体的に明るい画像
が得られる。
On the other hand, the edge changes gently,
FIG. 4 is a conceptual diagram of a light reflection pattern of an uneven defect having a rougher surface than the normal part over the entire defective part, for example, a hedging defect. As shown in FIG. 5, the grayscale image obtained by capturing the irregularity defect from the regular reflection direction is darker in the defect portion as a whole as compared with the normal portion having no defect, and is similar to the grayscale image in the case of FIG. Shows the pattern. On the other hand, as shown in FIG. 6, the grayscale image of the defective portion imaged from the direction of irregular reflection in FIG. 4 is a brighter image as a whole than the portion without the defect.

【0014】図3、図6に着目すると、エッジの急峻な
凹凸欠陥とエッジのなだらかな凹凸欠陥とでは、乱反射
方向から撮像したグレースケール画像の明暗のパターン
に差異が存在することがわかる。本発明はこの点に着目
して完成されたものである。即ち、本発明の第1の判別
方法では、欠陥領域内部が複数に分割されてなる複数の
部分領域それぞれに対応する、撮像信号の各平均的な値
を求め、これら複数の平均的な値に基づいて欠陥の特徴
を表わす特徴量を求め、この特徴量に基づいて欠陥を判
別するものであるため、凹凸性欠陥の発生原因による欠
陥種の判別、即ち、エッジの急峻な凹凸欠陥と、エッジ
のなだらかな凹凸欠陥の判別を非常に容易に、誤りなく
行うことができる。
Focusing on FIGS. 3 and 6, it can be seen that there is a difference in the light and dark patterns of the grayscale image picked up from the irregular reflection direction between the unevenness defect having a sharp edge and the unevenness defect having a gentle edge. The present invention has been completed paying attention to this point. That is, in the first determination method of the present invention, each average value of the image pickup signal corresponding to each of the plurality of partial areas obtained by dividing the inside of the defective area into a plurality of areas is obtained, and these average values are obtained. Since the feature amount representing the feature of the defect is obtained based on the feature amount and the defect is determined based on the feature amount, the defect type is determined by the cause of the uneven defect, that is, the uneven defect having a sharp edge and the edge It is possible to discriminate a smooth uneven defect very easily and without error.

【0015】また、本発明の第2の判別方法では、欠陥
領域を通過する直線上の撮像信号のプロファイルを求
め、このプロファイルに基づいて欠陥の特徴を表わす特
徴量を求め、この特徴量に基づいて欠陥を判別するもの
であるため、上記第1の欠陥判別方法と同様、凹凸性欠
陥が発生原因別に高精度に判別される。
Further, according to the second discrimination method of the present invention, the profile of the image pickup signal on the straight line passing through the defect area is obtained, the feature amount representing the feature of the defect is obtained based on this profile, and based on this feature amount. Since the defect is discriminated by the above-described method, similar to the first defect discrimination method, the uneven defect is discriminated with high accuracy according to the cause.

【0016】[0016]

【実施例】以下、本発明の実施例について説明する。図
7は、本発明による表面欠陥の判別方法の一実施例を採
用した表面欠陥判別システムの概略図であり、高速で移
動する鋼板の表面を検査している状態を示す。
Embodiments of the present invention will be described below. FIG. 7 is a schematic view of a surface defect discrimination system adopting an embodiment of the method for discriminating surface defects according to the present invention, and shows a state in which the surface of a steel sheet moving at high speed is inspected.

【0017】光源1に光源用電源10から電力が供給さ
れ、光源1から被検査材2に光束3が照射され、被検査
材2の照射部分4を一次元CCDカメラ5で乱反射方向
から撮像する。一次元CCDカメラ5から出力された一
次元信号は高速A/D変換装置6で高速にA/D変換さ
れ、欠陥抽出用信号処理装置7に信号入力され欠陥信号
の抽出が行われる。
Power is supplied to the light source 1 from the power source 10 for the light source, the light source 1 irradiates the inspected material 2 with the light beam 3, and the irradiation portion 4 of the inspected material 2 is imaged by the one-dimensional CCD camera 5 from the irregular reflection direction. . The one-dimensional signal output from the one-dimensional CCD camera 5 is A / D-converted at high speed by the high-speed A / D converter 6, and the signal is input to the defect extraction signal processor 7 to extract the defect signal.

【0018】この欠陥抽出用信号処理装置7では、入力
されたデジタル信号にシェーディング補正(撮像時にお
ける端部と中央部との信号強度差の補正)を行いなが
ら、補正後のデジタル信号が、その欠陥抽出用信号処理
装置7の内部に備えられた画像メモリに順次保存され、
これによりこの画像メモリに二次元画像が格納される。
この二次元画像を表わすデジタルの撮像信号から、所定
の閾値を越える信号を欠陥部信号として抽出することに
より欠陥部分のグレースケール画像が抽出される。
In the defect extracting signal processing device 7, while the shading correction (correction of the signal strength difference between the end portion and the central portion during image pickup) is performed on the input digital signal, the corrected digital signal is Sequentially stored in the image memory provided inside the defect extraction signal processing device 7,
As a result, the two-dimensional image is stored in this image memory.
A grayscale image of the defective portion is extracted by extracting a signal exceeding a predetermined threshold value as a defective portion signal from the digital image pickup signal representing the two-dimensional image.

【0019】以下に、本発明の一実施例としての、各特
徴量A,Bの算出方法について説明する。 <特徴量Aの算出方法> (1)欠陥抽出用信号処理装置7により欠陥部分のグレ
ースケール画像を抽出する。
A method of calculating the characteristic quantities A and B will be described below as an embodiment of the present invention. <Calculation Method of Feature A> (1) The defect extraction signal processing device 7 extracts a grayscale image of the defect portion.

【0020】この欠陥部分の信号は欠陥判別用画像処理
装置8に入力され、欠陥判別用画像処理装置8におい
て、下記(2)〜(4)の各ステップが実行される。 (2)欠陥部分のグレースケール画像に外接する長方形
を生成する。 (3)長方形の一辺に平行に上記の長方形を分割する。 (4)細分化した複数の各長方形内の欠陥部分の各平均
グレースケールレベルvを下記(1)式に基づいて算出
する。
The signal of this defective portion is input to the image processing apparatus 8 for defect determination, and the image processing apparatus 8 for defect determination executes the following steps (2) to (4). (2) A rectangle circumscribing the grayscale image of the defective portion is generated. (3) Divide the above rectangle parallel to one side of the rectangle. (4) The average gray scale level v of the defective portion in each of the plurality of subdivided rectangles is calculated based on the following equation (1).

【0021】[0021]

【数1】 [Equation 1]

【0022】ここで、Nは細分化された各長方形内の欠
陥部分の全画素数、pi は細分化され各長方形内の欠陥
部分のi番目の画素のグレースケールレベル値を表わ
す。 (5)上記平均グレースケールレベルvの値から、分割
された長方形内の欠陥を数値化する。 (6)数値の配列パターンを数値化して特徴量Aとす
る。
Here, N represents the total number of pixels in the defective portion in each subdivided rectangle, and p i represents the gray scale level value of the i-th pixel in the defective portion in each subdivided rectangle. (5) The defects in the divided rectangles are digitized from the value of the average gray scale level v. (6) The numerical value array pattern is converted into a numerical value to obtain the feature value A.

【0023】以下、上記(2)〜(6)の各ステップに
ついて具体的に説明する。図8は、エッジの急峻な凹凸
欠陥の、抽出された欠陥部分のグレースケール画像の模
式図である。ここでは抽出された欠陥部分のグレースケ
ール画像に外接する長方形が生成され、一例として、y
軸に平行に、3等分に分割される。細分化した長方形内
の欠陥部分の平均グレースケールレベルvを上記(1)
式にしたがって算出する。グレースケールレベルは例え
ば256段階に設定されており、例えばこれを二値化す
る場合にはグレースケールレベルv=128を欠陥のな
い基準グレースケールレベルとし、グレースケールレベ
ルvが128以上(基準スケールレベルより明るい)場
合は1、グレースケールレベルが128未満の場合(基
準スケールレベルより暗い場合)は0とする。
The steps (2) to (6) will be specifically described below. FIG. 8 is a schematic diagram of a grayscale image of an extracted defect portion of a concave-convex defect having a sharp edge. Here, a rectangle circumscribing the grayscale image of the extracted defect portion is generated, and as an example, y
It is divided into three equal parts parallel to the axis. The average gray scale level v of the defective portion in the subdivided rectangle is set to the above (1).
Calculate according to the formula. The grayscale level is set to, for example, 256 levels. For example, when binarizing the grayscale level, the grayscale level v = 128 is set as a reference grayscale level without defects, and the grayscale level v is 128 or more (the reference scale level is It is set to 1 when it is brighter and 0 when the gray scale level is less than 128 (when it is darker than the reference scale level).

【0024】長方形を3分割し、グレースケールレベル
を二値化すると、グレースケールレベルの配列パターン
は23 =8通り存在することになる。図8の欠陥のグレ
ースケールレベルの配列パターンは(101)と表され
る。これを10進表記の特徴量で表わせば7となる。図
9は同じ欠陥のグレースケール画像をx軸に平行に3等
分に分割した模式図であり、上記と同様にして、欠陥部
分のグレースケールレベルの配列パターンを求めると
(100)となる。これを10進表記の特徴量で表わす
と6となる。
When the rectangle is divided into three and the gray scale levels are binarized, there are 2 3 = 8 gray scale level arrangement patterns. The grayscale level array pattern of the defects in FIG. 8 is represented by (101). If this is expressed by the decimal-based feature quantity, it becomes 7. FIG. 9 is a schematic diagram in which a grayscale image of the same defect is divided into three equal parts in parallel with the x-axis, and the grayscale level array pattern of the defect portion is obtained in the same manner as above (100). This is 6 when expressed in decimal notation.

【0025】エッジのなだらかな欠陥の場合は、欠陥部
分のグレースケールレベルの配列パターンは、y軸方向
またはx軸方向に分割した場合の両者ともに(111)
となり、これを特徴量で表わせば8となる。エッジの急
峻な欠陥とエッジのなだらかな欠陥とでは特徴量が異な
るので判別することができる。
In the case of a defect having a gentle edge, the array pattern of the gray scale level of the defect portion is (111) in both cases when divided in the y-axis direction or the x-axis direction.
If this is expressed as a feature amount, it becomes 8. It is possible to discriminate because a defect having a sharp edge and a defect having a smooth edge have different feature amounts.

【0026】<特徴量Bの算出方法>図10に示される
ように、エッジの急峻な欠陥であっても欠陥部分内の、
周囲より明るい領域が小さいために、上述の特徴量Aの
算出方法をもってしては周囲よりも明るい欠陥分がある
という特徴量が得られない場合のために、グレースケー
ルのプロファイルから欠陥を判別する方法を加える。先
ず、抽出された欠陥部分の重心の座標を演算によって求
める。
<Calculation Method of Feature B> As shown in FIG. 10, even in the case of a defect having a sharp edge,
Since the area brighter than the surrounding area is small, and the feature quantity that there is a defect brighter than the surrounding area cannot be obtained by the above-described method of calculating the feature quantity A, the defect is discriminated from the grayscale profile. Add method. First, the coordinates of the center of gravity of the extracted defective portion are calculated.

【0027】図13は、重心の求め方を説明するための
模式図である。各升目1つずつが各画素に対応してい
る。重心の座標(x0 ,y0 )は、図13に示すような
抽出された欠陥部分のx方向、y方向の座標に対して式
(2)に示す計算式より求められる。
FIG. 13 is a schematic diagram for explaining how to find the center of gravity. Each square corresponds to each pixel. The coordinates (x 0 , y 0 ) of the center of gravity are obtained from the calculation formula shown in Formula (2) with respect to the coordinates of the extracted defect portion in the x direction and the y direction as shown in FIG.

【0028】[0028]

【数2】 [Equation 2]

【0029】但し、Nは抽出された欠陥部分の全画素
数、xi ,yi は抽出された欠陥部分のi番目の画素の
x,y座標である。重心の座標を求めた後、図11に示
すようにその重心(x0 ,y0 )を通るy方向のグレー
スケール値のプロファイルを得て、そのプロフィールが
基準グレースケールレベルと交差する回数を求める。交
差の判断は、隣接する画素のグレースケールレベルが基
準グレースケールレベルを横切っているか否かによる。
またプロフィールの始点を予め決めておき(本実施例で
は、入射光側とは反射側である)、始点のグレースケー
ルレベルが基準グレースケールレベルより高い場合は、
正+、低い場合は負−の符号を、求めた交差回数に付加
し、この値を特徴量Bとする。図11の場合は、+1が
この特徴量Bの値となる。複雑な形状の図12の場合
は、プロファイルが基準グレースケールレベルと接して
はいるものの横切ってはいないため、a点,b点は交差
しているとは見なされず、特徴量Bは+2となる。
However, N is the total number of pixels of the extracted defective portion, and x i and y i are the x and y coordinates of the i-th pixel of the extracted defective portion. After obtaining the coordinates of the center of gravity, a profile of gray scale values in the y direction passing through the center of gravity (x 0 , y 0 ) is obtained as shown in FIG. 11, and the number of times the profile intersects the reference gray scale level is obtained. . The determination of the intersection depends on whether or not the grayscale level of the adjacent pixel crosses the reference grayscale level.
Further, the starting point of the profile is determined in advance (in this embodiment, the incident light side is the reflecting side), and when the gray scale level of the starting point is higher than the reference gray scale level,
A positive + sign and a negative − sign when the value is low are added to the obtained number of crossings, and this value is set as the feature amount B. In the case of FIG. 11, +1 is the value of this feature amount B. In the case of FIG. 12 having a complicated shape, since the profile is in contact with the reference gray scale level but does not cross it, the points a and b are not considered to intersect, and the feature amount B is +2. .

【0030】以上は、y方向のグレースケール値のプロ
ファイルの特徴量を求めて判別する方法について示した
が、x方向のグレースケール値のプロファイルの特徴量
を求めて判別してもよい。エッジのなだらかな欠陥の場
合は交差回数は0回であり、符号は+であるから、特徴
量Bは+0となる。エッジの急峻な欠陥とエッジのなだ
らかな欠陥とでは特徴量が異なるので、容易に判別する
ことができる。
Although the method for determining the feature amount of the gray scale value profile in the y direction has been described above, the feature amount of the profile of the gray scale value in the x direction may be determined for determination. In the case of a smooth edge defect, the number of intersections is 0 and the sign is +, so the feature amount B is +0. Since the features of a defect having a sharp edge and a defect having a gentle edge are different, it is possible to easily discriminate them.

【0031】上記のようにして求めた特徴量A,Bを、
従来用いられてきた形状を表す特徴量、大きさを表す特
徴量、濃度特徴量等と合わせて用いることにより、従来
用いられてきた特徴量のみではこれまで判別が困難であ
った、エッジが急峻な凹凸欠陥とエッジがなだらかな凹
凸欠陥との二種類の凹凸欠陥の判別を非常に容易に行う
ことができる。
The characteristic amounts A and B obtained as described above are
By using it together with the feature quantity representing the shape, the feature quantity representing the size, the density feature quantity, etc., which have been conventionally used, it has been difficult to discriminate using only the conventionally used feature quantity. It is possible to very easily discriminate between two types of concave and convex defects, that is, a convex and concave defect and a concave and convex defect with a smooth edge.

【0032】表1は特徴量の登録テーブルの一例であ
り、このテーブルには、エッジのなだらかになっている
欠陥の例としての「ヘゲ」と、エッジの急峻になってい
る欠陥の例としての「カキ疵」に対する疵種判別用特徴
量が登録されている。各々の特徴量に対して、最大値
(max)、最小値(min)の登録が可能であり、抽
出された欠陥の特徴量が、このテーブルに登録した欠陥
の特徴量の値の範囲内に適合すれば、その欠陥である判
定されることになる。特徴量の登録はサンプルテスト、
或いはオンラインテストにより様々な疵種の疵データを
多数集め、その疵データから特徴量の値の範囲が決定さ
れる。
Table 1 is an example of a feature amount registration table. In this table, "heavy" as an example of a defect having a gradual edge and an example of a defect having an abrupt edge are shown. The feature type for defect type determination for “Oyster defect” is registered. It is possible to register the maximum value (max) and the minimum value (min) for each feature amount, and the extracted defect feature amount falls within the range of the defect feature amount values registered in this table. If they match, the defect will be determined. Registration of feature quantity is sample test,
Alternatively, a large number of flaw data of various flaw types are collected by an online test, and the range of the value of the feature amount is determined from the flaw data.

【0033】ここでは、約20コイルの冷延鋼板を用い
て、各コイルについて長さ300mから400mを、ラ
イン速度300m/minで図7に示すシステムにより
検査して、「カキ疵」および「ヘゲ」について、表1の
特徴量の登録テーブルにより欠陥を判別した。一方、こ
れらのコイルを低速で巻き戻して、図7に示すシステム
で検出した欠陥と同一位置の欠陥をオペレータが目視に
より観察して、欠陥の判別を行った。各欠陥について、
図7のシステムでカキ疵と判定され、且つその欠陥がオ
ペレータの目視でもカキ疵と判定された欠陥の数を、図
7のシステムでカキ疵と判定された欠陥の数で除した値
を「カキ疵」の一致率とした。「ヘゲ」の一致率につい
ても同様にして算出した。
Here, a cold-rolled steel sheet having about 20 coils was used to inspect each coil for a length of 300 m to 400 m at a line speed of 300 m / min by a system shown in FIG. Regarding "ga", the defect was identified by the registration table of the feature amount of Table 1. On the other hand, these coils were rewound at a low speed, and the operator visually observed the defect at the same position as the defect detected by the system shown in FIG. 7 to determine the defect. For each defect,
A value obtained by dividing the number of defects determined to be oyster flaws by the system of FIG. 7 and the defects of which are also visually determined by an operator by the number of defects determined to be oyster flaws in the system of FIG. The rate of agreement was "Oyster flaw". The concordance rate of "heard" was calculated in the same manner.

【0034】表2に、従来の特徴量のみで欠陥を判別し
た場合、および従来の特徴量による判別に本実施例によ
る特徴量による判別を加えて判別した場合の欠陥の一致
率を示す。従来の特徴量による判別に本実施例による判
別を加えて判別するとは、従来の特徴量により判別した
結果と本実施例の特徴量により判別した結果との論理積
(双方の特徴量それぞれによりいずれも疵と判別された
場合に疵と判別する)を意味する。表2でandは論理
積を表わし、orは論理和を表わす。
Table 2 shows the coincidence rate of defects when a defect is discriminated only by the conventional feature amount, and when the discrimination by the conventional feature amount is added to the discrimination by the feature amount according to the present embodiment. When the determination according to the present embodiment is added to the determination based on the conventional feature amount, the determination means that a logical product of a result determined based on the conventional feature amount and a result determined based on the feature amount according to the present embodiment (each Also if it is determined to be defective, it is determined to be defective). In Table 2, and represents a logical product, and or represents a logical sum.

【0035】本実施例の特徴量を加えて欠陥を判別した
場合、従来の特徴量のみによる欠陥判別に比較して欠陥
の一致率が大幅に向上していることがわかる。
When the defect is discriminated by adding the feature amount of this embodiment, it is understood that the defect coincidence rate is significantly improved as compared with the conventional defect discrimination using only the feature amount.

【0036】[0036]

【表1】 [Table 1]

【0037】[0037]

【表2】 [Table 2]

【0038】[0038]

【発明の効果】以上説明したように、本発明の表面欠陥
の判別方法を採用すれば、凹凸欠陥を高精度に判別でき
る。
As described above, by adopting the method for discriminating surface defects of the present invention, it is possible to discriminate uneven defects with high accuracy.

【図面の簡単な説明】[Brief description of drawings]

【図1】エッジの急峻な凹凸欠陥に対する光反射強度分
布の概念図である。
FIG. 1 is a conceptual diagram of a light reflection intensity distribution with respect to a concave-convex defect having a sharp edge.

【図2】エッジの急峻な凹凸欠陥を正反射方向に検出ヘ
ッドを置いて撮像した場合のグレースケール画像の例で
ある。
FIG. 2 is an example of a gray scale image when a concave-convex defect having a sharp edge is imaged with a detection head placed in the regular reflection direction.

【図3】エッジの急峻な凹凸欠陥を乱反射方向に検出ヘ
ッドを置いて撮像した場合のグレースケール画像の例で
ある。
FIG. 3 is an example of a gray scale image when a concave-convex defect having a sharp edge is imaged with a detection head placed in the irregular reflection direction.

【図4】エッジのなだらかな凹凸欠陥に対する光反射強
度分布の概念図である。
FIG. 4 is a conceptual diagram of a light reflection intensity distribution with respect to a concave-convex defect having a smooth edge.

【図5】エッジのなだらかな凹凸欠陥を正反射方向に検
出ヘッドを置いて撮像した場合のグレースケール画像の
例である。
FIG. 5 is an example of a grayscale image when a concave-convex defect having a smooth edge is imaged with a detection head placed in the regular reflection direction.

【図6】エッジのなだらかな凹凸欠陥を乱反射方向に検
出ヘッドを置いて撮像した場合のグレースケール画像の
例である。
FIG. 6 is an example of a grayscale image when a concave-convex defect having a smooth edge is imaged with a detection head placed in the irregular reflection direction.

【図7】本発明による表面欠陥の判別方法の一実施例を
採用した表面欠陥判別システムの概略図である。
FIG. 7 is a schematic view of a surface defect discrimination system adopting an embodiment of a surface defect discrimination method according to the present invention.

【図8】特徴量Aを算出するために欠陥画像をy方向に
平行に分割した例を示す図である。
FIG. 8 is a diagram showing an example in which a defect image is divided in parallel in the y direction in order to calculate a characteristic amount A.

【図9】特徴量Aを算出するために欠陥画像をx方向に
平行に分割した例を示す図である。
FIG. 9 is a diagram showing an example in which a defect image is divided in parallel in the x direction in order to calculate a feature amount A.

【図10】本発明の特徴量Aでは欠陥が判別できない場
合の例を示す図である。
FIG. 10 is a diagram showing an example of a case in which a feature amount A of the present invention cannot identify a defect.

【図11】特徴量Bを算出するための模式図である。11 is a schematic diagram for calculating a feature amount B. FIG.

【図12】欠陥部分の重心の求め方を示す図である。FIG. 12 is a diagram showing how to determine the center of gravity of a defective portion.

【図13】特徴量Bを算出するための欠陥形状が複雑な
場合の模式図である。
FIG. 13 is a schematic diagram when the defect shape for calculating the feature amount B is complicated.

【符号の説明】[Explanation of symbols]

1 光源 2 被検査材 5 一次元CCDカメラ 6 A/D変換装置 7 欠陥抽出用信号処理装置 8 欠陥抽出用信号処理装置 9 表示装置 1 Light Source 2 Inspected Material 5 One-dimensional CCD Camera 6 A / D Converter 7 Defect Extraction Signal Processing Device 8 Defect Extraction Signal Processing Device 9 Display Device

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 照明された被検査体表面を撮像して撮像
信号を得、該撮像信号に基づいて前記被検査体表面の欠
陥を判別する表面欠陥の判別方法において、 前記撮像信号に基づいて、前記被検査体表面を表わす画
像中の、前記被検査体表面の欠陥に対応する欠陥領域を
抽出し、 該欠陥領域内部が複数に分割されてなる複数の部分領域
それぞれに対応する撮像信号の各平均的な値を求め、 これら複数の平均的な値に基づいて欠陥の特徴を表わす
特徴量を求め、 この特徴量に基づいて欠陥を判別することを特徴とする
表面欠陥の判別方法。
1. A method for determining a surface defect in which an illuminated inspection object surface is imaged to obtain an imaging signal, and a defect on the inspection object surface is determined based on the imaging signal. , A defect area corresponding to a defect on the surface of the object to be inspected in the image representing the surface of the object to be inspected is extracted, and an image pickup signal corresponding to each of a plurality of partial areas in which the inside of the defect area is divided A method for determining a surface defect, characterized in that each average value is obtained, a feature amount representing a feature of a defect is obtained based on the plurality of average values, and the defect is identified based on the feature amount.
【請求項2】 照明された被検査体表面を撮像して撮像
信号を得、該撮像信号に基づいて前記被検査体表面の欠
陥を判別する表面欠陥の判別方法において、 前記撮像信号に基づいて、前記被検査体表面を表わす画
像中の、前記被検査体表面の欠陥に対応する欠陥領域を
抽出し、 この欠陥領域に外接する長方形領域を求め、 この長方形領域の輪郭の一辺に平行な線分によりこの長
方形領域内部が複数に分割されてなる複数の部分領域そ
れぞれと、前記欠陥領域との各重畳部分それぞれに対応
する撮像信号の各平均的な値を求め、 これら複数の平均的な値それぞれと1つもしくは複数の
しきい値とを比較することにより、これら複数の平均的
な値それぞれを数値化し、 これら複数の数値の配列パターンに基づいて欠陥の特徴
を表わす特徴量を求め、 この特徴量に基づいて欠陥を判別することを特徴とする
表面欠陥の判別方法。
2. A surface defect determining method for determining a defect on the surface of an object to be inspected on the basis of the image signal by imaging an illuminated surface of the object to be inspected, and based on the image signal. , A defect area corresponding to a defect on the surface of the object to be inspected in the image representing the surface of the object to be inspected, a rectangular area circumscribing the defect area is obtained, and a line parallel to one side of the contour of the rectangular area Each of the plurality of partial areas obtained by dividing the inside of the rectangular area into a plurality of areas by the minute, and the average value of the imaging signal corresponding to each of the overlapping portions of the defect area are obtained, and the average values of the plurality of average values are calculated. Each of these average values is digitized by comparing each with one or a plurality of threshold values, and the feature quantity representing the feature of the defect is obtained based on the array pattern of these plurality of values. , Method of determining surface defects, characterized in that to determine the defect based on the feature quantity.
【請求項3】 照明された被検査体表面を撮像して撮像
信号を得、該撮像信号に基づいて前記被検査体表面の欠
陥を判別する表面欠陥の判別方法において、 前記撮像信号に基づいて、前記被検査体表面を表わす画
像中の、前記被検査体表面の欠陥に対応する欠陥領域を
抽出し、 該欠陥領域を通過する所定の直線上の撮像信号のプロフ
ァイルを求め、 このプロファイルに基づいて欠陥の特徴を表わす特徴量
を求め、 この特徴量に基づいて欠陥を判別することを特徴とする
表面欠陥の判別方法。
3. A surface defect determining method for determining a defect on the surface of an object to be inspected based on the imaged signal by imaging an illuminated surface of the object to be inspected, and based on the image capturing signal. , A defect area corresponding to a defect on the surface of the object to be inspected in an image representing the surface of the object to be inspected is extracted, and a profile of an imaging signal on a predetermined straight line passing through the defect area is obtained, and based on this profile A method of determining a surface defect, characterized in that a feature quantity representing a feature of a defect is obtained, and the defect is identified based on the feature quantity.
【請求項4】 照明された被検査体表面を撮像して撮像
信号を得、該撮像信号に基づいて前記被検査体表面の欠
陥を判別する表面欠陥の判別方法において、 前記撮像信号に基づいて、前記被検査体表面を表わす画
像中の、前記被検査体表面の欠陥に対応する欠陥領域を
抽出し、 該欠陥領域内部の代表点を求め、 該代表点を通過する直線上の撮像信号のプロファイルを
求め、 該プロファイルが所定のしきい値レベルと交差する回
数、および該プロファイルと該しきい値レベルとの差分
を前記直線に沿って順次求めたときの初期の差分の符号
に基づいて欠陥の特徴を表わす特徴量を求め、 この特徴量に基づいて欠陥を判別することを特徴とする
表面欠陥の判別方法。
4. A surface defect determining method for determining a defect on the surface of an object to be inspected based on the imaged signal by imaging an illuminated surface of the object to be inspected, the method comprising: , A defect area corresponding to a defect on the surface of the inspected object in the image representing the surface of the inspected object is extracted, a representative point inside the defective area is obtained, and an imaging signal on a straight line passing through the representative point is extracted. Defects based on the number of times the profile intersects a predetermined threshold level and the sign of the initial difference when the difference between the profile and the threshold level is sequentially determined along the straight line. A method of determining a surface defect, which comprises: determining a feature amount representing the feature of 1. and determining a defect based on the feature amount.
JP6223644A 1994-09-19 1994-09-19 How to identify surface defects Withdrawn JPH0886759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6223644A JPH0886759A (en) 1994-09-19 1994-09-19 How to identify surface defects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6223644A JPH0886759A (en) 1994-09-19 1994-09-19 How to identify surface defects

Publications (1)

Publication Number Publication Date
JPH0886759A true JPH0886759A (en) 1996-04-02

Family

ID=16801421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6223644A Withdrawn JPH0886759A (en) 1994-09-19 1994-09-19 How to identify surface defects

Country Status (1)

Country Link
JP (1) JPH0886759A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008198224A (en) * 2001-10-25 2008-08-28 Mitsubishi Electric Information Technology Centre Europa Bv Method for deriving feature vector representing image, image classification method, and image analysis apparatus
JP2011095108A (en) * 2009-10-29 2011-05-12 Panasonic Electric Works Co Ltd Wood defect detector and method therefor
CN115170484A (en) * 2022-06-22 2022-10-11 复旦大学 Characterization and classification method for surface defects of laser additive manufacturing workpiece

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008198224A (en) * 2001-10-25 2008-08-28 Mitsubishi Electric Information Technology Centre Europa Bv Method for deriving feature vector representing image, image classification method, and image analysis apparatus
JP2011095108A (en) * 2009-10-29 2011-05-12 Panasonic Electric Works Co Ltd Wood defect detector and method therefor
CN115170484A (en) * 2022-06-22 2022-10-11 复旦大学 Characterization and classification method for surface defects of laser additive manufacturing workpiece

Similar Documents

Publication Publication Date Title
JP3051279B2 (en) Bump appearance inspection method and bump appearance inspection device
RU2764644C1 (en) Method for detecting surface defects, device for detecting surface defects, method for producing steel materials, method for steel material quality control, steel materials production plant, method for generating models for determining surface defects and a model for determining surface defects
US6687396B1 (en) Optical member inspection apparatus, image-processing apparatus, image-processing method, and computer readable medium
EP0563897A1 (en) Defect inspection system
JP2002148195A (en) Surface inspection apparatus and surface inspection method
JP3890844B2 (en) Appearance inspection method
JPH07333197A (en) Automatic surface flaw detector
JPH0921628A (en) Method for detecting surface irregularity defects on a cylindrical test object
JPH0886759A (en) How to identify surface defects
JP3089079B2 (en) Circuit pattern defect inspection method
JP2009047517A (en) Inspection device
JP3641394B2 (en) Optical member inspection apparatus, image processing apparatus, image processing method, and computer-readable medium
JP2003156451A (en) Defect detection device
JPH0718811B2 (en) Defect inspection method
JP3581040B2 (en) Wiring pattern inspection method
JPH08190633A (en) Defect judging method
JPH0829145A (en) Surface defect inspection method
JP2004125629A (en) Defect detection device
JPH05203584A (en) Device for detecting characteristic amount on work surface
JP3844863B2 (en) Surface inspection method and apparatus
JP3108277B2 (en) Coin recognition device and its preprocessing method
JPH0682724B2 (en) Wafer defect inspection system
JP3509581B2 (en) Appearance inspection method
JP2715897B2 (en) IC foreign matter inspection apparatus and method
JPH0943162A (en) External appearance inspection method

Legal Events

Date Code Title Description
A300 Application deemed to be withdrawn because no request for examination was validly filed

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20011120