JPH08932A - Production of ceramic filter - Google Patents

Production of ceramic filter

Info

Publication number
JPH08932A
JPH08932A JP15819294A JP15819294A JPH08932A JP H08932 A JPH08932 A JP H08932A JP 15819294 A JP15819294 A JP 15819294A JP 15819294 A JP15819294 A JP 15819294A JP H08932 A JPH08932 A JP H08932A
Authority
JP
Japan
Prior art keywords
ceramic
film
slurry
ceramic filter
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15819294A
Other languages
Japanese (ja)
Inventor
Kazumori Hayakawa
一精 早川
Nobuhiko Kuwayama
信彦 桑山
Katsuichi Iwata
克一 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP15819294A priority Critical patent/JPH08932A/en
Publication of JPH08932A publication Critical patent/JPH08932A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057Carbides
    • C04B41/5059Silicon carbide
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00482Coating or impregnation materials
    • C04B2111/00577Coating or impregnation materials applied by spraying
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00793Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2201/00Mortars, concrete or artificial stone characterised by specific physical values
    • C04B2201/10Mortars, concrete or artificial stone characterised by specific physical values for the viscosity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Filtering Materials (AREA)

Abstract

PURPOSE:To easily produce a ceramic filter having a homogenous membrane. CONSTITUTION:The viscosity of a slurry having ceramic particles dispersed therein is adjusted to 2-5dPa-S and this slurry is applied to a porous ceramic base material by spray coating. The coated base material is dried and baked to obtain a ceramic filter having a homogenous membrane free from a pinhole or voids.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、高温空気中のダストの
除去や、高温液や腐食性液体中の懸濁粒子の除去等に使
用されるセラミックフィルターの製造方法に関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a ceramic filter used for removing dust in high temperature air and for removing suspended particles in high temperature liquid or corrosive liquid.

【0002】[0002]

【従来の技術】上記のような用途には、セラミックスが
有する耐熱性、耐食性を利用して、セラミックフィルタ
ーが使用されている。そして除去すべきダストや懸濁粒
子が微細な場合には、多孔質のセラミック基材上に、基
材の気孔径よりも更に小さな気孔径からなるセラミック
膜を1層ないし2層付与した多層構造からなるセラミッ
クフィルターが使用されている。
2. Description of the Related Art Ceramic filters are used for the above-mentioned applications by utilizing the heat resistance and corrosion resistance of ceramics. When the dust or suspended particles to be removed are fine, a multilayer structure in which one or two ceramic membranes having a pore size smaller than that of the substrate are provided on the porous ceramic substrate. A ceramic filter consisting of is used.

【0003】そのような多層構造のセラミックフィルタ
ーを製造するために、セラミック粒子を水中に懸濁させ
た懸濁液をセラミック基材に通してろ過させ、基材上に
残留させた後、焼成してセラミック膜をセラミック基材
上に固着させる方法が知られている。しかしながらこの
方法は、膜付与時に懸濁液を用いるため、セラミック粒
子の粒子径が大きく、または比重が大きい場合にはセラ
ミック粒子が液中に沈降し易く、膜付与が均質に行えな
い問題点がある。
In order to produce such a multilayer ceramic filter, a suspension of ceramic particles in water is filtered through a ceramic substrate, left on the substrate and then calcined. There is known a method of fixing a ceramic film on a ceramic substrate. However, in this method, since a suspension is used at the time of applying the film, when the particle size of the ceramic particles is large or the specific gravity is large, the ceramic particles tend to settle in the liquid, and there is a problem that the film application cannot be performed uniformly. is there.

【0004】またセラミック基材の気孔径が場所により
バラツキを持つ場合、ろ過速度が場所により異なるため
に膜厚が均等にできにくい問題がある。更に懸濁液にバ
インダーを添加してもバインダーが膜上に残りにくく、
基材への膜の付着性が悪いという問題がある。
Further, when the pore diameter of the ceramic base material varies depending on the location, there is a problem that it is difficult to make the film thickness uniform because the filtration rate varies depending on the location. Furthermore, even if a binder is added to the suspension, it is difficult for the binder to remain on the film,
There is a problem that the adhesion of the film to the substrate is poor.

【0005】このほか、セラミックス粒子のスラリーを
スプレーを用いて基材上に噴霧し、セラミック膜を形成
する方法もあるが、ピンホール等の孔が膜表面に発生
し、均質な膜を持つセラミックフィルターが得られない
欠点があった。
There is also a method of forming a ceramic film by spraying a slurry of ceramic particles onto a base material using a spray, but holes such as pinholes are generated on the surface of the film, and a ceramic having a uniform film is formed. There was a drawback that a filter could not be obtained.

【0006】[0006]

【発明が解決しようとする課題】本発明は上記した従来
の問題点を解決して、大掛かりな装置を必要とせず、セ
ラミック基材上に均質なセラミック膜を付与したセラミ
ックフィルターを得ることができるセラミックフィルタ
ーの製造方法を提供するためになされたものである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art and can provide a ceramic filter in which a uniform ceramic film is provided on a ceramic substrate without requiring a large-scale device. It is made to provide a method for manufacturing a ceramic filter.

【0007】[0007]

【課題を解決するための手段】上記の課題を解決するた
めになされた本発明のセラミックフィルターの製造方法
は、セラミック粒子を分散したスラリーの粘度を2〜5
dPa-S に調整し、該スラリーを多孔質のセラミック基材
上にスプレーコートし、乾燥後焼成することを特徴とす
るものである。
The method for producing a ceramic filter according to the present invention, which has been made to solve the above-mentioned problems, has a viscosity of a slurry in which ceramic particles are dispersed in a range of 2-5.
It is characterized in that it is adjusted to dPa-S, the slurry is spray-coated on a porous ceramic substrate, dried and then fired.

【0008】本発明において使用されるセラミック粒子
の材質としては、水に分散可能な全てのセラミックスが
使用可能であるが、フィルターの使用条件に応じて選択
すべきである。例えば水中での使用に対しては、Al
2O3 、SiC 、ZrO2、TiO2が好ましい。また高温気体中や
高温高圧水中での使用に対しては、SiC が好ましい。ま
たセラミック粒子として均一な粒径を持つ粒子が使用で
きるが、基材への付着製や所望の膜強度を得るため、各
種の異なる粒度の粉末を配合して用いてもよい。
As the material of the ceramic particles used in the present invention, all ceramics that can be dispersed in water can be used, but they should be selected according to the use conditions of the filter. For example, for use in water, Al
2 O 3 , SiC, ZrO 2 and TiO 2 are preferred. For use in high temperature gas or high temperature high pressure water, SiC is preferred. Further, particles having a uniform particle size can be used as the ceramic particles, but powders of various different particle sizes may be blended and used in order to adhere to a substrate and obtain desired film strength.

【0009】セラミック基材の材質としては、多孔質な
焼結体が製造可能な全てのセラミックスが使用可能であ
るが、またセラミック膜とセラミック基材間で熱膨脹差
が小さい方が熱応力による破損の危険性が少ないので、
セラミック粒子とセラミック基材の材料は同材質または
熱膨脹係数の差が小さいセラミックスを用いることが好
ましい。
As the material of the ceramic base material, all ceramics capable of producing a porous sintered body can be used, and if the difference in thermal expansion between the ceramic film and the ceramic base material is small, the ceramic base material is damaged by thermal stress. Because there is less risk of
It is preferable to use the same material for the ceramic particles and the ceramic base material or ceramics having a small difference in coefficient of thermal expansion.

【0010】スラリー中にはセラミック粒子の他膜付与
後の膜強度を高めるために各種のバインダーを含ませる
ことができる。通常はセラミック基材とセラミック膜と
の密着性、結合性を高める目的でスプレーによる膜形成
後に乾燥して焼成を行うため、バインダーとしては焼成
により分解、揮散する有機質のバインダーが好ましい。
In addition to the ceramic particles, various kinds of binders may be contained in the slurry in order to enhance the film strength after the film is applied. Usually, since a film is formed by spraying and then dried and baked for the purpose of enhancing the adhesion and bonding between the ceramic base material and the ceramic film, an organic binder that decomposes and volatilizes by baking is preferable as the binder.

【0011】本発明では、セラミック粒子を分散したス
ラリーの粘度を2〜5dPa-S に調整して用いる。これは
スラリーの粘度が2dPa-S よりも小さくなると、膜表面
にボイドやピンホール等の穴が多数発生して均質な膜が
得られず、また5dPa-S よりも大きくなるとボタが膜表
面に生成し、いずれも均質な膜が形成されないからであ
る。なおここでボイドとは直径0.1mm 以上の穴、ピンホ
ールは直径0.1mm より小さい穴として定義した。
In the present invention, the viscosity of the slurry in which the ceramic particles are dispersed is adjusted to 2 to 5 dPa-S before use. This is because when the viscosity of the slurry is smaller than 2 dPa-S, many holes such as voids and pinholes are generated on the surface of the film, and a uniform film cannot be obtained. This is because they are generated and a homogeneous film is not formed in either case. The void is defined as a hole with a diameter of 0.1 mm or more, and the pinhole is defined as a hole with a diameter of 0.1 mm or less.

【0012】スプレーコートを行うためには、スラリー
の霧化が可能な各種の装置を使用可能であるが、実際に
はスプレーガンを用いることが好ましい。またスプレー
ガンの圧力は、0.3 〜4.0kg/cm2 の範囲とすることが好
ましい。
For spray coating, various devices capable of atomizing the slurry can be used, but it is preferable to use a spray gun in practice. Further, the pressure of the spray gun is preferably in the range of 0.3 to 4.0 kg / cm 2 .

【0013】スプレーコートの後に乾燥を行うが、急速
に乾燥を行うとキレやクラック等の表面欠陥が発生し易
いため、なるべくゆっくりと乾燥を行う。例えば、自然
乾燥により膜内の水分量を10%以下にしたのち、乾燥機
で乾燥を行うことが好ましい。あるいは調湿乾燥機を用
いて湿度を制御しながら乾燥を行ってもよい。乾燥後に
焼成を行う。焼成温度、時間、雰囲気は、セラミック材
料の種類に応じて適宜選択する。また焼成温度が高過ぎ
ると、セラミック成分の蒸発やセラミック粒子の粗大化
により、気孔径が大きくなりすぎるおそれがある。また
逆に低過ぎると焼結が不十分となり、膜と基材の接合強
度が低下するおそれがある。そのため、セラミック材料
の種類、所望する気孔径に応じて最適の焼成条件を設定
することが好ましい。
Drying is carried out after the spray coating. However, if the drying is carried out rapidly, surface defects such as scratches and cracks are likely to occur, so the drying is carried out as slowly as possible. For example, it is preferable to dry the film in a dryer after the water content in the film is reduced to 10% or less by natural drying. Alternatively, drying may be performed while controlling the humidity using a humidity dryer. Baking is performed after drying. The firing temperature, time and atmosphere are appropriately selected according to the type of ceramic material. On the other hand, if the firing temperature is too high, the pore size may become too large due to evaporation of the ceramic component and coarsening of the ceramic particles. On the other hand, if it is too low, the sintering may be insufficient and the bonding strength between the film and the substrate may be reduced. Therefore, it is preferable to set the optimum firing conditions according to the type of ceramic material and the desired pore size.

【0014】[0014]

【作用】本発明のセラミックフィルターの製造方法によ
れば、セラミック粒子を分散したスラリーの粘度を2〜
5dPa-S に調整し、該スラリーを多孔質のセラミック基
材上にスプレーコートするので、ボイドやピンホール等
の穴がなく、またボタが膜表面に生成されることもな
く、均質なセラミック膜を持つセラミックフィルターを
得ることができる。
According to the method of manufacturing the ceramic filter of the present invention, the viscosity of the slurry in which the ceramic particles are dispersed is adjusted to 2 to
Since it is adjusted to 5 dPa-S and the slurry is spray-coated on a porous ceramic substrate, there are no holes such as voids and pinholes, and no vomit is formed on the surface of the film. It is possible to obtain a ceramic filter having

【0015】[0015]

【実施例】【Example】

〔実施例1〕約30μm の気孔径を有する外径60×内径40
×長さ100mm のSiC の基材上に、SiC からなる膜を形成
するため、♯400 、♯800 、♯2000、♯4000、1.5 μm
の5種類の粒子径を持つSiC 粉末をそれぞれ200gずつ秤
量し、バインダーとして40g のイソバンとともに混合
し、表1に示す粘度となるように水を加えてスラリーを
調製した。なお粘度は回転粘度計を用いて測定した。
Example 1 Outer diameter 60 × inner diameter 40 having pore diameter of about 30 μm
× # 400, # 800, # 2000, # 4000, 1.5 μm for forming a film of SiC on a 100 mm long SiC substrate
200 g of each of the SiC powders having the above five kinds of particle diameters were weighed, mixed with 40 g of isoban as a binder, and water was added so as to have the viscosity shown in Table 1 to prepare a slurry. The viscosity was measured using a rotational viscometer.

【0016】[0016]

【表1】 [Table 1]

【0017】調製したスラリーをスプレーガンに入れ、
1.5kg/cm2 のエアーによりセラミック基材上にスプレー
した。スラリー粘度が本発明の範囲外の比較品1のもの
ではボタが発生し、スプレーコートが実質的にできなか
った。その他のスプレーコートが可能であったものにつ
いてはスプレー後、室温で1昼夜自然乾燥を行って膜内
の水分量を0.5 %にしたのち、Arガス中で2050℃で3時
間焼成を行った。焼成したセラミックフィルターの膜の
表面状態を目視により観察し、表1に示した。
The prepared slurry was put in a spray gun,
It was sprayed onto the ceramic substrate with 1.5 kg / cm 2 of air. With the comparative product 1 having a slurry viscosity outside the range of the present invention, fluttering occurred and spray coating was substantially impossible. Other spray coats that were possible were spray-dried and then naturally dried at room temperature for one day to adjust the water content in the film to 0.5%, and then baked in Ar gas at 2050 ° C. for 3 hours. The surface condition of the film of the fired ceramic filter was visually observed and shown in Table 1.

【0018】本発明品1〜6は、目視上では均質な外観
を呈していた。それに対しスラリー粘度が本発明外の比
較品2のものでは、至るところにポアが見られ不均質な
外観を呈していた。本発明品1〜6及び比較品2の試料
の外表面に対し、軸方向に上端から15mm、50mm、85mmの
3点を選び、更に軸の反対側の同じ高さの3点を選ん
だ。これらの合計6点に対し、倍率40倍の拡大鏡にて直
径3mmの視野内でピンホール(直径0.1mm より小)およ
びボイド(直径0.1mm 以上)の個数を計測し、単位面積
あたりの平均個数(個/mm2)を算出し、表1に併記し
た。表1に見られるようにスラリー粘度が本発明の範囲
内のもの(本発明品1〜6)では、ピンホール密度およ
びボイド密度はそれぞれ1.1 、0.8 以下の小さい値を示
した。
The products 1 to 6 of the present invention showed a uniform appearance visually. On the other hand, in the case of the comparative product 2 having a slurry viscosity other than that of the present invention, pores were observed everywhere and the appearance was non-uniform. Three points of 15 mm, 50 mm, and 85 mm from the upper end in the axial direction were selected on the outer surfaces of the samples of the present invention products 1 to 6 and the comparative product 2, and three points of the same height on the opposite side of the shaft were selected. For these 6 points in total, the number of pinholes (smaller than 0.1 mm in diameter) and voids (0.1 mm or larger in diameter) were measured within a field of view of 3 mm in diameter using a magnifying glass with a magnification of 40, and the average per unit area was measured. The number (pieces / mm 2 ) was calculated and is also shown in Table 1. As shown in Table 1, in the case where the slurry viscosity was within the range of the present invention (invention products 1 to 6), the pinhole density and the void density showed small values of 1.1 and 0.8 or less, respectively.

【0019】〔実施例2〕スプレーコート法と濾過法に
よって得られる膜の特性比較を行うため、実施例1と同
様なSiC 基材を用い、濾過法およびスプレーコート法に
より試料を作成した。スプレーコート法では、実施例1
と同様な方法で調製した粘度3.5dPa-S のスラリーを用
いてSiC 基材にスプレーし、厚さ80μm の膜を形成して
乾燥した。乾燥後、2000℃のAr中で2時間焼成した。得
られた膜の気孔径を測定した結果、3μm の気孔径であ
ることが分かった。また表面のピンホール、ボイドの密
度を実施例1と同様な方法で評価した結果、いずれも0.
1 個/mm2以下であった。
[Example 2] In order to compare the characteristics of the films obtained by the spray coating method and the filtration method, the same SiC substrate as in Example 1 was used to prepare a sample by the filtration method and the spray coating method. In the spray coating method, Example 1
Using a slurry having a viscosity of 3.5 dPa-S prepared in the same manner as in (3), the SiC substrate was sprayed to form a film having a thickness of 80 μm and dried. After drying, it was baked in Ar at 2000 ° C. for 2 hours. As a result of measuring the pore diameter of the obtained membrane, it was found that the pore diameter was 3 μm. The surface pinhole and void densities were evaluated in the same manner as in Example 1, and as a result, both were found to be 0.
It was less than 1 piece / mm 2 .

【0020】濾過法では、前述のセラミック基材に膜を
付与するために、実施例1と同様な粒度配合からなるSi
C 粉末およびバインダーを水に分散したスラリーを調製
した。膜の厚みが80μm となるようにスラリーを2kg/c
m2の圧力で6時間濾過した。ろ過後試料を懸濁液から引
き上げたとき、一部膜部分の脱落が見られた。乾燥後、
実施例1と同様な方法を用いて、脱落部以外の部分で表
面のピンホール、ボイドの密度を測定した結果、ピンホ
ールでは21個/mm2、ボイドでは5.5個/mm2の密度が得ら
れ、スプレーコートに比較して不均質な膜しか得られな
かった。
In the filtration method, in order to form a film on the above-mentioned ceramic substrate, Si having the same particle size composition as in Example 1 was used.
A slurry having C powder and a binder dispersed in water was prepared. Add 2 kg / c of slurry so that the film thickness is 80 μm.
It was filtered at a pressure of m 2 for 6 hours. When the sample was pulled up from the suspension after filtration, a part of the membrane part was seen to fall off. After drying
Using the same method as in Example 1, pinhole surface portion other than the dropout portion, a result of the density of voids was measured, 21 / mm 2, a density of 5.5 pieces / mm 2 in the voids resulting in pinhole However, only a heterogeneous film was obtained as compared with the spray coating.

【0021】[0021]

【発明の効果】以上に説明したように、本発明のセラミ
ックフィルターの製造方法はセラミック粒子を分散した
スラリーの粘度を2〜5dPa-S に調整し、多孔質のセラ
ミック基材上にスプレーコートする方法を採用したこと
により、均質な膜を持つセラミックフィルターを大掛か
りな装置を用いることなく容易に製造できる利点があ
る。
As described above, according to the method for producing a ceramic filter of the present invention, the viscosity of the slurry in which the ceramic particles are dispersed is adjusted to 2 to 5 dPa-S, and spray coating is performed on the porous ceramic substrate. By adopting the method, there is an advantage that a ceramic filter having a homogeneous membrane can be easily manufactured without using a large-scale device.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 セラミック粒子を分散したスラリーの粘
度を2〜5dPa-S に調整し、該スラリーを多孔質のセラ
ミック基材上にスプレーコートし、乾燥後焼成すること
を特徴とするセラミックフィルターの製造方法。
1. A ceramic filter characterized in that the viscosity of a slurry in which ceramic particles are dispersed is adjusted to 2 to 5 dPa-S, the slurry is spray-coated on a porous ceramic substrate, dried and then fired. Production method.
【請求項2】 セラミック粒子およびセラミック基材が
SiC からなる請求項1に記載のセラミックフィルターの
製造方法。
2. The ceramic particles and the ceramic substrate are
The method of manufacturing a ceramic filter according to claim 1, which is made of SiC.
JP15819294A 1994-06-17 1994-06-17 Production of ceramic filter Pending JPH08932A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15819294A JPH08932A (en) 1994-06-17 1994-06-17 Production of ceramic filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15819294A JPH08932A (en) 1994-06-17 1994-06-17 Production of ceramic filter

Publications (1)

Publication Number Publication Date
JPH08932A true JPH08932A (en) 1996-01-09

Family

ID=15666285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15819294A Pending JPH08932A (en) 1994-06-17 1994-06-17 Production of ceramic filter

Country Status (1)

Country Link
JP (1) JPH08932A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6061019A (en) * 1983-09-13 1985-04-08 Asahi Glass Co Ltd Ceramic filter for dust collection
JPH01269480A (en) * 1988-04-21 1989-10-26 Iwao Jiki Kogyo Kk Production of bioreactor element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6061019A (en) * 1983-09-13 1985-04-08 Asahi Glass Co Ltd Ceramic filter for dust collection
JPH01269480A (en) * 1988-04-21 1989-10-26 Iwao Jiki Kogyo Kk Production of bioreactor element

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