JPH0894466A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPH0894466A JPH0894466A JP25426294A JP25426294A JPH0894466A JP H0894466 A JPH0894466 A JP H0894466A JP 25426294 A JP25426294 A JP 25426294A JP 25426294 A JP25426294 A JP 25426294A JP H0894466 A JPH0894466 A JP H0894466A
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- semiconductor pressure
- container
- press
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 239000000853 adhesive Substances 0.000 claims abstract description 8
- 230000001070 adhesive effect Effects 0.000 claims abstract description 8
- 230000005587 bubbling Effects 0.000 abstract 1
- 239000007788 liquid Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000009189 diving Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は半導体圧力センサに関す
るものであり、特に１気圧以上の圧力を測定するのに有
効な半導体圧力センサである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor pressure sensor, and more particularly to a semiconductor pressure sensor effective for measuring a pressure of 1 atm or more.
【０００２】[0002]
【従来の技術】圧力センサは種々の用途があるが、近
年、水深を測定する用途が増えているスキューバーダイ
ビングに使用する腕時計には水深計を付加したものが増
えている。圧力を測定するために多くのセンサが開発さ
れているが、本発明はセンサにピエゾ抵抗効果を利用し
た半導体圧力センサに関するものである。2. Description of the Related Art Pressure sensors have various uses, but in recent years, wristwatches used for scuba diving, which have been increasingly used for measuring water depth, have a water depth gauge added. Although many sensors have been developed to measure pressure, the present invention relates to a semiconductor pressure sensor that utilizes the piezoresistive effect in the sensor.
【０００３】図１は半導体圧力センサの構造図で断面図
である。図２は容器とボンデイングピンの圧入部の拡大
図である。ボンデイングピンと称しているが半導体圧力
センサチップと外部電極を電気的に接続できるものであ
ればよい。単にリ−ド線、端子でもよい。FIG. 1 is a sectional view showing the structure of a semiconductor pressure sensor. FIG. 2 is an enlarged view of the press-fitting portion of the container and the bonding pin. Although referred to as a bonding pin, it may be any as long as it can electrically connect the semiconductor pressure sensor chip and the external electrode. It may be simply a lead wire or a terminal.
【０００４】容器１には複数のボンデイングピン３が圧
入により組み立てられている。次に半導体圧力センサチ
ップ２が固定され、半導体圧力センサチップ２に形成さ
れた端子（図示せず）とボンデイングピンがワイヤー４
により接続される。次にシリコンゲル５を充填して表面
を被覆し、更にシリコンゴム６を被覆している。半導体
圧力センサチップは表面に４つのゲージ抵抗を拡散形成
したものである。本発明は半導体圧力センサチップの発
明ではないので詳細は省略する。容器１とボンデイング
ピン３の固定方法はいろいろあり、容器１の材質によっ
ても異なる。本発明では、容器１がセラミックスで圧入
の場合を想定しているが、容器とボンデイングピンの間
に空気が残る構造に適用できる。圧入はシールド部が少
なくてすみ小型化には適している。A plurality of bonding pins 3 are assembled into the container 1 by press fitting. Next, the semiconductor pressure sensor chip 2 is fixed, and the terminal (not shown) formed on the semiconductor pressure sensor chip 2 and the bonding pin are connected to the wire 4.
Connected by. Next, a silicon gel 5 is filled to cover the surface, and a silicon rubber 6 is further covered. The semiconductor pressure sensor chip is formed by diffusing four gauge resistors on the surface. Since the present invention is not an invention of a semiconductor pressure sensor chip, its details are omitted. There are various methods for fixing the container 1 and the bonding pin 3 and it depends on the material of the container 1. In the present invention, it is assumed that the container 1 is made of ceramic and press-fitted, but it can be applied to a structure in which air remains between the container and the bonding pin. Press-fitting is suitable for miniaturization because there are few shield parts.
【０００５】[0005]
【発明が解決しようとする課題】圧力センサには図１の
圧力Ｐがかかる。シリコンゲル５は半導体圧力センサチ
ップ２のゲージ抵抗が外部環境に露出していると耐環境
性、耐候性が悪くなるので、半導体圧力センサチップ２
やワイヤー４を保護するために充填している。シリコン
ゴム６は、シリコンゲル５が硬化後も表面に粘着性があ
りごみ等の不純物が付着するのでそれを防ぐためのもの
であり本発明には直接関係ないものである。The pressure P in FIG. 1 is applied to the pressure sensor. If the gauge resistance of the semiconductor pressure sensor chip 2 is exposed to the external environment, the silicon gel 5 has poor environment resistance and weather resistance.
It is filled to protect the wire 4 and the wire 4. The silicone rubber 6 is for sticking to the surface of the silicone gel 5 even after the silicone gel 5 is cured and for preventing impurities such as dust from adhering thereto, and is not directly related to the present invention.
【０００６】センサが加圧されその後圧力が解除される
とシリコンゲル中に気泡が発生するという問題が発生す
る。ボンデイングピンの圧入部から発生するのである
が、圧入部に残存している空気を除去するのは困難であ
った。又、圧入部にシリコンゲル５を充填することも困
難であった。（シリコンゲルは常温で７００ｃｐ）シリ
コンゲル５の中に気泡が発生すると圧力が半導体圧力セ
ンサチップに正確に伝わらず、正確な測定が困難になる
のである。本発明の目的は、センサが加圧されその後圧
力が解除されるとシリコンゲル中に気泡が発生するのを
防ぐことにある。When the pressure is applied to the sensor and then the pressure is released, a problem occurs that bubbles are generated in the silicon gel. Although it is generated from the press-fitting part of the bonding pin, it was difficult to remove the air remaining in the press-fitting part. It was also difficult to fill the silicon gel 5 in the press-fitting portion. (Silicon gel is 700 cp at room temperature) When bubbles are generated in the silicon gel 5, the pressure is not accurately transmitted to the semiconductor pressure sensor chip, which makes accurate measurement difficult. It is an object of the present invention to prevent the formation of bubbles in the silicon gel when the sensor is pressurized and then released.
【０００７】[0007]
【課題を解決するための手段】半導体圧力センサ容器に
ボンデイングピンをを圧入して固定し、半導体圧力セン
サチップとボンデイングピンをワイヤボンドにより接続
し、そのうえにシリコンゲルを被覆してなる半導体圧力
センサにおいて、半導体圧力センサ容器にボンデイング
ピンを圧入したものを浸透性のある嫌気性接着剤の中に
浸漬して空気と浸透性のある嫌気性接着剤を置換し、そ
の後洗浄して組立をする。In a semiconductor pressure sensor in which a bonding pin is press-fitted and fixed in a semiconductor pressure sensor container, the semiconductor pressure sensor chip and the bonding pin are connected by wire bond, and silicon gel is further coated on the semiconductor pressure sensor chip. , A semiconductor pressure sensor container into which a bonding pin is press-fitted is immersed in a permeable anaerobic adhesive to replace air with the permeable anaerobic adhesive, and then washed and assembled.
【０００８】[0008]
【実施例】容器１にボンデイングピン３を圧入したもの
をバスケットに入れ浸透性のある嫌気性含浸液に入れ
る。例えばロックタイト社の含浸液（PMS-10)（１〜５
ｃｐ）を使用する。全体をタンクに入れ１０分ほど真空
にする。（４０mmHg以下）この間にピンホールや隙間か
ら空気が泡となって排出され、常圧に戻すと代わりに含
浸液が充填される。タンクから取り出し表面の含浸液を
取り除き（遠心振り切り等の方法でよい）洗浄する。表
面の含浸液は除去され、隙間に充填された嫌気性の含浸
液は硬化する。容器１はセラミックスに限定されず、プ
ラスチクスでも良い。EXAMPLE A container 1 into which a bonding pin 3 is press-fitted is put in a basket and put in an anaerobic impregnating liquid having permeability. For example, Loctite impregnating solution (PMS-10) (1-5
cp) is used. Put the whole in a tank and apply a vacuum for about 10 minutes. (40 mmHg or less) During this time, air is discharged as bubbles from pinholes and gaps, and when the pressure is returned to normal pressure, the impregnating liquid is filled instead. Remove from the tank and remove the impregnating solution on the surface (method such as centrifuge shaking may be used) for washing. The impregnating liquid on the surface is removed, and the anaerobic impregnating liquid filled in the gap is cured. The container 1 is not limited to ceramics and may be plastics.
【０００９】[0009]
１．圧入部の隙間の空気が排除され、隙間に接着剤が充
填されるので、圧力センサに圧力がかかりその後常圧に
戻っても気泡が発生することがない。 ２．容器にピンホールが存在してもピンホールの中に接
着剤が充填されるので１と同様な効果がある。 ３．圧入部に接着剤が充填されて固定されるので圧入部
が補強でき、圧入に関する精度がラフでよい。1. Since air in the gap of the press-fitting portion is removed and the gap is filled with the adhesive, no bubbles are generated even if pressure is applied to the pressure sensor and then the pressure returns to normal pressure. 2. Even if there are pinholes in the container, since the adhesive is filled in the pinholes, the same effect as 1 is obtained. 3. Since the press-fitting part is filled with the adhesive and fixed, the press-fitting part can be reinforced, and the accuracy of press-fitting can be rough.
【図１】図１は半導体圧力センサの構造図で断面図であ
る。FIG. 1 is a cross-sectional view showing a structure of a semiconductor pressure sensor.
【図２】図２は容器とボンデイングピンの圧入部の拡大
図である。FIG. 2 is an enlarged view of a press-fitting portion of a container and a bonding pin.
１ 容器 ２ 半導体圧力センサチップ ３ ボンデイングピン ４ ワイヤー ５ シリコンゲル ６ シリコンゴム 1 Container 2 Semiconductor Pressure Sensor Chip 3 Bonding Pin 4 Wire 5 Silicon Gel 6 Silicon Rubber
Claims (1)
を固定し、半導体圧力センサチップとボンデイングピン
をワイヤボンドにより接続し、そのうえにシリコンゲル
を被覆してなる半導体圧力センサにおいて、半導体圧力
センサ容器にボンデイングピンを固定したものを浸透性
のある嫌気性接着剤の中に浸漬して空気と浸透性のある
嫌気性接着剤を置換し、その後洗浄して組立することを
特徴とする半導体圧力センサ。1. A semiconductor pressure sensor in which a bonding pin is fixed to a semiconductor pressure sensor container, the semiconductor pressure sensor chip and the bonding pin are connected by wire bond, and a silicon gel is further coated on the bonding pin to the semiconductor pressure sensor container. A semiconductor pressure sensor, characterized in that a fixed one is immersed in a permeable anaerobic adhesive to replace air with the permeable anaerobic adhesive, and then washed and assembled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25426294A JP2859820B2 (en) | 1994-09-22 | 1994-09-22 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25426294A JP2859820B2 (en) | 1994-09-22 | 1994-09-22 | Semiconductor pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0894466A true JPH0894466A (en) | 1996-04-12 |
| JP2859820B2 JP2859820B2 (en) | 1999-02-24 |
Family
ID=17262538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25426294A Expired - Lifetime JP2859820B2 (en) | 1994-09-22 | 1994-09-22 | Semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2859820B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003062779A1 (en) * | 2002-01-18 | 2003-07-31 | Hitachi, Ltd. | Pressure sensor, flowmeter electronic component, and method for manufacturing the same |
| JP2005523430A (en) * | 2002-04-18 | 2005-08-04 | アンスティテュ フランセ デュ ペトロール | Device for measuring the pressure in an internal combustion engine, particularly in a combustion chamber |
-
1994
- 1994-09-22 JP JP25426294A patent/JP2859820B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003062779A1 (en) * | 2002-01-18 | 2003-07-31 | Hitachi, Ltd. | Pressure sensor, flowmeter electronic component, and method for manufacturing the same |
| US7260992B2 (en) | 2002-01-18 | 2007-08-28 | Hitachi, Ltd. | Pressure sensor, flowmeter electronic component, and method for manufacturing the same |
| JP2005523430A (en) * | 2002-04-18 | 2005-08-04 | アンスティテュ フランセ デュ ペトロール | Device for measuring the pressure in an internal combustion engine, particularly in a combustion chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2859820B2 (en) | 1999-02-24 |
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