JPH0898563A - Multiphase ac driven electrostatic actuator - Google Patents

Abstract

PURPOSE: To obtain a multiple AC driven electrostatic actuator in which a four-phase AC voltage is applied to an electrode in a first member and to an electrode in a second member, which reduces a torque ripple and simplifies the circuitry of a power- supply circuit. CONSTITUTION: A multiple AC-driven electrostatic actuator is provided with a first member in which first group strip electrodes are buried in an insulator at a prescribed pitch and with a second member which is arranged so as to be faced with the first member and in which second group strip electrodes are buried in an insulator at a prescribed pitch. In the electrostatic actuator, multiphase AC voltages are applied respectively to the first group strip electrodes and to the second group strip electrodes and one or both of the first member and the second member are moved by the Coulomb force due to static electricity between the first member and the second member. Then, the electrostatic actuator is provided with a four-phase AC voltage generation device 21 comprising four single-phase power supplies one end of which is grounded and which are bridged mutually. A four-phase AC voltage which is output from the four-phase AC-voltage generation device 21 is connected sequentially to the first group strip electrodes 2a1 to 2d3 and to the second-group strip electrodes 12a1 to 12d2 .

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-phase AC drive type electrostatic actuator, and more particularly to a 4-phase AC drive type electrostatic actuator driven by a 4-phase AC voltage.

[0002]

2. Description of the Related Art In recent years, such a multi-phase AC drive type electrostatic actuator has been developed, and in particular, a three-phase AC drive type electrostatic actuator has been developed by the present inventors.
It is proposed as JP-A-6-78566. Such a three-phase AC drive type electrostatic actuator has a stronger driving force than the conventional electrostatic actuator having a gap between the stator and the mover. (2) A three-phase AC power supply is sufficient, and in particular, a commercial power supply can be used. (3) The number of switching elements when driving the inverter can be minimized. Has the advantage.

[0003]

However, the above-described conventional three-phase AC drive type electrostatic actuator has a large torque ripple. Also, because the number of phases is small,
It is difficult to generate a sinusoidal potential distribution on the stator. Furthermore, high voltage is required and the use of transformers has been devised.

Further, the control law when driving with an inverter becomes complicated, and the currents supplied to the three electric wires must be controlled so as not to interfere with each other. There was such a problem. The present invention eliminates such problems, applies a four-phase AC voltage to the first member and the second member, reduces torque ripple, and further simplifies the configuration of the power supply circuit. An object is to provide an electrostatic actuator.

[0005]

In order to achieve the above object, the present invention provides a multi-phase AC drive type electrostatic actuator in which (A) an insulator is embedded with a first group of strip electrodes at a predetermined pitch. A first member that is present and is arranged to face the first member,
A second member in which a strip-shaped electrode of the second group is embedded at a predetermined pitch in an insulator, and a multi-phase AC voltage is applied to each of the strip-shaped electrode of the first group and the strip-shaped electrode of the second group, First
Due to the electrostatic Coulomb force between the first member and the second member, the first
A multi-phase AC drive type electrostatic actuator for moving one or both of a member and a second member, which has (a) four single-phase power sources grounded at one end and bridged with each other.
A phase alternating voltage generator, and (b) a four phase alternating voltage output from the four phase alternating voltage generator is sequentially connected to the strip electrodes of the first group and the strip electrodes of the second group. is there.

(I) Two four-phase AC voltage generators are provided, and the four-phase AC voltages output from the respective four-phase AC generators are respectively applied to the first group of strip electrodes and the second group of strip electrodes. It is designed to be connected individually. (Ii) A positive-phase four-phase AC voltage is sequentially applied to the first group of strip electrodes, and an opposite-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes.

(B) A first member in which a first group of strip-shaped electrodes is embedded in an insulator at a predetermined pitch, and a second group of strip-shaped electrodes arranged at a predetermined pitch in opposition to the first member. A second member embedded therein, and a multi-phase AC voltage is applied to each of the first group of strip electrodes and the second group of strip electrodes to generate an electrostatic Coulomb force between the first and second members. A multi-phase AC drive type electrostatic actuator for moving one or both of the first member and the second member,
(A) a first inverter circuit having a single-phase output, and (b) a first transformer connected to the first inverter circuit,
(C) a second inverter circuit having a single-phase output, and (d) a second transformer connected to the second inverter circuit,
(E) The output side coil of the first transformer has a first neutral point, and a first-phase AC voltage is applied between the first neutral point and one end of the output side coil. A third-phase AC voltage is provided between the neutral point and the other end of the output side coil, and a second neutral point is provided at the output side coil of the second transformer, and the second neutral point and the output side are provided. A second phase alternating voltage is generated across one end of the coil, and a fourth phase alternating voltage is generated between the second neutral point and the other end of the output coil,
A four-phase alternating current voltage generator in which the first neutral point and the second neutral point are grounded and bridged with each other, and (f) a four-phase alternating current output from the four-phase alternating current voltage generator. A voltage is sequentially connected to the strip electrodes of the first group and the strip electrodes of the second group.

(I) Two four-phase AC voltage generators are provided, and four 4-phase AC voltage generators output the four-phase AC voltage generators.
The phase alternating voltage is individually connected to the strip electrodes of the first group and the strip electrodes of the second group. (Ii) A positive-phase four-phase AC voltage is sequentially applied to the first group of strip electrodes, and an opposite-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes.

(C) A first member in which a first group of strip-shaped electrodes is embedded in an insulator at a predetermined pitch, and a second group of strip-shaped electrodes which are arranged so as to face the first member and have a predetermined pitch. A second member embedded therein, and a multi-phase AC voltage is applied to each of the first group of strip electrodes and the second group of strip electrodes to generate an electrostatic Coulomb force between the first and second members. A multi-phase AC drive type electrostatic actuator that moves one or both of the first member and the second member by:
(A) a three-phase output inverter circuit, (b) first and second transformers connected to the three-phase output inverter circuit, and (c) a first coil on the output side coil of the first transformer. 1 neutral point, a first phase AC voltage is applied between the first neutral point and one end of the output side coil, and a third phase is applied between the first neutral point and the other end of the output side coil. An AC voltage has a second neutral point in the output side coil of the second transformer, and a second phase AC voltage is applied between the second neutral point and one end of the output side coil. A four-phase AC voltage in which a fourth-phase AC voltage is generated between the neutral point and the other end of the output side coil, and the first neutral point and the second neutral point are grounded and bridged with each other. With a generator,
(D) The four-phase AC voltage output from the four-phase AC voltage generator is sequentially connected to the first group of strip electrodes and the second group of strip electrodes.

(I) Two four-phase AC voltage generators are provided, and the four-phase AC voltage generators output four signals.
The phase alternating voltage is individually connected to the strip electrodes of the first group and the strip electrodes of the second group. (Ii) A positive-phase four-phase AC voltage is sequentially applied to the first group of strip electrodes, and an opposite-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes.

(D) A first member in which a first group of strip-shaped electrodes are embedded in an insulator at a predetermined pitch, and a second member of the strip-shaped electrodes arranged at a predetermined pitch in opposition to the first member. A second member embedded therein, and a multi-phase AC voltage is applied to each of the first group of strip electrodes and the second group of strip electrodes to generate an electrostatic Coulomb force between the first and second members. A multi-phase AC drive type electrostatic actuator that moves one or both of the first member and the second member by:
(A) A four-phase AC voltage generator having two two-phase AC power sources, one end of which is grounded and which is bridged with each other, (b)
The four-phase AC voltage output from the four-phase AC voltage generator is sequentially connected to the strip electrodes of the first group and the strip electrodes of the second group.

(E) In the multi-phase AC drive type electrostatic actuator of (A), (B), (C) or (D) above,
The strip-shaped electrodes of the first group and the strip-shaped electrodes of the second group have two parallel front surface side wirings and back side wirings facing each other on the first member and the second member and having a predetermined interval. From the wiring, it is led to the surface side through the through hole,
The surface side wirings extend in a direction orthogonal to the respective wiring directions, and the front surface side wirings extend in a direction orthogonal to the respective wiring directions on the surface and are arranged in a comb-tooth shape which meshes with each other.

(F) The first member and the second member are sequentially laminated. (G) At least one of the first member and the second member is a rotating body. (H) At least one of the first member and the second member is arranged in a laminated shape including a rotating body.

[0014]

According to the present invention, as described above, the output from the four-phase AC voltage generator having various transformers for the first group of strip electrodes of the first member and the second group of strip electrodes of the second member. Since the four-phase AC voltage is applied, the torque ripple can be reduced and the power supply circuit configuration can be simplified.

By disposing two four-phase AC voltage generators and individually connecting them to the first group of strip electrodes of the first member and the second group of strip electrodes of the second member, the first member is formed. First of
The strip electrodes of the second group and the strip electrodes of the second group of the second member individually
It is possible to independently control the phase AC voltage generator, simplify the control law of the inverter, and easily set various control modes.

Further, the first group of strip electrodes of the first member and the second
On each of the strip-shaped electrodes of the second group of the member, two wires are arranged in a well-balanced manner on the front surface side wiring and the back surface side wiring, respectively,
Appropriate wiring can be provided by wiring from the back surface side wiring through the through hole. Further, a 4-phase AC voltage can be easily obtained by using a simple paired 2-phase AC power supply, and the power supply circuit configuration can be further simplified.

[0017]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a first embodiment of the present invention. As shown in this figure, a first group of strip-shaped electrodes 2 _a1 to 2 _d3 are embedded in a first member 1 made of an insulator at a predetermined pitch.
A second member 11 made of an insulator is arranged opposite to the first member 1, and a second group of strip-shaped electrodes 12 is provided in the second member 11.
_a1 to _12d2 are embedded at a predetermined pitch.

On the other hand, there is provided a four-phase AC voltage generator 13 (single-phase power sources sequentially have a phase difference of 90 °) output from four single-phase power sources whose one ends are grounded and bridged with each other. The four-phase AC voltage output from the four-phase AC voltage generator 13 is sequentially connected to the first group of strip electrodes 2 _a1 to 2 _d3 and the second group of strip electrodes 12 _{a1 to} 12 _d2 . Here, the first AC voltage output (phase 0 °) is applied to the strip electrodes 2 _a1 , 2 _a2 , 2 _a3 of the first group and the strip electrodes 12 _d1 , 12 of the second group.
Connect to _d2 and output the second AC voltage output (phase 90 °) to the first
Band electrodes 2 _b1 , 2 _b2 , 2 _b3 of group 2 and band electrode 1 of group 2
2 _c1 and 12 _c2 connected to the third AC voltage output (phase 18
0 °) is connected to the first group of strip electrodes 2 _c1 , 2 _c2 , 2 _c3 and the second group of strip electrodes 12 _b1 , 12 _b2 , and the fourth AC voltage output (phase 270 °) of the first group. Strip electrodes 2 _d1 , 2 _d2 , 2
and it is connected to the _d3 and the second group of strip-shaped electrodes 12 _a1, 12 _a2.

In this case, the first group of strip-shaped electrodes 2 _a1 ...
2 _d3 is the positive phase four-phase AC voltage, and the second group of strip electrodes 12
_{An antiphase} four-phase AC voltage is sequentially applied to _a1 to _12d2 . FIG. 2 is a plan view showing the arrangement of the four-phase electrodes in the first member showing the embodiment of the present invention, and the dotted line shows the back side wiring.

As shown in this figure, the first member 1 has a first
The strip-shaped electrodes 2 _{a1 to} 2 _{d2 of the} group are arranged as the effective electrode portion 8, and the strip-shaped electrodes 2 _a1 and 2 _a2 extend from the front surface side wiring 3 at right angles. The strip electrodes 2 _b1 and 2 _b2 are led out from the back surface side wiring 4 to the front surface side through the through holes 7 and extend in the right angle direction. The strip electrodes 2 _c1 and 2 _c2 extend from the front surface side wiring 5 at right angles. The strip electrodes 2 _d1 and 2 _d2 are led out from the rear surface side wiring 6 to the front surface side through the through holes 7 and extend in the right angle direction.

In this manner, the front surface side wirings 3 and 5 and the back surface side wirings 4 and 6 that face each other are connected to the respective strip electrodes to form an effective electrode portion 8. Therefore,
The first group of strip electrodes 2 _a1 to 2 _d3 of the first member 1 and the second member 1
By arranging two wirings on each of the front surface side wiring and the back surface side wiring in a well-balanced manner on each of the second group of strip electrodes 12 _{a1 to} 12 _d2 , and wiring from the back surface side wiring through through holes. , Appropriate wiring can be provided.

The second member 11 also has a four-phase electrode structure in which wiring is performed similarly. By applying a four-phase AC voltage to the electrodes thus configured, one or both of the first member 1 and the second member 11 are moved by the Coulomb force of static electricity between the first member 1 and the second member 11. be able to. FIG. 3 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a second embodiment of the present invention.

In this embodiment, two four-phase AC voltage generators 14 and 15 (four single-phase power supplies sequentially have a phase difference of 90 ° as in the first embodiment) are provided and a four-phase AC is provided. The voltage generator 14 is connected to the first group of strip electrodes 2 _a1 to 2 _a1 in the first member 1.
_The four-phase AC voltage generator 15 is connected to _d3 and the second member 11 is connected.
To the second group of strip electrodes 12 _{a1 to} 12 _d2 . That is, each of the first group of strip electrodes and the second group of strip electrodes is 4
The phase alternating voltage generators 14 and 15 are configured to individually supply voltages.

Here again, a positive-phase four-phase AC voltage is applied to the first group of strip electrodes 2 _a1 to 2 _d3 , and the second group of strip electrodes 12 _a1 to 1 is used.
An _antiphase four-phase AC voltage is sequentially applied to 2 _d2 . With such a configuration, various driving modes can be set by changing the voltages applied to the first member 1 and the second member 11, respectively, as compared with the first embodiment.

FIG. 4 is a block diagram of a multi-phase AC drive type electrostatic actuator showing a third embodiment of the present invention. In this embodiment, a single-phase output first inverter circuit 22;
A first transformer 23 connected to the first inverter circuit 22, a second inverter circuit 26 having a single-phase output, and a second transformer 27 connected to the second inverter circuit 26 are provided. The first inverter circuit 22 and the second inverter circuit are provided with a phase difference of 90 °. The output side coil 24 of the first transformer 23 has a first neutral point 25, and a first phase AC voltage (phase) between the first neutral point 25 and one end of the output side coil 24. 0 °), a third phase AC voltage (phase 180 °) between the first neutral point 25 and the other end of the output side coil 24, and to the output side coil 28 of the second transformer 27. A second neutral point 29 is provided, and a second phase AC voltage (phase 90 °) is applied between the second neutral point 29 and one end of the output side coil 28. A fourth-phase AC voltage (phase 270 °) is generated between the other ends of the output side coils 28, and the first neutral point 25 and the second neutral point 29 are grounded and bridged with each other. Phase AC voltage generator 21
Is equipped with.

Therefore, the four-phase AC voltage output from the four-phase AC voltage generator 21 is _supplied to the first group of strip electrodes 2 _a1 to 2 _d3 and the second group of strip electrodes in the same manner as in the first embodiment. The electrodes 12 _{a1 to} 12 _d2 are sequentially connected. Here, too, a positive-phase four-phase AC voltage is applied to the first group of strip electrodes 2 _a1 to 2 _d3 , and an opposite-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes 12 _{a1 to} 12 _d2. I have to.

FIG. 5 is a diagram showing a configuration example of a single-phase output inverter circuit in the embodiment of the present invention. As shown in this figure, the switch SW ₁ to the DC power source E ₁ (e.g., F
ET ₁ ) and the switch SW ₂ (for example, FET ₂ ) are connected in series, and the first output terminal O ₁ is derived from the connection point between the switch SW ₁ and the switch SW ₂ . A switch SW ₃ (for example, FET ₃ ) and a switch SW ₄ (for example, FET ₄ ) are connected in series to the DC power supply E ₁ , and a second output terminal is provided from a connection point between the switch SW ₃ and the switch SW _4. O ₂ has been derived. Also, switch S
W ₁ is the gate G ₁ , switch SW ₂ is the gate G ₂ , switch SW ₃ is the gate G ₃ , and switch SW ₄ is the gate G _4.
Each switch SW is switched by the pulse input to each gate. The input pulse to each gate can be controlled by a controller (not shown) so that a desired output voltage can be obtained at the output terminal. Note that C ₁ is a surge absorbing capacitor that is generated when the switch SW is turned on and off.

FIG. 6 shows another two-phase output in the embodiment of the present invention.
It is a figure which shows the structural example of the inverter circuit of a force. In this figure
As shown, switch SW_Five(For example, FET_Five) And Su
Switch SW₆(For example, FET₆) Are connected in series,
The switch SW_FiveAnd switch SW₆DC at the connection point with
Power E₂Is connected to one end of the₇(Example
For example, FET₇) And switch SW₈(For example, FE
T₈) Is connected in series, and its switch SW₇And switch
Ji SW₈DC power supply E at the connection point with₂The other end of is connected
There is. Furthermore, the inductance L₁Shown in FIG. 5 through
A switching circuit similar to is configured. That is,
Switch SW₉(For example, FET₉) And switch SW _Ten
(For example, FET_Ten) Is connected in series and its switch
SW₉And switch SW _TenFrom the connection point with the first output terminal
O₃Has been derived. Also, switch SW₁₁(example
For example, FET₁₁) And switch SW₁₂(For example, FET₁₂)
Are connected in series, and the switch SW₁₁And switch SW₁₂When
From the connection point of the second output terminal O_FourHas been derived. Well
Switch SW_FiveIs the gate G_Five, Switch SW₆Is
G₆, Switch SW₇Is the gate G₇, Switch SW
₈Is the gate G₈, Switch SW₉Is the gate G₉, Switch
Ji SW_TenIs the gate G_Ten, Switch SW₁₁Is the gate G₁₁,
Switch SW₁₂Is the gate G₁₂Have each of
Each switch SW is switched by the pulse input to the gate.
It will be etched. Here, the gate G_Five~ G₈Control of
DC power source E₂The polarity of can be switched,
The output DC voltage is the inductance L₁Through the
Gate G of the ching circuit₉~ G₁₂Control of the first
Output terminal O₃, Second output terminal O_FourTo the desired output voltage
Obtainable.

FIG. 7 is a block diagram of a multi-phase AC drive type electrostatic actuator showing a fourth embodiment of the present invention. In this embodiment, four-phase AC voltage generators 31 and 32 having two single-phase output inverter circuits are provided, and the four-phase AC voltage generator 31 is provided in the first member 1 in the first group of strip electrodes 2 _a1. ˜2 _d3 , and the four-phase AC voltage generator 32 is connected to the second group of strip electrodes 12 _{a1 to} 12 _d2 in the second member 11. That is,
The four-phase AC voltage generators 31 and 32 individually supply the four-phase AC voltage to the first group of strip electrodes and the second group of strip electrodes, respectively.

Here again, a positive-phase four-phase AC voltage is applied to the strip electrodes 2 _a1 to 2 _d3 of the first group, and the strip electrodes 12 _a1 to 1 of the second group.
An _antiphase four-phase AC voltage is sequentially applied to 2 _d2 . With this configuration, as compared with the third embodiment, the first group of strip-shaped electrodes 2 _a1 to 2 _d3 and the second group of the first member 1 are formed.
Various drive modes can be set by changing the voltages applied to the strip-shaped electrodes 12 _{a1 to} 12 _d2 of the second group of the member 11, respectively.

FIG. 8 is a block diagram of a multi-phase AC drive type electrostatic actuator showing a fifth embodiment of the present invention. In this embodiment, a three-phase output inverter circuit 42 is provided as the four-phase AC voltage generator 41, and a first transformer 43 and a second transformer 44 are connected to the three-phase output inverter circuit 42. To do. The output side coil 45 of the first transformer 43
Has a first neutral point 46 between the first neutral point 46 and one end of the output side coil 45.
), A third phase AC voltage (phase 180 °) between the first neutral point 46 and the other end of the output side coil 45, and the second phase
The output coil 47 of the transformer 44 has a second neutral point 48.
And a second phase AC voltage (phase 90 °) between the second neutral point 48 and one end of the output side coil 47, and the other end of the second neutral point 48 and the output side coil 47. A fourth phase AC voltage (phase 270 °) is generated between the first neutral point 4 and
6 and the second neutral point 48 are grounded and bridged to each other.

The four-phase AC voltage output from the four-phase AC voltage generator 41 is sequentially connected to the first group of strip electrodes 2 _a1 to 2 _d3 and the second group of strip electrodes 12 _{a1 to} 12 _d2. It was done. Here again, the first group of strip electrodes 2 _a1 ~
2 _d3 is the positive phase four-phase AC voltage, and the second group of strip electrodes 12
_{An antiphase} four-phase AC voltage is sequentially applied to _a1 to _12d2 .

FIG. 9 is a diagram showing a configuration example of a three-phase output inverter circuit in the embodiment of the present invention. As shown in this figure, the DC power source E ₃ has a switch SW ₂₁ (for example, F
ET ₂₁ ) and the switch SW ₂₂ (for example, FET ₂₂ ) are connected in series, and the first output terminal O ₁₁ is derived from the connection point between the switch SW ₂₁ and the switch SW ₂₂ . A switch SW ₂₃ (for example, FET ₂₃ ) and a switch SW ₂₄ (for example, FET ₂₄ ) are connected in series to the DC power source E ₃ , and a second output terminal is provided from a connection point between the switch SW ₂₃ and the switch SW _24. O ₁₂ has been derived. In addition, DC power supply E
_A switch SW ₂₅ (for example, FET ₂₅ ) and a switch SW ₂₆ (for example, FET ₂₆ ) are connected in series to 3, and a third output terminal O ₁₃ is derived from a connection point between the switch SW ₂₅ and the switch SW _26. ing. Further, the switch SW ₂₁ is the gate G ₂₁ , the switch SW ₂₂ is the gate G ₂₂ , and the switch SW _23.
Has a gate G ₂₃ , the switch SW ₂₄ has a gate G ₂₄ , the switch SW ₂₅ has a gate G ₂₅ , and the switch SW ₂₆ has a gate G _26. Each switch SW is switched by a pulse input to each gate. It The input pulse to each gate can be controlled by a controller (not shown) so that a desired output voltage can be obtained at the output terminal. Note that C ₂ is a surge absorbing capacitor that occurs when the switch SW is turned on and off.

FIG. 10 shows another three phases in the embodiment of the present invention.
It is a figure which shows the structural example of the inverter circuit of an output. This figure
As shown in, switch SW₃₁(For example, FET₃₁)When
Switch SW₃₂(For example, FET₃₂) Are connected in series
That switch SW₃₁And switch SW₃₂At the connection point with
DC power supply E_FourIs connected to one end of the₃₃
(For example, FET₃₃) And switch SW₃₄(For example, FE
T₃₄) Is connected in series, and its switch SW₃₃And switch
Ji SW₃₄DC power supply E at the connection point with_FourThe other end of is connected
There is. Furthermore, the inductance L₂Shown in FIG. 9 through
A switching circuit similar to is configured. That is,
Switch SW₃₅(For example, FET₃₅) And switch SW ₃₆
(For example, FET₃₆) Is connected in series and its switch
SW₃₅And switch SW ₃₆From the connection point with the first output terminal
O_{twenty one}Has been derived. Also, switch SW₃₇(example
For example, FET₃₇) And switch SW₃₈(For example, FET₃₈)
Are connected in series, and the switch SW₃₇And switch SW₃₈When
From the connection point of the second output terminal O_{twenty two}Has been derived. Well
Switch SW₃₉(For example, FET₃₉) And switch S
W₄₀(For example, FET₄₀) Are connected in series and switch
SW₃₉And switch SW₄₀The third output terminal from the connection point with
O_{twenty three}Has been derived. Also, switch SW₃₁Is the gate
G₃₁, Switch SW₃₂Is the gate G₃₂, Switch SW₃₃Is
Gate G₃₃, Switch SW₃₄Is the gate G₃₄, Switch S
W₃₅Is the gate G₃₅, Switch SW₃₆Is the gate G₃₆, Sui
Switch SW₃₇Is the gate G₃₇, Switch SW₃₈Is the gate
G₃₈, Switch SW₃₉Is the gate G₃₉, Switch SW₄₀Is
Gate G₄₀Have been input to each gate
Each switch SW is switched by the pulse
It Here, the gate G₃₃~ G₃₄Direct current by the control of
Power E_FourThe polarity of the
The pressure is the inductance L₂The switching circuit via
G₃₅~ G₄₀Control of the first output terminal O_{twenty one},
Second output terminal O_{twenty two}, Third output terminal O _{twenty three}Desired output to
The voltage can be obtained.

FIG. 11 is a block diagram of a multi-phase AC drive type electrostatic actuator showing a sixth embodiment of the present invention. In this embodiment, four-phase AC voltage generators 52 and 53 having a three-phase output inverter circuit are provided, and the four-phase AC voltage generator 52 is connected to the first group of strip electrodes 2 _a1 to 2 a in the first member 1. Connected to _d3 , the four-phase AC voltage generator 53 is connected to the second group of strip electrodes _12a1 to _12d2 in the second member 11. That is,
The four-phase AC voltage generators 52 and 53 individually supply the four-phase AC voltage to the first group of strip electrodes and the second group of strip electrodes, respectively.

Also in this case, a positive-phase four-phase AC voltage is applied to the first group of strip electrodes 2 _a1 to 2 _d3 , and the second group of strip electrodes 12 _a1 to 1 is used.
An _antiphase four-phase AC voltage is sequentially applied to 2 _d2 . FIG. 12 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a seventh embodiment of the present invention.

In this embodiment, two-phase AC power supplies 61 and 65 are used.
Installed as a pair, and the transformer 6 to the two-phase AC power supply 61.
Connect two. The output side coil 63 of the transformer 62 is provided with a neutral point 64, and the neutral point 64 and the output side coil 63 are provided.
The first-phase AC voltage (phase 0 °) is generated between the one ends of the two, and the third-phase AC voltage (phase 180 °) is generated between the neutral point 64 and the other end of the output side coil 63. Further, the transformer 66 is connected to the two-phase AC power supply 65. The output side coil 67 of the transformer 66 is provided with a neutral point 68, and a second-phase AC voltage (phase 90 °) is applied between the neutral point 68 and one end of the output side coil 67.
A fourth-phase AC voltage (phase 270 °) is generated between the neutral point 68 and the other end of the output side coil 67.

The neutral points 64 and 68 are grounded and bridged with each other. Therefore, a four-phase AC voltage output from the four-phase AC voltage generator is sequentially connected to the first group of strip electrodes 2 _a1 to 2 _d3 and the second group of strip electrodes 12 _{a1 to} 12 _d2. Is. In this case as well, a positive-phase four-phase AC voltage is applied to the first group of strip electrodes 2 _a1 to 2 _d3 .
A four-phase AC voltage of opposite phase is sequentially applied to the strip electrodes _12a1 to _12d2 of the group.

FIG. 13 is a block diagram of a multi-phase AC drive type electrostatic actuator showing a seventh embodiment of the present invention. In this embodiment, similar to the sixth embodiment, the two-phase AC power supply 61
And 65 are installed in pairs, and the neutral points are 64 and 68, respectively.
Are provided to output a four-phase AC voltage, and output from the four-phase AC voltage generator is the first
The strip electrodes 2 _a1 to 2 _d3 of the group are sequentially connected.

On the other hand, a separately arranged four-phase AC voltage generator having the same structure as this is provided. That is, the two-phase AC power supplies 71 and 75 are installed in a pair, and the transformer 72 is connected to the two-phase AC power supply 71. The output side coil 73 of the transformer 72 is provided with a neutral point 74, and the neutral point 74
And a first-phase AC voltage (phase 0
), A third phase AC voltage (phase 180 °) is generated between the neutral point 74 and the other end of the output side coil 73. Also,
The transformer 76 is connected to the two-phase AC power supply 75. The output side coil 77 of the transformer 76 is provided with a neutral point 78, and a second phase AC voltage (phase 90 °) is applied between the neutral point 78 and one end of the output side coil 77 as the neutral point 78. Output side coil 77
A fourth-phase AC voltage (phase 270 °) is generated between the other ends of the.

The neutral points 74 and 78 are grounded and bridged with each other. The two-phase AC power sources 61 and 65
A four-phase AC voltage output from a four-phase AC voltage generator having the above is sequentially connected to the strip electrodes 2 _a1 to 2 _d3 of the first group,
On the other hand, the four-phase AC voltage output from the four-phase AC voltage generator having the two-phase AC power supplies 71 and 75 is sequentially connected to the strip electrodes _12a1 to _12d2 of the second group.

Here again, a positive-phase four-phase AC voltage is applied to the strip electrodes 2 _a1 to 2 _d3 of the first group, and the strip electrodes 12 _a1 to 1 of the second group.
An _antiphase four-phase AC voltage is sequentially applied to 2 _d2 . With this configuration, as compared with the sixth embodiment, the first group of strip-shaped electrodes 2 _a1 to 2 _d3 and the second member of the first member 1 are formed.
Various drive modes can be set by changing the voltage applied to the strip-shaped electrodes 12 _{a1 to} 12 _d2 of the second group of the member 11 by the individual 4-phase AC voltage generators.

In the above-described multi-phase AC drive type electrostatic actuator, generally, the first member 1 is a rectangular flat plate, and the second member is
The member 11 is often configured as a rectangular flat plate that faces the member 11, but the following various modifications are possible. FIG. 14 is an external perspective view of a multi-phase AC drive type electrostatic actuator showing an eighth embodiment of the present invention, which is constructed by stacking actuators in order to increase the output of the actuator in the above-mentioned embodiment. .

In this embodiment, reference numeral 80 denotes a stator, which comprises a plurality of stages of first members 81, and these first members 81 are integrated by a connecting body 82. A strip electrode (not shown) shown in the above embodiment is formed on the first member 81, and the four-phase AC voltage shown in the above embodiment is applied to the strip electrode. For example, the container 83 may be provided on the rear surface of the connecting body 82, and the four-phase AC voltage generator (not shown) shown in the above embodiment may be incorporated therein.

On the other hand, reference numeral 85 is a mover, which has a plurality of second stages.
The second member 86 is composed of the members 86, and the second member 86 of the members 86
And the second member 86 is inserted between the first members 81, respectively. The four-phase AC voltage generator (not shown) shown in the above embodiment is connected to the second member 86,
A four-phase AC voltage is applied. For example, the container 88 may be provided on the rear surface of the coupling body 87 and the 4-phase AC voltage generator may be incorporated therein.

FIG. 15 is a partial front sectional view of an electrostatic actuator showing a ninth embodiment of the present invention. Reference numeral 91 is a disk-shaped stator as the first member, and the first member 9
1 is formed with strip-shaped electrodes 93 embedded in an insulator 92 and arranged radially. On the other hand, a disk-shaped moving element 95 as the second member is provided with the same central axis. Although not shown, the moving element 95 faces the strip-shaped electrodes 93 arranged in a radial pattern and faces the disk-shaped insulator 96.
Strip-shaped electrodes (not shown) radially arranged are formed.

Therefore, the strip-shaped electrodes 93 radially arranged on the first member 91 are provided with the four-phase AC voltage generator 98 of the present invention.
The four-phase AC voltage from the second member 95 as the second member.
The same applies to the strip-shaped electrodes (not shown) that are arranged radially.
The phase AC voltage generator 99 is connected. In this way, by applying the four-phase AC voltage to each of the radially arranged strip electrodes, the disc-shaped moving element 95 as the second member can be rotationally driven.

FIG. 16 is a partially cutaway perspective view of an electrostatic actuator showing a tenth embodiment of the present invention. In this embodiment, a shaft 104 is planted in the center of a disk-shaped stator 101 as a first member, and a disk-shaped mover 105 as a second member is provided around this shaft 104. The disk-shaped stator 101 and the disk-shaped moving element 105 are formed in multiple layers.

Similarly to the above, the disk-shaped insulator 1 is arranged so as to face the disk-shaped stator 101 and the disk-shaped moving element 105.
The strip-shaped electrodes 107 arranged radially are formed on 06.
A multi-phase AC voltage is applied to each of these electrodes from the 4-phase AC voltage generator 108 and the 4-phase AC voltage generator 109 shown in the above-described embodiment. With this configuration, the output of the actuator can be increased.

FIG. 17 is a perspective view of an electrostatic actuator showing the 11th embodiment of the present invention. As shown in this figure,
In this embodiment, the cylindrical stator 11 as the first member
At 0, a plurality of wound electrodes 111 are formed which are insulated from each other and are arranged in a predetermined direction and at predetermined intervals. A tubular mover 115 as a second member is attached to the stator 110, and the mover 115 has a wound electrode similar to that described above (not shown in detail, but has the same configuration as the above embodiment). Are formed). Then, the spirally wound electrode 111 of the stator 110 and the spirally wound electrode of the mover 115 (though not shown in detail, it has the same configuration as the above embodiment).
The four-phase AC voltage generators (not shown) 112 and 117, which are similar to those described above, are connected to each of these terminals, and a four-phase AC voltage is applied to each of them.

Therefore, an electrostatic Coulomb force is generated between the stator 110 and the mover 115, and as described above, the mover 1 is moved.
15 is slidably driven in the axial direction of the stator 110, that is, in the direction of the arrow. FIG. 18 is a perspective view of an electrostatic actuator showing a twelfth embodiment of the present invention. As shown in this figure,
In this embodiment, the cylindrical stator 12 as the first member is used.
A plurality of strip-shaped electrodes 121, which are insulated from each other and extend in the predetermined direction and at the predetermined intervals and which extend in the axial direction, are formed at 0. A tubular mover 125 as a second member is attached to the cylindrical stator 120, and the tubular mover 125 is attached.
A wound electrode (not shown) similar to that described above is formed on the substrate. Then, four-phase AC voltage generators 122 and 127 are connected to the strip electrodes 121 of the stator 120 and the spiral electrodes (not shown) of the mover 125, respectively, and a multi-phase AC voltage is applied to each.

Therefore, an electrostatic Coulomb force is generated between the cylindrical stator 120 and the tubular moving element 125, and the tubular moving element 125 is rotationally driven as indicated by the arrow. The present invention is not limited to the above-mentioned embodiments, and various modifications can be made based on the spirit of the present invention, and these modifications are not excluded from the scope of the present invention.

[0053]

As described in detail above, according to the present invention, the following effects can be obtained. According to the present invention, as described above, the four-phase alternating current voltage output from the four-phase alternating current voltage generator having the transformers in the first group of strip-shaped electrodes of the first member and the second group of strip-shaped electrodes of the second member. Since the voltage is applied, the torque ripple can be reduced and the power supply circuit configuration can be simplified.

By disposing two four-phase AC voltage generators and connecting them individually to the strip electrodes of the first group of the first member and the strip electrodes of the second group of the second member, the first member First of
The strip electrodes of the second group and the strip electrodes of the second group of the second member individually
It is possible to independently control the phase AC voltage generator, simplify the control law of the inverter, and easily set various control modes.

Furthermore, the first group of strip-shaped electrodes of the first member and the second
On each of the strip-shaped electrodes of the second group of the member, two wires are arranged in a well-balanced manner on the front surface side wiring and the back surface side wiring, respectively,
Appropriate wiring can be provided by wiring from the back surface side wiring through the through hole. Further, a four-phase AC voltage can be easily obtained by using a simple paired two-phase AC power supply, and the power supply circuit configuration can be further simplified.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a first embodiment of the present invention.

FIG. 2 is a plan view showing the arrangement of four-phase electrodes in the first member showing the embodiment of the present invention.

FIG. 3 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a second embodiment of the present invention.

FIG. 4 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a third embodiment of the present invention.

FIG. 5 is a diagram showing a configuration example of a single-phase output inverter circuit according to an embodiment of the present invention.

FIG. 6 is a diagram showing a configuration example of another single-phase output inverter circuit in the embodiment of the present invention.

FIG. 7 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a fourth embodiment of the present invention.

FIG. 8 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a fifth embodiment of the present invention.

FIG. 9 is a diagram showing a configuration example of a three-phase output inverter circuit according to an embodiment of the present invention.

FIG. 10 is a diagram showing a configuration example of another three-phase output inverter circuit in the embodiment of the present invention.

FIG. 11 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a sixth embodiment of the present invention.

FIG. 12 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a seventh embodiment of the present invention.

FIG. 13 is a configuration diagram of a multi-phase AC drive type electrostatic actuator showing a seventh embodiment of the present invention.

FIG. 14 is an external perspective view of a multi-phase AC drive type electrostatic actuator showing an eighth embodiment of the present invention.

FIG. 15 is a partial front sectional view of an electrostatic actuator showing a ninth embodiment of the present invention.

FIG. 16 is a partially cutaway perspective view of an electrostatic actuator showing a tenth embodiment of the present invention.

FIG. 17 is a perspective view of an electrostatic actuator showing an eleventh embodiment of the present invention.

FIG. 18 is a perspective view of an electrostatic actuator showing a twelfth embodiment of the present invention.

[Explanation of symbols]

_DESCRIPTION OF _SYMBOLS 1 1st member 2 _{a1 to} 2 _d3 1st group belt-shaped electrode 3,5 Front side wiring 4,6 Back surface side wiring 7 Through hole 8 Effective electrode part 11 2nd member 12 _{a1 to} 12 _d2 2nd group belt-shaped electrode 13 , 14, 15, 21, 22, 22, 31, 32, 41, 9
9, 108, 109, 112, 117, 122, 127
Four-phase AC voltage generator 23,43 First transformer 24,28,45,47 Output side coil 25,46 First neutral point 26 Second inverter circuit 27,44 Second transformer 29,48 Second neutral point 42,44,62 Second output terminal 42,51,52 Three-phase output inverter circuit 61,65,71,75 Two-phase AC power supply 63,67,73,77 Output side coil 64, 68,74,78 Neutral point 66,72,76 Transformer 80 Stator 81 Multiple stage first member 82,87 Coupled body 83,88 Container 85 Mover 86 Multiple stage second member 91,101 First member (Disc-shaped stator) 92 Insulators 93, 107, 121 Strip electrodes 95, 105 Second member (disc-shaped mover) 96, 106 Disc-shaped insulator 104 Shaft 110, 120 First member ( Cylindrical stator) 11 a plurality of winding circular electrodes 115 and 125 tubular moving element

Claims (16)

[Claims] 1. A first member in which a first group of strip-shaped electrodes is embedded in an insulator at a predetermined pitch, and a second group of strip-shaped electrodes embedded in the insulator at a predetermined pitch so as to face the first member. A second member which is provided, and applies a multi-phase AC voltage to each of the first group of strip electrodes and the second group of strip electrodes,
A multi-phase AC drive type electrostatic actuator that moves one or both of the first member and the second member by an electrostatic Coulomb force between the first member and the second member, comprising: (a)
A four-phase AC voltage generator having four single-phase power sources whose one ends are grounded and bridged with each other, and (b) the four-phase AC voltage output from the four-phase AC voltage generator is the first group. A multi-phase AC drive type electrostatic actuator, which is sequentially connected to the strip electrodes and the second group of strip electrodes. 2. Providing two of the four-phase AC voltage generators,
4. The multi-phase alternating current according to claim 1, wherein the four-phase alternating current voltages output from the respective four-phase alternating current voltage generators are individually connected to the first group of strip electrodes and the second group of strip electrodes. Driven electrostatic actuator. 3. A positive-phase four-phase AC voltage is applied to the first group of strip electrodes and a negative-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes. The described multi-phase AC drive type electrostatic actuator. 4. A first member in which a first group of strip-shaped electrodes is embedded in an insulator at a predetermined pitch, and a second group of strip-shaped electrodes embedded in the insulator at a predetermined pitch so as to face the first member. A second member which is provided, and applies a multi-phase AC voltage to each of the first group of strip electrodes and the second group of strip electrodes,
A multi-phase AC drive type electrostatic actuator that moves one or both of the first member and the second member by an electrostatic Coulomb force between the first member and the second member, comprising: (a)
A single-phase output first inverter circuit; (b) a first transformer connected to the first inverter circuit; (c) a single-phase output second inverter circuit; and (d) the first inverter circuit. A second transformer connected to the second inverter circuit; and (e) the first transformer.
Has a first neutral point in the output coil of the transformer of
The first phase AC voltage between the neutral point and one end of the output side coil,
A third phase AC voltage is provided between the first neutral point and the other end of the output side coil, and a second neutral point is provided at the output side coil of the second transformer. A second phase alternating voltage between the first point and the output side coil, and a fourth phase alternating voltage between the second neutral point and the other end of the output side coil. A neutral point of 2 and a 4-phase AC voltage generator that are grounded and bridged to each other, and (f) a 4-phase AC voltage output from the 4-phase AC voltage generator is applied to the strip electrodes of the first group. And a multi-phase AC drive type electrostatic actuator, which is sequentially connected to the second group of strip electrodes. 5. The two four-phase AC voltage generators are provided,
5. The multi-phase alternating current according to claim 4, wherein the four-phase alternating current voltages output from the respective four-phase alternating current voltage generators are individually connected to the first group of strip electrodes and the second group of strip electrodes. Driven electrostatic actuator. 6. The positive-phase four-phase AC voltage is applied to the first group of strip electrodes and the opposite-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes. The described multi-phase AC drive type electrostatic actuator. 7. A first member in which a first group of strip-shaped electrodes is embedded in an insulator at a predetermined pitch, and a second group of strip-shaped electrodes embedded in the insulator at a predetermined pitch so as to face the first member. A second member which is provided, and applies a multi-phase AC voltage to each of the first group of strip electrodes and the second group of strip electrodes,
A multi-phase AC drive type electrostatic actuator that moves one or both of the first member and the second member by an electrostatic Coulomb force between the first member and the second member, comprising: (a)
A three-phase output inverter circuit, and (b) first and second transformers connected to the three-phase output inverter circuit,
(C) The output side coil of the first transformer has a first neutral point, and the first phase AC voltage is applied between the first neutral point and one end of the output side coil. A third phase AC voltage between the neutral point and the other end of the output side coil, and a second neutral point in the output side coil of the second transformer, the second neutral point and the output side A second phase AC voltage is generated between one end of the coil, and a fourth phase AC voltage is generated between the second neutral point and the other end of the output side coil, and the first neutral point and the second neutral point are generated. And a four-phase AC voltage generator whose points are grounded and bridged to each other. (D) The four-phase AC voltage output from the four-phase AC voltage generator is the first
A multi-phase AC drive type electrostatic actuator, which is sequentially connected to a group of strip electrodes and a second group of strip electrodes. 8. Two of the four-phase AC voltage generators are provided,
8. The multi-phase alternating current according to claim 7, wherein the four-phase alternating current voltages output from the respective four-phase alternating current voltage generators are individually connected to the first group of strip electrodes and the second group of strip electrodes. Driven electrostatic actuator. 9. The positive-phase four-phase AC voltage is applied to the first group of strip electrodes and the opposite-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes. The described multi-phase AC drive type electrostatic actuator. 10. A first member in which a first group of strip-shaped electrodes is embedded in an insulator at a predetermined pitch, and a first group of strip-shaped electrodes which are arranged to face the first member and are embedded in the insulator at a predetermined pitch. The second group of electrodes, and a multi-phase AC voltage is applied to each of the first group of strip electrodes and the second group of strip electrodes, and the electrostatic Coulomb force between the first and second members is applied. A multi-phase AC drive type electrostatic actuator for moving one or both of the first member and the second member,
(A) A four-phase AC voltage generator having two two-phase AC power sources, one end of which is grounded and which is bridged with each other, (b)
A multi-phase AC drive type electrostatic actuator, wherein a 4-phase AC voltage output from the 4-phase AC voltage generator is sequentially connected to the strip electrodes of the first group and the strip electrodes of the second group. 11. Two of the four-phase AC voltage generators are provided, and four output signals from the four-phase AC voltage generators are provided.
11. A phase alternating voltage is individually connected to the strip electrodes of the first group and the strip electrodes of the second group, respectively.
The described multi-phase AC drive type electrostatic actuator. 12. The positive-phase four-phase AC voltage is applied to the first group of strip electrodes and the opposite-phase four-phase AC voltage is sequentially applied to the second group of strip electrodes. The described multi-phase AC drive type electrostatic actuator. 13. The first group of strip-shaped electrodes and the second group of strip-shaped electrodes are provided with two parallel front surface side wirings and back side wirings facing the first member and the second member and having a predetermined interval. However, it is led out from the back side wiring to the front side through a through hole and extends in a direction orthogonal to each wiring direction, and the front side wiring extends in a direction orthogonal to each wiring direction on the surface, The multi-phase AC drive type electrostatic actuator according to claim 1, wherein the multi-phase AC drive electrostatic actuator is arranged in a meshed comb shape. 14. The multi-phase AC drive type electrostatic actuator according to claim 1, wherein the first member and the second member are sequentially arranged in a laminated shape. 15. The multi-phase AC drive type electrostatic actuator according to claim 1, wherein at least one of the first member and the second member is a rotating body. 16. The laminate according to claim 1, wherein at least one of the first member and the second member is formed of a rotating body.
13. The multi-phase AC drive type electrostatic actuator according to any one of 13.