JPH0910539A - Gaseous substance removal filter - Google Patents

Abstract

(57) [Summary] [Purpose] The filter unit can be easily mounted and the performance of removing gaseous substances is improved. [Structure] A sheet-like filter 13 in which a metal fiber sheet 14, an activated carbon layer 15 and a non-woven fabric filter 16 are laminated, a metal fiber 17 disposed in the activated carbon layer 15, and the sheet-like filter 13 inserted from above and below. A configuration including a substantially U-shaped needle 19 having a burring portion 18 at both ends.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gaseous substance removing filter suitable for use in clean rooms and the like.

[0002]

2. Description of the Related Art In the next generation clean room where higher cleanliness is required, it is necessary to use a filter that removes even dilute gaseous substances, and its main filter media are fine metal fibers such as aluminum and activated carbon. Is used.

FIG. 2 shows a conventional filter for removing a gaseous substance and a filter unit. FIG. 2A is a perspective view of the filter unit and FIG. 2B is an exploded perspective view of a pallet. In FIG. 2A, a filter unit 1 arranged in a clean room is composed of a filter case 2 and a plurality of pallets 3 arranged inside the filter case 2, and the pallet 3 comes into contact with an air flow. In order to make it possible, it is arranged so as to be inclined in a zigzag shape, and is detachably attached for maintenance such as replacement.
As shown in FIG. 2B, the pallet 3 has a structure in which an upper lid 4, a protective material 5, activated carbon 6, a protective material 7, a coarse dust filter 8 and a lower lid 9 are laminated in this order.

[0004]

However, in the above-mentioned conventional method, since the pallet 3 has a box-type structure in which several members are laminated, there is a restriction in shape and the manufacturing cost is high, and Filter unit 1
Since it is mounted in a zigzag shape, there is a problem that the sealing structure between the pallets 3 is costly, and since the pallets 3 are arranged so as to be inclined, a partition member for preventing the bias of the activated carbon 6 is required. And the structure becomes complicated,
There is a problem that the removal performance is lowered.

The present invention solves the above-mentioned problems of the prior art, and provides a filter for removing a gaseous substance which can be easily attached to a filter unit and can improve the removal performance of the gaseous substance. The purpose is to provide.

[0006]

To this end, the gaseous substance removing filter of the present invention is provided with a sheet-like filter 13 in which a metal fiber sheet 14, an activated carbon layer 15 and a non-woven fabric filter 16 are laminated, and the activated carbon layer 15. Metal fiber 1
7 and a substantially U-shaped needle 19 having a burring portion 18 at both ends of the sheet filter 13 inserted from above and below. The numbers added to the above configuration are for comparison with the drawings to facilitate understanding of the present invention, and the configuration of the present invention is not limited by this.

[0007]

In the present invention, by forming the filter into a sheet, it is possible to easily mount the filter on the filter unit and improve the performance of removing the gaseous substance. In addition, since no adhesive is used for manufacturing the filter, the organic gas is not generated for a long period of time, and the filter is effective in the next-generation clean room where a higher degree of cleanliness is required.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows one of the filters for removing gaseous substances of the present invention.
FIG. 1 (A) is a perspective view showing a filter unit, FIG. 1 (B) is a cross-sectional view of a sheet-like filter, and FIG.
FIG. 1C is a cross-sectional view showing a cross section different from that in FIG.

In FIG. 1A, the filter unit 11 arranged in the clean room is a filter case 12.
And a sheet-like filter 13 arranged inside the filter case 12 so as to be folded back in a zigzag shape.

As shown in FIG. 1 (B), the sheet-like filter 13 includes a metal fiber sheet 14 having an ultrafine diameter (fiber diameter: several μm to several tens of μm), an activated carbon layer 15, and a non-woven fabric filter 16.
In the activated carbon layer 15 having a laminated structure, a relatively large fiber diameter (fiber diameter: several hundreds of μm to several meters) is used as a core material for preventing bias of the activated carbon and settling of the entire filter.
m) Metal fibers 17 are arranged, and activated carbon is introduced into the gaps. The non-woven fabric filter 16 is a coarse dust filter that has been conventionally used for air conditioning, and the metal fiber sheet 14 is a material that can be processed into a sheet shape by applying a predetermined pressure and has a function of removing a gaseous substance. The metal fiber 17 serving as the core material is also a material having a function of removing a gaseous substance.

The sheet filter 13 is manufactured by sandwiching the activated carbon layer 15 between the metal fiber sheet 14 and the non-woven fabric filter 16, and as shown in FIG.
A substantially U-shaped needle 19 having a sheet filter 1
3 is inserted from above and below to entangle the fibers of the metal fiber sheet 14 and the non-woven fabric filter 16 and integrate them into a sheet shape.

[Brief description of the drawings]

1 shows an embodiment of a filter for removing gaseous substances of the present invention, FIG. 1 (A) is a perspective view showing a filter unit, FIG. 1 (B) is a sectional view of a sheet filter, and FIG. 1 (C). FIG. 3 is a cross-sectional view showing a cross section different from that in FIG.

2A and 2B show a conventional gaseous substance removal filter and a filter unit. FIG. 2A is a perspective view of the filter unit and FIG. 2B is an exploded perspective view of a pallet.

[Explanation of symbols]

11 ... Filter unit, 12 ... Filter case, 13
... Sheet filter 14 ... Metal fiber sheet, 15 ... Activated carbon layer, 16 ... Non-woven fabric filter 17 ... Metal fiber, 18 ... Burr part, 19 ... Needle

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁶ Identification number Internal reference number FI Technical indication location B01D 53/81 F24F 1/00 371A F24F 13/28 (72) Inventor Shigekazu Tsurugi Minato-ku, Tokyo Shibaura 1-32 Shimizu Construction Co., Ltd. (72) Inventor Takeshi Sekiguchi 1-3-2 Shibaura, Minato-ku, Tokyo Shimizu Construction Co., Ltd.

Claims (1)

[Claims] 1. A sheet-shaped filter in which a metal fiber sheet, an activated carbon layer and a non-woven fabric filter are laminated, a metal fiber disposed in the activated carbon layer, and a burial portion at both ends of the sheet-shaped filter inserted from above and below. And a substantially U-shaped needle having the gas substance removing filter.