JPH09113223A - Non-contacting method and instrument for measuring distance and attitude - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify the constitution of a non-contacting distance and attitude measuring instrument and reduce the cost of the instrument by receiving mark light containing two nonparallel segments which cross each other at one point and are projected upon the surface of an object and computing the distance to the object and the attitude of the object. SOLUTION: The surface 2 to be measured of an object 1 to be measured is irradiated with slit light rays 23a and 23b and mark light 3a containing straight lines L1 and L2 is projected upon the surface 2. The light 3a is reflected by the surface 2 and condensed through an image forming lens 4 so that the light 3 can form a mark light image on an image forming surface 7 provided with primary photosensors 6a and 6b. The sensors 6a and 6b detect the light intensity of picture elements at the crossing point of the mark light image formed on the image forming surface 7 and the intensity is transferred to a memory 14 after amplification 12a and 12b and A/D conversion 13a and 13b. A processor 16 computes the distance to the surface 2 and attitude of the surface 2 from the light intensity signal inputted from the memory 14 and displays the computed results on a displaying section 17.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a non-contact distance / posture measuring method and device, and more particularly to a non-contact distance / posture for realizing speeding up of distance and posture measurement and cost reduction in measuring the position and posture of a moving body. The present invention relates to a measuring method and device.

[0002]

2. Description of the Related Art Conventionally, an optical distance sensor utilizing the principle of triangulation has been widely known as a distance measuring device for measuring a distance to a measuring object in a non-contact manner.

For example, in the case of measuring the distance to a mirror-like object to be measured with such an optical distance sensor,
If the posture of the surface of the measuring object is tilted in the process of measurement, the displacement on the light receiving side cannot be distinguished into the distance and the tilt, which makes it impossible to measure the distance.

As a solution to this inconvenience, there has been proposed a distance measuring method using a laser focus displacement meter which is not affected by the inclination, that is, the posture. According to this distance measuring method, the distance to the measurement object can be measured even if the orientation of the surface of the measurement object changes. But,
There is a problem in that at least three laser focus displacement gauges must be used in order to simultaneously measure the distance and posture to the object to be measured.

A non-contact position / orientation or distance / orientation measuring device for measuring the distance to the object to be measured, or the position and orientation in a non-contact manner, is disclosed in, for example, Japanese Unexamined Patent Publication No. Hei 1-203907.
And JP-A-4-148814.

In the non-contact position / orientation measuring device disclosed in Japanese Unexamined Patent Publication No. 1-203907, oblique slit lights having different slit surfaces are alternately projected onto a measuring object, imaged by a television camera, and imaged. The three-dimensional position and orientation of the measuring object is obtained based on the image. Further, in the non-contact distance / attitude measuring device disclosed in Japanese Patent Laid-Open No. 4-148814, there is provided a probe in which a pattern projection device for projecting at least two or more mark pattern lights and a television camera are housed, and the probe is provided in the probe. The mark pattern light is projected on the surface of the object to be inspected through the mirror, and the image is picked up by the television camera, and the distance and posture to the object to be inspected are obtained based on the picked-up image.

[0007]

However, Japanese Patent Laid-Open No. 1-2
According to the non-contact position / orientation or distance / orientation measuring device of JP-A-03907 and JP-A-4-148814, a two-dimensional CCD sensor is used as an image pickup means such as a television camera, and the data acquisition speed of one screen is 1/30
Seconds or 1/60 seconds. Therefore, measurement cannot be performed in a high-speed measurement cycle of 30 or 60 Hz or higher. Further, since the data taken in from the sensor is image information, there is a large amount of information to be processed, and there is a problem that a dedicated processing circuit is required for speeding up and cost increases. Therefore, an object of the present invention is to provide a simple non-contact distance / attitude measuring method and device which has a high data acquisition speed and a high processing speed.

Another object of the present invention is to provide a non-contact distance / posture measuring method and apparatus which can reduce the cost.

[0009]

In order to achieve the above-mentioned object, the present invention has, as a first feature, a mark light including two non-parallel line segments providing one intersection, which is present on the target surface. , And at least two one-dimensional sensors are arranged on a second plane to form line segment images of the two line segments included in the mark light image reflected on the target surface on the plane. Generate at least two one-dimensional sensors a light-reception signal representing a light-reception intensity distribution in the longitudinal direction, and calculate the positions of the two line segment images on the at least two one-dimensional sensors based on the light-reception signals. A non-contact distance posture that calculates the equation of the first plane based on the positions on the at least two one-dimensional sensors, and calculates the distance and posture to the target surface based on the equation of the first plane Measuring method Subjected to.

In the above non-contact distance attitude measuring method,
The line segment image may be projected by forming the one intersection of the mark light inside the region sandwiched by the at least two one-dimensional sensors.

In order to achieve the above-mentioned object, the present invention has a second feature that a mark light including two non-parallel line segments providing one intersection is present on the target surface.
Mark light projecting means for projecting onto the plane, image forming means for forming the line segment images of the two line segments included in the mark light image on the second plane, and the two lines arranged on the plane. At least two one-dimensional sensors that output a light receiving signal that represents a light receiving intensity distribution in the length direction based on the image division, and the at least two of the two line segment images based on the light receiving signal.
A first calculation means for calculating a position on one one-dimensional sensor, and the first calculation means based on a calculation result of the first calculation means.
There is provided a non-contact distance / orientation measuring device having a second calculation means for calculating the equation of the plane and the distance and orientation to the target surface based on the equation of the first plane.

In the above non-contact distance / attitude measuring device,
It is preferable that the mark light projection means forms the one intersection of the line segment image inside the region sandwiched by the at least two one-dimensional sensors.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION A noncontact distance attitude measuring method and apparatus according to the present invention will be described below with reference to the drawings.

FIG. 1 shows a non-contact distance / attitude measuring apparatus according to a first embodiment of the present invention, which comprises a measuring object 1 having an object surface 2 and slit light 23a intersecting the object surface 2.
23b and the mark light 3 formed by the slit lights 23a and 23b reflected by the target surface 2.
an image forming lens 4 for forming the reflected light image of a on the image forming surface 7;
A one-dimensional optical sensor 6a, 6b provided on the imaging surface 7, a sensor head 8 containing the light source 3, the imaging lens 4, and the imaging surface 7 having the one-dimensional optical sensor 6a, 6b, and a synchronization signal generation circuit 10. 1 based on the timing signal output from
Driving circuits 11a, 1 for driving the three-dimensional photosensors 6a, 6b
1b, amplifiers 12a and 12b for amplifying the light intensity signals output from the one-dimensional photosensors 6a and 6b, and an A / D converter 13 for converting the amplified light intensity signals into digital signals.
a, 13b, a memory 14 for storing the light intensity signal converted into a digital signal, and a memory control circuit 15 for controlling writing of the light intensity signal to the memory 14 and reading of the light intensity signal from the memory 14. And a processor 16 that inputs a light intensity signal from the memory 14 and performs a predetermined calculation.
And a display unit 17 for displaying the calculation result of the distance to the target surface 2 and the posture of the target surface 2 in the processor 16.

The mark light 3a is formed by arranging the slit light sources so that the light fluxes emitted from the two slit light sources radiating the slit lights 23a and 23b having a predetermined width intersect. Slit light 23a, 23b
May be formed, for example, by transmitting a laser beam emitted from a laser light source through an optical system such as a cylindrical lens and focusing it in only one direction.

In the configuration of FIG. 1, the target surface 2 of the measuring object 1 is irradiated with the slit lights 23a and 23b from the light source 3, so that the mark light 3a having the straight lines L ₁ and L ₂ is projected. The mark light 3a is reflected by the target surface 2 and is condensed by the image forming lens 4 to form the mark light image 3 on the image forming surface 7 on which the one-dimensional photosensors 6a and 6b are provided.
The image is formed as a '(FIG. 2). One-dimensional optical sensor 6a, 6
Reference numeral b denotes a one-dimensional CCD, a light receiving element array, etc.
The light intensity in the pixel at the position where the mark light image 3a ′ formed in the position intersects is detected and output to the amplifiers 12a and 12b. The light intensity signal amplified by the amplifiers 12a and 12b is A
The signals are converted into digital signals in the / D converters 13a and 13b and transferred to the memory 14. The memory 14 writes the light intensity signal based on the write signal output from the memory control circuit 15 according to the control signal output from the processor 16, and further writes the light intensity signal based on the read signal output from the memory control circuit 15. The signal is output to the processor 16. The processor 16 determines the target surface 2 of the measurement target 1 based on the light intensity signal input from the memory 14.
And the posture of the target surface 2 are calculated, and the calculation result is output to the display unit 17.

FIG. 2 shows the mark light image 3a 'imaged on the image plane 7, and the mark light 3a reflected on the target surface (not shown) is imaged on the image plane 7. Thereby forming a mark light image 3a 'having an intersection P'and straight lines _L1R and _L2R . The mark light image 3a 'and the one-dimensional light sensor 6a,
The straight line L _1R is restored from the points A ₁₁ and A ₂₁ where 6b intersects,
The straight line L _2R is restored from the points A ₁₂ and A ₂₂ where the mark light image 3a ′ and the one-dimensional photosensors 6a and 6b intersect.

FIG. 3 shows the correspondence between the object coordinate system on the target surface 2 of the measuring object 1 and the two-dimensional coordinate system on the image plane 7, and in FIG. _R
The optical system configuration is arranged in front of an imaging lens (not shown) having the above. The optical system configuration of FIG. 3 is used in the following description to facilitate the description.

Assuming that the object coordinates are (x, y, z) and the two-dimensional coordinates on the image plane 7 on which the one-dimensional photosensors 6a, 6b are provided are (h _R , v _R ), the one-dimensional photosensors 6a, 6b. Let C be the camera parameter of the imaging unit having

(Equation 1) It is expressed as

The object coordinates and the two-dimensional coordinates on the image plane 7 are [fh _R fv _R f] ^t = C [x, y, z, 1] ^t --- (2) using the parameter f. Can be expressed as Here, [] ^t represents a transposed matrix.

In FIG. 3, planes F _1L and F _2L are luminous fluxes of the slit lights 23a and 23b, and an intersection line of the planes F _1L and F _2L is represented by L ₃ . This plane F _1L , F _2L and the intersection line L
_{Since 3} does not change once set, measure it before measuring the distance and posture.

FIG. 4 shows the mark light image 3 on the image plane 7a.
Positions of straight lines L _1R and L _2R of a ′ and one-dimensional optical sensors 6a and 6a
The straight line L _1R , L _2R of the mark light image 3a ′ shows a relationship with the signal output of b, and the sensor value becomes high at the portion intersecting the one-dimensional photosensors 6a, 6b. Therefore, the positions q of the straight lines L _1R and L _2R of the mark light image 3a ′
_ij (i = 1, 2, j = 1, 2), as shown in FIG.
By using the pixel data in the vicinity of an appropriate threshold value I or more, for example, the position of the center of gravity of the shaded portion is obtained.
The barycentric position q _{ij at} that time is calculated by, for example, Expression (3).

(Equation 2) Here, D (q) is an output value in the pixel q.

In addition, the i-th one-dimensional photosensor is the image plane 7
Two-dimensional coordinates in a [h_R, V_R]^t= Q [a_i, B_i]^t+ [C_i, D_i]^t (I = 1, 2) --- (4) (where [a_i, B_i]^tIs the pixel pitch
Vector, [c_i, D _i]^tIs at the end of the one-dimensional optical sensor
The center coordinates of the pixel, q is the pixel number. )
Of the mark light image 3a 'on the one-dimensional photosensors 6a and 6b.
The position is a two-dimensional coordinate on the image plane 7 according to the equation (4).
(H_R, V_R) Is converted to. Therefore, A ₁₁~ A_{twenty two}Is q
₁₁~ Q_{twenty two}Is obtained by substituting in the equation (4). So
And then A_ij(H_ij, V_ij), The straight line L_1R, L
_2RThe equation of the straight line on the image plane 7 is_1R: (H_{twenty one}-H₁₁) (V_R-V₁₁) = (V_{twenty one}-V₁₁) (H_R-H₁₁) --- (5) L_2R: (H_{twenty two}-H₁₂) (V_R-V₁₂) = (V_{twenty two}-V₁₂) (H_R-H₁₂) --- (6).

Next, the mark light image 3 obtained in the above process
straight line L of a '_1R, L_2RBased on the plane of the target surface 2
For all equations. There are several ways to ask
However, for example, the lens principal point O_RStraight line L_1RAnd L₁Including
Mu plane F_1RAnd the lens principal point O_RStraight line L_2RAnd L_TwoTo
Plane F including_2R, The plane equation of_1LAnd plane F
_1RIs the intersection line L₁, Plane F_2LAnd plane F_2RYo
, The intersection line L_TwoFind the equation of the straight line of
Straight line L₁, L_TwoIs calculated as a plane including. But this
Method, the reading error by the image sensor during image pickup
Line L that is calculated based on model error and model error₁, L_TwoIs
There may be a twist relationship, so the plane of the target surface
The formula may not be found.

Therefore, in the present embodiment, the target surface 2
Straight line L of the mark light 3a projected on ₁, L_TwoAt the intersection P of
Coordinates (x₁, Y₁, Z₁) And the plane normal vector q
(A_P, B_P, C_P) Separately, the following plane
Formula a_P(Xx₁) + B_P(Y-y₁) + C_P(Z-z₁) = 0 --- (7) is calculated.

First, how to obtain the coordinates of the intersection P will be described. There are several methods of calculating the coordinates of the intersection point P. For example, the intersection point of the intersection line L ₃ of the planes F _1L and F _2L and the plane F _1L is P ₁ (not shown), and the intersection line L ₃ and the plane F are the same. The intersection with _2L is P ₂
(Not shown), and the midpoint of the intersection points P ₁ and P ₂ is calculated as P.

Next, the equation of the plane F _1R is obtained. By eliminating f from the formula (2), h _R = (C ₁₁ x + C ₁₂ y + C ₁₃ z + C ₁₄ ) / (C ₃₁ x + C ₃₂ y + C ₃₃ z + C ₃₄ ) −−− (8) v _R = (C ₂₁ x + C ₂₂ y + C _23). z + C ₂₄ ) / (C ₃₁ x + C ₃₂ y + C ₃₃ z + C ₃₄ ) −−− (9), which is substituted into the equation (5) of the straight line L _1R , the plane F _1R is F _1R : a _1R x + b _1R y + c _1R z + d _{1R = 0 --- (10) a} 1R = n 1 (C 21 -v 11 C 31) -m 1 (C 11 -h 11 C 31) b 1R = n 1 (C 22 -v 11 C 31) - _{m 1 (C 12 -h 11 C} 31) c 1R = n 1 (C 23 -v 11 C 31) -m 1 (C 13 -h 11 C 31) d 1R = n 1 (C 24 -v 11 C 31 ) becomes _{-m 1 (C 14 -h 11 C} 31) n 1 = h 21 -h 11 m 1 = v 21 -v 11. The intersection point P ₁ (not shown) is calculated by the equation (10) and the equation of the intersection line L ₃ . Also, equations (8) and (9)
The equation of the plane F _2R is obtained by substituting the equation (6) into the equation, and the intersection P of the equation of the plane F _2R and the intersection line L ₃ is obtained.
₂ (not shown) is calculated, and the midpoint P between the intersection points P ₁ and P ₂ is calculated.

Next, how to obtain the normal vector q will be described. The normal vector q is the plane F _1L , F _2L , F _1R , F
_If the normal vectors of _2R are f _1L , f _2L , f _1R , and f _2R , then q = (f _1L × f _1R ) × (f _2L × f _2R )-(11).

The distance g from the origin O _M of the object coordinate system to the plane of the target surface 2 in the direction parallel to the z-axis on the basis of the intersection point P obtained as described above and the normal vector q is given by the equation (7) )
To a value of z which is obtained by substituting x = 0, y = 0, g = is determined as _{(a P x1 + b P y1} + c P z1) / c P --- (12).

FIG. 6 shows the postures of the plane of the target surface 2 around each coordinate axis. When the postures of the target surface 2 are represented by θx and θy, when the normal vector q is parallel to the z axis, the reference posture is taken. Then, θx = −tan ⁻¹ (b _P / c _P ) −−− (13) θy = tan ⁻¹ (a _P / c _P ) −−− (14)

FIG. 7 is a flow chart showing the arithmetic processing steps in the processor 16, in which steps S ₁ ,
_{S 2, S 3, S 4} , S 5, S 6, S 7 in can determine the distance of the object surface 2, Step _{S 1, S 2, S 3} , S
The posture of the target surface 2 can be obtained by ₄ , S ₆ , and S ₈ .

FIG. 8 shows a light source 3 which forms the mark light 19 of another pattern. The light source 3 has only to project two straight lines L ₁ and L ₂ which are not parallel to each other on the target surface 2, and therefore the light emitted from the lamp 8 is emitted from the mark pattern 2.
It is also possible to irradiate a plate 21 in which 0 is cut out to generate mark pattern light 19 and project the mark pattern light 19 on the target surface 2 of the measurement target 1.

FIG. 9 uses the contour line of the mark pattern light 19 projected on the target surface 2 as the mark light image 3a ', and a predetermined threshold I for the signal output level of the one-dimensional photosensors 6a, 6b. By providing the mark light image 3
detecting the linear position q ₁₁ to q ₂₂ of a '. The same parts as those in FIG. 4 are designated by the same reference numerals and reference numerals, and the duplicated description will be omitted.

FIG. 10 shows a modified example of the arrangement of the one-dimensional photosensors 6a and 6b on the image plane 7, and as shown in FIG.
The two-dimensional optical sensors 6a and 6b are arranged non-parallel to each other, or (b)
The configuration may be such that they are arranged orthogonally.

FIG. 11 shows another modification of the arrangement of the one-dimensional photosensors 6a and 6b. In (a), the straight line L _1R is imaged on the one-dimensional optical sensors 6a and 6b, and the straight line L _2R is imaged on the one-dimensional optical sensors 6b and 6c. In (b), the straight line L _1R is imaged on the one-dimensional photosensors 6a and 6b, and the straight line L _2R is imaged on the one-dimensional photosensors 6c and 6d. In (c), the straight line L _1R is imaged on the one-dimensional optical sensors 6a and 6b, and the straight line L _2R is imaged on the one-dimensional optical sensors 6b and 6c. In (d), the intersection P'is located in the area formed by the one-dimensional photosensors 6a and 6b. On the other hand, in (b), the intersection P'is located outside the area formed by the one-dimensional photosensors 6a and 6b.

Next, the straight lines L _1R and L _{2R of the} mark light image 3a '
The detection accuracy of the intersection P'of For example, as shown in FIG. 12, the one-dimensional optical sensors 6a and 6b have v _R = 1 and v
_R = -1, the intersection of the straight lines _L1R and _L2R is (0, w), and the straight line L
Angle of 45 _{degrees 1R} makes with one-dimensional optical sensor 6a, the straight line L _1R, angle between L _2R is set to 90 degrees, considering the detection accuracy of the coordinates (h _R, v _R) of the intersection point P 'at this time.

Straight line L in the one-dimensional photosensors 6a and 6b
_When the detection errors of _1R and L _2R follow the normal distributions of mean zero and standard deviation σ _S , respectively, the coordinates (h _R , v _R ) of the intersection point P ′
Simulating the detection error of, their standard deviation σ
_h and σ _v are

(Equation 3) Is approximated.

FIG. 13 shows this graph. It is shown that when w = 0, that is, the intersection P ′ is located at the center of the one-dimensional optical sensors 6a and 6b, the detection accuracy is higher. Straight line L
_{Even if} the inclination of _1R and the values of the angles formed by the straight lines L _1R and L _2R are different, the absolute values of σ _h and σ _v are different, but the detection accuracy increases as the intersection point P ′ is located at the center of the one-dimensional optical sensors 6a and 6b. The characteristics of high are similar. In addition, the one-dimensional optical sensors 6a, 6
Even when b is not parallel, the detection accuracy is higher as the intersection P ′ of the straight lines L _1R and L _2R is relatively inside. This was also confirmed by simulation.

Next, as shown in FIG. 14, the one-dimensional optical sensor is
6a, 6b, 6c are v_R= 1, h _R= -1 and h_R=
1, straight line L_1R, L_2RThe intersection is (0, w), and the straight line L_1RIs 1
The angle formed with the three-dimensional optical sensor 6a is 45 degrees, and the straight line L_1RAnd L_2R
When the angle formed by is 90 degrees, the coordinates (h_R, V
_R) Is considered.

When the detection errors of the positions of the straight lines L _1R and L _{2R in} the one-dimensional photosensors 6a, 6b and 6c follow the normal distributions of mean zero and standard deviation σ _S , respectively, the coordinates (h _R , Simulate the detection error of v _R ).

FIG. 15 shows those standard deviations σ _h and σ _v . Also in this case, the detection accuracy is higher as the intersection P ′ of the straight lines L _1R and L _2R is closer to the inside.

As described above, in order to improve the detection accuracy of the position of the intersection of the straight lines of the mark light image as much as possible, FIG.
As shown in (c) and (d), it is necessary to set the mark light image and the one-dimensional light sensor so that the intersection of the straight lines of the mark light image is inside the one-dimensional light sensor. As seen in FIG. 3, the position of the intersection point P of the mark light, because the lens principal point O _R on an extension of a straight line extended to the intersection P 'of the mark light image, improve the measurement accuracy of the intersection P of the mark light Therefore, it is necessary to make the intersection point P ′ of the mark light image inside the one-dimensional optical sensors 6a and 6b to improve the detection accuracy of the intersection point P ′ of the mark light image.

[0043]

As described above, according to the non-contact distance attitude measuring method and apparatus of the present invention, at least two mark lights including two non-parallel line segments providing one intersection projected on the target surface are provided. Since the one-dimensional optical sensor receives light and calculates the distance and posture of the target surface, the non-contact distance posture measuring device can be simplified and the cost can be reduced, and high-speed measurement can be performed.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a non-contact distance / attitude measuring device according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing a mark light image formed on an image plane.

FIG. 3 is an explanatory diagram showing a relationship between an object coordinate system and a two-dimensional coordinate system on an image plane.

FIG. 4 is an explanatory diagram showing the relationship between the position of the straight line of the one-dimensional optical sensor and the mark light image on the image plane of the first embodiment.

FIG. 5 is an explanatory diagram for obtaining the barycentric position of the mark light image 3a ′.

FIG. 6 is an explanatory diagram showing a posture of each plane of the target surface around each coordinate axis.

FIG. 7 is a flowchart for calculating a distance and a posture to a target surface in the first embodiment.

FIG. 8 is an explanatory diagram showing a modified example of the light source according to the first embodiment.

FIG. 9 is an explanatory diagram showing a modified example in which the mark pattern light projected on the target surface is used as a mark light image in the first embodiment.

10A and 10B are explanatory diagrams showing a modification of the arrangement of the one-dimensional photosensors on the image plane.

FIG. 11A to FIG. 11D are explanatory diagrams showing a modified example of the reading form of the mark light image.

FIG. 12 is an explanatory diagram showing the positional relationship between the positions of the intersections of the straight lines of the mark light image and the two one-dimensional optical sensors.

13 is a graph of the position of the intersection of the straight lines of the mark light image in FIG. 12 and the standard deviation of the intersection position detection error.

FIG. 14 is an explanatory diagram showing a positional relationship between the positions of the intersections of the straight lines of the mark light image and the three one-dimensional optical sensors.

15 is a graph of the position of the intersection of the straight lines of the mark light image in FIG. 14 and the standard deviation of the intersection position detection error.

[Explanation of symbols]

1, measurement object 2, target surface 3, light source 3a, mark light 3a ', mark light image 4, imaging lenses 6a, 6b, one-dimensional optical sensor 7, imaging surface 8, sensor head 10, synchronization signal generator 11a, 11b, drive circuits 12a, 12b, amplifiers 13a, 13b, A / D converter 14, memory 15, memory control circuit 16, processor 17, display units 18a, 18b, 18c, read lines L ₁ , L ₂ , mark Light straight line L ₁ ', L ₂ ', mark light image straight line P, mark light intersection P ', mark light image intersection

Claims (4)

[Claims] 1. A non-contact distance posture measuring method for measuring a distance to the target surface and a posture of the target surface based on a reflected light image obtained by irradiating a target surface of a measurement target with a mark light from a light source. , Projecting a mark light including two non-parallel line segments providing one intersection on a first plane in the target surface, arranging at least two one-dimensional sensors in the second plane, Forming a line segment image of the two line segments included in the reflected mark light image on the plane, and causing the at least two one-dimensional sensors to generate a light receiving signal representing a light receiving intensity distribution in the longitudinal direction; Calculating the positions of the two line segment images on the at least two one-dimensional sensors based on the received light signals, and calculating the equation of the first plane based on the positions on the at least two one-dimensional sensors, Before Note: A non-contact distance / orientation measuring method, characterized in that the distance and attitude to the target surface are calculated based on the equation of the first plane. 2. The non-contact distance attitude measurement according to claim 1, wherein the projection of the mark light forms the one intersection of the line segment image inside an area sandwiched by the at least two one-dimensional sensors. Method. 3. A non-contact distance attitude measuring device for measuring the distance to the object surface and the attitude of the object surface based on a mark light image obtained by irradiating the object surface of the object to be measured with mark light from a light source. Mark light projecting means for projecting mark light including two non-parallel line segments providing one intersection to a first plane on the target surface, and a mark light projecting means included in the reflected light image on a second plane. Image forming means for forming a line segment image of one line segment, and at least two one-dimensional sensors arranged on the plane and outputting a light receiving signal representing a light receiving intensity distribution in the longitudinal direction based on the two line segment images. A first calculation means for calculating the positions of the two line segment images on the at least two one-dimensional sensors based on the received light signal; and the first calculation means based on a calculation result of the first calculation means. The equation of the plane of Because, the non-contact distance and orientation measuring apparatus characterized by having a second calculating means for calculating the distance and orientation to the object surface based on the equation of the first plane. 4. The non-contact distance according to claim 3, wherein the mark light projecting means forms the one intersection of the line segment image inside an area sandwiched by the at least two one-dimensional sensors. Attitude measuring device.