JPH0911432A - Film sticking method and apparatus - Google Patents

Abstract

(57) [Abstract] [Purpose] The cover film of a laminated film formed by laminating a base film, a photosensitive layer and a cover film is surely peeled off without damaging the base film side and used for peeling. Useless use of the adhesive tape is suppressed, and wrinkles and bubbles are not generated when the laminated film is pressure-bonded to the substrate. [Structure] In the film sticking device 10, when the cover film 12C of the laminated film 12 is peeled off by the adhesive tape 30, the pressing roll driving device 36 moves the pressing roll 34 to the first and second inclinations of the temporary attaching means 22. Face 22
The adhesive tape 32 is pressed against B and 22C and then retracted. At this time, the adhesive tape 32 is given a pulling force from the adhesive tape retracting means 38 to surely peel off the cover film 12C. When the slack of the laminated film 12 is removed by the film tensioning device 1 after the temporary attachment, the adhesive tape 30 is applied by the slack imparting device 2.
And return the cover film 12C adhered to this,
The pullback of the laminated film 12 is facilitated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a film sticking apparatus for sticking a film on the surface of a substrate for printed wiring or the like.

[0002]

2. Description of the Related Art In the process of manufacturing a printed wiring board used for electronic equipment such as a computer, there is a step of attaching a laminate film to the surface of a printed wiring board.

A film sticking apparatus for sticking a laminated film as described above guides a continuous film loaded on a film supply roll to a leading end of a substrate conveyed by conveyance means via a guide roll. After being temporarily attached to the front end of the substrate by a temporary attaching means, the substrate is transported while the film is pressed against the substrate by a lamination roll.

As such a film sticking device, for example, a mechanism described in Japanese Patent Application No. 6-1767, "a mechanism for peeling a protective film from the tip of a film with a photosensitive layer having a protective film on the photosensitive layer with an adhesive tape, is used. A pair of opposed thermocompression rollers for advancing the film with the photosensitive layer and the substrate while sandwiching and pressing the substrate, and a mechanism for cutting the protective film and the photosensitive layer on the film with the photosensitive layer. Adhesive tape roll that can drive the peeling mechanism to wind up, pressing bar that pushes the adhesive tape to the tip of the protective film and retracts it, dancer roll that adjusts the path length of the adhesive tape, and film delivery roll with photosensitive layer There is a protective film recovery roll that winds up the protective film by the surface friction drive.

Here, the pressing bar has an acute tip, and when the pressure-sensitive adhesive tape is pressed against the tip of the protective film, the pressure-sensitive adhesive tape is pulled and the tape having the length stored by the dancer roll is used. Is pulled and pressed.

The mechanism for cutting the photosensitive layer on the protective film and the film with the photosensitive layer is one in which a round blade cutter (disc cutter) is pressed against the protective film and moved in the film width direction.

The pressure-sensitive adhesive tape is usually arranged at two positions in the width direction of the film, and the pressing bar is swingable within a certain range and is moved forward and backward by an air cylinder. A pair of left and right is arranged in the film width direction and is driven in synchronization.

[0008]

In the case of a general film sticking apparatus, after the tip of the film is tacked to the tip of the substrate by the tacking means, the substrate is conveyed while being pressure-bonded to the substrate by the lamination roll. However, at this time, the temporary attaching means temporarily attaches the film front end to the front end of the substrate, then separates from the substrate, and the negative pressure for sucking the film is cut off. When the tension roll is pulled by the spring, the film near the substrate is pulled and the slack is eliminated.

However, in the case of the film sticking apparatus of the type in which the protective film is peeled off by the pressing bar as described above, the protective film adheres to the adhesive tape of the pressing bar, which suppresses the return of the film with the photosensitive layer. Therefore, the tension roll cannot reduce the slack of the film immediately after the temporary attachment. For this reason,
When the film is directly pressure-bonded to the substrate by the lamination roll, there is a problem that wrinkles may occur in the film or air bubbles may enter between the film and the substrate.

Further, since the pressing bar is advanced and retracted by the left and right air cylinders which are operated in synchronization with each other as described above, it is difficult to adjust the pressing force on the left and right of the pressing bar to be uniform. However, even if the pressure-sensitive adhesive tape is pressed against the protective film by the pressing bar, one of the pressure-sensitive adhesive tape may not be peeled off.

There is also a problem that the film is damaged if the pressing force of the air cylinder is excessive.
Further, the dancer roll for adjusting the path length of the adhesive tape is provided separately from the pressing bar, and its swing range is large, so that a large space in the device is taken up. there were.

Further, the cutting mechanism equipped with the round blade cutter cuts a part in the thickness direction by holding the film on the cutter table and pressing the round blade cutter against it. When the blade cutter rides on the cutter table, a concentrated impact load is generated at the corners of the cutter table, and a blade spill is likely to occur, which causes a problem that the round blade cutter must be frequently replaced.

The present invention has been made to solve the problems of the above-mentioned Japanese Patent Application No. 6-1767, and after the film is temporarily attached to the substrate, the slack of the film is reduced,
It is an object of the present invention to provide a film sticking device which can prevent wrinkles and bubbles from being generated when a film is pressure-bonded by a lamination roll and can surely peel off a cover film.

It is another object of the present invention to provide a film sticking device which is unlikely to cause blade spillage during cutting, and therefore can extend the replacement life of a round blade cutter.

A further object of the present invention is to provide a film sticking device having a simplified structure for downsizing the mechanism for adjusting the path length of the adhesive tape when the cover film is peeled off by the adhesive tape. .

[0016]

According to a first aspect of the present invention, there is provided a tension roll comprising a laminated film which comprises at least a base film, a photosensitive layer and a cover film laminated on the photosensitive layer, and which is wound around a film supply roll. After that, the temporary attaching means guides to the tip of the substrate conveyed by the conveying means, after the cover film is peeled off, temporarily attaches to the tip of the substrate, and then pressure-bonds the substrate with a lamination roll while The tension roll is urged by a spring in a direction to pull back the laminated film through a swing arm, and the temporary attaching means is provided on the substrate side tip end on a vertical plane along the path of the laminated film. A first inclined surface that is bent and extends obliquely from the tip of the vertical surface in a direction away from the path, and
From the tip of the inclined surface, further including a second inclined surface that bends in a direction away from the path, and a suction hole that sucks and holds the laminated film on these vertical surfaces and the first and second inclined surfaces. In the film sticking method, wherein the cover film and the photosensitive layer are cut in the film width direction at a position upstream of the temporary attaching means while the laminated film is suction-held by the temporary attaching means, leaving the base film. The adhesive tape is wound around the pressing roll arranged in the width direction along the laminated film with the adhesive surface of the adhesive tape outside, and the pressing roll is moved from the first inclined surface of the tip of the temporary attaching means to the first inclined surface. Pressing while rotating to the tip of the inclined surface of 2,
The adhesive tape is adhered to the cover film, and is separated from the tip end position of the second inclined surface, and when the pressing roll is separated from the second inclined surface, the adhesive tape is synchronized with the pressing roll. Then, the cover film is pulled in a direction away from the inclined surface and adhered to the adhesive tape, and the cover film peeled from the photosensitive layer on the base film due to the separation of the adhesive tape is wound up together with the adhered adhesive tape. After temporarily attaching the laminated film from which the cover film has been peeled off to the tip of the substrate by the attaching means, from the time when the temporary attaching means starts the separation from the substrate to the start of the laminated film pressure bonding by the lamination roll. Of the laminated film by driving the tension roll in the tensile direction of the laminated film at least part of the time. Pullback constant distance, it is to achieve the above object by releasing the driving of the tension roll to laminate the film bonding start by the lamination rolls.

According to a second aspect of the present invention, in the first aspect of the present invention, the pressing is performed after the temporary attaching means starts separating from the substrate and before or at the same time as the start of pulling back the laminated film. Between the roll and the cover film winding means, the cover film and the adhesive tape adhered to the cover film are given slack.

According to a third aspect of the invention, in the second aspect of the invention, the cover film and the adhesive tape are pulled in the direction of the winding means by a spring between the pressing roll and the cover film winding means. An urged dancer roll is arranged, and the dancer roll is pushed in the pressing roll direction to impart the slack.

Further, the invention of claim 4 comprises at least a base film, a photosensitive layer and a cover film laminated on the photosensitive layer, and the laminated film wound around a film supply roll is passed through a swing arm. After passing through the tension roll that urges the laminated film by the spring in the pullback direction, it is guided to the tip of the substrate conveyed by the conveying means,
After temporarily attaching the cover film to the tip of the substrate by the temporary attaching means in a peeled state, in a film sticking device that conveys the substrate while pressing the substrate with the lamination roll, the edge of the temporary attaching means on the substrate side. A vertical plane along the path of the laminated film, a first inclined surface that extends obliquely from the tip of the vertical surface in a direction away from the path, and from the tip of the first inclined surface, and further from the path. A second inclined surface that bends in the direction of separation, and
A suction hole for suction-holding the laminated film is formed on the vertical surface and the first and second inclined surfaces, and the suction hole is arranged on the upstream side of the temporary attaching means and moves in the film width direction to move the cover film and the photosensitive layer. A half-cutting device for cutting while leaving the base film, an adhesive tape feeding device which is arranged in the vicinity of the temporary attaching means and which feeds an adhesive tape parallel to the laminated film and in a moving direction, and the laminated film. Along the width of the adhesive tape, the adhesive tape from the adhesive tape supply device can be removed from the adhesive surface of the adhesive tape supply device by rolling contact with the first and second inclined surfaces of the temporary attaching means. The pressing roll which is wound around the pressing roll and the pressing roll are rotatably supported, and are rotated from the first inclined surface at the tip of the temporary attaching means to the tip of the second inclined surface. A pressing roll driving device that presses the adhesive tape to adhere it to the cover film and separates it from the tip end position of the second inclined surface, and the adhesive tape when separating the pressing roll from the second inclined surface. , An adhesive tape pulling back means for pulling in a direction away from an inclined surface in synchronization with the pressing roll, and a cover film which is adhered to the adhesive tape and is peeled off from the photosensitive layer on the base film by separating the adhesive tape, A film / tape winding device that winds up together with an adhesive tape that is adhered, and a laminated film that is arranged so that it can be engaged with a laminated film tensioning mechanism including the tension roll and the swing arm, and the cover film is peeled off, After temporarily attaching to the tip of the substrate by the temporary attaching means, before the temporary attaching means starts separating from the substrate. At least a part of the time until the lamination film pressure bonding by the lamination roll is started, a film tensioning device that engages with the lamination film tensioning mechanism and drives the tension roll for a predetermined distance in the lamination film tensioning direction is provided. It is a thing.

According to a fifth aspect of the present invention, in the fourth aspect of the present invention, the adhesive tape and the cover film adhered to the adhesive tape between the pressing roll and the film / tape winding device are A slack imparting device is provided to loosen after the attaching means starts to separate from the substrate and before or at the same time as the film tension starts by the film tensioning device.

According to a sixth aspect of the invention, in the fifth aspect of the invention, the slack imparting device is mounted between the dancer roll of the adhesive tape pulling back means and the pressing roll driving device, and the pressing roll is mounted. A push-in device that pushes out the dancer roll in the direction of the press roll with respect to a drive device.

According to a seventh aspect of the invention, there is provided a guide shaft according to the sixth aspect, wherein the adhesive tape pulling back means is provided so as to project toward the slack imparting device side, and is moved forward and backward integrally with the pressing roll. A bearing member that is slidable on the guide shaft, is urged by the film pull-back spring in a direction away from the pressing roll, and is rotatably supporting the dancer roll. The pushing device is a cylinder device, and one of the cylinder roll and the rod is connected to the guide shaft and the other is connected to the bearing member.

Further, the invention of claim 8 is characterized in that, in any one of the inventions of claims 4 to 7,
The tension roll is configured to be returned to the standby position after being driven for a predetermined distance in the laminated film pulling direction.

Further, the invention of claim 9 relates to claims 4 to 8.
In any one of the inventions described above, the adhesive tape pulling back means is attached to the pressing roll driving device so as to be movable in parallel with the pressing roll and in the advancing / retracting direction of the pressing roll. Between the take-up device, the dancer roll around which the adhesive tape and the cover film peeled off by the adhesive tape are wound, and the dancer roll is urged in the pressing roll retracting direction, and the spring force presses by the pressing roll drive device. And a film pull-back spring that can be compressed by a tensile force applied to the adhesive tape when the roll is projected.

According to a tenth aspect of the invention, in the ninth aspect of the invention, the film pullback spring of the adhesive tape pullback means has a spring constant larger than that of the spring for biasing the swing arm. .

The invention of claim 11 relates to claims 4 to 1.
0. In any one of the inventions of No. 0, the pressing roll driving device is provided with a support shaft arranged in parallel with the pressing roll, and an adjustment frame supported at a position facing the support shaft substantially in the center in the film path width direction. And a support frame that is swingably supported around the axis of the support shaft around the adjustment frame and extends on both sides along the support shaft, and at both ends in the longitudinal direction of the support frame. A pair of linear shafts that are extendably supported in the direction of the first inclined surface and that rotatably support the pressing roll at the tip, an actuator that advances and retracts the linear shafts in the axial direction, and the adjustment frame and support The support frame is arranged between the frames, and the support frame is moved toward the adjustment frame by the pressing roll at the tip of the linear shaft. A roll biasing spring for biasing in the direction of pressure contact with the inclined surface, which is constituted contains.

Further, the invention of claim 12 is the invention according to any one of claims 4 to 11, wherein the half-cutting device is orthogonal to the laminated film and in the width direction of the laminated film. It is rotatable in the plane orthogonal to
A disc cutter that can reciprocate in the width direction of the laminated film and adjacent to both sides of this disc cutter in the moving direction,
A pair of rotatably provided in a plane parallel to the rotation surface of the disk cutter, a common circumscribing surface of the pair of rotation surfaces on the laminated film side is provided with a guide roll that substantially circumscribes the rotary blade edge of the disk cutter. It was done.

According to a thirteenth aspect of the present invention, in the invention of the twelfth aspect, the half-cut device includes a width direction drive device including guide members arranged in the width direction along the laminated film, and the width direction drive device. A driving device supports the guide member along the width direction of the laminated film so as to be reciprocally movable, supports the guide roll and the disc cutter, and is fixed in the laminated film direction. A movable member supported by the slide member so as to move back and forth within a range, a spring mounted between the movable member and the slide member for urging the movable member in the laminated film direction, and a set length of the spring. And a spring adjusting means for adjusting.

According to a fourteenth aspect of the present invention, in the twelfth or thirteenth aspect of the present invention, the disc cutter has a laminated film interposed between the laminated film and a position opposite to the running path of the disc cutter. A cutter table made of an elastic material to be pressed is provided.

Further, a fifteenth aspect of the invention is the invention of the fourteenth aspect, in which the width direction driving device and the cutter base are supported on the same unit frame.

[0031]

According to the first aspect of the present invention, the tip of the temporary attaching means on the substrate side is formed from the vertical plane along the path of the laminated film to the first inclined surface and the second inclined surface, and the pressing is performed here. Since the adhesive tape is pressed by the roll from the first inclined surface to the tip of the second inclined surface, the adhesive tape is surely adhered to the cover film, and thus the cover film can be reliably peeled off.

Further, the tip of the laminated film after peeling off the cover film is temporarily attached to the substrate by a temporary attaching means,
After the temporary attaching means is separated from the substrate, the laminated film is pulled by the tension roll, so that the slack of the laminated film is reduced, whereby wrinkles and bubbles are generated in the laminated film when the laminated film is pressure-bonded by the lamination roll. It can be prevented.

According to the invention of claim 2, at the same time as or before pulling the laminated film by the tension roll,
Since slack is formed in the adhesive tape and the cover film adhered to the adhesive tape, the laminated film can be easily pulled.

According to the third aspect of the invention, the slack can be imparted to the adhesive tape and the cover film adhered to this by simply pressing the dancer roll in the pressing roll direction.

According to the fourth aspect of the present invention, the tip of the temporary attaching means on the substrate side is formed from the vertical plane along the path of the laminated film to the first inclined surface and the second inclined surface. Since the pressure-sensitive adhesive tape is pressed by the pressing roll from the first inclined surface to the tip of the second inclined surface,
The adhesive tape is surely adhered to the cover film, and the cover film can be reliably peeled off by the adhesive tape pulling back means.

Further, the tip of the laminated film after peeling off the cover film is temporarily attached to the substrate by a temporary attaching means,
After the temporary attachment means is separated from the substrate, the laminated film is pulled by the film tensioning device through the tension roll, so that the slack of the laminated film is reduced, and thus, when the laminated film is pressure-bonded by the lamination roll, wrinkles or wrinkles are formed on the laminated film. It is possible to prevent bubbles from being generated.

According to the invention of claim 5, at the same time as or before pulling the laminated film by the tension roll,
Since the slack imparting device forms slack in the adhesive tape and the cover film adhered to the adhesive tape, the laminated film can be easily pulled.

According to the invention of claim 6, by mounting the pressing cylinder between the pressing roll driving device and the dancer roll, the dancer roll can be easily and surely pushed out in the laminated film direction.

According to the invention of claim 7, by mounting the pushing cylinder on the end of the guide shaft, the bearing member of the dancer roll can be pushed to push out the dancer roll.

According to the eighth aspect of the present invention, since the tension roll is driven in the pulling direction of the laminated film by the cylinder device, the laminated film can be reliably pulled and the slack can be eliminated. Further, since the laminated film is returned to the standby position after being pulled for a predetermined distance, even if an excessive tensile force is generated in the laminated film, the tension roll is not prevented from being displaced in the absorbing direction.

According to the ninth aspect of the present invention, since the dancer roll is provided in the pressing roll driving device, the space for the dancer roll can be reduced.

Further, a spring is arranged between the dancer roll and the pressing roll driving device, and when the pressing roll presses the cover film of the adhesive tape, the spring is moved toward the pressing roll driving device against the spring, thereby storing in the dancer roll. When the pressed film is returned and pressure-bonded to the cover film, and the pressing roll returns in the cover film peeling direction, the spring extends to absorb the slack of the adhesive tape due to the peeling of the cover film.

According to the tenth aspect of the invention, since the film pull-back spring has a spring constant larger than that of the spring for urging the swing arm, the tension roll is centered on the swing arm when the lamination film is pressed by the lamination roll. When swinging, the adhesive tape and the cover film adhered thereto are not pulled out in the direction of the lamination roll against the film pull-back spring. Therefore, the cover film can be stably peeled off.

According to the eleventh aspect of the present invention, the support frame for supporting the pressing roll via the pair of linear shafts is arranged at a substantially central portion in the longitudinal direction of the supporting shaft arranged in parallel with the pressing roll. Therefore, it is easy to adjust the left and right balance of the pressing roll, and therefore the pressure of the pressure-sensitive adhesive tape at the left and right positions of the pressing roll can be adjusted equally to the film to surely peel off the cover film.

According to the twelfth aspect of the present invention, the pair of guide rolls protruding to the same position as the rotary blade tip on both sides of the rotary blade moving direction of the disk cutter always contact the cover film when the rotary blade reciprocates, When the cover film is held down and the rotary blade rides on the cutter table, the preceding guide roll rides on the cutter table and lifts the rotary blade, so avoiding shocking contact of the rotary blade with the corners of the cutter table, etc. Therefore, it is possible to suppress the blade spillage of the rotary blade and prolong the replacement life.

According to the thirteenth aspect of the invention, the disc cutter is biased toward the slide member by the spring in the projecting direction, and the guide roll is fixedly supported by the slide member, so that the guide roll is securely supported by the guide roll. In addition to suppressing the cover film, the disk cutter can be prevented from being returned against the spring when riding on the corners of the cutter table or the like, thereby generating a shock concentrated load.

Further, since the slide member is capable of advancing and retreating in a straight line in the direction of the laminated film, it is easy to follow changes in the unevenness on the cover film side, and it is easy to adjust the cutting force by adjusting the spring.

According to the fourteenth aspect of the present invention, since the cutter base facing the disc cutter with the laminated film interposed therebetween is made of hard resin or metal, the laminated film is prevented from escaping to the disc cutter. It is possible to prevent the disc cutter from getting into the cover film with certainty.

According to the fifteenth aspect of the invention, since the width direction driving device and the cutter base are supported by the same unit frame, the assembling is easy, and the laminated film is securely held and cut. can do.

[0050]

Embodiments of the present invention will be described below with reference to the drawings.

The film sticking apparatus 10 according to the embodiment of the present invention shown in FIG. 1 has a base film 12A, a photosensitive layer 12B and a cover film 12 as shown in FIG.
The laminated film 12 formed by laminating C is guided from the film supply roll 14 through the tension roll 16A of the film tensioning mechanism 16 to the vicinity of the front end of the substrate 20 conveyed by the conveying means 18 including a conveying roll, and the cover film 12C In the state of peeling, the temporary attachment means 22 temporarily attaches to the vicinity of the tip of the substrate 20, and then the lamination roll 24 is used to convey the substrate 20 while pressing the laminated film 12 from which the cover film 12C is removed onto the substrate 20. To do.

Further, the laminated film 1 is made by the temporary attaching means 22.
The film pulling device 1 pulls the laminated film 12 to reduce the slack between the time when the film 2 is temporarily attached to the substrate 20 and the time when the lamination roll 24 starts the pressure bonding, and the film pulling device 1 is used to reduce the slack.
When pulling, the slack imparting device 2 imparts slack to the later-described adhesive tape 30 and the cover film 12C peeled by adhering to the adhesive tape 30 to facilitate the film tension by the film tensioning device 1. .

A vertical plane 22 along the path 13 of the laminated film 12 is provided at the tip of the temporary attachment means 22 on the substrate 20 side.
A, a first inclined surface 22B that obliquely extends from the tip of the vertical surface 22A in a direction away from the path 13 and a tip of the first inclined surface 22B.
A second inclined surface 22C that bends in a direction away from is formed, and suction holes (not shown) for suction-holding the laminated film 12 are formed in the vertical surface 22A and the first and second inclined surfaces 22B and 22C. ) Has been formed.

Further, on the upstream side of the tacking means 22, the laminated film 12 is moved in the film width direction along the path 13 of the laminated film, and the laminated film 12 is attached to the base film 12A.
A half-cutting device 28 for cutting the photosensitive layer 12B and the cover film 12C while leaving the above is provided.

Further, in the vicinity of the temporary attaching means 22, the adhesive tape 3 is arranged in parallel with the laminated film 12 and in the moving direction.
An adhesive tape supply device 32 for supplying 0 is arranged. This adhesive tape supply device 32 is used for the laminated film 12
A pair of adhesive tapes are arranged near both ends in the width direction of the tape.
0 is also supplied so as to face the cover film 12C at positions near both ends in the width direction of the laminated film 12.

The adhesive tape 30 supplied from the adhesive tape supply device 32 is wound around a pressing roll 34 with its adhesive surface facing outside. This pressing roll 34
Are arranged in the width direction along the laminated film 12, and the first and second inclined surfaces 22 of the temporary attachment means 22.
The rollers B and 22C are freely rotatable and rotatably supported by the pressing roll driving device 36.

The pressing roll driving device 36 presses the adhesive roll 30 from the first inclined surface 22B at the tip of the temporary attachment means 22 to the tip of the second inclined surface 22C while rotating the pressing roll 34, and thereby the adhesive tape 30. , Laminated film 1 suction-held on the first and second inclined surfaces 22B and 22C
It is configured to be adhered to the cover film 12C of No. 2 and to separate the pressing roll 34 from the tip position of the second inclined surface 22C.

In the pressing roll driving device 36, when the pressing roll 34 is separated from the second inclined surface 22C, the pressure-sensitive adhesive tape 30 is synchronized with the pressing roll 34 in the first and second directions. Adhesive tape pulling back means 38 for pulling in a direction away from the inclined surface is provided. Further, the adhesive tape 30 is provided on the upper end of the film sticking device 10.
A film / tape winding device 40 is provided that winds the cover film 12C that is adhered to the adhesive tape 30 and is peeled off from the base film 12A and the photosensitive layer 12B by separating the adhesive tape 30 together with the adhered adhesive tape 30.

Reference numeral 42 in FIG. 1 designates a rotary blade 42A and a fixed blade 4.
2B shows a rotary cutter for cutting the laminated film 12 on the path 13. The rotary blade 42A is configured by providing a spiral blade portion on the outer circumference of a cylindrical shaft, and the fixed blade 42B has a linear blade portion parallel to the cylindrical shaft.

As shown in FIG. 2, the pressing roll driving device 36 includes a supporting shaft 44 having a circular cross section and arranged in parallel with the pressing roll 34, and a width direction of the supporting shaft 44 of the film path 13. The adjustment frame 46 supported at a position facing the substantially center, and both sides and the lower side of the adjustment frame 46 are supported by the support shaft 44 so as to be swingable around the axis thereof, and the support shaft 46. A support frame 48 extending in both directions along 44, and supported at both longitudinal ends of the support frame 48 so as to be able to advance and retreat in the direction of the first inclined surface 22B, and rotate the pressing roll 34 at the tip. A pair of left and right linear shafts 50 that are freely supported, and an actuator 5 that moves the linear shafts 50 back and forth in the axial direction.
2, and is arranged between the adjustment frame 46 and the support frame 48 as shown in an enlarged scale in FIG. 3, the support frame 48 is pressed against the adjustment frame 46 by a pressing roll at the tip of the linear shaft 50. 34 includes a roll urging spring 54 that urges the first and second inclined surfaces 22B and 22C in a pressure contacting direction. Reference numeral 56 in FIGS. 2 and 3 indicates an adjusting screw for adjusting the set load of the roll biasing spring 54.

The adjustment frame 46 is provided on the chamfered portion of the upper surface of the central portion of the cylindrical support shaft 44 in the longitudinal direction.
It is fastened and fixed by a screw 58.

On the other hand, the support frame 48 is disposed with the adjustment frame 46 in between, but a connecting portion 48A that traverses the lower side of the adjustment frame 46 in FIG.
3 constitutes a stopper surface 48B which comes into contact with the lower side surface of the adjustment frame 46 in FIG. 3, and the support frame 48 biased clockwise around the support shaft 44 by the roll biasing spring 54 in FIG. , Contacting the lower surface of the adjustment frame 46 at the stopper surface 48B,
The position is regulated in the pressed state. Therefore,
When the support frame 48 receives a force of a certain value or more in the counterclockwise direction in FIG. 3, it compresses the roll biasing spring 54 and swings in the counterclockwise direction.

Actuator 52 of the support frame 48
A bearing 60 is arranged closer to the center than the mounting portion, and the linear shaft 50, which is arranged parallel to the actuator 52, is axially reciprocally supported by the bearing 60. The pressing roll 3 of this linear shaft 50
Actuator 52A of actuator 52 at the end opposite to 4
A joint member 64 to be connected to is fixed.

The adhesive tape pulling means 38 is mounted on the joint member 64 so as to project from the joint member 64 coaxially with the linear shaft 50 and in the opposite direction, and to the guide shaft 66 in the axial direction. A bearing member 68 slidably supported, a film pullback spring 70 for urging the bearing member 68 in a direction to separate the bearing member 68 from the joint member 64, and the bearing member 68 allow the both longitudinal ends to be rotatable. The dancer roll 72 is supported. The guide shaft 66 is configured by further extending the linear shaft 50 from the joint member 64.

Here, the film pull-back spring 70 is
The pressing roll 34 by the pressing roll driving device 36
The spring force is set so that it can be contracted by the pulling force applied to the adhesive tape 30 at the time of protrusion.

The dancer roll 72 reaches the film / tape winding device 40 through the pressing roll 34.
Adhesive tape 30 and cover film 1 adhered thereto
2C is wrapped around.

The slackening device 2 is composed of a bracket 2A supported by the end of the guide shaft 66 protruding from the bearing member 68, and a push-in cylinder 2B composed of an air cylinder supported by the bracket 2A. Has been done. Working rod 2 of push-in cylinder 2B
The tip of C is arranged so as to contact the bearing member 68 from the opposite direction to the film pullback film pullback spring 70.

The film pulling apparatus 1 comprises a push-up cylinder 1A which is an air cylinder arranged below the tension roll 16A in FIG. 1, and its operating rod 1B has a working rod 1B.
The shafts of both ends of A in the film width direction are brought into contact with the shafts from below to lift them.

The film pulling mechanism 16 is a swing lever 1 for swingably supporting the tension roll 16A.
6B and a spring 16C for urging the end portion of the swing lever 16B on the side opposite to the tension roll 16A downward in the drawing, that is, in the direction of pulling the laminated film 12. Reference numeral 16D in FIG. 1 indicates an adjusting mechanism for adjusting the set load of the spring 16C.

Here, the film pull-back spring 70 is
The spring constant is set to be larger than that of the spring 16C in the film tensioning mechanism 16.

Further, the protrusion amount of the pressing roll 34 by the pressing cylinder 2B is determined by the pressing roll 34 when the pressing roll 34 pushes the cover film 12C in a standby state after peeling off the cover film 12C.
It is set as a range that does not reach the path 13.

As shown in the enlarged view of FIGS. 4 and 5, the half-cutting device 28 is orthogonal to the laminated film 12 and is rotatable in the widthwise plane of the laminated film 12 so as to be laminated. A disc cutter 78 that can reciprocate in the width direction of the film, and a pair of disc cutters 78, which are adjacent to both sides of the disc cutter 78 in the moving direction, are rotatably provided in a plane parallel to the plane of rotation of the disc cutter 78. A guide roll 8 whose common circumscribing surface on the laminated film side is substantially circumscribing the rotary blade edge 78A of the disc cutter 78
0.

The half-cutting device 28 includes a guideless rodless cylinder 82 arranged in the width direction along the laminated film 12 and a reciprocating movement in the width direction of the laminated film 12 by the rodless cylinder 82. A slide member 84 that is freely supported, supports the guide roll 80, and the disc cutter 78, and is supported by the slide member 84 so as to be movable back and forth within a certain range in the direction of the laminated film 12. Member 8
6, a spring 88 mounted between the movable member 86 and the slide member 84 for urging the movable member 86 toward the laminated film 12, and a spring adjusting means for adjusting the set length of the spring 88. And a micrometer 90 that is

Further, the half-cutting device 28 is arranged such that the laminated film 12 is interposed between the half-cutting device 28 and the disk cutter 7.
The disk cutter 7 is located at a position facing the traveling locus of 8
8 is provided with a cutter base 92 made of hard resin or metal that is pressed via the laminated film 12.

The rodless cylinder 82 and the cutter base 92 are supported by the same unit frame 94.

The unit frame 94 is disposed across the device in the width direction in parallel with the pressing rolls, and both ends thereof are fixed to the side wall 96 of the device as shown in FIG.

As shown in FIG. 4, the slide member 84 has its upper end fixed to the rodless cylinder 82 and its other end protruding downward from the movable member 86 so that the movable member 86 can move. Protrusion 84 across the underside of
A is provided.

A pair of guide roll support members 98 for rotatably supporting the guide roll 80 are provided at the ends of both ends of the projecting portion 84A which project below the movable member 86 and are connected. Has been done.

The movable member 86 is slidable between the pair of guide roll supporting members 98, 98.
4 is slidably arranged with respect to No. 4 via a slide shoe 86A.

The spring 88 is mounted between the protruding portion 84A of the slide member 84 and the spring receiver 86B protruding downward from the movable member 86 in FIG.
The movable member 86 is attached so as to urge it to the left in FIG. Reference numerals 88A and 8 in FIGS.
8B is a bolt for adjusting the set length of the spring 88,
Shows a nut.

The micrometer 90 is attached to the movable member 86, and the tip of the spindle 90A of the micrometer 90 contacts the end surface 84B of the slide member 84 at a position between the pair of guide roll support members 98. The position of the movable member 86 is regulated when the movable member 86 is biased rightward in FIGS. 4 and 5 against the biasing force of the spring 88.

As shown in FIG. 6, the unit tape 94 supports the adhesive tape supply device 32 through a slide mechanism 100 so as to be movable in a certain range in parallel with the pressing roll 34. This slide mechanism 100
Is a slide bar 100A arranged parallel to the pressing roll 34, a slide member 100B slidably slidable along the slide bar 100A and supporting the brake 102, and this slide member 100B on the slide bar 100A. Screw 1 for tightening and fixing at any position along
00C.

The brake 102 is provided with a roll holder 106 that holds the adhesive tape roll 104 in a rotatable and detachable manner.

The brake 102 is the roll holder 1
Adhesive tape 3 from adhesive tape roll 104 according to 06
By controlling the rotation speed of the adhesive tape 30 when it is unwound, tension of a certain value or more is applied to the adhesive tape 30.

Reference numerals 108A and 108B in FIGS. 1 and 6 denote
A guide roll for guiding a film and an adhesive tape from the dancer roll 72 to the film / tape winding device 40 is shown. These guide rolls 108
A and 108B are fixed to the unit frame 94 via a support plate 110.

As shown in FIGS. 7 and 8, the support shaft 44 of the pressing roll driving device 36 is attached to the vertical plane 22A of the temporary attaching means 22 through the advancing / retreating mechanism 112, as shown in FIGS. It is attached to and supported by the side wall 96 so as to be movable back and forth within a certain range in a direction orthogonal to the above.

The advancing / retreating mechanism 112 has a slide member 112A for supporting the end portion of the support shaft 44, a guide shaft 112B for slidably supporting the slide member 112A in a direction orthogonal to the vertical plane 22A, and A second guide shaft 112C attached to the slide member 112A in parallel with the guide shaft 112B and the second guide shaft 112 are slidably guided within a certain range, and tightened by a tightening handle 112D. The second guide shaft 112
It is composed of a fastening member 112E which is fastened and fixed to C.

The range of movement of the support shaft 44 and the members supported thereby by the advancing / retreating mechanism 112 in the direction orthogonal to the vertical plane 22A is in the state shown by the solid line and the state shown by the chain double-dashed line in FIG. And the normal operation (set) in the state shown by the solid line in FIG.
The position, which is indicated by a chain double-dashed line, means that the laminated film 12 is set manually or the rotary cutter 42 is used.
Alternatively, it is a position where the temporary attaching means 22 is pulled in to facilitate the maintenance.

Next, the operation of the apparatus of the above embodiment will be described.

First, the advancing / retreating mechanism 112 retracts the support shaft 44 to the position shown by the chain double-dashed line in FIG.
A gap is formed between the pressing roll 34 and the temporary attachment means 22, and the laminated film 12 is passed through the gap to set it. Next, the support shaft 44 is set to the position shown by the solid line in FIG.

At the start of work, the first and second inclined surfaces 22B and 22C at both ends of the pressing roll 34 are
Adjust the balance of contact pressure to. Pressing roll 34
The support frame 48 that supports both ends of the pressing roll 3
Since it is arranged in parallel with 4 and is attached to the support shaft at the substantially central portion thereof, the adjustment work is easy.

First, as shown in FIG. 9, from the vertical surface 22A of the temporary attachment means 22 to the first and second inclined surfaces 22B,
The laminated film 12 is supplied up to 22C, and the laminated film 12 is fixed in the state of FIG. 9 by the negative pressure applied from the suction hole.

At this time, the cover film 12C and the photosensitive layer 12B are cut by the half-cutting device 28 at the rear end position of the area where the photosensitive layer 12B is exposed. In this case, the base film 12A may be slightly cut.

In this process, by driving the slide member 84 by the rodless cylinder 82 in the half-cut device 28, the photosensitive layer 12B and the cover film 12C between the cutter base 92 and the cutter base 92 are inserted while the disc cutter 78 rotates. By cutting it.

At this time, before and after the disc cutter 78, the guide roll 80 presses the laminated film 12 onto the cutter base 92 at substantially the same position as the rotary blade edge 78A of the disc cutter 78 in the film thickness direction. Only the cover film 12C and the photosensitive layer 12B can be cut by the disc cutter 78 while the laminated film 12 is securely restrained. The preceding guide roll 8
The disk cutter 78 is lifted by 0 riding on the corner of the cutter table 92, for example, so that the rotary blade tip 78A of the disk cutter 78 does not collide with the corner or the like and the blade is not spilled. Further, since the cutter table 92 is made of hard resin or metal, the entire laminated film 12 does not escape when the cover film 12C and the photosensitive layer 12B are cut by the disk cutter 78, and the disk cutter 78 is used. The cover film 12C and the photosensitive layer 12B can be reliably cut only by accurately adjusting the cutting depth by.

Next, the linear shaft 50 is driven by the actuator 52 of the pressing roll driving device 36, and the pressing roll 34 supported at the tip of the linear shaft 50 is moved forward, which is further moved from the first inclined surface 22B of the temporary attaching means 22. Is moved to the tip of the second inclined surface 22C while pressing the adhesive surface of the adhesive tape 30 (see FIG. 10). At this time, when the brake 102 (see FIG. 6) in the adhesive tape supply device 32 is operated to fix the roll holder 106 and the unwinding of the adhesive tape 30 is regulated, the adhesive tape 30 is changed to the film / tape winding device 40. Dancer roll 7 from the side
2 will be supplied.

At this time, if the film / tape winding device 40 is restrained, the first and second inclined surfaces 22B,
The adhesive tape 30 supplied to the 22C is the dancer roll 7
It is supplied by compressing the film pull-back spring 70 that urges 2 and shortening the path length of the adhesive tape.

Next, as shown in FIG. 11, the actuator 52 pulls the pressing roll 34 back to its original position via the linear shaft 50. At this time, the adhesive tape 30
Is a film pullback spring 7 for urging the dancer roll 72.
The zero is pulled by returning to its original length. At the same time, only the cover film 12C that adheres to the base film 12 due to the pulled adhesive tape 30.
It will be peeled off from A and the photosensitive layer 12B.

Next, as shown in FIG. 12, the temporary attachment means 22 is lowered, and the base film 12A and the photosensitive layer 12B adsorbed and held at the tips of the temporary attachment means 22 from the photosensitive layer 12B side to the vicinity of the tip of the substrate 20. At the same time, the film / tape winding device 40 winds the adhesive tape 30 and the cover film 12C to which the adhesive tape 30 adheres, in synchronization with the lowering of the temporary attaching means 22. At this time, the adhesive tape 30 is unwound from the adhesive tape supply device 32 side while applying a constant tension by the brake 102.

The temporary attaching means 22 is the base film 12A.
After the photosensitive layer 12B is temporarily attached to the vicinity of the tip of the substrate 20, the photosensitive layer 12B is separated from the substrate 20 and returned to the position shown in FIG.

At this time, since the negative pressure applied to the temporary attaching means 22 is cut off, the laminated film 12 should be easily pulled upward without being adsorbed by the temporary attaching means 22. But the cover film is adhesive tape 3
Since the adhesive tape 30 is adhered to 0, and the adhesive tape 30 is immovably constrained among the adhesive tape supply device 32, the pressing roll 34, the dancer roll 72, and the film / tape winding device 40, the laminated film 12 is also constrained. It will be in a state.

Therefore, even if the tension roll 16A of the film pulling mechanism 16 is pulled by the spring 16C, the spring constant of the spring 16C causes the film pull-back spring 70 to move.
As long as it is smaller than the spring constant of
The laminated film 12 cannot be pulled against 0.

Therefore, between the temporary attaching means 22 raised from the temporary attaching tip portion of the laminated film 12, the laminated film 12 is formed.
Is in a loosened state, and the lamination roll 2 remains as it is.
When pressure-bonded by 4, wrinkles and bubbles may be generated.

In this embodiment, as shown in FIG. 13, after the tacking by the tacking means 22 is finished, the pushing cylinder 2B of the slack imparting device 2 is driven by the process of raising the tacking means 22 or its raising rod to drive the working rod thereof. By 2C, the bearing member 68 is pressed against the film pull-back spring 70 toward the pressing roll 34.

As a result, the adhesive tape 30 and the cover film 12C adhered to the adhesive tape 30 are moved to the pressing roll 34.
Is loosened between the dancer roll 72 and the dancer roll 72, and it becomes easy to pull in the direction of the tension roll 16A by this looseness.

On the other hand, the push-up cylinder 1A is driven at the same time as the operation of the push-in cylinder 2B is started or after the operation is finished, and both ends of the tension roll 16A are lifted upward in FIG. Pull up.

Therefore, as shown in FIG. 13, the laminated film 12 which has been loosened after the temporary attachment is pulled up to the extent that no wrinkles or bubbles are generated when it is pressed by the lamination roll 24.

Note that if the lamination roll 24 is pulled up to the position shown by the alternate long and short dash line in FIG. 13, the pressing by the lamination roll 24 becomes impossible, so that the pushing cylinder is pulled up to the extent shown by the alternate long and two short dashes line in the figure. 2B
Adjust the stroke of.

The push-up cylinder 1A in the film pulling device 1 pushes the tension roll 16A upward by its operating rod 1B and then immediately returns to the retracted position. Tension roll 16A
Is urged in the film pulling direction by the spring 16C via the swing arm 16B, so that it does not return to the substrate 20 direction even when the operating rod 1B of the push-up cylinder 1A is retracted.

Prior to the start of pressure bonding by the lamination roll 24, as shown in FIG. 14, the rotary cutter 42 is used to move the laminated film 12 to a position further above the cutting line of the cover film 12C by the disc cutter 78. Cut in the width direction.

Therefore, the cover film 12C is left on the rear end side of the base film 12A and the photosensitive layer 12B with a constant length.

As shown in FIG. 15, the range of the remaining cover film 12C is set to protrude from the rear end 20A of the substrate 20 by a certain distance, for example, 1 to 2 cm.

In this way, the rear end 20A of the substrate 20 is
The portion of the photosensitive layer 12B that protrudes is in a state of being sandwiched between the base film 12A and the cover film 12C, and the protruding portion is a nip device (not shown).
As shown in FIG. 16, the base film 12A can be easily peeled off in a later step by gripping with, and since the photosensitive layer 12B is not exposed, it sticks to it when gripping with the nip device. Never.

In the above embodiment, the slack imparting device presses the dancer roll 72 toward the pressing roll 34 to cause slack in the adhesive tape 30 and the cover film 12C adhered thereto. Is not limited to this, and may be any one as long as it loosens the adhesive tape 30 and the cover film 12C between the pressing roll 34 and the film / tape winding device 40. Therefore, for example, a tension roll for increasing the film path is provided between the dancer roll 72 and the film / tape winding device 40, and the tension roll is pushed back in the film path shortening direction to form the adhesive tape 30 and the cover film 12C. You may make it give looseness. The actuator for giving slack is not limited to the cylinder, but may be a motor.

In addition, in the above-mentioned embodiment, after the temporary attachment of the film by the temporary attachment means 22 is completed, the slackening device 2 forms the slack in the adhesive tape 30 and the cover film 12C, and at the same time or after that, the film tensioning device 1 laminates them. Although the film 12 is pulled, the present invention is not limited to this, and the laminated film 12 may be pulled by the film tensioning device 1 without forming slack by the slackening device 2. In this case, the dancer roll 7 is inserted through the cover film 12C and the adhesive tape 30.
2 is moved in the direction of the pressing roll 34 against the biasing force of the film pullback spring 72.

Further, although the push-up cylinder 1A of the film pulling apparatus 1 is usually an air cylinder, it may be a hydraulic cylinder, a hydraulic cylinder or a gas cylinder. Also, an actuator other than the cylinder, for example, a motor may be used.

In the half-cut device 28, the slide member 84 is driven by the rodless cylinder 82, but the present invention is not limited to this, and the belt, the chain, the screw shaft, etc. can be moved in the film width direction. It is sufficient that the slide member 84 is driven by a reciprocating device.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a film sticking apparatus according to an embodiment of the present invention.

FIG. 2 is an enlarged plan view showing a main part of a pressing roll driving device in the embodiment.

FIG. 3 is an enlarged sectional view taken along line III-III in FIG.

FIG. 4 is a side view with a partial cross section showing a half-cutting device in the same embodiment.

5 is a V-V line view of FIG. 4.

FIG. 6 is a rear view showing the adhesive tape feeder of the same embodiment.

FIG. 7 is a partially sectional front view showing a mechanism for advancing and retracting the adhesive tape feeding device of the embodiment.

FIG. 8 is a sectional view taken along line VIII-VIII in FIG.

FIG. 9 is a cross-sectional view showing a standby state of a step of peeling a cover film by the apparatus of the embodiment.

FIG. 10 is a sectional view showing an adhesive tape pressing step in the peeling step.

FIG. 11 is a cross-sectional view showing a state of a pressing roll retracting position in the peeling process.

FIG. 12 is a cross-sectional view showing a process of temporarily attaching the laminated film after peeling the cover film in the apparatus of the embodiment.

FIG. 13 is a cross-sectional view showing a step of pulling back the laminated film after the temporary attachment according to the embodiment.

FIG. 14 is a cross-sectional view showing a state immediately before the end of the step of attaching the laminated film to the substrate according to the example.

FIG. 15 is a cross-sectional view showing a state of a laminated film attached to a substrate by the apparatus of the example.

FIG. 16 is a cross-sectional view showing a process of peeling off the base film while leaving the photosensitive layer on the substrate.

FIG. 17 is an enlarged sectional view showing a laminated film.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Film tension | pulling apparatus 1A ... Pushing up cylinder 1B ... Actuating rod 2 ... Slackening apparatus 2B ... Pushing cylinder 2C ... Actuating rod 10 ... Film sticking apparatus 12 ... Laminating film 12A ... Base film 12B ... Photosensitive layer 12C ... Cover film 13 ... pass 14 ... film supply roll 16 ... film tension mechanism 16A ... tension roll 16B ... swing arm 16C ... film tension spring 18 ... transport means 20 ... substrate 22 ... temporary attachment means 22A ... vertical surface 22B ... first inclined surface 22C Second inclined surface 24 Lamination roll 28 Half cut device 30 Adhesive tape 32 Adhesive tape supply device 34 Pressing roll 36 Pressing roll driving device 38 Adhesive tape pulling back device 40 Film / tape winding device 44 … Support shaft 46… Adjusting shaft Hom 48 ... Supporting frame 52 ... Actuator 54 ... Roll biasing spring 56 ... Adjusting screw 58 ... Screw 60 ... Bearing 66 ... Guide shaft 70 ... Film pullback spring 72 ... Dancer roll 78 ... Disc cutter 78A ... Rotating blade tip 82 ... Rodless Cylinder 84 ... Sliding member 86 ... Movable member 88 ... Spring 90 ... Micrometer 92 ... Cutter base 94 ... Unit frame

Claims (15)

[Claims] 1. A laminated film, which comprises at least a base film, a photosensitive layer and a cover film laminated on the photosensitive layer, and which is wound around a film supply roll, through a tension roll, by a temporary attaching means, and by a conveying means. Leading to the tip of the substrate being conveyed, in a state where the cover film is peeled off, after temporarily attaching to the tip of the substrate, while pressing the substrate with a lamination roll, including the step of conveying the substrate, the tension roll, , A spring is urged by a spring via an oscillating arm in a direction to pull back the laminated film, and the temporary attaching means has a vertical plane along the path of the laminated film at the substrate side tip, and the path obliquely from the tip of the vertical plane. The first inclined surface that is refracted in a direction away from the first inclined surface and the tip of the first inclined surface is further refracted in a direction away from the path A second inclined surface and a vertical surface and suction holes for sucking and holding the laminated film on the first and second inclined surfaces. While holding
At the upstream position of the temporary attachment means, the cover film and the photosensitive layer are cut in the film width direction while leaving the base film, and along the laminated film, a pressing roll arranged in the width direction, an adhesive tape. The pressure-sensitive adhesive tape is adhered to the cover film by wrapping the pressure-sensitive adhesive surface outside and pressing the roll while rotating the pressing roll from the first inclined surface of the tip of the temporary attaching means to the tip of the second inclined surface. And, when the pressing roll is separated from the tip end position of the second inclined surface, and when the pressing roll is separated from the second inclined surface,
The adhesive tape, in synchronization with the pressing roll, is pulled in a direction away from the inclined surface, adhered to the adhesive tape, the cover film peeled from the photosensitive layer on the base film by the separation of the adhesive tape, It is wound up together with the adhesive tape, and the temporary attaching means temporarily attaches the laminated film from which the cover film has been peeled off to the tip of the substrate, and then the temporary attaching means starts separating from the substrate. At least a part of the time until the lamination film pressure-bonding start by the lamination roll, the tension roll is pulled back by a predetermined distance by driving the tension roll in the lamination film tension direction, until the lamination film pressure-bonding start by the lamination roll. The film tension is characterized in that the drive of the tension roll is released. Method. 2. The method according to claim 1, wherein, after the temporary attaching means starts separating from the substrate and before or simultaneously with the start of pulling back the laminated film, the pressing roll to the cover film winding means. A film sticking method, wherein slack is applied to the cover film and the adhesive tape adhered to the cover film in between. 3. A dancer roll urged by a spring to pull the cover film and the adhesive tape toward the winding means between the pressing roll and the cover film winding means. The film sticking method, wherein the slack is imparted by pushing this dancer roll in the pressing roll direction. 4. A laminated film, which comprises at least a base film, a photosensitive layer and a cover film laminated on the photosensitive layer, and which is wound around a film supply roll. A laminated film is pulled back by a spring via a swing arm. It is guided to the tip of the substrate that is conveyed by the conveying means through the tension roll that biases the substrate, and after the cover film is peeled off, it is temporarily attached to the tip of the substrate by the temporary attaching means, and then pressure-bonded to the substrate by the lamination roll. While, in the film sticking device for transporting the substrate, a vertical plane along the path of the laminated film at the substrate-side tip of the temporary attachment means, and a bending extension in a direction obliquely separated from the path from the tip of the vertical plane. A first inclined surface and a second inclined surface that bends in a direction away from the path from the tip of the first inclined surface. And a suction hole for suction-holding the laminated film is formed on the vertical surface and the first and second inclined surfaces, and is arranged on the upstream side of the temporary attaching means, and moves in the film width direction to move the film. A half-cutting device for cutting the cover film and the photosensitive layer while leaving the base film, and an adhesive tape feeding device which is arranged in the vicinity of the temporary attaching means and which feeds an adhesive tape parallel to the laminated film and in a moving direction. An adhesive tape from the adhesive tape supply device, which is arranged along the laminated film in the width direction thereof and is freely rollable to the first and second inclined surfaces of the tip of the temporary attaching means. A pressing roll that is wound around with its adhesive surface outside, and the pressing roll is rotatably supported, and the pressing roll is supported from the first inclined surface to the second inclined surface of the tip of the temporary attaching means. Pressing while rotating until, the pressure-sensitive adhesive tape is adhered to the cover film, and the pressing roll driving device for separating from the second inclined surface tip position, and when separating the pressing roll from the second inclined surface,
Adhesive tape pulling back means for pulling the adhesive tape in a direction away from the inclined surface in synchronization with the pressing roll, and being adhered to the adhesive tape, and separated from the photosensitive layer on the base film by the separation of the adhesive tape. Film that winds the cover film together with the adhesive tape
A laminated film, which is arranged so as to be engageable with a tape winding device and a laminated film tensioning mechanism including the tension roll and the swing arm, and from which the cover film is peeled off, is temporarily attached to the tip of the substrate by the attaching means. After that, at least a part of the time from the time when the temporary attachment means starts to separate from the substrate until the time when the lamination film pressure bonding by the lamination roll is started, the tension roll is engaged with the lamination film tensioning mechanism. A film tensioning device for driving the laminated film in a tensile direction of the laminated film by a predetermined distance, and a film tensioning device. 5. The temporary attachment means for separating the adhesive tape and the cover film adhered to the adhesive tape between the pressing roll and the film / tape winding device from the substrate according to claim 4. A film sticking device provided with a slack imparting device for slackening after starting, before or at the same time as starting film pulling by the film pulling device. 6. The slack imparting device according to claim 5,
It is a pushing device that is mounted between the dancer roll of the adhesive tape pulling back means and the pressing roll driving device, and pushes the dancer roll in the pressing roll direction with respect to the pressing roll driving device. Film sticking device. 7. The guide shaft according to claim 6, wherein the adhesive tape pulling back means is provided so as to project toward the slack imparting device side, and is moved forward and backward integrally with the pressing roll.
And a bearing member that is slidably supported on the guide shaft and is biased and supported by the film pull-back spring in a direction away from the pressing roll, and that rotatably supports the dancer roll. The pushing device is a cylinder device, and one of the cylinder and the rod is connected to the guide shaft and the other is connected to the bearing member, respectively. 8. The film tensioning device according to claim 4, wherein the film tensioning device is configured to return to the standby position after driving the tension roll in the laminating film tensioning direction for a predetermined distance. Film sticking device. 9. The pressure-sensitive adhesive tape pulling-back means according to claim 4, wherein the pressure-sensitive adhesive tape pulling-back means is attached to the pressing roll driving device in parallel with the pressing roll and movably in an advancing and retracting direction of the pressing roll. Between the pressing roll and the film tape winding device, a dancer roll around which the adhesive tape and the cover film peeled off by the adhesive tape are wound, and the dancer roll is biased in the pressing roll retracting direction, and its spring force is applied. And a film pull-back spring configured to be compressed by a pulling force applied to the adhesive tape when the pressing roll is projected by the pressing roll drive device. 10. The film sticking device according to claim 9, wherein the film pull-back spring of the adhesive tape pull-back means has a spring constant larger than that of a spring for biasing the swing arm. 11. The method according to claim 4, wherein
The pressing roll driving device includes a support shaft arranged in parallel with the pressing roll, an adjustment frame supported at a position of the support shaft that faces the substantially center of the film path width direction, and a position in the vicinity of the adjustment frame. A support frame that is swingably supported around the axis of the support shaft and extends on both sides along the support shaft; and at both ends in the longitudinal direction of the support frame, the first inclined surface direction. A pair of linear shafts that are extensible and supported on the tip and rotatably support the pressing roll at the tip, an actuator that advances and retracts the linear shafts in the axial direction, and a support frame that is disposed between the adjustment frame and the support frame. Against the adjustment frame in the direction in which the pressing roll at the tip of the linear shaft comes into pressure contact with the inclined surface. Film applying apparatus characterized by a roll biasing spring, which is configured to include that. 12. The method according to any one of claims 4 to 11,
The half cut device is orthogonal to the laminated film,
Further, a disc cutter which is rotatable in the width direction of the laminated film and in a plane orthogonal to this, and which is reciprocally movable in the width direction of the laminated film, and a disc cutter which is adjacent to both sides in the moving direction of the disc cutter. A pair of rotatably provided in a plane parallel to the plane of rotation, and a common circumscribing surface on the laminated film side of the pair of rotators has a guide roll that is substantially circumscribing the rotary blade edge of the disc cutter. A film sticking device. 13. The half-cutting device according to claim 12, wherein the half-cutting device includes a width direction driving device including a guide member arranged in a width direction along the laminated film, and the width direction driving device causes the half cutting device to move along the guide member. The slide member is reciprocally supported in the width direction of the laminated film, supports the guide roll, and supports the disc cutter, and is movable back and forth within a certain range in the laminated film direction. A movable member supported by
A spring mounted between the movable member and the slide member for urging the movable member in the direction of the laminated film; and spring adjusting means for adjusting the set length of the spring. Film sticking device. 14. The cutter base made of an elastic material, according to claim 12 or 13, wherein the disc cutter is pressed by the laminated film at a position facing the running path of the disc cutter with the laminated film interposed therebetween. A film sticking device characterized by being provided. 15. The film sticking device according to claim 14, wherein the width direction driving device and the cutter base are supported by the same unit frame.