JPH09134563A5 - - Google Patents

Info

Publication number
JPH09134563A5
JPH09134563A5 JP1996236137A JP23613796A JPH09134563A5 JP H09134563 A5 JPH09134563 A5 JP H09134563A5 JP 1996236137 A JP1996236137 A JP 1996236137A JP 23613796 A JP23613796 A JP 23613796A JP H09134563 A5 JPH09134563 A5 JP H09134563A5
Authority
JP
Japan
Prior art keywords
speed
tape
running
reel
deceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996236137A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09134563A (ja
JP3562160B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP23613796A priority Critical patent/JP3562160B2/ja
Priority claimed from JP23613796A external-priority patent/JP3562160B2/ja
Publication of JPH09134563A publication Critical patent/JPH09134563A/ja
Application granted granted Critical
Publication of JP3562160B2 publication Critical patent/JP3562160B2/ja
Publication of JPH09134563A5 publication Critical patent/JPH09134563A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP23613796A 1995-09-08 1996-09-06 テープ走行装置 Expired - Fee Related JP3562160B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23613796A JP3562160B2 (ja) 1995-09-08 1996-09-06 テープ走行装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP23102095 1995-09-08
JP7-231020 1995-09-08
JP23613796A JP3562160B2 (ja) 1995-09-08 1996-09-06 テープ走行装置

Publications (3)

Publication Number Publication Date
JPH09134563A JPH09134563A (ja) 1997-05-20
JP3562160B2 JP3562160B2 (ja) 2004-09-08
JPH09134563A5 true JPH09134563A5 (2) 2004-09-09

Family

ID=26529656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23613796A Expired - Fee Related JP3562160B2 (ja) 1995-09-08 1996-09-06 テープ走行装置

Country Status (1)

Country Link
JP (1) JP3562160B2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005104196A1 (ja) 2004-04-23 2005-11-03 Nikon Corporation 計測方法、計測装置、露光方法及び露光装置

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