JPH09142811A - Ozone generator - Google Patents
Ozone generatorInfo
- Publication number
- JPH09142811A JPH09142811A JP31071395A JP31071395A JPH09142811A JP H09142811 A JPH09142811 A JP H09142811A JP 31071395 A JP31071395 A JP 31071395A JP 31071395 A JP31071395 A JP 31071395A JP H09142811 A JPH09142811 A JP H09142811A
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- flat plate
- reactor
- raw material
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 61
- 239000002994 raw material Substances 0.000 claims abstract description 42
- 238000004891 communication Methods 0.000 claims abstract description 9
- 238000000605 extraction Methods 0.000 claims abstract description 7
- 125000006850 spacer group Chemical group 0.000 claims description 16
- 239000000498 cooling water Substances 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000007789 gas Substances 0.000 description 39
- 238000009833 condensation Methods 0.000 description 7
- 230000005494 condensation Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 239000003507 refrigerant Substances 0.000 description 5
- 239000002826 coolant Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000000638 solvent extraction Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000000112 cooling gas Substances 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000003899 bactericide agent Substances 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000002781 deodorant agent Substances 0.000 description 1
- 230000001877 deodorizing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
(57)【要約】
【課題】 本発明の課題は、製造が容易でしかも高信頼
性のオゾン生成装置を安価に得ることにある。
【解決手段】 上記課題を解決するために本発明は、平
板電極１を上下多段に積層すると共に、これら各平板電
極１間にオゾンを生成すべく放電ギャップ３を区画形成
した反応器４を形成し、この反応器４の最上下に位置す
る平板電極１，１に、それぞれ原料ガス入口８又はオゾ
ン出口９を形成すると共に、この最上下平板電極間に位
置する各平板電極１に、上記放電ギャップ３間をそれぞ
れ連通すべく連通孔１０を穿孔し、さらに、上記原料ガ
ス入口８及びオゾン出口９にそれぞれ原料ガス供給管８
ａ及びオゾン取出管９ａを接続する。
(57) Abstract: An object of the present invention is to obtain an ozone generator that is easy to manufacture and highly reliable, at low cost. In order to solve the above-mentioned problems, the present invention forms a reactor 4 in which flat plate electrodes 1 are stacked in upper and lower stages and a discharge gap 3 is partitioned between the flat plate electrodes 1 to generate ozone. Then, the raw material gas inlet 8 or the ozone outlet 9 is formed in each of the flat plate electrodes 1 and 1 located at the uppermost lower part of the reactor 4, and the discharge is performed on each of the flat plate electrodes 1 located between the uppermost lower plate electrodes. A communication hole 10 is bored to communicate between the gaps 3, and the raw material gas supply pipe 8 is provided to the raw material gas inlet 8 and the ozone outlet 9, respectively.
a and the ozone extraction pipe 9a are connected.
Description
【０００１】[0001]
【発明の属する技術分野】本発明は脱臭・殺菌作用など
を有するオゾンを発生するオゾン生成装置に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator for generating ozone having a deodorizing / sterilizing effect.
【０００２】[0002]
【従来の技術】強力な酸化力を有し、脱臭・殺菌剤等と
して用いられるオゾンは、一般に無声放電を利用して生
成されており、そのための装置も種々提案されている
が、本発明者らはこのオゾンを生成する装置の一つとし
て先に図４に示すような構造のオゾン生成装置を提案し
ている（特願平５−６５４９４号）。2. Description of the Related Art Ozone, which has a strong oxidizing power and is used as a deodorant / bactericidal agent, is generally produced by using a silent discharge, and various devices for it have been proposed. Have previously proposed an ozone generator having a structure as shown in FIG. 4 as one of the ozone generators (Japanese Patent Application No. 5-65494).
【０００３】図示するように、このオゾン発生装置は、
誘電体膜６を備えた平板状の電極１を複数枚上下多段に
積層すると共に、これら電極１間にそれぞれ額縁状のス
ペーサ２を介して放電ギャップ３を区画形成した積層型
の反応器４を備えて構成されている。そして、この反応
器４を構成する各平板電極１に高電圧線Ｖとアース線Ａ
を交互に接続してアース電極と高電圧電極が対向するよ
うに形成した状態とした後、これに高電圧を印加して放
電を行うと同時に、各放電ギャップ３にそれぞれ純酸素
ガスあるいは空気等の酸素含有原料ガスを通過させるこ
とで原料ガスから酸素の同素体であるオゾンを連続的に
生成するものである。尚、図中５は、放電による電極の
加熱を防止すべく冷却水や冷却ガス等の冷媒を流すため
に、各平板電極１内に形成された冷媒流路である。As shown in the figure, this ozone generator is
A laminated reactor 4 is formed by stacking a plurality of flat plate-shaped electrodes 1 having a dielectric film 6 vertically and in multiple layers, and forming discharge gaps 3 between these electrodes 1 with a frame-shaped spacer 2 interposed therebetween. It is equipped with. Then, a high voltage line V and an earth line A are provided on each plate electrode 1 constituting the reactor 4.
Are alternately connected to form a state in which the ground electrode and the high-voltage electrode are opposed to each other, and then a high voltage is applied to this to perform discharge, and at the same time, a pure oxygen gas, air, or the like is supplied to each discharge gap 3. Ozone, which is an allotrope of oxygen, is continuously generated from the raw material gas by passing the raw material gas containing oxygen. Reference numeral 5 in the drawing denotes a coolant passage formed in each flat plate electrode 1 for flowing a coolant such as cooling water or cooling gas in order to prevent heating of the electrode due to discharge.
【０００４】[0004]
【発明が解決しようとする課題】ところで、このような
構造をしたオゾン生成装置では以下に示すような不都合
点があった。However, the ozone generator having such a structure has the following disadvantages.
【０００５】１．先ず、各放電ギャップ３がそれぞれ独
立し、個々の放電ギャップ３を流路として原料ガスを流
すようになっていることから、図示するように、それぞ
れの原料ガス入口８とオゾン出口９に原料ガスを供給す
る配管８ａと、オゾンを取り出す配管９ａとを放電ギャ
ップ３と略同じ数だけ接続する必要があるため、多数の
配管や継手の組み込み作業が必要となり、製造効率が良
くなかった。しかも、これら配管８ａ、９ａ、特に、オ
ゾンを取り出す側の配管９ａはオゾンに対する耐食性に
優れたテフロン等の高価な樹脂製のものが数多く必要と
されることから製造部品コストが高くなってしまうとい
った欠点があった。[0005] 1. First, since the discharge gaps 3 are independent of each other and the raw material gas flows through the individual discharge gaps 3, the raw material gas is supplied to the respective raw material gas inlets 8 and ozone outlets 9 as shown in the figure. Since it is necessary to connect the pipes 8a for supplying ozone and the pipes 9a for extracting ozone in substantially the same number as the discharge gap 3, it is necessary to assemble a large number of pipes and joints, resulting in poor manufacturing efficiency. Moreover, since many of these pipes 8a, 9a, especially the pipe 9a for taking out ozone, are made of expensive resin such as Teflon which is excellent in corrosion resistance to ozone, the cost of manufacturing parts increases. There was a flaw.
【０００６】２．また、従来のオゾン生成装置では反応
器４自体が一応、ケーシング（図示せず）などで覆われ
ているものの、基本的に大気中に開放された状態となっ
ていることから、その周囲に空気中の水分が、平板電極
１内を流れる冷却水等の冷媒によって冷却されてその反
応器４表面に結露し、これによって電極１に印加してい
る高電圧がリークしてしまうおそれがあった。[0006] 2. Further, in the conventional ozone generator, although the reactor 4 itself is temporarily covered with a casing (not shown) or the like, since it is basically open to the atmosphere, air is not present around it. There is a risk that the water content inside is cooled by a cooling medium such as cooling water flowing in the flat plate electrode 1 to cause dew condensation on the surface of the reactor 4, thereby leaking the high voltage applied to the electrode 1.
【０００７】３．さらに、図示するように、この反応器
４を構成する各放電ギャップ３は、これを区画形成すべ
く各電極１の外縁部に位置するガスケットなどのスペー
サ２を上下押え板７，７とボルトナット７ａによって上
下から圧縮することで気密性が保持されるようになって
いることから、その間隔の大きさや幅を均一にするため
の寸法調整が困難であり、その調整作業には高度な熟練
度を要するといった不都合があった。[0007] 3. Further, as shown in the drawing, each discharge gap 3 constituting this reactor 4 is provided with spacers 2 such as gaskets located at the outer edge portions of each electrode 1 for partitioning and forming the reactor 2. Since the airtightness is maintained by compressing it from above and below by 7a, it is difficult to adjust the size to make the size and width of the interval uniform, and the adjustment work requires a high degree of skill. There was an inconvenience that it required.
【０００８】そこで、本発明はこのような課題を有効に
解決するために案出されたものであり、その主な目的は
製造が容易で、しかも安価に得ることができる新規なオ
ゾン生成装置を提供するものである。Therefore, the present invention has been devised to effectively solve such a problem, and its main purpose is to provide a novel ozone generator which is easy to manufacture and can be obtained at low cost. It is provided.
【０００９】[0009]
【課題を解決するための手段】上記課題を解決するため
に第一の発明は、平板電極を上下多段に積層すると共
に、これら各平板電極間にオゾンを生成すべく放電ギャ
ップを区画形成した反応器を形成し、この反応器の最上
下に位置する平板電極に、それぞれ原料ガス入口又はオ
ゾン出口を形成すると共に、この最上下平板電極間に位
置する各平板電極に、上記放電ギャップ間を連通すべく
連通孔を穿孔し、さらに、上記原料ガス入口又はオゾン
出口にそれぞれ原料ガス供給管及びオゾン取出管を接続
してなるものである。従って、反応器内の各放電ギャッ
プ間が全て連通されて一つの流路を形成することとなる
ため、必要とする配管の数や継手の組み込み作業が少な
くなって製造が容易となると共に、製造コストも安価に
抑えることができる。In order to solve the above problems, the first invention is a reaction in which flat plate electrodes are stacked in upper and lower stages and a discharge gap is formed between the flat plate electrodes so as to generate ozone. And forming a source gas inlet or ozone outlet on the flat plate electrode located at the bottom of the reactor, and connecting the discharge gaps to the flat plate electrodes located between the top and bottom plate electrodes. A communication hole is formed to allow the gas to pass therethrough, and a raw material gas supply pipe and an ozone extraction pipe are connected to the raw material gas inlet or the ozone outlet, respectively. Therefore, since the discharge gaps in the reactor are all communicated to form one flow path, the number of required pipes and the work of assembling the joint are reduced, and the manufacturing is facilitated, and the manufacturing is facilitated. The cost can be kept low.
【００１０】また、第二、第三の発明では、この反応器
自体を密閉容器に収容し、この密閉容器内に直接原料ガ
スを供給して原料ガスの流路として用いたことから、上
述した効果に加えて、この原料ガスの露点を管理するだ
けで、反応器表面への結露が防止され、これによる高電
圧のリーク等の不都合を未然に防止できる。Further, in the second and third inventions, the reactor itself is housed in a closed container, and the raw material gas is directly supplied into the closed container to be used as the flow path of the raw material gas. In addition to the effect, only by controlling the dew point of the raw material gas, dew condensation on the surface of the reactor can be prevented, and inconvenience such as high voltage leak can be prevented.
【００１１】さらに、第四の発明では、上記反応容器の
放電ギャップを区画形成するために、従来のガスケット
に代えて、額縁状のセラミック製スペーサを用いたこと
から、従来のような圧縮による放電ギャップの寸法調整
が不要となり、高精度の反応器を容易に得ることがで
き、さらにこのスペーサと平板電極同士を２００℃以下
の低温焼成型の無機接着剤で接合したため、放電ギャッ
プの気密性を容易確実に保持することができる。Further, in the fourth aspect of the present invention, a frame-shaped ceramic spacer is used in place of the conventional gasket in order to define the discharge gap of the reaction vessel. Since it is not necessary to adjust the size of the gap, a high-precision reactor can be easily obtained. Furthermore, since the spacer and the flat plate electrodes are joined by a low temperature firing type inorganic adhesive of 200 ° C or less, the airtightness of the discharge gap can be improved. It can be easily and surely held.
【００１２】また、第五の発明では、従来と同様に、各
平板電極に、冷却水を流すための冷却水路又は冷却風を
流すための冷却風路を形成することで、電極を直接冷却
することができるため、発熱に伴うオゾン生成率の低下
を未然に防止することができる。Further, in the fifth aspect of the invention, as in the conventional case, the electrodes are directly cooled by forming a cooling water passage for flowing cooling water or a cooling air passage for flowing cooling air in each plate electrode. Therefore, it is possible to prevent a decrease in the ozone generation rate due to heat generation.
【００１３】[0013]
【発明の実施の形態】次に、本発明を実施する好適一形
態を説明する。Next, a preferred embodiment of the present invention will be described.
【００１４】図１は本発明に係るオゾン生成装置の一形
態を示す構成図である。FIG. 1 is a block diagram showing an embodiment of the ozone generator according to the present invention.
【００１５】まず、図中４は本発明装置の主要部を構成
する反応器であり、この反応器４は平板電極１，１を複
数枚上下多段に積層すると共に、これら各平板電極１，
１間に、樹脂製ガスケットなどからなる額縁状のスペー
サ２を介して放電ギャップ３が区画形成されている。ま
た、この反応器４を構成する各平板電極１，１の表面に
は誘電体膜６が被覆形成されると共に、各平板電極１，
１には交互にアース電線Ａと高電圧電線Ｂが接続されて
アース電極と高電圧電極が交互に形成されており、この
アース電極と高電圧電極間に高電圧を印加することで、
放電ギャップ３内に放電が発生されるようになってい
る。First, reference numeral 4 in the drawing is a reactor which constitutes a main part of the apparatus of the present invention. The reactor 4 is formed by stacking a plurality of flat plate electrodes 1 and 1 in an upper and lower multistage and at the same time each of the flat plate electrodes 1 and 1.
A discharge gap 3 is defined between the two via a frame-shaped spacer 2 made of a resin gasket or the like. Further, a dielectric film 6 is formed on the surface of each plate electrode 1, 1 which constitutes this reactor 4 and each plate electrode 1, 1.
The ground electric wire A and the high-voltage electric wire B are alternately connected to 1 to form the ground electrode and the high-voltage electrode alternately. By applying a high voltage between the ground electrode and the high-voltage electrode,
Discharge is generated in the discharge gap 3.
【００１６】また、この反応器４の最上部に位置する平
板電極１には、その側面から下面側にかけて連通された
原料ガス入口８が穿孔されると共に、原料ガスを供給す
るための原料ガス供給管８ａが接続されており、この平
板電極１の下面に位置する放電ギャップ３側に原料ガス
を供給するようになっている。一方、反応器４の再下部
に位置する平板電極１側にもその外側からその上面側に
かけて連通されたオゾン出口９が穿孔されると共に、オ
ゾンを取り出すためのオゾン取出管９ａが接続されてお
り、この平板電極１の下面に位置する放電ギャップ３側
のガスを反応器４外へ取り出すようになっている。さら
に、これら最上下に位置する平板電極１，１間の各平板
電極１，…には、これを上下に貫通するような連通孔１
０が、各平板電極１の対角付近に交互にそれぞれ穿孔さ
れており、各平板電極１，…の上下に位置する放電ギャ
ップ３，３がこの連通孔１０によって上下に連通されて
いる。従って、原料ガス供給管８ａから原料ガス入口８
側に供給された原料ガスは、滞留することなく、図示矢
印に示すように各放電ギャップ３を蛇行するように下方
に流れた後、最下部に位置する平板電極１に形成された
オゾン出口９を通過してオゾン取出管９ａから反応器４
の外へ流れることになる。ここで、本発明装置に用いる
原料ガスとしては、純酸素ガスや空気等のオゾンの原料
となる酸素を含むものをいい、特に具体的に限定される
ものではない。また、平板電極１の積層枚数も少なくと
も３枚以上あれば本発明の効果が得られることから、３
枚以上であればその数は勿論、大きさや形状、板厚等は
特に限定されるものではない。さらに、この平板電極１
を構成する材質も導電性を有するものであれば、特に限
定されるものでもないが、例えば、鉄、銅、アルミニウ
ム等の良導電体単体あるいはこれらの合金であれば、加
工性やコスト的にも適している。The plate electrode 1 located at the top of the reactor 4 is provided with a raw material gas inlet 8 communicating from the side surface to the lower surface side thereof, and a raw material gas supply for supplying the raw material gas is provided. A tube 8a is connected to supply the source gas to the discharge gap 3 side located on the lower surface of the flat plate electrode 1. On the other hand, on the side of the flat plate electrode 1 located at the lower part of the reactor 4, an ozone outlet 9 communicating from the outer side to the upper side is bored, and an ozone take-out pipe 9a for taking out ozone is connected. The gas on the side of the discharge gap 3 located on the lower surface of the plate electrode 1 is taken out of the reactor 4. Further, each plate electrode 1, 1 between the plate electrodes 1, 1 located at the uppermost bottom has a communication hole 1 penetrating vertically through it.
0 are alternately punched in the vicinity of the diagonal of each plate electrode 1, and the discharge gaps 3, 3 located above and below each plate electrode 1, ... Are vertically communicated by the communication hole 10. Therefore, from the raw material gas supply pipe 8a to the raw material gas inlet 8
The raw material gas supplied to the side flows downward so as to meander through the discharge gaps 3 as shown by the arrows in the figure without being accumulated, and then the ozone outlet 9 formed in the flat plate electrode 1 located at the lowermost portion. Through the ozone extraction pipe 9a through the reactor 4
Will flow out of. Here, the raw material gas used in the apparatus of the present invention is a pure oxygen gas or a gas containing oxygen, which is a raw material for ozone, and is not particularly limited. Further, the effect of the present invention can be obtained if the number of stacked flat plate electrodes 1 is at least 3 or more.
The number, the size, the shape, the plate thickness, and the like are not particularly limited as long as the number is one or more. Furthermore, this plate electrode 1
The material constituting the is also not particularly limited as long as it has conductivity, for example, iron, copper, a good conductor simple substance such as aluminum or alloys thereof, in terms of workability and cost. Is also suitable.
【００１７】そして、このような状態で、上述したよう
に各平板電極１，１間に高電圧を印加し、放電ギャップ
３内に放電を発生させることで、これらの放電ギャップ
３内を流れる原料ガスが徐々にオゾンに変換され、オゾ
ン取出管９ａから取り出されることになる。Then, in this state, a high voltage is applied between the flat plate electrodes 1 and 1 to generate a discharge in the discharge gap 3 as described above, so that the raw materials flowing in the discharge gap 3 are formed. The gas is gradually converted into ozone and is taken out from the ozone take-out pipe 9a.
【００１８】このように本発明は各平板電極１に連通孔
１０を形成して隣り合う放電ギャップ３を連通させて、
順次原料ガスを流すようにしたことから、原料ガスの流
路の数を大幅に減少することができる。すなわち、本形
態では原料ガスの流路が一つになるため、これに原料ガ
スを供給する原料ガス供給管８ａと、オゾンを取り出す
オゾン取出管９ａの数がそれぞれ１本ずつで済むことに
なる。従って、従来のものに比較して構造がシンプルと
なって装置全体の製造効率が上昇すると同時に、高価な
配管を多数使用する必要が無くなって製造コストの低減
も達成される。尚、図中７，７はこの反応器４を固定す
る押え板、５は放電に伴う平板電極１の加熱を防止する
ための冷却水や冷却ガスを流すための冷媒流路であり、
これらの構造は特に従来のものと大きく異なるものでは
ない。As described above, according to the present invention, the plate electrode 1 is formed with the communication hole 10 to communicate the adjacent discharge gaps 3,
Since the raw material gas is made to flow sequentially, the number of flow paths for the raw material gas can be significantly reduced. That is, in this embodiment, since the flow path of the raw material gas is one, the number of the raw material gas supply pipes 8a for supplying the raw material gas and the number of the ozone extraction pipes 9a for taking out the ozone is only one each. . Therefore, the structure is simpler than that of the conventional one, and the manufacturing efficiency of the entire apparatus is increased, and at the same time, it is not necessary to use a large number of expensive pipes, and the manufacturing cost can be reduced. In the figure, 7 and 7 are a holding plate for fixing the reactor 4, and 5 is a refrigerant flow path for flowing cooling water or cooling gas for preventing heating of the flat plate electrode 1 due to discharge,
These structures are not particularly different from the conventional ones.
【００１９】次に、図２は本発明の第二の形態を示した
ものであり、放電ギャップ３を区画形成するためのスペ
ーサ２の材質として硬質のセラミック材を用いると共
に、このスペーサ２とその上下に位置する平板電極１，
１同士を２００℃以下の低温焼成型の無機接着剤１２で
接合したものである。すなわち、上述したように、従来
の反応器ではスペーサとして樹脂系のガスケット等のよ
うな比較的可撓性を有する材料を用い、押え板７，７で
圧縮することによってこのガスケットを潰し、その反発
力によって放電ギャップ３の気密性を保つようしていた
が、このような方法では、気密性と放電ギャップ３の間
隔のバランスが難しいといった不都合があった。さら
に、ＰＴＦＥ等の樹脂系ガスケットを使用した場合、放
電によりガスケット自体が浸食されてしまうため、交換
（メンテナンス）の頻度が多くなる。そこで、本形態で
はスペーサ２として高耐久性、高硬度の特長を有するセ
ラミック材を用いたことから、放電ギャップ３の寸法調
整が不要となって高精度の反応器を容易に得ることがで
きる上に、放電による劣化に伴うメンテナンス頻度を少
なくすることができる。そして、このセラミック製スペ
ーサと平板電極同士を２００℃以下の低温焼成型の無機
接着剤１２で接合することにより、放電ギャップ３の気
密性を容易確実に保持することができる。具体的には、
上述したような低温焼成型の無機接着剤をペースト状に
してその接合部に塗布にした後、加熱することで、接着
と共に、気密性を保持することが可能となる。Next, FIG. 2 shows a second embodiment of the present invention, in which a hard ceramic material is used as the material of the spacer 2 for partitioning and forming the discharge gap 3, and the spacer 2 and the spacer 2 are also used. Plate electrodes 1, located above and below
One of them is bonded with a low temperature firing type inorganic adhesive 12 of 200 ° C. or less. That is, as described above, in the conventional reactor, a relatively flexible material such as a resin-based gasket is used as the spacer, and the gasket is crushed by being compressed by the pressing plates 7 and 7, and the repulsion thereof is performed. Although the airtightness of the discharge gap 3 is maintained by force, such a method has a disadvantage that it is difficult to balance the airtightness and the distance between the discharge gaps 3. Furthermore, when a resin-based gasket such as PTFE is used, the gasket itself is corroded by electric discharge, so that replacement (maintenance) is frequently performed. Therefore, in this embodiment, since the ceramic material having the characteristics of high durability and high hardness is used as the spacer 2, it is not necessary to adjust the dimensions of the discharge gap 3 and a highly accurate reactor can be easily obtained. In addition, it is possible to reduce the frequency of maintenance due to deterioration due to discharge. Then, the ceramic spacer and the flat plate electrode are joined to each other with the low temperature firing type inorganic adhesive 12 of 200 ° C. or less, whereby the airtightness of the discharge gap 3 can be easily and surely maintained. In particular,
It is possible to maintain the airtightness as well as the adhesion by heating the low temperature firing type inorganic adhesive as described above after applying it to the joint portion in the form of paste.
【００２０】次に、図３は本発明の第三の形態を示した
ものである。図示するように本形態は、上述したような
構成をした反応器４全体を密閉容器１１内に収容すると
共に、この密閉容器１１の区画壁に原料ガスを供給する
原料ガス供給管８ａを直接接続して、密閉容器１１内を
原料ガスの通路として用いたものであり、これによって
原料ガスの露点を管理するだけで、反応器４表面への結
露が防止され、高電圧のリーク等の不都合を未然に防止
できる。すなわち、従来の装置は、その反応器４が一
応、ケーシングなどに収容されている場合があるもの
の、基本的に大気開放されて大気中に曝された状態とな
っているため、これを湿潤雰囲気などで使用した際に、
その雰囲気中の水分が平板電極１内を流れる冷却水など
の冷媒によって冷却されて平板電極１の表面に結露して
しまい、この結露部分から電極に印加された高電圧がリ
ークする虞があったが、本形態のように反応器４全体を
密閉容器１１内に収容し、この密閉容器１１内に直接原
料ガスを供給すれば、この原料ガスの露点を予め管理し
さえしておけば、いかなる湿潤雰囲気下でも結露による
リークなどが発生せず、安全に使用することが可能とな
る。特に本形態では、平板電極１を冷却するための冷媒
として、露点の低い冷媒、例えば、アンモニアやフロン
などのような露点の低い冷媒を用いた場合にはその効果
が顕著に現れる。尚、通常、このようなオゾン生成装置
に用いられる原料ガスはその露点が−５０℃以下のもの
が使用されていることから、通常の使用ではさらに原料
ガスの露点を調整する必要等はない。しかもこのような
構成とすることにより、反応器４内の気密性が低下して
内部の高濃度オゾンが漏れだしたとしても、大気中に拡
散することがなくなり、高い安全性を維持することも可
能となる。Next, FIG. 3 shows a third embodiment of the present invention. As shown in the figure, in the present embodiment, the entire reactor 4 configured as described above is housed in a closed container 11, and a raw material gas supply pipe 8a for supplying a raw material gas is directly connected to a partition wall of the closed container 11. Then, the inside of the closed container 11 is used as a passage for the raw material gas, and by this, dew condensation on the surface of the reactor 4 is prevented only by controlling the dew point of the raw material gas, and inconveniences such as high voltage leaks occur It can be prevented. That is, in the conventional apparatus, although the reactor 4 may be housed in a casing or the like for the time being, it is basically exposed to the atmosphere because it is exposed to the atmosphere. When used in
Water in the atmosphere is cooled by a coolant such as cooling water flowing in the flat plate electrode 1 to cause dew condensation on the surface of the flat plate electrode 1, and the high voltage applied to the electrode may leak from the dew condensation portion. However, if the entire reactor 4 is housed in the closed container 11 and the raw material gas is directly supplied into the closed container 11 as in the present embodiment, it is possible to manage the dew point of the raw material gas in advance. Even in a wet atmosphere, no leaks due to dew condensation will occur and the device can be used safely. Particularly, in the present embodiment, when a refrigerant having a low dew point, for example, a refrigerant having a low dew point such as ammonia or chlorofluorocarbon is used as the refrigerant for cooling the flat plate electrode 1, the effect becomes remarkable. Since the raw material gas used in such an ozone generator has a dew point of −50 ° C. or lower, it is not necessary to further adjust the dew point of the raw material gas in normal use. Moreover, with such a structure, even if the airtightness inside the reactor 4 is lowered and the high-concentration ozone inside leaks out, it does not diffuse into the atmosphere, and high safety can be maintained. It will be possible.
【００２１】また、密閉容器の内圧と放電ギャップの内
圧が同じになるため、放電ギャップの気密性が容易に保
持できる。Further, since the internal pressure of the closed container and the internal pressure of the discharge gap are the same, the airtightness of the discharge gap can be easily maintained.
【００２２】[0022]
【発明の効果】以上要するに本発明によれば、以下の如
く優れた効果を発揮する。In summary, according to the present invention, the following excellent effects are exhibited.
【００２３】１．先ず、反応器を構成する平板電極のう
ち最上下の平板電極に挟まれた電極に、それぞれ連通孔
を形成したことから、必要とする配管及び継ぎ手の数を
大幅に減少することが可能となる。従って、配管組立に
要する時間が短縮されて製造効率が上昇すると共に、高
価な配管の数を減って製造コストが大幅に低減される。1. First, since the communication holes are formed in the electrodes sandwiched between the lowermost plate electrodes of the plate electrodes that make up the reactor, the number of required pipes and joints can be significantly reduced. . Therefore, the time required for assembling the pipes is shortened and the manufacturing efficiency is increased, and the number of expensive pipes is reduced, so that the manufacturing cost is significantly reduced.
【００２４】２．放電ギャップを区画形成するスペーサ
としてセラミック製のものを用い、これを２００℃以下
の低温焼成型の無機接着剤で平板電極側に接合したた
め、放電ギャップの寸法調整が容易となり、高精度高品
質の反応器を容易に得ることができる。2. A spacer made of ceramic was used as a spacer for partitioning the discharge gap, and this was bonded to the flat plate electrode side with a low temperature firing type inorganic adhesive of 200 ° C. or less, so that the dimension of the discharge gap can be easily adjusted and high precision and high quality can be achieved. The reactor can be easily obtained.
【００２５】３．反応器全体を密閉容器に入れ、この密
閉容器内に直接原料ガスを流すように構成したことか
ら、湿潤雰囲気下での使用においても密閉容器への結露
による高電圧の短絡事故が未然に防止されると同時に、
万が一反応器内の高濃度オゾンが漏れだしてもそのまま
大気中に拡散することが無くなり、信頼性及び安全性が
保証される。3. Since the entire reactor was placed in a closed container and the raw material gas was flowed directly into this closed container, even when used in a humid atmosphere, high voltage short circuit accidents due to dew condensation on the closed container can be prevented. At the same time
Even if high concentration ozone in the reactor leaks out, it will not diffuse into the atmosphere as it is, and reliability and safety are guaranteed.
【図１】本発明に係るオゾン生成装置の第一の形態を示
す構成図である。FIG. 1 is a configuration diagram showing a first embodiment of an ozone generator according to the present invention.
【図２】本発明に係るオゾン生成装置の第二の形態を示
す構成図である。FIG. 2 is a configuration diagram showing a second embodiment of an ozone generator according to the present invention.
【図３】本発明に係るオゾン生成装置の第三の形態を示
す構成図である。FIG. 3 is a configuration diagram showing a third embodiment of an ozone generator according to the present invention.
【図４】従来のオゾン生成装置の一例を示す構成図であ
る。FIG. 4 is a configuration diagram showing an example of a conventional ozone generator.
１ 平板電極 ２ スペーサ ３ 放電ギャップ ４ 反応器 ５ 冷媒流路 ８ 原料ガス入口 8a 原料ガス供給管 ９ オゾン出口 9a オゾン取出管 10 連通孔 11 密閉容器 1 Flat plate electrode 2 Spacer 3 Discharge gap 4 Reactor 5 Refrigerant flow path 8 Raw material gas inlet 8a Raw material gas supply pipe 9 Ozone outlet 9a Ozone extraction pipe 10 Communication hole 11 Closed container
───────────────────────────────────────────────────── フロントページの続き (72)発明者 広瀬 宏樹 東京都江東区豊洲三丁目１番15号 石川島 播磨重工業株式会社東二テクニカルセンタ ー内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroki Hirose 3-15-15 Toyosu, Koto-ku, Tokyo Ishikawajima Harima Heavy Industries Co., Ltd. Toni Technical Center
Claims (5)
これら各平板電極間にオゾンを生成すべく放電ギャップ
を区画形成した反応器を形成し、この反応器の最上下に
位置する平板電極に、それぞれ原料ガス入口又はオゾン
出口を形成すると共に、この最上下平板電極間に位置す
る各平板電極に、上記放電ギャップ間をそれぞれ連通す
べく連通孔を穿孔し、さらに、上記原料ガス入口及びオ
ゾン出口にそれぞれ原料ガス供給管及びオゾン取出管を
接続してなることを特徴とするオゾン生成装置。1. Stacking flat plate electrodes in a plurality of upper and lower stages,
A reactor in which a discharge gap is partitioned to form ozone is formed between these flat plate electrodes, and a source gas inlet or an ozone outlet is formed at the flat plate electrode located at the uppermost lower part of this reactor, and at the same time In each plate electrode located between the upper and lower plate electrodes, a communication hole is formed to communicate between the discharge gaps, and further, a source gas supply pipe and an ozone extraction pipe are connected to the source gas inlet and the ozone outlet, respectively. An ozone generator characterized in that
オゾン出口を形成すると共に、この反応容器を密閉容器
内に収容し、この密閉容器に原料ガスを供給する原料ガ
ス供給管を接続すると共に、上記反応器のオゾン出口に
オゾンを取り出すオゾン取出管を密閉容器を貫通させて
接続してなることを特徴とするオゾン生成装置。2. A raw material gas inlet and an ozone outlet are formed in the reactor according to claim 1, the reaction container is housed in a closed container, and a raw material gas supply pipe for supplying the raw material gas is connected to the closed container. At the same time, an ozone generating device is characterized in that an ozone extraction pipe for extracting ozone is connected to the ozone outlet of the reactor by penetrating a closed container.
に、それぞれ上記原料ガス入口又はオゾン出口を形成す
ると共に、この最上下平板電極間に位置する各平板電極
に、上記放電ギャップ間を連通すべく連通孔を穿孔した
ことを特徴とする請求項２記載のオゾン生成装置。3. The raw material gas inlet or ozone outlet is formed in the flat plate electrode located at the lowermost part of the reactor, and the discharge gap is provided between the flat plate electrodes located between the uppermost lower plate electrode. The ozone generator according to claim 2, wherein a communication hole is bored to communicate with the ozone generator.
すべく、各平板電極間に額縁状のセラミック製スペーサ
を介在させると共に、このスペーサと平板電極同士を２
００℃以下の低温焼成型の無機接着剤で接合したことを
特徴とする請求項１〜３のいずれかに記載のオゾン生成
装置。4. A frame-shaped ceramic spacer is interposed between each flat plate electrode so as to define a discharge gap of the reaction vessel, and the spacer and the flat plate electrode are separated from each other by two.
The ozone generator according to any one of claims 1 to 3, wherein the ozone generator is bonded with an inorganic adhesive of low temperature firing type of 00 ° C or lower.
冷却水路又は冷却風を流すための冷却風路を形成したこ
とを特徴とする請求項１〜４のいずれかに記載のオゾン
生成装置。5. The ozone generator according to claim 1, wherein each of the flat plate electrodes is formed with a cooling water passage for flowing cooling water or a cooling air passage for flowing cooling air. apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31071395A JP3855287B2 (en) | 1995-11-29 | 1995-11-29 | Ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31071395A JP3855287B2 (en) | 1995-11-29 | 1995-11-29 | Ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09142811A true JPH09142811A (en) | 1997-06-03 |
| JP3855287B2 JP3855287B2 (en) | 2006-12-06 |
Family
ID=18008583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31071395A Expired - Fee Related JP3855287B2 (en) | 1995-11-29 | 1995-11-29 | Ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3855287B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010035033A (en) * | 2000-11-14 | 2001-05-07 | 이광식 | A Variable Accumulative Plate Type High Concentration Ozonizer |
| WO2001094257A1 (en) * | 2000-01-31 | 2001-12-13 | Sumitomo Precision Products Co., Ltd | Discharge cell for ozone generator |
| JP2004224695A (en) * | 1999-01-29 | 2004-08-12 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator |
| JP2005053777A (en) * | 2004-08-09 | 2005-03-03 | Sumitomo Precision Prod Co Ltd | Cooler for discharge cell |
| JP2006169110A (en) * | 1999-01-29 | 2006-06-29 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator |
| JP2007045671A (en) * | 2005-08-10 | 2007-02-22 | Sumitomo Precision Prod Co Ltd | Plate type discharge cell for ozone generator |
| JP2007197318A (en) * | 1999-01-29 | 2007-08-09 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator |
| JP2009179556A (en) * | 1999-01-29 | 2009-08-13 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator and ozone generator using the discharge cell |
| CN102390814A (en) * | 2011-08-23 | 2012-03-28 | 陈霁 | Laminated water-cooled ozone generator |
| WO2013051097A1 (en) * | 2011-10-04 | 2013-04-11 | 東芝三菱電機産業システム株式会社 | Ozone generation unit with less nitrogen added |
| KR102485280B1 (en) * | 2021-07-13 | 2023-01-09 | 한국생산기술연구원 | A chemical reactor unit, prefabricated chemical reactor including same, and manufacturing method thereof |
-
1995
- 1995-11-29 JP JP31071395A patent/JP3855287B2/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009179556A (en) * | 1999-01-29 | 2009-08-13 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator and ozone generator using the discharge cell |
| JP2004224695A (en) * | 1999-01-29 | 2004-08-12 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator |
| JP2006169110A (en) * | 1999-01-29 | 2006-06-29 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator |
| JP2007197318A (en) * | 1999-01-29 | 2007-08-09 | Sumitomo Precision Prod Co Ltd | Discharge cell for ozone generator |
| WO2001094257A1 (en) * | 2000-01-31 | 2001-12-13 | Sumitomo Precision Products Co., Ltd | Discharge cell for ozone generator |
| US7695691B2 (en) | 2000-06-09 | 2010-04-13 | Sumitomo Precision Products Co., Ltd. | Discharge cell for ozonizer |
| KR20010035033A (en) * | 2000-11-14 | 2001-05-07 | 이광식 | A Variable Accumulative Plate Type High Concentration Ozonizer |
| JP2005053777A (en) * | 2004-08-09 | 2005-03-03 | Sumitomo Precision Prod Co Ltd | Cooler for discharge cell |
| JP2007045671A (en) * | 2005-08-10 | 2007-02-22 | Sumitomo Precision Prod Co Ltd | Plate type discharge cell for ozone generator |
| CN102390814A (en) * | 2011-08-23 | 2012-03-28 | 陈霁 | Laminated water-cooled ozone generator |
| WO2013051097A1 (en) * | 2011-10-04 | 2013-04-11 | 東芝三菱電機産業システム株式会社 | Ozone generation unit with less nitrogen added |
| CN103857620A (en) * | 2011-10-04 | 2014-06-11 | 东芝三菱电机产业系统株式会社 | Ozone generation unit with less nitrogen added |
| JPWO2013051097A1 (en) * | 2011-10-04 | 2015-03-30 | 東芝三菱電機産業システム株式会社 | Nitrogen-free ozone generation unit |
| US9295967B2 (en) | 2011-10-04 | 2016-03-29 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Nitrogen-free ozone generating unit |
| KR102485280B1 (en) * | 2021-07-13 | 2023-01-09 | 한국생산기술연구원 | A chemical reactor unit, prefabricated chemical reactor including same, and manufacturing method thereof |
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| JP3855287B2 (en) | 2006-12-06 |
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