JPH09162379A - Cooled ccd camera apparatus - Google Patents

Cooled ccd camera apparatus

Info

Publication number
JPH09162379A
JPH09162379A JP7346592A JP34659295A JPH09162379A JP H09162379 A JPH09162379 A JP H09162379A JP 7346592 A JP7346592 A JP 7346592A JP 34659295 A JP34659295 A JP 34659295A JP H09162379 A JPH09162379 A JP H09162379A
Authority
JP
Japan
Prior art keywords
package
ccd
heat
peltier effect
ccd element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7346592A
Other languages
Japanese (ja)
Inventor
Toshiaki Matsuoka
利明 松岡
Kazuo Arai
一夫 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BITSUTORAN KK
Original Assignee
BITSUTORAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BITSUTORAN KK filed Critical BITSUTORAN KK
Priority to JP7346592A priority Critical patent/JPH09162379A/en
Publication of JPH09162379A publication Critical patent/JPH09162379A/en
Pending legal-status Critical Current

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  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)

Abstract

PROBLEM TO BE SOLVED: To avoid dewing the surface of a CCD element. SOLUTION: A CCD camera apparatus comprises a glass 9, radiation vessel 7, Peltier effect element 26, thermally conductive metal 4 and CCD element 1 disposed in a package 2 contacted with the metal 4 having a window. The CCD element is held at a temp. over 0 deg.C and package 2 held at a temp. lower than 0 deg. specified time enough to dew with air in the vessel 7 and then the element 1 is dewed.

Description

【発明の詳細な説明】 [産業上の利用分野]本説明は、CCDカメラ等の冷却
をはかった、冷却型CCDカメラ装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present description relates to a cooled CCD camera device for cooling a CCD camera or the like.

[従来の技術] 固体撮像素子としてチャージカップルドデバイス (Charge Coupled Device,以下
CCDと称す)が広く用いられているが、CCDはその
固有の特性として光入力がなくても出力電流が零となら
ずに、微小な電流が流れる暗電流があり、その暗電流は
温度に依存しており、一般に温度が8℃下がるごとにそ
の値は約2分の1になることが知られている。この暗電
流が増加すると信号のダイナミックレンジが減少し、暗
電流によって発生するノイズが増加し、撮像信号のS/
N比を低下させてしまう。従来、この問題を解決するた
めに、ペルチェ効果素子などの電子冷却素子により、C
CDを冷却して暗電流を低下させる構造が採用されてい
る。第5図は従来の冷却CCD撮像カメラの概略構成を
示す断面図である。CCD素子21はセラミック又は金
属等のパッケージ22に収容されている。パッケージ2
2はペルチェ効果素子23の吸熱接合部(コールドサイ
ド)24に密着している。ペルチェ効果素子23の放熱
接合部(ホットサイド)25は、アルミ等の熱伝導のよ
い放熱容器26に密着している。放熱容器26はガラス
窓27が設けてあり、密閉構造になっている。密閉放熱
容器7内には、空気等の大気が入っている。従来このよ
うな構造でペルチェ効果素子23により、CCD素子2
1を0℃以下のマイナス温度まで冷却すると、放熱容器
26内の大気28がCCD素子21の表面温度により冷
却されて、CCD素子21の表面に水分として結露し
て、撮像できなくなるという問題があった。
[Prior Art] A charge coupled device (hereinafter referred to as a CCD) is widely used as a solid-state image pickup device. However, CCD has a characteristic that if the output current is zero even if there is no light input. However, there is a dark current in which a minute current flows, and the dark current depends on the temperature, and it is generally known that the value becomes about half as the temperature decreases by 8 ° C. When this dark current increases, the dynamic range of the signal decreases, the noise generated by the dark current increases, and the S /
The N ratio is lowered. Conventionally, in order to solve this problem, by using an electronic cooling element such as a Peltier effect element, C
A structure is adopted that cools the CD to reduce the dark current. FIG. 5 is a sectional view showing a schematic configuration of a conventional cooled CCD image pickup camera. The CCD element 21 is housed in a package 22 made of ceramic or metal. Package 2
Reference numeral 2 is in close contact with the heat absorbing joint portion (cold side) 24 of the Peltier effect element 23. The heat radiation joint portion (hot side) 25 of the Peltier effect element 23 is in close contact with a heat radiation container 26 having good heat conduction such as aluminum. The heat dissipation container 26 is provided with a glass window 27 and has a closed structure. The closed radiating container 7 contains the atmosphere such as air. Conventionally, with such a structure, the Peltier effect element 23 allows the CCD element 2
When 1 is cooled to a negative temperature of 0 ° C. or lower, the atmosphere 28 in the heat dissipation container 26 is cooled by the surface temperature of the CCD element 21, and the surface of the CCD element 21 is condensed as water to cause an image pickup problem. It was

[発明が解決しようとする課題]冷却型CCDカメラ等
でCCD素子が結露してしまうことを防止する冷却方法
及び構造を提供することにある。
[PROBLEMS TO BE SOLVED BY THE INVENTION] It is an object of the present invention to provide a cooling method and structure for preventing condensation of a CCD element in a cooled CCD camera or the like.

[課題を解決するための手段]本発明は、CCD素子チ
ップを冷却する手法として、ペルチェ効果素子を用い
て、CCD素子とCCD素子のパッケージ間の熱抵抗を
利用して、パッケージ部を0℃以下にし、CCD素子を
0℃以上に保持し、密閉容器内の大気の水分をパッケー
ジ部分及び熱伝導金具に結露させて、密閉容器内を充分
乾燥させてから、CCD素子をマイナス温度に下げるこ
とにより、CCD素子表面に結露を防ぐことにある。
[Means for Solving the Problems] As a method for cooling a CCD element chip, the present invention uses a Peltier effect element and utilizes the thermal resistance between the CCD element and the package of the CCD element to keep the package portion at 0 ° C. The following is to keep the CCD element at 0 ° C or higher, allow the moisture in the air in the closed container to condense on the package part and the heat-conducting metal fittings, and allow the inside of the closed container to dry sufficiently before lowering the CCD element to a negative temperature. This is to prevent condensation on the surface of the CCD element.

[実施例]第1図及び第2図及び第3図及び第4図に実
施例を示す。第1図は、本発明の一実施例に関わる冷却
型CCDカメラ装置の概略構成を示す断面図である。第
2図は、CCD素子1とパッケージ2及び熱伝導金具4
を上面から見た図である。第3図は、熱伝導金具4のパ
ッケージ2との接触面の図である。この発明は、CCD
素子1,CCD素子1のパッケージ2にアルミ等の熱伝
導の良い金属の熱伝導金具4が密着している。熱伝導金
具4は、ペルチェ効果素子6の吸熱接合部(コールドサ
イド)6aと密着している。ペルチェ効果素子6の放熱
接合部(ホットサイド)6bは、放熱容器7に密着して
いる。放熱容器7は、放熱フィン8とO(オー)リング
10,ガラス9,レンズ取り付け金具11により構成さ
れ、密閉した容器を形成する。CCD素子1は、固体撮
像素子であり、セラミック、プラスチック又は金属等の
パッケージ2に収容されている。パッケージ2は、パッ
ケージ2のリード線を介して、プリント基板3に接続さ
れている。プリント基板3は、CCD素子1を駆動する
回路が実装されている。熱伝導金具4は、熱伝導の良い
アルミ等の金属で、CCD素子1より大きな窓をもった
接触面4aでパッケージ2に密に接触している。ペルチ
ェ効果素子6は、ペルチェ効果により吸熱接合部(コー
ルドサイド)6aと放熱接合部(ホットサイド)6bが
ある半導体素子であり、電子冷凍素子として一般に知ら
れている。放熱容器7は、アルミ等の熱伝導の良い金属
で、大気中に放熱する放熱フィン8があり、ペルチェ効
果素子6と密に接触し、ペルチェ効果素子6の放熱接合
部6aから発生した熱を大気中に放熱するような構造で
ある。また、放熱容器7は、光を透過するガラス9とゴ
ム等の材質のO(オー)リング10,ガラス押さえ金具
11により、密室構造になっている。被写体から、ガラ
ス9を透過してきた光はCCD素子1に届き、プリント
基板3に実装された回路によって、電気信号に変換され
る。ペルチェ効果素子6は、吸熱接合部6aから熱伝導
金具4を介してパッケージ2を冷却する。パッケージ2
は、熱伝導金具4の接触面4aの部分から冷却され、パ
ッケージ2の熱抵抗により一定時間後、パッケージ2全
体が冷却される。そして、パッケージ2はCCD素子1
を冷却する。このときパッケー2の材質による熱抵抗に
より、パッケージ2とCCD素子1間には、温度差がで
きる。第4図は、温度と時間の関係のグラフである。C
CD素子1の温度12,パッケージ2の温度13を表し
ている。具体的な一例で、外気温度が25℃とする。時
刻t1でペルチェ効果素子6に通電され、吸熱接合部6
aが冷却されて、熱伝導金具4の接合面4aを介してパ
ッケージ2が冷却されて、時刻t2には約−1℃とな
る。この時CCD素子2は、接合面4aの近辺のパッケ
ージ2の接合面から、少しずつCCD素子1に向かって
冷却されていく。容器内の熱吸収と、CCD素子2自身
の電力による発熱により、接合面4aのパッケージ2の
近辺より温度が高くなり、約1℃ぐらいとなる。時刻t
2の温度は、時刻t3まで約1分から約30分ぐらいか
けて、ペルチェ効果素子6の電力制御により保持する。
この時刻t2から時刻t3までの間でパッケージ2の温
度は、約−1℃である。熱伝導金具4は−1℃より低
く、ペルチェ効果素子6の吸熱接合部6aは、さらに低
い温度になっているので、放熱容器7の水分を含んだ大
気5は、マイナス温度の吸熱接合部6a,熱伝導金具
4,接合面4a付近のパッケージ2に水滴となって結露
する。放熱容器7の大気5は、乾燥状態となる。大気5
が充分乾燥するまでの時間(t3−t2)をおいてか
ら、ペルチェ効果素子6を電力制御し、さらに冷却し
て、t4の熱平行状態までCCD素子1を冷却する。第
4図のグラフにある温度の値は、パッケージの材質の熱
抵抗により変わるので一実施例にすぎない。よって、第
4図について述べた温度等の数値は、一実施例にすぎな
い。要約すると、密閉された放熱容器7内の水分を含ん
だ大気は、マイナス温度部分のペルチェ効果素子6及び
熱伝導金具4及びパッケージ2の部分に結露し、放熱容
器内の大気は、充分に水分が除去され乾燥した状態にな
る。このように乾燥された状態となった後にペルチェ効
果素子1の温度をマイナス温度に下げても放熱容器7の
大気5は乾燥空気なのでペルチェ効果素子1には結露し
ない。
[Embodiment] An embodiment is shown in FIG. 1, FIG. 2, FIG. 3, and FIG. FIG. 1 is a sectional view showing a schematic structure of a cooling type CCD camera device according to an embodiment of the present invention. FIG. 2 shows the CCD element 1, the package 2, and the heat conduction metal fitting 4.
It is the figure which looked at from the top. FIG. 3 is a view of a contact surface of the heat conducting metal fitting 4 with the package 2. This invention is a CCD
A heat conducting metal fitting 4 made of a metal such as aluminum having good heat conduction is closely attached to the package 2 of the element 1 and the CCD element 1. The heat conduction metal fitting 4 is in close contact with the heat absorption joint portion (cold side) 6 a of the Peltier effect element 6. The heat dissipation joint (hot side) 6 b of the Peltier effect element 6 is in close contact with the heat dissipation container 7. The heat dissipation container 7 is composed of a heat dissipation fin 8, an O (o) ring 10, a glass 9 and a lens fitting 11, and forms a hermetically sealed container. The CCD element 1 is a solid-state image sensor, and is housed in a package 2 made of ceramic, plastic, metal, or the like. The package 2 is connected to the printed circuit board 3 via the lead wire of the package 2. A circuit for driving the CCD element 1 is mounted on the printed circuit board 3. The heat conduction metal fitting 4 is made of a metal such as aluminum having good heat conduction, and is in close contact with the package 2 at a contact surface 4a having a larger window than the CCD element 1. The Peltier effect element 6 is a semiconductor element having a heat absorption junction (cold side) 6a and a heat dissipation junction (hot side) 6b due to the Peltier effect, and is generally known as an electronic refrigeration element. The heat dissipation container 7 is made of a metal having good heat conduction such as aluminum and has heat dissipation fins 8 for dissipating heat to the atmosphere. It has a structure that radiates heat to the atmosphere. Further, the heat dissipation container 7 has a closed chamber structure by a glass 9 that transmits light, an O (O) ring 10 made of a material such as rubber, and a glass pressing member 11. Light transmitted from the subject through the glass 9 reaches the CCD element 1 and is converted into an electric signal by a circuit mounted on the printed circuit board 3. The Peltier effect element 6 cools the package 2 from the heat absorbing joint 6 a through the heat conducting metal fitting 4. Package 2
Is cooled from the contact surface 4a of the heat-conducting metal fitting 4, and the entire package 2 is cooled after a certain time due to the thermal resistance of the package 2. The package 2 is the CCD element 1.
To cool. At this time, a temperature difference occurs between the package 2 and the CCD element 1 due to the thermal resistance of the material of the package 2. FIG. 4 is a graph of the relationship between temperature and time. C
The temperature 12 of the CD element 1 and the temperature 13 of the package 2 are shown. In a specific example, the outside air temperature is 25 ° C. At time t1, the Peltier effect element 6 is energized, and the endothermic junction 6
a is cooled, and the package 2 is cooled through the joint surface 4a of the heat-conducting metal fitting 4, and becomes about -1 degreeC at the time t2. At this time, the CCD element 2 is gradually cooled toward the CCD element 1 from the joint surface of the package 2 near the joint surface 4a. Due to the heat absorption in the container and the heat generated by the electric power of the CCD element 2 itself, the temperature becomes higher than the vicinity of the package 2 on the joint surface 4a and becomes about 1 ° C. Time t
The temperature of 2 is maintained by the power control of the Peltier effect element 6 from about 1 minute to about 30 minutes until time t3.
The temperature of the package 2 is about −1 ° C. from the time t2 to the time t3. Since the temperature of the heat-conducting metal fitting 4 is lower than -1 ° C and the temperature of the heat-absorption joint 6a of the Peltier effect element 6 is even lower, the moisture-containing atmosphere 5 in the heat dissipation container 7 has a negative temperature. , The heat conduction metal fitting 4 and the package 2 near the joint surface 4a are condensed as water drops. The atmosphere 5 in the heat dissipation container 7 is in a dry state. Atmosphere 5
After a sufficient time (t3−t2) for the Peltier effect element 6 to be dried, the Peltier effect element 6 is power-controlled and further cooled, and the CCD element 1 is cooled to the heat parallel state at t4. The temperature values shown in the graph of FIG. 4 vary according to the thermal resistance of the material of the package, and are only examples. Therefore, the numerical values such as the temperatures described with reference to FIG. 4 are merely examples. In summary, the moisture-containing atmosphere in the closed heat dissipation container 7 is condensed on the Peltier effect element 6, the heat conduction metal fitting 4, and the package 2 in the negative temperature portion, and the atmosphere in the heat dissipation container is sufficiently moisture. Is removed and it becomes dry. Even if the temperature of the Peltier effect element 1 is lowered to a negative temperature after the dry state as described above, the atmosphere 5 in the heat dissipation container 7 is dry air, so that no condensation occurs on the Peltier effect element 1.

[発明の効果]放熱容器7の大気5は、ペルチェ効果素
子6,熱伝導金具4,パッケージ2に水分が結露するの
で乾燥した空気となり、CCD素子1が結露なく、マイ
ナス温度まで冷却でき、暗電流を少なくできるので、S
/N比の良い画像が得られる。
[Effects of the Invention] The atmosphere 5 in the heat dissipation container 7 becomes dry air because moisture is condensed on the Peltier effect element 6, the heat conduction metal fitting 4, and the package 2, and the CCD element 1 can be cooled to a negative temperature without condensation and is dark. Since the current can be reduced, S
An image with a good / N ratio can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【第1図】は本発明の断面図、FIG. 1 is a sectional view of the present invention,

【第2図】はCCD素子1とパッケージ2と熱伝導金具
4の関係の上面図、
[FIG. 2] is a top view of the relationship between the CCD device 1, the package 2, and the heat conduction metal fitting 4,

【第3図】は熱伝導金具4のパッケージ2との接触面で
ある。
[Fig. 3] is a contact surface of the heat conducting metal fitting 4 with the package 2.

【第4図】は温度と時間のグラフである。FIG. 4 is a graph of temperature and time.

【符号の説明】[Explanation of symbols]

1:CCD素子 2:パッケージ 3:プリント基板
4:熱伝導金具 5:大気 6:ペルチェ効果素子 7:放熱容器
8:フィン 9:ガラス 10:O(オー)リング 11:押さえ金具 12:ペ
ルチェ効果素子 13:パッケージ 14〜20:番号使用なし 21:
CCD素子 22:パッケージ 23:ペルチェ効果素子 24:吸
熱接合部 25:放熱接合部 26:放熱容器 27:ガラス 2
8:大気
1: CCD device 2: Package 3: Printed circuit board
4: Heat conduction metal fittings 5: Atmosphere 6: Peltier effect element 7: Heat dissipation container
8: Fin 9: Glass 10: O (O) ring 11: Holding metal fitting 12: Peltier effect element 13: Package 14-20: No number used 21:
CCD element 22: Package 23: Peltier effect element 24: Endothermic junction 25: Heat dissipation junction 26: Heat dissipation container 27: Glass 2
8: Atmosphere

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成8年3月29日[Submission date] March 29, 1996

【手続補正2】[Procedure amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】図5[Correction target item name] Fig. 5

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【図5】 第5図は従来の冷却CCD撮像カメラの断面
図である。
FIG. 5 is a sectional view of a conventional cooled CCD imaging camera.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】ガラス9と放熱容器7とペルチェ効果素子
6と熱伝導金具4とパッケージ2のCCD素子1より構
成され、熱伝導金具4の接合面4aを設けた冷却型CC
Dカメラ装置。
1. A cooling type CC which comprises a glass 9, a heat dissipation container 7, a Peltier effect element 6, a heat conduction metal fitting 4 and a CCD element 1 of a package 2 and which is provided with a joint surface 4a of the heat conduction metal fitting 4.
D camera device.
【請求項2】放熱熱容器7の大気5を時間(t3−t
2)で結露させてから、CCD素子1をマイナス温度ま
で冷却する方法。
2. The atmosphere 5 in the radiant heat container 7 is kept for a period of time (t3-t).
After dew condensation in 2), the CCD element 1 is cooled to a negative temperature.
JP7346592A 1995-12-01 1995-12-01 Cooled ccd camera apparatus Pending JPH09162379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7346592A JPH09162379A (en) 1995-12-01 1995-12-01 Cooled ccd camera apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7346592A JPH09162379A (en) 1995-12-01 1995-12-01 Cooled ccd camera apparatus

Publications (1)

Publication Number Publication Date
JPH09162379A true JPH09162379A (en) 1997-06-20

Family

ID=18384476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7346592A Pending JPH09162379A (en) 1995-12-01 1995-12-01 Cooled ccd camera apparatus

Country Status (1)

Country Link
JP (1) JPH09162379A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999026298A1 (en) * 1997-11-19 1999-05-27 Hamamatsu Photonics K.K. Photodetector and image pickup device employing it
JP2006033031A (en) * 2004-07-12 2006-02-02 Casio Comput Co Ltd Portable image capture system
CN103984192A (en) * 2014-05-29 2014-08-13 中国科学院光电技术研究所 Space camera suitable for deep space detection of high-temperature working environment and implementation method thereof
KR101974806B1 (en) * 2018-07-16 2019-05-03 (주)그린텍 Underwater camera temperature control device for pump
KR20200034281A (en) 2018-09-21 2020-03-31 주식회사 뷰웍스 Camera devices with heat dissipation structure
CN112763095A (en) * 2020-12-29 2021-05-07 中国科学院合肥物质科学研究院 CCD temperature control system of satellite-borne hyperspectral detector

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999026298A1 (en) * 1997-11-19 1999-05-27 Hamamatsu Photonics K.K. Photodetector and image pickup device employing it
US6573640B1 (en) 1997-11-19 2003-06-03 Hamamatsu Photonics K.K. Photodetecting device and image sensing apparatus using the same
JP3884616B2 (en) * 1997-11-19 2007-02-21 浜松ホトニクス株式会社 Photodetector and imaging device using the same
JP2006033031A (en) * 2004-07-12 2006-02-02 Casio Comput Co Ltd Portable image capture system
CN103984192A (en) * 2014-05-29 2014-08-13 中国科学院光电技术研究所 Space camera suitable for deep space detection of high-temperature working environment and implementation method thereof
KR101974806B1 (en) * 2018-07-16 2019-05-03 (주)그린텍 Underwater camera temperature control device for pump
KR20200034281A (en) 2018-09-21 2020-03-31 주식회사 뷰웍스 Camera devices with heat dissipation structure
CN112763095A (en) * 2020-12-29 2021-05-07 中国科学院合肥物质科学研究院 CCD temperature control system of satellite-borne hyperspectral detector
CN112763095B (en) * 2020-12-29 2024-02-23 中国科学院合肥物质科学研究院 CCD temperature control system of satellite-borne hyperspectral detector

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