JPH09220672A - Parallel seam joining method and parallel seam joining apparatus - Google Patents

Abstract

(57) 【Abstract】 PROBLEM TO BE SOLVED: To improve the flatness of the surface of a roller electrode in a work of parallel seam bonding by pressing a pair of roller electrodes to both edges of an object to be bonded (work) and applying a current. Homogenize. SOLUTION: A joining head 3 provided with a δ setting mechanism for rotatably supporting roller electrodes 301, 331 and varying an interval δ between them. The joining head 3 is sequentially provided with a Z-axis lifting mechanism 5, an X-axis moving mechanism 8 and a Y-axis advancing / retreating mechanism 9 to determine the position in each direction. First, the joining work is performed by starting the interval δ between the roller electrodes 301 and 331 from the maximum width. Next, a signal is given to the δ setting mechanism 30 to move inward by one pitch on the left and right. This is repeated for each joining work, and the roller electrode 30
Wrap at the effective width limit of 1,331.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a parallel seam bonding apparatus suitable for bonding a lid, which is made of ceramic or metal, which houses a semiconductor integrated circuit, a crystal oscillator, or the like, to a lid.

[0002]

2. Description of the Related Art A parallel seam bonding apparatus that hermetically seals a circuit element such as a semiconductor integrated circuit or a crystal unit is generally a package in which a ceramic package having a Kovar frame and an Kovar lid are stacked on top of each other. The roller-shaped bonding electrode of the above rotates while applying pressure on it, and a current is passed from one of the pair of roller-shaped bonding electrodes through the lid to the other to form a continuous line between the envelope and the lid. To join.

[0003]

In this parallel seam bonding apparatus, when a large number of objects to be bonded (workpieces) are to be bonded, the works are arranged in a straight line or in orthogonal coordinates, and are sequentially bonded. In this case, a small amount of slag adheres to the work contact surface of the roller electrode for each joining operation. Therefore, if the same trajectory is repeated, the flatness of the electrode surface is lowered to such an extent that it cannot withstand the joining work after a certain number of works. Therefore, it is necessary to stop the work and polish or replace the electrode. With this, work does not proceed efficiently.

An object of the present invention is to extend the continuous working time when a large number of continuous workings are performed in the seam joining work.

[0005]

Means for Solving the Problems In order to solve this problem, the present invention proposes the following means. That is, a plurality of objects to be joined are arranged on a pallet with a space therebetween, and a current is applied between a pair of roller electrodes that rotate while applying pressure to the edges of the objects to be joined. In the joining method, starting from one end of each effective width of the roller electrode, the joining work is performed, and the interval between the roller electrodes is set to be a small one every one or a set number of times of the joining work.
We propose to move by the pitch and repeat this for each joining operation to uniformly move and use the range of the effective width of the roller electrode.

The following means are also proposed. That is, a parallel seam in which a plurality of objects to be joined are arranged on a pallet at intervals and a current is passed between a pair of roller electrodes that rotate while pressing the edges of the plurality of objects to be joined to perform seam joining. In the joining device, a step of setting one end of each effective width of the roller electrode at the edge of the article to be joined, a step of performing the joining operation, and a gap of the roller electrodes of 1 A step of moving by a pitch and a step of repeating this for each joining operation to repeat the limit of the effective width of the pair of roller electrodes, and controlling each of these steps by prestored CPU data We propose a parallel seam joining device.

Further, the following means are proposed for a mechanism for realizing this device. That is, a pair of roller electrodes are individually suspended and one of them is moved to set a gap by setting one of them, a joining head, a Z-axis lifting mechanism for vertically moving the joining head, An X-axis moving mechanism that moves the shaft lifting mechanism in the left-right direction and a Y-axis moving mechanism that moves the X-axis moving mechanism in the front-back direction are provided, and one end of each effective width of the pair of roller electrodes is joined to the object to be bonded. The step of setting the edge of the roller, the step of performing the joining operation, the step of moving the interval of the roller electrodes by a slight one pitch at each of the joining operations or every set number of times, and this is repeated for each joining operation. And a step of repeating the limit of the effective width of the pair of roller electrodes, and δ is set for each of these steps based on the CPU data stored in advance.
It is proposed to give a control signal to the setting mechanism, the Z-axis lifting mechanism, the X-axis moving mechanism, and the Y-axis advancing / retreating mechanism.

[0008]

BEST MODE FOR CARRYING OUT THE INVENTION

EXAMPLE FIG. 1 is a diagram showing an example of the arrangement of works in a parallel seam joining apparatus according to the present invention. As shown in the figure, each work 2 is arranged on the pallet 4 in a rectangular coordinate system, 5 in length and 5 in width, 25 in total. First (1)
Seam join the left and right edges of the work at the position
(2) .. (5) Then seam join with (6) ... (10) in the next row. Similarly, the left and right edges of each work are seam-joined in the same manner. When the seam joining in the vertical direction is completed, the pallet 4 is turned by 90 ° and, for example, (5), (10), (15), (20),
Seam join each remaining two sides of the work at the position (25).

The movement of the roller electrode will be described with reference to FIG. First, as shown in the side view of FIG. 2, each of the conical cylindrical roller electrodes 301 and 331 has a width c as an effective electrode width near the center. The opposing distance of the inner boundaries of these effective electrode widths is set to δ, and the value of δ is gradually approached to the inner side for each joining process.
FIG. 2 shows the initial state, and the facing distance δ is equal to the width d of the work 2.

FIG. 2 shows the positional relationship between the roller electrodes 301 and 331 and the work 2 in the next joining step. Opposing distance δ
Is slightly decreased by 1 pitch p to the left and right. The joining process is performed in this state. Therefore, the loci of the roller electrodes 301 and 331 contacting the edge of the work 2 are deviated by 1 pitch p from the first step. In the same manner, the facing distance δ is decreased inward by one pitch p on each side in each joining process.

Then, at the nth time, as shown in FIG. 2, the edge of the work 2 comes into contact with the outer limit of the effective electrode width c. After performing the joining process in this positional relationship, the state returns to the state shown in FIG. 2 again, and so on.

FIG. 3 is a system diagram of the parallel seam bonding apparatus 1 according to the present invention. Work 2 is pallet 4
It is placed on. The pallet 4 is detachably fixed on the table 6 through a positioning structure (not shown) such as a pin. Table 6 is a table rotation mechanism
The controller 7 can rotate an arbitrary angle θ. Here, the rotation angle θ is designated as 90 °. At both ends of the work 2,
A pair of roller electrodes 301 and 331, a δ setting mechanism 30 for varying the distance δ between them, and a bonding head 3 that supports the delta setting mechanism 30 and moves up and down in the Z-axis direction are provided. The joining head 3 further has a function of moving in the X-axis and the Y-axis by the X-axis moving mechanism 8 and the Y-axis advancing / retreating mechanism 9.

In FIG. 3, a command for complex control of the joining process is issued from the touch panel display 23. In response to this command, the CPU 21 sends a control signal to each control unit,
It also receives a detection signal from a sensor (not shown). CP
A floppy disk 25 is connected to U21 to read and write necessary data. Upon receiving the control signal from the CPU 21, the table rotation mechanism / control unit 7 rotates the table 6 by an angle θ. A control signal from the CPU 21 is sent to the δ control unit 17, the Z control unit 15, the X control unit 13, and the Y control unit 11 via the controller 19. δ control unit 17
Supplies a signal for setting the electrode spacing δ of the bonding head 3 to the δ setting mechanism 30. The Z control unit 15 gives a signal to the Z-axis lifting mechanism 5 to control the vertical position of the bonding head 3. The X controller 13 gives a signal to the X-axis moving mechanism 8 to control the lateral position of the bonding head 3. The Y control unit 11 is a Y-axis advance / retreat mechanism 9
To control the position of the bonding head 3 in the front-back direction.

FIG. 4 is a flow chart for explaining the operation of the parallel seam bonding apparatus according to the present invention. The operation will be described in detail below with reference to both FIG. 4 and FIG. In the parallel seam joining apparatus according to the present invention, the coordinates of the work 2 and data indicating whether or not the work exists at each coordinate are input to the CPU 21 in advance, and based on this data, the coordinates of each work 2 are corresponded. Each displacement of the bonding head 3 is determined. First, in step S1, a signal for positioning the welding head 3 to the starting point coordinate of the workpiece 2 is sent to the X control unit.
13 and Y control unit 11.

In step S2, a signal is generated from the δ control unit 17 and the electrode interval is changed according to the work size.

In step S 3, a signal is generated from the Z control unit 15, the joining head 3 is lowered, and the roller electrode is brought into contact with the edge of the work 2. (See Fig. 2)

In step S4, the CPU 21 applies a signal to the junction power supply 10 to cause a junction current to flow. At the same time, the Y control unit 11 generates a signal and the roller electrode moves along the edge of the work 2.

In step S5, based on the coordinate data of the CPU 21, the completion of joining the edge of the first work of the work 2 is confirmed and a confirmation signal is generated. In response to this confirmation signal, a signal for stopping the bonding current is given to the bonding power supply 10 in step S6, and the signal of the Y control unit 11 is stopped to stop the movement of the roller electrode.

In step S 7, a signal is generated from the Z controller 15 to raise the bonding head 3.

In step S8, based on the coordinate data of the CPU 21, it is determined whether or not the work is mounted at the coordinate in the next traveling direction. When there is a work, the process proceeds to step S9, and when there is no work, the process proceeds to step S12.

In step S 9, the Y control unit 11 generates a signal based on the coordinate data of the CPU 21, and the joining head 3 operates to become the Y coordinate of the starting point of the next work.

In step S10, it is determined whether the contact position of the edge of the work 2 is within the effective electrode width c with respect to the electrode interval. The judgment formula is according to formula (1).

C> p × n (1)

When the determination formula (1) is satisfied, the edge of the work 2 is inside the effective electrode width c, so the process proceeds to step S11, the electrode interval is further reduced by one pitch, and step S3 and subsequent steps are repeated. . When the determination formula (1) is not satisfied, the edge of the work 2 is at the limit of the effective electrode width c, so the process proceeds to step S2 and the electrode interval is opened to the size of the work 2. After that, S3 and subsequent steps are repeated again.

In step S8, it is determined whether or not a work is attached to the coordinate in the next traveling direction based on the information input to the CPU 21, and when there is no work, the process proceeds to step S12. In step S12, signals are generated from the X control unit 13 and the Y control unit 11 to return the joining head 3 to the starting point.

Then, next, the table rotation mechanism / control unit 7 rotates 90 ° to prepare for the work of joining the other parallel side surfaces of the work 2, and the above-mentioned steps S1 to S12 are similarly repeated to perform the joining work. It ends.

In this way, the trajectory can be moved for each welding operation, and the welding operation can be performed about 20,000 times. When the roller electrodes are joined along a fixed trajectory, the service life is significantly extended compared to the electrode usage limit of about 5000 times.

FIG. 5 shows an embodiment of the bonding head 3 in the parallel seam bonding apparatus according to the present invention. First, the left roller electrode will be described. Left roller electrode
The electrode holder 303 is mechanically rotatably supported by the arm 307 by the electrode holder 303. The roller electrode 301 is electrically a power supply shaft.
It is well connected to 305 and is connected to one end of the junction power supply (10). The arm 307 is vertically attached by sliders 309 and 311. These sliders 309 and 311 are combined with the guide 312 and can freely slide in the vertical direction. This guide 312 is fixed to the column 313. Further, the column 313 is attached to the base plate 501 via a slider 375 and a guide 377 that can slide in the horizontal direction. An arm 315 is horizontally fixed to the upper end of the column 313.
Then, a disc 319 is attached to the lower end of the arm 315 via a shaft 317. Disk 319
A flange 323 is disposed on the upper end of the arm 307 so as to face each other, and a coil spring 321 is inserted between the disc 319 and the flange 323. When the disc 319 is rotated, the shaft 317 connected to it is vertically moved up and down by the screw at the connection point with the arm 315, and the elastic force of the coil spring 321 can be adjusted. Although not shown, the disk 319 and the flange 323 are provided with cylindrical or conical projections at the centers thereof, which serve to facilitate and secure the attachment and replacement of the coil spring 321. . Instead of this protrusion, an edge portion may be provided around both or either of the disk 319 and the flange 323, and the same effect can be obtained. Further, the coil spring 321 can be replaced with another elastic body.

The roller electrode on the right side is also configured symmetrically with the left side. That is, the roller electrode 331, the electrode holder 333, the feeding shaft 335, the arm 337, the sliders 339 and 341,
Guide 342, Column 343, Arm 345, Shaft 347,
The disk 349, the coil spring 351, the flange 353, the slider 373, and the guide 377 are similarly configured.

Next, the distance δ between the pair of roller electrodes 301 and 331
The configuration of the Δ setting mechanism 30 that varies the value will be described. A yoke 360 is fixed near the left end of the base plate 501, and a yoke 365 and a yoke 369 near the right end are provided at intervals. Fix the stepping motor 361 to the yoke 360, and
A bearing 367 is installed on the 365, a bearing 371 is installed on the yoke 369, a ball nut 325 is installed on the left column 313, and a ball nut 355 is installed on the right column 343. A common action axis 364 connects them. This axis of action
364 is, from the left end, a coupling 363 connected to the rotary shaft of the stepping motor 361, a right ball screw 327 located on the right side of the bearing 367, a portion to be connected to the ball nut 325, and a screw direction from the intermediate portion 328. Use the opposite left ball screw 357 to connect it to the ball nut 355 and
It is composed of a part supported by 1.

Now, when the stepping motor 361 rotates in the direction of the arrow in the figure, the rotating right ball screw 327 causes the ball nut 325 to move to the left side, and the roller electrode 301 coupled thereto also moves to the left side. At the same time, due to the action of the left ball screw 357, the ball nut 355 moves to the right side, and the roller electrode 331 connected thereto moves to the right side.
Therefore, the distance δ between the roller electrodes 301 and 331 becomes wider. Conversely, when the stepping motor 361 rotates in the direction opposite to the direction of the arrow in the figure, the distance δ between the roller electrodes 301 and 331 becomes narrower.

Regarding the distance between the roller electrodes 301 and 331, the shortest reference distance dimension and the maximum distance are determined by a separately prepared gauge, and this dimension is determined by the CPU 21 that generates the command signal.
(See also FIG. 3) to be input and stored in advance.
Then, a control signal corresponding to the required electrode spacing is sent to the δ control unit 17
Generate.

FIG. 6 shows an embodiment of the Z-axis lifting mechanism in the parallel seam bonding apparatus according to the present invention. The reduction motor 511 is attached to the bracket 513, and its rotary shaft 50
The eccentric shaft 505 is attached to the 9 through the crank 507. The eccentric shaft 505 engages with a sliding lateral elongated hole 503 provided in the base plate 501. Four sliders 519, 521, 523, 525 are attached to the base plate 501, and guides 515, 517 are attached to the bracket 513 corresponding to these. The bracket 513 is held by an X-axis moving mechanism and a Y-axis advancing / retreating mechanism (not shown).

The deceleration motor 511 rotates and the eccentric shaft 505
The sliders 519 to 525 and the guide 51
Guided by 5,517, the sliding horizontal hole 50 on the base plate 501
3 also goes up. Further, when the eccentric shaft 505 comes to the lower side, the sliding lateral oblong hole 503 also descends to the lower side. Therefore, depending on the rotation angle of the deceleration motor 511, the base plate 501 moves up and down along the Z axis.

At this time, in the movement of the eccentric shaft 505,
The speed from the top position to the center position to the bottom position is slow at the beginning, becomes faster near the center part, and becomes slower near the bottom part. The relationship of the ascending / descending speed is most preferable when the roller electrode in the seam joining contacts the work. Expressing this velocity change relationship mathematically, it is a cosine function of the angle that the crank 507 supporting the eccentric shaft 505 makes with the vertical plane, and corresponds to when the cosine function changes from 0 ° to 90 °, 180 °. To do.
When the roller electrode contacts the work, it can be understood as the descending velocity corresponding to a function near 180 °.

In this embodiment, the cosine function by the eccentric axis is used to make the ascending / descending speed of the roller electrode suitable for the seam welding. However, even if another motion transmission mechanism is used, the roller electrode works similarly. It is possible to reduce the approaching speed just before the contact with. In FIG. 6, the same speed function can be obtained by enlarging the diameter of the circle of the eccentric shaft 505 and connecting the rotary shaft of the reduction motor to a point that is not the center of the circle. It is also possible to obtain the required speed function by bringing the cam follower into contact with a cam having a curved surface of an arbitrary function curve and connecting this cam follower to the base plate 501 in FIG.

[0037]

The parallel seam bonding apparatus according to the present invention has the features described above,
When a large number of workpieces are continuously worked, the trajectories of the roller electrodes that come into contact with each other are interchanged. Therefore, the slag adhering to the surface of the roller electrode and a slight surface deformation can be made uniform, so that the number of continuous joining operations can be much longer without re-polishing the roller electrode in the middle. Further, since the pair of roller electrodes are independently suspended via the elastic body, the pressing force can be independently and optimally applied, and the roller electrodes are always in good condition in response to subtle changes in movement. A strong pressing force is applied. Therefore, the working efficiency is improved and the joining quality is improved.

[Brief description of drawings]

FIG. 1 shows an example of a work arrangement in a parallel seam bonding apparatus according to the present invention.

FIG. 2 shows a positional relationship between a roller electrode and a work in the parallel seam bonding apparatus according to the present invention.

FIG. 3 shows a system diagram of an embodiment of a parallel seam joining apparatus according to the present invention.

FIG. 4 shows a flow chart for explaining the operation of the parallel seam bonding apparatus according to the present invention.

FIG. 5 shows an embodiment of a joining head in the parallel seam joining apparatus according to the present invention.

FIG. 6 shows an embodiment of a Z-axis lifting mechanism in the parallel seam bonding apparatus according to the present invention.

[Explanation of symbols]

1 ... Parallel seam joining device 2 ... Work 3
… Joining head 4… Pallet 5… Z-axis lifting mechanism 6
... Table 7 ... Table rotation mechanism 8 ... X axis movement mechanism
9 ... Y-axis moving mechanism 10 ... Junction power supply 11 ... Y control unit
13 ... X control unit 15 ... Z control unit 17 ... δ control unit 19 ... Controller
21 ... CPU 23 ... Touch panel display 25 ... Floppy disk 30 ... δ setting mechanism 301 ... Roller electrode 303 ... Electrode holder 305 ... Feed shaft
307… Arm 309,311… Slider 312… Guide 313… Column
315… Arm 317… Shaft 319… Disc 321… Coil spring
323… Flange 325… Nut 327… Right ball screw 331… Roller electrode 333… Electrode holder 335… Feed shaft
337… Arms 339, 341… Sliders 342… Guides 343… Columns
345… Arm 347… Shaft 349… Disc 351… Coil spring
353… Flange 355… Nut 357… Left ball screw 360… Yoke 361… Stepping motor 363… Coupling 365… Yoke 367… Bearing 369… Yoke 371… Bearing 373,375… Slider
377… Guide 501… Base plate 503… Sliding laterally elongated hole 505… Eccentric shaft 507… Crank 509… Rotating shaft 511… Deceleration motor 513… Bracket 515,517… Guide 519,521,523,
525… slider

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Masahiro Takahashi 1-18-1 Takada, Toshima-ku, Tokyo Inside Origin Electric Co., Ltd.

Claims (3)

[Claims] 1. Seam joining is performed by arranging a plurality of objects to be joined at intervals on a pallet, and applying a current between a pair of roller electrodes that rotate while applying pressure to the edges of the plurality of objects to be joined. In the parallel seam joining method described above, the joining operation is performed starting from one end of each effective width of the pair of roller electrodes, and the interval between the pair of roller electrodes is set to a small interval of 1 or every set number of times. A parallel seam joining method characterized by moving by a pitch and repeating this for each joining operation to uniformly move and utilize the range of the effective width of the roller electrode. 2. A plurality of objects to be joined are arranged on a pallet at intervals and a current is passed between a pair of roller electrodes which rotate while pressing the edges of these objects to be joined by seam joining. In the parallel seam joining apparatus, the step of setting one end of each effective width of the pair of roller electrodes at the edge of the article to be joined, the step of performing the joining operation, and the step of performing the joining operation once or every set number of times are performed. The method further comprises a step of moving the interval between the roller electrodes by only one pitch and a step of repeating this step for each joining operation to repeat the limit of the effective width of the pair of roller electrodes. These steps are stored in advance. A parallel seam bonding apparatus characterized in that it is controlled by the data of the CPU. 3. Seam joining is performed by arranging a plurality of objects to be joined at intervals on a pallet, and applying a current between a pair of roller electrodes that rotate while applying pressure to the edges of the plurality of objects to be joined. In the parallel seam bonding apparatus described above, a pair of roller electrodes are individually suspended, and a bonding head having a δ setting mechanism for moving one of the roller electrodes to set a gap, and a Z-axis for vertically moving the bonding head. An elevating mechanism, an X-axis moving mechanism that moves the Z-axis elevating mechanism in the left-right direction, and a Y-axis advancing / retracting mechanism that moves the X-axis moving mechanism in the front-rear direction are provided, and each of the pair of roller electrodes is effective. A step of setting one end of the width to an edge of the article to be joined, a step of performing a joining operation, and a step of moving the interval between the roller electrodes by a slight one pitch every one or a set number of times of the joining operation, This is each joint work Repeat every, and a step is provided for repeating the limit of the effective width of the pair of rollers electrodes,
CP stored in advance for each of these steps
A parallel seam joining apparatus, wherein a control signal is given to the δ setting mechanism, the Z-axis lifting mechanism, the X-axis moving mechanism, and the Y-axis advancing / retreating mechanism based on U data.