JPH09248748A - Processing equipment - Google Patents

Abstract

(57) Abstract: To provide a machining apparatus in which the number of axes to be controlled is reduced while keeping the number of axes required for the apparatus. SOLUTION: A moving stage 4 which moves in the horizontal direction, a rotating stage 5 provided on the moving stage 4 for rotating a tool 8 for processing a workpiece 1 with respect to the moving stage 4, the moving stage 4 and the rotating stage A control device for positioning the tool 8 by controlling each operation of the stage 5 is provided. The rotating stage 5 includes a bearing portion in the casing 12 in which the shaft portion 6 of the tool 8 is inserted and the tool 8. An air cylinder 14 that urges in the axial direction is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention includes a moving stage that moves in a horizontal direction and a rotating stage that is provided on the moving stage and that rotates a tool for processing a workpiece with respect to the moving stage. And a processing device for positioning a tool by controlling each operation of a rotary stage, and in particular, processing an aspherical lens made of a hard and brittle material such as ceramics or glass, an aspherical mirror, or an aspherical lens made of plastic or glass. The present invention relates to an aspherical surface processing apparatus suitable for high-precision mirror-surface processing of a die used for molding.

[0002]

2. Description of the Related Art It has long been known that the use of aspherical surfaces for optical lenses and mirrors significantly improves the performance of certain optical systems. Aspherical mirrors with paraboloids, hyperboloids, ellipsoids, and other quadric surfaces of revolution are Newton, Cassegrain,
It is famous for being used as the primary and secondary mirrors of the Gregory Reflection Telescope. Eyeglass lenses for astigmatism, high-power magnifiers and condenser lenses, and reflectors for projectors are also well known as aspherical optical components.

Aspherical optical components are manufactured, for example, by heat deformation processing in which a surface shape is formed by using a mold while the material has plasticity / fluidity, and polishing processing in which an excessive portion of the processed surface is removed by polishing. Is used. Polishing is also used for high-precision mirror finishing of the mold used in the heat deformation method.

Further, in the above-mentioned polishing process, since the target processing surface is an aspherical surface, a normal spherical polishing method cannot be applied, and various processing methods are adopted. For example, Japanese Patent Application Laid-Open No. 2-139112 discloses a "curved surface processing machine" as shown in FIG.

This curved surface processing machine includes an X-axis table 22 for reciprocating a workpiece 21 in the X-axis direction, and an X-axis table 2.
2 is provided on the fixed base 23 and is movable in the Y-axis direction orthogonal to the X-axis, and a Y-axis slider 24, which is provided on the Y-axis slider 24 and rotates about an axis substantially parallel to the X-axis. Movable A-axis swivel table 25 and A-axis swivel table 25
A Z-axis slider 26 which is provided on the Z-axis slider 26 and is capable of reciprocating in the Z-axis direction, and a cutting tool 27 fixed on the Z-axis slider 26.
And controlling each position of the X-axis table 22, the Y-axis slider 24, the A-axis swivel table 25, and the Z-axis slider 26, and at least controlling the X-axis table 22 and the Z-axis slider 26 at the same time by two axes. And means.

[0006]

Now, in the processing apparatus,
In general, the more axes that must be controlled, the more complex and costly the device itself. Of course, processing devices for aspherical surfaces are no exception.

However, in the conventional technique, it is necessary to control all the axes existing in the device, and there is a problem in that the control is simplified. .

In view of the above problems, it is an object of the present invention to provide a machining apparatus in which the number of axes to be controlled is reduced while the number of axes required for the apparatus remains unchanged.

[0009]

According to one aspect of the present invention for achieving the above object, there is provided a moving stage that moves in a horizontal direction, and a tool that is provided on the moving stage and that is used to machine a workpiece. In a processing device that includes a rotating stage that rotates with respect to the moving stage, and positions the tool by controlling each operation of the moving stage and the rotating stage, the rotating stage includes:
A processing apparatus is provided, which is provided with a bearing portion into which a shaft portion of the tool is inserted, and a biasing mechanism that biases the tool in the axial direction.

The tool may be, for example, a polishing tool for polishing a work surface of a workpiece. Further, the processed surface may be an aspherical surface. Further, the biasing mechanism may be configured by using an air cylinder or a spring.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION A processing apparatus according to the present invention will be described below.
One embodiment in the case of being applied to an aspherical surface polishing apparatus used for polishing an aspherical optical component or a die for molding an aspherical optical component will be described.

FIG. 1 shows the structure of the aspherical polishing apparatus of this embodiment. This aspherical polishing device has the following main components:
A moving stage 4 that moves in the horizontal direction (X-axis direction) and a rotating stage 5 that is rotatably provided on the moving stage 4.
A casing 12 fixed to the rotary stage 5, a bearing portion (not shown) housed in the casing 12,
The tool 8 inserted into the bearing portion and the biasing mechanism 14 provided on the upper portion of the casing 12 are provided. Biasing mechanism 14
Urges the tool 8 in the axial direction (direction of arrow A). The target workpiece 1 is an optical lens having an aspherical surface 1a finished to a certain degree of accuracy. Here, it is assumed that the aspherical surface la is finished with the finally required accuracy by using this aspherical surface polishing apparatus. The optical lens 1 is detachably attached to the rotary table 2.

The moving stage 4 is attached to a rail portion 3a formed on the frame 3, and a motor 9 provided on a side surface of the frame 3 moves the moving stage 4 along the rail portion 3a (that is, the X-axis). Move). A motor 10 is provided on the back surface of the moving stage 4. The Y axis in the figure is an axis perpendicular to the X axis, and the motor 10 is
The rotary stage 5 is rotated around the Y axis. A motor 11 is further fixed to the rotary stage 5. The operation of the motors 9, 10, 11 is controlled by a control device (not shown). The control device includes a CPU and a memory that stores a program executed by the CPU.

The tool 8 comprises a shaft portion 6 inserted into a bearing portion inside a casing 12, and a polisher 7 fixed to the tip of the shaft portion 6. Further, in the present embodiment, the biasing mechanism 1
4 uses an air cylinder. The air cylinder applies a force in the direction of arrow A to the shaft portion 6 to press the polisher 7 against the aspherical surface 1a. If it is desired to further reduce the cost, an ordinary spring may be used for the biasing mechanism. A belt 13 is stretched around the shaft portion 6 in the casing 12 and the rotation shaft of the motor 11. The rotating force of the rotating shaft of the motor 11 is transmitted to the shaft portion 6 by the belt 13. The motor 11 rotates the entire tool 8 via the belt 13 during polishing. The rotary table 2 is also being polished by the tool 8 during polishing.
And the optical lens 1 is rotated.

The polisher 7 includes a base plate 7a fixed to the shaft portion 6 and an elastic body 7 fixed to the base plate 7a with an adhesive.
b (eg, hard neoprene sponge). A polishing sheet is fixed to the surface of the elastic body 7b with an adhesive. In the correction polishing for partially polishing the aspherical surface 1a, the contact area between the polisher 7 and the processed surface (aspherical surface 1a) is set to about 1/9 or less of the area of the entire processed surface. In the uniform polishing for polishing the entire aspherical surface 1a, the contact area between the polisher 7 and the processed surface (aspherical surface 1a) is set to about 1/1 or less of the area of the entire processed surface.

The aspherical surface polishing apparatus having the above construction operates as follows during an actual polishing operation.

The control device first drives the motor 10 to raise the tool 8 vertically, and then drives the motor 9 to
The axis of the tool 8 and the axis of the rotary table 2 are positioned coaxially. Then, the polisher 7 is pressed against the processing surface 1a using the air cylinder 14. As a result, the center point of the polisher 7 and the center point of the aspherical surface 1a coincide with each other. At this time, the center point of the polisher 7 (= the center point of the aspherical surface 1a) and the rotation center of the rotary stage 5 are aligned. Measure the distance (D). This completes the adjustment.

After that, the work 1 is rotated on the rotary table 2 and the tool 8 is rotated by the motor 11 to start the actual polishing. During polishing, the control device gradually moves the rotation angle of the rotary stage 5 using the motor 10 while moving the moving stage 4 in the X-axis direction using the motor 9, thereby changing the position and the tilt angle of the tool 8. To go. Specifically, the amount of movement of the moving table 4 in the X-axis direction, the designed surface shape of the aspherical surface 1a, and the above-mentioned measured value D are used so that the polisher 7 faces the normal direction of the aspherical surface 1a at each polishing point. Then, the tilt angle of the tool 8 is calculated, and the tilt angle is sequentially followed in accordance with the movement in the X-axis direction. The polisher 7 is constantly pressed against the processing surface 1a by the air cylinder 14 during polishing, and control is unnecessary.

As described above, according to the present embodiment, only by controlling the movement of the moving stage 4 in the X-axis direction and the movement of the rotary stage 10 around the Y-axis, one cross section passing through the center point of the rotating aspherical surface. It is possible to press the polisher 7 against the aspherical surface while always making the shaft portion 6 of the tool 8 face in the normal direction of the aspherical surface.

[0020]

According to the present invention, since the number of axes to be controlled can be reduced, it is possible to provide a simple and inexpensive machining apparatus.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a configuration of an embodiment of a processing apparatus according to the present invention.

FIG. 2 is a configuration diagram showing an example of a conventional processing apparatus.

[Explanation of symbols]

 1, 21: Workpiece, 2: Rotary table, 3: Frame, 4: Moving stage, 5: Rotary stage, 6: Shaft part, 7: Polisher, 8: Tool, 9, 10, 11: Motor, 12: Casing , 13: belt, 14: biasing mechanism, 22: X-axis table, 23: fixed base, 24: Y-axis slider, 25: A-axis turning table, 26: Z-axis slider 27: cutting tool

Claims (4)

[Claims] 1. A moving stage that moves in a horizontal direction, and a rotating stage that is provided on the moving stage and rotates a tool for machining a workpiece with respect to the moving stage. In a processing device that positions each tool by controlling each operation of a stage, the rotating stage includes a bearing portion into which a shaft portion of the tool is inserted, and a biasing mechanism that biases the tool in an axial direction. A processing device characterized in that and are provided. 2. The processing apparatus according to claim 1, wherein the tool is a polishing tool for polishing a processing surface of the workpiece. 3. The processing apparatus according to claim 1, wherein the processing surface is an aspherical surface. 4. The processing apparatus according to claim 1, 2 or 3, wherein the urging mechanism is an air cylinder or a spring.