JPH09253992A - Polishing equipment - Google Patents

Abstract

(57) [Abstract] [PROBLEMS] To perform highly accurate polishing and reduce labor by revolving a plurality of polishing tools while rotating them mechanically. SOLUTION: A plurality of polishing tools 3 for polishing the object to be polished 2 by being pressed against the upper surface of the object 2 to be polished set on a support table 1.
Each polishing tool 3 is provided at the lower end of a rotating shaft 5 which is rotatable about the first vertical axis 4 and which holds the rotating shaft 5 and is movable up and down with respect to the support 1. In addition, a rotation mechanism 9 that rotates each rotation shaft 5, a rotation motor 10 that drives the rotation mechanism 9 to rotate, and a second vertical axis 11 around each rotation axis 5 that is parallel to the first vertical axis 4. Revolution mechanism that revolves around
An orbiting motor 13 for rotating the orbiting mechanism 12 is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing apparatus used for polishing a flat object to be polished such as metal, glass and stone.

[0002]

2. Description of the Related Art Conventionally, as a polishing apparatus of this type, FIG.
As shown in FIG. 10, there is one in which a polishing tool 83 is attached to the tip of a rotary shaft 82 held in a main body 81. The main body 81 is provided with a motor 84 that rotationally drives the rotary shaft 82, and an abrasive material or a polishing pad is attached to the tip surface of the polishing tool 83.

According to this, by driving the motor 84, the rotary shaft 82 rotates and the polishing tool 83 also rotates. Then, the operator holds the main body 81 and the polishing tool 83.
Is pressed against the upper surface of the object to be polished 85, and as shown in FIG. 10, the main body 81 is rotated around the center point A, so that the polishing tool 83 is revolved around the center point A for polishing. Was there.

[0004]

However, in the above-mentioned conventional type, since the operator manually revolves the polishing tool 83, there are problems that the polishing accuracy is low and labor is required.

Therefore, the invention according to claim 1 of the present invention is intended to perform highly accurate polishing and reduce the labor by revolving the polishing tool while rotating it mechanically. is there.

[0006]

In order to achieve the above-mentioned object, the invention according to claim 1 of the present invention is set above a supporting portion for supporting an object to be polished, and is set to this supporting portion. A polishing tool that is pressed against the upper surface of the object to be polished to polish the object to be polished is provided, and the polishing tool is provided at the lower end of a rotary shaft that is rotatable around the first vertical axis and holds this rotary shaft. In addition, a rotation mechanism that rotates the rotation shaft, a rotation drive device that drives the rotation mechanism to rotate, and a rotation shaft that is parallel to the first vertical axis on a holder that can move up and down with respect to the support portion. It is characterized in that a revolving mechanism that revolves around the second vertical axis and a revolving drive device that rotationally drives this revolving mechanism are provided.

According to this, by operating the rotation drive device to rotate the rotation mechanism, the polishing tool is rotated around the first vertical axis together with the rotation axis, and further,
The polishing tool is revolved around the second vertical axis along with the rotation shaft by operating the revolution drive device to rotate the revolution mechanism. Then, by lowering the holding body and pressing the polishing tool against the upper surface of the object to be polished set on the support portion, the polishing tool revolves while revolving around its axis to polish the object to be polished.

As described above, since it becomes possible to polish the object to be polished by revolving the polishing tool while rotating it mechanically, it is possible to perform highly accurate polishing and further reduce the labor of the operator. .

Further, according to the second aspect of the invention, a rotation motor whose rotation speed is adjustable is used as the rotation drive device, and a revolution motor whose rotation speed is adjustable is used as the revolution drive device. It is characterized by that.

According to this, by adjusting the rotation speed of the rotation motor and the rotation speed of the revolution motor, it becomes possible to individually change the rotation speed and the revolution speed of the polishing tool. Since the polishing scratches (polishing marks) formed on the upper surface of the can be freely selected, it is possible to select the optimum polishing scratches for the material of the object to be polished.
Further, by individually changing the rotation speed and the revolution speed of the polishing tool, it is possible to perform uniform polishing even on the central portion and the peripheral portion of the object to be polished, the overlapping portion of the polishing scratches, and the like.

Further, according to a third aspect of the present invention, at the lower end of the rotary shaft, there is provided a movable body which is movable in the vertical direction and is pressed downward by the pressing force of the pressing means. It is characterized in that a polishing tool is provided.

According to this, when polishing the upper surface of the object to be polished with the polishing tool, the polishing tool is pressed downward by the pressing force of the pressing means via the movable body. For this reason,
Even if there is a slight height difference on the top surface of the work piece, the polishing tool moves up and down via the movable body to follow the height difference on the top surface of the work piece. Since the upper surface is pressed, the pressing force of the polishing tool on the object to be polished can be kept substantially constant. Therefore, even if there is a difference in height on the upper surface of the object to be polished, it is possible to prevent the occurrence of scratches and uneven polishing, and it is possible to perform highly accurate polishing.

Further, the invention according to claim 4 is characterized in that a supply passage for supplying the polishing liquid to the polishing tool is formed in the rotary shaft. According to this, when the object to be polished is being polished by the polishing tool, the polishing liquid is supplied to the polishing tool through the supply flow path, so that the dust and processing debris on the upper surface of the object to be polished are removed by the polishing liquid. It is possible to prevent clogging of the polishing tool and prevent foreign matter from being caught between the polishing tool and the object to be polished. Further, since the supply passage is formed in the rotary shaft, the polishing device can be downsized.

Furthermore, the invention according to claim 5 is characterized in that the polishing tool is attached to the lower end of the rotary shaft through a universal joint. According to this, during polishing,
When a foreign matter intervenes between the polishing tool and the object to be polished, the polishing tool swings with respect to the first vertical axis through the universal joint, so that the foreign matter is removed from between the polishing tool and the object to be polished. Easily eliminated. Even if the upper surface of the object to be polished is slightly inclined, the polishing tool follows the inclination of the upper surface of the object to be polished by swinging with respect to the first vertical axis via the universal joint. Incline. Therefore, even if the upper surface of the object to be polished is slightly inclined, highly accurate polishing can be performed.

[0015]

FIG. 1 is a block diagram showing an embodiment of the present invention.
This will be described with reference to FIG. As shown in FIGS. 2 and 3,
Reference numeral 1 is a support base 1 (an example of a support portion) that supports a flat object 2 to be polished such as metal, glass or stone. Above the support table 1, three polishing tools 3 are pressed against the upper surface of the object 2 to be polished set on the support table 1 to polish the object 2 to be polished.
Is provided. Each of these polishing tools 3 is provided at the lower ends of three rotating shafts 5 which are rotatable about the first vertical axis 4, and these rotating shafts 5 are held by a holder 6.

The holder 6 is formed in a box shape,
The lower portion of the rotary shaft 5 projects downward from an opening 8 formed in the bottom wall 7 of the holder 6. The holder 6 includes a rotation mechanism 9 for rotating each of the rotating shafts 5, a rotation motor 10 for rotating the rotation mechanism 9 (an example of a rotation driving device), and each of the rotation shafts 5 A revolving mechanism 12 for revolving around a second vertical axis 11 parallel to the vertical axis 4 of 1;
An orbiting motor 13 (an example of an orbiting drive device) for rotationally driving the orbiting mechanism 12 is provided. The three rotary shafts 5 are separated from each other by a fixed distance in the radial direction with the second vertical axis 11 as the center, and are distributed every 120 ° in the circumferential direction.

The rotation mechanism 9 includes the second vertical axis 11
One rotation shaft 15 that can rotate around and the above-mentioned rotation motor
The drive pulley 16 provided on the drive shaft 10 and the rotation shaft 15 described above.
Drive belt 18 wound between a driven pulley 17 provided at the upper end of the sun gear and a sun gear provided below the rotation shaft 15.
19 and a planetary gear 20 that is provided above each rotary shaft 5 and meshes with the sun gear 19. Above rotation axis
15 is inserted into a sleeve body 21 provided on the upper wall 41 of the holding body 6 and is rotatably held by the sleeve body 21 via a bearing 22.

The revolving mechanism 12 has an upper rotating body 23 that integrally connects the upper ends of the three rotating shafts 5, an intermediate rotating body 24 that integrally connects the intermediate portions, and lower parts. Lower rotating body 25 for integrally connecting the above and the second vertical axis
A revolution shaft 27 that is rotatable around a third vertical axis 26 parallel to 11
And a drive pulley 28 provided on the drive shaft of the revolution motor 13 and a driven pulley provided on the upper end of the revolution shaft 27.
A drive belt 30 wound between 29, a gear 31 provided on the lower part of the revolution shaft 27, a gear 32 meshing with the gear 31 and provided on the outer periphery of the intermediate rotating body 24. It consists of

Of these, the revolution shaft 27 is held by a pair of upper and lower bearing devices 33 provided inside the holding body 6. In addition, as shown in FIGS.
Is formed in a ring shape, and the upper end portion of each rotating shaft 5 is inserted into the upper rotating body 23 and is rotatably held via a bearing 34.

As shown in FIGS. 2 and 3, the intermediate rotating body 24 is formed of a cylindrical portion 24a and a disc portion 24b provided at the upper end of the cylindrical portion 24a. It is held inside the holding body 6 via a bearing 35 that is fitted to the outside and is rotatable about the second vertical axis 11. Furthermore, the intermediate portion of each rotary shaft 5 is
It is inserted into the disk portion 24b of the above and is rotatably held via a bearing 36.

As shown in FIGS. 1 and 2, the lower rotating body 25 is formed in a disk shape and is held inside the holding body 6 via a bearing 37 fitted on the outer peripheral surface thereof. It is rotatable about the second vertical axis 11. further,
The lower portion of each rotating shaft 5 is inserted into the lower rotating body 25 and is rotatably held via a bearing 38.

Further, on the second vertical axis 11, the intermediate part rotating body 24 and the lower rotating body 25 are inserted and the second vertical axis center together with the intermediate rotating body 24 and the lower rotating body 25. A connecting shaft 39 that is rotatable around 11 is provided. This connecting shaft 39
A disc-shaped cover plate 40 that covers the opening 8 of the bottom wall 7 of the holder 6 is attached to the lower end of the. The rotation motor 10 and the revolution motor 13 are installed on the upper wall 41 of the holder 6, and the rotation speeds thereof can be adjusted individually by inverter control.

As shown in FIGS. 1 and 2, each of the rotating shafts 5 is
A cylindrical holding member 42 is provided at the lower end of each of the holding members 42, and each of the holding members 42 has a cylindrical movable body 43 slidable in the vertical direction.
Has been inserted. Inside each of the movable bodies 43 and the holding member 42, a compression coil spring 44 (an example of a pressing unit) that presses the movable bodies 43 in the downward direction is provided.

A flange portion 43a is provided under each movable body 43.
And a mounting board 47 is provided on each of the flange portions 43a through a universal joint 46. Each of the polishing tools 3 is formed in a disk shape and has the first vertical axis 4
It is mounted on each mounting board 47 so as to be eccentric with respect to.
An abrasive or a polishing pad is attached to each polishing tool 3.

As shown in FIGS. 1, 5 and 6, the universal joint 46 is provided on the annular body 46a provided between the movable body 43 and the mounting substrate 47 and on the flange portion 43a of the movable body 43. And a pair of first connecting pieces 46b located on the outer periphery of the annular body 46a.
And a pair of second connecting pieces 46c provided on the mounting board 47 and located on the outer peripheral side of the annular body 46a, and a first connecting pin 46d for rotatably connecting the annular body 46a and each of the first connecting pieces 46b. And a second connecting pin 46e that rotatably connects the annular body 46a and each of the second connecting pieces 46c. That is, the both first connecting pieces 46b and the first connecting pin 46d are arranged on the first horizontal axis 48 orthogonal to the first vertical axis 4, and the both second connecting pieces 46b are arranged. 46c and the second connecting pin 46e are
It is arranged on a second horizontal axis 49 that is orthogonal to the first vertical axis 4 and the first horizontal axis 48. As a result, as shown in FIG. 6, each mounting board 47 can swing about the first horizontal axis 48 and the second horizontal axis 49 that intersect in a cross shape in a plan view. There is.

As shown in FIGS. 2 and 3, each of the rotary shafts 5 is
Is a hollow shaft in which a supply passage 50 for supplying a polishing liquid to the polishing tool 3 is formed. The supply channel 50 is the rotating shaft 5.
The upper supply hole 51 is formed over both upper and lower ends and communicates with the upper supply hole 51 formed in the holding member 42 as shown in FIG. In addition, a lower supply hole 53 communicating with the polishing liquid supply port 52 formed in the polishing tool 3 is formed in each of the mounting substrates 47, and the upper supply hole 51 and the lower supply hole 53 are the movable members. It is connected by a flexible tube 54 inserted into the inside of 43. The lower part of the flexible tube 54 is fitted into the lower supply hole 53, and the mounting substrate 47 moves up and down integrally with the movable body 43, so that it can be slid vertically with respect to the flexible tube 54. Has become.

Further, as shown in FIG. 2, like the rotating shaft 5, the rotating shaft 15 is also a hollow shaft in which a supply passage 55 for supplying a polishing liquid is formed inside at both upper and lower ends. Rotary joints 56, 57 and 58 are provided at the upper and lower ends of the rotation shaft 15 and the upper end of the rotation shaft 5, respectively. Among these, the outlet of the lower rotary joint 57 provided at the lower end of the rotation shaft 15 is branched into three corresponding to each rotary shaft 5, and the outlet of the lower rotary joint 57 and the rotary shaft 5 are
Of the rotary joint 58 is connected by a connection hose 59 (see FIG. 4). A supply hose for supplying the polishing liquid pumped from the tank to the inlet of the upper rotary joint 56 provided at the upper end of the rotation shaft 15.
60 is connected.

Further, as shown in FIG.
Is movable up and down with respect to the support base 1 while being guided by a guide rail 61, and is driven up and down by a plurality of lifting cylinder devices 62.

The operation of the above structure will be described below.
As shown in FIG. 2, by driving the rotation motor 10, the rotation shaft is driven through both pulleys 16 and 17 and the drive belt 18.
15 rotates, and the three rotary shafts 5 rotate about the first vertical axis 4 via the sun gear 19 and the planetary gear 20, respectively, so that three polishing shafts are integrally formed with the rotary shafts 5. Tool 3
Rotates about the first vertical axis 4.

Further, by driving the revolution motor 13, the revolution shaft 27 rotates via both pulleys 28 and 29 and the drive belt 30, and the intermediate portion rotary body 24 moves to the first position via both gears 31 and 32. By rotating around the second vertical axis 11, the three rotary shafts 5 revolve around the second vertical axis 11. At this time, the upper rotary body 23, the lower rotary body 25, the connecting shaft 39, and the cover plate 40 together with the intermediate rotary body 24 also rotate around the second vertical axis 11 integrally with the rotary shafts 5.

Then, by extending the piston rod 62a of the lifting cylinder device 62, the holder 6 is lowered, and each polishing tool 3 is pressed against the upper surface of the workpiece 2 set on the support 1. It As a result, each polishing tool 3 rotates about each first vertical axis 4 while rotating around the second vertical axis 11.
The object 2 to be polished is revolved around and polished.

As described above, since it becomes possible to polish the object to be polished 2 by revolving each polishing tool 3 while rotating it mechanically, it is possible to perform highly accurate polishing and further reduce the labor of the operator. Can be reduced.

At this time, the rotation speed and the revolution speed of each polishing tool 3 can be individually changed by adjusting the rotation speed of the rotation motor 10 and the rotation speed of the revolution motor 13 by inverter control. This makes it possible to freely select the polishing scratches (polishing marks) formed on the upper surface of the object to be polished 2 as shown in FIG. Can be selected. Further, by individually changing the rotation speed and the revolution speed of the polishing tool 3, it is possible to perform uniform polishing even on the central portion and the peripheral portion of the object to be polished 2, the overlapping portion of polishing scratches, and the like.

When polishing the upper surface of the object to be polished 2 with each polishing tool 3, each polishing tool 3 pushes the compression coil spring 44 via the movable body 43, as shown in FIG. It is pressed downward by pressure. Therefore, even when there is a slight height difference on the upper surface of the object to be polished 2, each polishing tool 3 moves up and down in accordance with the vertical movement of the movable body 43 and the height difference on the upper surface of the object to be polished 2. The polishing tools 3 are always pressed against the upper surface of the object to be polished 2, and the pressing force of each polishing tool 3 on the object to be polished 2 can be kept substantially constant.
Therefore, even if there is a slight height difference on the upper surface of the object to be polished 2, it is possible to prevent the occurrence of scratches and uneven polishing, and perform highly accurate polishing.

Further, as shown in FIG.
The polishing liquid supplied from the upper rotary joint 56 to the upper rotary joint 56 flows through the supply flow path 55 in the rotation shaft 15, flows from the lower rotary joint 57 to the rotary joint 58 of each rotary shaft 5, and further supplies in the rotary shaft 5. Flowing through the passage 50, as shown in FIG. 1, each supply channel 50 passes through the upper supply hole 51, the flexible tube 54, and the lower supply hole 53 to the polishing surface 63 of each polishing tool 3 from the supply port 52. Supplied. As a result, when the object to be polished 2 is being polished by the respective polishing tools 3, dust and processing debris on the upper surface of the object to be polished 2 are removed by the polishing liquid, the clogging of the respective polishing tools 3 is prevented, and the respective polishing tools are 3 and the object to be polished 2
It is possible to prevent foreign matter from being caught between and.

Further, when foreign matter intervenes between the polishing tool 3 and the object to be polished 2 during polishing, the polishing tool 3 and the mounting substrate 47 are integrated integrally with the universal joint as shown in FIGS. By swinging around the first horizontal axis 48 or the second horizontal axis 49 of 46, the foreign matter is easily removed from between the polishing tool 3 and the object to be polished 2. Even when the upper surface of the object to be polished 2 is delicately inclined, each polishing tool 3 is swung to incline following the inclination of the upper surface of the object to be polished 2. Therefore, even if the upper surface of the object to be polished 2 is slightly inclined, highly accurate polishing can be performed.

In the above-described polishing, since each polishing tool 3 is not eccentric with respect to the first vertical axis 4 as shown in FIG. 2, the upper surface of the workpiece 2 is polished as shown in FIG. At the center of the area, a slight amount of unpolished portion 64, which does not contact the polishing tool 3 and is not polished, is generated. In such a case, as shown in FIG. 1, each polishing tool 3 is attached to the first vertical axis 4 respectively.
By eccentricity by a predetermined amount L in the same direction and then polishing, as shown in FIG. 8, the unpolished portion 64 can be eliminated.

In the above-described embodiment, since the polishing liquid supply channels 50 and 55 are formed in the rotary shafts 5 and the rotation shaft 15, the polishing apparatus can be downsized. In the above-described embodiment, as shown in FIG. 3, three polishing tools 3 are provided, but a plurality of polishing tools other than three or one may be provided.

In the above embodiment, as shown in FIG.
Flexible tube connecting the upper supply hole 51 and the lower supply hole 53
Although communicated by 54, a rigid tube such as a steel tube may be used.

[0040]

As described above, according to the first aspect of the present invention, the rotation driving device is actuated to drive the rotation mechanism to rotate, so that the polishing tool and the polishing tool are moved together with the first rotation tool. The polishing tool is revolved around the second vertical axis along with the rotation axis by rotating the revolving mechanism by rotating the revolving mechanism by rotating the revolving shaft around the vertical axis. Then, by lowering the holding body and pressing the polishing tool against the upper surface of the object to be polished set on the support portion, the polishing tool revolves while revolving around its axis to polish the object to be polished.

As described above, since it becomes possible to polish the object to be polished by revolving the polishing tool while rotating it mechanically, it is possible to perform highly accurate polishing and further reduce the labor of the operator. .

Further, according to the second aspect of the present invention, the rotation speed and the revolution speed of the polishing tool are individually changed by adjusting the rotation speed of the rotation motor and the rotation speed of the revolution motor. Since it is possible to freely select the polishing scratches (polishing marks) formed on the upper surface of the object to be polished, it is possible to select the optimum polishing scratches for the material of the object to be polished. Further, by individually changing the rotation speed and the revolution speed of the polishing tool, it is possible to perform uniform polishing even on the central portion and the peripheral portion of the object to be polished, the overlapping portion of the polishing scratches, and the like.

Further, according to the third aspect of the invention, when the upper surface of the object to be polished is polished by the polishing tool, the polishing tool is pressed downward by the pressing force of the pressing means via the movable body. There is. Therefore, even if there is a slight height difference on the upper surface of the object to be polished, the polishing tool moves up and down by following the height difference on the upper surface of the object to be polished through the movable body, and therefore the polishing tool is always covered. The upper surface of the polishing object is pressed, and the pressing force of the polishing tool on the polishing object can be kept substantially constant. Therefore, even if there is a difference in height on the upper surface of the object to be polished, it is possible to prevent the occurrence of scratches and uneven polishing, and it is possible to perform highly accurate polishing.

Further, according to the fourth aspect of the present invention, since the polishing liquid is supplied to the polishing tool through the supply passage when polishing the object to be polished with the polishing tool, the upper surface of the object to be polished is Dust and processing waste are removed by the polishing liquid, clogging of the polishing tool can be prevented, and foreign matter can be prevented from being caught between the polishing tool and the object to be polished. Further, since the supply passage is formed in the rotary shaft, the polishing device can be downsized.

Further, according to the invention of claim 5, when foreign matter intervenes between the polishing tool and the object to be polished during polishing, the polishing tool is connected to the first vertical axis through the universal joint. By swinging, foreign matters are easily removed from between the polishing tool and the object to be polished. Even if the upper surface of the object to be polished is slightly inclined, the polishing tool follows the inclination of the upper surface of the object to be polished by swinging with respect to the first vertical axis via the universal joint. Incline. Therefore, even if the upper surface of the object to be polished is slightly inclined, highly accurate polishing can be performed.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a mounting portion of a polishing tool of a polishing apparatus according to an embodiment of the present invention.

FIG. 2 is a side view showing an internal configuration of a polishing device.

FIG. 3 is a view as viewed in the direction of arrows AA in FIG. 2;

FIG. 4 is a detailed view of an upper end portion of a rotating shaft.

FIG. 5 is a partially cutaway side view of the universal joint.

6 is a view on arrow AA in FIG.

FIG. 7 is a plan view showing polishing scratches when each polishing tool is not eccentric with respect to the first vertical axis.

FIG. 8 is a plan view showing polishing scratches when each polishing tool is eccentric with respect to the first vertical axis.

FIG. 9 is a side view of a conventional polishing apparatus.

FIG. 10 is a plan view showing a polishing method using a conventional polishing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Support base (support part) 2 Polishing object 3 Polishing tool 4 1st vertical axis 5 Rotation axis 6 Retainer 9 Rotation mechanism 10 Rotation motor (rotation drive device) 11 2nd vertical axis 12 Revolution mechanism 13 Revolution motor (revolution drive device) 43 Movable body 44 Compression coil spring (pressing means) 46 Universal joint 50 Supply flow path

Claims (5)

[Claims] 1. A polishing tool for polishing an object to be polished by being pressed against an upper surface of the object to be polished set on the support part is provided above a supporting part supporting the object to be polished. 1. A rotation mechanism for rotating the rotation shaft on a holder provided at the lower end of a rotation shaft that is rotatable about the vertical axis of the rotation shaft 1, and which holds the rotation shaft and can be raised and lowered with respect to the support portion. A rotation drive device that rotationally drives the mechanism, a revolution mechanism that revolves the rotation shaft around a second vertical axis parallel to the first vertical axis, and a revolution drive device that rotationally drives the revolution mechanism. And a polishing device. 2. A rotation motor capable of adjusting a rotation speed is used as the rotation drive device, and a revolution motor having a adjustable rotation speed is used as the revolution drive device. Item 1. The polishing apparatus according to Item 1. 3. A movable body, which is movable in the vertical direction and is pressed downward by the pressing force of the pressing means, is provided at the lower end of the rotary shaft, and the polishing tool is provided on the movable body. The polishing apparatus according to claim 1, wherein: 4. The polishing apparatus according to claim 1, wherein a supply passage for supplying the polishing liquid to the polishing tool is formed in the rotation shaft. 5. The polishing apparatus according to claim 1, wherein the polishing tool is attached to the lower end of the rotary shaft via a universal joint.