JPH09307987A - Ultrasonic wave probe and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain the ultrasonic probe which is suitable for observation at a closest distance and in which an ultrasonic wave image is obtained with excellent quality and lower noise by forming a positioning member fitting to a wave guide member to an ultrasonic wave transducer so as to assembly the ultrasonic wave transducer and the waveguide member with precision. SOLUTION: A cylindrical fitting member 17 is formed integrally as a positioning member around a rear load member 7 of an ultrasonic wave transducer 10 consisting of a piezoelectric element 1, a rear load member 7 and an acoustic matching layer 11. The fitting member 17 is fitted and fixed to an ultrasonic wave probe tip 20 of the cylindrical wave guide member 5 consisting of an ultrasonic wave transmission medium 12, a reflection member 13 and a medium layer 22. Thus, the precise assembly between the ultrasonic wave transducer 10 and the wave guide member 5 is facilitated, and the probe is suitable for observation at a closest distance to obtain an ultrasonic wave image with high quality and lower noise.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic probe used in an ultrasonic diagnostic apparatus for medical use or nondestructive inspection, and a method for manufacturing the same.

[0002]

2. Description of the Related Art The tip of a mechanical drive type ultrasonic probe has an ultrasonic transducer and an acoustic mirror for changing the traveling direction of an ultrasonic beam composed of an ultrasonic pulse train transmitted from the ultrasonic transducer. It is configured to be mounted on a cylindrical housing which is a holding member for both of these.

By applying a pulse voltage from an ultrasonic oscillator (not shown) to the ultrasonic transducer, ultrasonic pulses are emitted from the ultrasonic transducer, reflected by the mirror, and then output to the outside of the ultrasonic probe. To be done. Then, the ultrasonic pulse reflected by the observation target is redirected by the mirror,
It is incident on the ultrasonic transducer.

Generally, the purpose of the configuration of the ultrasonic transducer described above is to provide an ultrasonic pulse transmission section between the ultrasonic transducer and the mirror so that a time interval is provided between the ultrasonic beam and the observation target. is there. This time interval makes it possible to receive the ultrasonic pulse reflected in the immediate vicinity of the ultrasonic probe after the effect of the oscillation pulse applied to the ultrasonic transducer on the observation device disappears, and Observation becomes possible.

[0005]

However, in the above-mentioned configuration, since the holding member for holding the ultrasonic transducer normally arranged in the transmission section is made of metal such as stainless steel, the acoustic impedance of the holding member is It becomes larger than the acoustic impedance of an ultrasonic medium such as water or ultrasonic gel, and diffuse reflection of ultrasonic waves occurs at the interface between the two. As a result, a large amount of noise is mixed in the obtained ultrasonic image, which has a great adverse effect on diagnosis and judgment using the ultrasonic image.

When air bubbles are mixed in the ultrasonic medium in the transmission section, since the acoustic impedance of the bubbles is extremely small, ultrasonic waves are generated at the interface between the ultrasonic medium and the bubbles. It is almost completely reflected. As a result, multiple reflection noise is generated to the extent that the ultrasonic image becomes white,
Observation of ultrasound images is virtually impossible.

The present invention has been made in view of the above circumstances, and provides an ultrasonic probe suitable for observation at a close range and capable of obtaining a high-quality ultrasonic image with less noise, and a method for manufacturing the same. The purpose is.

[0008]

According to the first aspect of the present invention,
An ultrasonic transducer having a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element; and an ultrasonic transducer formed on the ultrasonic transducer. An ultrasonic probe including a waveguide member as a basic constituent element is characterized in that a positioning member that is fitted to the waveguide member is formed on the ultrasonic transducer.

According to a second aspect of the present invention, an ultrasonic wave having a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element. In an ultrasonic probe having a transducer and a waveguide member formed in the ultrasonic transducer as basic constituent elements, an acoustic lens is integrally formed with the ultrasonic transducer.

According to a third aspect of the present invention, an ultrasonic wave has a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element. A manufacturing method for manufacturing an ultrasonic probe including a transducer and a waveguide member formed on the ultrasonic transducer as basic constituent elements, wherein the waveguide member is a hollow cylindrical member, and an inner surface of the waveguide member is formed. Is used as an acoustic lens forming type guide, and the acoustic lens is integrally formed on the ultrasonic transducer by moving the acoustic lens forming type along the inner surface of the waveguide member.

According to a fourth aspect of the present invention, an ultrasonic wave has a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element. An ultrasonic probe including a transducer and a waveguide member formed in the ultrasonic transducer as a basic constituent element, characterized in that an opening is provided in a portion of the waveguide member that is in the vicinity of a side surface of the ultrasonic transducer. It is what

According to a fifth aspect of the present invention, the waveguide member in the ultrasonic probe according to the first or second aspect is 10 × 1.
A hollow member made of a material having a low acoustic impedance of 0 ⁶ kg / m ² s or less, and sealed inside the hollow member 2
With a low acoustic impedance of 10 ⁶ kg / m ² s or less,
And an ultrasonic medium made of a low-attenuation fluid material, and a member having a low acoustic impedance of about 3 to 8 × 10 ⁶ kg / m ² s, which is provided on both inner and outer surfaces of the hollow member or on one surface thereof. It is characterized by having.

According to a sixth aspect of the invention, the waveguide member in the ultrasonic probe according to the first, second or fourth aspect is made of a material having a low acoustic impedance of 3 to 8 × 10 ⁶ kg / m ² s or less. A hollow member and an ultrasonic medium made of a fluid material having a low acoustic impedance of 2 × 10 ⁶ kg / m ² s or less and a low attenuation, which is enclosed in the hollow member. To do.

According to a seventh aspect of the invention, in the ultrasonic probe according to the first aspect, the shape of the waveguide member is cylindrical, and the positioning member is inscribed in the waveguide member. To do.

According to the first aspect of the present invention, since the positioning member that fits with the waveguide member is formed on the ultrasonic transducer, the ultrasonic transducer and the waveguide member can be precisely assembled, and the ultrasonic transducer and the waveguide member are located very close together. It is suitable for observing a distance and can obtain a high-quality ultrasonic image with less noise.

According to the second aspect of the invention, since the acoustic lens is integrally formed with the ultrasonic transducer, the acoustic field in the housing can be effectively focused by the acoustic lens, and it is possible to observe at a close range. In addition to being suitable, it is possible to obtain a high-quality ultrasonic image with lower noise.

According to the third aspect of the invention, in the method of manufacturing an ultrasonic probe, the waveguide member is a hollow cylindrical member, and the inner surface of the waveguide member is an acoustic lens forming type guide. The acoustic lens can be formed with high accuracy because the acoustic lens is integrally formed on the ultrasonic transducer by moving the acoustic lens forming die along the inner surface of the waveguide member. An ultrasonic probe that exerts an action can be obtained.

According to the fourth aspect of the invention, since the opening is provided in the portion of the waveguide member which is in the vicinity of the side surface of the ultrasonic transducer, it is easy to remove the air bubbles.
It is possible to obtain a high-quality ultrasonic image with lower noise.

According to the invention of claim 5, claim 1,
The waveguide member in the ultrasonic probe according to 2 or 4.
Is 10 × 10⁶kg / m^TwoLow acoustic impedance less than s
A hollow member made of a conductive material and the inside of the hollow member
2 x 10 to be enclosed in⁶kg / m ^TwoLow acoustic impedance below s
Ultrasonic waves made of fluid material with high impedance and low attenuation
The medium and the inner and outer surfaces of the hollow member or one of its surfaces
Provided 3 to 8 × 10⁶kg / m^TwoLow acoustic level of about s
Since it has a structure that has a member with a pedance,
Diffuse reflection of waves is prevented, lower noise and higher quality ultrasound images
An image can be obtained.

According to the invention of claim 6, claim 1
In the ultrasonic probe described in 2 or 4, the waveguide member is a hollow member made of a material having a low acoustic impedance of 3 to 8 × 10 ⁶ kg / m ² s or less, and the hollow member is enclosed inside the hollow member. Since it has a low acoustic impedance of × 10 ⁶ kg / m ² s or less and an ultrasonic medium made of a fluid material with low attenuation, diffuse reflection of ultrasonic waves is prevented,
It is possible to obtain a high-quality ultrasonic image with lower noise.

According to the invention of claim 7, claim 1,
Since the shape of the waveguide member in the ultrasonic probe described in 2, 4, 5 or 6 is cylindrical and the positioning member is inscribed in the waveguide member, the ultrasonic transducer and the waveguide member are It can be assembled accurately and is suitable for observation at a close range, and it is possible to obtain a high-quality ultrasonic image with less noise.

[0022]

Embodiments of the present invention will be described below.

[Embodiment 1] (Structure) Embodiment 1 of the present invention with reference to FIGS. 1 to 5.
Will be described. 1 and 3 show the same thing. FIG. 1 is a perspective view of the ultrasonic probe tip portion 20, FIG. 2 is a perspective view of the ultrasonic transducer 10, and FIG. 3 is a cross section of the ultrasonic probe 20. FIG. 4 is a diagram for explaining the operation of the ultrasonic probe tip portion 20, and FIG. 5 is a diagram for explaining the operation of the ultrasonic probe tip portion 20.

As shown in FIGS. 2 and 3, the ultrasonic transducer 10 comprises a piezoelectric body 4 of PZT piezoelectric ceramics.
The acoustic matching layer 11 is integrally formed on one surface of the piezoelectric element 1 having the front surface electrode 2 and the back surface electrode 3 formed on both surfaces thereof, and the acoustic lens 2 formed on the acoustic matching layer 11 is integrally formed.
The surface of 5 serves as an acoustic radiation surface 19, and the back load material 7 is integrally formed on the other surface of the piezoelectric element 1. Hereinafter, the front surface electrode 2 side is “front” and the back surface electrode 3 is
The side is called "back".

Around the back load member 7, a cylindrical fitting member 17 made of hard epoxy resin is integrally formed as a positioning member. The front surface electrode 2 and the back surface electrode 3 are electrically connected to lead wires 14 and 15, respectively, and are connected to a pulser and an observation device (not shown) via these lead wires 14 and 15.

The waveguide member 5 constituting the ultrasonic probe tip portion 20 has an acoustic impedance of 46 × 10 ⁶ kg / m 2.
Cylindrical reflective member 13 made of stainless steel for about ² s
And the acoustic impedance formed on its inner surface is 4 ×
The intermediate layer 22 made of epoxy resin having a weight of about 10 ⁶ kg / m ² s, the cylindrical reflecting member 13 and the intermediate layer 2
2 has an acoustic impedance of 1.5 x 1
The ultrasonic wave transmission medium 12 is made of water having a weight of about 0 ⁶ kg / m ² s. The shape of the reflection member 13 is set so that the inner diameter thereof fits with the outer shape of the fitting member 17 with the intermediate layer 22 formed.

Here, a first opening 21 is provided in the end of the reflecting member 13 where the mirror block 18 is fixed, and the shape of the opening 21 is the shape of the mirror block 18. The shape is the same as the slope shape.
A second opening 24 is provided near the ultrasonic transducer 10 of the reflecting member 13.

The reflecting member 13 is made of stainless steel having the outer peripheral portion of the ultrasonic transducer 10 fixed to one end thereof via the intermediate layer 22 and the fitting member 17, and the other end having a sloped surface. The mirror block 18, which is a cylindrical member, is integrally fixed, and constitutes the ultrasonic probe tip portion 20 as a whole.

The ultrasonic transmission medium 12 is filled in the ultrasonic probe tip 20 through the first opening 21 or the second opening 24. The ultrasonic wave transmission medium 12 is configured to completely fill the inner walls of the ultrasonic wave transducer 10, the acoustic radiation surface 19, the mirror block 18, and the intermediate layer 22 with no gap.

(Operation) First, the ultrasonic probe tip portion 20.
The operation of the above configuration when assembling is described.

Ultrasonic transducer 10 and waveguide member 5
And are positioned by the fitting member 17 without inclination.
In forming the waveguide member 5, the ultrasonic transmission medium 1
2 is made to flow in from the 1st opening part 21 or the 2nd opening part 24, and it is considered as the end of filling at the time when the bubble 27 does not come out from the 1st opening part 21 or the 2nd opening part 24.

Next, the operation of the above configuration when the ultrasonic probe tip 20 is in operation will be described. A pulse voltage is applied to the front surface electrode 2 and the back surface electrode 3 from a pulser (not shown) via the lead wires 14 and 15 to vibrate the piezoelectric element 1.

The vibration of the piezoelectric element 1 is transmitted as an ultrasonic pulse. At this time, the surface on which the backside load material 7 is formed suppresses vibration due to the load, so that the transmitted ultrasonic pulse passes through the acoustic matching layer 11 and the acoustic radiation surface 1
9 is transmitted only to the ultrasonic transmission medium 12.

The ultrasonic pulse transmitted in the ultrasonic transmission medium 12 is transmitted in the ultrasonic transmission medium 12. Of this ultrasonic pulse, the energy component 8 emitted from the vicinity of the center of the acoustic radiation surface 19 directly reaches the acoustic reflection surface 6, is reflected here and changes its direction, and the ultrasonic probe tip 20 It is transmitted to the outside.

Further, the component 9 emitted from the peripheral portion of the acoustic radiation surface 19 diffuses outward, but the ultrasonic transmission medium 12 and the intermediate layer provided around the ultrasonic transmission medium 12 in close contact therewith. It is incident on the interface with 22.

At this time, the ultrasonic transmission medium 12 and the intermediate layer 22
Due to the difference in the acoustic impedance between the ultrasonic pulse component 9 and and the shallow incident angle of the ultrasonic pulse component 9 to the inner wall of the intermediate layer 22, most of the incident ultrasonic pulse component 9 is reflected inside the ultrasonic transmission medium 12. Will be transmitted.

The transmitted ultrasonic pulse component 9 is, similarly to the energy component 8 finally transmitted from the center,
It reaches the acoustic reflection surface 6, is reflected, changes its direction, and is emitted to the outside of the ultrasonic probe tip 20.

Further, some of the ultrasonic waves incident on the intermediate layer 22 reach the reflecting member 13 without being reflected. A further part of this ultrasonic wave is reflected at the interface between the intermediate layer 22 and the reflecting member 13, returns to the ultrasonic wave transmission medium 12, and the other part enters the reflecting member 13 and part of the compression wave. As is, or after the other part is converted into surface waves on the reflecting member 13, it is radiated to the outside.

By driving the ultrasonic probe tip portion 20 by a driving mechanism (not shown), the ultrasonic beam consisting of the transmitted ultrasonic pulse train is scanned along an arbitrary path.

Then, the ultrasonic pulse reflected from the object to be observed is also moved along the paths 8 and 9 shown in FIGS.
It is transmitted to the piezoelectric element 1 through the waveguide member 5 and vibrates it. The voltage generated by the vibration of the piezoelectric element 1 is
It is transmitted to the observation device via the lead wires 14 and 15.

Next, the operation of the ultrasonic probe tip portion 20 having the above-mentioned structure when the bubble 27 is generated will be described.
As shown in FIG. 4, when a bubble 27 made of air or water vapor is generated in the ultrasonic transmission medium 12 due to an increase in humidity, a pressure change, or the like, the ultrasonic wave is transmitted to the ultrasonic transmission medium 12. Almost total reflection is performed at the interface with the bubble 27.

The reflected ultrasonic wave 28 maintains the same intensity as when it was transmitted, and the ultrasonic transducer 10
And becomes an extremely strong ultrasonic pulse compared with the ultrasonic pulse from the observation target.

The reflected ultrasonic wave 28 is converted into a bubble 27,
Since it is attenuated between the acoustic radiation surface 19 of the ultrasonic transducer 10, the intermediate layer 22, and the like, but is multiple-reflected, these also become noise superimposed on the ultrasonic image. However, the air bubble 27 can be expelled to the outside from the second opening 24 as shown in FIG. 5 by gently shaking the ultrasonic probe tip 20.

(Effect) According to the first embodiment, the fitting member 17 allows the ultrasonic transducer 10 and the waveguide member 5 to be accurately positioned without tilting, so that the ultrasonic ultrasonic transducer 10 is accurately mirrored. It can be aimed at the acoustically reflecting surface 6 of the block 18.

Further, since the first and second openings 21 and 24 are provided, the ultrasonic transmission medium 12 can be reliably filled and the ultrasonic beam is transmitted to the outside. Since it is a strong reflector, it is possible to remove bubbles such as air and water vapor, which are strong noise sources, and it is possible to perform observation with high reliability.

In addition, the effect of the above-described configuration and operation during the operation of the ultrasonic probe tip portion 20 will be described. The energy of the ultrasonic pulse transmitted from the ultrasonic transducer 10 can be efficiently transmitted to the outside. At the same time, since the energy that has entered the ultrasonic probe tip portion 20 can be efficiently received by the ultrasonic transducer 10, the transmission / reception sensitivity is improved. In addition, the reflecting member 13 and the ultrasonic transmission medium 12 which are strong reflectors.
Since the intermediate layer 22 is provided between the reflection member 13 and
Diffuse reflection of ultrasonic waves inside is suppressed, and ultrasonic noise is reduced.

At the same time, by making the shape of the first opening 21 of the reflecting member 13 the same as that of the inclined surface of the mirror block 18, the mirror block 1 is reflected and diffused in the waveguide.
8. Ultrasonic waves that have spread to the outside can also be transmitted as ultrasonic waves for observation.

Next, the effect of the ultrasonic probe tip portion 20 when the bubble 27 is generated is described. Since the bubble 27 generated and invaded in the waveguide member 5 can be easily removed,
Good observation images can be obtained over a long period of time.

In the first embodiment, the case where PZT is used as the piezoelectric material is illustrated, but P
Piezoelectric ceramics such as T and PLZT and piezoelectric crystals such as LiNbO3 can be used. Further, the acoustic matching layer 11 can be omitted in the field stand using the polymer piezoelectric material or the composite piezoelectric material.

Furthermore, the acoustic lens 16 can be omitted by forming the piezoelectric material on the concave surface so that the piezoelectric element 1 itself has a sound field focusing effect.

Similarly, the material of the ultrasonic transmission medium 12 is not limited to water, and various kinds of ultrasonic waves represented by physiological saline, ultrasonic jelly, ultrasonic gel, liquid paraffin, propylene glycol, etc. It can also be a sound wave transmission medium.

Similarly, regarding the material of the reflecting member 13,
Other metal materials such as titanium, nickel and copper alloys, and ceramic materials such as alumina, machinable ceramics and zirconia can also be used. Also, regarding the shape thereof, in addition to the cylindrical shape as shown, it is also possible to make the cross section a polygon such as an ellipse or a quadrangle, taper it, and change the cross sectional shape. Needless to say, the same effect can be obtained by providing only holes in the block-shaped member.

Also, regarding the material of the intermediate layer 22,
The epoxy resin is not limited to the epoxy resin described in the first embodiment, and one having an acoustic impedance intermediate between the acoustic impedances of the reflection member 13 and the ultrasonic transmission medium 12 can be used. For example, thermosetting resin such as silicone resin, phenol resin, urea resin, polyimide resin, thermoplastic resin such as polyimide, polyamide, PBT, acryl, polyethylene, GFRP, C
Fiber reinforced resin such as FRP can be used.

Similarly, as to its shape, it may be inscribed in the ultrasonic transmission medium 12 and inscribed in the reflecting member 13.
For example, the outer circumference can be formed in a cylindrical shape and the inner circumference can be formed in a rectangular tube shape. The forming method is dipping, electrodeposition coating,
It is possible to adopt a method in which a cylindrical material is inserted, joined, and opened after being embedded by mechanical processing.

Further, the intermediate layer 22 can be formed on the entire inner surface of the reflecting member 13, the joint portion of the reflecting member 13 can be left unformed, or the joint portion of the fitting member 17 can be formed. Similarly, it is possible to make the rear part unformed. Similarly, the angle of the slope is not limited to 45 degrees, and any angle can be set depending on the scanning direction of the ultrasonic beam.

Needless to say, it is also possible to omit the inclined surface and to use only the transmission effect of the waveguide member 5 in a simple manner. Furthermore, the second opening 2
The number and shape of 4 are also the shape and number (1 piece) as described above.
It is needless to say that the opening is not limited to the above, and a circular opening or a plurality of openings can be provided.

As the method of forming the same, various kinds of machining, electric discharge machining, etching, laser machining and the like can be applied.
Further, it is also possible to form a structure having openings in advance by precision die casting, powder metallurgy, metal injection molding, or the like.

[Second Embodiment] (Structure) The second embodiment will be described with reference to FIG. In the description of FIG. 6, the same elements as those in the first embodiment described above are designated by the same reference numerals, and redundant description will be omitted.

In the second embodiment, the waveguide member 5
Is a cylindrical reflecting member 13 made of stainless steel, and intermediate layers 22a, 2 made of epoxy resin formed on the inner and outer surfaces thereof.
2b and the ultrasonic transmission medium 12 filled with water inside thereof. The shape of the reflection member 13 is set so that the inner diameter thereof fits the outer shape of the fitting member 17 with the intermediate layer 22 formed on the inner surface.

(Operation) In the second embodiment, some of the ultrasonic waves incident on the intermediate layer 22a reach the reflecting member 13 without being reflected. A further part of this ultrasonic wave is reflected at the interface between the intermediate layer 22a on the inner surface side and the reflecting member 13 and returns to the ultrasonic wave transmission medium 12, and the other part is incident on the inside of the reflecting member 13 and then on the outer surface side. It is radiated to the outside through the intermediate layer 22b. At this time, the intermediate layer 22b on the outer surface side achieves acoustic matching between the reflecting member 13 and the ultrasonic medium (not shown) around the reflecting member 13, so that the ultrasonic waves incident on the reflecting member 13 are more radiated to the outside. Done efficiently.

(Effects) According to the second embodiment, the following effects are obtained in addition to the effects shown in the first embodiment. That is, the reflecting member 13 is formed by the intermediate layer 22b on the outer surface side.
Since the ultrasonic waves are effectively radiated from the ultrasonic wave to the ultrasonic wave transmission medium (not shown) around it, the ultrasonic waves returning to the reflecting member 13 can be reduced. Thereby, the multiple reflection noise in the waveguide member 5 can be further reduced.

[Third Embodiment] (Structure) The third embodiment will be described with reference to FIG. In the description of FIG. 7, the same elements as those in the second embodiment described above are designated by the same reference numerals, and redundant description will be omitted. In the third embodiment, the waveguide member 5 is composed of the cylindrical semi-transmissive member 23 made of epoxy resin and the ultrasonic transmission medium 12 filled with water inside. The shape of the semi-transmissive member 23 is such that the inner diameter thereof is the fitting member 1
It is set so as to fit with the outer shape of No. 7.

(Operation) According to the third embodiment, most of the ultrasonic pulse component 9 incident on the semi-transmissive member 23 is transmitted through the ultrasonic transmission medium 12 while being reflected.

A part of the super sound incident on the semi-transmissive member 23 is radiated to the outside through the semi-transmissive member 23. At this time, since the difference in acoustic impedance between the semi-transmissive member 23 and the surrounding ultrasonic transmission medium (not shown) is small, the ultrasonic waves incident on the semi-transmissive member 23 are more efficiently radiated to the outside. To be done.

(Effects) According to the third embodiment, the following effects are obtained in addition to the effects described in the first and second embodiments. That is, since the semi-transmissive member 23 effectively radiates ultrasonic waves from the semi-transmissive member 23 to the surrounding ultrasonic transmission medium (not shown), the ultrasonic wave passes through the semi-transmissive member 23. The ultrasonic waves returning to the transmission medium 12 can be reduced. Thereby, the multiple reflection noise in the waveguide member 5 can be further reduced.

[Fourth Embodiment] (Structure) The fourth embodiment will be described with reference to FIG. In the description of FIG. 8, the same elements as those in the first embodiment are designated by the same reference numerals, and duplicated description will be omitted.
Further, for simplification, the configuration of the first embodiment is used for illustration and description, but the fourth embodiment is similarly applicable to the configurations shown in the second and third embodiments.

The feature of the fourth embodiment is that the acoustic reflecting surface 6 formed on the mirror block 18 is formed as a spherical convex surface.

(Operation) According to the fourth embodiment, the ultrasonic beam transmitted by the ultrasonic transmission medium 12 is reflected by the acoustic reflection surface 6 and then transmitted to the outside of the ultrasonic probe tip 20. It At this time, the ultrasonic beam becomes a focused beam focused by the acoustic lens inside the ultrasonic transmission medium 12, and outside the ultrasonic probe head portion 20, the ultrasonic beam slightly diffused by the acoustic reflection surface 6. become.

(Effect) According to the fourth embodiment, there are the following advantages as compared with the structures shown in the first to third embodiments. That is, since the ultrasonic beam is focused not only by using the acoustic lens but also by using the mirror block 18,
With a focus on suppressing multiple reflections during transmission through the acoustic lens, it is possible to set the acoustic field as a short-focus acousto-optic system and form the sound field after transmission by the mirror block 18.

[Fifth Embodiment] (Structure) The fifth embodiment will be described with reference to FIG. In the description of FIG. 9, the same elements as those in the first embodiment are designated by the same reference numerals, and duplicate description will be omitted.

In the fifth embodiment, the reflecting member 13
At a position posterior to the ultrasonic transducer 10 in
A third opening 31 is provided.

(Operation) According to the fifth embodiment, the ultrasonic transducer 10 and the reflecting member 13 on which the intermediate layer 22 is formed are joined together and positioned, and then the third opening is formed. The adhesive 26 is supplied from 31,
This is hardened and the fitting member 17 on the ultrasonic transducer 10 and the reflecting member 13 are joined together.

(Effects) According to the fifth embodiment, the following effects are obtained in addition to the effects described in the first to third embodiments. That is, the supply of the adhesive 26 is accurate,
Moreover, since it can be reliably performed, the respective constituent members can be reliably joined, and the reliability of the entire structure can be improved. At the same time, the adhesive 26 is placed in the waveguide member 5.
Since it is possible to surely prevent such a situation as overflowing, the sound field in the waveguide is not disturbed.

In the fifth embodiment, the adhesive 26 is used as the method of joining the fitting member 17 and the reflecting member 13, but the method is not limited to this. If the reflecting member 13 is made of the same material such as stainless steel, and the intermediate layer 22 is not formed at the joining portion, the joining method by laser welding, resistance welding, or the like using the third opening 31. It is also possible to adopt.

[Sixth Embodiment] (Structure) Next, a sixth embodiment will be described with reference to FIGS. FIG. 10 is a perspective view of the ultrasonic transducer 10. 11 to 13 are sectional views showing the assembling process of the sixth embodiment. In the description of FIGS. 10 to 13, the same elements as those in the first embodiment described above are designated by the same reference numerals, and redundant description will be omitted. Further, for simplification, the configuration and the description of the above-described first embodiment are used for simplification, but the configurations described in the second to fifth embodiments are similarly applicable.

In the sixth embodiment, as shown in FIG. 10, no acoustic lens is formed on the ultrasonic transducer 10, and the reflecting member 13 has a cylindrical shape for simplification. In addition to this, a liquid acoustic lens resin 30 is used. The acoustic lens resin 30 is an epoxy resin.

Further, in the sixth embodiment, the lens forming die 29 is used. The lens forming die 29 has a cylindrical shape, and its outer diameter is formed so as to be slidably inscribed on the reflection member 13 on which the intermediate layer 22 is formed.
Further, a convex surface 29a for transferring the lens shape is formed on the end surface of the lens forming die 29. This convex surface 29
"a" is treated with a female mold member or the like so that the lens resin 30 is not adhered.

[Operation] According to the sixth embodiment, FIG.
As shown in, first, the ultrasonic transducer 10 and the reflecting member 13 on which the intermediate layer 22 is formed are assembled.

Next, the lens resin 30 is supplied onto the acoustic matching layer 11 of the ultrasonic transducer 10. The amount of the lens resin 30 supplied is the same as the volume of the acoustic lens. Next, as shown in FIG. 12, the lens forming mold 2
9 is inserted as a guide on the inner surface of the reflecting member 13 on which the intermediate layer 22 is formed, and the lens forming die 29 and the acoustic matching layer 11 are inserted.
When the lens shape is formed between and, it is stopped.

In this state, the lens resin 30 is heated and cured. After the lens resin 30 is cured, FIG.
As shown in FIG. 5, the lens forming mold 29 is removed to the outside of the reflecting member 13, so that the acoustic lens 25 having a uniconcave surface shape is formed on the acoustic matching layer 11.

According to the sixth embodiment, in addition to the effects described in the first embodiment, the following effects can be obtained.
That is, since the lens forming die 29 is accurately guided with respect to the reflecting member 13 forming the waveguide member 5, the acoustic lens 25 having the geometric axis aligned with the waveguide member 5 can be formed. Thereby, the ultrasonic beam can be directed to the reflecting member 13 via the center of the waveguide member 5, so that the irregular reflection of the ultrasonic waves in the waveguide member 5 can be minimized. As a result, it is possible to obtain a clear observation image with less noise.

[0082]

According to the present invention described above, it is possible to provide an ultrasonic probe suitable for observing a close range and capable of obtaining an ultrasonic image with lower noise, and a manufacturing method thereof.

That is, according to the first aspect of the invention, it is possible to provide an ultrasonic probe in which the ultrasonic transducer and the waveguide member can be assembled precisely.

According to the second aspect of the invention, it is possible to provide an ultrasonic probe which is particularly suitable for observing a close range and which can obtain a high-quality ultrasonic image with less noise.

According to the third aspect of the invention, in particular, it is possible to provide an ultrasonic probe manufacturing method capable of forming an acoustic lens with high accuracy and achieving the effect of the second aspect.

According to the fourth aspect of the present invention, in particular, an ultrasonic probe is provided which can easily remove bubbles that cause strong reflection noise and can obtain a high-quality ultrasonic image with lower noise. can do.

According to the fifth aspect of the invention, in particular, diffuse reflection is prevented, and the ultrasonic wave transmitted from the ultrasonic transducer is effectively transmitted, so that a high-quality ultrasonic image with low noise is obtained. An ultrasonic probe capable of providing the ultrasonic probe can be provided.

According to the invention of claim 6, in particular, the ultrasonic wave transmitted from the ultrasonic transducer is effectively transmitted, and like the invention of claim 5, a low-noise and high-quality ultrasonic image is obtained. An ultrasonic probe capable of providing the ultrasonic probe can be provided.

According to the invention described in claim 7, it is possible to provide an ultrasonic probe which is particularly suitable for observation at a close range and which can obtain a high-quality ultrasonic image with less noise.

[Brief description of drawings]

FIG. 1 is a perspective view showing an ultrasonic probe tip portion according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing an ultrasonic transducer according to the first embodiment of the present invention.

FIG. 3 is a cross-sectional view showing an ultrasonic probe tip portion according to the first embodiment of the present invention.

FIG. 4 is an operation explanatory view of the ultrasonic probe according to the first embodiment of the present invention.

FIG. 5 is an operation explanatory view of the ultrasonic probe according to the first embodiment of the present invention.

FIG. 6 is a cross-sectional view showing an ultrasonic probe tip portion according to a second embodiment of the present invention.

FIG. 7 is a sectional view showing an ultrasonic probe tip portion according to a third embodiment of the present invention.

FIG. 8 is a sectional view of a part of an ultrasonic transducer according to a fourth embodiment of the present invention.

FIG. 9 is a sectional view showing an ultrasonic probe tip portion according to a fifth embodiment of the present invention.

FIG. 10 is a perspective view showing an ultrasonic transducer according to a sixth embodiment of the present invention.

FIG. 11 is a cross-sectional view showing a process of forming an acoustic lens according to a sixth embodiment of the present invention.

FIG. 12 is a cross-sectional view showing a process of forming an acoustic lens according to a sixth embodiment of the present invention.

FIG. 13 is a cross-sectional view showing the process of forming the acoustic lens of the sixth embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Piezoelectric element 2 Front surface electrode 3 Back surface electrode 4 Piezoelectric body 5 Waveguide member 6 Acoustic reflection surface 7 Back load material 8 Ultrasonic beam path 9 Ultrasonic beam path 10 Ultrasonic transducer 11 Acoustic matching layer 12 Ultrasonic transmission medium 13 Reflective member 14 Lead wire on front surface electrode side 15 Reed wire on rear surface electrode side 16 Acoustic lens 17 Fitting member 18 Mirror block 19 Acoustic emission surface 20 Ultrasonic probe tip 21 First opening 22 Intermediate layer 23 Semi-transparent member 24 Second opening 25 Acoustic lens 26 Adhesive 27 Air bubble 28 Ultrasonic beam path 29 Lens forming type 30 Lens resin 31 Third opening

Claims (7)

[Claims] 1. An ultrasonic transducer having a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element, and the ultrasonic transducer. An ultrasonic probe including a waveguide member formed on a transducer as a basic constituent element, wherein a positioning member that fits with the waveguide member is formed on the ultrasonic transducer. 2. An ultrasonic transducer having a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element, and the ultrasonic transducer. An ultrasonic probe having a waveguide member formed on a transducer as a basic constituent element, wherein an acoustic lens is integrally formed with the ultrasonic transducer. 3. An ultrasonic transducer having a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element, and the ultrasonic transducer. A manufacturing method for manufacturing an ultrasonic probe including a waveguide member formed on a transducer as a basic component, wherein the waveguide member is a hollow cylindrical member, and the inside surface of the waveguide member is of an acoustic lens forming type. A method of manufacturing an ultrasonic probe, characterized in that an acoustic lens is integrally formed on the ultrasonic transducer by moving an acoustic lens forming die as a guide along the inner surface of the waveguide member. 4. An ultrasonic transducer having a piezoelectric element, an acoustic matching layer formed on one surface of the piezoelectric element, and a back load material formed on the other surface of the piezoelectric element, and the ultrasonic transducer. An ultrasonic probe having a waveguide member formed on a transducer as a basic constituent element, wherein an opening is provided in a portion of the waveguide member that is in the vicinity of a side surface of the ultrasonic transducer, . 5. The waveguide member is 10 × 10 ⁶ kg / m 2.
^A hollow member made of a material having a low acoustic impedance of ² s or less, and 2 × 10 ⁶ kg enclosed inside the hollow member
/ M ² s or less, an ultrasonic medium having a low acoustic impedance and a low attenuation and made of a fluid material, and 3 to 8 × 10 ⁶ k provided on both inner and outer surfaces of the hollow member or one surface thereof.
A member having a low acoustic impedance of about g / m ² s, The ultrasonic probe according to claim 1, 2, or 4. 6. The waveguide member comprises 3 to 8 × 10 ⁶ kg.
/ M ² s Hollow member made of a material with low acoustic impedance of not more than ² s, and 2 × 10 ⁶ enclosed inside the hollow member
The ultrasonic probe according to claim 1, 2 or 4, wherein the ultrasonic probe has a low acoustic impedance of kg / m ² s or less and an ultrasonic medium made of a low attenuation fluid material. 7. The waveguide member has a tubular shape, and the positioning member has a shape inscribed in the waveguide member. Ultrasonic probe.