JPH0935682A - Quadrupole mass spectrometer - Google Patents
Quadrupole mass spectrometerInfo
- Publication number
- JPH0935682A JPH0935682A JP7201673A JP20167395A JPH0935682A JP H0935682 A JPH0935682 A JP H0935682A JP 7201673 A JP7201673 A JP 7201673A JP 20167395 A JP20167395 A JP 20167395A JP H0935682 A JPH0935682 A JP H0935682A
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- Prior art keywords
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- groove
- electrode holder
- mass spectrometer
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- 238000003780 insertion Methods 0.000 abstract description 7
- 230000037431 insertion Effects 0.000 abstract description 7
- 238000003754 machining Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 11
- 230000000149 penetrating effect Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000011949 advanced processing technology Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は四重極型質量分析計に関
するものであり、更に詳しくはイオンを質量分析する場
合に使用される四重極電極型の質量分析計に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quadrupole mass spectrometer, and more particularly to a quadrupole electrode mass spectrometer used in mass spectrometry of ions.
【０００２】[0002]
【従来の技術及びその問題点】真空中に発生、導入、ま
たは残留する気体を高い精度で分析する場合に四重極型
質量分析計が使用される。図７は四重極型質量分析計の
概略図であり、イオン源部１と、四重極電極部２と、検
出部６とからなっている。2. Description of the Related Art A quadrupole mass spectrometer is used for highly accurately analyzing a gas generated, introduced or left in a vacuum. FIG. 7 is a schematic diagram of a quadrupole mass spectrometer, which includes an ion source unit 1, a quadrupole electrode unit 2, and a detection unit 6.
【０００３】分析されるべき気体Ｇがイオン源部１にお
いてイオン化され、加速電極によって加速され、引出し
電極によって四重極電極部２の方へ引き出される。四重
極電極部２は互いに平行に配置された４本の円柱状電極
（以降、電極柱と略）３が絶縁性の一対の電極ホールダ
４に固定されており、対向する電極柱３を結線して一方
には＋（Ｕ＋Ｖｃｏｓωｔ）、他方には−（Ｕ＋Ｖｃｏ
ｓωｔ）で示される直流電圧Ｕと高周波電圧Ｖｃｏｓω
ｔとを重畳させたものが印加される。この電圧印加によ
り四重極電極部２の内部空間に電場が形成されるが、イ
オン源部１で生成したイオンは、このイオン源部１が内
蔵する引出し電極の電圧で四重極電極部２の中心軸（ｚ
軸とする）に沿って入射されｚ軸方向へ進む間に、四重
極電極部２内の電場によってｘ軸方向およびｙ軸方向へ
の力を受ける。The gas G to be analyzed is ionized in the ion source part 1, accelerated by the accelerating electrode, and extracted toward the quadrupole electrode part 2 by the extraction electrode. In the quadrupole electrode part 4, four columnar electrodes (hereinafter, referred to as electrode columns) 3 arranged in parallel to each other are fixed to a pair of insulative electrode holders 4, and the opposing electrode columns 3 are connected to each other. Then, one has + (U + Vcosωt) and the other has − (U + Vcot
sωt) DC voltage U and high frequency voltage Vcosω
A superposition of t and t is applied. An electric field is formed in the internal space of the quadrupole electrode part 2 by this voltage application, but the ions generated in the ion source part 1 are quadrupole electrode part 2 at the voltage of the extraction electrode built in this ion source part 1. Central axis of (z
(Hereinafter referred to as the axis) and travels in the z-axis direction, a force is applied in the x-axis direction and the y-axis direction by the electric field in the quadrupole electrode part 2.
【０００４】直流電圧Ｕ、高周波電圧Ｖｃｏｓωｔ、四
重電極間距離２ｒ0 （ｒ0 は四重極電極部２の中心軸か
ら電極柱３までの距離）の条件のもとで、ある特定のｍ
／ｅ（質量電荷比）を有するイオンのみがｘ軸方向、ｙ
軸方向ともに限定された振幅の軌道５を辿って四重極電
極部２を通過できる。それ以外のｍ／ｅを有するイオン
は振幅が増大して電極柱３に捕らえられるか、電極柱３
の間を通り抜けて脱出するかの何れかとなり、検出部６
には到達できない。四重極電極部２を通過したイオンは
検出部６における二次電子増倍管などで検出され、その
イオン電流に比例した信号に変換されてオシロスコー
プ、ペン記録計などで記録されて質量スペクトルが得ら
れる。Under a condition of a DC voltage U, a high frequency voltage Vcosωt, and a quadrupole electrode distance 2r 0 (r 0 is a distance from the central axis of the quadrupole electrode portion 2 to the electrode column 3), a specific m
Only ions having / e (mass to charge ratio) are in the x-axis direction, y
It can pass through the quadrupole electrode portion 2 by following a trajectory 5 having a limited amplitude in both the axial direction. Ions having other m / e have an increased amplitude and are captured by the electrode column 3 or
Either of passing through the space and escaping, the detection unit 6
Cannot be reached. Ions that have passed through the quadrupole electrode section 2 are detected by a secondary electron multiplier or the like in the detection section 6, converted into a signal proportional to the ion current and recorded by an oscilloscope, a pen recorder, etc., and a mass spectrum is obtained. can get.
【０００５】そして、この四重極型質量分析計の分析性
能は四重極電極部２における電極柱３の加工精度、組立
精度によって大きく影響されるのである。すなわち、加
工精度は２〜３ミクロン、組立精度は数ミクロンである
ことが要求され、組立精度が１０ミクロンを超えると、
その四重極型質量分析計は分析性能が著しく低下して使
用に堪えないものとなる。従って組み立てに際し次の事
項が必須となる。 ４本の電極柱３は両端部において電極ホールダ４に固
定されるが、２個の電極ホールダ４を含む両電極ホール
ダ間の軸（以降、電極ホールダ軸と略）と電極柱３の中
心との間の距離が精度よく組み立てられていること。 四重極電極部２の断面で見て、各電極柱３が、電極ホ
ールダ軸を中心点とし、それぞれ正確に角度間隔９０度
で配置して組み立てられていること。 ４本の電極柱３は電極ホールダ軸の回りに捩じれて固
定されていないこと。The analytical performance of this quadrupole mass spectrometer is greatly affected by the processing accuracy and assembly accuracy of the electrode column 3 in the quadrupole electrode section 2. That is, the processing accuracy is required to be 2-3 microns, and the assembly accuracy is required to be several microns. When the assembly accuracy exceeds 10 microns,
The quadrupole mass spectrometer has unsatisfactory analytical performance and becomes unusable. Therefore, the following items are essential for assembly. The four electrode pillars 3 are fixed to the electrode holders 4 at both ends, but the axis between both electrode holders including the two electrode holders 4 (hereinafter referred to as the electrode holder axis) and the center of the electrode pillars 3 are The distance between them is assembled accurately. As seen in the cross section of the quadrupole electrode part 2, each electrode column 3 is assembled by accurately arranging the electrode columns with the electrode holder axis as a center point and at an angular interval of 90 degrees. The four electrode pillars 3 should not be twisted and fixed around the electrode holder axis.
【０００６】このような必要事項を満たすものとして以
下に示すような従来例がある。The following conventional examples satisfy the above requirements.
【０００７】（第１従来例）図８は第１従来例の四重極
電極部５２の側面図であり、図９は図８における［９］
−［９］線方向の部分破断正面図である。金属製の電極
柱５３は直径および長さ方向には高い精度で加工されて
おり、絶縁性の電極ホールダ５４が４本の電極柱５３を
その両端部で固定している。電極ホールダ５４は円環状
とされ、その内円周面には底面形状を電極柱５３の半径
と等しいか、それより極く僅かに大きい半径の円弧とし
た溝５５が電極ホールダ軸Ｏに平行に形成され、この溝
５５内に電極柱５３の一部が嵌め込まれている。そし
て、各電極柱５３は電極ホールダ５４を貫通する挿通孔
５６を経由して電極柱５３のねじ孔５７に螺合するねじ
５８によって電極ホールダ５４に固定されている。(First Conventional Example) FIG. 8 is a side view of the quadrupole electrode portion 52 of the first conventional example, and FIG. 9 is a [9] in FIG.
It is a partially broken front view of the [9] line direction. The metal electrode columns 53 are processed with high accuracy in the diameter and length directions, and the insulating electrode holders 54 fix the four electrode columns 53 at both ends thereof. The electrode holder 54 has an annular shape, and on its inner circumferential surface, a groove 55 having a bottom shape equal to or slightly larger than the radius of the electrode column 53 is formed parallel to the electrode holder axis O. A part of the electrode column 53 is formed in this groove 55. Each electrode pillar 53 is fixed to the electrode holder 54 by a screw 58 that is screwed into a screw hole 57 of the electrode pillar 53 via an insertion hole 56 penetrating the electrode holder 54.
【０００８】第１従来例においては、電極柱５３を嵌め
込む関係上、溝５５の底面の半径は電極柱５３の半径よ
り僅かでも大にせざるを得ないが、そのために電極柱５
３と溝５５との間に隙間を生じ、隣り合う電極柱５３を
電極ホールダ軸Ｏの回りに角度間隔９０度に精度高く組
み立てることが困難となり、また、４本の電極柱５３が
電極ホールダ軸Ｏの回りに捩じれて固定され易い。更に
は、電極ホールダ軸Ｏと各電極柱５３との間の距離を正
確に出すには溝５５の深さを高精度に一定化する高度な
加工技術が必要であり、製造コストを高くする。In the first conventional example, the radius of the bottom surface of the groove 55 must be made slightly larger than the radius of the electrode column 53 because of the fitting of the electrode column 53.
3 creates a gap between the groove 55 and the groove 55, it becomes difficult to assemble the adjacent electrode columns 53 around the electrode holder axis O with an angular interval of 90 degrees with high accuracy, and the four electrode columns 53 form the electrode holder axes. It is easy to twist and fix around O. Further, in order to accurately obtain the distance between the electrode holder axis O and each electrode column 53, a sophisticated processing technique for making the depth of the groove 55 constant with high precision is required, which increases the manufacturing cost.
【０００９】（第２従来例）特開昭６０−２５７０５５
号公報に係る「質量分析計」においては、図９に対応す
る部分破断正面図である図１０に示すような組み立てが
開示されている。電極ホールダ６４には中央部に正方形
状の切り抜きが形成され、４本の電極柱６３は直角とな
っている正方形状の四隅に位置決めして固定されてい
る。各電極柱６３は電極ホールダ６４を貫通する挿通孔
６６を経由して電極柱６３のねじ孔６７に螺合するねじ
６８によって電極ホールダ６４に固定されている。(Second Conventional Example) Japanese Patent Laid-Open No. 60-257055
In the "mass spectrometer" according to the publication, an assembly as shown in FIG. 10, which is a partially cutaway front view corresponding to FIG. 9, is disclosed. A square cutout is formed in the center of the electrode holder 64, and the four electrode columns 63 are positioned and fixed at the four corners of the square shape that are at right angles. Each electrode pillar 63 is fixed to the electrode holder 64 by a screw 68 screwed into a screw hole 67 of the electrode pillar 63 via an insertion hole 66 penetrating the electrode holder 64.
【００１０】第２従来例においては、４本の電極柱６３
は直角である四隅で固定されるので、電極ホールダ軸Ｏ
の回りの捩じれは起こりにくい。しかし、電極ホールダ
軸Ｏと各電極柱６３の中心軸との間の距離、および各電
極柱６３の電極ホールダ軸Ｏを中心点としての角度間隔
９０度での配置を高い精度で組み立てるためには、上述
の切り抜きが正確な正方形に形成されていなければなら
ず、そのためには高度な加工技術を必要とする。In the second conventional example, four electrode columns 63 are provided.
Is fixed at the four corners at right angles, so the electrode holder axis O
Twist around is unlikely to occur. However, in order to assemble the distance between the electrode holder axis O and the center axis of each electrode column 63 and the arrangement of each electrode column 63 at an angular interval of 90 degrees with the electrode holder axis O as the center point with high accuracy, The above-mentioned cutout must be formed in a precise square, which requires advanced processing technology.
【００１１】（第３従来例）図１１は図９に対応する第
３従来例の部分破断正面図であり、４本の電極柱７３は
円環状の電極ホールダ７４の内円周面に接し、それぞれ
の間に絶縁性のスペーサ７９を介在させて配置されてい
る。そして各電極柱７３は電極ホールダ７４を貫通する
挿通孔７６を経由して電極柱７３のねじ孔７７に螺合す
るねじ７８によって電極ホールダ７４に固定されてい
る。(Third Conventional Example) FIG. 11 is a partially cutaway front view of a third conventional example corresponding to FIG. 9, in which four electrode columns 73 are in contact with the inner circumferential surface of an annular electrode holder 74, An insulating spacer 79 is interposed between each of them. Each electrode pillar 73 is fixed to the electrode holder 74 by a screw 78 that is screwed into a screw hole 77 of the electrode pillar 73 via an insertion hole 76 penetrating the electrode holder 74.
【００１２】第３従来例において、電極ホールダ７４の
内周径を正確に出すことは加工上さほど困難ではないの
で、電極ホールダ軸Ｏと各電極柱７３との間の距離は精
度高く組み立て得る。しかし、スペーサ７９の半径が高
い精度で加工されていないと電極柱７３との間に隙間を
生じて、各電極柱７３は正確な角度間隔９０度での配置
が困難となり、かつ電極ホールダ軸Ｏの回りに捩じれて
固定され易い。すなわち、高精度に加工された４本のス
ペーサ７９を必要とするのでコスト的に不利であり、ま
た、スペーサ７９が外れないようにする工夫も必要であ
る。In the third conventional example, since it is not so difficult to accurately form the inner peripheral diameter of the electrode holder 74, the distance between the electrode holder axis O and each electrode column 73 can be assembled with high accuracy. However, if the radius of the spacer 79 is not processed with high accuracy, a gap is created between the spacers 79 and the electrode columns 73, and it becomes difficult to arrange each electrode column 73 at an accurate angular interval of 90 degrees, and the electrode holder axis O It is easy to fix by twisting around. That is, since four spacers 79 processed with high accuracy are required, it is disadvantageous in terms of cost, and it is also necessary to devise a method for preventing the spacers 79 from coming off.
【００１３】[0013]
【発明が解決しようとする問題点】本発明は上述の問題
に鑑みてなされ、高度な加工技術を必要とせずに電極柱
が高い組立精度で組み立てられ、高い分析性能を示す四
重極型質量分析計を提供することを目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and a quadrupole mass that shows high analytical performance by assembling electrode columns with high assembly accuracy without requiring advanced processing technology. The purpose is to provide an analyzer.
【００１４】[0014]
【問題点を解決するための手段】以上の目的は、絶縁性
で環状の電極ホールダの環内を挿通する４本の電極柱が
前記電極ホールダの内円周面に固定して組み立てられる
四重極質量分析計において、前記内円周面に前記電極柱
の直径より狭い幅の４本の溝が角度９０度間隔で、かつ
前記電極ホールダの軸心に平行に設けられており、前記
電極柱が前記電極ホールダの軸心に平行な向きで前記溝
に載置され、該溝の両側のエッジで位置決めされ固定さ
れていることを特徴とする四重極型質量分析計、によっ
て達成される。[Means for Solving the Problems] The above object is a quadruple assembly in which four electrode pillars inserted through the ring of an insulating and annular electrode holder are fixed to the inner circumferential surface of the electrode holder. In the polar mass spectrometer, four grooves having a width narrower than the diameter of the electrode column are provided on the inner circumferential surface at intervals of 90 degrees and parallel to the axis of the electrode holder. Is placed in the groove in a direction parallel to the axis of the electrode holder, and the quadrupole mass spectrometer is characterized in that it is positioned and fixed at both edges of the groove.
【００１５】[0015]
【作用】本発明の四重極型質量分析計は環状の電極ホー
ルダの内円周面に形成させた電極柱の直径より狭い幅の
溝に電極柱を載置し、溝の両側のエッジで電極柱を位置
決めし固定させているので、電極柱の組立精度が高く、
質量分析計として高い分析性能を示す。このような溝の
加工は簡単である。In the quadrupole mass spectrometer of the present invention, the electrode column is placed in a groove having a width narrower than the diameter of the electrode column formed on the inner circumferential surface of the ring-shaped electrode holder, and the edges are formed on both sides of the groove. Since the electrode columns are positioned and fixed, the electrode column assembly accuracy is high,
It shows high analytical performance as a mass spectrometer. Processing of such a groove is easy.
【００１６】[0016]
【実施例】以下、本発明の実施例による四重極型質量分
析計について、図面を参照して説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS A quadrupole mass spectrometer according to embodiments of the present invention will be described below with reference to the drawings.
【００１７】（第１実施例）図１は四重極型質量分析計
の第１実施例による四重極電極部１２の側面図であり、
図２は図１における［２］−［２］線方向の部分破断正
面図である。４本の電極柱１３が両端部において絶縁性
で円環状の電極ホールダ１４の内円周面に固定されてい
る。すなわち、電極ホールダ１４の内円周面に電極ホー
ルダ軸Ｏを中心点として角度間隔９０度に配置して断面
が半円形状の溝１５が電極ホールダ軸Ｏに平行に設けら
れている。そして、この溝１５の幅は電極柱１３の直径
の１／３とされている。(First Embodiment) FIG. 1 is a side view of a quadrupole electrode section 12 according to a first embodiment of a quadrupole mass spectrometer.
FIG. 2 is a partially cutaway front view taken along line [2]-[2] in FIG. Four electrode columns 13 are fixed to the inner circumferential surface of an insulating and annular electrode holder 14 at both ends. That is, on the inner circumferential surface of the electrode holder 14, grooves 15 having a semicircular cross section are arranged parallel to the electrode holder axis O, with the electrode holder axis O being the center point and arranged at angular intervals of 90 degrees. The width of the groove 15 is ⅓ of the diameter of the electrode column 13.
【００１８】各電極柱１３はそれぞれの溝１５に平行に
載置され、溝１５の両側のエッジで位置決めされて、ね
じ１８で電極ホールダ１４に固定されている。すなわ
ち、電極ホールダ１４を貫通する挿通孔１６を経由し電
極柱１３のねじ孔１７に螺合するねじ１８で緊締されて
いる。Each electrode column 13 is placed in parallel with each groove 15, positioned at the edges on both sides of the groove 15, and fixed to the electrode holder 14 with a screw 18. That is, it is tightened with the screw 18 which is screwed into the screw hole 17 of the electrode column 13 via the insertion hole 16 penetrating the electrode holder 14.
【００１９】上述の構成において、高い組立精度を得る
には、 ａ．電極ホールダ１４の内円周径は高い加工精度で形成
されていなければならないが、円形の加工であるため、
このことは高度の加工技術を要することなく可能であ
る。 ｂ．断面が半円形状の溝１５は電極ホールダ１４の内円
周面に角度間隔９０度で正確に配置して加工されていな
ければならないが、このことも高度な加工技術を要する
ことなく可能である。In order to obtain high assembly accuracy in the above-mentioned structure, a. The inner circumferential diameter of the electrode holder 14 must be formed with high processing accuracy, but since it is circular processing,
This is possible without the need for sophisticated processing techniques. b. The groove 15 having a semicircular cross section must be processed by accurately arranging it on the inner circumferential surface of the electrode holder 14 at an angular interval of 90 degrees, but this is also possible without requiring advanced processing technology. .
【００２０】なお、溝１５の幅は電極柱１３の直径より
小であることを必要とするが、その条件下においても溝
１５の幅が大であると（例えば電極柱１３の直径の１／
２より大）、電極柱１３は溝１５の両側のエッジによっ
て安定に位置決めされるものの、溝１５の加工精度にバ
ラツキがあって、幅が広くなるバラツキの場合に電極柱
１３の溝１５への落ち込みが大となり、電極ホールダ軸
Ｏと電極柱１３との間の距離が大となるので、高い組立
精度を維持し難くなる。また、溝１５の幅を小とすると
（例えば電極柱１３の直径の１／１０より小）、幅が広
くなる加工精度のバラツキの場合において、電極柱１３
の溝１５への落ち込みは小さく組立精度は低下しにくい
が、溝１５の両側のエッジによる位置決めが甘くなり易
い。従って、溝１５の好ましい幅は電極柱１３の直径の
１／２ないし１／１０の範囲にある。溝１５の幅を第１
実施例における電極柱の直径の１／３、またはその近辺
の値とした場合は、溝１５の加工精度に多少のバラツキ
があっても、電極ホールダ軸Ｏと電極柱１３との間の距
離に表われる組立精度にさほどの悪影響を及ぼさない。Although the width of the groove 15 needs to be smaller than the diameter of the electrode column 13, if the width of the groove 15 is large even under such a condition (for example, 1 / the diameter of the electrode column 13).
2), the electrode pillars 13 are stably positioned by the edges on both sides of the groove 15, but when the machining accuracy of the groove 15 varies, the width of the electrode pillar 13 is widened. Since the depression becomes large and the distance between the electrode holder axis O and the electrode column 13 becomes large, it becomes difficult to maintain high assembly accuracy. Further, when the width of the groove 15 is made small (for example, smaller than 1/10 of the diameter of the electrode column 13), the width of the electrode column 13 becomes wider in the case of variation in the processing accuracy.
Although the depression of the groove into the groove 15 is small and the assembling accuracy does not easily deteriorate, the positioning by the edges on both sides of the groove 15 tends to be unsatisfactory. Therefore, the preferable width of the groove 15 is in the range of 1/2 to 1/10 of the diameter of the electrode column 13. First width of groove 15
When the diameter of the electrode column in the embodiment is set to ⅓ or a value in the vicinity thereof, the distance between the electrode holder axis O and the electrode column 13 is set even if there is some variation in the machining accuracy of the groove 15. It does not have a bad influence on the assembly accuracy that appears.
【００２１】すなわち、第１実施例の四重極電極部１２
は、高度な加工技術を必要とせずに、電極柱１３が高い
組立精度で組み立てられ、これを組み込んだ四重極型質
量分析計は高い分析性能を示す。That is, the quadrupole electrode portion 12 of the first embodiment.
The electrode column 13 is assembled with high assembly accuracy without the need for advanced processing technology, and a quadrupole mass spectrometer incorporating the electrode column 13 exhibits high analysis performance.
【００２２】第１実施例においては断面が半円形状の溝
１５の両側のエッジで電極柱１３を位置決めしたが、位
置決めのためには断面を半円形以外の形状としてもよ
い。また、そのような位置決めによって第１実施例の場
合と同様に、組立精度の高い四重極電極部となり、高い
分析性能の四重極型質量分析計が得られる。In the first embodiment, the electrode columns 13 are positioned by the edges on both sides of the groove 15 having a semicircular cross section, but the cross section may have a shape other than a semicircle for positioning. Further, by such positioning, as in the case of the first embodiment, a quadrupole electrode section with high assembly accuracy is obtained, and a quadrupole mass spectrometer with high analytical performance can be obtained.
【００２３】（第２実施例）図３は図２に対応する第２
実施例の場合の部分破断正面図であり、円環状の電極ホ
ールダ２４の内円周面に４本の電極柱２３が固定されて
いる。そして、電極柱２３は断面が方形状の溝２５に載
置され、溝２５の両側のエッジによって位置決めされて
いる。方形状の溝２５の幅は、第１実施例の場合と同
様、電極柱２３の直径より小であることを必要とする
が、好ましい幅は電極柱２３の直径の１／２ないし１／
１０の範囲にある。溝２５の深さは電極柱２３の組立精
度に関係しないので、溝２５の底面に電極柱２３が接触
しない限りにおいて任意の深さとし得る。各電極柱２３
が電極ホールダ２４を貫通する挿通孔２６を経由し電極
柱２３のねじ孔２７に螺合するねじ２８によって固定さ
れることは第１実施例の場合と同様である。(Second Embodiment) FIG. 3 shows a second embodiment corresponding to FIG.
It is a partially broken front view in the case of an embodiment, and four electrode columns 23 are fixed to the inner circumferential surface of an annular electrode holder 24. The electrode column 23 is placed in the groove 25 having a rectangular cross section, and is positioned by the edges on both sides of the groove 25. The width of the rectangular groove 25 needs to be smaller than the diameter of the electrode column 23 as in the case of the first embodiment, but a preferable width is 1/2 to 1/1 / the diameter of the electrode column 23.
It is in the range of 10. Since the depth of the groove 25 is not related to the assembly accuracy of the electrode column 23, the depth can be set to any depth as long as the electrode column 23 does not contact the bottom surface of the groove 25. Each electrode column 23
Is fixed by the screw 28 which is screwed into the screw hole 27 of the electrode column 23 through the insertion hole 26 penetrating the electrode holder 24, as in the case of the first embodiment.
【００２４】（第３実施例）図４は図２に対応する第３
実施例の場合の部分破断正面図であり、電極柱３３は断
面がＵ字形状の溝３５に載置され、溝３５の両側のエッ
ジによって位置決めされて、第１実施例のねじ１８と同
様なねじ３８で電極ホールダ３４に固定されている。(Third Embodiment) FIG. 4 shows a third embodiment corresponding to FIG.
FIG. 6 is a partially cutaway front view in the case of the embodiment, in which an electrode column 33 is placed in a groove 35 having a U-shaped cross section and positioned by edges on both sides of the groove 35, similar to the screw 18 of the first embodiment. It is fixed to the electrode holder 34 with a screw 38.
【００２５】（第４実施例）図５は図２に対応する第４
実施例の場合の部分破断正面図であり、電極柱４３は断
面がＶ字形状の溝４５に載置され、溝４５の両側のエッ
ジによって位置決めされて、第１実施例のねじ１８と同
様なねじ４８で電極ホールダ４４に固定されている。(Fourth Embodiment) FIG. 5 shows a fourth embodiment corresponding to FIG.
FIG. 6 is a partially cutaway front view in the case of the embodiment, in which the electrode column 43 is placed in a groove 45 having a V-shaped cross section and positioned by edges on both sides of the groove 45, similar to the screw 18 of the first embodiment. It is fixed to the electrode holder 44 with a screw 48.
【００２６】第３実施例においても、溝３５の幅は電極
柱３３の直径より小であることを必要とし、好ましい幅
は電極柱３３の直径の１／２ないし１／１０の範囲にあ
る。また、溝３５の深さは電極柱３３が溝３５の底面に
接触しない限りにおいて任意の深さとし得る。そして、
これらのことは第４実施例においても同様である。Also in the third embodiment, the width of the groove 35 needs to be smaller than the diameter of the electrode column 33, and the preferable width is in the range of 1/2 to 1/10 of the diameter of the electrode column 33. Further, the depth of the groove 35 may be any depth as long as the electrode column 33 does not contact the bottom surface of the groove 35. And
The same applies to the fourth embodiment.
【００２７】以上、本発明の各実施例について説明した
が、勿論、本発明はこれらに限られることなく、本発明
の技術的思想に基づいて種々の変形が可能である。Although the respective embodiments of the present invention have been described above, the present invention is not limited to these, and various modifications can be made based on the technical idea of the present invention.
【００２８】例えば、各実施例、例えば第１実施例にお
いては、電極ホールダ１４によって電極柱１３を固定す
る場合を説明したが、図６に示すように、電極ホールダ
１４に固定された電極柱１３と、電極ホールダ１４’に
固定された電極柱１３’とを直列に接合する場合、接合
側の電極ホールダ１４と接合側の電極ホールダ１４’と
がボルト１９によって連結されるが、この様な電極柱を
接合する場合における電極ホールダへの電極柱の位置決
め固定においても本発明は適用される。For example, in each of the embodiments, for example, the first embodiment, the case where the electrode column 13 is fixed by the electrode holder 14 has been described, but as shown in FIG. 6, the electrode column 13 fixed to the electrode holder 14 is described. And the electrode column 13 'fixed to the electrode holder 14' are connected in series, the electrode holder 14 on the bonding side and the electrode holder 14 'on the bonding side are connected by the bolt 19. The present invention is also applied to positioning and fixing the electrode pillar to the electrode holder when joining the pillars.
【００２９】また、各実施例、例えば第１実施例におい
て電極ホールダ１４は円環状としたが、内周円は必要と
するものの、外周は必ずしも円形であることを必要とせ
ず、正六角形、正八角形とすることも可能である。In each of the embodiments, for example, the first embodiment, the electrode holder 14 has an annular shape, but the inner circumference is required, but the outer circumference does not necessarily have to be circular. It can also be rectangular.
【００３０】また、各実施例、例えば第１実施例におい
て、電極柱１３を両端部において電極ホールダ１４に固
定したが、電極柱１３の中央部に電極ホールダ１４を追
加し、電極柱１３を３箇所において固定するようにして
もよい。Further, in each of the embodiments, for example, the first embodiment, the electrode pillar 13 is fixed to the electrode holder 14 at both ends, but the electrode holder 14 is added to the central portion of the electrode pillar 13 to make the electrode pillar 13 into three parts. It may be fixed in place.
【００３１】また、各実施例、例えば第１実施例におい
て、電極柱１３は金属製としたが、表面に金属層を形成
させたセラミック柱としてもよい。In each of the embodiments, for example, the first embodiment, the electrode column 13 is made of metal, but it may be a ceramic column having a metal layer formed on its surface.
【００３２】[0032]
【発明の効果】以上述べたように本発明の四重極型質量
分析計によれば、高度な加工技術を要することなく、電
極柱が電極ホールダの内円周面に設けた溝の両側のエッ
ジに位置決めされ、高い組立て精度で電極ホールダに固
定されているので、精度の高い分析結果が得られる。As described above, according to the quadrupole mass spectrometer of the present invention, the electrode columns are provided on both sides of the groove provided on the inner circumferential surface of the electrode holder without requiring a high processing technique. Since it is positioned at the edge and fixed to the electrode holder with high assembly accuracy, highly accurate analysis results can be obtained.
【図１】四重極型質量分析計の第１実施例による四重極
電極部の側面図である。FIG. 1 is a side view of a quadrupole electrode unit according to a first embodiment of a quadrupole mass spectrometer.
【図２】図１における［２］−［２］線方向の部分破断
正面図である。FIG. 2 is a partially cutaway front view taken along line [2]-[2] in FIG.
【図３】図２に対応する第２実施例の部分破断正面図で
ある。FIG. 3 is a partially cutaway front view of a second embodiment corresponding to FIG.
【図４】図２に対応する第３実施例の部分破断正面図で
ある。FIG. 4 is a partially cutaway front view of a third embodiment corresponding to FIG.
【図５】図２に対応する第４実施例の部分破断正面図で
ある。5 is a partially cutaway front view of a fourth embodiment corresponding to FIG.
【図６】変形例の四重極電極部の側面図である。FIG. 6 is a side view of a quadrupole electrode portion of a modified example.
【図７】四重極型質量分析計の概略図である。FIG. 7 is a schematic diagram of a quadrupole mass spectrometer.
【図８】第１従来例の四重極電極部の側面図である。FIG. 8 is a side view of a quadrupole electrode portion of a first conventional example.
【図９】図８における［９］−［９］線方向の部分破断
正面図である。FIG. 9 is a partially cutaway front view taken along line [9]-[9] in FIG.
【図１０】図９に対応する第２従来例の部分破断正面図
である。10 is a partially cutaway front view of a second conventional example corresponding to FIG.
【図１１】図９に対応する第３従来例の部分破断正面図
である。11 is a partially cutaway front view of a third conventional example corresponding to FIG.
１ イオン源部 ２ 四重極電極部 ３ 電極柱 ４ 電極ホールダ ５ 軌道 ６ 検出部 １２ 四重極電極部 １３ 電極柱 １４ 電極ホールダ １５ 溝 １６ 挿通孔 １７ ねじ孔 １８ ねじ Ｏ 電極ホールダ軸 1 Ion Source Section 2 Quadrupole Electrode Section 3 Electrode Column 4 Electrode Holder 5 Orbit 6 Detection Section 12 Quadrupole Electrode Section 13 Electrode Column 14 Electrode Holder 15 Groove 16 Insertion Hole 17 Screw Hole 18 Screw O Electrode Holder Shaft
Claims (3)
通する４本の電極柱が前記電極ホールダの内円周面に固
定して組み立てられる四重極質量分析計において、前記
内円周面に前記電極柱の直径より狭い幅の４本の溝が角
度９０度間隔で、かつ前記電極ホールダの軸心に平行に
設けられており、前記電極柱が前記電極ホールダの軸心
に平行な向きで前記溝に載置され、該溝の両側のエッジ
で位置決めされ固定されていることを特徴とする四重極
型質量分析計。1. A quadrupole mass spectrometer in which four electrode columns inserted through the ring of an insulating ring-shaped electrode holder are fixed to an inner circumferential surface of the electrode holder and assembled, Four grooves having a width narrower than the diameter of the electrode column are provided on the surface at an angle of 90 degrees and parallel to the axis of the electrode holder, and the electrode column is parallel to the axis of the electrode holder. A quadrupole mass spectrometer, wherein the quadrupole mass spectrometer is mounted in the groove in an orientation, and is positioned and fixed by edges on both sides of the groove.
Ｕ字形状、またはＶ字形状の何れかである請求項１に記
載の四重極型質量分析計。2. The cross-sectional shape of the groove is semicircular, rectangular,
The quadrupole mass spectrometer according to claim 1, which is either U-shaped or V-shaped.
から１／１０までの範囲にある請求項１または請求項２
に記載の四重極型質量分析計。3. The width of the groove is 1/2 of the diameter of the electrode column.
To claim 1 or claim 2 in the range from 1 to 1/10
A quadrupole mass spectrometer as described in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20167395A JP3457103B2 (en) | 1995-07-14 | 1995-07-14 | Quadrupole mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20167395A JP3457103B2 (en) | 1995-07-14 | 1995-07-14 | Quadrupole mass spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0935682A true JPH0935682A (en) | 1997-02-07 |
| JP3457103B2 JP3457103B2 (en) | 2003-10-14 |
Family
ID=16445008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20167395A Expired - Fee Related JP3457103B2 (en) | 1995-07-14 | 1995-07-14 | Quadrupole mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3457103B2 (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam apparatus using the same |
| JP2010118310A (en) * | 2008-11-14 | 2010-05-27 | Shimadzu Corp | Ion guide unit, and mass spectroscope equipped with the same |
| JP2011018470A (en) * | 2009-07-07 | 2011-01-27 | Ulvac Japan Ltd | Quadrupole mass spectrometer |
| JP2012502420A (en) * | 2008-09-05 | 2012-01-26 | ザ ユニバーシティ オブ リバプール | Method |
| JP2013149550A (en) * | 2012-01-23 | 2013-08-01 | Lift Force Co Ltd | Multiple electrode, manufacturing method of multiple electrode, and mass spectroscope |
| CN112687518A (en) * | 2020-12-21 | 2021-04-20 | 天津国科医工科技发展有限公司 | Quadrupole rod structure convenient to repair and grind assembly |
| CN115799040A (en) * | 2023-02-10 | 2023-03-14 | 四川玛科思生物科技有限公司 | Quadrupole rod assembly, mass spectrometer and quadrupole rod assembly assembling device |
| CN118197901A (en) * | 2024-03-04 | 2024-06-14 | 广州禾信仪器股份有限公司 | Assembly tool for quadrupole mass analyzer and method of using the same |
-
1995
- 1995-07-14 JP JP20167395A patent/JP3457103B2/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam apparatus using the same |
| JP2012502420A (en) * | 2008-09-05 | 2012-01-26 | ザ ユニバーシティ オブ リバプール | Method |
| JP2010118310A (en) * | 2008-11-14 | 2010-05-27 | Shimadzu Corp | Ion guide unit, and mass spectroscope equipped with the same |
| JP2011018470A (en) * | 2009-07-07 | 2011-01-27 | Ulvac Japan Ltd | Quadrupole mass spectrometer |
| JP2013149550A (en) * | 2012-01-23 | 2013-08-01 | Lift Force Co Ltd | Multiple electrode, manufacturing method of multiple electrode, and mass spectroscope |
| CN112687518A (en) * | 2020-12-21 | 2021-04-20 | 天津国科医工科技发展有限公司 | Quadrupole rod structure convenient to repair and grind assembly |
| CN115799040A (en) * | 2023-02-10 | 2023-03-14 | 四川玛科思生物科技有限公司 | Quadrupole rod assembly, mass spectrometer and quadrupole rod assembly assembling device |
| CN118197901A (en) * | 2024-03-04 | 2024-06-14 | 广州禾信仪器股份有限公司 | Assembly tool for quadrupole mass analyzer and method of using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3457103B2 (en) | 2003-10-14 |
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