JPH095085A - Oscillation type gyroscope - Google Patents

Abstract

PURPOSE: To stably support an oscillation type gyroscope using a vibrating plate and to prevent machining deterioration in a piezoelectric material during trimming adjustment. CONSTITUTION: When grooves 10d are formed in an elastic member 10 in which a piezoelectric material 12 is laminated on a metal plate 11 made of constant modules material, vibrating plates 10a, 10b, 10c are formed. An electrode is formed on the surface of the piezoelectric material 12 in each of the vibrating plates 10a, 10b, 10c, and the respective vibrating plates 10a, 10b, 10c are driven in x-direction by alternating current driving electric power given to the electrodes, while the respective vibrating plates 10a, 10b, 10c are oscillated in z-direction by Coriolis force given in the rotation system. These oscillation constituents are detected by a detecting electrode, and an angular speed is obtained. On both side parts of the elastic member 10, the piezoelectric material 12 is partially removed, and exposed parts 11b of the metal plate 11 are held by holding bodies 30. At the time of each of the vibrating plates 10a, 10b, 10c, the exposed part 11b of the metal plate 11 is arranged, and the number of vibrations can be regulated when the exposed parts 11b are trimmed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope equipped with a vibrating plate for detecting the angular velocity of a rotary system, and particularly to stabilize the support and to prevent the piezoelectric material from being deformed during trimming adjustment. The present invention relates to a vibration type gyroscope that can be prevented.

[0002]

2. Description of the Related Art Gyroscopes that detect rotational angular velocity are used in inertial navigation systems for aircraft and ships, but recently, they have been used in navigation systems for vehicles, attitude control of robots and unmanned vehicles, and even television cameras. It has also come to be used in screen shake prevention devices for video cameras and amusement-related devices.

As a gyroscope suitable for use in such various fields, a small one is required,
Therefore, a vibrating gyroscope is receiving attention. The conventional vibrating gyroscope is a piezo-electric element for driving and a piezoelectric element for detecting are attached to an elastic body such as a quadrangular prism shape or a triangular prism shape formed of a constant elastic material such as elinvar. There is. In this vibrating gyroscope, the elastic body is vibrated in a predetermined direction by the piezoelectric strain force of the driving piezoelectric element. The vibrating elastic body receives Coriolis force in the rotating system and is vibrated in a direction intersecting with the vibrating direction. This vibration is detected as a voltage or a current by the detecting piezoelectric element.

However, in the vibration type gyroscope using the prismatic elastic body, it is difficult to process the elastic body, it is difficult to adjust the resonance frequency, and it is difficult to support the vibration characteristic without degrading it. is there.

Therefore, a vibrating gyroscope using a vibrating plate as shown in FIG. 6 is drawing attention. This vibrating gyroscope can be manufactured by punching in a pressing process, and the resonance frequency can be adjusted by trimming the vibrating plate. In addition, one end can be rigidly supported and the support conditions are easy.

The vibrating gyroscope shown in FIG. 6 is formed by laminating piezoelectric materials 4 and 4 on both front and back surfaces of a metal plate 1 having a constant width formed of a constant elastic material such as elinvar. The vibrating plate 5 is formed by stacking the piezoelectric materials 4 and 4 of
Is configured. On both front and back sides of the diaphragm 5, driving electrodes 6 formed on the surfaces of the piezoelectric materials 4 and 4 on both sides in the width direction, and detection formed on the surfaces of the piezoelectric materials 4 and 4 at the center in the width direction. An electrode 7 for is provided. Further, the metal plate 1 made of a constant elastic material serves as a common electrode and is normally set to the ground potential.

When AC driving power is applied between the driving electrode 6 and the metal plate 1, the vibration of the vibrating plate 5 is caused in the x direction by the distortion of the piezoelectric materials 4 and 4. When the diaphragm 5 is placed in a rotating system around the y axis while vibrating in the x direction,
The vibrating plate 5 vibrates in the z direction by the Coriolis force. A detection voltage or a detection current due to the strain of the piezoelectric materials 4 and 4 at this time is taken out between the detection electrode 7 and the metal plate 1,
The angular velocity ω is obtained based on this detection output.

[0008]

The vibrating plate 5 has piezoelectric materials 4, 4 such as piezoelectric ceramics on both front and back surfaces of the metal plate 1.
Therefore, when the base end portion (a) is sandwiched by the support body 2 to be rigidly supported, the sandwiching support force acts on the piezoelectric materials 4 and 4. Piezoelectric material 4, 4
Has a low hardness, the piezoelectric materials 4 and 4 are easily deformed at the base end portion (a) when it is supported by the support body 2, so that the diaphragm 5 is supported on the support surface of the support body 2 and the y-axis. It is difficult to make the direction parallel to the direction with high accuracy. Further, when the holding force of the support 2 is increased, the piezoelectric materials 4 and 4 are crushed and deteriorated, and at this time, peeling easily occurs at the bonding portion between the metal plate 1 and the piezoelectric materials 4 and 4.

Further, when adjusting the resonance frequency of the diaphragm 5 or adjusting the vibration mode, it is necessary to trim the tip (b) of the diaphragm 5. At this time, if the tip portion (b) is machined in a state where the metal plate 1 and the piezoelectric materials 4 and 4 are laminated, the piezoelectric materials 4 and 4 are likely to be process-altered. In the piezoelectric materials 4 and 4, the dielectric polarization direction is z, for example.
It is set in the axial direction, which allows vibration drive in the x direction,
It is possible to detect flexural deformation when vibrating in the z direction. However, if the piezoelectric materials 4 and 4 are altered in quality as described above, the dielectric polarization of the piezoelectric materials 4 and 4 is disturbed at the tips (b). When the dielectric polarization is disturbed, the efficiency of vibration driving in the x direction decreases, and the detection sensitivity and the detection output during vibration in the z direction also decrease.

According to the present invention, when a vibrator is composed of a laminated body of a metal plate and a piezoelectric material, the laminated body can be stably and reliably supported, and the vibrator is used for vibration adjustment. It is an object of the present invention to provide a vibrating gyroscope that facilitates trimming of a piezoelectric material and prevents the piezoelectric material from being deteriorated by the trimming.

[0011]

A vibrating gyroscope according to the present invention has a vibrating plate composed of a metal plate such as an elinvar and a piezoelectric material such as a piezoelectric ceramic laminated on the metal plate. When a vibrating diaphragm is placed in a rotating system and vibrating in a direction intersecting with the flexural vibration due to Coriolis force, a driving electrode for flexurally vibrating the vibrating board in a predetermined direction An electrode for detection that obtains detection power based on vibration is formed, and a portion where the piezoelectric material is partially removed to expose the metal plate is formed on the vibration plate. The vibrating plate is supported by sandwiching the plate with a support.

Two grooves are formed in an elastic member made of a metal plate and a piezoelectric material laminated on the metal plate,
Three vibrating plates that are parallel to each other are formed on the elastic member, and on the surface of the piezoelectric material, the vibrating plate in the center and the vibrating plates on both sides are bent and vibrated in opposite phases to each other, and vibrating. When a vibrating plate is placed on a rotating system and Coriolis force causes vibration in a direction intersecting with the flexural vibration, a detection electrode for obtaining detection power based on this vibration is formed,
On the base portion of the elastic member in which the groove is not formed, a protruding portion that protrudes further to the side than the edges of the diaphragms on both sides is formed, and the piezoelectric material is removed at the protruding portion to expose the metal plate. The exposed metal plate is sandwiched between the supports, and the elastic members are supported on both sides.

Further, a vibrating plate made of a metal plate and a piezoelectric material laminated on the metal plate is provided, and a driving electrode for bending and vibrating the vibrating plate in a predetermined direction is formed on the surface of the piezoelectric material. When a vibrating diaphragm is placed in a rotating system and a Coriolis force causes vibration in a direction intersecting with the flexural vibration, a detection electrode for obtaining detection power based on this vibration is formed, and a metal plate is formed. Is characterized in that a portion where the piezoelectric material is removed and the metal plate is exposed is formed at the front end of the, and the portion where the metal plate is exposed is a processing portion for processing the diaphragm. It is a thing.

[0014]

In the vibrating gyroscope of the present invention, the vibrator is composed of the elastic member in which the metal plate of the constant elastic material such as the elinvar and the piezoelectric material such as the piezoelectric ceramic are laminated. The oscillator may be in the form of a single plate having a long side shape, or may be a bipod tuning fork type having two oscillators separated by one groove. Preferably, the elastic member is formed as a tripod tuning fork type in which two grooves are formed and three diaphragms parallel to each other are formed. The piezoelectric material may be laminated on one side of the metal plate or may be laminated on both sides.

A vibrating plate having a structure of one or an elastic member such as a tripod tuning fork is supported in a cantilever manner by its base end being clamped by a support. At this time, at the base end of the vibration plate or the elastic member, the piezoelectric material is partially removed and the metal plate is exposed. The exposed portion of the metal plate is clamped by the support body, whereby the vibrating plate or elastic member is rigidly supported in a cantilever state. By sandwiching the metal plate by the support, the sandwiching and fixing force by the support can be strengthened, and the diaphragm or the elastic member can be stably and reliably supported. Further, the diaphragm or the elastic member is supported so as to be maintained in a highly accurate parallel state with respect to the original extending direction.

In the case of a tripod tuning fork in which two grooves are formed in the elastic member and three diaphragms are formed, the base end without grooves may be supported by a support. However, preferably, at the base of the elastic member, a protrusion is formed that further protrudes from the edges of the diaphragms located on both sides, and the piezoelectric material is removed at this protrusion to expose the metal plate. To do. By sandwiching the exposed portions of the metal plate on both sides of the base with the support, it is possible to hold the portions of the elastic member where the vibration plate is not formed on both sides. Also in this supporting structure, the elastic member is stably and reliably supported by sandwiching the exposed portion of the metal plate between the supporting members. Further, if both sides of the base of the elastic member are fixed, when the three vibrating plates vibrate, the elastic member as a whole can be prevented from twisting, and leakage output due to torsional deformation of the piezoelectric material can be prevented.

Next, the resonance frequency of the diaphragm can be adjusted by trimming the tip of the diaphragm. Particularly in a tripod tuning fork type having three diaphragms, the resonance frequency of the entire elastic member composed of the three diaphragms can be adjusted by trimming the length of the central diaphragm. In the present invention, the piezoelectric material is removed at the tip of the vibration plate to expose the metal plate. The frequency can be adjusted by processing the exposed portion of the metal plate during the trimming. Since it is not necessary to process the piezoelectric material at the front portion of the diaphragm, the piezoelectric material is prevented from being altered in quality and it is possible to prevent disturbance of the dielectric polarization.

Further, as described above, the metal plate is exposed at the supporting portion of the vibration plate or the elastic member so that the metal plate can be clamped, and the metal plate is exposed at the tip of the vibration plate.
This exposed portion may be the processed portion.

Since the vibrating gyroscope of the present invention is basically formed by cutting out from a laminated body of a metal plate and a piezoelectric material, the metal plate is exposed at the support portion by the support body. Except for the processed part and / or the processed part where the metal plate is exposed at the tip of the vibrating plate, all or most of the other parts are laminated metal plate and piezoelectric material. .

[0020]

1 (A) is a plan view showing a vibrating gyroscope according to a first embodiment of the present invention, FIG. 1 (B) is a right side view thereof, and FIG. 2 (A) is a second embodiment of the present invention. FIG. 2B is a plan view showing an example of the vibration type gyroscope, and FIG.
It is sectional drawing of a B line. 3 is a plan view showing an electrode arrangement example of each diaphragm, and FIG. 4 is a right end view of FIG. 3 showing a direction of dielectric polarization of the piezoelectric material.

In the vibration type gyroscope shown in FIG.
A flat plate-shaped elastic member 10 is used. The elastic member 10 includes a metal plate 11 made of a constant elastic material such as elinvar and piezoelectric materials 12, 1 laminated on both front and back surfaces of the metal plate 11.
2 and a laminated body. Piezoelectric material 12, 1
2 is a piezoelectric ceramic or the like. This elastic member 10 is
It is cut out from a laminated plate in which the metal plate 11 and the piezoelectric materials 12 and 12 are laminated.

At the tip of the elastic member 10, a pair of grooves 10 is formed.
d and 10d are cut, and three diaphragms 10a and 10d
b and 10c are formed in parallel. Each diaphragm 10a,
Piezoelectric material 12, which is laminated at the portions 10b and 10c,
12, the dielectric polarization is set so as to be in the direction indicated by the arrow in FIG.

At the base end (c) of the elastic member 10, the piezoelectric materials 12 and 12 are partially removed, and the base end of the metal plate 11 is exposed. The exposed portion 11 a is supported by the support body 20. In the embodiment shown in FIG. 1, the support 20 is a block made of a rigid material such as a metal, a plastic material, or a ceramic.
The exposed portion 11a is press-fitted or inserted into the holding groove 21 formed in the above, and is fixed with an adhesive as necessary. The exposed portion 11a of the metal plate 11 is held and fixed in a state of being sandwiched in the holding groove 21. The support 20 is fixed on a circuit board or the like.

Since the exposed portion 11a of the metal plate 11 is sandwiched and fixed to the support 20, the entire elastic member 10 is cantilevered and supported. Since the metal plate 11 is directly sandwiched by the support body 20, the elastic member 10 is securely held, and the supporting posture in the y direction becomes stable. Therefore, for example, when the bottom surface 20a of the support 20 is fixed in parallel with the circuit board, the parallelism between the elastic member 10 and the circuit board can be secured.

The vibrating plates 10a, 10 of the elastic member 10
The dielectric polarization directions of the piezoelectric materials 12 and 12 in the portions b and 10c are as shown by arrows in FIG. 4, for example. Electrodes are formed on both front and back surfaces of the piezoelectric materials 12, 12 in each of the vibrating plates 10a, 10b, 10c, as shown in FIG.

A pair of driving electrodes 13 are provided on both sides of each of the vibrating plates 10a, 10b, 10c in the width direction. Further, an electrode 14 for detection is provided at the central portion in the width direction of the vibrating plates 10a, 10b, 10c. A drive terminal electrically connected to each driving electrode 13 is indicated by A, and a detection terminal electrically connected to each detection electrode 14 is indicated by B. Further, the metal plate 11 is a common electrode that faces the electrodes in common, and the metal plate 11 is set to the ground potential via the ground terminal C.

Depending on the arrangement of the electrodes 13 and 14 and the direction of the dielectric polarization of the piezoelectric materials 12 and 12, the vibration plates 10 are arranged.
The vibrations a, 10b, and 10c are driven in the x direction. That is, when AC drive power is applied to the drive terminal A, piezoelectric strains corresponding to the polarization directions of the piezoelectric materials 12 and 12 occur, and the respective vibration plates 10a, 10b, and 10c vibrate in the plate surface direction (x direction). . However, as shown in FIG.
0a and the vibrating plates 10b and 10c on the left and right sides have opposite directions of arrows indicating dielectric polarization in the portions where the driving electrodes 13 face each other. Therefore, in the central diaphragm 10a and the diaphragms 10b and 10c on both sides, the phase of vibration in the x direction is 18
It shifts 0 degrees. At a certain point of time, when the amplitude direction of the central diaphragm 10a is + x direction, the amplitude directions of the diaphragms 10b and 10c on both sides are -x direction.

When the elastic member 10 is placed in the rotation system around the y-axis, the vibrating plates 10a and 10a are generated by Coriolis force.
b and 10c are flexibly deformed in the z direction. At this time,
As shown in FIG. 5, the vibration of the central diaphragm 10a in the z direction and the vibrations of the diaphragms 10b and 10c on both sides in the z direction are 180 degrees out of phase with each other. When the amplitude of the central diaphragm 10a is + z direction at a certain point, the diaphragms 1 on both sides are
The amplitudes of 0b and 10c are in the -z direction. As shown in FIG. 4, the central diaphragm 10a and the diaphragms 10b and 10c on both sides are arranged.
Thus, the directions of the dielectric polarization of the piezoelectric materials 12 and 12 in the portion where the detection electrode 14 is provided are opposite. Therefore, in each of the vibrating plates 10a, 10b, and 10c that vibrate in different phases, the phase (polarity) of the detected power detected from the electrode 14 is the same. The peak-to-peak value of the detection output from the detection terminal B is proportional to the Coriolis force, and the angular velocity ω can be obtained from this detection output.

In the embodiment shown in FIG. 1, the base end portion (c) of the elastic member 10 is rigidly supported by the support 20, but the vibration plates 10a, 10b and 10c have staggered phases as shown in FIG. Therefore, even if the base end portion (c) is rigidly supported, the vibrators 10a, 10a
There is no adverse effect on the vibration characteristics of b and 10c.

The structure of the elastic member 10 shown in FIG. 2 is the same as that shown in FIG. The elastic member 10 shown in FIG. 2 is also a laminate of the metal plate 11 and the piezoelectric materials 12 and 12, and the vibrating plate 10 separated by the grooves 10d and 10d at the front portion.
a, 10b, 10c are formed. In the elastic member 10 shown in FIG. 2 (though the one shown in FIG. 1 has the same shape),
On both sides of the base 10g of the elastic member 10 where the vibrating plates 10a, 10b, 10c are not formed, the steps 10e, 10 further than the edges of the vibrating plates 10b, 10c on both sides.
Projection portions 10f, 10f projecting to both sides in the x direction via e
Is provided.

In the structure shown in FIG. 1A, the protrusion 1
The piezoelectric materials 12 and 12 are laminated on the portions 0f and 10f, but in the embodiment shown in FIG.
At 0f, the piezoelectric materials 12 and 12 are partially removed, and the metal plate 11 is exposed. Exposed part 11 of this metal plate 11
b and 11b are sandwiched and supported by the support 30.
The supports 30, 30 are made of metal or plastic material or ceramic and have longitudinally extending grooves 3 on their sides.
1, 31 are formed, and the exposed portions 11b, 11b are press-fitted or inserted into the grooves 31, 31 and fixed with an adhesive as required.

The exposed portions 11b, 11b of the metal plate 11 on which the piezoelectric materials 12, 12 are not provided are the grooves 31 of the support 30.
The piezoelectric material 1 is held by being sandwiched and fixed inside.
Elastic member 1 without giving any holding stress to 2 and 12
Both side portions (d) of 0 are securely fixed by the supports 30, 30. The supports 30, 30 are fixed so that their bottoms 30a, 30a are parallel to the circuit board, for example. Therefore, the elastic member 10 is fixedly supported in parallel with the circuit board.

Each of the diaphragms 10a, 10b, 10 shown in FIG.
The dielectric polarization directions of the piezoelectric materials 12, 12 at c are the same as those in FIG. 4, and the arrangement of the electrodes is also the same as that shown in FIG. Therefore, at the time of driving, the central diaphragm 10a and the left and right diaphragms 10b and 10c are driven in the x direction at different phases, and due to the Coriolis force in the rotary system, the central diaphragm 10a and the left and right diaphragms vibrate. The plates 10b and 10c vibrate in different phases in the z direction. As shown in FIG. 5, the diaphragm 1
0a and the vibrating plates 10b and 10c have alternating vibration modes, the vibrating plates 10a, 10b and 10 of the elastic member 10 are
The base portion 10g in which c is not formed is stable, and therefore, even if both side portions (d) are rigidly supported by the support members 30 and 30, the vibration modes of the respective vibration plates 10a, 10b and 10c are adversely affected. There is no.

Since the vibrating plates 10a, 10b and 10c vibrate in alternate modes as shown in FIG. 5, the base portion 10g of the elastic member 10 is stable as described above.
In the case where only the base end portion (c) is supported as shown in Fig. 3, when the elastic plates 10a, 10b, 10c vibrate in the z direction, the outer edges of the elastic plates 10b and 10c on both sides are not shown. It is not possible to completely prevent the deformation caused by twisting in the direction indicated by α in FIG. 5 or in the opposite direction.
When the torsional vibration indicated by α is generated, the piezoelectric material 1
A null voltage is generated in the strains 2 and 12 due to the distortion of the torsional vibration, and this is superimposed on the detection output from the detection electrodes 14 and 14 as a leakage output. However, as shown in FIG.
In the structure in which both sides (d) of the elastic member 10 are held by the supports 30 and 30, the torsional vibration around the y-axis can be suppressed, the null voltage can be suppressed, and the Coriolis force detection sensitivity is enhanced. It is possible.

Next, in the elastic member 10, the diaphragm 10
The resonance frequency when a and the vibrating plates 10b and 10c vibrate in alternate modes in the x and z directions is determined by the length of the vibrating plate. Therefore, after the grooves 10d, 10d are formed and the respective vibrating plates 10a, 10b, 10c are formed, the vibrating plates 10a, 10b,
It may be necessary to trim the tip (e) of 10c. Particularly, the tripod tuning fork type having three diaphragms has an advantage that the entire resonance frequency can be adjusted by adjusting the length of the central diaphragm 10a in the y-axis direction. In the embodiment shown in FIG. 2, all diaphragms 10a,
Piezoelectric materials 12, 1 at the tips (e) of 10b, 10c
2 is partially removed, and the metal plate 11 is exposed.

Therefore, when trimming the tip of the central diaphragm 10a, or when it is necessary to trim the tip of the diaphragms 10b and 10c on both sides, the portion of the exposed portion 11c of the metal plate 11 at the tip (e). Disconnect. In this cutting work, the vibration plates 10a, 10b, 10c
Since the piezoelectric material laminated on the above will not be subjected to processing stress or deterioration, there will be no disturbance in the polarization direction set as shown in FIG. Note that, also in the embodiment shown in FIG. 1, each of the diaphragms 10a, 10b, 10
Exposed part 11c where the piezoelectric material is partially removed at the tip of c
Is preferably formed.

In the embodiment shown in FIGS. 1 and 2, the groove 21 or 31 is formed in the support 20 or 30, and the exposed portion of the metal plate 11 is press-fitted or inserted into the groove 21 or 31 to be fixed. For example, the exposed portion 11a at the base end (c) shown in FIG. 1 or the exposed portions 11b, 11b at both sides (d) shown in FIG. 2 may be sandwiched from both sides in the z direction. Any support may be used. Furthermore, the present invention is not limited to a tripod tuning fork type gyroscope, but can be applied to a bipod tuning fork type or a single-plate vibrator as shown in FIG.

[0038]

As described above, according to the present invention, the vibrating plate or the elastic member is constituted by the laminated body in which the metal plate and the piezoelectric material are laminated, and the exposed portion of the metal plate from which the piezoelectric material is partially removed is supported. It is supposed to be supported by the body. Therefore, the support of the diaphragm or the elastic member is stable.

Further, since the exposed portion of the metal plate from which the piezoelectric material is removed at the tip of the vibration plate is a processed portion such as trimming, the piezoelectric material is not subject to work-induced deterioration in the work such as trimming.

[Brief description of drawings]

1A is a plan view showing a vibrating gyroscope of a first embodiment, FIG. 1B is a side view of a vibrating gyroscope, FIG.

2A is a plan view showing a vibrating gyroscope according to a second embodiment, FIG. 2B is a sectional view taken along line BB in FIG. 2A,

FIG. 3 is a plan view showing an electrode arrangement of each diaphragm,

4 is a right end view of FIG. 3 showing dielectric polarization of the piezoelectric material,

FIG. 5 is a perspective view showing a deformed state of the diaphragm of each embodiment,

FIG. 6 is a perspective view of a conventional vibrating gyroscope,

[Explanation of symbols]

 10 elastic members 10a, 10b, 10c diaphragm 10d groove 10e step 10f protrusion 11 metal plate 11a, 11b, 11c exposed portion 12 piezoelectric material 13 driving electrode 14 detection electrode 20, 30 support

Claims (3)

[Claims] 1. A vibrating plate comprising a metal plate and a piezoelectric material laminated on the metal plate, wherein a surface of the piezoelectric material is provided with:
When a vibrating diaphragm is placed in a rotating system and a vibrating diaphragm is placed in a rotating system and vibration in a direction intersecting with the flexural vibration occurs, detection based on this vibration occurs. An electrode for detection of electric power is formed, a portion where the piezoelectric material is partially removed and a metal plate is exposed is formed on the vibration plate, and the exposed metal plate is a support. A vibrating gyroscope characterized in that the diaphragm is supported by being sandwiched between. 2. An elastic member made of a metal plate and a piezoelectric material laminated on the metal plate is formed with two grooves, and three elastic plates parallel to each other are formed on the elastic member. On the surface, a driving electrode for flexurally vibrating the central diaphragm and the diaphragms on both sides in opposite phases, and an oscillating diaphragm are placed in a rotating system and intersect with the flexural vibration by Coriolis force. A detection electrode that obtains detection power based on this vibration when a directional vibration occurs is formed, and the base of the elastic member in which the groove is not formed is more than the edges of the diaphragms on both sides. Further, a protruding portion that protrudes to the side is formed, and the piezoelectric material is removed at this protruding portion to expose the metal plate, and this exposed metal plate is sandwiched by the support body and the elastic member is provided on both sides. Vibration type gyroscope characterized by being supported by Oop. 3. A vibrating plate comprising a metal plate and a piezoelectric material laminated on the metal plate, wherein the surface of the piezoelectric material comprises:
When a vibrating diaphragm is placed in a rotating system and a vibrating diaphragm is placed in a rotating system and vibration in a direction intersecting with the flexural vibration occurs, detection based on this vibration occurs. An electrode for detection to obtain electric power is formed, and at the tip of the metal plate, a portion where the piezoelectric material is removed and the metal plate is exposed is formed, and the exposed portion of the metal plate is A vibrating gyroscope characterized by being used as a processing unit for processing a diaphragm.