JPH0960959A - Clean room air blowout duct - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rectified air current which satisfies an indoor air to a full extent by segmenting an outside air passage into a plurality of areas in the longitudinal direction with a spacing and communicating each segmented area with an inside air passage by way of an air intake formed with on an inside duct board. SOLUTION: A discharged air duct 3 is formed in double duct structure having an inside air passage 5 formed with an inside duct board 4 extending in the longitudinal direction and an outside air passage 7 formed with a porous outside duct board 6 laid out outside the inside air duct 4 with a specified spacing. The outside air passage 7 is segmented into a plurality of sections in the longitudinal direction with a specified spacing and an air intake 8, which is designed to introduce the air in an inside air passage 5 for every segment of the outside air passage 7, is formed on the inside air passage 4. Furthermore, an air volume adjusting guide 9, which extends to the inside air passage 5, is mounted on the air intake 8 at angles ranging from 0 to 90 deg. as opposed to an air current.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air blowing duct provided with a blowout line in a line along the ceiling surface of a clean room, and more particularly, to idealize the blowing direction of the air blown from the duct. This is a proposal for an air blowing duct that can prevent a backflow phenomenon in which a uniform amount of air is blown into the room from the blowing port and the air in the room near the blowing port is sucked into the duct again.

[0002]

2. Description of the Related Art Clean rooms are widely used for industrial purposes such as semiconductor manufacturing, food manufacturing, and pharmaceutical manufacturing, and for operating rooms in hospitals. As a means for improving the air flow in these clean rooms, there is an air blowing duct having a line-shaped air outlet using a perforated plate to obtain a uniform air flow and a sufficient rectified air flow in the room (see FIG. 6).

FIG. 6 shows an air conditioner body (20).
The supplied air flows into the air blowing duct (21) extending along the ceiling surface and is blown out into the room from the surface of the perforated plate (22) forming the duct. The air flow inside is a horizontal air flow along the line extending in the longitudinal direction of the duct, and therefore the air pressure on the upstream side is weakened due to the effect of the internal pressure in the duct, and the amount of air blown into the room is uniform. Moreover, the blowing direction is not constant with respect to the blowing port. Immediately after the air is blown into the duct, a negative pressure is created in the duct due to the dynamic pressure in the horizontal direction, and a backflow (indicated by the arrow in the figure) that sucks indoor air from the outlet into the duct is generated. It is not possible to obtain a rectified airflow.

[0004]

In a conventional duct having a line-shaped outlet, the air flowing in the duct becomes a horizontal air flow in the longitudinal direction, and the air is uniformly sent into the room in an ideal direction. In addition, there is a problem that a backflow occurs in which the indoor air is sucked into the air outlet due to the influence of the dynamic pressure.

An object of the present invention is, in an air blowing duct having a blowout port extending in the longitudinal direction along the ceiling, air is blown from the duct blowout port in an ideal direction, and the air blown into the room is blown out. To provide a duct for air blowout in which the amount is made uniform and the backflow phenomenon in which the air once blown into the room is sucked into the duct again is prevented and the indoor air becomes a sufficiently rectified airflow. is there.

[0006]

In order to achieve the above object, the present invention has the following means as the gist for solving the problems. That is, in the air blowing duct extending along the ceiling surface of the clean room, the inner air passage formed by the inner duct plate extending in the longitudinal direction,
A double duct structure having an outer air passage formed by a porous outer duct plate disposed outside the inner duct plate with a predetermined space, wherein the outer air passage is elongated at a predetermined interval. It is an air blowing duct characterized in that it is divided into a plurality of parts in the direction, and each divided part and the inner air passage communicate with each other through an air introduction port formed in the inner duct plate.

Further, it is preferable that the air introduction port is provided with an air flow rate adjusting guide projecting into the inner air passage and an air direction adjusting guide extending to the outer air passage side. Further, the perforated plate forming the outer air passage is
The overall aperture ratio is preferably 3 to 10%.

The air flow rate adjusting guide has an attachment angle of 0 to 90 degrees facing the air flow, and the air direction adjusting guide has a maximum attachment angle of 90 degrees facing the air flow. It is preferably mounted at an angle. Further, it is preferable that the air flow rate adjusting guide and the air direction adjusting guide are made of perforated plates. The aperture ratio of the porous plate is preferably 20 to 60%.

[0009]

The air blowing duct for a clean room according to the present invention has an inner air passage and an outer air passage formed by an inner duct plate extending in the longitudinal direction and a porous outer duct plate disposed outside the inner duct plate. And a double duct structure having an air introduction port that connects the inner air passage and the outer air passage to each other in the inner duct plate, and the air flowing from the air conditioner body flows into the outer air passage from the inner air passage. At the very least, air is blown into the clean room through the holes in the outer duct plate.

Further, by providing an air flow rate adjusting guide and an air direction adjusting guide at the air introducing port formed in the inner duct plate, the air flow rate distribution in the longitudinal direction of the duct is adjusted so that an appropriate amount of air flow is obtained for each section. Uniformity can be achieved, and it is possible to suppress the wind speed in each section, and by suppressing the influence of dynamic pressure, the ideal air blowing direction can be obtained, and the reverse flow of air near the outlet, that is, from the indoor side It is possible to prevent air from flowing back into the duct.

[0011]

1 is a vertical cross-sectional view for explaining the internal structure of an air blowing duct of a clean room according to the present invention. FIG. 2 (a) is a partially enlarged view of A in FIG. b)
2 is a partially enlarged view of B in FIG.

In a clean room room 1, a normal air conditioner body 2 having a heat exchanger, a blower fan, a filter, etc.
Is installed, and the air in the room is sucked in from below the main body of the air conditioner, and from the fan inside the main body of the air conditioner into the duct 3 for blowing air that is installed above the main body of the air conditioner and extends along the ceiling surface. It is configured to flow in and be blown out again into the room.

As shown in the vertical sectional view of FIG. 3 (the sectional view taken along the line CC in FIG. 1), the duct 3 in the present invention has a ship-bottomed section, and the air sent from the air conditioner main body. Is configured to be blown out into the room with the duct below, diagonally below and horizontally. The air blowing duct may have a rectangular cross section in addition to the ship-bottomed cross section described above, or may have a curved corner portion between the two.

In a so-called line type clean room in which the air blowing duct 3 is extended along the ceiling surface to blow out the air linearly, it is ideal to blow the air as shown by the arrow in FIG. The present invention causes a rectified air flow. However, in order to obtain such a rectified air flow more surely, the air is blown out from the duct 3 in an ideal direction, that is, the air is blown out in a direction perpendicular to the outlet. It is the one.

The air blowing duct 3 has an inner air passage 5 formed by an inner duct plate 4 extending in the longitudinal direction.
And an outer air passage 7 formed by a porous outer duct plate 6 which is arranged outside the inner duct plate 4 with a predetermined space, to form a double duct structure.

Further, the outer air passage 7 is divided into a plurality of pieces in the longitudinal direction at predetermined intervals, and the air in the inner air passage 5 is introduced into the inner duct plate in each of the outer air passage 7 sections. The air introduction port 8 is formed. Although the installation position of the air introduction port 8 is the end of each section in the embodiment, it may be located in the middle as long as it can introduce air.

Further, an air flow rate adjusting guide 9 projecting toward the inner air passage 5 is attached to the air introducing port 8 so as to face the air flow at an angle of 0 to 90 degrees.
By providing the air flow rate adjusting guide 9, it becomes possible to make the air flow rate distribution in the longitudinal direction uniform and suppress the wind speed of each section. By suppressing the influence of the dynamic pressure, the air can be directed toward the ideal direction, that is, the outlet. Can be blown out in a vertical direction, and a uniform blowout amount can be obtained.

Further, an air direction adjusting guide 10 extending in a direction opposite to the air flow rate adjusting guide 9, that is, toward the outer air passage 7, is attached to the air introducing port 8 at a maximum angle of 90 degrees. There is.

By providing this air direction adjusting guide, it is possible to give a downward vector to the air immediately after flowing into each section, whereby the passing air velocity in the inner air passage 5 is 1.5 to 2 m / s, for example. In the above case, it is possible to prevent the backflow phenomenon of the airflow, that is, the phenomenon that the air in the room is sucked into the duct through the hole 11 on the front side of the porous plate 6. The air flow rate adjusting guide 9 and the air direction adjusting guide 10 are formed of, for example, punched perforated plates so as to give a downward vector to the air as described above and to allow an appropriate air flow rate distribution in the compartment. Further, the air flow rate adjusting guide 9 and the air direction adjusting guide 10 are formed of perforated plates having holes with an opening ratio of 20 to 60%.

In the present embodiment, as shown in FIG. 1, the outer air passage 7 is divided into a plurality of portions at a predetermined interval, and the first air introduction port 8 provided in the divided portion is the air conditioner body and the duct. It is provided in the vicinity of the most upstream end, which is the mounting part for. The air flow rate adjusting guide 9 attached to the first air introduction port 8 has an angle of 0 degree. The angle of the air flow rate adjusting guide provided in each air inlet 8 is changed as it goes to the downstream side of the duct, that is, the tip in the longitudinal direction. It is set in consideration of the length of the duct, the amount of air supplied into the duct, the wind speed, etc. For example, when the outer air passage 7 is divided into 14 as shown in FIG. The guide 9 is set to 30 degrees, and the seventh to fourteenth guides are set to 45 degrees. It can be seen that the relationship between the air volume and the air flow obtained by this is an almost uniform and constant ideal state as shown in the graph of FIG.

FIG. 5 shows a porous outer duct plate 6 which covers the outer side of the inner duct plate 4 to form an outer air passage, so that the overall opening ratio is 3 to 10%. Has been formed. In the present embodiment, the perforated plate having the aperture ratio of 3 to 10% is shown by providing the line-shaped blind portion 12 so that the hole portion 11 becomes a line shape along the longitudinal direction of the duct. The mation is not limited to this, and it goes without saying that it may be randomly drilled between 3 and 10%.

[0022]

The air blow-out duct of the present invention having the above-mentioned structure enables the air flow distribution to be uniform and can provide a downward vector, thereby obtaining a sufficient rectified air flow. It is possible to obtain an ideal air blowing direction, to make the blowing amount uniform, and to prevent backflow of air in which blown indoor air is sucked again from the duct outlet.

[Brief description of drawings]

FIG. 1 is a cutaway sectional view of a clean room to which the air blowing duct of the present invention is attached.

2 is a partially enlarged view of FIG. 1, (a) is a partially enlarged view of A of FIG. 1, and (b) is a partially enlarged view of B of FIG.

FIG. 3 is a vertical cross-sectional view of the duct of the present invention and a diagram showing the flow of air.

FIG. 4 is a diagram showing the relationship between the duct of the present invention and the air volume and air flow.

FIG. 5 is a diagram of an example of a perforated plate forming the outer surface of the duct.

FIG. 6 is a view showing a clean room provided with a conventional air blowing duct.

[Explanation of symbols]

1: clean room, 2: air conditioner body, 3: duct, 4: inner duct plate, 5: inner air passage, 6:
Outside duct plate, 7: Outside air passage, 8: Air introduction port, 9: Air flow rate adjusting guide, 10: Air direction adjusting guide, 11: Hole part of perforated plate, 12: Blind part,
20: Air conditioner main body, 21: Air blowing duct,
22: Perforated plate forming a duct.

Front page continued (72) Inventor Misao Osawa 4-20-4 Hirayama Equipment Co., Ltd. in Yamato City, Kanagawa Prefecture Hirayama Equipment Co., Ltd. Within

Claims (7)

[Claims] 1. An air blowing duct extending along a ceiling surface in a clean room room, wherein an inner air passage formed by an inner duct plate extending in a longitudinal direction and a predetermined space are provided outside the inner duct plate. A double duct structure having an outer air passage formed by a porous outer duct plate provided, wherein the outer air passage is divided into a plurality of portions in a longitudinal direction at a predetermined interval, and each divided portion and An air blowing duct for a clean room, characterized in that the air duct communicates with the inner air passage through an air inlet formed in the inner duct plate. 2. The air introduction port is provided with an air flow rate adjusting guide projecting to the inner air passage side and an air direction adjusting guide extending to the outer air passage side. Clean room air blowout duct. 3. The air blowing duct for a clean room according to claim 1, wherein the porous outer duct plate forming the outer air passage has an overall opening ratio of 3 to 10%. 4. The air blower for a clean room according to claim 2, wherein the air flow rate adjusting guide is attached at an angle of 0 to 90 degrees facing the air flow. duct. 5. The duct for blowing air in a clean room according to claim 3, wherein the air-direction adjusting guide is attached at an angle of 90 degrees at a maximum so as to face the air flow. 6. The duct for blowing air in a clean room according to claim 2, wherein the air flow rate adjusting guide and the air direction adjusting guide are made of perforated plates. 7. The duct for blowing air in a clean room according to claim 6, wherein the aperture ratio of the perforated plate forming the air flow rate adjusting guide and the air direction adjusting guide is 20 to 60%.