JPH0968657A - Stage movement mechanism - Google Patents

Abstract

(57) [Abstract] [Problem] A horizontal displacement of an electromechanical conversion element
Efficiently and accurately, magnified and transmitted to vertical displacement,
The purpose is to move the stage up and down with high accuracy. SOLUTION: A pair of "U" -shaped displacement magnifying members for connecting two upper and lower flat plate stages, and an electromechanical conversion element at an intermediate position of the displacement magnifying members in parallel with the upper and lower flat plate stages. The electromechanical conversion element is arranged so as to sandwich both ends of the electromechanical conversion element at the intermediate position between the pair of displacement magnifying members.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micro displacement mechanism utilizing an electromechanical conversion element and a displacement magnifying mechanism which can be used, for example, in a stage of a microscope.

[0002]

2. Description of the Related Art FIG. 5 shows a conventional mechanism using an electromechanical conversion element and a displacement magnifying mechanism.

The upper stage 11 and the lower stage 12 are connected in a vertical direction B by linear guide guides 13 and 13 'which move with high precision, and an electromechanical transducer 14 (one example) is attached to the lower stage. And a horizontal displacement transmission member 16 are incorporated, and a vertical displacement transmission member 15 is incorporated in the upper stage.

With such a structure, the upper stage 11 moves up and down in the B direction due to the deformation of the electromechanical conversion element 14 (indicated by symbol A).

However, the deformation A of the electromechanical conversion element 14 is absorbed by the elasticity of the displacement transmitting members 15 and 16, and the minute displacement A of the electromechanical conversion element 14 cannot be efficiently expanded and transmitted to the upper stage 11. . Further, the deformation of the electromechanical conversion element 14 in the longitudinal direction also affects the upper stage, the upper stage easily moves in the horizontal direction, and the straightness in the vertical direction is poor.

[0006] Here, for example, a horizontal oscillation of about 0.5 μm occurs during vertical movement of the stage.

[0007]

SUMMARY OF THE INVENTION The present invention eliminates these problems and is capable of expanding and transmitting a small displacement of an electromechanical transducer element to an upper stage with a simple structure, at a small size and at low cost, and efficiently. The purpose is to realize the mechanism.

[0008]

FIG. 1 shows the configuration of the present invention.

The micro-displacement mechanism of the present invention comprises a pair of dog-legged displacement magnifying members 1 and 1 ', an electromechanical conversion element 2, a preload adjusting screw 3, an upper stage 4, and a lower stage. 5 and a fixing screw 6.

Here, the electromechanical conversion element 2 is securely sandwiched between the pair of "V" -shaped displacement magnifying members 1 and 1'without a gap.

As a result, when the electromechanical conversion element 2 expands and contracts in the longitudinal direction, the pair of displacement magnifying members 1 corresponding to the expansion and contraction.
Since the internal angle θ of the V-shape of 1 and 1 ′ changes, the upper stage consequently moves up and down efficiently and with high precision.

[0012]

1 and 2 are side views showing an embodiment of the present invention.

The micro-displacement mechanism of the present invention comprises a pair of V-shaped phosphor bronze having a thickness of 0.5 to 1 mm or ferrous displacement magnifying members 1 and 1 ', and an electric element such as a piezoelectric element. It comprises a mechanical conversion element 2, a preload adjusting screw 3, an upper stage 4, a lower stage 5, and a fixing screw 6. FIG. 4 is a plan view of FIGS. 1 and 2.

Here, the electromechanical conversion element 2 is securely sandwiched between the pair of "V" -shaped displacement magnifying members 1 and 1'without a gap.

As a result, when the electromechanical conversion element 2 expands and contracts in the longitudinal direction, the pair of displacement magnifying members 1 corresponding to the expansion and contraction.
Since the internal angle θ of the V-shape of 1 and 1 ′ changes, the upper stage consequently moves up and down efficiently and with high precision.

FIG. 2 shows a pair of "V" shaped displacement magnifying members 1 and 1 ', a piezoelectric element 2, a preload adjusting screw 3, an upper stage 4, a lower stage 5, and a fixing screw 6. It is composed of a movement amount adjusting spacer 7.

This operation will be described below.

When a voltage is applied to the electromechanical conversion element 2 from the outside (not shown), the electromechanical conversion element 2 expands and contracts in the longitudinal direction according to the voltage.

Therefore, the pair of "U" -shaped displacement magnifying members 1 and 1'symmetrically arranged at both ends of the electromechanical conversion device 2 have an internal angle θ of the "U" shape. Corresponding to the expansion and contraction of 2 (for example, 20μm to 100μ
m)

That is, when the electromechanical conversion element 2 extends, the displacement magnifying members 1 and 1 ′ have an internal angle θ of a V shape.
Is opened, the upper stage 4 is moved upward. Then, when the electromechanical conversion element 2 contracts, this is completely opposite, and the upper stage 4 is moved downward.

Here, the preload adjusting screw 3 is for adjusting the electromechanical conversion element 2 so as to be reliably sandwiched between the pair of "V" -shaped displacement magnifying members 1 and 1'without a gap.

As a mechanical method for varying the amount of movement of the upper stage 4, a method of changing the interior angle θ of the pair of "U" -shaped displacement magnifying members 1 and 1 ', and the displacement magnifying member 1 There may be a method of adjusting by changing the ratio of the lengths of the electromechanical conversion element 2 and the movement amount adjusting spacer 7 sandwiched between 1 and 1 '. In the present invention, the latter method, which does not require the remanufacturing of the displacement magnifying members 1 and 1 ', is an example.

Further, since the displacement magnifying members 1 and 1'are arranged symmetrically with respect to the electromechanical conversion element 2, and the electromechanical conversion element 2 has a degree of freedom other than in the longitudinal direction, the electromechanical conversion element is provided. The driving force from 2 is evenly transmitted to both ends of the upper stage 4. As a result, the upper stage 4 moves up and down with high accuracy while maintaining horizontal accuracy.

When it becomes necessary to replace the electromechanical conversion element 2 next, the electromechanical conversion element 2 can be easily removed by simply loosening the preload adjusting screw 3, and a new electromechanical conversion element can be removed in the reverse order. 2 should be incorporated.

As described above, the apparatus of the present invention has a feature that maintainability is very easy. Also, for example,
According to this embodiment, the horizontal fluctuation during vertical movement can be suppressed to 0.2 μm or less.

Next, another embodiment of the present invention will be described with reference to FIG.

When the movement amount of the upper stage 4 is set to be large, it is necessary to increase the expansion and contraction of the electromechanical conversion element 2. Therefore, the long electromechanical conversion element 2 is advantageous,
Structurally, it is possible to make the electromechanical conversion element 2 compact on the inside angle θ side of the displacement magnifying members 1 and 1 ′.

[0028]

According to the present invention, it is possible to realize a small-sized, inexpensive, highly accurate stage vertical movement mechanism with a simple structure.

[Brief description of drawings]

FIG. 1 is a simplified side view of the configuration of the present invention.

FIG. 2 is a simplified side view of an embodiment of the present invention.

FIG. 3 is a simplified side view of another embodiment of the present invention.

FIG. 4 is a schematic plan view of an embodiment of the present invention.

FIG. 5 is a schematic side view of a conventional example.

[Explanation of symbols]

1 and 1 ': Displacement magnifying member 2: Electromechanical conversion element
3: Preload adjusting screw 4: Upper stage 5: Lower stage 6: Fixing screw 7: Spacer adjusting spacer 11: Upper stage 12: Lower stage 13 and 13 ': Straight guide guide 14: Electromechanical conversion element 1
5: Vertical displacement transmitting member 16: Horizontal displacement transmitting member

Claims (1)

[Claims] 1. A pair of "U" -shaped displacement magnifying members connecting two upper and lower flat plate stages, and an electromechanical conversion element at an intermediate position of the displacement magnifying members in parallel with the upper and lower flat plate stages. Is arranged, and both ends of the electromechanical conversion element are fixed so as to be sandwiched at an intermediate position between the pair of displacement magnifying members.