JPH0980402A - Optical writing type spatial light modulating element and optical writing type spatial light modulating element - Google Patents

Abstract

(57) Abstract: Provided is a method for producing an optical addressing spatial light modulator excellent in contrast, sensitivity and resolution, and an optical addressing spatial light modulator. SOLUTION: A first transparent electrode 1, a photoconductive layer 2, a light absorption layer 3, a dielectric multilayer film 4, a liquid crystal / resin composite 5,
The second transparent electrode 6 and the transparent substrate 7 are sequentially stacked to form the first
In a method of manufacturing a photo-writing type spatial light modulator driven by an alternating voltage applied between a transparent electrode 1 and a second transparent electrode 6, a first transparent electrode 1, a photoconductive layer 2, a light absorbing layer 3 and A mixed liquid of liquid crystal and resin, which is a constituent material of the liquid crystal / resin composite 5, is sandwiched between a substrate on which the dielectric multilayer film 4 is laminated and a transparent substrate 7 on which the second transparent electrode 6 is laminated, and The liquid mixture / resin composite 5 is formed by photocuring the mixed liquid by irradiating from the transparent substrate 7 a narrow band ultraviolet ray having a wavelength near 365 nm and a half width of 25 nm or less.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to inputting two-dimensional optical information such as an image or a data pattern using writing light.
The present invention relates to an optical writing type spatial light modulator having a function of displaying by reading light, a projection type image display element using light intensity conversion, a wavelength conversion element of an optical image and incoherent light.
The present invention relates to a method for manufacturing an optical addressing spatial light modulator that can be applied to a coherent light converting element and the like, and an optical addressing spatial light modulator.

SUMMARY OF THE INVENTION The present invention relates to an optical writing type spatial light modulator capable of writing and reading two-dimensional optical information such as an image in parallel, which comprises a first transparent electrode, a photoconductive layer, A liquid crystal is formed between the substrate on which the light absorption layer and the dielectric multilayer film are laminated and the transparent substrate on which the second transparent electrode is laminated.
A liquid crystal, which is a constituent material of the resin composite, and a mixed liquid of a resin are sandwiched between them, and a central wavelength is around 365 nm and a half value width is 25 nm.
By irradiating the following narrow band ultraviolet rays from the transparent substrate side and photocuring the mixed liquid to form a liquid crystal / resin composite, the particle size of the liquid crystal constituting the liquid crystal / resin composite is 0.5.
It can be formed into a substantially uniform size in the range of μm to 3 μm.
This provides a method for producing an optical addressing spatial light modulator excellent in contrast, sensitivity and resolution, and an optical addressing spatial light modulator.

[0003]

2. Description of the Related Art Conventionally, as one of the optical writing type spatial light modulators using a light scattering liquid crystal layer having a high light transmittance without using a polarizing plate and a photoconductive layer, an optical writing type space shown in FIG. An optical modulator is known (reference: K. Takizawa, H. Kikuchi,
H. Fujikake, Society for Information Displays (SID)
International Symposium Digest of Technical Papers
Vol.22, p.250-p.253, 1991).

The photo-writing type spatial light modulator shown in this figure has a first transparent electrode 101 made of In ₂ O ₃ : Sn or the like, and a Bi ₁₂ laminated on the first transparent electrode 101.
A photoconductive layer 102 made of SiO ₂₀ or the like, a light absorption layer 103 laminated on the photoconductive layer 102, a dielectric multilayer film 104 laminated on the light absorption layer 103, and a dielectric multilayer film 104. Liquid crystal / resin composite 10 laminated on
5 and In ₂ O laminated on the liquid crystal / resin composite 105.
₃ : a second transparent electrode 106 composed of Sn or the like,
A transparent substrate (glass substrate) 107 for laminating the second transparent electrode 106 is provided.

The liquid crystal / resin composite 105 comprises a transparent resin 108 made of an epoxy resin or the like and liquid crystal droplets 109 made of a liquid crystal such as a nematic liquid crystal and dispersed and arranged in the transparent resin 108 in the form of droplets. I have it.

First transparent electrode 101 and second transparent electrode 106
AC power source for driving 1 via a lead wire 110 between
When the writing light 112 is incident from the left side of FIG. 7 with the driving AC power source 111 being applied with the AC voltage, the liquid crystal / resin composite body 105 is formed in accordance with the light intensity. Driven. At this time, when the reading light 113 is irradiated from the right side of FIG. 7, the written optical image is emitted as the display light (reflected light) 114.

By the way, the liquid crystal / resin composite body 103 of the above-mentioned conventional optical writing type spatial light modulator is formed as follows.

That is, a substrate in which the first transparent electrode 101, the photoconductive layer 102, the light absorption layer 103 and the dielectric multilayer film 104 are laminated is produced, and this substrate and the second transparent electrode 106 are prepared.
Ultraviolet rays 115 shown by a broken line in the figure are irradiated from the transparent substrate 107 side in a state that a mixed liquid of liquid crystal and resin is sandwiched between the transparent substrate 107 and the transparent substrate 107. This ultraviolet light 115
The resin is cured by the irradiation with the liquid crystal and the liquid crystal is dispersed in the form of small droplets to form the liquid crystal / resin composite 105.

[0009]

However, in the conventional optical writing type spatial light modulator, as shown in FIG. 7, the particle size of the liquid crystal droplets 109 forming the liquid crystal / resin composite 105 is small. Since there are variations, there were the following problems.

Since the liquid crystal / resin composite 105 has liquid crystal droplets 109 of various sizes, the liquid crystal droplets 109 are different from each other.
The drive voltage of each is different. Therefore, the light transmittance of the liquid crystal / resin composite 105 shows a gradual increase with respect to the applied voltage. Therefore, the liquid crystal / resin composite 105 is not sufficiently transparent and a high-contrast display image cannot be obtained only by changing the partial pressure between the photoconductive layer 102 and the liquid crystal / resin composite 105 due to light irradiation. . On the contrary, in order to obtain a sufficient contrast, strong writing light 112 is required, and there is a problem that the sensitivity is low.

Further, since the liquid crystal droplets 109 have a large variation in particle size and the largest size of the liquid crystal droplets 109 limits the limit resolution of the liquid crystal / resin composite 105, an ultra-high-definition display image can be displayed. There is a problem that you cannot get it.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a method of manufacturing an optical writing type spatial light modulator excellent in contrast, sensitivity and resolution, and an optical writing type spatial light modulator. To do.

[0013]

In order to achieve the above-mentioned object, the invention of claim 1 is such that the first transparent electrode and the first transparent electrode are laminated, and the impedance changes according to the intensity of incident light. A photoconductive layer, a light absorption layer laminated on the photoconductive layer, a dielectric multilayer film which is laminated on the light absorption layer and reflects light, and a dielectric multilayer film which is laminated on the dielectric multilayer film and which is preset. A liquid crystal / resin composite in which a nematic liquid crystal, a cholesteric liquid crystal, a smectic liquid crystal, or a mixed liquid crystal of these liquid crystals is dispersed in a transparent resin having a refractive index that is equal to this transparent resin, and this liquid crystal At least a second transparent electrode laminated on the resin composite and a transparent substrate laminated on the second transparent electrode are provided, and by an alternating voltage applied between the first transparent electrode and the second transparent electrode. Driven In the method of manufacturing an optical writing type spatial light modulator according to claim 1, a substrate on which the first transparent electrode, a photoconductive layer, a light absorbing layer and a dielectric multilayer film are laminated, and a transparent substrate on which the second transparent electrode is laminated. By interposing a mixed liquid of a liquid crystal and a resin, which is a constituent material of the liquid crystal / resin composite, between and, and irradiating narrow band ultraviolet rays having a central wavelength of around 365 nm and a half value width of 25 nm or less from the transparent substrate side. It is characterized in that the liquid mixture is photocured to form a liquid crystal / resin composite.

According to a second aspect of the present invention, there is provided a method of manufacturing the optical writing type spatial light modulator according to the first aspect, wherein the liquid crystal
The transparent resin that constitutes the resin composite is characterized by being an acrylic resin, a methacrylic resin, an epoxy resin, a urethane resin, polystyrene, polyvinyl alcohol, or a copolymer of these, the polymerization of which is accelerated by light irradiation.

According to a third aspect of the present invention, in the method for manufacturing the optical writing type spatial light modulator according to the first or second aspect, as the liquid crystal constituting the liquid crystal / resin composite, a cyanobiphenyl liquid crystal or a terphenyl liquid crystal is used. Liquid crystal, pyridine-based liquid crystal,
It is characterized by using either a pyrimidine-based liquid crystal or a tolan-based liquid crystal.

According to a fourth aspect of the present invention, a first transparent electrode, a photoconductive layer which is laminated on the first transparent electrode and whose impedance changes according to the intensity of incident light, and a photoconductive layer which is laminated on the photoconductive layer. A light absorbing layer, a dielectric multilayer film that is laminated on the light absorbing layer and reflects light, and a transparent resin that is laminated on the dielectric multilayer film and has a preset refractive index are equivalent to this transparent resin. A nematic liquid crystal having an ordinary light refractive index, a cholesteric liquid crystal, a smectic liquid crystal, or a liquid crystal / resin composite in which a mixed liquid crystal of these liquid crystals is dispersed,
An optical writing type spatial light modulator including at least a second transparent electrode laminated on the liquid crystal / resin composite, which is driven by an AC voltage applied between the first transparent electrode and the second transparent electrode. The liquid crystal constituting the liquid crystal / resin composite is characterized in that the liquid crystal is formed to have a substantially uniform size in the range of 0.5 μm to 3 μm.

According to a fifth aspect of the present invention, in the spatial light modulator of the optical writing type according to the fourth aspect, the transparent resin constituting the liquid crystal / resin composite is an acrylic resin or methacrylic acid whose polymerization is accelerated by light irradiation. It is characterized by being a resin, an epoxy resin, a urethane resin, polystyrene, polyvinyl alcohol, or a copolymer thereof.

According to a sixth aspect of the present invention, in the optical writing type spatial light modulator according to the fourth or fifth aspect, the liquid crystal constituting the liquid crystal / resin composite is cyanobiphenyl liquid crystal, terphenyl liquid crystal, pyridine. It is characterized in that any one of a series liquid crystal, a pyrimidine series liquid crystal, and a tolan series liquid crystal is used.

[0019]

BEST MODE FOR CARRYING OUT THE INVENTION

<< Overall Structure >> FIG. 1 is a configuration diagram showing an embodiment of an optical writing type spatial light modulator according to the present invention. The optical writing type spatial light modulator shown in this figure includes a first transparent electrode 1, a photoconductive layer 2, a light absorption layer 3, a dielectric multilayer film 4, a liquid crystal / resin composite 5, and a second transparent electrode. The electrode 6 and the transparent substrate 7 are provided, and the photoconductive effect of the photoconductive layer 2 is induced from the left side of FIG. 1 in a state where an AC voltage is applied from a driving AC power source 9 via a lead wire 8. When the writing light 10 for writing is incident, the liquid crystal / resin composite 5 is driven according to the light intensity of the writing light 10, while when the reading light 11 is irradiated from the right side of FIG. Image is display light (reflected light)
It is emitted as 12.

The first transparent electrode 1 is a thin film of In ₂ O ₃ : Sn or the like adhered to one surface of the photoconductive layer 2 by a method such as vapor deposition, and one of the driving AC power supplies 9 is connected via the lead wire 8. Connected to the voltage output terminal of.

The photoconductive layer 2 is made of Bi ₁₂ SiO ₂₀ , B whose electrical impedance decreases with the incidence of the writing light 10.
i ₁₂ GeO ₂₀ , CdS, Se, amorphous Se, S
i, amorphous Si, amorphous SiC, SeT
e, amorphous SeTe, SeAs, amorphous S
It is a layer made of a material such as eAs, GaAs or GaP, one surface side of which is adhered to the first transparent electrode 1,
The other surface side is in close contact with the light absorption layer 3.

The light absorption layer 3 is one or more films selected from the group consisting of a CdTe film, a diamond-like carbon film, an amorphous film substantially composed of silicon, carbon and germanium, or an inorganic pigment. , A resin composite in which one or more materials selected from the group consisting of organic pigments, carbon, and dyes are dispersed in a resin.

The dielectric multilayer film 4 is made of SiO ₂ film or TiO ₂ film.
Film, HfO ₂ film, Ta ₂ O ₅ film, ZnS film, Al ₂ O ₃
Film, Na ₂ AlF ₆ film, MgF ₂ film, LaF ₃ film, Gd
F ₃ film, SmF ₃ film, CeF ₃ film, ZrO ₂ film and C
One of the eO ₂ films or a multilayer film in which two or more films selected from the above are laminated.

Further, the liquid crystal / resin composite 5 comprises a transparent resin 13 formed in a plate shape and liquid crystal droplets 14 which are dispersed in the transparent resin 13 substantially uniformly. It functions as a light modulation layer of the spatial light modulator.

Particularly, in this embodiment, the liquid crystal
The particle size of the liquid crystal droplets 14 forming the resin composite 5 is 0.5.
The size is controlled to be almost uniform in the range of μm to 3 μm. A method for producing the liquid crystal / resin composite 5 for forming uniform liquid crystal droplets will be described later.

Further, the liquid crystal as the liquid crystal constituting the droplet 14, a good thing refractive index n _p equivalent value of the ordinary refractive index n _o is a transparent resin 13. Further, the refractive index anisotropy Δ of this liquid crystal
It is desirable that n (= n _e −n _o ) be as large as possible.

As the liquid crystal satisfying such conditions, nematic liquid crystal having a large refractive index anisotropy Δn, cholesteric liquid crystal, smectic liquid crystal, or a mixed liquid crystal of these liquid crystals is used. However, a nematic liquid crystal having low viscosity and high elasticity is suitable for obtaining high speed. Among them, nematic liquid crystals of cyanobiphenyl type, terphenyl type, pyridine type, pyrimidine type and tolan type having a large refractive index anisotropy Δn are particularly suitable.

Further, as the transparent resin 13, polymerization is promoted by ultraviolet rays, and the refractive index n _p at the time of curing is 1.52.
Degree acrylic resin, methacrylic resin, epoxy resin,
A urethane resin, polystyrene, polyvinyl alcohol, or a copolymer thereof (for example, an acrylic / urethane copolymer) is suitable.

The second transparent electrode 6 is a thin film of In ₂ O ₃ : Sn or the like adhered to one surface of the transparent substrate 7 by a method such as vapor deposition, and the other of the driving AC power source 9 is connected via the lead wire 8. Connected to the voltage output terminal.

The transparent substrate 7 is a portion which becomes a substrate of this optical writing type spatial light modulator, and is made of glass having high transparency and excellent flatness, or synthetic resin such as acryl. The second transparent electrode 6 is laminated on one surface side thereof.

<< Method of Manufacturing Liquid Crystal / Resin Composite 5 >>
A procedure for producing the liquid crystal / resin composite 5 will be described. First, the first transparent electrode 1, the photoconductive layer 2, the light absorbing layer 3,
A substrate in which the dielectric multilayer film 4 is sequentially laminated is manufactured, and the transparent electrode 6 is laminated on the transparent substrate 7. Next, the transparent substrate 7 in which the manufactured substrate and the second transparent electrode 6 are laminated
And a mixed liquid of a liquid crystal and a resin, which is a constituent material of the liquid crystal / resin composite 5, are sandwiched between and, and the central wavelength is around 365 nm.
By irradiating the transparent substrate 7 with narrow-band ultraviolet rays having a half-value width of 25 nm or less, the liquid mixture is photocured and liquid crystal
The resin composite 5 is formed.

That is, as shown in FIG. 2, the ultraviolet ray 16A irradiated from the high-pressure mercury xenon lamp 15 is converted into a narrow-band ultraviolet ray 16B having a central wavelength of 365 nm at which the resin material is most easily polymerized by the bandpass filter 17.
Are extracted and irradiated from the transparent substrate 7 side. As a result, the components of the transparent resin 13 are polymerized, and uniform and fine liquid crystal droplets 14 are deposited / fixed in the transparent resin 13 to form the liquid crystal / liquid crystal composite 5.

At this time, if ultraviolet rays far outside the center wavelength are incident, the polymerization reaction is affected and it becomes difficult to form uniform and minute liquid crystal droplets 14. In particular, the ultraviolet light having a wavelength shorter than the central wavelength is transmitted through the transparent resin 13
It is strongly absorbed by and is thought to have a great influence. Therefore, in addition to removing ultraviolet rays having a short wavelength largely deviating from the central wavelength of 365 nm, the wavelength band of the ultraviolet rays 16B to be irradiated is preferably as narrow as possible around the wavelength at which the resin material is most easily polymerized.

Therefore, considering the decrease in the total ultraviolet power, the half width of the irradiated ultraviolet rays 16B is 2
It was concluded that 5 nm or less is preferable.

In the method for producing the liquid crystal / resin composite 5 under such conditions, the size of the liquid crystal droplets 14 is such that the ultraviolet intensity at the central wavelength, which is most sensitive to the resin material, is high, and the transparent resin 1
The faster the curing of No. 3, the finer. In order to obtain high resolution, minute liquid crystal droplets 14 are indispensable, and since the smaller the liquid crystal droplets 14 are, the more uniform the particle size is. Therefore, rapid formation of the liquid crystal / resin composite 5 is desirable.

However, in order to scatter visible light of various wavelengths almost uniformly, it is necessary to set the particle size of the liquid crystal droplets 14 to 0.5 μm or more. On the other hand, if it is too large, the resolution and the scattering amount decrease. Therefore, 0.5 to 3 μm is suitable for practical use. Further, the film thickness of the liquid crystal / resin composite 5 is preferably 3 μm or more in order to obtain sufficient light scattering. In practice,
About 5 to 20 μm is suitable.

When the liquid crystal / resin composite 5 is produced, if the composition ratio of the liquid crystal forming the liquid crystal droplets 14 to the transparent resin 13 is large, the liquid crystal droplets 14 are connected to each other and are transparent. The resin 13 may have a spongy body shape or a three-dimensional mesh structure. Further, since most of the liquid crystal / resin composites 5 in which the liquid crystal is dispersed are self-supporting, the film thickness can be easily controlled and the area can be increased.
However, when the transparent resin 13 is soft, spherical or fiber spacers may be provided on the side surface or the entire surface of the liquid crystal / resin composite 5 to support the liquid crystal / resin composite 5.

[0038]

EXAMPLE As a sample of a liquid crystal / resin composite produced as an example, a nematic liquid crystal having a large refractive index anisotropy (Merck Japan BL Co., Ltd.) was used between _two transparent electrodes (made of In ₂ O ₃ : Sn). -008, n _o = 1.527,
n _e = 1.807) and a photo-curable acrylic urethane resin (NOA-65 manufactured by Norland Products Co., n _p = 1.807).
524) was mixed and stirred at a weight ratio of 1: 1 and 0.1 w% of a spherical spacer having a diameter of 10 μm was added, and then the spacer was sandwiched between glass substrates provided with transparent electrodes.

Next, a narrow band ultraviolet ray is transparent from a 2 kW high pressure mercury xenon lamp using a narrow band pass filter having a spectral characteristic of transmittance (center frequency 365 nm, half width 24 nm) as shown in FIG. Irradiation from the electrode side formed a liquid crystal / resin composite.

As a result of observing the thus prepared liquid crystal / resin composite with an electron microscope, it was confirmed that uniform and fine liquid crystal droplets having a particle diameter of 2 μm or less were formed.

Comparative Example On the other hand, a liquid crystal / resin composite prepared by directly irradiating broad band ultraviolet rays from a high pressure mercury xenon lamp without using a bandpass filter was used as a comparative example. Observation of this liquid crystal / resin composite with an electron microscope revealed that the liquid crystal droplets were not uniform in particle size but varied in size, and large liquid crystal droplets of 4 μm or more were also formed. .

FIG. 4 shows the relationship between the light transmittance (%) of the liquid crystal / resin composite 5 and the applied voltage (V _rms ), and the solid line shows the present embodiment prototyped using a narrow bandpass filter. The liquid crystal / resin composite of the example and the broken line show the liquid crystal / resin composite 5 of the comparative example in which a bandpass filter is not used.

As can be seen from FIG. 4, it was shown that the rising characteristics of the liquid crystal / resin composite 5 can be made steep by irradiating the ultraviolet rays in a narrow band using a bandpass filter. Furthermore, since the liquid crystal droplets are finely dispersed by the narrow-band ultraviolet light, the extinction ratio (= transmission in the transparent state: transmission in the opaque state) is also about 20: 1 to 1
It was greatly improved to 30: 1. Note that, as shown in FIG. 4, in the present embodiment, the particle size of the liquid crystal droplets decreases and the applied voltage required for light modulation increases, but in the optical writing type spatial light modulation element, the entire element is driven. There is no particular problem as the voltage can be increased.

<< Operation of Optical Writing Type Spatial Light Modulating Element >> Next, the operation of the optical writing type spatial light modulating element shown in FIG.
And FIG. As shown in FIG. 5, when driving this spatial light modulator of the optical writing type, the first transparent electrode 1
The second transparent electrode 6 and the
Connected to. The writing light (input light) 10 is applied to the photoconductive layer 2
It is incident from the side. On the other hand, the readout light 11 is incident from the liquid crystal / resin composite 5 side and undergoes light intensity modulation accompanied by light scattering in the liquid crystal / resin composite 5. Modulated read light 11
Is reflected by the dielectric multilayer film 4 and becomes display light 12. The read light 11 leaking from the dielectric multilayer film 4 is absorbed by the light absorption layer 3.

At this time, whether the writing light 10 is extremely weak,
Alternatively, when no light is incident, most of the driving voltage is applied to the photoconductive layer 4 side having higher electrical impedance than the liquid crystal / resin composite 5. Therefore, the alignment direction (orientation) of the liquid crystal molecules of the liquid crystal / resin composite 5 becomes irregular for each liquid crystal droplet 14 due to the regulating force of the resin interface.

As a result, the readout light 11 is emitted by the liquid crystal droplets 14
Due to the mismatch of the refractive indexes of the transparent resin 13 and the transparent resin 13, the light is repeatedly reflected and refracted and strongly scattered.

On the other hand, as shown in FIG. 6, when the writing light 10 having a sufficient intensity is incident, the electric impedance of the photoconductive layer 2 is lowered, so that a part of the voltage distributed to the photoconductive layer 2 is reduced. Moves to the liquid crystal / resin composite 5 side.

At this time, since the size of each liquid crystal droplet 14 is uniform, the orientation of the liquid crystal molecules (positive dielectric anisotropy) in each liquid crystal droplet 14 is aligned in the electric field direction at once. For this reason,
The refractive index of the liquid crystal droplets 14 are closer to the ordinary refractive index n _o, it becomes equal to the refractive index n _p of the transparent resin 13. As a result, the refractive index mismatch is eliminated, the liquid crystal / resin composite 5 is changed to transparent, and the read light 11 that has entered is reflected by the dielectric multilayer film 4 and emitted.

Here, if only the specularly reflected display light 12 is taken out by the optical system, an optical image of the display light 12 modulated by the writing light 10 can be obtained, and the intensity and wavelength of the optical image can be converted. It will be possible.

At this time, since the light transmittance versus applied voltage curve of the liquid crystal / resin composite 5 rises steeply, it is possible to obtain the display light 12 having a high contrast ratio with the weak writing light 10.

Further, when the liquid crystal / resin composite 5 is manufactured, the liquid crystal droplets 14 constituting the liquid crystal / resin composite 5 can be made uniform and microscopic by irradiating the narrow band ultraviolet rays 16B. The resolution of the spatial light modulator is also increased at the same time.

The optical writing type spatial light modulator described above can also be used as a projection type image display element having a light intensity converting function, a wavelength converting element for an optical image and an incoherent light / coherent light converting element. is there.

[0053]

As described above, according to the present invention, it is possible to obtain an optical writing type spatial light modulator excellent in contrast, sensitivity and resolution.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an embodiment of an optical writing type spatial light modulator according to the present invention.

FIG. 2 is an explanatory view showing an example of a method for manufacturing an optical writing type spatial light modulator according to the present invention.

FIG. 3 is an explanatory diagram showing an experimental result of a transmission spectral characteristic of an ultraviolet bandpass filter used for manufacturing an optical writing type spatial light modulator according to the present invention.

FIG. 4 is an explanatory diagram showing an experimental result of the relationship between the light transmittance and the applied voltage of the liquid crystal / resin composite shown in FIG.

5 is an explanatory diagram showing an operation example of the optical writing type spatial light modulator shown in FIG. 1. FIG.

FIG. 6 is an explanatory diagram showing an operation example of the optical writing type spatial light modulator shown in FIG. 1.

FIG. 7 is a configuration diagram showing an example of a conventionally known optical writing type spatial light modulator.

[Explanation of symbols]

 1 First Transparent Electrode 2 Photoconductive Layer 3 Light Absorption Layer 4 Dielectric Multilayer Film 5 Liquid Crystal / Resin Composite 6 Second Transparent Electrode 7 Transparent Substrate 8 Lead Wire 9 AC Power Supply for Driving 10 Writing Light 11 Reading Light 12 Display Light 13 Transparent resin 14 Liquid crystal droplets 15 High-pressure mercury xenon lamp 16A UV 16B Narrow band UV 17 Bandpass filter

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Kikuchi 1-10-11 Kinuta, Setagaya-ku, Tokyo Inside the broadcasting technology laboratory of Japan Broadcasting Corporation (72) Inventor Takanori Fujii 1-10-11 Kinuta, Setagaya-ku, Tokyo (72) Inventor Masahiro Kawakita 1-10-11 Kinuta, Setagaya-ku, Tokyo Inside Broadcasting Technology Institute, Japan Broadcasting Corporation

Claims (6)

[Claims] 1. A first transparent electrode, a photoconductive layer laminated on the first transparent electrode, the impedance of which changes according to the intensity of incident light, and a light absorption layer laminated on the photoconductive layer. A dielectric multilayer film that is laminated on this light absorption layer and reflects light, and a transparent resin that is laminated on this dielectric multilayer film and has a preset refractive index, and has an ordinary light refractive index equivalent to this transparent resin. A nematic liquid crystal, a cholesteric liquid crystal, a smectic liquid crystal, or a liquid crystal / resin composite in which a mixed liquid crystal of these liquid crystals is dispersed, a second transparent electrode laminated on the liquid crystal / resin composite, and a second transparent electrode. A transparent substrate laminated on the first transparent electrode, and a method for manufacturing an optical writing type spatial light modulator driven by an AC voltage applied between the first transparent electrode and the second transparent electrode. A liquid crystal which is a constituent material of the liquid crystal / resin composite between a substrate on which a transparent electrode, a photoconductive layer, a light absorption layer and a dielectric multilayer film are laminated and the transparent substrate on which the second transparent electrode is laminated. A liquid crystal / resin composite is formed by sandwiching a liquid mixture of a resin and a resin, and photocuring the liquid mixture by irradiating narrow band ultraviolet rays having a central wavelength of about 365 nm and a half width of 25 nm or less from the transparent substrate side. A method of manufacturing an optical writing type spatial light modulator, comprising: 2. The method for manufacturing an optical writing type spatial light modulator according to claim 1, wherein the transparent resin forming the liquid crystal / resin composite is an acrylic resin, a methacrylic resin, the polymerization of which is accelerated by light irradiation,
A method for producing a spatial light modulator of optical writing type, characterized by being an epoxy resin, urethane resin, polystyrene, polyvinyl alcohol, or a copolymer thereof. 3. The method for manufacturing a spatial light modulator of optical writing type according to claim 1, wherein the liquid crystal constituting the liquid crystal / resin composite is cyanobiphenyl liquid crystal, terphenyl liquid crystal, pyridine liquid crystal. And a pyrimidine-based liquid crystal, or a tolan-based liquid crystal is used for manufacturing a photo-writing type spatial light modulator. 4. A first transparent electrode, a photoconductive layer which is laminated on the first transparent electrode and whose impedance changes according to the intensity of incident light, and a light absorption layer which is laminated on the photoconductive layer. A dielectric multilayer film that is laminated on this light absorption layer and reflects light, and a transparent resin that is laminated on this dielectric multilayer film and has a preset refractive index, and has an ordinary light refractive index equivalent to this transparent resin. At least a nematic liquid crystal, a cholesteric liquid crystal, a smectic liquid crystal, or a liquid crystal / resin composite in which a mixed liquid crystal of these liquid crystals is dispersed, and a second transparent electrode laminated on the liquid crystal / resin composite, In the optical writing type spatial light modulator driven by an AC voltage applied between the first transparent electrode and the second transparent electrode, the particle size of the liquid crystal constituting the liquid crystal / resin composite is 0.5.
An optical writing type spatial light modulator characterized by being formed to have a substantially uniform size in the range of μm to 3 μm. 5. The spatial light modulator of the optical writing type according to claim 4, wherein the transparent resin forming the liquid crystal / resin composite is an acrylic resin, a methacrylic resin, the polymerization of which is accelerated by light irradiation,
An optical writing type spatial light modulator which is made of an epoxy resin, a urethane resin, polystyrene, polyvinyl alcohol, or a copolymer thereof. 6. The spatial light modulator of optical writing type according to claim 4, wherein the liquid crystal constituting the liquid crystal / resin composite is cyanobiphenyl liquid crystal, terphenyl liquid crystal, pyridine liquid crystal, pyrimidine liquid crystal. An optical writing type spatial light modulator characterized by using either liquid crystal or tolan-based liquid crystal.