JPH10135148A5 - - Google Patents

Info

Publication number
JPH10135148A5
JPH10135148A5 JP1996305957A JP30595796A JPH10135148A5 JP H10135148 A5 JPH10135148 A5 JP H10135148A5 JP 1996305957 A JP1996305957 A JP 1996305957A JP 30595796 A JP30595796 A JP 30595796A JP H10135148 A5 JPH10135148 A5 JP H10135148A5
Authority
JP
Japan
Prior art keywords
thin film
semiconductor thin
irradiation system
film
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996305957A
Other languages
English (en)
Japanese (ja)
Other versions
JP3763908B2 (ja
JPH10135148A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP30595796A priority Critical patent/JP3763908B2/ja
Priority claimed from JP30595796A external-priority patent/JP3763908B2/ja
Publication of JPH10135148A publication Critical patent/JPH10135148A/ja
Publication of JPH10135148A5 publication Critical patent/JPH10135148A5/ja
Application granted granted Critical
Publication of JP3763908B2 publication Critical patent/JP3763908B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP30595796A 1996-10-30 1996-10-30 レーザー照射システム Expired - Lifetime JP3763908B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30595796A JP3763908B2 (ja) 1996-10-30 1996-10-30 レーザー照射システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30595796A JP3763908B2 (ja) 1996-10-30 1996-10-30 レーザー照射システム

Publications (3)

Publication Number Publication Date
JPH10135148A JPH10135148A (ja) 1998-05-22
JPH10135148A5 true JPH10135148A5 (de) 2004-10-21
JP3763908B2 JP3763908B2 (ja) 2006-04-05

Family

ID=17951337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30595796A Expired - Lifetime JP3763908B2 (ja) 1996-10-30 1996-10-30 レーザー照射システム

Country Status (1)

Country Link
JP (1) JP3763908B2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000260995A (ja) * 1999-03-10 2000-09-22 Matsushita Electric Ind Co Ltd 薄膜半導体装置の製造方法
US7402467B1 (en) 1999-03-26 2008-07-22 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a semiconductor device
JP4588167B2 (ja) * 2000-05-12 2010-11-24 株式会社半導体エネルギー研究所 半導体装置の作製方法
WO2002025739A1 (en) * 2000-09-21 2002-03-28 Matsushita Electric Industrial Co.,Ltd. Thin-film transistor, and liquid crystal display and electroluminescence display which comprise it

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