JPH10135148A5 - - Google Patents
Info
- Publication number
- JPH10135148A5 JPH10135148A5 JP1996305957A JP30595796A JPH10135148A5 JP H10135148 A5 JPH10135148 A5 JP H10135148A5 JP 1996305957 A JP1996305957 A JP 1996305957A JP 30595796 A JP30595796 A JP 30595796A JP H10135148 A5 JPH10135148 A5 JP H10135148A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- semiconductor thin
- irradiation system
- film
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30595796A JP3763908B2 (ja) | 1996-10-30 | 1996-10-30 | レーザー照射システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30595796A JP3763908B2 (ja) | 1996-10-30 | 1996-10-30 | レーザー照射システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10135148A JPH10135148A (ja) | 1998-05-22 |
| JPH10135148A5 true JPH10135148A5 (fr) | 2004-10-21 |
| JP3763908B2 JP3763908B2 (ja) | 2006-04-05 |
Family
ID=17951337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30595796A Expired - Lifetime JP3763908B2 (ja) | 1996-10-30 | 1996-10-30 | レーザー照射システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3763908B2 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000260995A (ja) * | 1999-03-10 | 2000-09-22 | Matsushita Electric Ind Co Ltd | 薄膜半導体装置の製造方法 |
| US7402467B1 (en) | 1999-03-26 | 2008-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
| JP4588167B2 (ja) * | 2000-05-12 | 2010-11-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| WO2002025739A1 (fr) * | 2000-09-21 | 2002-03-28 | Matsushita Electric Industrial Co.,Ltd. | Transistor en mince couche ainsi qu'un afficheur a cristaux liquides et un afficheur electroluminescent contenant ce transistor |
-
1996
- 1996-10-30 JP JP30595796A patent/JP3763908B2/ja not_active Expired - Lifetime
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