JPH10151592A - Hand automatic exchange system and device for carrier robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a hand automatic exchange system and a device for a carrier robot capable of corresponding to a variety of an FA system by automatically exchanging a hand fit to various kinds of thin substrates. SOLUTION: A cassette 2 and a cassette 3 in which substrates W are stored and a hand stocker 4 are provided in parallel on a frame 1. A robot 6 is arranged free to move in such a way as to face against the cassettes 2, 3 and the hand stocker 4. A robot hand part 8 is arranged on the robot 6, a fixed side hand 20 and an exchange hand 40 are provided on the robot hand 8, the exchange hand 40 is constituted free to be connected to and disconnected from the fixed side hand 20. Various kinds of the exchange hands 40 are arranged in the hand stocker 4, and the exchange hands 40 are connected and disconnected by a clamp means and a clamp driving means arranged on the fixed side hand 20 at a position of an exchange stage A.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer robot installed in a clean room, and more particularly, to a system and an apparatus for automatically changing the hand of a robot for sucking and holding a thin substrate.

[0002]

2. Description of the Related Art Conventionally, when processing or transporting a thin substrate such as a glass substrate or a silicon wafer, since the thin substrate is particularly resistant to contamination, the work is usually performed in a clean room. With an increase in demand for thin substrates and an improvement in product quality, clean rooms have been required to adopt FA, and it has been necessary to respond to diversification of systems. On the other hand, a transfer robot is arranged in the clean room, and the work of centering the thin substrate stored in the cassette and transferring it to the next process is performed. Therefore, the transport robot also needs to automatically select and transport various types of thin substrates in order to respond to diversification of the system.

[0003] The transfer robot is provided with a robot hand unit including a plurality of arms for moving the thin substrate. An example of the conventional robot hand unit 50 is:
As shown in FIG. 9, it is composed of a hand 51 at the distal end, which is driven by a drive unit of the robot and sucks and holds the thin substrate, and two arms 52 and 53 connected to the hand 51 and capable of bending and stretching. The hand 51 includes a hand body 51
a and the hand support 51b.
b is pivotally attached to the arm 52, and is fixed to the arm support part 51b with a bolt to the hand main body part 51a.

[0004]

However, in the conventional hand 51, since the hand main body 51a is connected to the hand support 51b by bolts as described above, each of the conventional hands 51 is compatible with various types of thin substrates. Hands had to be replaced manually.

The present invention has been made to solve the above-mentioned problems, and is intended to cope with FA and diversification of systems by automatically exchanging hands compatible with various thin substrates. It is an object of the present invention to provide an automatic hand exchange system and apparatus for a transfer robot for that purpose.

[0006]

SUMMARY OF THE INVENTION An automatic hand exchange system and apparatus for a transfer robot according to the present invention are configured as follows to solve the above-mentioned problems.
In other words, this system includes at least a cassette for accommodating thin substrates, a hand stocker for accommodating a plurality of exchange hands, and a hand exchange system for transporting the thin substrates and located near the hand stocker. A robot that can be moved to a stage, and a hand automatic exchange system for a transfer robot provided with the exchange robot, wherein the robot has an exchange hand that sucks and holds the thin substrate, and a fixed hand that accommodates the exchange hand. And the exchange hand is configured to be detachable by hand attachment / detachment means, and the exchange hand is arranged so as to be stowable in the fixed side hand of the robot by the hand stocker, and in the hand exchange stage, The exchange hand on the robot side can be exchanged with the exchange hand on the hand stocker side. It is characterized in that the serial robot is driven.

[0007] Preferably, the attaching / detaching means includes a clamp means and a clamp driving means disposed on the fixed hand, and a clamped means disposed on the exchange hand. What is necessary is just the thing which has the characteristic.

In this apparatus, a robot for transporting a thin substrate includes a robot hand for sucking and holding the thin substrate.
And a machine base on which a drive unit of the robot hand unit is disposed, wherein the robot hand unit includes a hand unit including an exchange hand and a fixed hand, An automatic exchange device, wherein the fixed hand includes a clamp unit that clamps the exchange hand to the fixed hand, and a clamp drive unit that drives the clamp unit, wherein the exchange hand sucks a thin substrate. A hand body to be gripped, and a clamped means to be engaged with the clamp means,
Detection means for detecting attachment / detachment of the exchange hand to / from the fixed hand is provided.

Further, the system and the apparatus are preferably such that the clamping means is constituted by a link mechanism having at least two links.

It is further preferable that the clamped means has a clamp surface which can be engaged with a roller provided on the link.

Further, the apparatus may be characterized in that the detecting means has a sensor for presence / absence of a hand.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a partial schematic view of a transport system for transporting a thin substrate (hereinafter, referred to as a substrate) W.
A cassette 2 in which the substrates W are stored on the gantry 1 and a cassette 3 in which the substrates W stored in the cassette 2 are transported and stored are arranged side by side. Further, the hand stocker 4 accommodates a plurality of exchange hands 40 and is arranged so as to be arranged side by side on the cassettes 2 and 3 at intervals. A transport rail 5 is disposed so as to face the cassette 2, the cassette 3, and the hand stocker 4 in parallel, and a horizontal articulated transport robot (hereinafter, referred to as a robot) 6 is movably disposed on the transport rail 5. I have.

The robot 6 has a machine base 7 on which a drive unit is disposed.
And a robot hand unit 8 disposed on the machine base 7 for sucking and holding the substrate W.
Is moved from a position facing the hand stocker 5 to a position (hand exchange stage) A facing the hand stocker 5. The robot hand unit 8 of the robot 6 includes two arms 9A and 9B having joints and arranged to bend and extend, and a hand 10 detachably arranged to the distal arm 9B. It is configured.

The hand 10 is, as shown in FIGS.
The fixed hand 20 includes a fixed hand 20 and an exchange hand 40. The fixed hand 20 is rotatably connected to the arm 9B. The exchange hand 40 is formed so as to be disposed on the hand stocker and detachably attached to the fixed hand 20. Is done. In addition,
FIG. 1 shows a state in which the exchange hand 40 is detached from the fixed hand 20.

As shown in FIGS. 4 and 5, the fixed side hand 20 includes a support arm 21 connected to the arm 9B, and a clamp driving means disposed on the support arm 21 and formed in a circular shape at the top. Cylinder chamber 22a and clamp chamber 2
The main body frame 22 includes a passage 22c provided with a sensor, an electric wire, an air pipe, and the like at a lower portion. The cylinder chamber 22a and the clamp chamber 22b are shut off by a central wall 23. An end face of the clamp chamber 22b of the main body frame 22 on the exchange hand 20 side is formed with a step-like joint surface 22d for joining with almost no gap with the exchange hand 20, and a seal member is provided on an inner peripheral surface of the step-like joint surface 22d. 28 are provided.

Further, a clamp drive shaft 24 (clamp means) is provided movably in the axial direction so as to be fitted to the center of the central wall 23. One end of the clamp drive shaft 24 is disposed in the cylinder chamber 22a,
2a, the other end of the clamp drive shaft 24 is disposed in the clamp chamber 22b and clamps the exchange hand 40 (3 in this embodiment).
) Clampers 30 (clamping means).

An air chamber 27 is formed in the cylinder chamber 22a so that compressed air is filled between the central wall 23 and the piston 25, and a coil spring for urging the piston 25 toward the clamp chamber 22b. 26 are provided.

The clampers 30 are disposed at three positions in a direction orthogonal to the clamp drive shaft 24, and the three pivoting portions 3 are provided.
A first link 31 having the first link 1a and directly fitted to the clamp drive shaft 24, and a "-" shape in which one end is pivotally attached to the pivotal connection portion 31a of the first link 31 and the other end is supported by the clamp roller 34. And a third link 33 having one end pivotally connected to the center of the second link 32 and the other end rotatably supported by the clamp chamber 22b.

Therefore, the clamp drive shaft 24 is connected to the air chamber 2.
7 is sucked by a vacuum (not shown), the biasing force of the coil spring 26 causes the clamp chamber 22 b
When the compressed air is filled in the air chamber 27 of the cylinder chamber 22a, the clamp drive shaft 24 moves the cylinder against the urging force of the coil spring 26. It is moved to the chamber 22a side (to the right in FIG. 4) to be in an unclamped state.

A hand presence / absence sensor 36 is provided in the passage 22c, and an automatic detachable connector 37 and an air connection port 38 for sucking the substrate W are provided on the hand side end surface of the passage 22c. An electric wire and an air pipe are inserted into 22c.

The exchange hand 40 is shown in FIGS.
As shown in FIG. 5, the hand body 41 is formed in a fork shape, and a clamped body portion 42 is provided on the hand body 41. The clamped body portion 42 is formed in an L-shaped side surface. The clamp chamber 22 of the fixed hand 20
A clamped chamber 43 having a round shape having a hollow portion is provided so as to face b, and a base portion 44 having a hollow portion formed at a lower portion is provided.

The clamped chamber 43 has an outer wall 45 in which a round opening 45a is formed on the fixed hand 20 side, and a tapered clamp surface 46 is formed on the back surface of the wall 45. On the side surface of the fixed side hand 20 of the outer wall 45, a step-like joined surface 45b is formed so as to be joined to the step-like joining surface 22d of the main body frame 22 of the fixed side hand 20. A lid 47 is attached to the clamped chamber 43 on the side opposite to the fixed hand 20 side so as to cover a hollow portion, and an auto-removable connector pin 48 and air for substrate suction are provided on the fixed side hand 20 side of the base section 44. Connection port 49 is provided, and the automatic detachable connector 3 provided on the fixed hand 20 is provided.
7 and the connection port 38 for air.

The clamped chamber 43 of the exchange hand 40
Is formed identically with various exchange hands 40,
The shape of the hand main body 41 is not limited to this embodiment, and is formed so as to conform to the size or shape of the thin substrate W. The exchange hand 40 accommodated in the hand stocker 4 has various shapes, and is arranged vertically so that the opening 45 a of the clamped chamber 43 faces the fixed hand 20.

Next, the operation of the automatic hand exchanging apparatus configured as described above will be described mainly with reference to FIGS.

When the cassette 2 in which the predetermined substrate W is stored in the gantry 1 and the cassette 3 in which the substrate W is not stored are conveyed and arranged at a predetermined position, the robot 6 with the replacement hand 40 kept detached. Is moved to the exchange stage A position at a position facing the hand stocker 4. In this state, compressed air is filled in the air chamber 27 of the cylinder chamber 22a disposed in the fixed hand 20, the clamp shaft 24 is located to the right in FIG. 8, and the clamper 30 is in the unclamped state. is there.

In the hand stocker 4, various kinds of exchange hands adapted to the substrate W to be transported are positioned and fixed and stored. A controller (not shown) selects a replacement hand 40 that matches the substrate W stored in the cassette 2, extends the robot hand unit 8, and sets the fixed hand 2 provided in the robot hand unit 8.
0 indicates that the stepped joint surface 22d of the main body frame 22 is
When the fixed hand 20 that moves toward the exchange hand 40 is joined to the exchange hand 40 at the joint surface thereof until it is joined to the stepped joined surface 45b of the outer wall 45, the air chamber 27 of the fixed hand 20 is joined. Is sucked by a vacuum (not shown), and the clamp shaft 24 is moved to the left in FIG. Then, the second link 32 is moved to the left along with the pivot point with the first link 31, and the second link 3
Since 2 rotates clockwise in FIG. 8 about the pivot point with the third link 33, the clamp roller 34 disposed on the second link 32 presses the clamp surface 46 of the replacement hand 40. . As a result, the replacement hand 40 is mounted on the fixed hand 20 and the replacement hand 40 that has been positioned and fixed to the hand stocker 4 is released from the positioning and fixing.

On the other hand, the fixed hand 20 and the exchange hand 40
At the same time, the automatic detachable connector pin 48 and the air connection port 49 disposed on the exchange hand 40 are connected to the automatic detachable connector 37 disposed on the fixed hand 20.
In addition to being engaged with the air connection port 38, the hand presence / absence sensor 36 detects the presence of the replacement hand 40 and sends an ON signal to a controller (not shown). Therefore, even if the hand 10 is divided into the fixed hand 20 and the exchange hand 40, if the fixed hand 20 and the exchange hand 40 are joined, the power can be supplied to the exchange hand 40 by the connector, and the air connection can be made. The port allows air to flow into and out of the exchange hand 40, so that the exchange hand 40 does not need to process electric wires and air piping.

Further, the exchange hand 40 is the fixed hand 2
0, the joining surface is the sealing member 28.
, The clamp chamber 22b,
Since the clamped chamber 43 is sealed, even if there is dust generated from the hand 10, even if the hand 1
No garbage leaks outside the clean room (inside the clean room).

Thereafter, the robot hand 8 to which the replacement hand 40 is attached is bent and extended while returning the hand 10 to the robot machine 7 side in a straight line, and returned to the machine 7.

Then, the substrate W is moved to a position opposed to the cassette 2 to suck and hold the substrate W stored in the cassette 2 and, if necessary, to center the substrate W.
The substrate W is stored in the cassette 3.

When the scheduled lot of the first substrate W is completed, the robot 6 is moved again to the position of the exchange stage A, where the exchange hand 40 attached first and the exchange hand 40 for the next substrate W are moved. An automatic replacement operation is performed.
The operation of detaching the previously installed exchange hand 40 is performed in the reverse order of the above-described installation operation, and the same operation is performed when a new exchange hand is installed. However, when detaching the previously mounted exchange hand 40, the cylinder chamber 2
By filling the air chamber 27 of 2a with compressed air,
The clamper 30 becomes unclamped and the exchange hand 40
Can be detached from the fixed hand 20.

In the present invention, the clamping means,
The clamped unit, the detecting unit, and the like are not limited to the above-described embodiment.

[0034]

According to the automatic robot hand exchanging system and apparatus of the present invention,
A cassette that stores at least a thin substrate on a gantry, a hand stocker that stores a plurality of exchange hands, and a robot that transports the thin substrate and that can be moved to a hand exchange stage located near the hand stocker And are arranged.

The robot is provided with an exchange hand that sucks and holds the thin substrate and a fixed hand that houses the exchange hand, and is configured to be automatically exchanged with an exchange hand in a hand stocker. It is possible to automatically transport many types of thin substrates,
It is possible to achieve FA and diversification of a system in a clean room, which has not been conventionally performed.

In this automatic hand exchanging apparatus, a robot for transporting a thin substrate includes a robot hand unit for sucking and holding the thin substrate, and a machine base on which a driving unit for the robot hand unit is disposed. The robot hand unit includes a hand unit including an exchange hand and a fixed hand.
It is configured to have.

The fixed hand includes a clamp means for clamping the exchange hand to the fixed hand, and a clamp drive means for driving the clamp means, wherein the exchange hand holds the thin substrate by suction. Part, and a clamped part to be engaged with the clamping means. Since the hand part is provided with detecting means for detecting the attachment / detachment of the exchange hand with the fixed hand, various types of exchange are possible. Hands can be exchanged automatically. Therefore, it is possible to respond to FA and diversification in a clean room.

[Brief description of the drawings]

FIG. 1 is a partial schematic view of an automatic hand exchange system according to an embodiment of the present invention.

FIG. 2 is a front view showing a hand part of the automatic hand exchanging apparatus.

FIG. 3 is a plan view of the same.

FIG. 4 is a partial side sectional view showing the fixed hand.

FIG. 5 is a front view of the same.

FIG. 6 is a partial side sectional view showing the exchange hand.

FIG. 7 is a front view of the same.

FIG. 8 is a cross-sectional view showing a hand in which the exchange hand is mounted on a fixed hand.

FIG. 9 shows a conventional hand.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Stand 2, 3 ... Cassette 4 ... Hand stocker 6 ... Robot 8 ... Robot hand part 10 ... Hand 20 ... Fixed side hand 22a ... Cylinder chamber (clamp drive means) 24 ... Clamp drive shaft (clamp means) 30 ... Clamper ( Clamping means) 31 ... First link 32 ... Second link 33 ... Third link 34 ... Clamp roller 40 ... Replacement hand 41 ... Hand body 46 ... Clamp surface (clamped means) A ... Replacement stage W ... Substrate

Claims (6)

[Claims] 1. A cassette for accommodating at least a thin substrate on a gantry, a hand stocker for accommodating a plurality of exchange hands, and a hand exchange stage for transporting the thin substrate and located near the hand stocker. A robot that can be moved to, a hand automatic exchange system of a transfer robot provided, wherein the robot has an exchange hand that sucks and holds the thin substrate, a fixed-side hand that houses the exchange hand, And the exchange hand is configured to be detachable by hand attachment / detachment means, and the exchange hand is arranged so as to be stowable in the fixed side hand of the robot by the hand stocker. So that the exchange hand on the side can be exchanged with the exchange hand on the hand stocker side,
An automatic hand exchange system for a transfer robot, wherein the robot is driven. 2. The apparatus according to claim 1, wherein the attaching / detaching means includes a clamping means and a clamp driving means disposed on the fixed hand, and a clamped means disposed on the replacement hand. 2. The automatic exchange system for a transfer robot according to claim 1, wherein: 3. A robot for transporting a thin substrate, comprising: a robot hand unit for sucking and holding the thin substrate; and a machine base on which a driving unit of the robot hand unit is disposed.
The robot hand unit is an automatic hand exchanging device for a transfer robot configured to include a hand unit including an exchange hand and a fixed hand, wherein the fixed hand is configured to replace the exchange hand with the fixed hand. Clamping means, and a clamp driving means for driving the clamping means, wherein the replacement hand is a hand body for sucking and holding the thin substrate, and a clamped means for engaging the clamping means,
An automatic hand changing device for a transfer robot, wherein the hand portion is provided with a detecting means for detecting attachment / detachment of the exchange hand to / from the fixed side hand. 4. The automatic hand-replacement system and apparatus for a transfer robot according to claim 2, wherein said clamping means is constituted by a link mechanism having at least two links. 5. The hand automatic exchange of a transfer robot according to claim 4, wherein said clamped means has a clamp surface which can be engaged with a roller provided on said link. Systems and equipment. 6. An automatic hand changing device for a transfer robot according to claim 3, wherein said detecting means has a sensor for presence / absence of a hand.