JPH10163696A - Work posture correction device - Google Patents

Abstract

(57) [Problem] To provide a simple work posture correcting device having a structure capable of accurately correcting the posture of a work relative to a substrate prior to mounting the work on the substrate. A work (3) is formed by mounting a connector (6) on a sub-board (4). The sub-substrate 4 is moved to the first chuck unit 82
The chuck is performed by the first chuck element 88a of a and the second chuck element 88b of the second chuck unit 82b. First
The chuck element 88a and the second chuck element 88b are horizontally moved by moving means including a feed screw 84, a motor 85, and a nut 86. The posture of the work 3 is observed with the camera 102. Based on the image data, the control unit 99 controls the motor 85 to move the first chuck element 88a and the second chuck element 88b forward and backward to rotate the work 3 horizontally.
Correct the posture of the work 3. After that, the work 3 is mounted on the substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work posture correcting device for correcting the posture of a work relative to a substrate prior to mounting the work on the substrate.

[0002]

2. Description of the Related Art A panel such as a liquid crystal panel or a plasma panel used as a display of an electronic device such as a personal computer or a television is assembled by mounting a work serving as a driver on an edge of a substrate such as a glass substrate. As a work, a TAB (Tape A) using a film carrier is used.
A work manufactured by an automated bonding method is often used.

In a work mounting apparatus, a substrate is placed on a holding table in a horizontal posture, and in this state, the leads of the work are bonded by thermocompression bonding to electrodes on the edge of the substrate by a thermocompression bonding head. I have. In such a work mounting apparatus, the work needs to be mounted in a correct posture with respect to the substrate.

[0004]

In recent years, as seen in the plasma panel, its size has been increased, and accordingly, the size of the work has also been increased. In the conventional method of correcting the posture by the nozzle, the maximum distance from the axis of the nozzle to the lead of the work becomes long, and when the nozzle is slightly rotated, the moving distance of the lead far from the axis of the nozzle becomes large. As a result, there is a problem that it is difficult to match the posture of the target.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a work posture correcting apparatus which has a simple structure and can accurately correct the posture of a large work.

[0006]

According to the present invention, there is provided an apparatus for correcting a posture of a work, comprising: a first chuck and a second chuck for chucking a work; and a first chuck and a second chuck which are independent of each other. A horizontal moving means for horizontally moving the workpiece, a camera for observing the workpiece, and a control unit for controlling the driving of the horizontal moving means based on image data obtained by the camera.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention having the above-described structure chucks a workpiece with a first chuck and a second chuck, and based on image data obtained by a camera, the first chuck and the second chuck. By horizontally moving the chuck element by a required amount, the work is rotated horizontally to correct the posture of the work.
Therefore, the work can be mounted on the board after the posture of the work is properly corrected.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIGS. 1A and 1B are plan views of a substrate on which a work according to an embodiment of the present invention is mounted, FIG. 2 is a plan view of a work mounting apparatus, and FIG. 3 is a plan view of the work mounting apparatus. FIG. 4 is a side view of the sticking unit of the ACF, FIGS. 5, 6, 7, 8, 9, and 10 are explanatory diagrams of the operation of the sticking unit of the ACF, and FIG. 12, 13, 13, 14, 15, and 16 are explanatory views of the operation of the work posture correcting device provided in the work mounting device provided in the work mounting device. FIG.
Is a side view of the observation unit of the mounting device for the work, FIG.
8, 19 and 20 are explanatory views of the thermocompression bonding operation of the work mounting apparatus.

First, the substrate will be described with reference to FIG. FIG. 1A shows a substrate on which a work is being bonded and mounted, and FIG. 1B shows a substrate on which the work has been mounted. In FIG. 1A, a substrate 1 is a plasma panel and is formed by bonding two rectangular glass plates. Electrodes 2 of a circuit pattern are formed at a narrow pitch on the edges of three sides of the substrate 1. Reference numeral 3 denotes a work, which is formed by mounting a chip 5 as a driver on an elongated sub-substrate 4 such as a glass epoxy substrate, and bonding two connectors 6 to the edge thereof. This connector 6 is an FPC (Flexible P
printed circuit).

As shown in FIG. 1A, an anisotropic conductive tape (hereinafter referred to as “AC”) adhered to an electrode 2 at an edge of a substrate 1.
F)) and the free end of the connector 6 is bonded by thermocompression bonding. As shown in FIG. 1B, finally, the work 3 is bonded in a horizontal line to the edges of a total of three sides of two long sides and one short side of the substrate 1. In addition,
The work 3 on the long side is bonded to the front surface of the substrate 1, and the work 3 on the short side is bonded to the back surface of the substrate 1 by turning over. Usually, the types of the work 3 bonded to the long side and the work 3 bonded to the short side are different.

As will be described later, the ACF 7 is attached to the edge of the substrate 1 by the attaching means shown in FIG. The work 3 is subjected to ACF by the thermocompression bonding apparatus shown in FIGS.
7 are bonded by thermocompression bonding. Connector 6
Is formed by forming a large number of leads (not shown) at a narrow pitch on a film carrier (resin film).
Bonded to the substrate 1 via F7.

Next, a work mounting apparatus will be described with reference to FIGS. 2 and 3, reference numeral 10 denotes a base on which the elements described below are assembled. Reference numeral 11 denotes a movable table provided at the center of the side of the base 10, and a Zθ table 1 on the Y table 12.
3 is placed. A circular holding table 15 is provided on a rotating shaft 14 projecting upward from the Zθ table 13. The substrate 1 is held on a holding table 15.

As shown in FIG. 2, Y table 12 has Y
Direction feed screw 16 is built in, and the Y-axis motor 17
Is driven and the feed screw 16 rotates, the Y table 11
Table 13 moves horizontally in the Y direction, thereby moving substrate 1 in the Y direction. Table 13
When a Z-axis motor (not shown) built in the motor is driven, the rotating shaft 14 moves up and down, and the substrate 1 also moves up and down. Also, a θ motor (not shown) built in the Zθ table 13
Is driven, the rotation shaft 14 rotates, and the substrate 1 rotates horizontally. That is, the position, height, and rotation angle of the substrate 1 in the Y direction are adjusted by the movable table 11.

In FIG. 2, conveyors 18 and 19 are provided on both sides of the movable table 11, respectively. One conveyor 18 carries the substrate 1 onto the movable table 11.
The other conveyor 19 carries out the substrate 1 on which the bonding of the work 3 has been completed to the next step. Conveyor 1
The transfer direction of the substrate 1 by 8, 19 is defined as the X direction.

Next, with reference to FIG.
The thermocompression bonding means for thermocompression bonding to the edge of will be described. 21
Is a substantially U-shaped frame. Frame 21 is base 2
2 is set up. The base 22 has a U-shaped cross section, and rails 23 that are long in the X direction are provided on the upper surfaces of both sides. The rail 2 is provided on the lower surface of the frame 21.
3 is provided with a slider 24 which is slidably fitted. A nut 25 is mounted at the center of the lower surface of the frame 21. The base portion 22 is provided with a long feed screw 26 (see also FIG. 2) in the X direction to which the nut 25 is screwed. When the feed screw 26 rotates by being driven by the motor 27, the nut 25 moves along the feed screw 26, whereby the frame 21 moves in the X direction.

Referring to FIG. 3, a thermocompression bonding head 30 is attached to an upper end of the frame 21. A thermocompression bonding tool 31 is provided below the thermocompression bonding head 30.
Further, a vertically moving means 32 is provided on the upper part thereof. As the vertical movement means 32, for example, a cylinder is used.
When the vertical movement means 32 is driven, the thermocompression bonding tool 31 performs a vertical movement.

Next, referring to FIG. 3 and FIG.
The backup means for supporting the lower surface of the edge from below will be described. 3 and 4, reference numeral 33 denotes a long plate-shaped backup member, which is a block 3 which is horizontally long in the X direction.
4. In FIG. 3, a slider 35 is provided on the back surface of the block 34. Slider 35
Is slidably fitted to a vertical rail 36 provided on the lower end surface of the frame 21. As shown in FIG. 3, the thermocompression bonding tool 31 and the backup member 33 of the thermocompression bonding head 30 are attached to the frame 21 so as to face each other so as to sandwich the edge of the substrate 1 from above and below.

In FIG. 4, a saw blade-shaped inclined surface 37 is formed on the lower surface of the block 34 at three places in the horizontal direction. Each of these inclined surfaces 37 is grounded to a roller 38. The roller 38 is mounted on a horizontal shaft 39. The left end of the shaft 39 is connected to a nut 40. The nut 40 is slidably provided on a horizontal rail 41. A horizontal feed screw 42 is screwed into the nut 41.

When the motor 43 is driven and the feed screw 42 rotates forward, the nut 40 moves along the feed screw 42 in the X1 direction. Then, the roller 38 rolls on the lower base 44 in the X1 direction, whereby the inclined surface 37 is pushed up by the roller 38, and the block 34 and the backup member 33 are raised. When the feed screw 42 rotates in the reverse direction, the nut 40
And the roller 38 moves in the X2 direction, and the block 34 and the backup member 33 descend. That is, the inclined surface 37, the roller 38, the nut 40, the feed screw 42, the motor 43, and the like constitute a means for vertically moving the backup member 33.

In FIG. 3, the backup member 33 rises to support the lower surface of the edge of the substrate 1 from below. In this state, the thermocompression bonding tool 31 descends and presses the connector 6 against the ACF 7 attached to the electrode 2 at the edge of the substrate 1 to perform thermocompression bonding. When the thermocompression bonding tool 31 is pressed against the connector 6 and the substrate 1 is supported from below by the backup member 33, a large upward reaction force is generated in the thermocompression bonding head 30, and a large downward reaction force is generated in the backup member 33. A reaction force occurs. However, since the thermocompression bonding head 30 and the backup member 33 are mounted on the same substantially U-shaped frame 21, the reaction forces cancel each other out inside the frame 21. Therefore, if the frame 21 is formed of a strong material such as a steel material, the above-mentioned reaction force can be sufficiently absorbed, so that the support structure of the thermocompression bonding head 30 and the backup member 33 can be reduced in size and simplified.

Next, a description will be given of the sticking means 50 for sticking the ACF 7 on the electrode 2 at the edge of the substrate 1 with reference to FIG. In FIG. 4, reference numeral 51 denotes a support plate serving as a main body of the attaching means 50, to which elements described below are assembled. Reference numeral 52 denotes a supply reel on which the ACF 7 is wound. The ACF 7 is adhered to the base tape 8. After the ACF 7 is adhered to the substrate 1 by a method described later, the base tape 8 is wound on a take-up reel 53. A motor 54 for rotating the take-up reel 53 is built in the support frame 51.

The ACF 7 wound on the supply reel 52 is fed by a feed roller 55 and is guided by guide rollers 56 and 5.
It is sent along 7, 62, 63. Feeding roller 55
A tension means 58 is provided between the guide roller 56 and the guide roller 56. The ACF 7 hangs down in the tension means 58, is sucked by a suction mechanism (not shown) of the tension means 58, and tension is applied so as not to be unnecessarily loosened.

A cutter unit 59 is provided between the guide rollers 56 and 57. ACF7
Is cut to a predetermined length by the blade 60 of the cutter unit 59. Reference numeral 61 denotes a receiving portion of the blade 60. The blade 60 cuts only the ACF 7 and does not cut the base tape 8.
Reference numeral 66 denotes a peeling roller for peeling the base tape 8 from the ACF 7.

A pressing head 64 is provided between the guide roller 57 and the guide roller 62. Crimp head 6
A crimping tool 65 that is long in the X direction is provided at a lower portion of the tool 4. The crimping tool 65 moves up and down by a vertical movement mechanism built in the crimping head 64. 67 is a roller for holding the base tape 8 together with the guide roller 62,
The base tape 8 is fed to the take-up reel 53 by a desired length by rotation by a motor (not shown).

Next, the operation of attaching the ACF 7 to the substrate 1 by the attaching means 50 will be described with reference to FIGS. FIG. 5 shows a state in which the base tape 8 is along the lower surface of the crimping tool 65. During the operation described below, the edge of the substrate 1 is supported by the backup member 33 from below.

Now, as shown in FIG. 5, the cutter unit 59 is advanced rightward to cut the ACF 7 into a predetermined length. Next, while feeding the base tape 8 with the feed roller 67, the ACF 7 is fed out from the supply reel 52 by a predetermined length.
The CF 7 is moved along the lower surface of the crimping tool 65 (FIG. 6). The fed base tape 8 is automatically taken up by a take-up reel.

Next, the pressure bonding head 64 is lowered and the ACF 7
Is pressed against the substrate 1 (FIG. 7), and then the pressure bonding head 64 is raised to release the pressing (FIG. 8). Next, as shown in FIG. 9, the peeling roller 66 is advanced to the left,
The base tape 8 is forcibly peeled off from the ACF 7. When the peeling is completed, the peeling roller 66 is retracted to the right and returned to the original position (FIG. 10). As described above, the ACF 7 is peeled off from the base tape 8 and adhered on the electrode 2 of the substrate 1. By repeating the above operation, the substrate 1
ACFs 7 are adhered one after another on the electrode 2 at the edge of.

In FIG. 2, a plurality of magazines 70 (four in this example) are provided at the corners of the upper surface of the base 10.
The works 3 are stored in a stack in each magazine 70. Reference numeral 71 denotes a lifter for moving the magazine 70 up and down, and reference numeral 72 denotes a drive motor for the lifter. Magazine 70
Is adjusted to a level at which a desired work 3 can be taken out. Such a magazine mechanism is well known. Numeral 80 denotes a work posture correcting device for taking out the works 3 in the magazine 70 one by one, transferring the works 3 to a receiving table 90, and correcting the work 3 posture. Next, the structure of the posture correcting device 80 will be described with reference to FIG.

In FIG. 15, reference numeral 81 denotes a θ table on which a first chuck unit 82a and a second chuck unit 82b are mounted. The first chuck unit 82a and the second chuck unit 82b have the same structure, each having a long main body 83, a feed screw 84 provided in the longitudinal direction of the main body 83, and a motor for rotating the feed screw 84. 85 and a nut 86 screwed onto the feed screw 84
An arm 87 having a rear end coupled to a nut 86, and a first chuck 88a attached to a distal end of the arm 87.
And the second chuck element 88b.

When the motor 85 is driven to rotate the feed screw 84, the nut 86 moves along the feed screw 84, and the first chuck element 88a and the second chuck element 88b move independently of each other in the horizontal direction. Move forward and backward. That is, the feed screw 84, the motor 85, and the nut 86 constitute horizontal moving means for horizontally moving the first chuck 88a and the second chuck 88b.

In FIG. 15, the cradle 90 is a magazine 7
It is arranged at a position orthogonal to 0 (see also FIG. 2). As shown in FIGS. 2 and 3, an X-direction feed screw 91 is screwed to a nut 93 mounted on the lower surface of the receiving base 90. In FIG. 3, a base 94 is provided below the receiving base 90. An X-direction rail 95 is provided on the upper surface of both sides of the base 94, and a slider 96 provided on the lower surface of the receiving base 90 is fitted to the rail 95. Accordingly, when the motor 92 (FIG. 2) is driven and the feed screw 91 rotates, the receiving table 90 moves in the X direction along the rail 95.

3 and 15, reference numeral 100 denotes an observation unit. The observation unit 100 includes a support 101
And two cameras 102 mounted on the camera. Support table 1
Numeral 01 stands on the base 103. A slider 104 is mounted on the lower surface of the base plate 103. Slider 10
4 is fitted on the rail 106 on the plate 105.
A cam follower 107 is provided on the lower surface of the base plate 103. The cam follower 107 is in contact with the cam 108. On the lower surface of the plate 105, a motor 109 for rotating the cam 108 is provided. When the motor 109 is driven to rotate the cam 108, the cam follower 107 is pushed by the cam 108 and moves in the Y direction, whereby the base 103 and the camera 102 on the base 103 are moved to the rail 10.
It moves in the Y direction along 6.

In FIG. 3, a nut 110 is mounted on the lower surface of the plate 105. The nut 110 is screwed to a feed screw 111 in the X direction (see also FIG. 2). 1
A motor 12 rotates the feed screw 111. 11
Reference numeral 3 denotes a base, and rails 114 are provided on the upper surfaces of both sides. The slider 115 provided on the lower surface of the plate 105 is fitted on the rail 114. Therefore, when the motor 112 (FIG. 2) is driven to rotate the feed screw 111, the nut 110 moves in the X direction along the feed screw 111, and the observation unit 100 also moves in the same direction.
In FIG. 15, reference numeral 99 denotes a control unit which analyzes image data captured by the camera 102, controls the motor 85, and the like.

Next, the operation of the work posture correcting device 80 and the observation unit 100 will be described. 11 to 16
Are shown in the order of operation. FIG. 11 shows an initial state. In this state, two first chucks 88 a and second chucks 88 b face the work 3 in the magazine 70. Now, when the motor 85 is driven as shown in FIG. 12, the nut 86 advances along the feed screw 84,
Thus, the first chuck element 88a and the second chuck element 88b advance toward the magazine 70 and chuck the sub-substrate 4 of the work 3. Next, the motor 85 is driven in the reverse direction, and the first chuck 88a and the second chuck 88b are driven.
Pulls out the chucked work 3 from the magazine 70 (FIG. 13).

Next, when the θ table 81 is driven, the first chuck unit 82a and the second chuck unit 82b are rotated clockwise by 90 ° in the horizontal direction, and the first chuck unit 88a and the second chuck unit 88b are rotated. The work 3 chucked in the step is directed to the receiving table 90 (FIGS. 2 and 14).
Next, the motor 85 is driven to advance the first chuck piece 88a and the second chuck piece 88b toward the receiving table 90,
The work 3 is positioned on the cradle 90. FIG. 15 shows the state at this time.

Next, a method of correcting the horizontal orientation (posture) of the work 3 will be described with reference to FIGS. Note that this correction is performed in order to make the direction of the work 3 exactly coincide with the direction of the substrate 1 to be bonded. In FIG. 15, two cameras 10
2. The connector 6 is observed at 2 and the image data is
The rotation angle α (FIG. 16) of the work 3 with respect to the X direction is obtained by the analysis. Note that such image analysis can be performed by a well-known image processing technique.

As shown in FIG. 16, based on the result of the analysis, the motor 85 is driven to move the first chuck 88a and the second chuck 88b forward and backward independently of each other (arrows A and B). ), The work 3 is horizontally rotated, and the orientation of the work 3 is corrected so that the rotation angle α matches the orientation of the substrate 1. The direction of the substrate is detected in advance by the observation unit. In FIG. 16, a work 3 indicated by a dashed line indicates that the posture is being corrected, and a work 3 indicated by a solid line indicates a state after the correction. Each motor 8
5 by controlling the driving amount of the first chuck 8.
The amount of movement of the 8a and the second chuck 88b in the directions of the arrows A and B can be freely adjusted, whereby the work 3 can be freely horizontally rotated to correct its direction. In addition, since both ends of the work 3 are chucked by the two chucks 88a and 88b, there is no danger of falling as compared with the conventional method of suctioning with a nozzle, and a stable posture can be corrected.

The thermocompression bonding apparatus for a workpiece has the above-described configuration. Next, the entire operation will be described with reference to the drawings. First, in FIG. 2, the substrate 1 is loaded on the movable table 11 by the conveyor 18. In FIG. 2, the substrate 1 indicated by a broken line shows a state where the substrate 1 is positioned on the movable table 11.

Next, in FIG. 2, the motor 27 is driven to move the frame 21 to a position facing the edge of the substrate 1, and then the ACF 7 is attached to the electrode 2 on the edge of the substrate 1. This sticking operation is as described with reference to FIGS.

Next, in FIG. 2, one work 3 in the magazine 70 is taken out by the work posture correcting device 80 and delivered to the receiving table 90. This transfer operation is shown in FIG.
To FIG. 15. Next, the direction of the work 3 placed on the receiving table 90 is corrected. This correction method is as described with reference to FIGS.

When the preparation is completed as described above, the work 3 is bonded to the substrate 1 as follows. First, in FIG. 2, the motor 92 is driven to move the receiving table 90 on which the work 3 is mounted to the movable table 1.
The work 3 and the substrate 1 are moved to a position facing the substrate 1 on the substrate 1. FIG. 17 shows this positioning operation. FIG. 17 shows a state in which the board 1 is raised by driving the Zθ table 13 and the edge of the board 1 is brought close to the connector 6.

In FIG. 2, the camera 112 is moved rightward by driving the motor 112 to move the observation unit 100 below the substrate 1 and then rotating the cam 108 (FIG. 3) in FIG. Then, it is positioned below the connector 6. Then, the camera 102 observes whether or not the electrode 2 of the substrate 1 matches the lead of the connector 6.

As a result of this observation, if there is a positional deviation between the electrode 2 and the lead exceeding an allowable amount, the positional deviation is corrected by moving the substrate 1 and the work 3 relatively. Among the displacements, the displacement in the X direction is corrected by driving the motor 92 (FIG. 2) to move the receiving table 90 in the X direction and move the work 3 in the same direction. The displacement in the Y direction is performed by driving the Y table 12 to move the substrate 1 in the Y direction. However, since the Y-direction positional deviation tolerance is generally large, there is no need to correct this Y-directional positional deviation. The positional deviation in the rotation direction is corrected by driving the Zθ table 13 to rotate the substrate 1 horizontally.

After the positioning of the work 3 and the substrate 1 is completed as described above, the work 3 is thermocompression-bonded to the substrate 1. 18 to 20 show the thermocompression bonding operation.
FIG. 18 shows that after the alignment of the work 3 and the substrate 1 is completed,
The observation unit 100 is moved backward and the thermocompression bonding head 3
0 and the state where the backup member 33 has been moved to the sticking position.

First, as shown in FIG. 19, the motor 43 (FIG. 4) is driven to raise the backup member 33 to support the lower surface of the edge of the substrate 1. Next, the cylinder 32 (FIG. 3)
Is driven to lower the thermocompression bonding tool 31 and press it against the connector 6 (FIG. 20). Next, when the thermocompression bonding tool 31 is raised and the backup member 33 is lowered, the state returns to the state shown in FIG. As described above, the connector 6 is ACF
7 and bonded to the upper surface of the substrate 1 by thermocompression bonding. By repeating the above operation while moving the observation unit 100 and the frame 21 in the X direction, the works 3 are successively bonded to the edge of one side of the substrate 1.

When the bonding of the work 3 to one side of the substrate 1 is completed, the Zθ table 13 (FIG. 2) is driven to rotate the substrate 1 horizontally by 90 °, and the same operation as described above is performed for the next side. Work 3 is bonded.
When all the bonding of the work 3 is completed, the substrate 1 is transported to the next step by the conveyor 19 (FIG. 2).

[0047]

According to the present invention, the work can be accurately corrected by moving the work with two chucks and moving the respective chucks relatively in the horizontal direction to accurately correct the posture of the work with respect to the substrate. Can be mounted on a board with positional accuracy. In addition, the structure is simple, and delicate posture correction of the work is also possible.

[Brief description of the drawings]

FIG. 1A is a plan view of a substrate on which a work according to one embodiment of the present invention is mounted. FIG. 1B is a plan view of a substrate on which a work of one embodiment of the present invention is mounted.

FIG. 2 is a plan view of a work mounting apparatus according to an embodiment of the present invention.

FIG. 3 is a side view of the work mounting apparatus according to the embodiment of the present invention;

FIG. 4 is a side view of the ACF attaching unit according to the embodiment of the present invention.

FIG. 5 is an explanatory diagram of an operation of the ACF attaching unit according to the embodiment of the present invention;

FIG. 6 is an explanatory diagram of an operation of the ACF attaching unit according to the embodiment of the present invention.

FIG. 7 is an explanatory diagram of the operation of the ACF sticking unit according to the embodiment of the present invention;

FIG. 8 is an explanatory diagram of an operation of the ACF attaching unit according to the embodiment of the present invention.

FIG. 9 is an explanatory diagram of the operation of the ACF attaching unit according to the embodiment of the present invention.

FIG. 10 is an explanatory diagram of an operation of the ACF attaching unit according to the embodiment of the present invention;

FIG. 11 is a plan view of a work posture correcting device provided in a work mounting device according to an embodiment of the present invention;

FIG. 12 is an operation explanatory view of a work posture correcting device provided in the work mounting device according to one embodiment of the present invention;

FIG. 13 is an explanatory diagram of an operation of the work posture correcting device provided in the work mounting device according to the embodiment of the present invention;

FIG. 14 is an explanatory diagram of an operation of the work posture correcting device provided in the work mounting device according to the embodiment of the present invention;

FIG. 15 is an explanatory diagram of an operation of the work posture correcting device provided in the work mounting device according to the embodiment of the present invention;

FIG. 16 is an operation explanatory view of a work posture correcting device provided in the work mounting device according to one embodiment of the present invention;

FIG. 17 is a side view of an observation unit of the work mounting apparatus according to the embodiment of the present invention;

FIG. 18 is an explanatory diagram of a thermocompression bonding operation of the work mounting apparatus according to the embodiment of the present invention.

FIG. 19 is an explanatory diagram of the thermocompression bonding operation of the work mounting apparatus according to the embodiment of the present invention.

FIG. 20 is an explanatory diagram of a thermocompression bonding operation of the work mounting apparatus according to the embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 1 substrate 2 electrode 3 work 11 movable table 15 holding table 21 frame 25 nut 26 feed screw 27 motor 30 thermocompression bonding head 33 backup member 80 work posture correction device 82a first chuck unit 82b second chuck unit 84 feed screw 85 Motor 86 Nut 99 Control unit 100 Observation unit 102 Camera

Claims (1)

[Claims] An apparatus for correcting the posture of a work relative to a substrate prior to mounting the work on the substrate, comprising: a first chucking element and a second chucking element for chucking the work; Horizontal moving means for horizontally moving the first chuck element and the second chuck element independently of each other, a camera for observing the work, and control for controlling the driving of the horizontal moving means based on image data obtained by the camera A work posture correcting device, comprising: