JPH10170961A5 - - Google Patents

Info

Publication number
JPH10170961A5
JPH10170961A5 JP1996355217A JP35521796A JPH10170961A5 JP H10170961 A5 JPH10170961 A5 JP H10170961A5 JP 1996355217 A JP1996355217 A JP 1996355217A JP 35521796 A JP35521796 A JP 35521796A JP H10170961 A5 JPH10170961 A5 JP H10170961A5
Authority
JP
Japan
Prior art keywords
interlayer insulating
insulating film
liquid crystal
display device
crystal display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996355217A
Other languages
English (en)
Japanese (ja)
Other versions
JP3904646B2 (ja
JPH10170961A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP35521796A priority Critical patent/JP3904646B2/ja
Priority claimed from JP35521796A external-priority patent/JP3904646B2/ja
Publication of JPH10170961A publication Critical patent/JPH10170961A/ja
Publication of JPH10170961A5 publication Critical patent/JPH10170961A5/ja
Application granted granted Critical
Publication of JP3904646B2 publication Critical patent/JP3904646B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP35521796A 1996-02-29 1996-12-21 液晶表示装置の作製方法 Expired - Fee Related JP3904646B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35521796A JP3904646B2 (ja) 1996-02-29 1996-12-21 液晶表示装置の作製方法

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP7107496 1996-02-29
JP8-71074 1996-10-07
JP28603696 1996-10-07
JP8-286036 1996-10-07
JP35521796A JP3904646B2 (ja) 1996-02-29 1996-12-21 液晶表示装置の作製方法

Publications (3)

Publication Number Publication Date
JPH10170961A JPH10170961A (ja) 1998-06-26
JPH10170961A5 true JPH10170961A5 (2) 2004-11-25
JP3904646B2 JP3904646B2 (ja) 2007-04-11

Family

ID=27300531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35521796A Expired - Fee Related JP3904646B2 (ja) 1996-02-29 1996-12-21 液晶表示装置の作製方法

Country Status (1)

Country Link
JP (1) JP3904646B2 (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8847316B2 (en) 1999-03-02 2014-09-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3126661B2 (ja) 1996-06-25 2001-01-22 株式会社半導体エネルギー研究所 液晶表示装置
EP1031873A3 (en) 1999-02-23 2005-02-23 Sel Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and fabrication method thereof
JP4197574B2 (ja) * 1999-05-20 2008-12-17 株式会社半導体エネルギー研究所 液晶表示装置
US6630977B1 (en) 1999-05-20 2003-10-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with capacitor formed around contact hole
JP4739510B2 (ja) * 2000-12-15 2011-08-03 株式会社半導体エネルギー研究所 半導体装置およびその作製方法
JP2007233409A (ja) * 2007-05-01 2007-09-13 Sony Corp 表示装置およびその製造方法
US8330887B2 (en) 2007-07-27 2012-12-11 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and electronic device
JP4706674B2 (ja) * 2007-08-03 2011-06-22 ソニー株式会社 液晶表示装置およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8847316B2 (en) 1999-03-02 2014-09-30 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the same

Similar Documents

Publication Publication Date Title
JPH1195261A5 (2)
KR970062778A (ko) 전기 광학 장치 및 그 제조 방법
JPH10153796A5 (2)
JPH10221717A5 (2)
KR970024311A (ko) 반도체 장치, 액티브 매트릭스 기판 및 그의 제조 방법
CN104317113A (zh) 液晶显示器件及其制作方法
JP2000267128A5 (2)
JP2004145333A5 (2)
JPH10274789A5 (2)
JP2003149675A5 (2)
CN101097391A (zh) 显示器件及其制作方法
KR970071090A (ko) 액티브 매트릭스 기판 및 그 제조 방법
JP2006086502A (ja) 有機薄膜トランジスタ及び液晶表示装置用基板並びにそれらの製造方法
WO2017113467A1 (zh) 一种coa基板及其制作方法
JPH10170961A5 (2)
KR100690001B1 (ko) 액정표시소자 및 그 제조방법
JP2005013985A5 (2)
US6888601B2 (en) Lateral electric field liquid crystal display device
JP2000081636A5 (2)
JP2004177589A5 (2)
JP2019070768A (ja) アレイ基板およびその製造方法、並びに表示パネル
TW200709425A (en) Etching tape and method of fabricating array substrate for liquid crystal display using the same
JPH11282011A5 (2)
JP2007298942A (ja) 有機薄膜トランジスタアレイ基板及びその製造方法
JPH11202368A5 (2)