JPH1018075A - Electrolytic copper foil - Google Patents

Electrolytic copper foil

Info

Publication number
JPH1018075A
JPH1018075A JP8186969A JP18696996A JPH1018075A JP H1018075 A JPH1018075 A JP H1018075A JP 8186969 A JP8186969 A JP 8186969A JP 18696996 A JP18696996 A JP 18696996A JP H1018075 A JPH1018075 A JP H1018075A
Authority
JP
Japan
Prior art keywords
copper foil
copper
alloy
electrolytic copper
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8186969A
Other languages
Japanese (ja)
Other versions
JP3295308B2 (en
Inventor
Eita Arai
英太 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mining Holdings Inc
Original Assignee
Nikko Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikko Materials Co Ltd filed Critical Nikko Materials Co Ltd
Priority to JP18696996A priority Critical patent/JP3295308B2/en
Publication of JPH1018075A publication Critical patent/JPH1018075A/en
Application granted granted Critical
Publication of JP3295308B2 publication Critical patent/JP3295308B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manufacturing Of Printed Wiring (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide double treat copper foil free from the problems of heat resistance and discoloration, particularly, copper foil for the internal layer of a multilayer printed wiring board. SOLUTION: A glossy face is provided with a roughening treated layer composed of a Cu-Ni allay or a Cu-Co-Ni alloy. The roughened face is provided with a coating layer composed of a Cu-Zn alloy, and preferably, at least one side is furthermore provided with a Cr base rust preventing layer. The copper foil is suitable particularly for the use as electrolytic copper foil for the internal layer of a multilayer printed wiring board. The surface roughness of the glossy face is preferably regulated to 0.05 to 0.2μm.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、光沢面にCu−N
i合金又はCu−Co−Ni合金から成る粗化処理層を
設けたことを特徴とする電解銅箔に関するものであり、
特には多層プリント配線板の内層用電解銅箔としての使
用に適する電解銅箔に関する。
The present invention relates to a method for producing Cu-N
It relates to an electrolytic copper foil characterized by having a roughened layer made of an i-alloy or a Cu-Co-Ni alloy,
In particular, the present invention relates to an electrolytic copper foil suitable for use as an electrolytic copper foil for an inner layer of a multilayer printed wiring board.

【0002】[0002]

【従来の技術】銅及び銅合金箔(以下銅箔と称する)
は、電気・電子関連産業の発展に大きく寄与しており、
特に印刷回路材として不可欠の存在となっている。印刷
回路用銅箔は一般に、合成樹脂ボード、フィルム等の基
材に接着剤を介して或いは接着剤を使用せずに高温高圧
下で積層接着して銅張積層板を製造し、その後目的とす
る回路を形成するべくレジスト塗布及び露光工程を経て
必要な回路を印刷した後、不要部を除去するエッチング
処理が施される。最終的に、所要の素子が半田付けされ
て、エレクトロニクスデバイス用の種々の印刷回路板を
形成する。印刷回路板用銅箔に関する品質要求は、樹脂
基材と接着される面と非接触面とで異なり、それぞれに
多くの方法が提唱されている。
2. Description of the Related Art Copper and copper alloy foil (hereinafter referred to as copper foil)
Has greatly contributed to the development of the electrical and electronic related industries,
In particular, it is indispensable as a printed circuit material. In general, copper foil for printed circuits is laminated and bonded to a base material such as a synthetic resin board and a film under a high temperature and a high pressure with an adhesive or without using an adhesive to produce a copper-clad laminate. After a necessary circuit is printed through a resist coating and exposure process to form a circuit to be formed, an etching process for removing an unnecessary portion is performed. Finally, the required elements are soldered to form various printed circuit boards for electronic devices. The quality requirements for the copper foil for printed circuit boards differ between the surface to be bonded to the resin substrate and the non-contact surface, and many methods have been proposed for each.

【0003】銅箔には、電解銅箔と圧延銅箔とがある
が、プリント配線板用として使用される銅箔は、その接
着強度などの観点から、大部分が電解銅箔である。電解
銅箔は、電気銅あるいはそれと同等の純度を有する電線
スクラップを原料とし、それを硫酸酸性硫酸銅水溶液中
に溶解させて電解浴を調製し、通常ステンレス鋼、チタ
ン、クロムめっきなどで表面が構成されている陰極円筒
体を水平にし、この陰極と相対して配置された陽極との
間に電解液を流し、陰極を回転させながら陽極との間に
電流を流して、陰極の表面に銅を電着させた後、所定の
厚さとなった電着物を連続的に剥離して銅箔(生箔と呼
ばれる)を製造することを基本とする。銅箔の厚みは、
電流の大きさと、回転速度を調節することで行う。その
後、印刷回路板用銅箔に対する品質要求に応じて、樹脂
基材と接着される面(以下粗化面と呼ぶ)と非接着面
(以下光沢面と呼ぶ)とでそれぞれに多くの処理がなさ
れる。これは、トリート処理(表面処理)工程と呼ばれ
る。電解銅箔は製造時点で凹凸を有しているが、粗化面
には、基板との引き剥がし強度向上のため0.2〜3μ
m程度の銅粒子(粗化粒子とも呼ぶ)を付着させるのが
一般的である。銅粒子は、電解銅箔の凸部を増強して凹
凸を一層大きくする。銅粒子の脱落を防止するために、
銅粒子層を覆って薄い銅めっき層を形成する場合もあ
る。これを粗化処理と呼ぶ。
[0003] Copper foils are classified into electrolytic copper foils and rolled copper foils. Most of copper foils used for printed wiring boards are electrolytic copper foils from the viewpoint of adhesive strength. Electrodeposited copper foil is made from electrolytic copper or electric wire scrap with a purity equivalent to that, and it is dissolved in an aqueous sulfuric acid-acidic copper sulfate solution to prepare an electrolytic bath.The surface is usually made of stainless steel, titanium, chrome plating, etc. The formed cathode cylinder is leveled, an electrolytic solution is passed between the cathode and the anode arranged opposite to the cathode, a current is passed between the anode and the anode while rotating the cathode, and copper is applied to the surface of the cathode. After electrodeposition, the electrodeposit having a predetermined thickness is continuously peeled off to produce a copper foil (called a raw foil). The thickness of the copper foil is
This is performed by adjusting the magnitude of the current and the rotation speed. After that, depending on the quality requirements for the copper foil for printed circuit boards, many processes are performed on the surface to be bonded to the resin substrate (hereinafter referred to as a roughened surface) and the non-bonded surface (hereinafter referred to as a glossy surface). Done. This is called a treatment (surface treatment) step. Although the electrolytic copper foil has irregularities at the time of production, the roughened surface has a thickness of 0.2 to 3 μm for improving the peel strength with the substrate.
Generally, about m copper particles (also referred to as roughened particles) are adhered. The copper particles enhance the projections of the electrolytic copper foil to further increase the irregularities. To prevent copper particles from falling off,
In some cases, a thin copper plating layer is formed to cover the copper particle layer. This is called a roughening process.

【0004】銅張積層板の製造方法としては、ホットプ
レス法や近時では連続法が採用されている。例えば、ホ
ットプレス法による紙基材フェノール樹脂銅張積層板の
製造を例にとると、フェノール樹脂の合成、紙基材への
フェノール樹脂の含浸及び乾燥を行ってプリプレグを製
造し、最後に、所定数量のプリプレグと銅箔とを組合わ
せ、多段式プレス機により熱圧成形を行い、解板、耳切
りを行い、次工程へと送られる。連続法の場合、片面銅
張積層板及び両面銅張積層板が製造されている。例え
ば、紙基材ポリエステル樹脂銅張積層板の場合、複数個
のロール状原紙から原紙が繰り出され、それぞれ別個に
紙処理、樹脂含浸工程を経て、複数枚の樹脂含浸紙はロ
ール対によって積層される。次いで接着剤塗布工程を経
た銅箔、片面の場合は銅箔とキャリアがラミネートされ
る。この積層およびラミネート工程で製品厚みを制御す
る。次に硬化炉へ送り込まれ、樹脂の硬化反応が起り、
硬化する。硬化後定尺切断、アフターキュアおよび端面
の研磨工程を経て、さらに外観検査、特性検査を実施し
製品となる。片面と両面の相違点は、片面の場合には、
下方よりキャリアフィルムを繰り出し、樹脂硬化後この
キャリアを引き剥がし、巻き取るのに対し、両面の場合
には下方からも接着剤塗布工程を経た銅箔を繰り出す点
であり、他の工程は片面も両面も同等である。その他、
ガラス−エポキシ樹脂基板等に関しても同様の工程で製
造される。
[0004] As a method of manufacturing a copper-clad laminate, a hot press method or a continuous method has recently been adopted. For example, taking the production of a paper-based phenolic resin copper-clad laminate by a hot press method as an example, a prepreg is produced by synthesizing a phenolic resin, impregnating and drying the phenolic resin on the paper substrate, and finally, A predetermined number of prepregs and copper foils are combined, hot-pressed by a multi-stage press, unsealed, trimmed, and sent to the next step. In the case of the continuous method, a single-sided copper-clad laminate and a double-sided copper-clad laminate are manufactured. For example, in the case of a paper-based polyester resin copper-clad laminate, the base paper is unwound from a plurality of roll-shaped base papers, each separately undergoes a paper treatment, a resin impregnation step, and a plurality of resin-impregnated papers are laminated by a roll pair. You. Next, a copper foil that has undergone an adhesive application step, or in the case of one side, a copper foil and a carrier are laminated. The product thickness is controlled in the laminating and laminating steps. Next, it is sent to the curing furnace, where the curing reaction of the resin occurs,
To cure. After curing, the product undergoes a fixed-size cutting, after-curing and end-face polishing steps, and is further subjected to appearance inspection and characteristic inspection to obtain a product. The difference between single-sided and double-sided
The carrier film is drawn out from below, and after curing the resin, the carrier is peeled off and rolled up, whereas in the case of both sides, the copper foil that has passed through the adhesive application step is also drawn out from below, and the other steps are also for one side. Both sides are equivalent. Others
A glass-epoxy resin substrate and the like are manufactured in a similar process.

【0005】更に、素子の高集積化につれて、入出力端
子数、すなわちピン数が著しく増加し、加えてデバイス
の小型化、コンパクト化への要求とシステムの高機能化
へのニーズからプリント配線板が多層化へと進展してい
る。多層プリント配線板を製造する場合には、片面及び
/又は両面に銅箔等で回路を形成した内層用の回路板に
プリプレグを介して外層用回路板もしくは銅箔を重ね、
これをプレスにより積層形成して内層用の回路板と外層
用の回路板もしくは銅箔とを樹脂含浸基材による絶縁層
を介して積層することにより製造するのが一般的であ
る。
[0005] Further, as the number of input / output terminals, that is, the number of pins increases remarkably as the elements become more highly integrated. In addition, due to the demand for smaller and more compact devices and the need for more sophisticated systems, printed wiring boards are required. Are progressing to multilayering. In the case of manufacturing a multilayer printed wiring board, an outer layer circuit board or copper foil is laminated via a prepreg on an inner layer circuit board on which a circuit is formed with copper foil on one side and / or both sides,
This is generally manufactured by forming a laminate by pressing and laminating a circuit board for an inner layer and a circuit board for an outer layer or a copper foil via an insulating layer made of a resin-impregnated base material.

【0006】多層成形による接着力を向上させるため
に、内層銅箔表面を物理的或いは化学的に処理して銅箔
表面とプリプレグとの接着強度を向上させるための表面
処理が行われ、これは内層粗化処理と呼ばれる。内層粗
化処理として、これまでは黒化処理が主として行われて
きた。黒化処理は、31g/リットルの亜塩酸ナトリウ
ム−15g/リットルの水酸化ナトリウム−12g/リ
ットルのりん酸三ナトリウム溶液もしくは60g/リッ
トルの亜塩酸ナトリウム−8g/リットルの水酸化ナト
リウム−10g/リットルのりん酸三ナトリウム溶液に
代表される黒化処理液を使用して、前者では95℃で2
分間そして後者では95〜98℃で1分間処理して、C
2 O(赤色)、CuO(黒色)を混合物として銅箔表
面に析出させるものである。黒化処理は、量産時の安定
性がよく、接着強度、耐熱性に優れるが、酸、ことに塩
酸によって侵されやすく、酸化膜が溶解される。これを
ハローイング現象といい、接着強度の低下を引き起こ
す。このため、黒化処理を行う場合、食塩タイプのプレ
ディップ・触媒を使用する必要がある。また、処理方法
が不適当であると、粗雑でスポンジ状の酸化膜を生じや
すい。黒化処理は、高温のアルカリ液での処理のため、
エポキシやポリイミド樹脂が膨潤し、内層材が薄い場
合、寸法安定性に影響を与えるので、液濃度、温度、浸
漬時間に注意を要する。
[0006] In order to improve the adhesive strength by multi-layer molding, a surface treatment is performed to physically or chemically treat the surface of the inner copper foil to improve the adhesive strength between the copper foil surface and the prepreg. This is called inner layer roughening. Until now, as the inner layer roughening treatment, blackening treatment has been mainly performed. For the blackening treatment, 31 g / l of sodium hydrochloride-15 g / l of sodium hydroxide-12 g / l of trisodium phosphate solution or 60 g / l of sodium hydrochloride-8 g / l of sodium hydroxide-10 g / l Using a blackening treatment solution represented by trisodium phosphate solution of
Minutes and in the latter at 95-98 ° C. for 1 minute, C
u 2 O (red) and CuO (black) are deposited on the copper foil surface as a mixture. The blackening treatment has good stability in mass production and is excellent in adhesive strength and heat resistance, but is easily attacked by acid, especially hydrochloric acid, and dissolves the oxide film. This is called a haloing phenomenon, and causes a decrease in adhesive strength. Therefore, when performing the blackening treatment, it is necessary to use a salt type predip catalyst. In addition, if the treatment method is inappropriate, a rough and sponge-like oxide film is easily generated. Because the blackening treatment is a treatment with a high temperature alkaline solution,
If the epoxy or polyimide resin swells and the inner layer material is thin, it affects the dimensional stability, so care must be taken in the liquid concentration, temperature and immersion time.

【0007】[0007]

【発明が解決しようとする課題】黒化処理の上述した欠
点に鑑み、別の方法として、近年、電解銅箔の両面を処
理したダブルトリート(DT)銅箔の使用が増加してい
る。前述したように、電解銅箔は製造時点で凹凸を有し
ているが、粗化面には、基板との引き剥がし強度向上の
ため電解銅箔の凸部を増強して凹凸を一層大きくする
0.2〜3μm程度の銅粒子を付着させるのが一般的で
あり、銅粒子の脱落を防止するために、銅粒子層を覆っ
て薄い銅めっき層を形成する粗化処理を行っている。ダ
ブルトリート銅箔は、光沢面にも粗化面とほぼ同様の粗
化処理を行ったものである。
In view of the above-mentioned drawbacks of the blackening treatment, as another method, the use of double-treat (DT) copper foil having both surfaces treated with electrolytic copper foil has been increasing in recent years. As described above, the electrolytic copper foil has irregularities at the time of manufacture, but on the roughened surface, the convexities of the electrolytic copper foil are strengthened to improve the peel strength with the substrate, and the irregularities are further increased. Generally, copper particles of about 0.2 to 3 μm are adhered, and a roughening process of forming a thin copper plating layer over the copper particle layer is performed to prevent the copper particles from falling off. The double-treated copper foil has been subjected to the same roughening treatment on the glossy surface as on the roughened surface.

【0008】しかしながら、現行のダブルトリート銅箔
は良好な耐熱性が得られず、またエージングにより著し
く変色するという問題が認識された。従って、本発明の
課題は、こうした耐熱性や変色といった問題点のないダ
ブルトリート銅箔、特に多層プリント配線板内層用銅箔
を提供することである。
[0008] However, it has been recognized that the current double-treated copper foil does not have good heat resistance, and that it is significantly discolored by aging. Therefore, an object of the present invention is to provide a double-treated copper foil, particularly a copper foil for an inner layer of a multilayer printed wiring board, having no problems such as heat resistance and discoloration.

【0009】[0009]

【課題を解決するための手段】本発明者は、ダブルトリ
ート銅箔の光沢面にCu−Ni合金又はCu−Co−N
i合金から成る粗化処理層を設けることにより耐熱性や
エージングにおける変色といった問題点が著しく低減さ
れうることを見いだした。Cu−Ni合金又はCu−C
o−Ni合金から成る粗化処理層は、圧延銅箔における
粗化処理方法としては知られているが、ダブルトリート
電解銅箔の光沢面に適用されたことはなかった。ダブル
トリート電解銅箔の粗化面には、公知の粗化処理がいず
れも適用しうるが、Cu−Zn合金から成る被覆層を設
けることが好ましい。更に、Cr系防錆層を少なくとも
一面に更に設けることが好ましい。
Means for Solving the Problems The present inventor has proposed that a glossy surface of a double-treated copper foil be made of a Cu-Ni alloy or Cu-Co-N
It has been found that by providing a roughening layer made of an i-alloy, problems such as heat resistance and discoloration during aging can be significantly reduced. Cu-Ni alloy or Cu-C
The roughening layer made of an o-Ni alloy is known as a roughening method for a rolled copper foil, but has not been applied to the glossy surface of a double-treat electrolytic copper foil. Any known roughening treatment can be applied to the roughened surface of the double-treated electrolytic copper foil, but it is preferable to provide a coating layer made of a Cu-Zn alloy. Further, it is preferable to further provide a Cr-based antirust layer on at least one surface.

【0010】かくして、本発明は、(1)光沢面にCu
−Ni合金又はCu−Co−Ni合金から成る粗化処理
層を設けたことを特徴とする電解銅箔、(2)粗化面に
Cu−Zn合金から成る被覆層を設けたことを特徴とす
る(1)記載の電解銅箔、及び(3)Cr系防錆層を少
なくとも一面に更に有する(1)又は(2)記載の電解
銅箔を提供するものである。本発明の銅箔は、多層プリ
ント配線板の内層用電解銅箔としての使用に特に適す
る。光沢面の表面粗さが0.05〜0.2μmとするこ
とが好ましい。0.05μm未満では接着力が十分でな
く、0.2μmを超えるとファインパターンの回路が作
りにくくなる。
[0010] Thus, the present invention provides (1) a method in which Cu is added to a glossy surface;
An electrolytic copper foil provided with a roughening treatment layer made of a -Ni alloy or a Cu-Co-Ni alloy, and (2) a coating layer made of a Cu-Zn alloy provided on a roughened surface. And (3) an electrolytic copper foil according to (1) or (2), further comprising a Cr-based antirust layer on at least one surface. The copper foil of the present invention is particularly suitable for use as an electrolytic copper foil for an inner layer of a multilayer printed wiring board. The glossy surface preferably has a surface roughness of 0.05 to 0.2 μm. If it is less than 0.05 μm, the adhesive strength is not sufficient, and if it exceeds 0.2 μm, it becomes difficult to form a fine pattern circuit.

【0011】[0011]

【発明の実施の形態】前述した通り、ダブルトリート
(DT)電解銅箔は、電解銅箔の両面を粗化処理したも
のである。電解銅箔は製造時点でカソード側とは反対の
粗化面で凹凸を有しているが、粗化面には、基板との引
き剥がし強度向上のため電解銅箔の凸部を増強して凹凸
を一層大きくするべく0.2〜3μm程度の銅粒子を付
着させるのが一般的であり、銅粒子の脱落を防止するた
めに、銅粒子層を覆って薄い銅めっき層を形成する粗化
処理を行っている。ダブルトリート電解銅箔は、光沢面
にも粗化面とほぼ同様の粗化処理が行われているのが現
状である。本発明に従えば、電解銅箔の光沢面にCu−
Ni合金又はCu−Co−Ni合金から成る粗化処理層
が形成される。
DESCRIPTION OF THE PREFERRED EMBODIMENTS As described above, a double-treat (DT) electrolytic copper foil is obtained by roughening both surfaces of an electrolytic copper foil. Electrolytic copper foil has irregularities on the roughened surface opposite to the cathode side at the time of manufacturing, but on the roughened surface, increase the convex part of the electrolytic copper foil to improve the peeling strength with the substrate Generally, copper particles of about 0.2 to 3 μm are adhered to further increase the unevenness. In order to prevent the copper particles from falling, a rough copper plating layer is formed by covering the copper particle layer. Processing is in progress. At present, the double-treated electrolytic copper foil is subjected to the same roughening treatment on the glossy surface as on the roughened surface. According to the present invention, Cu-
A roughening layer made of a Ni alloy or a Cu-Co-Ni alloy is formed.

【0012】本発明における電解銅箔光沢面の粗化処理
としてのCu−Ni合金を形成するための一般的浴は、
次の通りである: (銅−ニッケル合金めっき) Cu:5〜10g/リットル Ni:10〜20g/リットル pH:1〜4 温度:20〜40℃ 電流密度Dk :10〜30A/dm2 時間:2〜5秒 銅−ニッケル合金めっきは、電解めっきにより、付着量
が15〜40mg/dm2 銅−100〜900μg/d
2 ニッケルであるような2元系合金層を形成するよう
に実施される。Ni付着量が100μg/dm2 未満で
あると、耐熱性が悪くなる。他方、Ni付着量が900
μg/dm2 を超えると、エッチング残が多くなる。た
だし、Ni付着量が500μg/dm2 を超えると、エ
ッチング性が低下する傾向がある。すなわち、エッチン
グ残ができたり、エッチングできないというレベルでは
ないが、ファインパターン化が難しくなる。好ましいニ
ッケル付着量は200〜400μg/dm2 である。
A general bath for forming a Cu—Ni alloy as a roughening treatment for a glossy surface of an electrolytic copper foil in the present invention is as follows:
It is as follows: (copper-nickel alloy plating) Cu: 5 to 10 g / liter Ni: 10 to 20 g / liter pH: 1 to 4 Temperature: 20 to 40 ° C. Current density D k : 10 to 30 A / dm 2 hours : 2 to 5 seconds Copper-nickel alloy plating has an adhesion amount of 15 to 40 mg / dm 2 copper-100 to 900 μg / d by electrolytic plating.
Implemented to form a binary alloy layer such as m 2 nickel. If the amount of Ni attached is less than 100 μg / dm 2 , the heat resistance becomes poor. On the other hand, the Ni adhesion amount is 900
If it exceeds μg / dm 2 , the etching residue increases. However, when the Ni adhesion amount exceeds 500 μg / dm 2 , the etching property tends to decrease. That is, it is not at a level that an etching residue can be formed or cannot be etched, but it is difficult to form a fine pattern. A preferable nickel deposition amount is 200 to 400 μg / dm 2 .

【0013】3元系銅−コバルト−ニッケル合金めっき
を形成するための一般的浴及びめっき条件は次の通りで
ある: (銅−コバルト−ニッケル合金めっき) Cu:10〜20g/リットル Co:1〜10g/リットル Ni:1〜10g/リットル pH:1〜4 温度:40〜50℃ 電流密度Dk :20〜30A/dm2 時間:1〜5秒
The general bath and plating conditions for forming the ternary copper-cobalt-nickel alloy plating are as follows: (copper-cobalt-nickel alloy plating) Cu: 10-20 g / liter Co: 1 Ni: 1 to 10 g / liter pH: 1 to 4 Temperature: 40 to 50 ° C. Current density D k : 20 to 30 A / dm 2 hours: 1 to 5 seconds

【0014】銅−コバルト−ニッケル合金めっきは、電
解めっきにより、付着量が15〜40mg/dm2 銅−
100〜3000μg/dm2 コバルト−100〜90
0μg/dm2 ニッケルであるような3元系合金層を形
成するように実施される。Co付着量が100μg/d
2 未満では、耐熱性が悪化し、エッチング性が悪くな
る。Co付着量が3000μg/dm2 を超えると、磁
性の影響を考慮せねばならない場合には好ましくなく、
エッチングシミが生じ、また、耐酸性及び耐薬品性の悪
化が考慮されうる。Ni付着量が100μg/dm2
満であると、耐熱性が悪くなる。他方、Ni付着量が9
00μg/dm2 を超えると、エッチング残が多くな
る。ただし、Ni付着量が500μg/dm2 を超える
と、エッチング性が低下する傾向がある。すなわち、エ
ッチング残ができたり、エッチングできないというレベ
ルではないが、ファインパターン化が難しくなる。好ま
しいCo付着量は2000〜3000μg/dm2 であ
り、そして好ましいニッケル付着量は200〜400μ
g/dm2 である。ここで、エッチングシミとは、塩化
銅でエッチングした場合、Coが溶解せずに残ってしま
うことを意味しそしてエッチング残とは塩化アンモニウ
ムでアルカリエッチングした場合、Niが溶解せずに残
ってしまうことを意味するものである。
The copper-cobalt-nickel alloy plating has a coating amount of 15 to 40 mg / dm 2
100-3000 μg / dm 2 cobalt-100-90
It is performed to form a ternary alloy layer such as 0 μg / dm 2 nickel. Co adhesion amount is 100 μg / d
If it is less than m 2 , the heat resistance will deteriorate and the etching properties will deteriorate. If the Co deposition amount exceeds 3000 μg / dm 2 , it is not preferable when the influence of magnetism must be considered,
Etching spots may occur and acid and chemical resistance degradation may be considered. If the amount of Ni attached is less than 100 μg / dm 2 , the heat resistance becomes poor. On the other hand, when the Ni adhesion amount is 9
If it exceeds 00 μg / dm 2 , the etching residue increases. However, when the Ni adhesion amount exceeds 500 μg / dm 2 , the etching property tends to decrease. That is, it is not at a level that an etching residue can be formed or cannot be etched, but it is difficult to form a fine pattern. The preferred Co coverage is 2000-3000 μg / dm 2 and the preferred nickel coverage is 200-400 μg.
g / dm 2 . Here, the etching stain means that when etched with copper chloride, Co remains without dissolving, and when the etching residue is alkali-etched with ammonium chloride, Ni remains without dissolving. It means that.

【0015】一方、通常、剥離強度を向上させることを
目的に、銅箔の粗化面には、例えば銅または銅酸化物の
瘤状の電着を行う粗化処理が施される。こうした瘤状の
電着はいわゆるヤケ電着により容易にもたらされる。粗
化面への粗化処理を行うための一般浴は次の通りであ
る: (銅−砒素合金めっき) Cu:10〜50g/リットル H2 SO4 :50〜150g/リットル As:1〜10g/リットル 温度:20〜40℃ 電流密度:10〜100A/dm2 時間:1〜5秒 上記の粗化処理を施された粗化面にCu−Zn合金(黄
銅)から成る被覆層を形成する。黄銅めっきの電解条件
は次の通りである: (銅−亜鉛合金めっき) NaCN:10〜30g/リットル NaOH:40〜100g/リットル Cu:60〜120g/リットル Zn:1〜10g/リットル 温度:60〜80℃ 電流密度:1〜10A/dm2 時間:1〜10秒 この場合、樹脂基材に積層した場合に樹脂層のシミがほ
とんどなく、高温加熱後の剥離強度の劣化が少ない等の
特性を低下させることなく、且つ回路浸食現象を完全に
防止するためには、亜鉛含有量が30%以下の黄銅から
なる被覆層を電気量30As/dm2 以上で形成するこ
とが肝要である。電気量が30As/dm2 以上でも亜
鉛含有量が30%を超える場合には回路浸食現象を回避
できず、そして電気量が30As/dm2 未満のときに
は亜鉛の含有量に関係なく、回路浸食現象を完全に防止
することはできない。すなわち、電気量30As/dm
2以上及び亜鉛含有量30%以下という両方の条件を満
足しなければ、回路浸食現象を完全に防止することがで
きない。また、電気量が30As/dm2 以上の場合、
亜鉛含有量の下限については特に制限はないが、回路浸
食現象防止以外の特性(例えば耐熱性等)を考慮に入れ
て総合的に判断すると、亜鉛含有量は15%以上、好ま
しくは20%以上であることが望ましい。
On the other hand, for the purpose of improving the peel strength, the roughened surface of the copper foil is usually subjected to a roughening treatment for performing electrodeposition in the form of copper or copper oxide bumps. Such knob-like electrodeposition is easily brought about by so-called burnt electrodeposition. General bath for performing roughening treatment to the roughened surface are as follows: (a copper - arsenic alloy plating) Cu: 10 to 50 g / l H 2 SO 4: 50~150g / l As: 1 to 10 g / Liter Temperature: 20 to 40 ° C Current density: 10 to 100 A / dm 2 hours: 1 to 5 seconds A coating layer made of a Cu—Zn alloy (brass) is formed on the roughened surface subjected to the above roughening treatment. . The electrolysis conditions of the brass plating are as follows: (copper-zinc alloy plating) NaCN: 10 to 30 g / liter NaOH: 40 to 100 g / liter Cu: 60 to 120 g / liter Zn: 1 to 10 g / liter Temperature: 60 -80 ° C Current density: 1-10 A / dm 2 hours: 1-10 seconds In this case, when laminated on a resin base material, there is almost no stain on the resin layer, and there is little deterioration in peel strength after high-temperature heating. It is important to form a coating layer made of brass having a zinc content of 30% or less at an electric quantity of 30 As / dm 2 or more in order to completely prevent the circuit erosion phenomenon without lowering the electric current. Even if the amount of electricity is 30 As / dm 2 or more, the circuit erosion cannot be avoided if the zinc content exceeds 30%, and if the amount of electricity is less than 30 As / dm 2 , regardless of the zinc content, the circuit erosion occurs. Cannot be completely prevented. That is, electric quantity 30 As / dm
Unless both the conditions of 2 or more and zinc content of 30% or less are not satisfied, the circuit erosion phenomenon cannot be completely prevented. When the amount of electricity is 30 As / dm 2 or more,
Although the lower limit of the zinc content is not particularly limited, the zinc content is 15% or more, preferably 20% or more when comprehensively determined taking into account characteristics other than circuit erosion prevention (eg, heat resistance). It is desirable that

【0016】この後、必要に応じ、銅箔の少なくとも一
面に防錆処理が実施される。本発明において好ましい防
錆処理は、Cr系防錆処理であり、浸漬クロメート処理
や電解クロメート処理を含めてクロム酸化物単独の皮膜
処理或いはクロム酸化物と亜鉛/亜鉛酸化物との混合物
皮膜処理である。クロム酸化物と亜鉛/亜鉛酸化物との
混合物皮膜処理とは、亜鉛塩または酸化亜鉛とクロム酸
塩とを含むめっき浴を用いて電気めっきにより亜鉛また
は酸化亜鉛とクロム酸化物とより成る亜鉛−クロム基混
合物の防錆層を被覆する処理である。めっき浴として
は、代表的には、K2Cr2O7 、Na2Cr2O7等の重クロム酸塩
やCrO3等の少なくとも一種と、水溶性亜鉛塩、例えばZn
O 、ZnSO4 ・7H2O等少なくとも一種と、水酸化アルカリ
との混合水溶液が用いられる。代表的なCr系防錆処理
めっき浴組成と電解条件例は次の通りである: (クロム防錆処理1): K2 Cr27 (或いはNa2 Cr27 、CrO
3 ):0.2〜20g/l 酸:りん酸あるいは硫酸、有機酸 pH:1.0〜3.5 浴温度:20〜40℃ 電流密度:0.1〜0.5A/dm2 時間:10〜60秒 陽極:鉛板、Pt−Ti板、ステンレス鋼板 クロム酸化物付着量はクロム量として50μg /dm2
下で充分であり、好ましくは15〜30μg /dm2 とさ
れる。クロム量が30μg /dm2 を超えると防錆力は向
上するがエッチング性が低下する。 (クロム防錆処理2) K2Cr2O7 (Na2Cr2O7或いはCrO3):2〜10g/リットル NaOH或いはKOH :10〜50g/リットル ZnO 或いはZnSO4 ・7H2O:0.05〜10g/リットル pH:7〜13 浴温:20〜80℃ 電流密度Dk :0.05〜5A/dm2 時間:5〜30秒 アノード:Pt-Ti 板、ステンレス鋼板等 クロム酸化物はクロム量として15μg/dm2 以上そ
して亜鉛は30μg/dm2 以上の被覆量が要求され
る。
Thereafter, at least one surface of the copper foil is subjected to a rust prevention treatment as required. The preferred rust preventive treatment in the present invention is a Cr-based rust preventive treatment, which includes a coating treatment of chromium oxide alone or a mixture of chromium oxide and zinc / zinc oxide, including immersion chromate treatment and electrolytic chromate treatment. is there. The coating treatment of a mixture of chromium oxide and zinc / zinc oxide refers to zinc-containing zinc or zinc oxide and chromium oxide by electroplating using a plating bath containing zinc salt or zinc oxide and chromate. This treatment covers the rust-preventive layer of the chromium-based mixture. As the plating bath, typically, at least one of dichromates such as K 2 Cr 2 O 7 and Na 2 Cr 2 O 7 and CrO 3 and a water-soluble zinc salt such as Zn
A mixed aqueous solution of at least one of O 2 , ZnSO 4 .7H 2 O, and an alkali hydroxide is used. A typical Cr-based anti-rust plating bath composition and examples of electrolysis conditions are as follows: (Chromium anti-rust treatment 1): K 2 Cr 2 O 7 (or Na 2 Cr 2 O 7 , CrO)
3 ): 0.2 to 20 g / l Acid: phosphoric acid or sulfuric acid, organic acid pH: 1.0 to 3.5 Bath temperature: 20 to 40 ° C. Current density: 0.1 to 0.5 A / dm 2 hours: 10-60 seconds anode: lead plates, Pt-Ti plate, stainless steel plate chromium oxide coating weight is sufficient 50 [mu] g / dm 2 or less as the amount of chromium, and preferably from 15~30μg / dm 2. If the amount of chromium exceeds 30 μg / dm 2 , the rust-preventing power is improved, but the etching property is lowered. (Chromium anticorrosive treatment 2) K 2 Cr 2 O 7 (Na 2 Cr 2 O 7 or CrO 3): 2~10g / liter NaOH or KOH: 10 to 50 g / liter ZnO or ZnSO 4 · 7H 2 O: 0 . PH: 7 to 13 Bath temperature: 20 to 80 ° C. Current density D k : 0.05 to 5 A / dm 2 hours: 5 to 30 seconds Anode: Pt-Ti plate, stainless steel plate, etc. Chromium oxide A coating amount of 15 μg / dm 2 or more for chromium and 30 μg / dm 2 or more for zinc is required.

【0017】こうして得られた銅箔は、好ましくは、
0.05〜0.2μmの範囲の表面粗さを有するものと
される。0.2μmを超えると接着強度が大きくなるも
のの、エッチング残が発生する等ファインパターン用と
して好ましくない。0.05μm未満の場合には接着強
度が弱くなる。
The copper foil thus obtained is preferably
It has a surface roughness in the range of 0.05 to 0.2 μm. If the thickness exceeds 0.2 μm, the adhesive strength is increased, but it is not preferable for fine patterns, for example, etching residue is generated. If it is less than 0.05 μm, the adhesive strength will be weak.

【0018】本発明による電解銅箔は、優れた耐熱性剥
離強度、耐酸化性及び耐塩酸性を有し、色調は黒であ
る。しかも、銅−コバルト−ニッケル合金めっきの場合
は、CuCl2 エッチング液で150μmピッチ回路巾
以下の印刷回路をエッチングでき、しかもアルカリエッ
チングも可能とする。アルカリエッチング液としては、
例えば、NH4OH:6モル/リットル; NH4Cl:5モル/リッ
トル;CuCl2:2モル/リットル(温度50℃)等の液が
知られている。
The electrolytic copper foil according to the present invention has excellent heat-resistant peel strength, oxidation resistance and hydrochloric acid resistance, and has a black color. In addition, in the case of copper-cobalt-nickel alloy plating, a printed circuit having a circuit width of 150 μm or less can be etched with a CuCl 2 etching solution, and alkali etching can be performed. As the alkaline etchant,
For example, liquids such as NH 4 OH: 6 mol / liter; NH 4 Cl: 5 mol / liter; and CuCl 2 : 2 mol / liter (temperature: 50 ° C.) are known.

【0019】[0019]

【実施例】以下に、実施例及び比較例を呈示する。粗化
面に銅−砒素による粗化処理後、黄銅めっきを施した電
解銅箔(JTC:日鉱グールド・フォイル株式会社製)
の光沢面に対して下記に示す条件範囲で粗化処理を施し
た: (サンプル1:比較例)従来からの砒素を含む例とし
て、硫酸銅(5水塩)100g/l、硫酸100g/l
及び砒酸3g/lを含む水溶液を30℃で電解浴として
使用し、厚さ70μmの電解銅箔の光沢面に電流密度2
0A/dm2 で10秒間めっきした。 (サンプル2:比較例)次の条件で銅めっきを行った: Cu:15g/リットル H2 SO4 :50g/リットル pH:3 温度:30℃ 電流密度Dk :50A/dm2 時間:3秒 (サンプル3:実施例)次の条件でCu−Co−Niめ
っきを行った: Cu:15g/リットル Co:5g/リットル Ni:5g/リットル pH:3 温度:45℃ 電流密度Dk :25A/dm2 時間:3秒 (サンプル4:実施例)次の条件でCu−Niめっきを
行った: Cu:7g/リットル Ni:15g/リットル pH:3 温度:32℃ 電流密度Dk :20A/dm2 時間:3秒
EXAMPLES Examples and comparative examples will be described below. Electrolytic copper foil (JTC: manufactured by Nikko Gould Foil Co., Ltd.) with a roughened surface roughened with copper-arsenic and plated with brass
The rough surface was subjected to a roughening treatment under the following condition range: (Sample 1: Comparative Example) As a conventional example containing arsenic, copper sulfate (pentahydrate) 100 g / l, sulfuric acid 100 g / l
And an aqueous solution containing 3 g / l of arsenic acid at 30 ° C. as an electrolytic bath.
Plating was performed at 0 A / dm 2 for 10 seconds. (Sample 2: Comparative Example) Copper plating was performed under the following conditions: Cu: 15 g / liter H 2 SO 4 : 50 g / liter pH: 3 Temperature: 30 ° C. Current density D k : 50 A / dm 2 hours: 3 seconds (Sample 3: Example) Cu-Co-Ni plating was performed under the following conditions: Cu: 15 g / liter Co: 5 g / liter Ni: 5 g / liter pH: 3 Temperature: 45 ° C. Current density D k : 25 A / dm 2 hours: 3 seconds (Sample 4: Example) Cu-Ni plating was performed under the following conditions: Cu: 7 g / liter Ni: 15 g / liter pH: 3 Temperature: 32 ° C. Current density D k : 20 A / dm 2 hours: 3 seconds

【0020】これらサンプルについて、クロメート防錆
処理後、サンプルをガラスクロス基材エポキシ樹脂板に
積層接着し、剥離強度(kg/cm)、耐熱剥離強度劣
化率(%):180℃×2日間、耐塩酸性劣化率
(%):18容積%塩酸水溶液に室温で1時間浸漬、表
面粗さ、色調、耐酸化性:180℃×30分ベーキング
(目視にて判定)、及び付着量を調べた。
For these samples, after chromate rust prevention treatment, the samples were laminated and adhered to a glass cloth base epoxy resin plate, and the peel strength (kg / cm) and the heat peel strength deterioration rate (%): 180 ° C. × 2 days, Hydrochloric acid resistance deterioration rate (%): immersed in 18% by volume hydrochloric acid aqueous solution at room temperature for 1 hour, surface roughness, color tone, oxidation resistance: baking (determined visually) at 180 ° C. for 30 minutes, and adhesion amount were examined.

【0021】結果を表1、表2及び表3に示す。The results are shown in Tables 1, 2 and 3.

【0022】[0022]

【表1】 [Table 1]

【0023】[0023]

【表2】 [Table 2]

【0024】[0024]

【表3】 [Table 3]

【0025】サンプル1は、粗化作用が強いため剥離強
度が高かったが、耐塩酸性が他に比べて悪い結果となっ
た。また、砒素の使用は環境上好ましくない。サンプル
1及び2は良好な耐熱性は得られず、またエージングに
より著しく変色した。耐熱性の低下は銅が界面に移行
し、エポキシ接着剤を分解するためと推定される。サン
プル3及び4は良好な耐熱性及び耐酸化性を示した。こ
れは、合金化により銅の拡散が抑えられているためと考
えられる。
Sample 1 had a high peeling strength due to a strong roughening effect, but had poor hydrochloric acid resistance as compared with the others. Also, the use of arsenic is environmentally unfavorable. In Samples 1 and 2, good heat resistance was not obtained, and discoloration was remarkable due to aging. The decrease in heat resistance is presumed to be due to the migration of copper to the interface and the decomposition of the epoxy adhesive. Samples 3 and 4 exhibited good heat and oxidation resistance. This is presumably because the diffusion of copper was suppressed by alloying.

【0026】[0026]

【発明の効果】粗化面側を通常処理した電解銅箔の光沢
面にCu−Ni合金又はCu−Co−Ni合金から成る
粗化処理層を設けることにより、耐熱性及び耐酸化性に
優れた印刷回路用銅箔、特には多層プリント配線板の内
層用電解銅箔としての使用に適した電解銅箔が得られ
る。
By providing a roughened surface layer made of a Cu-Ni alloy or a Cu-Co-Ni alloy on the glossy surface of an electrolytic copper foil whose roughened surface is normally treated, excellent heat resistance and oxidation resistance are obtained. Thus, an electrolytic copper foil suitable for use as a copper foil for a printed circuit, particularly an electrolytic copper foil for an inner layer of a multilayer printed wiring board can be obtained.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 光沢面にCu−Ni合金又はCu−Co
−Ni合金から成る粗化処理層を設けたことを特徴とす
る電解銅箔。
1. A glossy surface made of a Cu—Ni alloy or Cu—Co
-An electrolytic copper foil provided with a roughening layer made of a Ni alloy.
【請求項2】 粗化面にCu−Zn合金から成る被覆層
を設けたことを特徴とする請求項1記載の電解銅箔。
2. The electrolytic copper foil according to claim 1, wherein a coating layer made of a Cu—Zn alloy is provided on the roughened surface.
【請求項3】 Cr系防錆層を少なくとも一面に更に有
する請求項1又は2記載の電解銅箔。
3. The electrolytic copper foil according to claim 1, further comprising a Cr-based antirust layer on at least one surface.
JP18696996A 1996-06-28 1996-06-28 Electrolytic copper foil Expired - Lifetime JP3295308B2 (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Publications (2)

Publication Number Publication Date
JPH1018075A true JPH1018075A (en) 1998-01-20
JP3295308B2 JP3295308B2 (en) 2002-06-24

Family

ID=16197901

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